JP2005220810A - Pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pump for increasing the discharge amount of operating fluid by reducing fluid resistance in a pump flow path. <P>SOLUTION: The pump 10 comprises a pump chamber 90 displacement variable with a diaphragm 50, an inlet flow path 32 via which the operating fluid flows into the pump chamber 90, an outlet flow path 22 via which the operating fluid flows out of the pump chamber 90, and a check valve 40 provided between the inlet flow path 32 and the outlet flow path 22. A flow path communicating the inlet flow path 32, the pump chamber 90 and the outlet flow path 22 with one another is formed at an obtuse angle to the plane of the diaphragm 50 on the pomp chamber side. Thus, the discharge amount of the operating fluid is increased by reducing the fluid resistance in the flow path. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a pump that moves a working fluid by changing the volume of a pump chamber using a diaphragm, and more particularly to a small high-power pump.

  Conventionally, in a small pump that moves the working fluid by changing the volume of the pump chamber using a diaphragm, the working fluid flows into the pump chamber from the inlet flow channel, and the flow channel flows out from the pump chamber to the outlet flow channel. However, there is known a pump that is provided substantially perpendicular to the pump chamber, that is, the inflow direction and the outflow direction of the working fluid are bent by 180 degrees (for example, see Patent Document 1).

JP 2002-322986 A (6th page, FIG. 1)

  In Patent Document 1, when the working fluid flows from the inlet channel to the pump chamber and from the pump chamber to the outlet channel, the flow direction of the working fluid is bent twice to 90 degrees with respect to the pump chamber. However, in such a rapidly bent flow path, a vortex flow is generated in the working fluid, resulting in an increase in fluid resistance. Therefore, there is a problem that the output of the actuator that drives the diaphragm cannot be sufficiently efficiently transmitted to the working fluid.

  An object of the present invention is to provide a pump capable of reducing the fluid resistance of the flow path in the pump and increasing the discharge amount of the working fluid.

  The pump according to the present invention includes a pump chamber whose volume can be changed by a diaphragm, an inlet flow path for flowing the working fluid into the pump chamber, an outlet flow path for flowing the working fluid from the pump chamber, and the inlet flow path And a check valve between the outlet channel and the outlet channel, and the channel communicating the inlet channel, the pump chamber, and the outlet channel is an obtuse angle with respect to the pump chamber side plane of the diaphragm It is formed to be inclined.

  According to this invention, the flow path from the inlet flow path to the outlet flow path is formed at an obtuse angle with respect to the pump chamber side plane of the diaphragm, so that the working fluid is less likely to generate a vortex. As a result, the fluid resistance of the working fluid can be reduced, and the discharge amount can be increased.

  In the above-described structure, it is preferable that a check valve is provided in the middle of the flow path.

According to such a structure, as will be described in detail later, this flow path shows a straight pipe, and the flow direction of the working fluid is not suddenly bent in the flow path. Less fluid resistance.
Further, since the check valve can be provided at a position close to the pump chamber, the volume of the working fluid in the pump chamber can be reduced. Then, since the volume in which the working fluid in the pump chamber is compressed and expanded by the pressure change can be reduced, the driving energy can be used more effectively, and the discharge amount of the working fluid can be increased.

The pump according to the present invention includes a pump chamber whose volume can be changed by a diaphragm, an inlet flow path for flowing the working fluid into the pump chamber, an outlet flow path for flowing the working fluid from the pump chamber, and the inlet flow path And a check valve between the outlet channel and the outlet channel, and a pedestal having a slope that reduces fluid resistance of the working fluid in the channel communicating the inlet channel and the outlet channel. It is provided in.
Here, the inclined surface that reduces the fluid resistance means an inclined surface in which the working fluid from the inlet channel toward the outlet channel is bent at an obtuse angle.

  According to the present invention, the working fluid flows into the flow path through the check valve, and at this time, the working fluid collides with the pedestal. Although this pedestal is described in detail in Example 3 to be described later, since the slope is inclined so as to reduce the fluid resistance of the working fluid, the working fluid is directed along the slope toward the outlet channel. Therefore, the flow from the inlet channel to the outlet channel becomes smooth without being disturbed by a vortex or the like, and the fluid resistance can be reduced. As a result, the discharge flow rate can be increased.

  Also, when the diaphragm is driven so as to reduce the volume of the pump chamber, the pedestal is provided with a slope as described above, and the slope angle of the slope is such that the working fluid is pushed out to the outlet channel side. For this reason, the outflow speed can be increased compared with the conventional structure in which the outlet channel is pushed at a right angle, and the discharge amount can be increased under the same pump driving conditions.

  Further, the pump of the present invention includes a pump chamber whose volume can be changed by a diaphragm, an inlet channel for flowing the working fluid into the pump chamber, an outlet channel for flowing the working fluid from the pump chamber, and the inlet A check valve is provided between the flow path and the outlet flow path, and the diaphragm is inclined so as to have an obtuse angle with respect to the flow path direction of the outlet flow path.

  According to such a structure, in the step of the diaphragm compressing the pump chamber, the bending angle of the flow of the working fluid from the pump chamber toward the outlet channel can be made obtuse, the fluid resistance is reduced, and the discharge amount is reduced. Can be increased.

  The pump according to the present invention includes a pump chamber whose volume can be changed by a diaphragm, an inlet flow path for flowing the working fluid into the pump chamber, an outlet flow path for flowing the working fluid from the pump chamber, and the inlet flow path And a check valve between the outlet channel and the outlet channel, wherein the inlet channel and the outlet channel are arranged in a straight line.

  According to the present invention, since the inlet channel and the outlet channel are communicated with each other in a straight line, the fluid resistance of the working fluid is hardly generated due to the bending of the channel, and the working fluid can flow smoothly. As a result, the discharge amount of the working fluid can be further increased as compared with the case where the flow path as described above is formed at an obtuse angle.

  In the aforementioned structure, the check valve is preferably a ball valve.

In general, a plate-like valve body may be used as a check valve in a small and high-power pump as described above. However, in the present invention, the valve body is a spherical body or only the open / close portion of the check valve is spherical. Alternatively, a water drop-shaped ball valve can be used.
If such a ball valve is adopted, the linear flow of the working fluid from the inlet channel to the outlet channel is less likely to be disturbed by the conventional plate-like valve body. Fluid resistance can be reduced.
Further, when the valve body is spherical (for example, a ball), when the check valve is opened and the working fluid flows, the flow cross-sectional area of the working fluid increases even if the valve body slightly moves. Therefore, there is an effect that the flow amount can be increased.

  In such a structure, the check valve includes a valve seat having a flow hole through which the working fluid flows, and a spherical valve body that opens and closes the flow hole, and the valve body is disposed at the periphery of the flow hole. It is preferable that a slope leading to the flow hole is provided.

  In this structure, since a spherical valve body (for example, a ball) is provided with an inclined surface that guides the valve seat to the circulation hole, the inlet channel and the outlet channel are connected to the pump chamber even if the pump itself is inclined. Even if the valve body is inclined and provided, the valve body moves toward the flow hole along this inclined surface, so that the flow hole can be reliably sealed and the back flow of the working fluid can be prevented. As a result, in the pump using the inertance effect as in the present invention, the flow efficiency of the working fluid can be increased.

  Furthermore, in the pump described above, it is preferable that the check valve is provided on the inlet flow channel side with respect to the opening of the pump chamber.

  According to the pump structure in which the check valve is provided on the inlet flow path side, a pump that performs suction (inflow) and discharge at the same time using the inertia effect due to the inertance of the working fluid in the outlet flow path will be described in detail later. Can be configured. At this time, since the fluid resistance in the pump is reduced, the flow rate of the working fluid in the outlet flow path is increased, the inertia effect is increased, and the attenuation of the flow rate is reduced. Can do.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 6 show a pump according to an embodiment of the present invention.

  FIG. 1 is a longitudinal sectional view of the pump of the first embodiment. In FIG. 1, the pump 10 has a basic configuration in which a diaphragm 50 that changes the volume of a pump chamber 90 by expansion and contraction of an actuator 60 and an outflow connection pipe 21 in which an outlet channel 22 through which a working fluid flows out are formed. The pump chamber body 20, the inflow path housing 30 from which the inflow connection pipe 31 in which the inlet flow path 32 into which the working fluid flows is formed protrudes, and the actuator housing 80 provided with the actuator 60. The

  The pump chamber body 20 is formed with a pump chamber 90 at the center, and a valve seat chamber 23 that is a space formed by intersecting the check valve 40, the pump chamber 90, and the outlet channel. The outlet channel 22 is formed in the outflow connection pipe 21 protruding from the pump chamber body 20, is formed substantially parallel to the pump chamber 90, and communicates the inlet channel 32 and the outlet channel 22. The valve seat chamber 23 is connected to the outlet channel 22 at an obtuse angle. The connecting portion between the valve seat chamber 23 and the pump chamber 90 is an opening 24 on the valve seat chamber side of the pump chamber 90 and is also connected to the outlet channel 22 so as to have an obtuse angle. The intersection 25 between the outlet channel 22 and the opening 24 is rounded to reduce the fluid resistance of the working fluid.

  In the drawing, the pump chamber body 20 has a shallow concave portion 27 into which an inflow passage housing 30 to be described later is press-fitted. In the opening of the pump chamber 90 on the opposite side, a thin disc-shaped diaphragm 50 made of stainless steel or the like is closely fixed in a recess 26 provided on the periphery of the pump chamber 90. A convex portion 81 provided in the actuator housing 80 is press-fitted into the concave portion 26, and the pump chamber body 20 and the actuator housing 80 are integrated while pressing the diaphragm 50.

The actuator housing 80 has a container-like shape with one open, and one end of the actuator 60 is fixed to the other sealed inner bottom surface. The actuator 60 is a piezoelectric element, and expands and contracts by receiving a drive voltage from an external control circuit (not shown). An actuator base 70 is fixed to the other end of the actuator 60, and the actuator base 70 is in close contact with the diaphragm 50.
An inflow passage housing 30 is press-fitted into the pump chamber body on the side opposite to the actuator housing 80 of the pump chamber body 20 to constitute the pump 10.

  The inflow passage housing 30 is provided with a flow hole 33 that flows into the valve seat chamber 23 at the center, and the flow hole 33 is reduced in diameter from the inlet flow path 32 by a slope 34. The inlet channel 32 and the outlet channel 22 are substantially parallel to the plane of the diaphragm 50. The inlet channel 32 is pierced in the inflow connecting pipe 31 protruding from the inflow channel housing 30 and circulates in the elastic wall chamber 35 sealed by the elastic wall 36. The elastic wall 36 has a pulsation absorbing function for preventing the working fluid from causing pressure pulsation due to vibration of the diaphragm 50. In FIG. 1, the elastic wall 36 is formed integrally with the inflow path housing 30. However, the elastic wall 36 may be formed separately from a thin plate having elasticity and fixed to the inflow path housing 30. With such a structure, it is conceivable that the inside of the inflow passage housing 30 can be easily processed.

A plate-like valve element 41 is provided on the valve seat chamber 23 side of the circulation hole 33 of the inflow passage housing 30, and the circulation hole 33 is formed by the circulation hole 33 and the valve element 41 in accordance with the driving of the diaphragm 50. A check valve 40 that opens and closes is configured. Although not shown, a ring-shaped valve seat provided with a flow hole 33 and a check valve provided with a valve body 41 on the valve seat can be employed. Furthermore, as a check valve, a ball valve 150 to be described later can be adopted.
Further, a convex portion 37 is provided on the cross-sectional check valve side of the inflow passage housing 30, and the inflow passage housing 30 and the pump chamber body 20 are pressed into the concave portion 27 of the pump chamber body 20 described above. Integrated.

  Although not shown, the inflow connection pipe 31 is connected to an external connection pipe, the working fluid is introduced into the pump chamber 90, and the outflow connection pipe 21 is connected to a nozzle pipe or the like (not shown) to discharge the working fluid.

  Next, inertance will be described. The inertance value I is given by I = ρL / S where S is the cross-sectional area of the flow path of the working fluid, L is the length of the flow path, and ρ is the density of the working fluid. When the differential pressure of the flow path is P and the flow rate flowing through the flow path is Q, the relation of P = I × dQ / dt is obtained by modifying the equation of motion of the working fluid in the flow path using the inertance value I. Is derived. That is, the inertance value indicates the degree of influence of the time change of the flow rate in unit pressure. The larger the inertance value, the smaller the change in flow rate with time, and the smaller the inertance value, the greater the change in flow rate with time.

Here, the relationship between the inertance value on the inlet channel side and the inertance value on the outlet channel side will be described with reference to FIG. On the inlet flow path side, the length of the check valve flow hole 33 is L1, the area is S1, the length of the reduced diameter pipe section from the flow hole 33 to the inlet flow path 32 is L2, and the average area is S2.
In the outlet channel 22, the length of the outlet channel 22 is L3 and the area is S3.

  The relationship between the inertance values on the inlet channel side and the outlet channel side of the pump of the present invention will be described using the above symbols and the density ρ of the working fluid.

  The inertance value on the inlet channel side is calculated as ρ (L1 / S1 + L2 / S2). On the other hand, the inertance value on the outlet channel side is calculated as ρ × L3 / S3. And these flow paths have a relationship satisfying ρ (L1 / S1 + L2 / S2) <ρ × L3 / S3.

  Therefore, according to the above-described first embodiment, the flow path from the inlet flow path 32 toward the outlet flow path 22 is formed at an obtuse angle with respect to the pump chamber side plane of the diaphragm 50. Is less likely to occur. As a result, the fluid resistance of the working fluid can be reduced, and the discharge amount of the working fluid can be increased.

  In addition, the check valve 40 is provided closer to the inlet channel than the opening 24 of the pump chamber 90, and is configured to satisfy the relationship between the inertance value on the inlet channel side and the inertance value on the outlet channel side described above. A pump that performs suction (inflow) and discharge at the same time can be configured by utilizing the inertia effect of the inertance of the working fluid in the outlet channel. At this time, since the fluid resistance in the pump is reduced, the flow rate of the working fluid in the outlet channel is increased, and the attenuation of the flow rate is reduced. Is highly effective.

Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment is characterized in that the fluid resistance in the flow channel communicating the inlet flow channel 102 and the outlet flow channel 110 is further reduced based on the technical idea of the first embodiment. Omitted.
FIG. 2 shows a longitudinal sectional view of the pump of the second embodiment. In FIG. 2, the pump chamber housing 100 is formed with a pump chamber 90 in the center, and a valve seat chamber 107 that is a space formed by intersecting the opening of the pump chamber 90 and the outlet channel 110. ing.

  In the pump chamber housing 100, a recess 108 is formed outside the pump chamber housing 100 in the outlet channel 110, and a protrusion 109 protruding from the end of the outflow connection pipe 120 is press-fitted into the recess 108. It is integrated with the pump chamber housing 100. An outflow passage 121 having the same diameter as that of the outlet channel 110 is formed at the center of the outflow connection pipe 120 and connected to the outlet channel 110. The total length of the outlet channel 110 and the outlet channel 121 is L3 when calculating the above-described inertance value on the outlet channel side.

  An inflow connecting pipe 101 protrudes on the opposite side of the pump chamber housing 100 from the outflow connecting pipe 120, and an inlet channel 102 is formed in the center thereof. The inlet channel 102 is circulated through the elastic wall chamber 103, and a thin disk-shaped elastic wall 130 is adhered and fixed to the upper opening of the elastic wall chamber 103 in the drawing. Further, a linearly continuous flow path 104 is provided from the elastic wall chamber 103 to the valve seat chamber 107, and the check valve 40 is press-fitted and fixed to the valve seat chamber side in the middle of the flow path.

  The wall 105 formed in the flow part between the pump chamber 90 and the valve seat chamber 107 is inclined in a direction substantially orthogonal to the flow path 104, and the angle intersecting the pump chamber 90 is smoothly rounded. In addition, the wall 106 where the pump chamber 90 and the outlet channel 110 intersect is also rounded so that the working fluid can easily flow.

Although detailed description is omitted, the check valve 40 includes a ring-shaped valve seat having a flow hole whose diameter is smaller than that of the flow path 104 through which the working fluid flows, and a plate-shaped valve body that opens and closes the flow hole. The flow of the working fluid and the backflow prevention are performed by the driving of the diaphragm 50.
In addition, the ball valve mentioned later can be employ | adopted as this check valve.
The pump chamber 90 is sealed with the diaphragm 50, and the periphery on the opposite side of the pump chamber 90 is pressed by the end of the actuator housing 80.

  The actuator housing 80 has substantially the same configuration as that of the first embodiment (see FIG. 1), and has a container-like shape in which one of the actuators 60 is opened. The end is fixed. The actuator 60 is a piezoelectric element, and expands and contracts by receiving a drive voltage from an external control circuit (not shown). An actuator base 70 is fixed to the other end of the actuator 60, and the actuator base 70 is in close contact with the diaphragm 50. The convex portion 109 provided at the opened end of the actuator housing 80 is press-fitted into the convex portion 81 provided in the pump housing 100 to constitute the pump 10.

Therefore, according to the above-described second embodiment, the flow path 104 that flows through the inlet flow path 102 and the outlet flow path 110 is straight and continuous with the same diameter, and the flow direction of the working fluid suddenly changes in the flow path 104. Since it is not bent, the fluid resistance is reduced in the flow path.
Further, since the check valve can be provided at a position close to the pump chamber, the volume of the working fluid in the pump chamber can be reduced. Then, since the volume in which the working fluid in the pump chamber is compressed and expanded by the pressure change can be reduced, the driving energy can be used more effectively, and the discharge amount of the working fluid can be increased.
Further, the check valve 40 is provided closer to the inlet flow channel than the opening of the pump chamber 90, and is configured to satisfy the above-described relationship between the inertance value on the inlet flow channel side and the inertance value on the outlet flow channel side. A pump that performs suction (inflow) and discharge at the same time can be configured by utilizing the inertia effect due to the inertance of the working fluid in the flow path. At this time, since the fluid resistance in the pump is reduced, the flow rate of the working fluid in the outlet channel is increased, and the attenuation of the flow rate is reduced. Is highly effective.

  Next, a third embodiment of the pump of the present invention will be described with reference to FIG. The third embodiment is based on the structure of the first embodiment (see FIG. 1), and is characterized in that a pedestal that reduces the fluid resistance of the working fluid is provided in a flow path that connects the inlet flow path and the outlet flow path. Description of parts common to the first embodiment will be omitted.

  FIG. 3 shows a longitudinal sectional view of the pump 10 of the third embodiment. In FIG. 3, the flow hole 33 of the check valve 40 and the center of the pump chamber 90 are provided at substantially the same position, and the valve seat chamber 23 as a flow path communicating the inlet flow path 32 and the outlet flow path 22 is It is orthogonal to the plane of the pump chamber 90 (plane of the diaphragm 50). A pedestal 55 is fixed to the upper surface of the central portion of the diaphragm 50.

  The pedestal 55 is provided with a flow surface 56 having an arcuate slope so that the working fluid smoothly flows from the valve seat chamber 23 toward the outlet flow path 22. The flow conducting surface 56 may be configured linearly. The outer diameter of the pedestal 55 is smaller than the diameter of the opening connected from the pump chamber 90 to the valve seat chamber 23, and has a gap through which the working fluid can flow sufficiently. Since the pedestal 55 is fixed to the diaphragm 50, it is driven together with the diaphragm 50 by the vibration of the actuator 60.

  Therefore, according to the third embodiment, the working fluid flows into the flow path (valve seat chamber 23) through the check valve 40, and at this time, the working fluid collides with the pedestal 55 described above. Since the pedestal is provided with a flow conducting surface 56 that is inclined so as to reduce the fluid resistance of the working fluid, the working fluid flows toward the outlet flow path 22 along the flow conducting surface. The smooth flow from the inlet channel 32 to the outlet channel 22 is not disturbed by a vortex or the like, and the fluid resistance can be reduced. As a result, the discharge flow rate can be increased.

Further, the check valve 40 is provided closer to the inlet flow channel than the opening of the pump chamber 90, and is configured to satisfy the above-described relationship between the inertance value on the inlet flow channel side and the inertance value on the outlet flow channel side. A pump that performs suction (inflow) and discharge at the same time can be configured by utilizing the inertia effect due to the inertance of the working fluid in the flow path. At this time, since the fluid resistance in the pump is reduced, the flow rate of the working fluid in the outlet channel is increased, and the attenuation of the flow rate is reduced. Is highly effective.
In addition, when the diaphragm 50 is driven so as to reduce the volume of the pump chamber 90, the pedestal 55 is provided with the flow guiding surface 56 as described above, and the inclination angle of the flow guiding surface 56 allows the working fluid to flow out. Since the inclination angle is such that it pushes out toward the flow path side, the outflow speed can be increased and the inertial effect can be increased as compared with the structure in which the outlet diaphragm 22 is pushed in the direction perpendicular to the conventional diaphragm 50. The discharge amount can be increased under the same pump driving conditions.

Next, a fourth embodiment of the pump of the present invention will be described with reference to FIG. The fourth embodiment is characterized in that the diaphragm 50 is inclined at an obtuse angle with respect to the outlet channel 22 based on the structure of the first embodiment (see FIG. 1). Description is omitted.
FIG. 4 is a longitudinal sectional view of the fourth embodiment. In FIG. 4, the pump chamber housing 20 is provided with a pump chamber 90 inclined about 45 degrees with respect to the outlet channel 22. Further, the inlet passage housing 30 is provided with an inlet passage 32 substantially parallel to the outlet passage 22, and a passage orthogonal to the inlet passage 32 and the outlet passage 22 (the flow hole 33 and the valve seat chamber 23. ) And a flow passage 29 from the pump chamber 90 communicating with the outlet flow passage 22 and the valve seat chamber 23.

The flow path 29 extends from the pump chamber 90 at a right angle toward the valve seat chamber 23 and intersects the outlet flow path 22. Therefore, in the fourth embodiment, the outlet channel 22 and the plane of the pump chamber 90 are inclined by about 45 degrees, so the angle formed by the channel 29 and the outlet channel 22 is an obtuse angle of about 135 degrees. It becomes. Further, since the diaphragm 50 is fixed along the periphery of the pump chamber, the inclination angle between the outlet channel 22 and the diaphragm 50 is also about 45 degrees. The pump chamber body 20 and the actuator housing 80 are integrated by press-fitting the end of the actuator housing 80 into the recess 26 provided in the pump chamber body 20.
In addition, although the structure of the inflow path housing | casing 30 and the assembly structure to the pump chamber body 20 have the difference in a dimension, they are the same as Example 1 (refer FIG. 1), and abbreviate | omit description.

Therefore, according to the fourth embodiment described above, in the step of the diaphragm 50 compressing the pump chamber 90, the bending angle of the flow of the working fluid from the pump chamber 90 toward the outlet flow path 22 can be made obtuse, and the fluid resistance Decreases and the discharge rate increases.
Further, the check valve 40 is provided closer to the inlet flow channel than the opening of the pump chamber 90, and is configured to satisfy the above-described relationship between the inertance value on the inlet flow channel side and the inertance value on the outlet flow channel side. A pump that performs suction (inflow) and discharge at the same time can be configured by utilizing the inertia effect due to the inertance of the working fluid in the flow path. At this time, since the fluid resistance in the pump is reduced, the flow rate of the working fluid in the outlet channel is increased, and the attenuation of the flow rate is reduced. Is highly effective. Moreover, since the flow velocity of the working fluid in the outlet flow path 22 during the compression stroke can be increased, the inertia effect of the working fluid in the outlet flow path can be increased and the discharge amount can be increased.

Next, a fifth embodiment of the pump of the present invention will be described with reference to FIG. Since the technical concept of the fifth embodiment is the same as that of the first embodiment (see FIG. 1), the description of common parts is omitted.
FIG. 5 shows a longitudinal sectional view of the pump of the fifth embodiment. In FIG. 5, the pump chamber body 20 includes an outflow connection pipe 21 having a pump chamber 90, an outlet flow path 22, a check valve 150, and an inflow connection pipe 140 having an inlet flow path 141.

The inflow connecting pipe 140 is provided on a straight line extending the outflow connecting pipe 21 at a position opposite to the outflow connecting pipe 21, that is, the inlet channel 141 and the outlet channel 22 are provided on a straight line. . An end portion of the inflow connecting pipe 140 is press-fitted into the pump chamber body 20 and is integrated with the pump chamber body 20. The inlet channel 141 flows into the elastic wall chamber 35 of the pump chamber body 20, and a check valve 150 is fixed on a linear extension line of the inlet channel 141. The check valve 150 is a ball valve having a spherical valve body. The structure of the ball valve 150 will be described in detail with reference to FIG.
An elastic wall 130 is fixed to the upper opening of the elastic wall chamber 35.

  The pump chamber body 20 is integrated with the actuator housing 80 by press-fitting the convex portion 81 of the actuator housing 80 into the recess 26 provided in the pump chamber body 20 as shown in the first embodiment.

FIG. 6 shows an enlarged cross section of a ball valve 150 as a check valve employed in the fifth embodiment. This will be described with reference to FIG.
In FIG. 6, a ball valve 150 has a valve seat 155 made of a ring-shaped durable high hardness ceramic (single crystal ceramic, polycrystalline ceramic) provided with a flow hole 156 through which a working fluid flows in the center. A valve seat frame 151 for fixing the valve seat 155 to the pump chamber body 20, a ball 160 as a spherical valve body for opening and closing the flow hole 156, and a ball support plate for supporting the ball 160 in the valve seat frame 151 170.

The valve seat 155 has a funnel-like slope 157 formed on the periphery of the flow hole 156 on the elastic wall chamber 35 side so that the working fluid is smoothly conducted to the flow hole 156. On the valve seat chamber 23 side (outlet flow channel side), a range in which the ball 160 contacts is configured by a slope 158, and flows along the slope 158 when the ball 160 receives fluid pressure from the pump chamber 90. It is formed at an angle at which a slope effect is obtained so that it can move toward the hole 156. Moreover, it is preferable that the corner | angular part which contacts when a working fluid flows is rounded smoothly. The valve seat 155 is press-fitted and fixed to the inner surface of the valve seat frame 151.
The inclined surface 158 described above may be a conical shape having a straight cross-sectional view or an arc shape larger than the outer diameter of the ball 160.

  The valve seat frame 151 is a tubular member provided with a flange 152 whose end on the valve seat chamber 23 side protrudes inward. The flange 152 protrudes in such a size that the ball support plate 170 does not fall off. The inside diameter of the valve seat frame 151 is set to a size that allows the ball support plate 170 to move. Here, the ball support plate 170 and the ball 160 are inserted into the cylinder of the valve seat frame 151, and the above-described valve seat 155 is press-fitted to configure the ball valve 150. It is press-fitted and fixed to the elastic wall chamber 35 from the direction.

  Although not shown, the ball support plate 170 is formed of a disk-shaped thin plate. The outer peripheral portion supports the flange 152 of the valve seat frame 151 and the center portion supports the ball 160. The above-mentioned support portion and the ball support portion are connected by an arm. When the flow hole 156 is opened, the working fluid flows from between the arms as indicated by an arrow A in the figure.

  The ball 160 is preferably formed of ceramics similar to the valve seat 155, but is not particularly limited, and synthetic resin, glass, and metal alloy can also be used. In FIG. 6, the ball 160 is a sphere, but if the contact surface with the flow hole 156 is a sphere, other portions may be arbitrarily selected and formed.

  When the pump chamber 90 is compressed, the ball 160 moves toward the flow hole 156 along the inclined surface 158 of the valve seat 155 (indicated by a two-dot chain line in the figure), and closes the flow hole 156 to close the working fluid. Stop backflow. When the pump chamber 90 is expanded, the ball support plate 170 moves to the position of the flange 152 of the valve seat frame 151 and the ball 160 moves until it hits the ball support portion of the ball support plate 170 to open the flow hole 156, Working fluid flows in.

Therefore, according to the above-described fifth embodiment, since the flow path toward the inlet flow path 141 and the outlet flow path 22 is linearly communicated, the fluid resistance of the working fluid is hardly generated due to the flow path being bent. Therefore, the working fluid can flow smoothly. As a result, the discharge amount of the working fluid can be further increased as compared with the case where the flow paths as shown in the first to fourth embodiments are formed at an obtuse angle.
Further, the ball valve 150 is provided on the inlet flow channel side with respect to the opening of the pump chamber 90, and is configured to satisfy the above-described relationship between the inertance value on the inlet flow channel side and the inertance value on the outlet flow channel side. A pump in which suction (inflow) and discharge are simultaneously performed using the inertial effect of the inertance of the working fluid in the path can be configured. At this time, since the fluid resistance in the pump is reduced, the flow rate of the working fluid in the outlet channel is increased, and the attenuation of the flow rate is reduced. Is highly effective.

Further, if the ball valve 150 as described above is employed, the linear flow of the working fluid from the inlet channel 141 toward the outlet channel 22 is less likely to be disturbed by the plate-shaped valve body. The fluid resistance when the working fluid flows can be reduced.
Further, when the ball 160 as the valve body is a sphere, the flow hole 156 is opened, and when the working fluid flows, even if the ball 160 moves slightly in the opening direction, the flow cross-sectional area of the working fluid Since this increases, the flow rate can be increased.

  Furthermore, since the ball valve 150 described above is provided with a slope 158 that guides the ball 160 to the flow hole 156 of the valve seat 155, even if the pump 10 itself is inclined, the inlet flow path 141 and the outlet flow path 22 are Even when the pump chamber 90 is inclined, the ball 160 is moved along the slope 158 to the flow hole 156 when the pump chamber 90 is compressed, so that the flow hole 156 is surely sealed. Thus, the back flow of the working fluid can be prevented. As a result, in the pump using the inertance effect as in the present invention, the flow efficiency of the working fluid can be increased.

In addition, this invention is not limited to the above-mentioned Example 1-5, The deformation | transformation in the range which can achieve the objective of this invention, improvement, etc. are included in this invention.
For example, in the first to fifth embodiments described above, the volume of the pump chamber 90 is changed by the diaphragm 50, but not only the diaphragm but also a piston can be employed.

  In the first to fifth embodiments described above, the elastic wall chamber 35 or 103 and the elastic wall 36 or 130 are provided on the inlet channel side. However, the present invention is also applied to a pump that does not include these elastic wall chamber and elastic wall. The structure can be adopted. In such a case, the ball valve 150 is provided in the inlet channel 141.

  Therefore, according to the above-described first to fifth embodiments, it is possible to provide a pump that can reduce the fluid resistance of the flow path in the pump and increase the discharge amount of the working fluid.

  The pump 10 of the present invention can be used as a cooling device for electronic equipment such as a projector, a water jet knife, a fluid actuator, a power source for a piston of a micro hydraulic press, and the like.

1 is a longitudinal sectional view of a pump according to Embodiment 1 of the present invention. The longitudinal cross-sectional view of the pump which concerns on Example 2 of this invention. The longitudinal cross-sectional view of the pump which concerns on Example 3 of this invention. The longitudinal cross-sectional view of the pump which concerns on Example 4 of this invention. The longitudinal cross-sectional view of the pump which concerns on Example 5 of this invention. The longitudinal cross-sectional view of the ball valve which concerns on Example 5 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Pump, 20, 100 ... Pump chamber body, 22, 110 ... Outlet channel, 30 ... Inflow channel housing, 32, 102 ... Inlet channel, 40 ... Check valve, 50 ... Diaphragm, 55 ... Base, 90 ... Pump chamber, 150 ... Ball valve, 151 ... Valve seat frame, 155 ... Valve seat, 160 ... Ball.

Claims (8)

A pump chamber whose volume can be changed by a diaphragm,
An inlet channel for flowing a working fluid into the pump chamber;
An outlet channel for allowing the working fluid to flow out of the pump chamber;
A check valve between the inlet channel and the outlet channel;
A pump characterized in that a channel that communicates the inlet channel, the pump chamber, and the outlet channel is formed at an obtuse angle with respect to the pump chamber side plane of the diaphragm. The pump according to claim 1, wherein
A pump comprising a check valve in the middle of the flow path. A pump chamber whose volume can be changed by a diaphragm,
An inlet channel for flowing a working fluid into the pump chamber;
An outlet channel for allowing the working fluid to flow out of the pump chamber;
A check valve between the inlet channel and the outlet channel;
The pump according to claim 1, wherein a pedestal having a slope that reduces fluid resistance of the working fluid is provided in the diaphragm in a channel that communicates the inlet channel and the outlet channel. A pump chamber whose volume can be changed by a diaphragm,
An inlet channel for flowing a working fluid into the pump chamber;
An outlet channel for allowing the working fluid to flow out of the pump chamber;
A check valve between the inlet channel and the outlet channel;
The pump, wherein the diaphragm is inclined so as to have an obtuse angle with respect to the flow path direction of the outlet flow path. A pump chamber whose volume can be changed by a diaphragm,
An inlet channel for flowing a working fluid into the pump chamber;
An outlet channel for allowing the working fluid to flow out of the pump chamber;
A check valve between the inlet channel and the outlet channel;
The pump characterized in that the inlet channel and the outlet channel are arranged in a straight line. The pump according to claim 5, wherein
The pump characterized in that the check valve is a ball valve. The pump according to claim 5 or 6,
The ball valve includes a valve seat having a flow hole through which the working fluid flows, and a spherical valve body that opens and closes the flow hole,
A pump characterized in that an inclined surface for guiding the valve body to the flow hole is provided at a peripheral edge of the flow hole. The pump according to any one of claims 1 to 7,
The pump, wherein the check valve is provided on the inlet flow channel side with respect to the opening of the pump chamber.

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