CN110542455B - 一种压力/振动同步测量的htcc复合微传感器及其制备方法 - Google Patents
一种压力/振动同步测量的htcc复合微传感器及其制备方法 Download PDFInfo
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- CN110542455B CN110542455B CN201910878575.6A CN201910878575A CN110542455B CN 110542455 B CN110542455 B CN 110542455B CN 201910878575 A CN201910878575 A CN 201910878575A CN 110542455 B CN110542455 B CN 110542455B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/10—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in inductance, i.e. electric circuits therefor
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
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CN201910878575.6A CN110542455B (zh) | 2019-09-16 | 2019-09-16 | 一种压力/振动同步测量的htcc复合微传感器及其制备方法 |
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CN110542455A CN110542455A (zh) | 2019-12-06 |
CN110542455B true CN110542455B (zh) | 2021-11-05 |
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CN111024213B (zh) * | 2019-12-27 | 2021-03-30 | 安徽芯淮电子有限公司 | 柔性电容式振动传感器及其制作方法 |
Citations (7)
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CN103115704A (zh) * | 2013-01-25 | 2013-05-22 | 中北大学 | 高温压力传感器及其制备方法 |
CN103471653A (zh) * | 2013-09-06 | 2013-12-25 | 中北大学 | 基于共烧陶瓷技术的高温无线无源三参数集成传感器 |
CN103698060A (zh) * | 2013-12-25 | 2014-04-02 | 中北大学 | 带温度补偿的无线无源高温压力传感器及其温度补偿算法 |
CN105043605A (zh) * | 2015-07-06 | 2015-11-11 | 中北大学 | 一种基于htcc技术的无源压力敏感头 |
CN107085015A (zh) * | 2017-04-11 | 2017-08-22 | 中北大学 | 无线无源气体、温度双参数传感器及其制备方法 |
CN107702788A (zh) * | 2017-11-21 | 2018-02-16 | 中北大学 | 一种陶瓷高温振动传感器及其制备方法 |
CN108507621A (zh) * | 2018-05-18 | 2018-09-07 | 中国科学院上海硅酸盐研究所 | 基于ltcc的无源无线压力、温度集成传感器及其制备方法 |
Family Cites Families (4)
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US7239023B2 (en) * | 2003-09-24 | 2007-07-03 | Tai-Saw Technology Co., Ltd. | Package assembly for electronic device |
US20070161308A1 (en) * | 2006-01-12 | 2007-07-12 | North Carolina State University | Atmospheric pressure plasma-aided antimicrobial finishes of textiles |
KR100962040B1 (ko) * | 2008-04-07 | 2010-06-08 | 삼성전기주식회사 | 잉크젯 헤드 및 그 제조방법 |
DE102011112826B4 (de) * | 2011-05-23 | 2020-06-18 | Micro-Epsilon Messtechnik Gmbh & Co. Kg | Sensor und Verfahren zur Herstellung des Sensors |
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- 2019-09-16 CN CN201910878575.6A patent/CN110542455B/zh active Active
Patent Citations (7)
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CN103115704A (zh) * | 2013-01-25 | 2013-05-22 | 中北大学 | 高温压力传感器及其制备方法 |
CN103471653A (zh) * | 2013-09-06 | 2013-12-25 | 中北大学 | 基于共烧陶瓷技术的高温无线无源三参数集成传感器 |
CN103698060A (zh) * | 2013-12-25 | 2014-04-02 | 中北大学 | 带温度补偿的无线无源高温压力传感器及其温度补偿算法 |
CN105043605A (zh) * | 2015-07-06 | 2015-11-11 | 中北大学 | 一种基于htcc技术的无源压力敏感头 |
CN107085015A (zh) * | 2017-04-11 | 2017-08-22 | 中北大学 | 无线无源气体、温度双参数传感器及其制备方法 |
CN107702788A (zh) * | 2017-11-21 | 2018-02-16 | 中北大学 | 一种陶瓷高温振动传感器及其制备方法 |
CN108507621A (zh) * | 2018-05-18 | 2018-09-07 | 中国科学院上海硅酸盐研究所 | 基于ltcc的无源无线压力、温度集成传感器及其制备方法 |
Non-Patent Citations (3)
Title |
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Ceramic Pressure Sensor for High Temperatures – Investigation of the Effect of Metallization on Read Range;Peter Sturesson et.al;《IEEE Sensors Journal》;20170415;第17卷(第8期);第2411-2421页 * |
基于HTCC的新型薄膜高温压力传感器;王海星等;《微纳电子技术》;20180531;第55卷(第5期);第336页 * |
基于LTCC的无线无源双参数传感器;唐顺等;《传感技术与学报》;20170430;第30卷(第4期);第592-595页 * |
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