CN110531588A - A kind of mechanism tightened for film disk - Google Patents
A kind of mechanism tightened for film disk Download PDFInfo
- Publication number
- CN110531588A CN110531588A CN201910634051.2A CN201910634051A CN110531588A CN 110531588 A CN110531588 A CN 110531588A CN 201910634051 A CN201910634051 A CN 201910634051A CN 110531588 A CN110531588 A CN 110531588A
- Authority
- CN
- China
- Prior art keywords
- film
- disk
- segment
- lower tray
- land area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Closing Of Containers (AREA)
Abstract
A kind of mechanism tightened for film disk, so that film used in certain photoetching has certain internal stress after tightening.The present invention includes that film, upper capping, cake disk, lower tray, driving push away column.Wherein, cake disk is made of the identical segment of six block structures, and each segment includes fan-shaped disk body, guide chute and film bond land area, and lower tray includes circular disk body, guiding feather key and Flexible Reset body.Utilize the axial freedom of lower tray and upper capping constraint cake disk, utilize the rotational freedom of guide runner sliding groove structure constraint cake disk, limitation cake disk can only be flexed outward along radial direction, using the axial precession of the driving cone column power overhanging as cake disk, tightens the film being bonded in film bond land area uniformly and there is certain internal stress.
Description
Technical field
The present invention relates to certain thin membrance mirror apparatus fields, specifically propose a kind of mechanism tightened for film disk, make
Film keeps smooth tight in certain photoetching process and has certain internal stress.
Background technique
Before the photoetching process for the litho machine that certain is worked using film, need to carry out the film used pre- taut
Tightly, keep film surface smooth, improve the success rate of photoetching.Film is fixed on tension mechanism, passes through extending out for tension mechanism, band
Dynamic film, tightens it.It after film is tauted in Beng Mo mechanism, has membrane cut mechanism and fixes the film tightened, only intercept
Intermediate circular portion is transferred to progress next step photo-mask process on litho machine.
Before photoetching can photoresist is uniformly coated on film, if based on film surface out-of-flatness, will lead to photoetching
Glue surface irregularity, it is out of shape to will lead to pattern during photoetching, prevents litho machine from normal photolithography.
Beng Mo mechanism used at present is mostly rectangle, and it is not tight usually to there is a problem of that film is drawn, can not be successfully
Membrane process is cut in completion, and PI film, which can't cut, or out-of-flatness is cut in film section when cutting film leads to the waste for causing film, is mentioned significantly
High production cost and production time, cause production efficiency low.
Summary of the invention
The present invention is to guarantee that film is tightening process surfacing and having certain internal stress, is proposed a kind of for film
The mechanism that disk is tightened.
Design method of the present invention is: according to ground work profiles, a kind of of design is tightened for film disk
Mechanism include film (101), upper capping (102), cake disk (103), lower tray (104), driving push away column (105).The cake disk
(103) by six block structures, its identical segment (301,302,303,304,305,306) of safety is formed, and each segment includes
Fan-shaped disk body (401), guide chute (402) and film bond land area (403), the lower tray (104) include circle
Shape disk body (501), guide runner (502) and elastic cylinder (503).The film (101) and segment (301,302,
303,304,305,306) film bond land area connects (403), the guide runner (502) of the lower tray (104) with
Upper capping (102) is connected, the guide chute (402) of the segment (301,302,303,304,305,306) with it is described
Lower tray (104) is connected by guide runner (502) and elastic cylinder (503).The segment (301,302,303,
304,305,306) film bond land area (403) is fan-shaped ring, and is had relative to fan-shaped disk body (401) upper surface
Certain height of projection, fan-shaped disk body (401) geometric center have guide chute (402), segment (301,302,303,304,
305,306) apex angle shape is ring cutting face oblique angle, and corner angle is 60 degree.The lower tray (104) is ring-type, lower tray
(104) upper surface is axially distributed 6 equal angular guide runners (502), guide runner (502) outer end face and elastic cylinder
(105) it is connected.
A kind of mechanism tightened for film disk of the present invention, the driving push away the rotary table for being at the top of column (105), and rotary table is oblique
Angle is consistent with the segment (301,302,303,304,305,306) top ring cutting face oblique angle, pushes away column by the driving
(105) axial movement pushes six segments (301,302,303,304,305,306) radially to synchronize far from circle
The heart applies reverberation matrix method by the elastic cylinder (503) in backhaul, it is ensured that six segments are synchronous to return initial point.
A kind of mechanism tightened for film disk of the present invention, the guide runner (402) of the lower tray (104) and upper envelope
(102) are covered by being bolted.It is easy to disassemble, it repairs and assembles.
A kind of mechanism tightened for film disk of the present invention, the lower surface of the upper capping (102) and the segment
(301,302,303,304,305,306) are along upper convex surface in same plane.
A kind of mechanism tightened for film disk of the present invention, driving cone column (105) the rotary table inclined-plane and segment
The top ring cutting face oblique angle of (301,302,303,304,305,306) is to surface engagement, at work by driving cone column (105)
Axial precession is converted into the radial dilatation of segment, it is ensured that six segments (301,302,303,304,305,306) are radially
Equidistant overhanging, Uniform Tension PI film (101) achievees the purpose that uniformly to tighten.
It also include pretensioner systems in the structure, it is described to pass through elastic cylinder (503) and segment to guide runner (502)
Guide chute (402) inner surface of (301,302,303,304,305,306) connects, be segment (301,302,303,304,
305,306) apply the power for being directed toward the center of circle, it is ensured that segment (301,302,303,304,305,306) is bored with the driving always
Column (105) cooperation, six segment (301,302,303,304,305,306) strokes are consistent, in backhaul, by elastic cylinder
(105) reverberation matrix method is provided, segment (301,302,303,304,305,306) body is made to playback.
Compared with traditional taut membrane structure, pie Beng Mo mechanism can ensure that film is uniformly tightened in all directions and had certain
It is interior answer, improve PI film internal stress controllability.
Detailed description of the invention
Fig. 1 is overall structure perspective view of the explosion of the present invention；
Fig. 2 is overall structure of the present invention；
Fig. 3 is cake dish structure schematic diagram of the present invention；
Fig. 4 is segment structure schematic diagram of the present invention；
Fig. 5 is lower tray structural schematic diagram of the present invention；
In figure shown in 1~5；101- film；It is covered on 102-；103- cake disk；104- lower tray；105- driving cone column；301
~306- segment；401- sector disk body；402- film bond land area；403- guide chute；501- circular disk body；502-
Fixed sliding block；503- elastic cylinder.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated, but protection scope of the present invention is not limited to following embodiments.
As shown in Fig. 1~5, in the initial state, the cake disk (103) is applied by the elastic cylinder (402) pre-
Clamp force, it is ensured that all fan grooves are pasted onto film bond land area all in zero point and non-displacement, the film (101)
(402) on.
As shown in Fig. 1~5, in mechanism work, the upper capping (102), lower tray (104) are stationary state.By
The axially free of segment (301,302,303,304,305,306) is limited in upper capping (102) and the lower tray (104)
Degree, the rotational freedom of guide chute (402) sliding block (401) the cooperation limitation fan groove, passes through axis when driving pushes away column (105)
To movement, six segments (301,302,303,304,305,306) is pushed radially to synchronize far from the center of circle, in backhaul
When, apply reverberation matrix method by the elastic cylinder (503), it is ensured that six segments are synchronous to return initial point.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (7)
1. a kind of mechanism tightened for film disk, it is characterised in that: the structure includes PI film (101), upper capping
(102), cake disk (103), lower tray (104), driving push away column (105).The cake disk (103) is identical by six block structures
Segment (301,302,303,304,305,306) composition, each segment include fan-shaped disk body (401), guide chute (402)
And PI film bond land area (403), the lower tray (104) include circular disk body (501), guide runner (502)
And elastic cylinder (503).The film bond of the film (101) and segment (301,302,303,304,305,306)
Land area connects (403), and the guide runner (502) of the lower tray (104) is connected with upper capping (102), the fan
The guide chute (402) of body (301,302,303,304,305,306) and the lower tray (104) pass through guide runner
(502) it is connected with elastic cylinder (503).
2. a kind of mechanism tightened for film disk according to claim 1, it is characterised in that: the segment
The film bond land area (403) of (301,302,303,304,305,306) is fan-shaped ring, and relative to fan-shaped disk body
(401) upper surface has certain height of projection, and fan-shaped disk body (401) geometric center has guide chute (402), segment
The apex angle of (301,302,303,304,305,306) has ring cutting face oblique angle, and corner angle is 60 degree.
3. a kind of mechanism tightened for film disk according to claim 1, it is characterised in that: the lower tray
It (104) is ring-type, the equal angular guide runner (502) in circumferentially distributed 6 of lower tray (104) upper surface, guide runner (502) is outside
End face is connected with elastic cylinder (105).
4. a kind of mechanism tightened for film disk according to claim 1, it is characterised in that: pass through the upper capping
(102) and lower tray (104) applies axial constraint to the guide chute (402), passes through the guide chute (402) and guiding
Sliding fast (502) apply rotational restraint to the segment (301,302,303,304,305,306), pass through the elastic cylinder
(503) initial pretightening force is applied to the segment (301,302,303,304,305,306), it is ensured that six block structures are identical
Segment (301,302,303,304,305,306) initial position it is consistent.
5. according to claim 1 with a kind of mechanism tightened for film disk as claimed in claim 2, it is characterised in that: institute
It states driving and pushes away the rotary table for being at the top of column (105), rotary table oblique angle and the segment (301,302,303,304,305,306) top
Ring cutting face oblique angle is consistent, pushes away the axial movements of column (105) by described drive, push six segments (301,302,
303, it 304,305,306) radially synchronizes far from the center of circle, in backhaul, applies reverberation matrix method by the elastic cylinder (503),
Ensure that six segments (301,302,303,304,305,306) are synchronous and returns initial point.
6. a kind of mechanism tightened for film disk according to claim 1, it is characterised in that: the lower tray
(104) guide runner (502) is with upper capping (102) by being bolted.It is easy to disassemble, it repairs and assembles.
7. according to claim 1 with a kind of mechanism tightened for film disk as claimed in claim 3, it is characterised in that: institute
The lower surface and the film bond land area (403) upper surface for stating capping (102) are in same plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910634051.2A CN110531588B (en) | 2019-07-15 | 2019-07-15 | Mechanism for tightening film disk surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910634051.2A CN110531588B (en) | 2019-07-15 | 2019-07-15 | Mechanism for tightening film disk surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110531588A true CN110531588A (en) | 2019-12-03 |
| CN110531588B CN110531588B (en) | 2020-12-04 |
Family
ID=68659665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910634051.2A Expired - Fee Related CN110531588B (en) | 2019-07-15 | 2019-07-15 | Mechanism for tightening film disk surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110531588B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1477692A (en) * | 2002-08-20 | 2004-02-25 | 崔铉镐 | Thin film clamping device for keeping thin film planeness |
| CN205735303U (en) * | 2016-07-05 | 2016-11-30 | 西安金百泽电路科技有限公司 | A kind of PI film cutting mould of adjustable dimension |
| CN108705764A (en) * | 2018-08-06 | 2018-10-26 | 青岛威尔塑料机械有限公司 | A kind of PI films biaxial orientation stretching machine track assembly |
| CN109192697A (en) * | 2018-08-29 | 2019-01-11 | 中国科学院光电技术研究所 | A kind of fexible film tightens fixed device |
-
2019
- 2019-07-15 CN CN201910634051.2A patent/CN110531588B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1477692A (en) * | 2002-08-20 | 2004-02-25 | 崔铉镐 | Thin film clamping device for keeping thin film planeness |
| CN205735303U (en) * | 2016-07-05 | 2016-11-30 | 西安金百泽电路科技有限公司 | A kind of PI film cutting mould of adjustable dimension |
| CN108705764A (en) * | 2018-08-06 | 2018-10-26 | 青岛威尔塑料机械有限公司 | A kind of PI films biaxial orientation stretching machine track assembly |
| CN109192697A (en) * | 2018-08-29 | 2019-01-11 | 中国科学院光电技术研究所 | A kind of fexible film tightens fixed device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110531588B (en) | 2020-12-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0232935A (en) | Labelling station of bottle | |
| CN1860075A (en) | Method and apparatus utilizing servo motors for placing parts onto a moving web | |
| RU2010119527A (en) | RING DISK BRAKE AND METHOD FOR INCREASING THE BRAKE SHOCK ENHANCEMENT EFFORT | |
| CN110531588A (en) | A kind of mechanism tightened for film disk | |
| DE602006018393D1 (en) | Vibrating actuator and method for operating a vibrating actuator | |
| CN106059386B (en) | The rotary inertia piezoelectric actuator of clamper controllable type plate-like and start method | |
| RU2002122409A (en) | METHOD FOR REMOVING A Dismountable Toroidal Support from a Vulcanized Tire | |
| JP2006346930A (en) | Precured tread assembling method and precured tread assembling apparatus | |
| JP2000190030A5 (en) | ||
| JP5765646B2 (en) | Encoder, encoder manufacturing method, drive device | |
| CN115589099A (en) | Servo motor for rehabilitation robot joint | |
| JP4969366B2 (en) | Friction plate assembling apparatus for lock-up clutch and its assembling method | |
| CN208360624U (en) | A kind of closing device for stretched film packing machine | |
| JPH0215889A (en) | Laser cutting method | |
| CN112810205A (en) | Giant tire retreading and tire sleeving machine and tire sleeving method | |
| RU2239540C2 (en) | Petal type tool | |
| CN201863388U (en) | Fixed type clamp in plastic composite pipe sealing ring of steel wire mesh | |
| JPS60148696A (en) | Positioning device for welding of vane wheel member | |
| JPH0413083Y2 (en) | ||
| CN207343654U (en) | A kind of hoop bending device for steel bars | |
| CN110394733B (en) | Guider polishing clamp | |
| WO2013097781A1 (en) | Belt ply drum host machine and drive method therefor | |
| CN220749931U (en) | Cutting rotary device of stage lamp | |
| CN218462631U (en) | Improved routing guide wheel device of multi-wire cutting machine | |
| CN208584204U (en) | A kind of annular groove processing jig used |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201204 Termination date: 20210715 |