CN110531588B

CN110531588B - Mechanism for tightening film disk surface

Info

Publication number: CN110531588B
Application number: CN201910634051.2A
Authority: CN
Inventors: 王皓; 望凯力; 王广平; 吕嗣鸿; 曹宇
Original assignee: University of Electronic Science and Technology of China
Current assignee: University of Electronic Science and Technology of China
Priority date: 2019-07-15
Filing date: 2019-07-15
Publication date: 2020-12-04
Anticipated expiration: 2039-07-15
Also published as: CN110531588A

Abstract

A mechanism for tightening the surface of a film disk enables a film used for certain photoetching to have certain internal stress after being tightened; the invention comprises a film, an upper sealing cover, a cake tray, a lower tray and a driving push column; the cake tray comprises six sectors with the same structure, each sector comprises a sector tray body, a guide chute and a film bonding boss area, and the lower tray comprises a circular tray body, a guide sliding key and a reset elastic body; the axial degree of freedom of the cake tray is restrained by the lower tray and the upper sealing cover, the rotational degree of freedom of the cake tray is restrained by the guide sliding block sliding groove structure, the cake tray is limited to extend outwards only along the radius direction, and the axial precession of the driving conical column is used as the power for extending the cake tray outwards, so that the film adhered to the film adhesion boss area is uniformly tightened and has certain internal stress.

Description

Mechanism for tightening film disk surface

Technical Field

The invention relates to the field of certain film mirror equipment, and particularly provides a mechanism for tightening a film disc surface, so that a film is kept flat and tight in a certain photoetching process and has certain internal stress.

Background

Before the photoetching process of a certain photoetching machine which works by using a film, the used film needs to be pre-tightened, so that the surface of the film is smooth, and the success rate of photoetching is improved. The film is fixed on the tightening mechanism, and the film is driven to be tightened through outward expansion of the tightening mechanism; after the film is stretched on the film stretching mechanism, the stretched film is fixed by the film cutting mechanism, only the middle circular part is cut, and the film is transferred to a photoetching machine to carry out the next photoetching process.

Before photoetching, photoresist is uniformly coated on the film, if the surface of the film serving as a base is not flat, the surface of the photoresist is not flat, and a pattern is deformed in the photoetching process, so that a photoetching machine cannot carry out normal photoetching.

Most of the current film stretching mechanisms are rectangular, the problem that the film cannot be stretched exists generally, the film cutting process cannot be smoothly completed, the PI film is continuously cut or the section of the film is unsmooth during film cutting, waste of the film is caused, production cost and production time are greatly improved, and production efficiency is low.

Disclosure of Invention

The invention provides a mechanism for tightening a thin film disk surface, which aims to ensure that the surface of the thin film is smooth and has certain internal stress in the tightening process.

The design method adopted by the invention is as follows: according to a circular working surface, a mechanism for tightening the surface of a thin film plate comprises a thin film (101), an upper sealing cover (102), a cake plate (103), a lower tray (104) and a driving push column (105); the cake plate (103) is composed of six sectors (301, 302, 303, 304, 305 and 306) with the same safety structure, each sector comprises a sector plate body (401), a guide sliding groove (402) and a film bonding boss area (403), and the lower tray (104) comprises a circular plate body (501), a guide sliding block (502) and an elastic column body (503); the film (101) is connected (403) with the film bonding boss regions of the fan-shaped bodies (301, 302, 303, 304, 305, 306), the guide sliding block (502) of the lower tray (104) is connected with the upper cover (102), and the guide sliding grooves (402) of the fan-shaped bodies (301, 302, 303, 304, 305, 306) are connected with the lower tray (104) through the guide sliding block (502) and the elastic column body (503); the film bonding boss area (403) of the fan-shaped bodies (301, 302, 303, 304, 305 and 306) is in a fan-shaped ring shape, a certain protruding height is formed on the upper surface of the fan-shaped disc body (401), a guide sliding groove (402) is formed in the geometric center of the fan-shaped disc body (401), the vertex angles of the fan-shaped bodies (301, 302, 303, 304, 305 and 306) are circular tangent plane oblique angles, and the vertex angles are 60 degrees; the lower tray (104) is annular, 6 equiangular guide sliding blocks (502) are axially distributed on the upper surface of the lower tray (104), and the outer end surface of each guide sliding block (502) is connected with the elastic column (105).

The invention relates to a mechanism for tightening a film disk surface, wherein the top of a driving push column (105) is provided with a circular truncated cone, the oblique angle of the circular truncated cone is consistent with the oblique angle of a circular tangent plane at the top end of each sector (301, 302, 303, 304, 305 and 306), six sectors (301, 302, 303, 304, 305 and 306) are pushed to be synchronously far away from the center of a circle along the radial direction through the axial movement of the driving push column (105), and during return stroke, return stroke force is applied through an elastic column (503) to ensure that the six sectors synchronously return to an initial point.

The invention relates to a mechanism for tightening the surface of a film disk, wherein a guide sliding block (402) of a lower tray (104) is connected with an upper sealing cover (102) through a bolt, so that the mechanism is convenient to disassemble, repair and assemble.

The invention relates to a mechanism for tightening a thin film disk surface, wherein the lower surface of an upper cover (102) and quadrants (301, 302, 303, 304, 305, 306) are in the same plane along the upper convex surface.

The invention relates to a mechanism for tightening a film disk surface, wherein a circular truncated cone inclined surface of a driving cone column (105) is matched with a top annular tangent inclined angle surface of a sector (301, 302, 303, 304, 305 and 306), and when the mechanism works, the axial precession of the driving cone column (105) is converted into the radial expansion of the sector, so that six sectors (301, 302, 303, 304, 305 and 306) are ensured to extend outwards at equal intervals along the radial direction, a PI film (101) is uniformly stretched, and the purpose of uniform tightening is achieved.

The structure also comprises a pre-tightening system, wherein the guide sliding block (502) is connected with the inner surface of the guide sliding groove (402) of the fan-shaped bodies (301, 302, 303, 304, 305, 306) through an elastic column (503) to apply a force pointing to the circle center to the fan-shaped bodies (301, 302, 303, 304, 305, 306) so as to ensure that the fan-shaped bodies (301, 302, 303, 304, 305, 306) are always matched with the driving conical column (105), the strokes of the six fan-shaped bodies (301, 302, 303, 304, 305, 306) are consistent, and during return stroke, a return force is provided by the elastic column (105) so that the fan-shaped bodies (301, 302, 303, 304, 305, 306) are reset.

Compared with the traditional film stretching structure, the cake-shaped film stretching mechanism can ensure that the film is uniformly stretched in all directions and has certain internal stress, and the controllability of the internal stress of the PI film is improved.

Drawings

FIG. 1 is an exploded view of the overall structure of the present invention;

FIG. 2 is a schematic view of the overall structure of the present invention;

FIG. 3 is a schematic view of a pie plate configuration of the present invention;

FIG. 4 is a schematic view of the structure of a sector of the present invention;

FIG. 5 is a schematic view of the lower tray structure of the present invention;

shown in figures 1-5; 101-a film; 102-an upper cover; 103-cake dish; 104-a lower tray; 105-driving the cone; 301-306-quadrants; 401-sector disc body; 402-film bond land area; 403-a guide chute; 501-a circular disk body; 502-fixed slider; 503-elastic cylinder.

Detailed description of the preferred embodiments

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and examples, but the scope of the present invention is not limited to the examples described below.

As shown in fig. 1 to 5, in an initial state, a pretightening force is applied to the cake plate (103) through the elastic cylinder (402) to ensure that all the fan-shaped grooves are at a zero point and have no displacement, and the film (101) is adhered to the film adhesion boss area (402).

As shown in fig. 1 to 5, when the mechanism is in operation, the upper cover (102) and the lower tray (104) are in a fixed state. Since the upper cover (102) and the lower tray (104) limit the axial freedom of the fan-shaped bodies (301, 302, 303, 304, 305, 306), the guide sliding chute (402) sliding block (401) is matched with and limits the rotational freedom of the fan-shaped grooves, when the push column (105) is driven to move axially, the six fan-shaped bodies (301, 302, 303, 304, 305, 306) are pushed to be away from the center of a circle synchronously in the radial direction, and during return stroke, return stroke force is exerted through the elastic column body (503), and the six fan-shaped bodies are ensured to return to an initial point synchronously.

The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.

Claims

1. A mechanism for tightening a film disk surface is characterized in that: the mechanism comprises a PI film (101), an upper cover (102), a cake plate (103), a lower tray (104) and a driving push column (105), wherein the cake plate (103) consists of six sectors (301, 302, 303, 304, 305, 306) with the same structure, each sector comprises a sector disc body (401), a guide sliding groove (402) and a PI film bonding boss area (403), the lower tray (104) comprises a circular disc body (501), a guide sliding block (502) and an elastic column body (503), the film (101) is connected with the film bonding boss area (403) of the sectors (301, 302, 303, 304, 305, 306), the guide sliding block (502) of the lower tray (104) is connected with the upper cover (102), the guide sliding grooves (402) of the sectors (301, 302, 303, 304, 305, 306) are connected with the lower tray (104) through the guide sliding block (502) and the elastic column body (503), the top of the driving push column (105) is provided with a circular truncated cone, and the oblique angle of the circular truncated cone is consistent with that of the circular tangent plane at the top end of the fan-shaped bodies (301, 302, 303, 304, 305 and 306).

2. A mechanism for tensioning a sheet of film as defined in claim 1, wherein: the film bonding boss area (403) of the fan-shaped bodies (301, 302, 303, 304, 305 and 306) is in a fan-shaped ring shape, a certain protruding height is formed on the upper surface of the fan-shaped disc body (401), the geometric center of the fan-shaped disc body (401) is provided with the guide sliding groove (402), the vertex angles of the fan-shaped bodies (301, 302, 303, 304, 305 and 306) are provided with a ring tangent plane bevel angle, and the vertex angle is 60 degrees.

3. The mechanism of claim 1, wherein the mechanism for tensioning the face of the film disk comprises: the lower tray (104) is annular, 6 guide sliding blocks (502) with the same angle are circumferentially distributed on the upper surface of the lower tray (104), and the outer end face of each guide sliding block (502) is connected with an elastic column (503).

4. A mechanism for tensioning a sheet of film as defined in claim 1, wherein: the guide sliding groove (402) is axially constrained by the upper cover (102) and the lower tray (104), the sectors (301, 302, 303, 304, 305, 306) are rotationally constrained by the guide sliding groove (402) and the guide sliding block (502), and initial pretightening force is applied to the sectors (301, 302, 303, 304, 305, 306) by the elastic cylinder (503) to ensure that the initial positions of the six sectors (301, 302, 303, 304, 305, 306) with the same structure are consistent.

5. A mechanism for tensioning a sheet of film as defined in claim 2, wherein: the six segments (301, 302, 303, 304, 305, 306) are pushed to move away from the center of a circle synchronously along the radial direction by the axial movement of the driving push column (105), and return force is exerted by the elastic column body (503) during return stroke, so that the six segments (301, 302, 303, 304, 305, 306) are ensured to return to the initial point synchronously.

6. A mechanism for tensioning a sheet of film as defined in claim 1, wherein: the guide sliding block (502) of the lower tray (104) is connected with the upper cover (102) through bolts, so that the lower tray is convenient to disassemble, repair and assemble.

7. A mechanism for tensioning a sheet of film as defined in claim 3, wherein: the lower surface of the upper cover (102) and the upper surface of the film bonding boss area (403) are in the same plane.