CN110549316B - Waterproof type cleaning robot - Google Patents
Waterproof type cleaning robot Download PDFInfo
- Publication number
- CN110549316B CN110549316B CN201810562785.XA CN201810562785A CN110549316B CN 110549316 B CN110549316 B CN 110549316B CN 201810562785 A CN201810562785 A CN 201810562785A CN 110549316 B CN110549316 B CN 110549316B
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- Prior art keywords
- arm
- large arm
- connecting cylinder
- joint connecting
- joint
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- 238000004140 cleaning Methods 0.000 title claims abstract description 16
- 210000000245 forearm Anatomy 0.000 claims description 30
- 239000003638 chemical reducing agent Substances 0.000 claims description 15
- 238000009826 distribution Methods 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000428 dust Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 3
- 235000017491 Bambusa tulda Nutrition 0.000 description 3
- 241001330002 Bambuseae Species 0.000 description 3
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 3
- 239000011425 bamboo Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 241000463219 Epitheca Species 0.000 description 2
- 230000009194 climbing Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000013043 chemical agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
- 238000004078 waterproofing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0075—Means for protecting the manipulator from its environment or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention relates to a waterproof cleaning robot, wherein a rotary cylinder is rotatably arranged on a base, one end of a large arm is connected with the rotary cylinder, the other end of the large arm is provided with a joint driving device, one end of a joint connecting cylinder is relatively rotatably inserted into the other end of the large arm and is connected with the joint driving device, and the other end of the joint connecting cylinder is inserted into one end of a small arm; the large arm rotates along with the rotating cylinder, and the joint connecting cylinder and the small arm have freedom degrees rotating along with the large arm and also have autorotation freedom degrees; the large arm air supply pipelines are spirally wound on the joint connecting cylinder, one end of each large arm air supply pipeline is communicated with the inside of the rotary cylinder, the other end of each large arm air supply pipeline is inserted into the joint connecting cylinder and is communicated with a shunting disc arranged in the joint connecting cylinder, the number of the small arm air supply pipelines is multiple, and one end of each small arm air supply pipeline is connected to the shunting disc; a plurality of air cavities are uniformly distributed between the other end of the large arm and one end of the small arm along the circumferential direction, and each air cavity is communicated with the other end of one small arm air supply pipeline. The invention has good waterproof effect, is clean and dustless and improves the dynamic performance of the robot.
Description
Technical Field
The invention relates to a robot in the industries of cleaning, flat panel display and integrated circuit, in particular to a waterproof cleaning robot.
Background
Flat Panel Displays (FPDs) are another large industry that has been developed following Integrated Circuits (ICs). The glass substrate is one of the key basic materials of the FPD industry, and the manufacturing process of the FPD industry requires high automation and no humanization. Therefore, a transfer robot is introduced into the FPD industry, achieving smooth transfer and accurate positioning of the glass substrate.
The glass substrate carrying robot has a plurality of stations and needs to be waterproof, and the protection grade IP54 (5 'represents that foreign objects are completely prevented from entering, although dust cannot be completely prevented from entering, the entering amount of the dust cannot influence the normal operation of an electric appliance, and 4' represents that water splashed in all directions is prevented from entering the electric appliance to cause damage) contains various corrosion chemical agents of the process to the water splashed by the robot. The conventional technology is waterproof rings, but special industries require special structures. The waterproof and clean (dust-free) functions are guaranteed. In the regions with and without water, dust can be produced after drying; the robot joint can rub and generate dust by using conventional contact sealing; the conventional contact sealing for the robot joint can generate random joint resistance, and further influences the dynamic service performance of the robot.
Disclosure of Invention
The invention aims to provide a waterproof cleaning robot in order to meet the requirements of waterproofing and cleaning (dust-free) of the robot. The inside environment that contains the corrosive liquids that splashes of robot joint of this waterproof type clean robot carries out physical isolation with the outside, when satisfying the robot basic function, reaches waterproof, clean (dustless) and the purpose that promotes the dynamic behavior of robot.
The purpose of the invention is realized by the following technical scheme:
the invention comprises a base, a rotary cylinder, a large arm, a small arm, a joint connecting cylinder, a joint driving device and an internal air supply subsystem, wherein the rotary cylinder is rotatably arranged on the base; the joint connecting cylinder and the small arm have freedom degrees rotating along with the large arm, and also have autorotation freedom degrees driven by the joint driving device; the internal gas supply subsystem comprises a large arm gas supply pipeline, a flow distribution disc and a small arm gas supply pipeline, the large arm gas supply pipeline is spirally wound on the joint connecting cylinder, one end of the large arm gas supply pipeline is communicated with the inside of the rotary cylinder to obtain high-pressure clean gas in the rotary cylinder, the other end of the large arm gas supply pipeline is inserted into the joint connecting cylinder and is communicated with the flow distribution disc arranged in the joint connecting cylinder, the number of the small arm gas supply pipelines is multiple, and one end of each small arm gas supply pipeline is connected to the flow distribution disc; a plurality of air cavities are uniformly distributed between the other end of the large arm and one end of the small arm along the circumferential direction, and each air cavity is communicated with the other end of one small arm air supply pipeline; high-pressure clean gas is conveyed into the flow distribution disc through the large arm gas supply pipeline and conveyed to each gas cavity through the flow distribution disc through each small arm gas supply pipeline, and corrosive liquid drops splashed by the external space of the robot are prevented from permeating into the internal space of the robot through the high-pressure clean gas in each gas cavity;
wherein: the other end of the big arm is provided with a hole for the joint connecting cylinder to penetrate through, and the edge of the hole extends outwards along the axial direction to form a waterproof ring; one end of the small arm is provided with a lower cover positioned on the periphery of the waterproof ring, the inner surface of the lower cover is uniformly distributed with a plurality of baffles along the circumferential direction, and each baffle, the waterproof ring and the lower cover form a plurality of air cavities uniformly distributed along the circumferential direction;
the air cavities are the same in number with the small arm air supply pipelines and are in one-to-one correspondence, and the other end of each small arm air supply pipeline penetrates out of the small arm above the corresponding air cavity and is communicated with the corresponding air cavity;
the large arm is of an internal hollow structure and comprises a large arm upper shell and a large arm lower shell which are connected with each other, one end of the large arm lower shell is connected with the rotary cylinder, and the joint driving device is arranged at the other end of the large arm lower shell;
the small arm is of an internal hollow structure and comprises a small arm upper shell and a small arm lower shell which are connected with each other, and the other end of the joint connecting cylinder is penetrated through by the small arm lower shell and is connected with the small arm upper shell;
the joint driving device comprises a driving motor and a speed reducer, the driving motor is installed at the other end of the large arm and located outside the large arm, the speed reducer is installed at the other end of the large arm and located inside the large arm, a motor shaft of the driving motor is connected with an input end of the speed reducer, and an output end of the speed reducer is connected with one end of the joint connecting cylinder.
The invention has the advantages and positive effects that:
1. the invention adopts non-contact waterproof, has good joint dynamic performance, saves energy and reduces emission; and the waterproof and non-contact air flow control is adopted, so that the requirement of clean application can be met.
2. The annular connecting port between the large arm and the small arm is divided into a plurality of air cavities, each air cavity is communicated with high-pressure clean air flow, and the internal pressure of the air cavities is higher than the external space of the robot, so that waterproof double insurance is formed.
3. The structure of the invention has strong reproducibility, can be applied to a multi-joint form and has lower technical threshold.
Drawings
FIG. 1 is a sectional view showing the internal structure of the present invention;
FIG. 2 is a schematic perspective view of the present invention;
FIG. 3 is an enlarged view of a portion of the upper arm, lower arm and articulation joint connection of FIG. 1;
FIG. 4 is an exploded view of the present invention;
FIG. 5 is an enlarged view of a portion of FIG. 4 at A;
wherein: 1 is axis A, 2 is the base, 3 is a rotatory section of thick bamboo, 4 is big arm inferior valve, 5 is big arm epitheca, 6 is axis B, 7 is driving motor, 8 is the speed reducer, 9 is big arm inner chamber space, 10 is the joint connecting cylinder, 11 is forearm inner chamber space, 12 is the robot exterior space, 13 is the forearm inferior valve, 14 is the forearm epitheca, 15 is forearm gas supply line, 16 is the flow distribution disc, 17 is big arm gas supply line, 18 is waterproof ring, 19 is the baffle, 20 is the lower cover.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1 to 5, the present invention comprises a base 2, a rotary cylinder 3, a large arm, a small arm, a joint connecting cylinder 10, a joint driving device and an internal air supply subsystem, wherein the base is fixed and stationary, and the rotary cylinder 3 is rotatably mounted on the base 2 and can rotate around an axis a1 relative to the base 2. One end of the big arm is connected with the rotary cylinder 3, the other end is provided with a joint driving device, one end of the joint connecting cylinder 10 can be relatively rotatably inserted into the other end of the big arm and is connected with the joint driving device, the other end of the joint connecting cylinder 10 is inserted into one end of the small arm, and the other end of the small arm is a free end. The large arm rotates along with the rotary cylinder 3, and the joint connecting cylinder 10 and the small arm have a degree of freedom of rotation along with the large arm and also have a degree of freedom of rotation by the drive of the joint drive device.
The big arm is an internal hollow structure and comprises a big arm upper shell 5 and a big arm lower shell 4 which are connected with each other, one end of the big arm lower shell 4 is connected with the rotary cylinder 3, and the joint driving device is arranged at the other end of the big arm lower shell 4. The forearm is an internal hollow structure and comprises an upper forearm shell 14 and a lower forearm shell 13 which are connected with each other, and the other end of the joint connecting cylinder 10 is penetrated by the lower forearm shell 13 and is connected with the upper forearm shell 14. The joint driving device comprises a driving motor 7 and a speed reducer 8, a flange of the driving motor 7 is mounted at the other end of the large-arm lower shell 4 and is located outside the large arm, the speed reducer 8 is mounted at the other end of the large-arm lower shell 4 and is located inside the large arm, a motor shaft of the driving motor 7 is connected with an input end of the speed reducer 8, and an output end of the speed reducer 8 is connected with one end of the joint connecting cylinder 10. The driving motor 7 drives the speed reducer 8 to rotate the small arm upper shell 14 around the axis B6 relative to the large arm lower shell 4. The lower part of the large arm lower shell 4, the large arm upper shell 5, the driving motor 7, the speed reducer 8 and the joint connecting cylinder 10 form a semi-closed large arm inner cavity space 9. The forearm lower shell 13, the forearm upper shell 14 and the upper part of the joint connecting cylinder 10 form a semi-closed forearm inner cavity space 11. The two semi-closed structures of the small arm inner cavity space 11 and the large arm inner cavity space 9 share an annular connecting port communicated with the robot outer space 12, namely an annular connecting port communicated with the robot outer space 12 around an axis B6 between the other end of the large arm upper shell 5 and one end of the small arm lower shell 13.
Inside air feed subsystem includes big arm air feed line 17, flow distribution disc 16 and forearm air feed line 15, the flexible spiral winding of big arm air feed line 17 is on the surface of joint connecting cylinder 10, one end is linked together with rotatory section of thick bamboo 3 is inside, obtain high pressure (4.5 ~ 5.5bar) clean gas (through the dewatering, the deoiling, the compressed air of the 10 grades of cleanliness factor of dust removal) at rotatory section of thick bamboo 3, big arm air feed line 17's the other end inserts inside joint connecting cylinder 10, and be linked together with the lower extreme that sets up flow distribution disc 16 in joint connecting cylinder 10. The large arm air supply duct 17 can flexibly compensate for the angular position difference of the large arm and the small arm about the axis B6. The number of the small arm air supply pipelines 15 is multiple, one end of each small arm air supply pipeline 15 is inserted into the joint connecting cylinder 10 and is respectively connected to the upper end of the diverter disc 16, and each small arm air supply pipeline 15 is connected to obtain airflow with a certain flow rate; the other end of each arm air supply duct 15 is connected to the arm lower case 13, respectively, and delivers the distributed airflow to the robot external space 12 through the arm lower case 13. The other end of the upper shell 5 is provided with a hole for the joint connecting cylinder 10 to penetrate through, and the edge of the hole extends outwards along the axial direction to form a waterproof ring 18. The lower surface of one end of forearm inferior valve 13 is equipped with and is located waterproof ring 18 outlying lower cover 20, and the internal surface of this lower cover 20 has a plurality of baffles 19 along the circumferencial direction equipartition, and each baffle 19 forms a plurality of air cavity along the circumferencial direction equipartition with waterproof ring 18 and lower cover 20, and every air cavity all communicates with the other end of a forearm gas supply line 15. The number of the air cavities is the same as that of the forearm air supply pipelines 15, and the air cavities correspond to the number of the forearm air supply pipelines 15 one by one (the number of the air cavities and the number of the forearm air supply pipelines 15 are both 12 in the embodiment), and the other end of each forearm air supply pipeline 15 penetrates out of the corresponding lower forearm shell 13 above the air cavity and is communicated with the corresponding air cavity.
The rotary cylinder 3 of the invention is of a hollow structure and is used for connecting a flexible cable between a large arm and a small arm. At least one hole is arranged between the rotary drum 3 and the semi-closed large arm inner cavity space 9 and is used for connecting a flexible cable between the large arm and the small arm. At least one hole is arranged between the rotary cylinder 3 and the semi-closed small arm cavity space 11 and is used for connecting a flexible cable between the large arm and the small arm. The flexible cable not only contains the trachea, but also can contain power or code wheel electric cables.
The working principle of the invention is as follows:
high-pressure clean gas is carried to flow distribution disc 16 through big arm gas supply line 17 in to evenly carry to every air cavity through this flow distribution disc 16 through each forearm gas supply line 15, each air cavity evenly cuts apart annular connector, and the internal pressure of every air cavity all is higher than robot exterior space 12, prevents that the corrosive liquids that robot exterior space 12 splashes from permeating between big arm and the forearm and getting into forearm inner chamber space 11 and big arm inner chamber space 9.
The large arm of the invention can rotate around the axis A1 along with the rotating cylinder 3 relative to the base 2, and the waterproof ring without air flow control can climb against gravity due to the inertia force and the adhesion force of corrosive liquid drops splashed by the outer space 12 of the robot, and then cross the waterproof ring and enter the inner cavity space of the large arm. The other end of the large arm upper case 5 of the present invention has a plurality of air chambers evenly divided around the axis B6. High-pressure clean gas is introduced into the gas cavity. The high pressure cleaning gas is used to prevent corrosive droplets splashed by the robot outer space 12 from penetrating into the large arm inner cavity space 9. High pressure clean gas is used to prevent corrosive droplets from climbing against gravity through the annular inlet.
One end of the lower forearm shell 13 of the invention is provided with a plurality of air cavities which are evenly divided around an axis B6 and are internally filled with high-pressure clean air. The high pressure cleaning gas is used to prevent corrosive liquid droplets splashed by the robot outer space 12 from penetrating into the forearm inner cavity space 11. High pressure clean gas is used to prevent corrosive droplets from climbing against gravity through the annular inlet.
Therefore, the corrosive liquid droplets splashed from the robot outer space 12 can be directed to the outer surface of the waterproof type cleaning robot of the present invention in any direction without penetrating into the inside of the robot.
The invention physically isolates the interior of the robot joint from the environment containing splashed corrosive liquid outside, and achieves the purposes of water resistance, cleanness (dust-free) of the robot joint and improvement of the dynamic performance of the robot while meeting the basic functions of the robot.
Claims (6)
1. The utility model provides a waterproof type cleaning robot which characterized in that: the joint device comprises a base (2), a rotary cylinder (3), a large arm, a small arm, a joint connecting cylinder (10), a joint driving device and an internal air supply subsystem, wherein the rotary cylinder (3) is rotatably installed on the base (2), one end of the large arm is connected with the rotary cylinder (3), the other end of the large arm is provided with the joint driving device, one end of the joint connecting cylinder (10) can be relatively rotatably inserted into the other end of the large arm and is connected with the joint driving device, the other end of the joint connecting cylinder (10) is inserted into one end of the small arm, and the other end of the small arm is a free end; the large arm rotates along with the rotating cylinder (3), the joint connecting cylinder (10) and the small arm have freedom degrees rotating along with the large arm, and the joint connecting cylinder and the small arm are driven by the joint driving device to have autorotation freedom degrees; the internal gas supply subsystem comprises a large arm gas supply pipeline (17), a flow distribution disc (16) and small arm gas supply pipelines (15), the large arm gas supply pipeline (17) is spirally wound on the joint connecting cylinder (10), one end of the large arm gas supply pipeline is communicated with the inside of the rotary cylinder (3), high-pressure clean gas is obtained in the rotary cylinder (3), the other end of the large arm gas supply pipeline (17) is inserted into the joint connecting cylinder (10) and is communicated with the flow distribution disc (16) arranged in the joint connecting cylinder (10), the small arm gas supply pipelines (15) are multiple, and one end of each small arm gas supply pipeline (15) is connected to the flow distribution disc (16); a plurality of air cavities are uniformly distributed between the other end of the large arm and one end of the small arm along the circumferential direction, and each air cavity is communicated with the other end of one small arm air supply pipeline (15); high-pressure clean gas is conveyed to the flow distribution disc (16) through the large arm gas supply pipeline (17) and conveyed to each gas cavity through the flow distribution disc (16) through each small arm gas supply pipeline (15), and corrosive liquid drops splashed by the robot outer space (12) are prevented from permeating into the robot inner space through the high-pressure clean gas in each gas cavity.
2. The waterproof type cleaning robot according to claim 1, wherein: the other end of the big arm is provided with a hole for the joint connecting cylinder (10) to penetrate through, and the edge of the hole extends outwards along the axial direction to form a waterproof ring (18); one end of the small arm is provided with a lower cover (20) which is positioned on the periphery of the waterproof ring (18), a plurality of baffles (19) are uniformly distributed on the inner surface of the lower cover (20) along the circumferential direction, and each baffle (19), the waterproof ring (18) and the lower cover (20) form a plurality of air cavities which are uniformly distributed along the circumferential direction.
3. The waterproof type cleaning robot according to claim 2, wherein: the number of the air cavities is the same as that of the small arm air supply pipelines (15), the air cavities correspond to the small arm air supply pipelines (15) one by one, and the other end of each small arm air supply pipeline (15) penetrates out of the small arm above the corresponding air cavity and is communicated with the corresponding air cavity.
4. The waterproof type cleaning robot according to claim 1, wherein: the large arm is of an internal hollow structure and comprises a large arm upper shell (5) and a large arm lower shell (4) which are connected with each other, one end of the large arm lower shell (4) is connected with the rotary cylinder (3), and the joint driving device is installed at the other end of the large arm lower shell (4).
5. The waterproof type cleaning robot according to claim 1, wherein: the forearm is an internal hollow structure and comprises a forearm upper shell (14) and a forearm lower shell (13) which are connected with each other, and the other end of the joint connecting cylinder (10) is penetrated by the forearm lower shell (13) and is connected with the forearm upper shell (14).
6. The waterproof type cleaning robot according to claim 1, wherein: the joint driving device comprises a driving motor (7) and a speed reducer (8), the driving motor (7) is installed at the other end of the large arm and located outside the large arm, the speed reducer (8) is installed at the other end of the large arm and located inside the large arm, a motor shaft of the driving motor (7) is connected with an input end of the speed reducer (8), and an output end of the speed reducer (8) is connected with one end of the joint connecting cylinder (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810562785.XA CN110549316B (en) | 2018-06-04 | 2018-06-04 | Waterproof type cleaning robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810562785.XA CN110549316B (en) | 2018-06-04 | 2018-06-04 | Waterproof type cleaning robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110549316A CN110549316A (en) | 2019-12-10 |
| CN110549316B true CN110549316B (en) | 2021-06-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810562785.XA Active CN110549316B (en) | 2018-06-04 | 2018-06-04 | Waterproof type cleaning robot |
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| Country | Link |
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| CN (1) | CN110549316B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1377510A (en) * | 1999-09-30 | 2002-10-30 | 拉姆研究公司 | Wafer atmospheric transport module having controlled mini-environment |
| EP1557245A1 (en) * | 2004-01-26 | 2005-07-27 | Shibuya Kogyo Co., Ltd | Isolator system with a robot in a sterile work chamber |
| CN102079094A (en) * | 2009-11-26 | 2011-06-01 | 鸿富锦精密工业（深圳）有限公司 | Robot structure |
| JP2014233771A (en) * | 2013-05-31 | 2014-12-15 | シンフォニアテクノロジー株式会社 | Multi-joint robot |
| CN106393077A (en) * | 2016-11-24 | 2017-02-15 | 上海交通大学 | Five-freedom-degree spraying robot |
| CN106493718A (en) * | 2016-12-12 | 2017-03-15 | 安徽零点精密机械有限责任公司 | SCARA robots |
| CN206953034U (en) * | 2017-06-05 | 2018-02-02 | 重庆盛学科技有限公司 | A kind of robot rotary work arm |
-
2018
- 2018-06-04 CN CN201810562785.XA patent/CN110549316B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1377510A (en) * | 1999-09-30 | 2002-10-30 | 拉姆研究公司 | Wafer atmospheric transport module having controlled mini-environment |
| EP1557245A1 (en) * | 2004-01-26 | 2005-07-27 | Shibuya Kogyo Co., Ltd | Isolator system with a robot in a sterile work chamber |
| CN102079094A (en) * | 2009-11-26 | 2011-06-01 | 鸿富锦精密工业（深圳）有限公司 | Robot structure |
| JP2014233771A (en) * | 2013-05-31 | 2014-12-15 | シンフォニアテクノロジー株式会社 | Multi-joint robot |
| CN106393077A (en) * | 2016-11-24 | 2017-02-15 | 上海交通大学 | Five-freedom-degree spraying robot |
| CN106493718A (en) * | 2016-12-12 | 2017-03-15 | 安徽零点精密机械有限责任公司 | SCARA robots |
| CN206953034U (en) * | 2017-06-05 | 2018-02-02 | 重庆盛学科技有限公司 | A kind of robot rotary work arm |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110549316A (en) | 2019-12-10 |
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Effective date of registration: 20231106 Address after: No.15-1 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province, 110169 Patentee after: Shenyang Xinsong Semiconductor Equipment Co.,Ltd. Address before: Hunnan New District Jinhui street in Shenyang of Liaoning province 110168 City No. 16 Patentee before: SHENYANG SIASUN ROBOT & AUTOMATION Co.,Ltd. |
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