CN110538621A - Preparation method of quartz glass micro-channel core plate - Google Patents

Preparation method of quartz glass micro-channel core plate Download PDF

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Publication number
CN110538621A
CN110538621A CN201910821897.7A CN201910821897A CN110538621A CN 110538621 A CN110538621 A CN 110538621A CN 201910821897 A CN201910821897 A CN 201910821897A CN 110538621 A CN110538621 A CN 110538621A
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CN
China
Prior art keywords
quartz glass
micro
channel
boss
core plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910821897.7A
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Chinese (zh)
Inventor
郑海
唐明亮
胡增涵
徐传龙
程尚栩
陈圆圆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DONGHAI ADVANCED SILICON BASED MATERIALS INSTITUTE NANJING UNIVERSITY OF TECHNOLOGY
Original Assignee
DONGHAI ADVANCED SILICON BASED MATERIALS INSTITUTE NANJING UNIVERSITY OF TECHNOLOGY
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Priority to CN201910821897.7A priority Critical patent/CN110538621A/en
Publication of CN110538621A publication Critical patent/CN110538621A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093Microreactors, e.g. miniaturised or microfabricated reactors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/02Apparatus characterised by being constructed of material selected for its chemically-resistant properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00002Chemical plants
    • B01J2219/00004Scale aspects
    • B01J2219/00011Laboratory-scale plants
    • B01J2219/00013Miniplants
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781Aspects relating to microreactors
    • B01J2219/00819Materials of construction
    • B01J2219/00824Ceramic
    • B01J2219/00826Quartz
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781Aspects relating to microreactors
    • B01J2219/00819Materials of construction
    • B01J2219/00831Glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781Aspects relating to microreactors
    • B01J2219/00873Heat exchange

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention relates to a preparation method of a quartz glass micro-channel core plate, which takes quartz glass as a substrate, firstly adopts machining to prepare a boss quartz glass plate substrate, then adopts a hot melting technology to weld a quartz glass capillary tube on the surface of a boss according to a specific trend, adopts a notching machine to prepare a groove quartz glass plate substrate, and finally combines the boss quartz glass plate substrate and the groove quartz glass plate substrate to form a complete quartz glass micro-channel core plate through the hot melting technology. According to the invention, quartz glass is selected as a substrate material, so that the high-temperature-resistant high-light-transmittance quartz glass has higher heat resistance and light transmittance. The invention combines the common machining technology with the hot melting technology, and has simple operation. Compared with the glass micro-channel prepared by mechanical micromachining, the micro-channel has high surface quality of the inner wall, is favorable for stable chemical reaction, does not cause the phenomenon of reaction liquid leakage, can be accurately adjusted by the quartz glass capillary, and can be adjusted according to the chemical reaction requirement. The space between the micro-channel and the groove can be reserved for heating and heat exchange.

Description

preparation method of quartz glass micro-channel core plate
Technical Field
The invention relates to a preparation method of a quartz glass micro-channel core plate, belonging to the technical field of microreactors.
background
the choice of material for the microchannel reactor depends largely on the application requirements, including operating conditions, physical properties of the mixture, cost, mass production capability, and ease of manufacture. At present, the glass, silicon, metal, polymer and the like are mainly widely applied. The glass-based microchannel reactor is suitable for various chemical reactions, is transparent and easy to observe, captures the change in the chemical reactions, and can realize the photocatalytic reactions which are difficult to amplify in the traditional reactor, such as rapid drug screening and heterogeneous catalytic reactions.
Compared with common glass, the quartz glass has extremely low thermal expansion coefficient, high temperature resistance, excellent chemical stability, excellent electrical insulation, optimal ultraviolet spectrum transmission performance, visible light transmission performance, near infrared spectrum transmission performance and mechanical performance higher than that of the common glass, so that the quartz glass is a high-quality substrate material in the technical field of microreactors. However, since glass has high brittleness, when defects such as fine cracks and cracks exist on the surface, stress concentration occurs at the ends of cracks under mechanical load, which easily causes brittle fracture of the product. This creates a certain obstacle to the practical application of glass-based microreactors.
At present, the processing technology of the glass-based microchannel reactor includes wet chemical etching, mechanical micromachining and the like. The wet chemical etching process has the defects of long processing time, low efficiency, pollution generation, inaccurate micro-channel size control and the like. The mechanical micromachining comprises micro milling, micro abrasive jet flow and the like, wherein a half of a micro channel structure is firstly machined, and then two halves of micro channels are synthesized and sealed to form a complete micro channel, burrs, fine cracks and the like exist on the surface of the micro channel, which are not favorable for micro fluid flow and need further treatment, and the precise synthesis and sealing of the two halves of micro channels is also a difficult point.
Disclosure of Invention
The invention aims to solve the technical problems of high manufacturing cost, concentrated mechanical load stress, poor surface quality of a glass channel, poor sealing effect of a binder or a clamp, easy leakage, high time consumption and the like of the conventional glass-based microchannel reactor.
The technical problem to be solved by the invention is realized by the following technical scheme, and the invention relates to a preparation method of a quartz glass micro-channel core plate, which comprises the following steps:
(1) Preparing a boss quartz glass plate substrate by machining, such as 4 in the attached drawing;
(2) Selecting a specially-made quartz glass capillary tube, making a specific micro-channel trend, and welding the quartz glass capillary tube on the surface of the boss by a hot melting technology, such as 3 in the attached drawing;
(3) Grooving by using a grooving machine to prepare a grooved quartz glass plate substrate, wherein the depth of the groove is greater than the sum of the height of the boss and the outer diameter of the quartz capillary tube, as shown in 9 in the attached drawing; 4 through holes are drilled by a drilling machine, such as 5, 6, 7 and 8 in the attached drawings;
(4) The boss quartz glass plate substrate with the quartz glass capillary tube and the groove quartz glass plate substrate are fused and combined through a hot melting technology to form a complete quartz glass micro-channel core plate.
Compared with common silicate glass, the invention selects quartz glass as a substrate material, and has higher heat resistance and light transmittance.
Compared with the prior mechanical micro-processing glass micro-channel technology, the invention adopts the technology of combining common lathe grooving and fusion welding, the technological process is simple, the operability is strong, and the micro-channel can not leak; the size of the micro-channel can be accurately adjusted through the quartz glass capillary, the direction and the length of the micro-channel can be adjusted according to the requirement of chemical reaction, and the surface quality of the inner wall of the micro-channel is high, thereby being beneficial to stable chemical reaction; a space is left between the micro-channel and the groove, the micro-channel can be used as heat exchange, and a heating medium can be filled in the groove to heat the micro-channel, so that the reaction speed is accelerated.
drawings
FIG. 1 is a structural view of a quartz glass microchannel core plate according to the present invention.
In the figure: the quartz glass capillary tube comprises a quartz glass capillary tube feeding hole 1, a quartz glass capillary tube discharging hole 2, a quartz glass capillary tube 3, a boss quartz glass substrate 4, a heating medium inlet or a heat exchange ventilation inlet 5, a heating medium outlet or a heat exchange ventilation outlet 6, a through hole 7 corresponding to 1, a through hole 8 corresponding to 2 and a groove quartz glass substrate 9.
Detailed Description
The specific embodiments of the present invention will now be further described with reference to fig. 1, so as to facilitate the further understanding of the present invention by those skilled in the art, and not to limit the rights thereto.
(1) Preparing a boss quartz glass plate substrate by machining, such as 4 in the attached drawing;
(2) selecting a quartz glass capillary tube with the inner diameter of 0.5mm and the outer diameter of 2mm, formulating the specific micro-channel trend, such as the zigzag trend shown in 3 in the attached drawing, and welding the quartz glass capillary tube on the surface of the boss by a hot melting technology;
(3) grooving by using a grooving machine to prepare a grooved quartz glass plate substrate, wherein the depth of the groove is greater than the sum of the height of the boss and the outer diameter of the quartz capillary tube, and the difference between the height of the groove and the outer diameter of the quartz capillary tube is 2mm, as shown in 9 in the attached drawing; 4 through holes are drilled by a drilling machine, such as 5, 6, 7 and 8 in the attached drawings;
(4) and melting and combining the boss quartz glass plate substrate with the quartz glass capillary tube and the groove quartz glass plate substrate by a hot melting technology to prepare a complete quartz glass micro-channel core plate.

Claims (4)

1. A preparation method of a quartz glass micro-channel core plate sequentially comprises the following steps:
(1) preparing a boss quartz glass plate substrate by machining;
(2) Selecting a specially-made quartz glass capillary tube, making a specific micro-channel trend, and welding the quartz glass capillary tube on the surface of the boss by a hot melting technology;
(3) Grooving by using a grooving machine to prepare a grooved quartz glass plate substrate, wherein the depth of the groove is greater than the sum of the height of the boss and the outer diameter of the quartz glass capillary tube; 4 through holes are drilled by a drilling machine;
(4) The boss quartz glass plate substrate with the quartz glass capillary tube and the groove quartz glass plate substrate are fused and combined through a hot melting technology to form a complete quartz glass micro-channel core plate.
2. the method of manufacturing a quartz glass microchannel core plate of claim 1, wherein: and (3) preparing the micro-channel core plate by taking the quartz glass capillary as a micro-channel element.
3. the method of manufacturing a quartz glass microchannel core plate of claim 1, wherein: the inner diameter of the quartz glass capillary tube is 0.1-0.5mm, and the outer diameter is 1-3 mm.
4. the method of manufacturing a quartz glass microchannel core plate of claim 1, wherein: the depth of the groove is larger than the sum of the height of the boss and the outer diameter of the quartz glass capillary, and the difference between the height of the boss and the outer diameter of the quartz glass capillary is 1-2 mm.
CN201910821897.7A 2019-09-02 2019-09-02 Preparation method of quartz glass micro-channel core plate Pending CN110538621A (en)

Priority Applications (1)

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CN201910821897.7A CN110538621A (en) 2019-09-02 2019-09-02 Preparation method of quartz glass micro-channel core plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910821897.7A CN110538621A (en) 2019-09-02 2019-09-02 Preparation method of quartz glass micro-channel core plate

Publications (1)

Publication Number Publication Date
CN110538621A true CN110538621A (en) 2019-12-06

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Country Status (1)

Country Link
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1089361A (en) * 1993-10-21 1994-07-13 中国科学院西安光学精密机械研究所 Make the method for small-size microchannel plate
CN100999386A (en) * 2006-11-03 2007-07-18 东华大学 Method of manufacturing glass microractor by etching
CN102175088A (en) * 2011-03-16 2011-09-07 大连理工大学 Silica-based unequal-width microchannel flat heat pipe and manufacture method thereof
CN103129028A (en) * 2011-12-04 2013-06-05 西安金和光学科技有限公司 Microchannel optical glass and manufacture method thereof
CN203349670U (en) * 2013-07-08 2013-12-18 郑州大学 Microchannel heat exchanger
CN107051347A (en) * 2017-06-19 2017-08-18 北京化工大学 A kind of device of microwave coupling reaction and its application
CN107325326A (en) * 2017-06-28 2017-11-07 南京航空航天大学 A kind of carbon fibre composite microreactor and preparation method thereof
CN108704591A (en) * 2018-08-07 2018-10-26 山东金德新材料有限公司 A kind of integrated silicon carbide microchannel reactor of collection heat-exchange system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1089361A (en) * 1993-10-21 1994-07-13 中国科学院西安光学精密机械研究所 Make the method for small-size microchannel plate
CN100999386A (en) * 2006-11-03 2007-07-18 东华大学 Method of manufacturing glass microractor by etching
CN102175088A (en) * 2011-03-16 2011-09-07 大连理工大学 Silica-based unequal-width microchannel flat heat pipe and manufacture method thereof
CN103129028A (en) * 2011-12-04 2013-06-05 西安金和光学科技有限公司 Microchannel optical glass and manufacture method thereof
CN203349670U (en) * 2013-07-08 2013-12-18 郑州大学 Microchannel heat exchanger
CN107051347A (en) * 2017-06-19 2017-08-18 北京化工大学 A kind of device of microwave coupling reaction and its application
CN107325326A (en) * 2017-06-28 2017-11-07 南京航空航天大学 A kind of carbon fibre composite microreactor and preparation method thereof
CN108704591A (en) * 2018-08-07 2018-10-26 山东金德新材料有限公司 A kind of integrated silicon carbide microchannel reactor of collection heat-exchange system

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
刘伟: "微通道反应器的构建及应用研究", 《中国优秀硕士学位论文全文数据库•工程科技Ⅰ辑》 *
杨九闻,王义宪: "《日用工业品商品学参考资料》", 30 November 1983 *
陈金龙: "《精细有机合成原理与工艺》", 30 April 1992 *
高小放: "微通道的构建与其内气液和液液传质过程的实验研究", 《中国优秀硕士学位论文全文数据库•工程科技Ⅰ辑》 *

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Application publication date: 20191206