CN110541807A - single-valve double-cavity piezoelectric pump and working method thereof - Google Patents

single-valve double-cavity piezoelectric pump and working method thereof Download PDF

Info

Publication number
CN110541807A
CN110541807A CN201810533543.8A CN201810533543A CN110541807A CN 110541807 A CN110541807 A CN 110541807A CN 201810533543 A CN201810533543 A CN 201810533543A CN 110541807 A CN110541807 A CN 110541807A
Authority
CN
China
Prior art keywords
cavity
chamber
piezoelectric
valve
outflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810533543.8A
Other languages
Chinese (zh)
Inventor
不公告发明人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201810533543.8A priority Critical patent/CN110541807A/en
Publication of CN110541807A publication Critical patent/CN110541807A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • F04B53/102Disc valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B1/00Installations or systems with accumulators; Supply reservoir or sump assemblies
    • F15B1/02Installations or systems with accumulators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Details Of Reciprocating Pumps (AREA)

Abstract

The invention discloses a novel double-cavity piezoelectric pump which comprises a hydraulic circulating device and a piezoelectric driving device, wherein the hydraulic circulating device comprises a one-way valve and a cavity, an inflow cavity and an outflow cavity are arranged in the cavity, the one-way valve is arranged between the inflow cavity and the outflow cavity, the one-way valve realizes that fluid flows from the inflow cavity to the outflow cavity in a one-way mode, the piezoelectric driving device is externally connected with alternating current, and the piezoelectric driving device can adjust the pressure in the hydraulic circulating device. The piezoelectric pump structure adopts a single-valve design, and has higher reliability and convenient assembly compared with the current double-valve design and other structural designs; the fluid in the cavity flows more regularly, the backflow of the fluid is effectively prevented or reduced, and the pressure and flow output of the piezoelectric pump system are finally improved; under the condition of reducing the volume and the weight, the output performance of the pumped fluid can be effectively improved, and the pump has higher practicability.

Description

Single-valve double-cavity piezoelectric pump and working method thereof
Technical Field
The invention relates to the technical field of piezoelectric pumps, in particular to a single-valve double-cavity piezoelectric pump and a working method thereof.
Background
The rapid development of intelligent materials provides a new way for designing and researching small drivers with excellent performance, wherein the piezoelectric pump based on piezoelectric ceramic driving has wide application prospects in the fields of aerospace, mechanical construction, precise medical treatment and the like due to the characteristics of small volume, large energy, high reliability and the like.
Piezoelectric pumps can be divided into two categories depending on whether they are configured with valves: valved piezoelectric pumps and valveless piezoelectric pumps. In the prior art, a valve structure design is adopted, for example, patent CN107476964A entitled "a valve cavity integrated piezoelectric pump", which discloses a piezoelectric pump with an integrated valve cavity design, and is characterized in that the structure design comprises an upper cover plate, a lower cover plate, a pump cavity, a piezoelectric vibrator, a flap valve, a one-way valve and other components, so that the effective space of the cavity is increased, the pump body structure is reduced, the pump flow is increased, and the piezoelectric pump can be used as a micropump for conveying special media. During the working process of the piezoelectric pump with the valve, the fluid in the pump cavity and the fluid outside the pump cavity are mainly controlled to circularly flow through the driving valve or the driven valve, so that certain flow and pressure output is achieved. In the prior art, a valveless structure is still partially designed, for example, patent CN106246516A entitled funnel-shaped valveless piezoelectric pump discloses a funnel-shaped piezoelectric pump including a pump body, a piezoelectric vibrator, a flow blocking body and the like forming a Y-shaped section, which reduces the fluid return flow, and has a unidirectional pumping capability and a better fluid pumping effect. The suction and discharge of the fluid in the pump are all pressure formed by the pipeline or the asymmetrical structure of the pump cavity, so that the fluid is forced to flow in and out along the same flow passage, and the aim of fluid delivery is finally achieved.
Compared with a valveless piezoelectric pump with the same size, the valveless piezoelectric pump has the defects of low flow, low back pressure, low efficiency, poor reverse flow stopping performance and the like, and compared with the valveless piezoelectric pump, the valveless piezoelectric pump has the defects of complex structure, difficulty in assembly, low reliability and the like.
in view of the above-mentioned drawbacks, the inventors of the present invention have finally obtained the present invention through a long period of research and practice.
Disclosure of Invention
In order to solve the technical defects, the technical scheme adopted by the invention is to provide a single-valve double-cavity piezoelectric pump which comprises a hydraulic circulating device and a piezoelectric driving device, wherein the hydraulic circulating device comprises a one-way valve and a cavity, an inflow cavity and an outflow cavity are arranged in the cavity, the one-way valve is arranged between the inflow cavity and the outflow cavity, the one-way valve realizes one-way circulation of fluid from the inflow cavity to the outflow cavity, the piezoelectric driving device is externally connected with alternating current, and the piezoelectric driving device can adjust the pressure in the hydraulic circulating device.
preferably, the number of the one-way valves is 1.
Preferably, an outflow channel is arranged between the outflow cavity and the one-way valve, an inflow channel is arranged between the inflow cavity and the one-way valve, and the sum of the cross-sectional areas of the outflow channels is smaller than the cross-sectional area of the inflow channel.
preferably, the hydraulic circulating device is further provided with an energy accumulator, the energy accumulator is provided with an inflow port, and the inflow port is communicated with the inflow cavity.
Preferably, an energy accumulator partition plate is arranged in the energy accumulator, and a spring/foam/nitrile rubber is arranged on the inner side of the energy accumulator partition plate.
Preferably, the energy accumulator is connected with the cavity in a sealing mode, the cavity is provided with a flow outlet, and the flow outlet is communicated with the flow outlet cavity.
preferably, the piezoelectric driving device comprises a piston, a pump housing and piezoelectric ceramics, the piezoelectric ceramics is arranged in the pump housing, one end of the piston is connected with the piezoelectric ceramics, and the other end of the piston is connected with the one-way valve.
preferably, the piezoelectric ceramic is high-voltage packaged piezoelectric ceramic, the piezoelectric ceramic is externally connected with alternating current, and the piezoelectric ceramic is electrified to perform telescopic motion so as to drive the piston to deform.
Preferably, the piezoelectric driving device further comprises a fixing member, the fixing member is respectively and fixedly connected with the piezoelectric ceramic and the pump housing, and the fixing member plays a role in fixing.
preferably, the working method of the single-valve dual-chamber piezoelectric pump is as follows:
S1, connecting an external power supply of the piezoelectric driving device, wherein the piezoelectric driving device increases the pressure in the outflow cavity, at the moment, the one-way valve is closed, and the fluid in the outflow cavity flows out of the outflow cavity;
S2, when the pressure in the outflow cavity is increased to a first preset value, the pressure driving device enables the pressure in the outflow cavity to be reduced, when the pressure in the outflow cavity is reduced to a second preset value, the one-way valve is opened, fluid flows into the outflow cavity from the inflow cavity, and when the pressure value of the outflow cavity reaches a third preset value, the process of increasing the pressure in the step S1 is repeated to realize sequential circulation.
Compared with the prior art, the invention has the beneficial effects that:
1. The piezoelectric pump structure adopts a single-valve design, and has higher reliability and convenient assembly compared with the current double-valve design and other structural designs;
2. The invention uses the double-cavity design, so that the fluid flow in the cavity is more regular, the fluid backflow is effectively prevented or reduced, and the pressure and flow output of the piezoelectric pump system are finally improved;
3. The invention communicates the energy accumulator with the inflow cavity, has more compact and concise structure, and is beneficial to the control of the pressure in the fluid circulation cavity and the improved performance;
4. The structure design of the invention can effectively improve the output performance of the pumped fluid under the condition of reducing the volume and the weight, and has higher practicability.
drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below.
FIG. 1 is a schematic view of a piezoelectric pump of the present invention;
FIG. 2 is a side elevation exploded view of the hydraulic circulator A of the present invention;
FIG. 3 is a side elevation exploded view of the hydraulic circulator B of the present invention;
FIG. 4 is a schematic illustration of the accumulator of the present invention;
FIG. 5 is a schematic view of a chamber of the present invention;
FIG. 6 is a schematic view of the chamber and one-way valve of the present invention;
FIG. 7 is a side elevation exploded view of the piezoelectric actuator A of the present invention;
FIG. 8 is a side elevation exploded view of the piston A of the present invention;
FIG. 9 is a side elevation exploded view of the piston of the present invention at B;
FIG. 10 is a schematic view of a piston body of the present invention;
FIG. 11 is a schematic view of a pump housing of the present invention;
FIG. 12 is a side elevation exploded view of a piezoelectric actuator B of the present invention;
Figure 13 is a schematic view of the fastener of the present invention.
the figures in the drawings represent:
1-hydraulic circulation device, 11-accumulator, 111-inlet, 112-first threaded bore, 113-first stepped surface, 114-first spacing surface, 115-first recess, 12-accumulator diaphragm, 121-first inlet orifice, 13-diaphragm, 131-nipple, 132-second inlet orifice, 14-spacer, 141-first central bore, 15-cavity, 151-cavity connection end, 1511-second threaded bore, 1512-second stepped surface, 1513-second spacing surface, 1514-third spacing surface, 1515-outlet passage, 1516-fourth spacing surface, 1517-third stepped surface, 1518-outlet cavity, 1519-third inlet orifice, 152-valve connection end, 1521-fourth stepped surface, 1522-fifth stepped surface, 1523-third threaded hole, 16-one-way valve, 161-valve plate, 1611-fourth threaded hole, 1612-one-way valve plate, 162-valve, 1621-fifth threaded hole, 1622-flow hole, 2-piezoelectric driving device, 21-piston, 211-piston head, 2111-sixth step surface, 2112-sixth threaded hole, 212-sealing plate, 2121-second central hole, 2122-seventh threaded hole, 213-piston body, 2131-fifth spacing surface, 2132-sixth spacing surface, 2133-seventh step surface, 2134-eighth threaded hole, 2135-piston hole, 22-pump housing, 221-eighth step surface, 222-ninth step surface, 223-first internal thread, 224-sealing surface, 225-side hole, 226-positioning groove, 227-third central hole, 228-drive cavity, 229-second internal thread, 23-piezoelectric ceramic, 231-bump, 232-positioning notch, 24-fixing piece, 241-positioning buckle, 242-positioning step, 25-rear cover, 251-second external thread
Detailed Description
The above and further features and advantages of the present invention are described in more detail below with reference to the accompanying drawings.
Example one
As shown in fig. 1, a single-valve dual-cavity piezoelectric pump includes a hydraulic circulation device 1 and a piezoelectric driving device 2, the hydraulic circulation device 1 is fixedly connected to the piezoelectric driving device 2 through a screw thread, a sealing ring is disposed on a side end face B of the hydraulic circulation device 1, and after the hydraulic circulation device 1 is fixedly connected to the piezoelectric driving device 2 through a screw thread, the sealing ring can ensure that the hydraulic driving device 1 is in sealing contact with the piezoelectric driving device 2.
as shown in fig. 2 and 3, the hydraulic circulation device 1 includes an energy accumulator 11, an energy accumulator partition plate 12, a partition plate 13, a partition plate 14, a cavity 15 and a check valve 16, the energy accumulator 11 is a cylindrical container with an a-side end closed and a B-side end opened, the energy accumulator 11 is made of 7075 aluminum alloy material, a cavity is arranged in the energy accumulator 11, an inlet 111 is arranged on the side wall of the energy accumulator 11, and fluid can flow into the cavity of the energy accumulator 11 through the inlet 111; the end face of the side B of the energy accumulator 11 is matched with the end face of the side A of the cavity 15, the energy accumulator 11 is provided with first threaded holes 112, the first threaded holes 112 penetrate through the energy accumulator 11 in the direction AB, and the number of the first threaded holes 112 is four; a sealing ring is arranged on the connecting surface of the energy accumulator 11 and the cavity 15, so that the energy accumulator 11 and the cavity 15 form a cavity, and fluid in the cavity cannot leak at the connecting part of the energy accumulator 11 and the cavity 15, and the hydraulic pressure in the cavity formed by the energy accumulator 11 and the cavity 15 is ensured to be stable in a working range; the energy accumulator partition plate 12 is positioned in a cavity of the energy accumulator 11, the energy accumulator partition plate 12 is made of 7075 aluminum alloy material, a first inflow hole 121 is formed in the energy accumulator partition plate 12, the diameter of the energy accumulator partition plate 12 is smaller than that of the cavity of the energy accumulator 11, an annular gap is reserved between the energy accumulator partition plate 12 and the inner wall of the energy accumulator 11, fluid can pass through the first inflow hole 121 and the annular gap, and namely the fluid is distributed on two sides of the energy accumulator partition plate 12 when the piezoelectric pump works; when the energy storage partition plate 12 is placed in the energy storage 11, the side A of the energy storage partition plate 12 is the inner side of the energy storage partition plate 12, and the nitrile rubber is placed at the inner side end of the energy storage partition plate 12, so that the stability of pressure in the energy storage 11 can be ensured.
As shown in fig. 3 and 4, a first step surface 113 and a first spacing surface 114 are disposed at a B-side end of the energy accumulator 11, the first step surface 113 and the first spacing surface 114 are located in the same plane, a first groove 115 is disposed between the first step surface 113 and the first spacing surface 114, and the first groove 115 is an annular groove; the partition plate 13 is a circular plate having the same diameter as the first step surface 113, the side B of the partition plate 13 is provided with a boss 131, the boss 131 is cylindrical, the axial position of the boss 131 is provided with a second inflow hole 132, the second inflow hole 132 penetrates the partition plate 13 in the AB direction, the side a end surface of the partition plate 13 is in seamless contact with the first step surface 113 and the first partition surface 114, and the first groove 115 is provided with a seal ring to seal the partition plate 13 with the accumulator 11, so that the accumulator 11 is in sealed connection with the partition plate 13.
as shown in fig. 3, the spacer 14 is a circular plate, the center of the spacer 14 is provided with a first central hole 141, the first central hole 141 is matched with the convex nozzle 131, the convex nozzle 131 can pass through the first central hole 141 of the spacer 14, and the spacer 14 is tightly attached to the partition 13.
As shown in fig. 2 and 5, the cavity 15 includes a cavity connection end 151 and a valve connection end 152, the cavity 15 is made of 7075 aluminum alloy material, a side a of the cavity connection end 151 is provided with a second threaded hole 1511, a second step surface 1512, a second spacing surface 1513, a third spacing surface 1514, and a fourth spacing surface 1516, the second step surface 1512, the second spacing surface 1513, the third spacing surface 1514, and the fourth spacing surface 1516 are all located on the same plane, a sealing ring is disposed between the second step surface 1512 and the second spacing surface 1513, an outflow cavity 1518 is disposed between the second spacing surface 1513 and the third spacing surface 1514, the outflow cavity 1518 is provided with 8 outflow passages 1515 in the AB upward outflow cavity 1518, a sealing ring is disposed between the third spacing surface 1514 and the fourth spacing surface 1516, a third spacing surface 1517 is disposed in the fourth spacing surface 1517, a third inflow hole 1519 is disposed in the third surface 1517, and the boss 131 is matched with a tolerance of the fourth spacing surface 1516, the third step surface 1517 is attached to the side B of the boss 1311, the second step surface 1512, the second spacer surface 1513, the third spacer surface 1514 and the fourth spacer surface 1516 are attached to the side B of the partition 13, and the outflow chamber 1518 is separated from the third inflow hole 1519 by a seal ring provided between the third spacer surface 1514 and the fourth spacer surface 1516. The outer side of the cavity 15 is provided with an outlet 153, and the outlet 153 is communicated with an outlet chamber 1518.
As shown in fig. 3 and 5, the spacer 14 is placed in the cavity connection end 151, the spacer 14 is made of spring steel, the spacer 14 is tightly attached to the second step surface 1512, the second spacing surface 1513, the third spacing surface 1514 and the fourth spacing surface 1516, the convex mouth 132 of the spacer 13 is inserted into the first central hole 141 of the spacer 14, the side B of the spacer 13 is attached to the side a of the spacer 14, the accumulator spacer 12 is placed in the cavity of the accumulator 11, the side B of the accumulator 11 is attached to the side a of the cavity 15, the fixed connection between the accumulator 11 and the cavity 15 is realized by screwing the first threaded hole 112 and the second threaded hole 1511, after the accumulator 11 is connected to the cavity 15, the spacer 13 and the spacer 14 are fixed in the accumulator 11 and the cavity 15, the inflow port 111, the cavity in the accumulator 11, the first inflow hole 121, the second inflow hole 132 and the third inflow hole 1519 are communicated to form an inflow channel, the cross-sectional area of the inflow channel is greater than the sum of the cross-sectional areas of the 8 outflow channels 1518.
as shown in fig. 6, the sidewall of the cavity 15 is provided with 2 second grooves 154, the second grooves 154 are annular grooves surrounding the sidewall of the cavity 15, and sealing rings are disposed in the second grooves 154; the sidewall of the cavity 15 is provided with a first external thread 155.
As shown in fig. 2 and fig. 6, a fourth step surface 1521 and a fifth step surface 1522 are disposed on an end surface of the valve connecting end 152, the fourth step surface 1521 is recessed in the side surface B of the valve connecting end 152, 8 outflow passages 1515 are disposed on the fourth step surface 1521, and the outflow passages 1515 penetrate through the cavity 15 in the AB direction; the fifth step surface 1522 is recessed in the fourth step surface 1521, 4 third threaded holes 1523 are formed in the fifth step surface 1522, a third inflow hole 1519 is formed in the center of the fifth step surface 1522, and the third inflow hole 1519 penetrates through the cavity 15 in the AB direction.
as shown in fig. 2 and 6, the check valve 16 includes valve plate 161 and valve 162, the check valve 16 is made of 7075 aluminum alloy material, the valve plate 161 is the circular piece of shape and the shape assorted of fifth step surface 1522, the valve plate 161 is spring steel, 4 fourth screw holes 1611 are arranged on the valve plate 161, the fourth screw holes 1611 are assorted with the third screw holes 1523, the center of the valve plate 161 is provided with a check valve plate 1612, and the check valve plate 1612 ensures that the fluid in the third inflow hole 1519 can only flow in one direction.
As shown in fig. 2 and 6, the shape of the valve 162 matches the shape of the fifth step surface 1522, a fifth threaded hole 1621 and a flow hole 1622 are formed in the valve 162, the fifth threaded hole 1621 matches the third threaded hole 1523 and the fourth threaded hole 1611, the flow hole 1622 is located at the center of the valve 162, and the flow hole 1622 is communicated with the third inflow hole 1519.
As shown in fig. 2 and 6, the valve plate 161 is installed in a circular hole formed by the fifth step surface 1522, the valve 162 is installed in a circular hole formed by the fifth step surface 1522, screws are screwed at the fifth threaded hole 1621, the fourth threaded hole 1611 and the third threaded hole 1523, so that the valve 162 is hermetically connected with the valve connecting end 152, and the function of one-way fluid circulation is realized through the combined action of the valve plate 161 and the valve 162.
As shown in fig. 7, the piezoelectric driving device 2 includes a piston 21, a pump housing 22, a piezoelectric ceramic 23, a fixing member 24, and a rear cover 25; the rear cover 25 is fixedly connected to the pump casing 22, the piezoelectric ceramics 23 and the fixing member 24 are both disposed in the cavity on the side B of the pump casing 22, and the piston 21 is disposed in the cavity on the side a of the pump casing 22.
As shown in fig. 8 and 9, the piston 21 includes a piston head 211, a sealing piece 212 and a piston body 213, both the piston head 211 and the piston body 213 are made of 7075 aluminum alloy material, the side a of the piston head 211 is a plane without a recess, a sixth step surface 2111 is provided in the middle of the side B of the piston head 211, the sixth step surface 2111 has certain elasticity, and when a pressure difference is generated between the side a and the side B of the sixth step surface 2111, the sixth step surface 2111 bulges toward the side a/side B; the side surface B of the piston head 211 is provided with 4 sixth threaded holes 2112, and the diameter of the piston head 211 is larger than that of the valve 162; the sealing piece 212 is a circular thin piece, the sealing piece 212 is made of spring steel, a second central hole 2121 is formed in the center of the sealing piece 212, the size of the second central hole 2121 is the same as that of the sixth step surface 2111, 4 seventh threaded holes 2122 are formed in the periphery of the second central hole 2121, and the seventh threaded holes 2122 are matched with the sixth threaded holes 2112.
As shown in fig. 8 and 10, the piston body 213 includes a fifth spacing surface 2131, a sixth spacing surface 2132, and a seventh stepped surface 2133, the fifth spacing surface 2131 and the sixth spacing surface 2132 are located on the same plane, a sealing ring is disposed on the outer side of the fifth spacing surface 2131, a sealing ring is disposed between the fifth spacing surface 2131 and the sixth spacing surface 2132, a seventh stepped surface 2133 is disposed on the inner side of the sixth spacing surface 2132, and a piston hole 2135 is disposed in the middle of the seventh stepped surface 2133; the fifth partition 2131 is provided with an eighth threaded hole 2134, the eighth threaded hole 2134 is fitted with the seventh threaded hole 2122 and the sixth threaded hole 2112, the diameter of the piston body 213 is the same as that of the piston head 211, and the piston head 211, the seal piece 212, and the piston body 213 are fixedly connected together by screwing screws into the sixth threaded hole 2112, the seventh threaded hole 2122, and the eighth threaded hole 2134, thereby forming the piston 21.
As shown in fig. 11 and 12, the pump housing 22 is a cylindrical sleeve, the a-side end of the pump housing 22 is provided with an eighth step surface 221, a ninth step surface 222, a first internal thread 223 and a sealing surface 224, the first internal thread 223 and the sealing surface 224 are both located on the inner wall of the pump housing 22, the ninth step surface 222 is recessed in the eighth step surface 221, the eighth step surface 221 is an annular surface, the outer diameter of the eighth step surface 221 is greater than the diameter of the sealing plate 212, the inner diameter of the eighth step surface 221 is smaller than the diameter of the sealing plate 212, the eighth step surface 221 is in sealing engagement with the sealing plate 212, the recessed depth of the ninth step surface 222 relative to the eighth step surface 221 is the same as the length of the piston body 213 in the AB direction, the inner diameter of the eighth step surface 221 is greater than the diameter of the piston body 213, the ninth step surface 222 is an annular surface, and the ninth step surface 222 is provided with a third central hole; side holes 225 are formed in the side wall of the pump casing 22, the number of the side holes 225 is 4, a driving cavity 228 is formed on the outer side of the ninth step surface 222B, and the piezoelectric ceramic 23 is placed in the driving cavity 228; the B-side end of the pump housing 22 is provided with a positioning groove 226, and the positioning groove 226 is provided on the inner wall of the pump housing 22.
as shown in fig. 7 and 12, the piezoelectric ceramic 23 is a cylinder, the a-side end of the piezoelectric ceramic 23 is provided with a projection 231, the projection 231 is a cylinder, the projection 231 and the piezoelectric ceramic 23 are fixed to each other, the diameter of the projection 231 is equal to the inner diameter of the ninth step surface 222, and the projection 231 can be inserted into the third center hole 227 from the B-side; a positioning notch 232 is arranged at the side B end of the piezoelectric ceramic 23; piezoelectric ceramic 23 is externally connected with alternating current, and piezoelectric ceramic 23 can expand and contract in the AB direction after being connected with the alternating current.
As shown in fig. 12 and 13, the positioning element 24 is a circular ring, 4 positioning fasteners 241 are disposed on the outer wall of the positioning element 24, the positioning fasteners 241 are matched with the positioning slots 226, a positioning step 242 is disposed on the inner wall of the positioning element 24, the positioning step 242 is matched with the positioning notch 232, the positioning element 24 can be sleeved on the side B of the piezoelectric ceramic 23, and the positioning element 24 and the piezoelectric ceramic 23 cannot rotate; the positioning member 24 is sleeved on the side B end of the piezoelectric ceramic 23, and then the piezoelectric ceramic 23 is inserted into the driving cavity 228 of the pump housing 22 from the side B, and the positioning buckle 241 of the positioning member 24 can be inserted into the positioning groove 226 from the side B, at this time, the pump housing 22, the piezoelectric ceramic 23 and the positioning member 24 are fixedly connected, and the three components cannot rotate mutually.
As shown in fig. 12, a second internal thread 229 is provided on the inner wall of the side B of the pump housing 22, a second external thread 251 is provided on the outer wall of the side a of the rear cover 25, the second internal thread 229 and the second external thread 251 are matched with each other, the rear cover 25 is fixedly connected to the pump housing 22, and the piezoelectric ceramic 23 and the fixing member 24 are fixed inside the pump housing 22; the piston 21 is inserted into the end a of the pump housing 22 from the direction a to form the piezoelectric actuator 2.
As shown in fig. 1, the hydraulic circulation device 1 and the piezoelectric driving device 2 are fixedly connected with the first internal thread 223 through the first external thread 155, and the sealing performance of the cavity where the piston 21 is located is ensured through the sealing ring of the second groove 154.
the working method of the single-valve double-cavity piezoelectric pump comprises the following steps:
S1, switching on external alternating current of the piezoelectric ceramic 23, enabling the piezoelectric ceramic 23 to generate protrusion deformation towards the direction A when reaching a voltage amplitude, outputting displacement under the action of the piston 21, pushing fluid in the hydraulic circulating device 1 to flow into the outflow cavity 1518 through 8 outflow channels 1515, and outputting the fluid and the pressure outwards;
s2, when the pressure value of the outflow cavity 1518 reaches a first preset value, the piezoelectric ceramic 23 contracts towards the direction B, and drives the piston 21 to deform towards the side B, so that the pressure in the hydraulic circulating device 1 is reduced, when the pressure is reduced to a second preset value, the one-way valve 16 is opened, and under the action of the accumulator 11, fluid enters the accumulator 11 from the inflow port 111, flows to the one-way valve 16 through the inflow channel, and flows into the outflow cavity 1518 through the one-way valve 16 and the outflow channel 1515, and when the pressure value of the outflow cavity 1518 reaches a third preset value, the process of increasing the pressure in the step S1 is repeated, so that sequential circulation is realized.
Example two
The present embodiment is different from the above embodiments in that a foam plate or a spring is placed inside the accumulator partition 12, so that the energy storage capacity of the pressure inside the accumulator 11 is stronger, and the stability of the pressure inside the accumulator 11 is more stable.
EXAMPLE III
The present embodiment differs from the above embodiments in that the materials of the piston body 213, the piston plate 211, the check valve 16, the cavity 15, the accumulator 11, the accumulator partition 12, the pump housing 22, etc. are all made of stainless steel.
The foregoing is merely a preferred embodiment of the invention, which is intended to be illustrative and not limiting. It will be understood by those skilled in the art that various changes, modifications and equivalents may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (10)

1. The utility model provides a single-valve two-chamber piezoelectric pump, its characterized in that includes, hydraulic pressure circulating device and piezoelectricity drive arrangement, hydraulic pressure circulating device contains check valve and cavity, be provided with inflow chamber and outflow chamber in the cavity, the check valve sets up the inflow chamber with between the outflow chamber, the check valve realizes that the fluid is followed the inflow chamber to the outflow chamber carries out one-way circulation, the external alternating current of piezoelectricity drive arrangement, piezoelectricity drive arrangement is adjustable pressure in the hydraulic pressure circulating device.
2. the single-valve, dual-chamber piezoelectric pump of claim 1, wherein the number of one-way valves is 1.
3. The single-valve dual-chamber piezoelectric pump of claim 1, wherein an outlet passage is provided between the outlet chamber and the check valve, an inlet passage is provided between the inlet chamber and the check valve, and a sum of cross-sectional areas of the outlet passages is smaller than a cross-sectional area of the inlet passage.
4. The single-valve dual-chamber piezoelectric pump of claim 1, wherein the hydraulic circulation device is further provided with an accumulator, the accumulator being provided with an inlet port, the inlet port being in communication with the inlet chamber.
5. A single-valve dual-chamber piezoelectric pump according to claim 4, wherein an accumulator partition is provided in the accumulator, and a spring/foam/nitrile rubber is provided inside the accumulator partition.
6. The single-valve dual-chamber piezoelectric pump of claim 5, wherein the accumulator is sealingly connected to the chamber, and the chamber is provided with an outlet port, the outlet port communicating with the outlet chamber.
7. the single-valve dual-chamber piezoelectric pump of claim 1, wherein the piezoelectric actuator comprises a piston, a pump housing, and a piezoelectric ceramic disposed in the pump housing, wherein one end of the piston is connected to the piezoelectric ceramic, and the other end of the piston is connected to the one-way valve.
8. The single-valve dual-chamber piezoelectric pump according to claim 7, wherein the piezoelectric ceramic is a high-voltage packaged piezoelectric ceramic, the piezoelectric ceramic is externally connected with an alternating current, and the piezoelectric ceramic is electrified to perform telescopic motion so as to drive the piston to deform.
9. The single-valve dual-chamber piezoelectric pump of claim 7, wherein the piezoelectric actuator further comprises a fixing member, the fixing member fixedly connecting the piezoelectric ceramic and the pump housing, respectively, and the fixing member is used for fixing.
10. The single-valve dual-chamber piezoelectric pump according to any one of claims 1 to 9, wherein the single-valve dual-chamber piezoelectric pump operates by:
S1, connecting an external power supply of the piezoelectric driving device, wherein the piezoelectric driving device increases the pressure in the outflow cavity, at the moment, the one-way valve is closed, and the fluid in the outflow cavity flows out of the outflow cavity;
S2, when the pressure in the outflow cavity is increased to a first preset value, the pressure driving device enables the pressure in the outflow cavity to be reduced, when the pressure in the outflow cavity is reduced to a second preset value, the one-way valve is opened, fluid flows into the outflow cavity from the inflow cavity, and when the pressure value of the outflow cavity reaches a third preset value, the process of increasing the pressure in the step S1 is repeated to realize sequential circulation.
CN201810533543.8A 2018-05-29 2018-05-29 single-valve double-cavity piezoelectric pump and working method thereof Pending CN110541807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810533543.8A CN110541807A (en) 2018-05-29 2018-05-29 single-valve double-cavity piezoelectric pump and working method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810533543.8A CN110541807A (en) 2018-05-29 2018-05-29 single-valve double-cavity piezoelectric pump and working method thereof

Publications (1)

Publication Number Publication Date
CN110541807A true CN110541807A (en) 2019-12-06

Family

ID=68701551

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810533543.8A Pending CN110541807A (en) 2018-05-29 2018-05-29 single-valve double-cavity piezoelectric pump and working method thereof

Country Status (1)

Country Link
CN (1) CN110541807A (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004011535A (en) * 2002-06-06 2004-01-15 Seiko Epson Corp Pump
CN1469046A (en) * 2002-06-04 2004-01-21 精工爱普生株式会社 Pump
CN1609449A (en) * 2003-10-24 2005-04-27 精工爱普生株式会社 Method for driving pump
JP2005113777A (en) * 2003-10-07 2005-04-28 Seiko Epson Corp Pump
JP2005214034A (en) * 2004-01-28 2005-08-11 Seiko Epson Corp Pump
US20050175490A1 (en) * 2003-10-21 2005-08-11 Takeshi Seto Check valve and pump including check valve
JP2005220810A (en) * 2004-02-05 2005-08-18 Seiko Epson Corp Pump
CN1871469A (en) * 2003-10-21 2006-11-29 精工爱普生株式会社 Non-return valve and pump with the same
CN101666307A (en) * 2009-09-15 2010-03-10 南京航空航天大学 Funnel-shaped valve piezoelectric pump and working method thereof
CN208252319U (en) * 2018-05-29 2018-12-18 哈尔滨工业大学 A kind of single valve piezoelectric pump with double chambers

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1469046A (en) * 2002-06-04 2004-01-21 精工爱普生株式会社 Pump
JP2004011535A (en) * 2002-06-06 2004-01-15 Seiko Epson Corp Pump
JP2005113777A (en) * 2003-10-07 2005-04-28 Seiko Epson Corp Pump
US20050175490A1 (en) * 2003-10-21 2005-08-11 Takeshi Seto Check valve and pump including check valve
CN1871469A (en) * 2003-10-21 2006-11-29 精工爱普生株式会社 Non-return valve and pump with the same
CN1609449A (en) * 2003-10-24 2005-04-27 精工爱普生株式会社 Method for driving pump
JP2005214034A (en) * 2004-01-28 2005-08-11 Seiko Epson Corp Pump
JP2005220810A (en) * 2004-02-05 2005-08-18 Seiko Epson Corp Pump
CN101666307A (en) * 2009-09-15 2010-03-10 南京航空航天大学 Funnel-shaped valve piezoelectric pump and working method thereof
CN208252319U (en) * 2018-05-29 2018-12-18 哈尔滨工业大学 A kind of single valve piezoelectric pump with double chambers

Similar Documents

Publication Publication Date Title
US8083506B2 (en) Double action simplex pump
US9726160B2 (en) Double acting fluid pump with spring biased piston
CN112412756B (en) Piezoelectric pump with embedded follow-up umbrella-shaped valve
CN208252319U (en) A kind of single valve piezoelectric pump with double chambers
CN112081729B (en) Resonant piezoelectric stack pump with slide valve
CN110541807A (en) single-valve double-cavity piezoelectric pump and working method thereof
CN203272085U (en) Single-film double-cavity miniature valveless fluid pump driven by IPMC driving film
RU2037652C1 (en) Hydraulic positive-displacement pump, the working chamber of the hydraulic positive-displacement pump
US11274666B2 (en) Micro-fluid pump
CN111097082A (en) Conveying metering device and infusion device
CN112196773B (en) Annular cavity secondary vibration piezoelectric pump
CN105736331A (en) Pressure stabilizing pump
CN113464410B (en) Pressure stepless adjustable large-flow piezoelectric pump
WO2023019493A1 (en) High-flow piezoelectric pump with steplessly adjustable pressure
US4759264A (en) Parenteral solution diaphragm pump
CN115182863A (en) Miniature plunger pump
CN211258917U (en) Low pulse reciprocating pump
CN217055538U (en) Water pump, clean tooth device and pump body device
CN215213866U (en) Pump body capable of adjusting mixing proportion
CN216518546U (en) Novel piezoelectric pump with semi-closed arc valve block
CN215213867U (en) Non-contact type mixing ratio adjusting pump body
CN116428180A (en) Magnetic fluid driving pump and driving system thereof
CN216342702U (en) Diaphragm type electromagnetic pump and device using same
CN213807950U (en) Plunger pump assembly
CN112360715B (en) Deep sea low noise variable pump

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination