CN1871469A - Non-return valve and pump with the same - Google Patents

Abstract

A non-return valve has a tubular valve seat frame, a valve seat fixed in the valve seat frame and having a flow hole through which an operation fluid flows, and a valve body located on that side of the valve seat from which the operation fluid flows out, and opening and closing the valve seat. The valve seat frame, the valve seat, and the valve body are integrated as a unit, and this makes the structure of the valve simple and easy to assemble, and reduces costs of the valve. Further, a pump with the non-return valve is provided, and the pump is small-sized and has excellent durability and high performance.

Description

Safety check and have the pump of safety check

Technical field

The present invention relates generally to a kind of safety check and has the pump of this safety check, and this safety check can be assembled in valve seat, valve body, the blocking of valve seat frame in the pump with being integral.

Background technique

In the past, in the pump that working fluid flows, be provided with safety check, as the barrier element of fluid course.Particularly at the volume that changes pump chamber by piston or barrier film so that employed safety check in the miniature pump that working fluid flows has proposed following prior art.

As first prior art, as be used for be drawn into working fluid in the pump chamber and the pump chamber that spues outside the structure of time control working fluid, known have safety check described below and have the pump structure (Japanese patent gazette spy opens flat 10-220357 number) of this safety check, and this safety check comprises: the pump with the suction port of working fluid and discharge opening sucks to spue uses the unit; Pump valve seat unit with suction side safety check and exhaust end safety check; And the pump actuator unit, the pump valve seat unit is fixed on the pump suction by the O RunddichtringO as Sealing and spues with between unit and the pump actuator unit.

In addition, as being used in fluid course that the working fluid suction pump is indoor and make working fluid only to the safety check of direction circulation in time outside the pump chamber that spues as second prior art, known have such safety check, and it comprises: valve seat; Spin, the suction side that it is positioned at working fluid is used to carry out the switching of valve seat; The stop member of band opening, it is used to limit the amount of movement of spin; And connected element, it is used for valve seat and stop member are combined into one, in addition, being well known that also that safety check is pushed by pressing component is fixed on the pump case, the pump also known (Japanese patent gazette spy opens 2000-2350 number) that has a pair of described safety check at the suction side and the exhaust end of working fluid.

In addition, as the 3rd prior art, known safety check described below and pump (Japanese patent gazette spy opens 2001-173816 number) with this safety check, this safety check comprises: be formed at the valve seat in the pump case (pump housing); Be used to open and close the spin of this valve seat; Be used to limit the spin stop member of the amount of movement of spin; And be used for spin by the helical spring that is pressed on the valve seat.

But, open in the invention of being put down in writing for flat 10-220357 number the Japanese patent gazette spy, because the pump valve seat unit has suction side safety check and exhaust end safety check, therefore existing particularly, the size of in-plane becomes big problem.And, grip with unit and pump actuator unit because the pump valve seat unit is sucked to spue by pump by the O RunddichtringO, so think when assembling because the non-constant meeting of size of pump chamber space causes the pump performance instability.

In addition owing to think O RunddichtringO sealing deterioration when long-term the use, so produce must periodic replacement trouble, and produce such inconvenience: consider resistance to chemical reagents according to the kind of working fluid, and change the material of O RunddichtringO.

And, the pump valve seat unit is such structure: use molding synthetic resin, and the suction portion of fluid and the isolation part that spues between the portion float above pump chamber, so when actuator drives, think that the pump valve seat unit can produce distortion, can not obtain the predetermined pressure in the pump chamber.And, also exist valve seat owing to flowing of working fluid worn and torn, because easy damaged such as cavitation erosion, and the problem of durability deficiency.

In addition, in the Japanese patent gazette spy opens 2000-2350 number invention, spin is arranged in the space of being located between valve seat and the stop member, this spin is by moving the switching of carrying out valve seat in this space, but think that the spin guide wall of stop member and the gap between the spin are less, owing to contact resistance hinders moving of spin.And, since rapid in the variation of the seat surface place openings of sizes of the working fluid outflow portion of valve seat, so think that existence can produce the smooth and easy mobile problem of the eddy current and the fluid that hinders one's work.

In addition, because spin is formed by superhard alloy or pottery, the weight of per unit volume is greater than general working fluid, so spin is difficult for moving owing to the switching of valve seat, so for example there is such problem: what be not suitable for using barrier film flows out the miniature pump of working fluid with upper frequency.

In addition, in the Japanese patent gazette spy opens 2001-173816 number invention, this safety check forms such structure: spin all the time by helical spring by being pressed in the valve seat side, valve seat is opened by the pressure of working fluid, and by helical spring elastic force and airtight, therefore with respect to the weight of helical spring elastic force and spin, the feed pressure that fluid flows into runner need be sizable pressure, for example, the difference that is difficult to use in the inertia values of entrance channel by working fluid and outlet flow opens and closes the baby check valve of valve seat.

And, in this pump, be provided with helical spring on the runner of the working fluid in safety check, so the mobile meeting of working fluid is hindered by helical spring, in addition, because fluid course is from the rapid bending of safety check, so exist the flow resistance of working fluid to become big problem.

Summary of the invention

The present invention proposes in order to address the above problem, and its purpose is, the good minitype high-performance pump of durability that a kind of safety check is provided and has this safety check, and described check valve structure is simple, assembling good, can realize cost degradation.

Safety check of the present invention comprises: the valve seat frame of tubular; Valve seat, it is fastened in this valve seat frame, and has the opening of working fluid circulation usefulness; Valve body, the outflow side that it is positioned at the working fluid of described valve seat is used to open and close described valve seat, it is characterized in that, and described valve seat frame, described valve seat and described valve body unit turn to one.

According to the present invention, this safety check is made of these three parts of valve seat, valve seat frame and valve body at least, so the component parts negligible amounts, and simple in structure, so can make with lower cost.And because check valve unit changes into one,, in the time of for example on being assembled to pump, need not again safety check to be adjusted or confirmed, can obtain the performance of stable safety check so can individually carry out performance management as safety check.And as safety check, can be assembled to pump described later medium owing to can not contact opening as the valve body of important function parts or valve seat, so assembling is good, can damaged or distortion during assembling, and the performance that can obtain to be scheduled to.

And, do not need prior art as the aforementioned to be provided as the O RunddichtringO of Sealing like that at the safety check periphery.Consider O RunddichtringO sealing deterioration in the long-term process of using, thereby there is the trouble that regularly to change, but, there is not the periodic replacement of O RunddichtringO or considers resistance to chemical reagents and change the trouble of O RunddichtringO material according to the kind of working fluid according to structure of the present invention.

In addition, in the present invention, it is characterized in that described valve seat forms with the material of hardness greater than described valve seat frame and described valve body.

As the material of valve seat, for example can adopt hard metal or potteries such as superhard alloy herein.And as pottery, that representative is Al ₂O ₃Many crystallizations agglomerated material, but also can adopt the single crystals material.

According to the present invention, the hardness of these materials is bigger, so can prevent impact that the switching because of valve body produces or the wearing and tearing or the damaged of the valve seat that causes because of cavitation erosion.

And, can prevent the wearing and tearing of flowing and causing because of working fluid.Thus, can keep good performance for a long time.

In addition, the invention is characterized in that described valve body is made of fixing part and switching portion, and described valve body is located at the side that the working fluid of described valve seat flows out, described fixing part is fastened on the described valve seat frame.

In addition, herein as the fixation method of valve body, for example can adopt mating faces such as welding, bonding, brazing fastening.

In this structure, the structure that is located at a side of working fluid inflow valve seat with valve body is compared, and the flow resistance of working fluid diminishes, and can flow swimmingly.And because the fixing part of valve body is fastened on the valve seat frame, valve body self can not move, so can open and close the opening of valve seat reliably.

And, the invention is characterized in that the outflow side end face of the working fluid of described valve seat and the end face of described valve seat frame are arranged on the roughly the same height, described fixing part is fastened on the end face of described valve seat frame.

Like this, because the endface position of valve seat and valve seat frame is set for roughly the same, so the described switching portion and the fixing part of valve body can be made of the flat board of plate-shaped member, shape, the size of each several part are manageable, so have the reduction that can realize cost, and can guarantee the effect of the performance of being scheduled to.

And, the invention is characterized in, described valve body is made of the switching portion of the opening of the fixing part that is positioned at periphery, described valve seat and the support that connects this switching portion and described fixing part, described valve body is installed in the inside of the protuberance of tubular, described protuberance is located at the periphery of described valve seat frame, and described fixing part is fastened by making described protuberance distortion.

According to this structure, valve body is by making the protuberance distortion of valve seat frame, for example, the fixing part of valve body is fixed on the valve seat frame, so can fix reliably with less space by making the part or carrying out crimping (crimp) (fixing) on circumferentially by making part distortion whole.And the peripheral part of the fixing part by fixed valve body needn't make the distortion of switching portion and support fix.And valve body only by in the protuberance that is installed in the valve seat frame, can limit the position of in-plane, so do not use special fixtures, switching portion just can open and close the opening of the working fluid of valve seat reliably.

And, the invention is characterized in, described valve body is installed in the inside of the protuberance of the peripheral portion of being located at described valve seat frame, and the fixed component of ring-type is pressed in the protuberance of described valve seat frame, thereby described valve body is clipped between described valve seat frame and the described fixed component.

Like this, the fixing part of being located at periphery of valve body at thickness direction by valve seat frame and fixed component clamping and fix, so can under valve body can not produce the situation of internal stress, not fix, so can under the state that support and switching portion can not be out of shape, fix.

And, in structure of the present invention, it is characterized in that, be provided with the protuberance of tubular at the periphery of the fixing part of described valve body, this protuberance is installed in the protuberance of described valve seat frame, the fixed component of ring-type is pressed in the protuberance of described valve body, thereby described valve body is clipped between described valve seat frame and the described fixed component.

According to this structure, by aforesaid fixed component being pressed in the protuberance of being located at valve body, the protuberance of valve body is sandwiched between the protuberance and described fixed component of described valve seat frame, so except that obtain with aforementioned identical effect, valve body is owing to be provided with protuberance at peripheral portion, even the thin plate about 20 μ m for example is because peripheral part is reinforced, so also have the less effect of distortion in not flexible on the whole, the operational processes.

In addition, valve body can be by manufacturings such as punch process, so do not need to be designed for the process step that protuberance is set, cost can not increase yet.

And, in structure of the present invention, it is characterized in that, be located at the tubular protuberance of periphery of the fixing part of described valve body, be pressed into and be clamped in the radial clearance of described valve seat and described valve seat frame.

According to this structure, by in the protuberance that valve seat is inserted valve body, and valve body and valve seat are pressed in the ring of valve seat frame, it is integrated not use the aforementioned fixation parts promptly to accomplish.And, owing to aforesaid protuberance need be set on the valve seat frame, so further simplified structure.

And, in structure of the present invention, it is characterized in that, described valve body is can be installed in the recess inside of being located at described valve seat frame along the mode that thickness direction moves, be provided with the fixed component of ring-type at the recess periphery of described valve seat frame, the fixed component of this ring-type is used to support described valve body, and makes this valve body can open and close described opening.

Like this, the position that valve body limits in-plane by the recess of being located at the valve seat frame, and be limited in the moving range of thickness direction by fixed component, so can be by suitably setting the diameter and the degree of depth of recess, limit, so that the switching of the opening of valve body is suitably carried out.Herein, fixed component is for example except can being fixed on the recess periphery of valve seat frame by face joint methods such as bonding, welding, also can be by resetting the diameter recess bigger at the valve seat frame than the recess of valve seat frame, and the fixed component of ring-type is pressed in this recess fixes.

And, the invention is characterized in that described valve body comprises: the fixing part of periphery; Roughly in the switching portion of central part; And connect this switching portion and the continuous a plurality of blade parts of described fixing part.

Herein, the valve body of this structure for example forms the shape of the roughly propeller-like with blade part, and as the shape of blade part, the face of retreating is located at the valve seat direction, and the face that advances is located at its opposite direction.

By having a plurality of this blade parts, when working fluid flows out, working fluid can be along the face that retreats of the mild curved surface of conduct of blade part at the little state of resistance, flow out between the blade part, and when the sealing opening, because working fluid pushes the face that advances, can seal opening by switching portion, that can follow the tracks of barrier film lessly moves the switching of carrying out opening.

And, in structure of the present invention, it is characterized in that, be provided with a plurality of openings at described valve seat, and described valve body is provided with the quantity switching portion corresponding with described opening.

Herein, a plurality of openings for example are set as round shape, straight line shape or state arranged side by side.

In the present invention, on valve seat, be provided with the opening of a plurality of working fluids, be used to open and close independent respectively setting of switching portion of the valve body of this opening, but the fixing part of periphery forms as one, so can under the situation that does not increase component parts quantity, constitute safety check.For example, in the diaphragm type pump, when the amplitude of barrier film was the 10 μ m left and right sides, the actuating range of the switching portion of valve body was about 20 μ m, therefore, under the situation of the flow of wanting to increase working fluid, by a plurality of openings are set, can increase flow.

And, can open and close a plurality of openings by a switching portion, but consider because the micro-strain or the size deviation of switching portion, can not all open and close each opening equally, thereby, has the effect that to carry out the switching of all openings reliably by at opening setting switching portion independently.

And, the invention is characterized in that the opening opening of the working fluid of described valve seat becomes oval shape.

In this structure, the opening opening becomes oval shape, so can set bigger opening area, can increase the flow of working fluid.

And, preferably: the inflow entrance of the working fluid of the opening of described valve seat and outflow opening form got by rounding very slick and sly, to reduce the fluid resistance of working fluid.

In addition, the invention is characterized in, form smoothly by continuous roughly circular arc between the inflow entrance of the working fluid of described opening and the outflow opening.

Like this, the diameter of the opening of valve seat is generally less than the outside of inflow entrance, so flow into this opening or during in the opening internal flow, flow resistance increases at working fluid.

Therefore, according to the present invention, by make inflow entrance, outflow opening sleekly rounding form, the inflow resistance in the time of can reducing working fluid and flow into opening can reduce when flowing out because of producing the flow resistance that eddy current forms.

In addition, by make opening inside form by roughly circular arc and with inflow entrance, outflow opening place continuous shape smoothly, can reduce the flow resistance of opening inside.

And, the invention is characterized in that the face of the side that the working fluid of described valve seat flows into forms funnel-like or the roughly circular-arc funnel-like with the continuous inclined plane shape of described inflow entrance.

By forming this shape, has such effect: the resistance in the time of can further reducing in the opening that working fluid flows into valve seat.

Herein, said roughly circular-arc funnel-like, preferably: its inner surface configuration is not the U font, but the cross section of internal surface forms the shape of heaving slightly halfway.

Preferably: the face that outflow opening periphery described valve body and described opening closely contacts forms dome-shaped or cone shape.

In this structure, when valve body closely contacts with the periphery of the opening of valve seat with the plane, the simple shape of valve body, and make easily, in switching portion is dome-shaped or during cone shape, valve body becomes the line contact with contacting of valve seat, and contact pressure increases, thereby has the effect that can prevent further that working fluid from leaking.

And, safety check of the present invention is characterised in that, the valve body that is used to open and close described valve seat is a spin, safety check of the present invention also has the spin support unit, described spin support unit is used to support this spin, and be provided with the opening of working fluid on this spin support unit, described valve seat frame, described valve seat, described spin and described spin platen unit turn to one.

Herein, said spin for example is a spheroid.

According to the present invention, this safety check is made of these four parts of valve seat frame, valve seat, spin and spin support unit, so component parts quantity is few, and all is simple shape, so make easily, carries out the shape management easily, can make at low cost.And,, can obtain the performance of stable safety check because safety check by blocking, so can individually carry out performance management as safety check, in the time of for example in being assembled to pump, need not again safety check to be adjusted and confirmed.And, as safety check, because it is medium to be assembled to pump under situation about not contacting as the opening of the spin of important function parts and valve seat, thus can damaged or distortion during assembling, the performance that can obtain to be scheduled to.

And, because valve seat opens and closes by spin, so when opening, working fluid is in the Surface runoff of spin, so flow resistance is less, for example compares with the situation of using tabular valve, when spin is lifted off a seat and is opened opening, even identical amount of movement, actual internal area also become greatly, so can increase amount of flow.When sealed, valve seat becomes line with spin and contacts, and it is big that contact pressure becomes, thereby have the effect that can seal reliably.

And, the invention is characterized in that described spin support unit comprises: the support that is positioned at periphery; Be positioned at the opening that makes the working fluid circulation of substantial middle; Support the spin support of described spin; And the joint that connects the arm shape of described support and described spin support.

In the present invention, the spin support unit of supporting spin is by top described formation, easily forms the spin support unit so for example can utilize processing method such as punching press that sheet metal is processed.And, spin from the opening of spin support unit by working fluid pushing tow central part, again between the joint by working fluid pushing tow periphery, thereby push the also opening of seal valve seat, so spin moves by the pressure of working fluid easily, has the effect of the sealing of the opening that can carry out valve seat reliably.

And, spin from valve seat leave, when valve seat is opened, spin is by the spin support part supports and the restriction site of spin support unit, so can be bearing in the appropriate location to spin in less space and with simple shape.

In addition, spin when mobile, owing to rotation makes itself and the contact position of valve seat all change at every turn because and the variation of the contact position of valve seat, wear and tear so can prevent same position.

And, the invention is characterized in, in aforementioned structure, be extruded with the claw of the described spin of supporting at described spin support.

In this structure, spin by be located at the spin support for example 3 be the supporting of radial outstanding claw, so can carry out the position limit of spin reliably.This claw is because in the scope internal support spin littler than the diameter of spin, so can be owing to this pawl flowing of fluid that hinder one's work is set.

And, in aforementioned structure, preferably: when opening and closing described valve seat, move at the same time or separately, carry out the switching of described valve seat by making described spin and described spin support unit.

Like this, spin and spin support unit, spin support unit and valve seat frame are supported respectively, but are not fixed.Therefore, have only spin to move the opening that can open and close valve seat, also can come the sealant flow through hole, and spin and spin support unit can move to open opening together also by spin support unit pushing tow spin.Owing to form that not only spin moves but also the also transportable structure of spin support unit, the therefore spin support unit positive pressure of bearing pump chamber for example, and can push spin, so can improve the sealing force of opening.

And in structure of the present invention, preferably: the spin support at described spin support unit is provided for described spin by the spring section that is pressed on the described valve seat.

According to the present invention, as previously described, spin is used to open and close opening, but owing to be provided with spring section at the spin support, thus can be by this elastic force spin by being pressed on the opening, can realize reliable sealing.The elastic force of this spring section preferably sets into such size: for example when opening opening, can spin be opened.

And,, then when pump stops, can preventing that working fluid from flowing out if spin is contacted all the time with the opening of valve seat by this spring section.

And safety check of the present invention is characterised in that, the periphery at the periphery support of described spin support unit along the internal surface in the hole of being located at described valve seat frame, is provided with the side guide portion of tubular.

In this structure, forming tabular situation with the spin support unit compares, owing on the spin support unit, be provided with the side guide portion of tubular, this side guide portion moves along the internal surface of hole of described valve seat frame, so can move swimmingly, and can not tilt, thereby can carry out the switching of opening reliably in cross-wise direction.And, even this side guide portion is set, the space that also needn't increase safety check.

And, in structure of the present invention, it is characterized in that the density mean value of described spin and the density of working fluid are roughly the same.

The spin that is used to open and close opening moves by the variation in pressure of working fluid.At this moment, because the density mean value of spin and the density of working fluid are roughly the same, so in working fluid, when for example stopping the driving of pump, spin is in state of suspension or the approaching state that suspends, so when driven pump, spin moves by the slight pressure variation of working fluid, therefore when the driving source of pump was driven with the such higher frequency of piezoelectric element, spin also can synchronously move with this driver frequency, to carry out the switching of valve seat.

In addition, the invention is characterized in that described spin is a hollow.

,, consider durability herein, can use metals such as iron series alloy, Stainless Steel Alloy, copper series alloy, aluminum alloy as the material of spin, or glass, pottery, synthetic resin etc.

When forming spin with these materials, think that the weight of per unit volume is bigger, be not easy to move by the small variation in pressure of working fluid.At this moment, by making spin is hollow, can reduce the weight of per unit volume, by adjust the outer casing thickness of spin according to the material of the material of spin and working fluid, as previously mentioned, the weight of per unit volume that the weight of the per unit volume of spin can be set for the working fluid of pushing open with spin is roughly the same, can obtain aforementioned effect.

In addition, the invention is characterized in, be provided with coating on the surface of described spin.

, hard coats such as superhard alloy, nickel, chromium or pottery can be adopted as coating herein,, wet types such as galvanoplastic, electroless plating method plating method can be adopted as the coating forming method, or dry type plating methods such as vacuum evaporation, sputter, ion plating.And, also can adopt the soft material of rubber series.

In this structure, the spin that is used to open and close opening is formed with coating on shell, even so define the material of spin according to the easy degree of making, under the situation of having selected aforementioned hard coat, can improve surface hardness, therefore have such effect: though long-time the use, wearing and tearing or because of the switching of opening impact cause damage situation also seldom.And, as previously described,,, also can prevent the distortion of spin by forming this hard coat even spin is a hollow.

Under the situation of having selected soft coating, can further improve the sealing of valve seat.

And, the invention is characterized in, the opening outside of described valve seat forms: the inflow entrance of working fluid circulation and outflow opening smoothly form continuously by circular arc roughly, and the opening portion of described outflow opening forms the circular arc of diameter greater than the diameter of described spin.

Like this, because the inflow entrance of opening, outflow opening are mutually continuous by level and smooth circular arc, the fluid resistance in the time of therefore can reducing working fluid and in valve seat, circulate.Particularly open and close by spin owing to outflow opening, so the opening portion outside at this outflow opening forms under the situation of diameter greater than the circular arc of ball diameters, even spin departs from valve seat slightly, the opening section that also can guarantee to be used to flow out working fluid is long-pending bigger, can increase the outflow flow of working fluid, and also obtain the effect that the promotion spin is left from valve seat thus.

And spin moves to the opening place along the arc-shaped surface in the opening portion outside of being located at outflow opening and seals, so ground moves even little deviation appears in spin in the position of in-plane, and also sealant flow through hole more reliably.

In addition, the invention is characterized in that described spin support unit is fastened on the described valve seat frame.

When the spin support unit is fastened on the valve seat frame, spin opens and closes opening individually, but because the spin support unit is fastened on the described valve seat frame, spin is limited in the position of in-plane by the spin support of spin support unit, so can limit the position of spin with respect to the opening of valve seat more reliably.

And,,, can provide structure simple more safety check so compare with the structure that the spin support unit moves owing to be the structure of having only spin to move.

And, the invention is characterized in, in the described valve seat of described valve seat frame and the side between the described spin support unit, be provided with the hole that extends through the outside from the inboard.

In the present invention, as previously described, valve seat, valve seat frame, spin and spin support unit be by blocking, but owing to be provided with through hole in the side of valve seat frame, so, can confirm the position and the situation of movement of spin from this hole for the single parts of safety check.

And, in safety check, stop up when waiting at working fluid, for example can unload safety check from pump, make cleaning solution etc. moving to clean from this orifice flow.

Pump of the present invention comprises: the pump chamber that can change volume by piston or barrier film; Make working fluid flow into the entrance channel of this pump chamber; The outlet flow that working fluid is flowed out from described pump chamber, described pump also has actuator that drives described barrier film and the casing that supports this actuator, described pump is characterised in that, between described entrance channel and described pump chamber, be provided with each the described safety check in the present invention first～the 20 eight aspect.

According to the present invention, this pump has aforesaid safety check, so this pump can be realized miniaturization, simple in structure and reduce cost, can obtain such effect: working fluid mobile smooth and easy carry out and also durability good.Particularly the inertia of outlet flow greater than the inertia of entrance channel, impose in the bigger miniature pump of the pressure of valve seat, aforementioned effect is obvious, but concrete condition will be narrated in the back.

Safety check of the present invention is effective especially to miniature pumps such as diaphragm types, and this pump can be used for cooling unit, water jet knife (water jet knife), the fluid actuator of electronic equipments such as projector, piston power source of micro hydraulic machine etc., but is not limited to this.

Description of drawings

Fig. 1 is the sectional view of the pump that relates to of expression embodiment of the present invention 1.

Fig. 2 is the sectional view of the safety check that relates to of expression embodiment of the present invention 1.

Fig. 3 is the plan view of the valve body that relates to of expression embodiment of the present invention 1.

Fig. 4 is the plan view of another valve body of relating to of expression embodiment of the present invention 1.

Fig. 5 is the plan view of the another valve body that relates to of expression embodiment of the present invention 1.

Fig. 6 is the plan view of other valve bodies of relating to of expression embodiment of the present invention 1.

Fig. 7 is the sectional view of the valve seat that relates to of expression embodiment of the present invention 1.

Fig. 8 is the sectional view of another valve seat of relating to of expression embodiment of the present invention 1.

Fig. 9 is the plotted curve of the relation between the displacement of pressure in the pump chamber that relates to of expression embodiment of the present invention 1 and barrier film.

Figure 10 is the plotted curve of relation of the flow waveform of the expression entrance channel that relates to of embodiment of the present invention 1 and outlet flow.

Figure 11 is the sectional view of the safety check that relates to of expression embodiment of the present invention 2.

Figure 12 is the sectional view of the safety check that relates to of expression embodiment of the present invention 3.

Figure 13 is the sectional view of the safety check that relates to of expression embodiment of the present invention 4.

Figure 14 is the stereogram of the valve body that relates to of expression embodiment of the present invention 4.

Figure 15 is the sectional view of the safety check that relates to of expression embodiment of the present invention 5.

Figure 16 is the sectional view of the safety check that relates to of expression embodiment of the present invention 6.

Figure 17 is the sectional view of the variation of the safety check that relates to of expression embodiment of the present invention 6.

Figure 18 is the plan view of the valve body that relates to of expression embodiment of the present invention 6.

Figure 19 is the plan view of another valve body of relating to of expression embodiment of the present invention 6.

Figure 20 is the plan view of the another valve body that relates to of expression embodiment of the present invention 6.

Figure 21 is the plan view of other valve bodies of relating to of expression embodiment of the present invention 6.

Figure 22 is the sectional view of the safety check that relates to of expression embodiment of the present invention 7.

Figure 23 is the plan view of the valve body that relates to of expression embodiment of the present invention 7.

Figure 24 is the sectional view of the safety check that relates to of expression embodiment of the present invention 8.

Figure 25 is the plan view of the safety check that relates to of expression embodiment of the present invention 8.

Figure 26 is the plan view of the valve body that relates to of expression embodiment of the present invention 9.

Figure 27 is the plan view of another valve body of relating to of expression embodiment of the present invention 9.

Figure 28 is the sectional view of the safety check that relates to of expression embodiment of the present invention 10.

Figure 29 is the plan view of the spin support unit of the safety check that relates to of expression embodiment of the present invention 10.

Figure 30 is the plan view of variation of the spin support unit of the safety check that relates to of expression embodiment of the present invention 10.

Figure 31 is the sectional view of the valve seat of the safety check that relates to of expression embodiment of the present invention 10.

Figure 32 is the sectional view of the spin of the safety check that relates to of expression embodiment of the present invention 10.

Figure 33 is the sectional view of the spin of the safety check that relates to of expression embodiment of the present invention 11.

Figure 34 is the sectional view of the safety check that relates to of expression embodiment of the present invention 12.

Figure 35 is the plan view of the spin support unit of the safety check that relates to of expression embodiment of the present invention 12.

Figure 36 is the sectional view of the safety check that relates to of expression embodiment of the present invention 13.

Figure 37 is the plan view of the spin support unit of the safety check that relates to of expression embodiment of the present invention 13.

Figure 38 is the plan view of the spin support unit of the safety check that relates to of expression embodiment of the present invention 14.

Figure 39 is the sectional view of the spin support unit of the safety check that relates to of expression present embodiment 14 of the present invention.

Figure 40 is the sectional view of the safety check that relates to of expression present embodiment 15 of the present invention.

Figure 41 is the sectional view of the safety check that relates to of expression the present invention other mode of executions.

Embodiment

Below, safety check that the present invention relates to and the pump with this safety check are described.In addition, the mode of execution of the following stated is an embodiment of the invention, and the present invention is not limited thereto.

At first, embodiments of the present invention 1 are described.Fig. 1～Figure 10 illustrates the safety check of mode of execution 1 and has the pump 10 of this safety check.

Fig. 1 has represented to install the longitdinal cross-section diagram of pump of the safety check of mode of execution 1.In Fig. 1, pump 10 has pump chamber unit 100 and actuating unit 200.

Pump chamber unit 100 comprises: pump chamber body 101, and it has the outlet flow 117 that is used for the entrance channel 111 that flows into for working fluid and is used for flowing out for fluid; Barrier film 150; And as the elastic membrane 151 of pulsed flow absorptive unit, it is used to prevent the pulsed flow of working fluid.

Pump chamber body 101 its profile when overlooking is roughly cylindrical shape, and the inlet connecting tube 110 that runs through the tubulose that is provided with entrance channel 111 is given prominence to formation in the side to a direction, and entrance channel 111 is communicated with elastic wall chamber 112.The terminal part of entrance channel is connected with not shown outside pipe arrangements such as pipe, so that working fluid to be provided.At the outstanding outlet connecting pipe 116 that is formed with tubulose of the opposition side of inlet connecting tube 110, run through being provided with outlet flow 117 in the outlet connecting pipe 116.The inner end of outlet flow 117 is communicated with pump chamber 119, and the other end becomes the discharge opening of working fluid, and is connected with not shown outside pipe arrangement.

The elastic wall chamber 112 that is communicated with entrance channel 111 forms recess cylindraceous in the substantial middle of pump chamber body 101, in the drawings, the flexible film 151 of sealing and fixing on the periphery upper surface 121 of opening portion up, the opening portion 113 of pump chamber 119 sides is set the internal diameter of diameter less than elastic wall chamber 112 for.Between this opening portion 113 and pump chamber 119, be provided with safety check 50.Safety check 50 as the fluid barrier element is opened, so that working fluid is passed to outlet flow 117 from entrance channel 111, or is sealed.

In addition, in compare the miniature pump such with the conventional pump of about 5kHz, preferably have elastic membrane 151 and elastic wall chamber 112, but also can have by the present embodiment 1 of high-frequency drive.

Clipping the opposition side of safety check 50 in elastic wall chamber 112 and be formed with relatively thinner recess, is pump chambers 119 by barrier film 150 sealed space.

Pump chamber body 101 forms by metal-powder moulding (Metal Injection Mold).Except that the metal-powder moulding, also can be by moulding such as precision castings.Material as having considered resistance to chemical reagents, antirust, structural strength preferably adopts stainless steel or titanium alloy etc., but also can adopt iron series alloy or copper series alloy.

The details of safety check 50 will be narrated (with reference to Fig. 2) in the back, and it is made of valve seat 60, valve seat frame 70 and valve body 80, and blocking becomes one.And safety check 50 is pressed in the inwall 114 of opening portion 113, and closely fixing.

Barrier film 150 is discoid thin plates of stainless steel etc., and thickness is about 20 μ m, and peripheral part closely is fixed on the peripheral portion of pump chamber 119 by fixation methods such as bonding, welding, brazings.

Be placed with upper plate 140 at the upper surface of elastic membrane 151, by set screw 155 peripheral part of upper plate 140 screwed with elastic membrane 151 then and be fixed on the pump chamber body 101 as the elastic membrane guard block.In Fig. 1, only show a set screw 155, but balancedly be provided with 3 or 4 set screws 155 at in-plane.When working fluid is pulsed, elastic membrane 151 is pulsed to absorb in the cross-wise direction bending, but the face side that contacts with elastic membrane 151 at upper plate 140, even be provided with elastic membrane 151 bendings also not can with the recess in the scope that upper plate 140 contacts, be provided with hole 103 at the in-plane central part, described hole 103 is used to discharge the air by upper plate 140 and elastic membrane 151 sealings.

Pump chamber body 101 is formed with and clips safety check 50 to the outstanding tube portion 122 of the periphery of the opposition side of elastic wall chamber 112, is provided with the internal thread that is used for fixing actuating unit 200 at the end face of tube portion 122.Opening portion at the pump chamber 119 of tube portion 122 inboards closely is fixed with barrier film 150, and barrier film 150 is used to seal actuating unit 200 sides of pump chamber 119.Slyness must be compared by rounding in the bight of the wall that contacts with barrier film 150 of pump chamber 119.

The casing 201 that actuating unit 200 is installed is inserted in inboard in this one 122.

Casing 201 is the tubular of end sealing, the other end opening, and casing 201 constitutes to the outstanding lip part 203 of outside direction by tube portion 202 with from tube portion periphery.Tube portion 202 is pressed into the inboard of the tube portion 122 of pump chamber body 101 with the intensity that can load and unload.

Barrier film 150 is being pushed in the end of tube portion 202, but the internal diameter of tube portion 202 is the size that does not contact with top base station 401, and the bight that contacts with barrier film 150 of tube portion 202 forms slick and sly state.The internal diameter that tube portion 202 contacts with barrier film 150 is roughly the same with the internal diameter of the part that pump chamber body 101 contacts with barrier film 150.

At the insertion through hole of the set screw 205 of being located at lip part 203 be located between the internal thread of tube portion 122 of pump chamber body, by set screw 205, casing 201 (actuating unit 200) and pump chamber unit 100 are fixed, and the two forms as one with the enough intensity that can use pump 10.

Inboard in the tube portion 202 of casing 201 is provided with actuator 301.

Actuator 301 is the piezoelectric elements that carry out stretching vibration at length direction, is fixed with top base station 401 at an end face of actuator 301, and the other end of actuator 301 is fixed on the bottom 209 of casing 201.

Top base station 401 is the disks that formed by proportion materials with smaller such as aluminum alloys, and it closely contacts with barrier film 150 with the face of fastening of actuator 301 an opposite side.Actuator 301 carries out stretching vibration by applying bias voltage from external control circuit (not shown), pushes barrier film 150 and make its bending when elongation, to reduce the volume of pump chamber 119, returns to original state when shrinking, and the volume of pump chamber 119 is increased.

In addition, if suitably set end area, the shape of actuator, top base station 401 also can omit.

Side in the tube portion 202 of casing 201 is provided with through hole 204 laterally from the inboard.Though diagram does not run through being inserted with the lead that is used for actuator 301 is applied bias voltage in this through hole 204.

Herein, the inertia relation to the runner in the pump of the present invention is illustrated.In runner, have under the situation of flexible portion equal pressure change absorber element, at the runner that calculates till as long as inertial time is examined the pressure oscillation absorber element, therefore the inertia of entrance channel is from the inertia as the elastic membrane 151 of the pressure oscillation absorber element runner till the safety check 50, on the other hand, the inertia of outlet flow is the inertia of outlet flow 117.If compare these two inertia, the inertia of outlet flow is much larger than the inertia of entrance channel.

Below, the safety check 50 that mode of execution 1 relates to is described.

Fig. 2 represents the sectional shape of the safety check 50 of present embodiment 1.In Fig. 2, safety check 50 is made of valve seat frame 70, valve seat 60, valve body 80.Valve seat 60 is the disc-shaped parts that run through the opening 61 that is provided with working fluid at central part, and the inflow entrance 62 and the outflow opening 63 of the working fluid of opening 61 must be compared slyness by rounding.Flowing into oral-lateral is to carry out rounding for the inflow resistance that reduces working fluid, is the eddy current in order to reduce working fluid and to flow out and carry out rounding and flow out oral-lateral.

Bight in the periphery of the outflow side of valve seat 60 is provided with inclined-plane 64, so that will be set at suitable size with the area of contact of aftermentioned valve body 80, and valve seat 60 easily is pressed in the valve seat frame 70.

In addition, valve seat 60 is formed by the material of hardness greater than valve seat frame 70, valve body 80, adopts superhard alloy or pottery (Al ₂O ₃Deng).

Valve seat frame 70 forms at central part and runs through the ring-type that is provided with the through hole 71 that is used to be pressed into valve seat 60, the inflow side of the working fluid of through hole 71 forms such shape: from carrying out rounding sleekly with the roughly the same position of the height of valve seat 60 upper surface 65 in the drawings, and mutually continuous with inclined-plane 72, these 72 tops, inclined-plane are greater than through hole 71.And the peripheral part of the face of the opposition side on this inclined-plane 72 is formed with the protuberance 74 of tubular.Valve body 80 is installed in this protuberance 74, and is fastened on the bottom 73 in the protuberance 74 by welding, method such as bonding.The material of valve seat frame 70 is not particularly limited, and can adopt the copper series alloy.

The end face that links to each other with outflow opening 63 of valve seat 60 and the bottom 73 of valve seat frame 70 are positioned at equal height, and valve body 80 engages with valve seat 60 and bottom 73 with identical height.

As previously described, valve seat 60, valve seat frame 70, valve body 80 blocking are integral, and are pressed in the inwall 114 of opening portion of pump chamber body 101.

When valve seat 60 is pushed by switching portion 81 (representing with double dot dash line in the drawings), valve body 80 sealant flow through holes 61 are lifted off a seat 60 o'clock (representing with solid line in the drawings) in switching portion 81, and valve body 80 is opened opening 61.

Fig. 3 represents the plan view of the valve body 80 of present embodiment 1.In Fig. 3, valve body 80 is lamellar disks, and its central part is provided with the roughly otch 82 of U font, and valve body 80 comprises support 84, and this support 84 connects the fixing part 83 of switching portion 81 and periphery.

In addition, though do not illustrate, support 84 and switching portion 81 form thickness and are thinner than fixing part 83.This is in order to improve the constant intensity of fixing part 83, and easily follows the flexible of aforesaid barrier film 150 support 84 and switching portion 81 are carried out driven for opening and closing.

The material of valve body 80 adopts stainless steel etc.

Valve body 80 can adopt the different shape except that shown in Figure 3, uses Fig. 4～Fig. 6 that its variation is described.

Fig. 4 is the plan view of a variation of the valve body 80 of expression present embodiment 1.In Fig. 4, valve body 80 is provided with the roughly otch 82 of horse-hof shape at central part, and valve body 80 comprises support 84, and this support 84 connects the fixing part 83 of switching portion 81 and periphery.Support 84 forms thinner than switching portion 81, becomes by dwindling this width, adjusts elastic force, and sets the driven for opening and closing of carrying out switching portion 81 easily for.

Fig. 5 is the plan view of another variation of the valve body 80 of expression present embodiment 1.In Fig. 5, valve body 80 is formed with switching portion 81 at central part, and the fixing part 83 of the ring-type of periphery and switching portion 81 couple together by 3 supports 84 that are radial extension.Support 84 is followed aforesaid barrier film 150 and is produced bending at thickness direction, thereby carries out the switching of opening 61.

Below, use Fig. 6 explanation other variation at valve body 80 illustrated in fig. 5.

Fig. 6 is the plan view of the variation of expression valve body 80.In Fig. 6, the connection switching portion 81 of support 84 and fixing part 83 contain curve midway, this point is and difference at valve body 80 illustrated in fig. 5 that other shapes are identical.At this moment, contain curve part by making support 84, the amount of movement of switching portion 81 on thickness direction can be got bigger value, and the elasticity coefficient that has reduced support 84 is to be convenient to bending.

Below, use Fig. 7, Fig. 8 that the variation of the valve seat 60 shown in the present embodiment 1 (with reference to Fig. 2) is described.

Fig. 7, Fig. 8 are the sectional views of the shape of the valve seat 60 that relates to of expression present embodiment.In Fig. 7, valve seat 60 is the disc-shaped parts that run through the opening 61 that is provided with working fluid at central part, and the inflow entrance 62 of the working fluid of opening 61 and outflow opening 63 must be compared slyness (representing with label 67,68 in the drawings) by rounding.Flowing into oral-lateral is to carry out rounding for the inflow resistance that reduces working fluid, flows out oral-lateral and is the eddy current in order to reduce working fluid and to flow out and carry out rounding.

The opening 61 that connects the rounding part 67,68 of inflow entrance 62 and outflow opening 63 forms the shape that is connected by level and smooth circular arc, so that the central part of cross-wise direction attenuates.This is in order to reduce fluid resistance (with reference to Fig. 1) at working fluid when the opening portion 113 of pump chamber body 101 flows into the opening 61 that sharply attenuates.

And, at the peripheral portion of outflow opening 63, from planar surface portion 66 outward perimembranous be formed with inclined-plane 64.The area of planar surface portion 66 is configured to such size: closely contact with the switching portion 81 of valve body 80, and working fluid flows out easily when opening.At this moment, if the height around the outflow opening is consistent, then planar surface portion 66 can be set.

Fig. 8 is the sectional view of valve seat that is illustrated in the variation of valve seat 60 illustrated in fig. 7.In Fig. 8, the upper surface 65 (with reference to Fig. 7) of valve seat 60 is not the plane, and is formed with the introduction part 69 of working fluid, and introduction part 69 is continuous from inflow entrance 62 and periphery, and connects by circular arc.This introduction part 69 is a funnel shaped configuration when observing accompanying drawing, thereby forms working fluid from the opening portion 113 of pump chamber body 101 in the shape that reduces pilot flow through hole 61 under the situation of fluid resistance.

In addition, this introduction part 69 also can form the inclined-plane of straight line, and these shapes can suitably be selected according to the diameter of opening portion 113 and the relation between the opening 61.

Below, the driving operation of pump 10 of the present invention is described.

Fig. 9 is the plotted curve of the relation between the displacement of pressure in the expression pump chamber 119 and barrier film 150.Describe with reference to Fig. 1 simultaneously.At first, by providing bias voltage to actuator 301, barrier film 150 vibrations make the volume of pump chamber 119 change continuously.At this moment, when being illustrated in the load pressure that makes pump 10 and being 1.5 barometric pressure and making the pump running, the waveform of the pressure (air pressure) that the waveform of the displacement (μ m) of the state barrier film 150 down that the discharge flow of working fluid is more and the pump chamber by the gauge pressure indication 119 are interior.In the displacement waveform of barrier film 150, the slope of waveform is positive region representation actuator 301 elongations, the process that the volume in the pump chamber 119 reduces.On the other hand, the slope of waveform is the process that negative region representation actuator 301 shrinks, pump chamber 119 interior volumes increase.

Pressure in the pump chamber 119 is when the volume of pump chamber 119 reduces process and begins, and pressure begins to rise.And based on reason described later, before this volume reduced the process end, pressure reached maximum value and begins and reduces.In addition, when the volume of pump chamber 119 reduced process and begins, pressure continued to reduce, and reduces process midway at this volume, produces vacuum state in pump chamber 119, and pressure becomes one 1 atmospheric steady state values as gauge pressure.

Figure 10 is a plotted curve of representing the relation of entrance channel 111 at this moment and the flow waveform in the outlet flow 117.When making pump 10 runnings, make towards flow on plotted curve, to be postive direction along direction (load direction) circulation.

Pressure in pump chamber 119 rises and when overloading pressure, the flow of outlet flow 117 begins to increase.And the working fluids in the pump chamber 119 begin to flow out from outlet flow 117, surpass the point of the volume decrease of the pump chamber 119 that the displacement because of barrier film 150 produces in discharge, and the pressure in the pump chamber 119 begin to reduce.Pressure in pump chamber 119 reduces and when being lower than load pressure, the flow of outlet flow 117 begins to reduce.The variance ratio of these flows with the pressure difference of pressure in the pump chamber 119 and the load pressure value after divided by the inertia values of outlet flow 117 about equally.

On the other hand, in entrance channel 111, the pressure in pump chamber 119 is during less than barometric pressure, because this pressure difference, safety check 50 is opened, and flow begins to increase.And pressure in pump chamber 119 rises and during greater than barometric pressure, flow begins to reduce.The same with above stated specification, the variance ratio of these flows safety check 50 open during, and about equally with the pressure difference of pressure in the pump chamber 119 and the pressure before the entrance channel value after divided by the inertia values of entrance channel 111.And the non-return effect by safety check 50 can prevent adverse current.

Therefore, in aforesaid mode of execution 1, this safety check 50 is made of valve seat 60, valve seat frame 70 and valve body 80, thus formed the simple structure of component parts negligible amounts, thereby can make with lower cost.And,,, in the time of on being assembled to pump 10, need not safety check 50 adjusted again or confirm to obtain stable performance so can individually carry out performance management as safety check 50 because safety check Unit 50 turn to one.And, as safety check 50, owing to can under situation about not contacting, be assembled in the pump 10 described later as the opening 61 of the valve body 80 of important function parts or valve seat 60, thus can damaged or distortion when assembling, the performance that can obtain to be scheduled to.

And, need not be provided as the O RunddichtringO of Sealing etc. at the periphery of safety check 50, so do not have the O RunddichtringO because the sealing deterioration in the long-term using process and the trouble that must regularly change, or consider resistance to chemical reagents and change the trouble of O RunddichtringO material according to the kind of working fluid.

In present embodiment 1, valve body 80 is located at the side that the working fluid of valve seat 60 flows out, and is fastened on the valve seat frame 70, compares so be located at the structure that working fluid flows into a side of valve seat 60 with valve body 80, the circulating resistance of working fluid reduces, and can flow swimmingly.

And the fixing part that is fixed in valve seat frame 70 83 of valve body 80 has the area of structural strength greater than other parts, and support 84 forms has the flexible shape that can vibrate, and switching portion 81 is to form with shape and the thickness that valve seat 60 closely contacts easily.Like this, this valve body 80 gets up mutually different function combinations and forms as one simultaneously, so make easily, and carries out shape, the size management of each several part easily, therefore has the reduction that can realize cost and the effect of the performance of guaranteeing to be scheduled to.

The diameter of the opening 61 of valve seat 60 is less than the opening portion 113 of pump chamber body 101, so flow into this opening 61 or during in opening 61 internal flows, flow resistance increases at working fluid.Therefore, must compare slyness, the inflow resistance in the time of can reducing the working fluid inflow, the flow resistance that forms because of the generation eddy current in the time of can reducing to flow out by making inflow entrance 62, outflow opening 63 roundings.

In addition, opening 61 inside also form with inflow entrance 62, outflow opening 63 consecutive smoothly roughly circular-arc, can reduce the flow resistance of opening 61 inside thus.

In addition, in present embodiment 1, the introduction part 69 of the working fluid of valve seat 60 forms and the funnel-like of the continuous inclined plane shape of inflow entrance 62 or the funnel-like of circular arc roughly, so have the effect of the resistance in the time of can further reducing in the opening 61 that working fluid flows into valve seat 60.

And, in present embodiment 1, valve seat 60 is formed by the material of hardness such as hard metals such as superhard alloy or pottery greater than valve seat frame 70 and valve body 80, so can prevent valve seat 60 owing to the impact or the cavitation erosion of the switching station generation of valve body 80 produce wearing and tearing or damage, and can prevent the wearing and tearing of flowing causing of valve seat 60 because of working fluid.Thus, has the effect that can keep superperformance chronically.

And, pump of the present invention, by actuator 301 with higher frequency vibration, safety check 50 is a small-scale structure, so the pressure of per unit area is high pressure, therefore by adopting the safety check 50 of aforementioned structure, it is good, small-sized, simple in structure and can realize effect cheaply to obtain durability.

In addition, in aforesaid mode of execution 1,, be that example is illustrated, but except that barrier film, the pump that adopts piston also can obtain identical effect by adopting the safety check of structure of the present invention with barrier film 150 as the parts of the volume that changes pump chamber 119.

Below, the mode of execution 2 that the present invention relates to is described with reference to the accompanying drawings.

Figure 11 is the sectional view of the safety check 50 of expression embodiments of the present invention 2.The fixed structure (with reference to Fig. 2) of valve body 80 on valve seat frame 70 of 2 pairs of safety check 50 of explanation in mode of execution 1 of mode of execution changes, so difference only is described.To giving same numeral with mode of execution 1 identical functions parts.In Figure 11, valve seat 60 is pressed into valve seat frame 70.The peripheral part of a side that flows out at the working fluid of valve seat frame 70 is formed with the protuberance 74 of tubular, and the height setting of this protuberance 74 becomes to be higher than the thickness of valve body 80.Installed inside at this protuberance 74 has under the state of valve body 80, and the fixing part 83 that makes protuberance 74 clip valve body 80 carries out crimping (warpage of representing with double dot dash line is the shape shown in the 74A) from figure, makes that thus valve body 80 is fixing.The crimping scope of this protuberance 74 can circumferentially be carried out whole, also can carry out in the part.

Like this, safety check 50 is by blocking, and is pressed in the inwall 114 of opening portion of pump chamber body 101.

Therefore, in mode of execution 2, by the protuberance 74 of valve seat frame 70 is local or in whole circumferential scope crimping, the fixing part 83 of valve body 80 is fixed on the valve seat frame 70, so can fix reliably with less space.And the peripheral part of the fixing part 83 by fixed valve body 80 can be fixed under the state of switching portion 81 that can not make valve body 80 and support 84 (with reference to Fig. 3) distortion.

And valve body 80 is only by in the protuberance 74 that is installed in valve seat frame 70, and the position that can limit in-plane is so even do not use special fixtures, switching portion 81 is the opening 61 of the working fluid of seal valve seat 60 reliably also.

Below, the mode of execution 3 that the present invention relates to is described with reference to the accompanying drawings.

Figure 12 is the sectional view of the safety check 50 of expression mode of execution 3.The fixed structure (with reference to Fig. 2, Figure 11) of valve body 80 on valve seat frame 70 of 3 pairs of safety check 50 of explanation in aforementioned embodiments 1 and mode of execution 2 of mode of execution changes, so difference only is described.For giving same numeral with mode of execution 1 or mode of execution 2 identical functions parts.In Figure 12, valve seat 60 is pressed into valve seat frame 70.The peripheral part of a side that flows out at the working fluid of valve seat frame 70 is formed with the protuberance 74 of tubular, installed inside at this protuberance 74 has under the state of valve body 80, ring-type fixed component 90 is pressed into the inboard of protuberance 74, makes the fixing part 83 of valve body 80 push between the bottom 73 and fixed component 90 that is fixed on valve seat frame 70.

In addition, the size of the internal diameter of fixed component 90 is set in the driving scope of the switching portion 81 that does not hinder valve body 80, and pump chamber 119 (with reference to Fig. 1) side has been implemented chamfering.

Like this, safety check 50 is by blocking, and is pressed into and is fixed in the opening portion inwall 114 of pump chamber body 101.

Therefore, in present embodiment 3, the fixing part of being located at periphery 83 of valve body 80 is by valve seat frame 70 and fixed component 90 clampings and fix, fix so can in valve body 80, can not produce under the state of internal stress, therefore can under the state that support 84 and switching portion 81 do not deform, fix.

Below, the mode of execution 4 that the present invention relates to is described with reference to the accompanying drawings.

Figure 13, Figure 14 represent safety check 50, the valve body 80 that embodiment of the present invention 4 relates to respectively.

Figure 13 is the sectional view of the safety check 50 of expression mode of execution 4, and Figure 14 is the stereogram that the valve body 80 of this safety check 50 represented in summary.In the mode of execution 4, the fixed structure of valve body 80 on valve seat frame 70 and aforesaid mode of execution 2, mode of execution 3 are different, and other parts are identical, so difference (simultaneously with reference to Figure 11, Figure 12) only is described.In Figure 13, valve seat 60 is pressed into valve seat frame 70.The peripheral part of a side that flows out at the working fluid of valve seat frame 70 is formed with the protuberance 74 of tubular, be formed with the protuberance 85 (with reference to Figure 14) of tubular in the periphery of the fixing part 83 of valve body 80, by ring-type fixed component 90 is pressed in this protuberance 85, make the protuberance 85 of valve body 80 push between the protuberance 74 and fixed component 90 that is fixed on valve seat frame 70.

In addition, the internal diameter of fixed component 90 is set the interior size of scope of the driving of the switching portion 81 that does not hinder valve body 80 for, and pump chamber 119 (with reference to Fig. 1) side has been implemented chamfering.

And the protuberance 85 of valve body 80, the protuberance 74 of valve seat frame 70, fixed component 90 are set for: under the state that assembles respectively, highly roughly the same.

Like this, safety check 50 is by blocking, and is pressed into and is fixed in the opening portion inwall 114 of pump chamber body 101.

In Figure 14, specify valve body 80.Valve body 80 forms protuberance 85 container-like that peripheral part is provided with tubular, and is provided with the switching portion 81 of the roughly U word shape of explanation in mode of execution 1 (with reference to Fig. 3).

In addition, the shape of the switching portion 81 of valve body 80, support 84 also can adopt the shape (with reference to Fig. 5, Fig. 6) of the variation of explanation in mode of execution 1.

Below, embodiments of the present invention 5 are described with reference to the accompanying drawings.

Figure 15 is the sectional view of the safety check 50 of expression embodiment of the present invention 5.Mode of execution 5 is compared with mode of execution 4 (with reference to Figure 13), and only the fixed structure difference of valve body 80 so difference only is described, is given same numeral for the identical function parts.In Figure 15, the difference of the internal diameter of the outer circumference diameter of valve seat 60 and valve seat frame 70 is set the thickness that is slightly less than valve body 80 for.The same with the valve body 80 of explanation in mode of execution 4 (with reference to Figure 13, Figure 14), being shaped as at peripheral part of valve body 80 is provided with protuberance 85, but the external diameter of protuberance 85 is set the internal diameter that is slightly larger than valve seat frame 70 for, and its height is roughly the same with the thickness of valve seat 60.

This safety check 50 at first is inserted into valve seat 60 in the protuberance 85 of valve body 80, is pressed into then in the valve seat frame 70, and the unit turns to one thus.Perhaps, also can after being inserted into valve seat frame 70, valve body 80 again valve seat 60 be pressed into.

Like this, safety check 50 is by blocking, and is pressed into and is fixed in the opening portion inwall 114 of pump chamber body 101.

Therefore, the valve body 80 of mode of execution 4, mode of execution 5 all is provided with protuberance 85 at peripheral portion, even for example the thin plate about 20 μ m is reinforced by protuberance 85 is set at peripheral part, thus have whole not flexible, in using operating process the less effect of distortion.

In addition, described valve body so do not need to be designed for the process step that protuberance is set, can not increase cost owing to can make by punch process etc. yet.

And in mode of execution 5, valve body 80 can be fixed between valve seat frame 70 and the valve seat 60, so do not need fixed component, valve seat frame 70 also can not be provided with protuberance 74, and is therefore simple in structure and can realize the reduction of cost.

In addition, the shape of the switching portion 81 of valve body 80, support 84 also can adopt in mode of execution 1 shape of the variation of explanation (with reference to Fig. 4～Fig. 6).

Below, use Figure 16～Figure 21 that the safety check 50 of embodiment of the present invention 6 is described.

Figure 16, Figure 17 represent the safety check 50 of present embodiment 6 and variation, and Figure 18～Figure 21 represents the valve body 80 of use in this safety check 50.In Figure 16, valve seat frame 70 is formed with recess 75 in the side that working fluid flows out, so that the planar surface portion 66 of the end face of valve seat 60 and bottom surface become roughly the same face, the degree of depth of this recess 75 forms guarantees that valve body 80 opens and closes the degree of depth of the needed stroke in cross-wise direction of opening 61 (among the figure valve body 80 from position that solid line is represented to the moving range of the position of representing with double dot dash line).The bottom in the drawings fixed component 90 that is fastened with ring-type of valve seat frame 70.The inside diameter in the hole of offering on fixed component 90 is less than the boundary dimension of valve body 80, and the outer circumference diameter in described hole is set the boundary dimension less than valve seat frame 70 for.

In the space that constitutes by described fixed component 90 and recess 75, valve body 80 is installed.

At this moment, with aforesaid barrier film 150 (with reference to Fig. 1) action synchronously, valve body 80 moves along cross-wise direction, to carry out the switching of opening 61.

Figure 17 represents the variation of the maintenance structure of valve body 80.In Figure 17, hypomere in the figure of the recess that is inserted with valve body 80 75 of valve seat frame 70 also is provided with the recess 76 of diameter greater than recess 75, is pressed into the fixed component 90 of ring-type in this recess 76.Be provided with valve body 80 in the space between this fixed component 90 and valve seat 60.Valve body 80 can move (simultaneously with reference to Figure 16) along the cross-wise direction among the figure as described above.

Figure 18～Figure 21 represents the valve body 80 that adopted in the mode of execution 6.In Figure 18, valve body 80 is by constituting with the bottom: the switching portion 81 that is positioned at the circular of central part; Be positioned at the fixing part 83 of the ring-type of periphery; 3 supports 84 that are radial extension that connect described switching portion 81 and fixing part 83.The size of this switching portion 81 forms sealant flow through hole 61 necessary sizes, but for working fluid is flowed out easily, size is less relatively good.And preferred support 84 is set thinnerly in the scope of the intensity that can guarantee valve body 80.

This valve body 80 is formed in the same level switching portion 81, support 84, fixing part 83 respectively.

Figure 19 represents another variation of valve body 80, and the circular arc that the example of Figure 19 forms as the windmill support 84 is radial, and this shape with valve body shown in Figure 180 is different, but the shape at most of positions is identical.

Figure 20 is the plan view of other variation of the valve body 80 of mode of execution 6, and Figure 21 represents the side view of the observed valve body 80 of the direction of arrow from Figure 20.In Figure 20, support 84 is made of the blade part 86 of propeller-like.This blade part 86 connects switching portion 81 and fixing part 83, and the shape when it is overlooked is fan-shaped, and Figure 21 represents its sectional shape.

The position that recess 75 and the fixed component 90 of the fixing part 83 of this valve body 80 by valve seat frame 70 limits cross-wise direction, blade part 86 be set in fixed component 90 and valve seat 60 discontiguous scopes in.

In Figure 21, the sectional shape of blade part 86 bends to bowl-shape, can be regarded as its face that is positioned at the direction of valve seat 60 is made as the face of retreating 87, its opposition side is made as the propeller cavitation (with reference to Figure 16, Figure 17) of the face 88 that advances.Therefore, when the face 88 that advances is exerted pressure, blade part 86 is pressed against on the valve seat 60 by brute force, thereby sealant flow through hole 61, when the face of drawing back 87 is exerted pressure, to pushing valve body 80 away from the direction of valve seat 60, thereby opening 61 is opened, working fluid is along the smooth and easy outflow of the even surface that retreats face 87.

In addition, in Figure 21, the face that retreats 87 of blade part 86 is outstanding to the upper surface of switching portion 81, fixing part 83, but also its shape set Cheng Bucong switching portion 81, fixing part 83 can be given prominence to.

Therefore, in mode of execution 6,, therefore have the effect of the expanding-contracting action of following barrier film 150 easily, and when valve body 80 was opened, the area of opening that working fluid is flowed out became big, so can increase discharge because valve body 80 is not fixed.

And, valve body 80 limits its position at in-plane by the recess 75 of being located at valve seat frame 70, and limit its moving range in cross-wise direction by fixed component 90, so can be by suitably setting diameter, the degree of depth of recess 75, the amount of movement of valve body 80 is restricted to suitable amount.

When valve body 80 forms propeller-like (with reference to Figure 20, Figure 21), when working fluid flows out, working fluid can be along the face that retreats 87 of the mild curved surface of conduct of blade part 86 under the less state of resistance, from flowing out between the blade part 86, by aforesaid barrier film 150 sealant flow through holes the time, working fluid is pushed the mild bowl-shape face 88 that advances, thus sealant flow through hole 61 efficiently, so can follow the minute movement of barrier film, carry out the switching of opening 61 efficiently.

In addition, the valve body 80 of present embodiment 6 can be by moulding such as stamped sheet metal, if carry out injection moulding with synthetic resin etc., the shape of blade part 86 is formed more near the shape of propeller cavitation, can further improve the efficient of advancing, retreating.

Below, use Figure 22, Figure 23 that embodiments of the present invention 7 are described.

Figure 22 is the sectional view of the safety check 50 of expression present embodiment 7, and Figure 23 represents the plan view of its valve body 80.In Figure 22, on valve seat 60, run through the opening 61 that is provided with 3 working fluids.The shape of opening 61 forms the sectional shape identical with aforementioned embodiments.And opening 61 is configured to constitute triangle when overlooking.Herein, the concrete shape of valve body 80 will be narrated (with reference to Figure 23) in the back, and in the protuberance 74 of being located at valve seat frame 70, valve body 80 is fixed in the protuberance 74 of being located at valve seat frame 70 by this way, that is, the position of switching portion 81 respectively with the position consistency of opening 61.This fixed structure also can adopt the fixed structure shown in aforementioned embodiments 1～mode of execution 5.

In Figure 23, valve body 80 constitutes: support 84 extends from being located at the switching portion 81 of identical position with opening 61 of valve seat 60, and links to each other with fixing part 83.This support 84 is set longlyer in can obtaining to open and close the scope of opening 61 needed elastic force, and does not produce the shape of distortion etc. when forming bending.

In addition, triangular in shape when opening 61 is configured to overlook in Figure 23, but also can be configured on the straight line, and the quantity of opening is unqualified.

And support 84 also can be radial and stretch out from the center of valve body 80, can suitably select and sets according to the elastic force of the size of the configuration of opening 61, valve body 80 and support 84.

Therefore, in present embodiment 7, be provided with the opening 61 of a plurality of working fluids on valve seat 60, independent respectively setting of switching portion 81 that is used to open and close this opening 61 of valve body 80 is so can constitute safety check 50 under the situation that does not increase component parts quantity.In the diaphragm type pump that in as enforcement mode 1, illustrates, when the amplitude of barrier film 150 is the 10 μ m left and right sides, about the about 20 μ m of the actuating range of the switching portion 81 of valve body 80, therefore when wanting to increase the flow of working fluid, be provided with to such an extent that often can increase flow by quantity with opening 61.

And, also can open and close a plurality of openings 61 by a switching portion 81, but consider because the micro-strain and the size deviation of switching portion 81, can not all open and close each opening 61 equally, thereby, has the effect that to carry out the switching of all openings 61 reliably by to opening setting switching portion 81 independently.

Below, the mode of execution 8 that the present invention relates to is described with reference to the accompanying drawings.

Figure 24, Figure 25 represent the safety check 50 of embodiment of the present invention 8.Figure 24 is the sectional view of the safety check 50 of present embodiment 8, and Figure 25 is the plan view of its valve body 80 of seeing from the direction of arrow.In Figure 24, Figure 25, valve seat 60 is pressed in the through hole 71 that valve seat frame 70 offered.The valve seat axle 91 of this valve seat 60 is pressed in the valve seat frame 70 from the inflow entrance side of working fluid, and this valve seat axle 91 is provided with the protruding axis 92 of diameter less than through hole 71.

This valve seat axle 91 forms (with reference to Figure 25) by the fixing part 93 that connects ring-type with 3 supports 94 with the protruding axis 92 that is positioned at the center, the height setting of protruding axis 92 becomes: in the time of in valve seat axle 91 is pressed into valve seat frame 70, identical with the planar surface portion 66 of the end face of valve seat 60.By stack valve seat 60 and valve seat axle 91, on valve seat 60, be formed with the opening 61 of the working fluid of ring-type.This opening 61 is realized opening and closing by valve body 80.

In Figure 25, valve body 80 is made of the support 84 of the fixing part 83 that is positioned at periphery, the switching portion 81 that is positioned at central part and connection switching portion and fixing part, and switching portion 81 has the area of the opening 61 that covers aforementioned ring-type.At this moment, the area of contact of switching portion 81 or valve seat axle 91 and switching portion 81, preferably smaller in can the scope of reliable sealing opening 61, for example, the central part punching in switching portion 81 be to prevent unnecessary contact.

In addition, valve body 80 fixing on valve seat frame 70 can be adopted the various structures of aforementioned embodiments.

And though do not illustrate, the area of the opening 95 of valve seat axle 91 flows into opening 61 greater than the area of the opening 61 that is formed at valve seat 60 so that allow to sufficient working fluid.The unit safety check 50 that turns to one is pressed in the inwall 114 of opening portion of pump chamber 119 like this.

Therefore, in aforesaid mode of execution 8, because opening 61 openings circlewise, so can increase the flow of working fluid.

Under the situation of using piezoelectric element conduct diaphragm type pump 10 of the actuator of explanation in mode of execution 1 (with reference to Fig. 1), because the amplitude of barrier film is less, with it bigger opening is set on valve seat 60, not like mode of execution 7 is provided with a plurality of less openings like that or the opening of ring-type is set as present embodiment 8, fluid resistance can be reduced, the efficient of pump can be improved.

At this moment, as the opening of ring-type, can on valve seat 60, form opening as the divided ring-type of valve seat axle 91.During this situation, will no longer need valve seat axle 91.But, when hard materials such as valve seat 60 selection superhard alloys or pottery,, then can easily form the opening 61 of ring-type if use the valve seat axle 91 shown in the present embodiment 8.

Below, the mode of execution 9 that the present invention relates to is described with reference to the accompanying drawings.

Figure 26, Figure 27 represent the valve body 80 that embodiment of the present invention 9 relates to.Mode of execution 9 proposes is the variation of the engagement relationship of the switching portion 81 of valve body 80 shown in mode of execution 1～mode of execution 8 and opening 61.In Figure 26, be formed with dome-type projection 89 in the switching portion 81 of valve body 80.This projection 89 closely contacts to seal with the outflow opening 63 of the opening 61 of valve seat 60.

And, as shown in figure 27, the roughly projection 89 of cone shape can be set in the switching portion 81 of this valve body 80.According to the size of opening 61 and the conditions such as pressing force that can obtain, can freely select dome or circular cone build.

Therefore, in the valve body shape of mode of execution 9, the switching portion 81 of valve body 80 be dome-shaped or the situation of cone shape under, valve body 80 is the line contact with contacting of outflow opening 63, contact pressure increases, and has the easier effect that prevents that working fluid from leaking.And, when opening switching portion 81, support 84 that links to each other with the projection 89 of switching portion and the distance between the valve seat 60 distance during greater than plane contact, thereby also have the effect that working fluid flows out easily.

In addition, in mode of execution 1～mode of execution 9, show the fixed structure of valve seat frame 70 and valve body 80, the structure of valve body 80, the best modes separately such as structure of valve seat 60, but they can be selected to realize best combination according to the model of pump 10, desired performance etc. arbitrarily.

And in aforementioned embodiments 7, corresponding to a plurality of openings 61 of valve seat 60, valve body 80 is provided with a plurality of switching portion 81, but a plurality of valve bodies corresponding to opening 61 also can be set.

In addition, in aforementioned embodiments 1～9, valve seat 60, valve seat frame 70 and valve body Unit 80 turn to one, but also can valve seat 60 and valve body 80 directly be fixed on the valve seat 60 to realize blocking according to size, the Material Selection of valve body 80.

Below, embodiments of the present invention 10 are described with reference to the accompanying drawings.Valve body at the safety check shown in the aforementioned embodiments 1～9 is formed by plate member, and is relative therewith, and mode of execution 10 has the feature of the spin that adopts spheroid, and the basic structure of pump 10, driving principle etc. are identical with aforementioned embodiments, so omit explanation.In addition, to giving same numeral with aforementioned embodiments identical functions parts in the component parts of safety check.

Figure 28 represents the sectional shape of the safety check 50 that mode of execution 10 relates to.In Figure 28, safety check 50 is made of valve seat frame 70, valve seat 60, spin 130 and spin support unit 160.

Valve seat 60 is ring-shaped members that central part runs through the opening 61 that is provided with working fluid, and the inflow entrance 62 and the outflow opening 63 of the working fluid of opening 61 must be compared slyness by rounding.Flowing into oral-lateral is to carry out rounding for the inflow resistance that reduces working fluid, is the eddy current in order to reduce working fluid and to flow out and carry out rounding and flow out oral-lateral.

Inflow entrance 62 is provided with the roughly inclined-plane 69 of circular shape, and this part forms funnel-like, is used in the smooth and easy importing opening 61 of working fluid.

The outer circumferential face of the outflow side of valve seat 60 has carried out chamfered, so that easily this valve seat 60 is pressed in the valve seat frame 70.

In addition, the same with mode of execution 1, as the material of valve seat 60, adopt superhard alloy or pottery (Al ₂O ₃Deng).This valve seat 60 is pressed in the hole 71 of valve seat frame 70.

Valve seat frame 70 forms central part to be run through and is provided with the ring-type that is used for hole 71 that valve seat 60 is pressed into, the inflow side of the working fluid in hole 71 forms such shape: from carrying out rounding smoothly with the roughly the same position of the height of valve seat 60 upper surface 65 in the drawings, and mutually continuous with the top opening greater than the inclined-plane 72 in hole 71.

In addition, on the cross-wise direction of the tube portion of valve seat frame 70, the position roughly the same with spin 130 is provided with the hole 77 that extends through the outside from the inboard of valve seat frame 70.The needed size of state of confirming the spin 130 in the safety check 50 is set in this hole 77 for.

And, 72 the opposition side on the inclined-plane, 71 interior perimembranous is formed with the protuberance 74 of tubular towards the inboard in the hole.Spin support unit 160 is configured on this protuberance 74.

Like this, valve seat frame 70, valve seat 60, spin 130, spin support unit 160 be by blocking, and be pressed in the inwall 114 of pump chamber body 101.

The concrete condition of spin support unit 160 will be narrated (with reference to Figure 28) in the back, and portion is formed with 3 claws 161 in the central, be provided with spin 130 in this claw 161.Spin 130 is spheroids, and has the gap that can move between the outflow opening 63 of valve seat 60 and claw 161, so that export at 63 o'clock at sealant flow, stops the outflow (representing with double dot dash line in the drawings) of working fluid; When opening outflow opening 63, working fluid is flowed (representing with solid line in the drawings).

Figure 29 represents the plan view of the spin support unit 160 of mode of execution 10.In Figure 29, spin support unit 160 forms such ring-type: periphery is slightly less than the hole 71 of aforementioned valve seat frame 70 and greater than the internal diameter of protuberance 74 (simultaneously with reference to Figure 28).Central part at spin support unit 160 is provided with the roughly spin support 162 of ring-type, central part at this spin support 162 runs through the opening 163 that is provided with working fluid, and spin support 162 is connected by 3 supports 165 with the periphery support 164 of periphery.On spin support 162, claw 161 is given prominence to from being radial between the adjacent support 165, and the cross section is bending (with reference to Figure 28) upward.This claw 161 bends to the shape of the hemisphere of supporting spin 130, and spin 130 is not carried out more mobile at in-plane.

In addition, in order to reduce the resistance to outflow of working fluid, as shown in figure 28, the size of preferred claw 161 be formed on the central authorities that are lower than spin 130 by in the scope of downside.

Therefore, in Figure 28, Figure 29, when sealant flow through hole 61, spin 130 is by from the opening 163 of spin support unit 160 and the opening portion flowing process fluid pushing tow between the support 165, thereby pushes the outflow opening 63 (representing with double dot dash line in Figure 28) of valve seat 60.And spin support unit 160 is also by the working fluid pushing tow, thus with spin 130 by pressing to outflow opening 63.When opening opening 61, the protuberance 74 that spin support unit 160 moves to by valve seat frame 70 limits mobile position, spin 130 also moves to the position of claw 161, thereby opens opening 61, makes working fluid flow out from opening portion between the support 165 and opening 163.

Below, use Figure 30 that the variation (simultaneously with reference to Figure 28, Figure 29) of the spin support unit 160 of mode of execution 10 is described.

Figure 30 represents the cross section of spin support unit 160.In Figure 30, spin support unit 160 is formed with the side guide portion 166 of the tubular of giving prominence to towards valve seat 60 at the peripheral portion of periphery support 164.

The outer circumference diameter of this side guide portion 166 is set interior all diameters in the hole 71 that is slightly less than valve seat frame 70 for, thus can be along the hole 71 wall move to the direction of valve seat 60.In addition, except that side guide portion 166, the shape of claw 161 grades forms the shape identical with spin support unit shown in Figure 29 160.

The material of spin support unit 160 is not particularly limited, but then can adopt stainless steel if consider structural strength, corrosion resistance, then can adopt aluminum alloy, synthetic resin etc. if consider lightweight.When adopting aluminum alloy, preferably the surface is implemented anti-oxidant treatments such as alumite processing, in addition, when adopting synthetic resin,, can freely select the position relation of claw 161 and support 165 owing to can adopt injection moulding.

Below, the valve seat 60 that embodiment of the present invention 10 relates to is described.

Figure 31 represents the cross section of the valve seat 60 of mode of execution 10.In Figure 31, valve seat 60 runs through the opening 61 that is provided with working fluid at the center, as previously described, inflow entrance 62, the outflow opening 63 of this opening 61 must be compared slyness by rounding, inflow entrance 62 sides are provided with by the continuous inclined-plane 69 of funnelform circular arc, and form the shape that easily working fluid is imported in the opening 61.Outflow opening 63 sides are formed with pit 63A, and form from opening 61 to this pit 63A continuous shape smoothly, and described pit 63A has the circular arc of diameter greater than the diameter of spin 130.

In Figure 31, in spin 130 when the position (130A) of sealant flow through hole 61 moves to open position 130B, compare (not shown) during with this pit 63A not, even spin 130 displacement distance in vertical direction is identical, the average distance from the pit 63A of valve seat 60 to spin 130 also becomes big.Thus, the flow section of working fluid increases, and fluid resistance reduces.

Below, use Figure 32 that the spin 130 of mode of execution 10 is described.

Figure 32 is the sectional view of spin 130 of mode of execution 10 that carries out the switching of valve seat 60.In Figure 32, spin 130 is spheroids, is made of shell 131 and hollow portion 132.This spin 130 can adopt metallic material such as iron series alloy, Stainless Steel Alloy, copper series alloy, aluminum alloy, perhaps nonmetallic material such as glass, pottery, synthetic resin.Herein, for the mean value of the density that reduces spin 130, making central part is hollow state.Thus, in working fluid, make the weight of per unit volume of the weight of per unit volume of spin 130 and the working fluid that spin 130 is pushed open roughly the same.

Suppose that working fluid is that proportion is 1 water, when the material of establishing spin 130 is a proportion when being 7.9 iron series alloy, the thickness of shell 131 be spin 130 radius about 4.5%.The thickness of this shell 131 can be calculated according to the proportion of working fluid, the proportion of spin material.Therefore, be proportion when being 4 glass at the material of spin 130, the thickness of shell 131 is as long as be about 8.9% thickness of ball radius.

And if employing proportion is 1 synthetic resin etc., then spin 130 does not need hollow portion 132.In addition, if the driving force (pressure) of bigger working fluid of proportion or aforesaid pump when fully big, does not need hollow portion yet.

Therefore, in aforesaid mode of execution 10, safety check 50 is made of valve seat 60, valve seat frame 70, spin 130 and spin support unit 160 these four parts, so component parts negligible amounts, and all be simple shape, so make easily, and carry out the shape management easily, can make with low cost.And,, can obtain the performance of stable safety check 50 because safety check 50 by blocking, so can individually carry out performance management as safety check 50, in the time of for example in being assembled to pump 10, need not again safety check 50 to be adjusted and confirmed.The pump of stable performance can be provided as a result.And, as safety check 50, owing to can under situation about not contacting, be assembled in the pump 10 as the opening 61 of the spin 130 of important function parts and valve seat 60, thus can damaged or distortion during assembling, the performance that can obtain to be scheduled to.

And, owing to valve seat 60 opens and closes by spin 130, so when opening, working fluid is in the Surface runoff of spin, so flow resistance is less, when sealing, valve seat 60 becomes line with spin 130 and contacts, and it is big that contact pressure becomes, have can reliable sealing effect.

And the spin support unit 160 of supporting spin 130 forms Figure 29, shape shown in Figure 30, easily forms this spin support unit 160 so for example can utilize processing method such as punching press that sheet metal is processed.And, spin 130 from the opening 163 of spin support unit 160 by working fluid pushing tow central part, again from the opening portion between the support 165 by working fluid pushing tow periphery, thereby push valve seat 60, so that opening 61 sealings, so by the variation in pressure of working fluid, spin 130 moves easily, and has the effect of the sealing of the opening 61 that can carry out valve seat 60 reliably.

In addition, spin 130 is by 3 outstanding claws, 161 supportings of being located at spin support 160, this claw 161 is in the scope internal support spin 130 less than the diameter of spin 130, so can carry out the supporting of spin 130 by this claw 161 more reliably in the less state lower support spin 130 of obstruction that flows to working fluid.

And,, do not fix though spin 130 and spin support unit 160, spin support unit 160 and valve seat frame 70 are supported respectively.Therefore, only move the opening 61 that can open and close valve seat 60, also can come pushing tow spin 130 with sealant flow through hole 61, and spin 130 and spin support unit 160 also can move to open opening 61 together by spin support unit 160 by spin 130.Spin 130 moves, the also transportable structure of spin support unit 160 owing to form not only, and therefore for example spin support unit 160 bears the positive pressure of pump chamber and can push spin 130, so can improve the sealing force of opening 61.

In spin support unit 160 shown in Figure 30, be provided with the side guide portion 166 of tubular at the periphery of periphery support 164, so compare with the situation that does not have side guide portion 166,71 inwall moves because spin support unit 160 is along the hole, therefore can not tilt, move and to carry out swimmingly, thereby can reduce the switching of opening 61 reliably.And, even this side guide portion 166 is set, the space that does not also need to increase safety check 50.

And, because the density mean value of spin 130 and the density of working fluid are roughly the same, so in working fluid, when for example stopping the driving of pump 10, spin 130 is in state of suspension or the approaching state that suspends, so when driven pump 10, spin 130 moves by the small variation in pressure of working fluid, therefore when the actuator 301 of pump 10 was driven with the such bigger frequency of piezoelectric element, spin 130 also can synchronously move with this driver frequency, can carry out the switching of valve seat 60.

And, in mode of execution 10, spin 130 is a hollow, so can reduce the mean value of density, by adjust the thickness of the shell 131 of spin 130 according to the material of the material of spin 130 and working fluid, as previously described, it is roughly the same that the weight of the per unit volume of spin 130 can be set the weight of per unit volume of the working fluid of being pushed open with spin 130 for, therefore, as previously described, spin 130 can move according to the small variation in pressure of working fluid, so under the situation of the pump 10 of present embodiment, because the driving of easy and actuator is synchronously moved, therefore can at a high speed and carry out the switching of valve seat 60 reliably.

In addition, it is mutually continuous smoothly by circular arc roughly with outflow opening 63 that the opening 61 of valve seat 60 forms the inflow entrance 62 that makes the working fluid circulation, the opening portion outside of outflow opening 63 is formed with pit 63A, this pit 63A has the circular arc of diameter greater than the diameter of spin 130, so the fluid resistance can reduce working fluid and flow through valve seat 60 time.Particularly open and close by spin 130 owing to outflow opening 63, so when the circular-arc pit 63A that is formed with in the opening portion of this outflow opening 63 outside greater than the diameter of spin, even spin 130 lifts off a seat 60 slightly, the opening section that also can guarantee to be used to flow out working fluid is long-pending bigger, therefore can increase the outflow flow of working fluid, promote lift off a seat 60 effect of spin 130 thereby also have.

And, because spin 130 moves to outflow opening 63 and seals along this pit 63A, even move so little deviation ground appears in spin 130 in the position of in-plane, also spin 130 can be directed on the surface of this pit 63A, thus sealant flow through hole 61 more reliably.

Below, the mode of execution 11 that the present invention relates to is described with reference to the accompanying drawings.The feature of mode of execution 11 is that the form of spin is different with mode of execution 10.Giving same numeral to the identical function position describes.

Figure 33 represents the cross section of the spin 130 of embodiment of the present invention 11.Other mode of executions of the spin 130 of mode of execution 10 described safety check 50 (with reference to Figure 28) are located in these spin 130 expressions.In Figure 33, spin 130 is the spheroids that are provided with hollow portion 132, is formed with coating 133 on the surface of shell 131.As coating, the hard coat of metal such as superhard alloy, nickel, chromium or pottery etc. can be adopted,, wet types plating methods such as galvanoplastic, electroless plating method can be adopted as the coating forming method, dry types such as perhaps vacuum evaporation, sputter, ion plating plating method can be selected according to the material of spin 130.

And,, also can adopt the soft material of rubber series as coating.

As previously described, because the density mean value of preferred spin 130 and the quality of working fluid are roughly the same, so the thickness of coating 133 is set according to the material of spin 130, the thickness of shell 131, but, be preferably set to more than or equal to 5 μ m in order to ensure structural strength.

And this coating 133 can form one deck, also can with the combined multilayer that forms of other materials.For example, also can coat soft coating on the upper strata of hard coat.

Therefore, in mode of execution 11, the spin 130 that is used to open and close opening 61 is formed with coating 133 in case surface, so from the easy degree of making, even define the material of spin 130, as long as select hard coat, surface hardness promptly can improve, therefore have such effect: though long-time the use, wearing and tearing or impact because of the switching of opening 61 and to cause the situation of damage also less.

And, as previously described,,, can prevent the distortion of spin 130 by forming this coating even spin 130 is a hollow.

In addition, when having selected the soft coating of rubber series, can improve the sealing of valve seat 50.

Below, use Figure 34, Figure 35 that mode of execution 12 is described.Mode of execution 12 is with respect to the safety check 50 shown in the mode of execution 10 (with reference to Figure 28), and the supporting structure difference of spin is so specify this difference.Give same numeral for identical function parts and position.

Figure 34 is the sectional view of the safety check 50 that relates to of expression mode of execution 12.In Figure 34, valve seat 60 is pressed in the hole 71 of valve seat frame 70, on the protuberance 74 of being located at valve seat frame 70 spin support unit 160 is installed, and is provided with spin 130 between valve seat 60 and spin support unit 160, thereby realizes blocking.This safety check 50 is pressed in the opening portion inwall 114 of pump chamber body 101.

Figure 35 represents the plan view of the spin support unit 160 that mode of execution 12 relates to.In Figure 35, spin support unit 160 is by constituting with the bottom: periphery support 164; The spin support 162 of supporting spin 130; 3 supports 165 that connect periphery support 164 and spin support 162.Run through at the central part of spin support 162 and to be provided with the opening 163 that makes the working fluid circulation.Spin 130 moves between spin support 162 and valve seat 60, with the switching of the opening 61 of the working fluid that carries out valve seat 60.

In Figure 34, when valve seat 60 was opened, under the state of spin 130 in the opening 163 of part insertion spin support unit 160, the position of its in-plane was limited.Spin support unit 160 is positioned at the position of the protuberance 74 of butt valve seat frame 70.This state is represented with the solid line among the figure.When spin 130 sealant flow through holes 61, spin 130 is pushed the outflow opening 63 of valve seat 60.The spin 130 of this moment and the double dot dash line among the spin support unit 160 usefulness figure are represented.

Distance between spin support unit 160 and the valve seat 60 is configured to such distance: no matter spin 130 is in the arbitrary state that valve seat 60 is still closed valve seat 60 of opening, spin 130 can not get loose with engaging of opening 163, is that spin 130 can be from the relation that breaks away between opening 163 and the outflow opening 63.

Therefore, the safety check 50 shown in the mode of execution 12 is not owing to there is the claw 161 of the spin support unit 160 shown in the mode of execution 10 (with reference to Figure 29,30), so can utilize processing method processing metal sheet material such as punching press easily to form.And, so the opening 163 of being located at spin support unit 160 is not owing to there is claw 161 can become big, spin 130 is increased by the area of working fluid pushing tow, so spin 130 is mobile easily, has the effect of the sealing of the opening 61 that can carry out valve seat reliably.

And, lift off a seat 60 in spin 130, when making that valve seat 60 is opened, supporting under the state of spin 130 in inserting opening 163, with being limited the position so can in less space, be bearing in the appropriate location to spin with simple shape.

Below, the mode of execution 13 that the present invention relates to is described with reference to the accompanying drawings.

Figure 36, Figure 37 represent the sectional view of safety check 50 of mode of execution 13 and the plan view of spin support unit 160 respectively.Mode of execution 13 is compared with mode of execution 12, is provided with the spring section 167 that is used to push spin 130 at spin support unit 160, and other structures are identical with mode of execution 12, so difference only is described.In Figure 36,37, spin support unit 160 is formed with in the opening 163 of central authorities and is the outstanding spring section 167 of ligule.Other shapes of spin support unit 160 and the spin support unit of mode of execution 12 160 identical (with reference to Figure 35).

In Figure 36, spin 130 is pressed against on the outflow opening 63 of valve seat 60 by the elastic force of the spring section 167 of spin support unit 160, thus seal valve seat 60 (representing with double dot dash line in the drawings).At this moment, the spin pressing force of spring section 167 is as long as be the degree that spin 130 is contacted with outflow opening 63, and the pressing force major part of 130 pairs of valve seats of spin is pressing forces of working fluid.At this moment, think that spin support unit 160 also by the working fluid pushing tow, but spin support unit 160 moves to the position of angle contacting of the inwall of spin 130 and opening 163.At this moment, spring section 167 is to the lateral direction bending of safety check 50.

In addition, spin 130 presses down spring section 167, and leaves from valve seat 60, thereby outflow opening 63 is opened.The elastic force of this spring section 167 is set such size for: when outflow opening 63 is opened, can discharge spin by the negative pressure of pump chamber 119.

Therefore, according to aforesaid mode of execution 13, spin 130 is used to open and close the outflow opening 63 of valve seat 60, but owing to be provided with spring section 167 at spin support 160, so pressing force of pressure that can be by having applied this elastic force and working fluid, spin 130 is pressed on the outflow opening 63, thereby can seals reliably.And,, when pump 10 is stopped, can preventing that working fluid from flowing out if spin 130 is contacted all the time with the outflow opening 63 of valve seat 60 by this spring section 167.

Below, the mode of execution 14 that the present invention relates to is described with reference to the accompanying drawings.

Figure 38, Figure 39 are the plan view and the sectional views of the spin support unit 180 of the mode of execution 14 that the present invention relates to of expression.The spin support unit 160 of aforementioned embodiments 10～mode of execution 13 is plate-shaped members, relative therewith, have the feature that is formed spin support unit 180 by wire rod at mode of execution 14, other structures are identical with mode of execution 12 (with reference to Figure 34,35), so omit explanation.In Figure 38, Figure 39, spin support unit 180 is that the wire rod of circle or rectangle forms by the cross section, is wound with spin support 182 at central part, and the two end part of spin support unit 180 are formed with support 185, described support 185 is the center with spin support 182, and point symmetry ground extends reels.The upper surface of these supports 185 and spin support 182 is in equal height.And the central part that forms by spin support 182 is the opening 183 of working fluid, and opening 163 (with reference to Figure 35) size big or small and the spin support unit 160 of explanation in mode of execution 12 is roughly the same.

Though do not illustrate, the same with the spin support unit 160 (with reference to Figure 34) shown in the mode of execution 12, the spin support unit 180 of Xing Chenging also is installed in the valve seat frame 70 like this.That is, be installed on the protuberance 74 of valve seat frame 70 to the support 185 engaging supportings at two ends.

The spin support unit 180 of present embodiment adopts the big materials of structural strength such as stainless steel or piano wire.And (SPRON is the trade mark of Seiko (セ ィ コ one ィ Application ス ッ one Le メ Application ト) Co., Ltd. if adopt the SPRON material of uses such as hairspring of the clock and watch be commonly referred to as parelinvar.Main component is the alloy of Co, Ni, Cr), then can obtain to use the spin support unit 180 of thinner wire rod.

Therefore, according to mode of execution 14, except that can obtaining the effect identical, because spin support unit 180 is formed by thinner wire rod with aforementioned embodiments 12, so particularly at working fluid when valve seat 60 flows out, can reduce the fluid resistance of working fluid significantly.And, when this spin support unit 180 forms at the wire rod that by the cross section is circle, can further reduce fluid resistance.

This spin support unit 180 can easily be made by methods such as wire rod moulding, does not need main equipment, so have reducing cost very effective.

In addition, the mode of execution 15 that the present invention relates to is described with reference to the accompanying drawings.

Figure 40 is the sectional view of the safety check of expression mode of execution 15.The feature of mode of execution 15 is that spin support unit 160 is fastened on the valve seat frame 70, and spin 130 is identical with the structure shown in mode of execution 10～mode of execution 14 with valve seat 60.In Figure 40, the shape of spin support unit 160 is identical with the spin support unit 160 (shown in Figure 29) shown in the mode of execution 10, and the external diameter of periphery support 164 forms the internal diameter greater than the valve seat mounting hole 71 of valve seat frame 70.

Be provided with the protuberance 74 of ring-type in the end, outflow side of the working fluid of valve seat frame 70, this protuberance 74 is used to limit the position of spin support unit 160, installed inside at this protuberance 74 has spin support unit 160, and valve seat frame 70 and spin support unit 160 is fastening by welding, fixation method such as bonding.

Therefore, according to aforesaid mode of execution 15, spin 130 opens and closes opening 61 separately, but because spin support unit 160 is fastened on the valve seat frame 70, and spin 130 in the position of in-plane by claw 161 restrictions of spin support unit 160, so can limit the position of spin more exactly with respect to the opening of valve seat.

And, owing to form the structure that only has spin 130 to move, therefore compare with the structure that spin support unit 160 moves, can provide structure simple more safety check.

In addition, the invention is not restricted to aforementioned embodiments, the distortion of being carried out in the scope that can reach purpose of the present invention, improvement etc. all are contained in the present invention.

For example, in aforementioned embodiments 10～13, safety check 50 is assemblied in valve seat 60, valve seat frame 70, spin 130 and spin support unit 160 on the pump chamber body 101 with forming a unit, but also can not use valve seat frame 70, and directly assemble valve seat 60, spin 130 and spin support unit 160.

Figure 41 represents not use the sectional view of the safety check 50 of valve seat frame 70.Pump chamber body 101 is provided with from the hole that opening portion 113 is communicated with pump chamber 119 (simultaneously with reference to Fig. 1), be formed with the protuberance 102 of ring-type in the inboard of the inwall 114 in this hole, be supported with the periphery support 164 of aforementioned Figure 29 or spin support unit 160 shown in Figure 30 at this protuberance 102.Inboard at the claw 161 of spin support unit 160 is placed with spin 130, and valve seat 60 is pressed in the inwall 114 of aforementioned pump chamber body 101, thereby constitutes safety check 50.

In this structure,,, can obtain the effect identical with aforementioned embodiments about the switching of valve seat 60 though can not obtain aforementioned embodiments such safety check 50 by the effect of blocking.And structure can be simpler.

And, in the structure (with reference to Figure 40) of the fastening spin support unit 160 of enforcement mode 15 and valve seat frame 70, can adopt the spin support unit 160 (with reference to Figure 37) shown in spin support unit 160 (with reference to Figure 35) shown in the mode of execution 12 or the mode of execution 13.

In addition, in aforementioned embodiments 10～13, spin 130 and spin support unit 160 are separated from one another, but, for example also can be fixed into one to spin 130 shown in the mode of execution 12 and spin support unit 160, make spin 130 and spin support unit 160 can carry out the switching of valve seat 60 together movably by method such as bonding.

In addition, in aforementioned embodiments 11, spin 130 is the spheroid of hollow, still, for example also can adopt porous materials such as phenylethylene porous synthetic resin or porous ceramics.If the employing porous material then forms the coating of water tightness on the surface.

If adopt this porous material, can realize the lightweight of spin 130, can obtain to need not to be the effect of hollow.

Claims (29)

1. safety check comprises:

The valve seat frame of tubular;

Valve seat, it is fastened in this valve seat frame, and has the opening that is used to make the working fluid circulation; And

Valve body, the outflow side that it is positioned at the working fluid of described valve seat is used to open and close described valve seat,

Described safety check is characterised in that,

Described valve seat frame, described valve seat and described valve body unit turn to one.

2. safety check according to claim 1 is characterized in that,

Described valve seat is formed by the material of hardness greater than described valve seat frame and described valve body.

3. safety check according to claim 1 and 2 is characterized in that,

Described valve body comprises: the fixing part that is positioned at periphery; With the switching portion of the opening of described valve seat, and described valve body is located at the side that the working fluid of described valve seat flows out, and described fixing part is fastened on the described valve seat frame.

4. according to each the described safety check in the claim 1 to 3, it is characterized in that,

The outflow side end face of the working fluid of described valve seat and the end face of described valve seat frame are arranged on roughly the same height,

Described fixing part is fastened on the end face of described valve seat frame.

5. according to each the described safety check in the claim 1 to 3, it is characterized in that,

Described valve body comprises: the fixing part that is positioned at periphery; The switching portion of the opening of described valve seat; And the support that connects this switching portion and described fixing part,

Described valve body is installed in the inside of the tubular protuberance on the periphery of being located at described valve seat frame,

Described fixing part is fastened by making described protuberance distortion.

6. according to each the described safety check in the claim 1 to 3, it is characterized in that,

Described valve body is installed in the inside of the protuberance of the peripheral portion of being located at described valve seat frame, and the fixed component of a ring-type is pressed in the protuberance of described valve seat frame, and thus, described valve body is sandwiched between described valve seat frame and the described fixed component.

7. according to each the described safety check in the claim 1 to 3, it is characterized in that,

Be provided with the protuberance of a tubular at the periphery of the fixing part of described valve body, this protuberance is installed in the protuberance of described valve seat frame, the fixed component of ring-type is pressed in the protuberance of described valve body, and described thus valve body is clipped between described valve seat frame and the described fixed component.

8. according to each the described safety check in the claim 1 to 3, it is characterized in that,

Be located at a tubular protuberance of the fixing part periphery of described valve body, be pressed into and be clamped in the radial clearance of described valve seat and described valve seat frame.

9. according to each the described safety check in the claim 1 to 3, it is characterized in that,

Described valve body to be can being installed in the inside of the recess of being located at described valve seat frame along the mode that thickness direction moves,

Be provided with the fixed component of ring-type at the recess periphery of described valve seat frame, the fixed component of described ring-type is used to support described valve body, and makes this valve body can open and close described opening.

10. according to each the described safety check in claim 1 to 3 and the claim 9, it is characterized in that,

Described valve body comprises: the fixing part that is positioned at periphery; Be positioned at the switching portion of substantial middle portion; And a plurality of blade parts that connect this switching portion and described fixing part.

11. each the described safety check according in the claim 1 to 10 is characterized in that,

Be provided with a plurality of openings at described valve seat,

Described valve body is provided with the quantity switching portion corresponding with described opening.

12. each the described safety check according in the claim 1 to 10 is characterized in that,

The opening opening of the working fluid of described valve seat becomes oval shape.

13. each the described safety check according in the claim 1 to 12 is characterized in that,

The inflow entrance of the working fluid of the opening of described valve seat and outflow opening form by rounding sleekly, to reduce the fluid resistance of working fluid.

14. each the described safety check according in the claim 1 to 13 is characterized in that,

Form continuous roughly circular arc between the inflow entrance of the working fluid of described opening and the outflow opening smoothly.

15. each the described safety check according in the claim 1 to 14 is characterized in that,

The side that the working fluid of described valve seat flows into forms funnel-like or the roughly circular-arc funnel-like with the continuous inclined plane shape of described inflow entrance.

16. each the described safety check according in the claim 1 to 15 is characterized in that,

The face that outflow opening periphery described valve body and described opening closely contacts forms dome-shaped or cone shape.

17. safety check according to claim 1 is characterized in that,

The valve body that is used to open and close described valve seat is a spin,

Described safety check also has the spin support unit, and it is used to support this spin, and is provided with the opening of working fluid,

Described valve seat frame, described valve seat, described spin and described spin support unit form a unit.

18. according to claim 1 or 17 described safety check, it is characterized in that,

Described spin support unit comprises: the support that is positioned at periphery; Be positioned at the opening that is used to make the working fluid circulation of substantial middle; Support the spin support of described spin; And the joint that connects the arm shape of described support and described spin support.

19. according to claim 17 or 18 described safety check, it is characterized in that,

Be extruded with the claw of the described spin of supporting at described spin support.

20. each the described safety check according in the claim 17 to 19 is characterized in that,

When opening and closing described valve seat, move at the same time or separately by making described spin and described spin support unit, carry out the switching of described valve seat.

21. each the described safety check according in the claim 17 to 20 is characterized in that,

Be provided with at the spin support of described spin support unit and be used for described spin by the spring section that is pressed on the described valve seat.

22. each the described safety check according in the claim 17 to 21 is characterized in that,

Periphery at the periphery support of described spin support unit along the internal surface in the hole of being located at described valve seat frame, is provided with the side guide portion of tubular.

23. each the described safety check according in the claim 17 to 22 is characterized in that,

The density mean value of described spin and the density of working fluid are roughly the same.

24. each the described safety check according in the claim 17 to 23 is characterized in that,

Described spin is a hollow.

25. each the described safety check according in the claim 17 to 24 is characterized in that,

Surface in described spin is provided with coating.

26. each the described safety check according in the claim 17 to 25 is characterized in that,

The opening of the described valve seat outside forms the inflow entrance that is used to make the working fluid circulation and outflow opening by roughly circular arc is continuous smoothly,

The opening portion of described outflow opening forms the circular arc of diameter greater than the diameter of described spin.

27. safety check according to claim 17 is characterized in that,

Described spin support unit is fastened on the described valve seat frame.

28. each the described safety check according in the claim 17 to 27 is characterized in that,

Side between valve seat described valve seat frame, described and described spin support unit is provided with the hole that extends through the outside from the inboard.

29. a pump comprises:

Can change the pump chamber of volume by piston or barrier film;

Be used to make working fluid to flow into the entrance channel of this pump chamber;

Be used to make the outlet flow of working fluid from described pump chamber outflow,

Described pump also has: the driver that drives described barrier film; With the casing that is used to support this driver,

Described pump is characterised in that,

Between described entrance channel and described pump chamber, be provided with each the described safety check in the claim 1 to 28.

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