CN110530848A - A kind of detection device and detection method - Google Patents
A kind of detection device and detection method Download PDFInfo
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- CN110530848A CN110530848A CN201910923792.2A CN201910923792A CN110530848A CN 110530848 A CN110530848 A CN 110530848A CN 201910923792 A CN201910923792 A CN 201910923792A CN 110530848 A CN110530848 A CN 110530848A
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- spherical mirror
- light
- seal cavity
- under test
- optical signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
- G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
Abstract
The embodiment of the present application discloses a kind of detection device and detection method, being located at the intracorporal reflecting element of seal chamber in the detection device includes the first spherical mirror and the second spherical mirror that be in the same plane and being oppositely arranged, wherein, the focal length of first spherical mirror is identical with the focal length of second spherical mirror, and there is pre-determined distance between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror, the pre-determined distance is greater than zero, to after incident light (i.e. incident exciting light) is injected between first spherical mirror and the second spherical mirror, multiple reflections can be passed through between the first spherical mirror and the second spherical mirror, to enhance the Raman light signal strength that the under test gas between the first spherical mirror and the second spherical mirror generates under the action of incident light, and then it improves detection device and is based on Raman optical signal progress signal detection Sensitivity.
Description
Technical field
This application involves signal detection technique field more particularly to a kind of detection devices and detection method.
Background technique
Raman spectrum is a kind of inelastic scattering spectrum that molecule is had an effect with photon, specifically, in ground state or swashing
The molecule for sending out state is excited by incident light and transits to virtual stake, at this point, the molecule is in unstable energy level, will finally discharge energy
Amount, returns to excitation state or ground state, in the process, molecular entergy level can be changed compared to original state, i.e., this support can occur
Ke Si scattering or anti-Stokes scattering, the change of simultaneous photon wavelength, and then macroscopically showing as comprising each object
The Raman spectrum of matter different characteristic.
Due to including the different characteristic of each substance in Raman spectrum, and the feature spectral peak of different material is different, therefore, uses
Raman spectrum carry out optical signal detection have certain fingerprint, moreover, using Raman spectroscopy to gas detection when without
Pretreatment need to be carried out to sample can be detected, therefore, compared with the technologies such as gas-chromatography, infrared spectroscopy, Raman spectroscopy tool
Have quick nondestructive, fingerprint, sample without the advantages that can not be substituted such as pretreatments, however, existing application Raman spectroscopy into
The detection sensitivity of the detection device of row signal detection is lower.
Summary of the invention
In order to solve the above technical problems, the embodiment of the present application provides a kind of detection device and detection method, to improve letter
Number detection detection sensitivity.
To solve the above problems, the embodiment of the present application provides following technical solution:
A kind of detection device includes:
Seal cavity has first window and the second window in the seal cavity, and have in the seal cavity to
Gas is surveyed, the under test gas generates Raman optical signal under the excitation by the exciting light of the first window incidence；
Positioned at the intracorporal reflecting element of the seal chamber, the reflecting element includes in the same plane and is oppositely arranged
The first spherical mirror and the second spherical mirror, wherein the focal length of first spherical mirror is identical with the focal length of second spherical mirror,
And there is pre-determined distance between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror, the pre-determined distance is greater than
Zero；
Positioned at the intracorporal acquisition elements of the seal chamber, the acquisition elements are described for acquiring the Raman optical signal
Raman optical signal is used to form the spectrogram of the under test gas after second window injection；
Vacuum pump, the vacuum pump are connected with the first through hole in the seal cavity, for the seal cavity
It vacuumizes；
Gas input element, the gas input element are connected with the second through-hole in the seal cavity, for pair
The seal cavity inputs under test gas.
Optionally, the centre of sphere of the centre of sphere of first spherical mirror and second spherical mirror has default in a first direction
Distance, wherein the first direction is parallel to the plane where the reflecting element and perpendicular to second direction, the second party
To being to be directed toward second spherical mirror by first spherical mirror；
The value range of the pre-determined distance is 0.2mm-0.5mm, including endpoint value.
Optionally, the acquisition elements include the first lens, optical filter and the second lens, wherein first lens are used
In the Raman optical signal that the convergence under test gas generates under the excitation of incident light, and the first directional light is converted thereof into, institute
Optical filter is stated for being filtered to first directional light, forms the second directional light, second lens are used for described the
Two directional lights are converted into converged light and project by second window, to form the spectrogram of the under test gas.
Optionally, the focal length of first lens is less than the focal length of second lens.
Optionally, there is the first transfer conduit, first transfer conduit between the first through hole and the vacuum pump
Upper have the first control valve, and first control valve is used to control the logical of access between the vacuum pump and the seal cavity
It is disconnected；
There is the second transfer conduit, in second transfer conduit between second through-hole and the gas input element
With the second control valve, second control valve is for controlling access between the gas input element and the seal cavity
On-off.
Optionally, the seal cavity is stainless steel seal cavity.
Optionally, further includes:
Processing element, the processing element includes spectrometer and computer, for being projected based on acquisition elements acquisition
Raman optical signal form the spectrogram of the under test gas；
Laser, for injecting exciting light to the seal cavity by the first window.
Optionally, further includes: pressure detecting meter, for detecting the pressure inside the seal cavity.
Correspondingly, present invention also provides a kind of detection methods, this method comprises:
Seal cavity is vacuumized using vacuum pump, be then filled with using gas input element into the seal cavity to
Survey gas；
Pass through first spherical mirror and second spherical surface of the first window into the seal cavity in the reflecting element
Exciting light is injected between mirror, the under test gas generates Raman optical signal under the excitation of the exciting light；
The Raman optical signal is acquired using acquisition elements, the Raman optical signal is used to form after the injection of the second window
The spectrogram of the under test gas；
Wherein, first spherical mirror and second spherical mirror are in the same plane and be oppositely arranged, described first
The focal length of spherical mirror is identical with the focal length of second spherical mirror, and the centre of sphere of first spherical mirror and second spherical mirror
The centre of sphere between have pre-determined distance, the pre-determined distance be greater than zero.
Optionally, before the Raman optical signal using acquisition elements acquisition further include:
Adjust center of the central axis of the acquisition elements relative to first spherical mirror and second spherical mirror
Angle between line, so that the collected Raman optical signal of the acquisition elements is most.
Compared with prior art, above-mentioned technical proposal has the advantage that
In detection device provided by the embodiment of the present application, being located at the intracorporal reflecting element of the seal chamber includes being located at together
In one plane and the first spherical mirror and the second spherical mirror that are oppositely arranged, wherein the focal length of first spherical mirror and described
The focal length of two spherical mirrors is identical, and have between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror it is default away from
From the pre-determined distance is greater than zero, to inject first spherical mirror and the second ball in incident light (i.e. incident exciting light)
After between the mirror of face, multiple reflections can be carried out between first spherical mirror and second spherical mirror, institute is located at enhancing
State the Raman light letter that the under test gas between the first spherical mirror and second spherical mirror generates under the action of the incident light
Number intensity, and then improve the sensitivity that the detection device carries out signal detection based on the Raman optical signal.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of application for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is a kind of schematic diagram of detection device provided by the embodiment of the present application；
Fig. 2 is the detected SF of detection device provided by the embodiment of the present application6Raman spectrogram；
Fig. 3 is the detected SO of detection device provided by the embodiment of the present application2Raman spectrogram；
Fig. 4 is the schematic diagram of another kind detection device provided by the embodiment of the present application；
Fig. 5 is the schematic diagram of another detection device provided by the embodiment of the present application；
Fig. 6 is a kind of detection method process provided by the embodiment of the present application.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.It is based on
Embodiment in the application, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall in the protection scope of this application.
Many details are explained in the following description in order to fully understand the application, but the application can be with
Implemented using other than the one described here other way, those skilled in the art can be without prejudice to the application intension
In the case of do similar popularization, therefore the application is not limited by the specific embodiments disclosed below.
Secondly, the application combination schematic diagram is described in detail, when the embodiment of the present application is described in detail, for purposes of illustration only, table
Show that the sectional view of device architecture can disobey general proportion and make partial enlargement, and the schematic diagram is example, is not answered herein
Limit the range of the application protection.In addition, the three-dimensional space of length, width and depth should be included in actual fabrication.
Just as described in the background section, the inspection of the existing detection device that signal detection is carried out using Raman spectroscopy
It is lower to survey sensitivity, especially when the sample of detection is gas, the detection sensitivity of existing detection device is lower.
Specifically, the strength formula of Raman spectrum are as follows:Wherein, I0For excitating light strength (i.e. incident light
Intensity), n is test substance molecular density, and d σ/d Ω is differential scattering, and Ω is scattering light collection angle, and σ is Raman scattering
Section, L are effective length (i.e. the optical path length that the molecule of exciting light and test substance interacts).
By the strength formula of Raman spectrum it is found that density, the raman scattering cross section of the intensity of Raman spectrum and test substance
Product is directly proportional, and the density of gas is small, scattering section is small, so that under test gas is under the excitation of incident light, the drawing of generation
The intensity of graceful optical signal is lower, causes the sensitivity when detecting under test gas of existing detection device lower.
By the strength formula of Raman spectrum it is found that by the density for increasing under test gas to gas pressurized or adjusting Raman
The collection angle or raising excitating light strength I of light0Or improve effective length of the incident light and under test gas interaction
L is spent, the intensity that test substance generates Raman light can be improved, and then improve the detection sensitivity of detection device, but inventor
The study found that gas pressurized or adjust Raman light collection angle can only small elevation Raman light intensity, to detection device
The promotion of sensitivity is relatively limited, and reaches the method for the intensity for improving exciting light by improving the power of laser merely, meeting
Dramatically increase testing cost.
On the basis of the studies above, the embodiment of the present application provides a kind of detection device, as shown in Figure 1, the detection
Device includes:
Seal cavity 10 has first window A and the second window B, and the seal cavity 10 in the seal cavity 10
Interior to have under test gas, the under test gas generates Raman at the excitation by the exciting light C of the first window A incidence
Optical signal；
Reflecting element 20 in the seal cavity 10, the reflecting element 20 include in the same plane and phase
To the first spherical mirror M of setting1With the second spherical mirror M2, wherein the first spherical mirror M1Focal length and second spherical mirror
M2Focal length it is identical, and the first spherical mirror M1Centre of sphere O1With the second spherical mirror M2Centre of sphere O2Between have it is default away from
From the pre-determined distance is greater than zero；
Acquisition elements 30 in the seal cavity 10, the acquisition elements 30 are for acquiring the Raman light letter
Number, the Raman optical signal is used to form the spectrogram of the under test gas after the second window B injection；
Vacuum pump 40, the vacuum pump 40 are connected with the first through hole in the seal cavity 10, for described close
Envelope cavity 10 vacuumizes；
Gas input element 50, the gas input element 50 are connected with the second through-hole in the seal cavity 10,
For inputting under test gas to the seal cavity 10.
It should be noted that if the centre of sphere of the centre of sphere of the first spherical mirror and the second spherical mirror is completely coincident, according to mistake
The light of the centre of sphere will must leave along this characteristic of backtracking, the exciting light by the centre of sphere incidence of the second spherical mirror along former road
One spherical mirror and the second spherical mirror, so that exciting light can not be made, by multiple reflections, can not to enhance to be measured in two spherical mirrors
Gas is under the excitation of incident light, the Raman optical signal of generation.Therefore, in the embodiment of the present application, first spherical mirror
There is pre-determined distance, the pre-determined distance is greater than zero, so as to so that excitation between the centre of sphere and the centre of sphere of second spherical mirror
Light passes through multiple reflections in two spherical mirrors, enhances under test gas under the excitation of incident light, the Raman optical signal of generation
Intensity.
On the basis of the above embodiments, in one embodiment of the application, continue as shown in Figure 1, described first
Spherical mirror M1Centre of sphere O1With the second spherical mirror M1Centre of sphere O2There is pre-determined distance in a first direction, wherein described on Y
First direction Y is parallel to the plane at 20 place of reflecting element and is by institute perpendicular to second direction X, the second direction X
State the first spherical mirror M1It is directed toward the second spherical mirror M2；Optionally, the value range of the pre-determined distance is 0.2mm-0.5mm,
Including endpoint value.
Optionally, in one embodiment of the application, the under test gas is SF6Characteristics of decomposition gas, specifically, institute
State SF6Characteristics of decomposition gas includes SO2, H2S and SF6Equal gases；The under test gas described in the application other embodiments can be with
For other under test gas, the application is not limited this, and is specifically depended on the circumstances.
In detection device provided by the embodiment of the present application, being located at the intracorporal reflecting element of the seal chamber includes being located at together
In one plane and the first spherical mirror and the second spherical mirror that are oppositely arranged, the centre of sphere of first spherical mirror and second spherical surface
There is pre-determined distance between the centre of sphere of mirror, the pre-determined distance is greater than zero, thus incident light inject first spherical mirror and
After between second spherical mirror, multiple reflections can be carried out between first spherical mirror and second spherical mirror, with enhancing
The Raman light that gas between first spherical mirror and second spherical mirror generates under the action of the incident light
Signal strength, and then improve the sensitivity that the detection device carries out signal detection based on the Raman optical signal.
Therefore, detection device provided by the embodiment of the present application is being used for SF6It is sensitive when the detection of characteristics of decomposition gas
Degree is higher, thus utilizing SF6Characteristics of decomposition gas carries out GIS fault detection, can be fast and efficiently to SF6Characteristics of decomposition gas
Micro constitutent contained in body is detected, so as to be subsequent to SF6Each characteristic component is determined in characteristics of decomposition gas
Property, quantitative analysis provide solution, to reach as far as possible under environment at the scene carry out GIS fault detection demand.
It should be noted that due to SF6SO in characteristics of decomposition gas2, H2When the gases such as S are with corrosive gas,
In order to prevent when to detecting with corrosive under test gas, under test gas carries out the seal cavity of detection device rotten
Erosion, influences the service life of the detection device.On the basis of the application any of the above-described embodiment, in the reality of the application
It applies in example, the seal cavity is stainless steel seal cavity, so as to prevent under test gas from corroding to it, in its of the application
In his embodiment, the seal cavity can also be made of other corrosion resistance materials, and the application does not limit this, specifically
It depends on the circumstances.
As shown in Figures 2 and 3, Fig. 2 shows utilize detection device provided by the embodiment of the present application to SF6Characteristics of decomposition
The SO obtained when gas is detected2Raman spectrum, Fig. 3, which is shown, utilizes detection device pair provided by the embodiment of the present application
SF6The SF that characteristics of decomposition gas obtains when being detected6Raman spectrum.From figures 2 and 3, it will be seen that the embodiment of the present application institute
The detection device of offer is to SF6When characteristics of decomposition gas is detected, more apparent characteristic spectrum peak figure can be obtained, it is sensitive
It spends higher.
On the basis of the application any of the above-described embodiment, in one embodiment of the application, the first window
Light transmittance is greater than or equal to 95%, to increase the light transmittance of the first window, so that described in incident light entrance as much as possible
Seal cavity, to increase under test gas in the seal cavity under the premise of not increasing the emitter cost of incident light
The intensity for the incident light being subject to；Similarly, the light transmittance of second window is greater than or equal to 95%, to increase by second window
Light transmittance so that the Raman optical signal generated in the seal cavity it is as much as possible through second window project,
And then increase the optical signal for being used to form the spectrogram of under test gas, improve the sensitivity of the detection device.
Based on any of the above embodiments, in one embodiment of the application, as shown in figure 4, the acquisition is first
Part 30 includes the first lens L1, optical filter F and the second lens L2, wherein the first lens L1For converging the under test gas
The Raman optical signal generated under the excitation of incident light (i.e. incident exciting light), and convert thereof into the first parallel light output to
The optical filter F；The optical filter F, will be mixed in the Raman optical signal for being filtered to first directional light
(i.e. object under test generates the Rayleigh scattering light that incident light and object under test generate under excitation under excitation
The light with incident light phase co-wavelength) filtered out, formed the second parallel light output give the second lens L2, to avoid this
Incident light and Rayleigh scattering light (i.e. with the scattering light of incident light phase co-wavelength) are to the subsequent spectrum for being formed by under test gas
Figure has an impact, and influences testing result；The second lens L2For second directional light to be converted into converged light by institute
The second window B injection is stated, to improve the Raman light signal strength for the spectrogram to form the under test gas.Optionally, described
Optical filter is long pass filter.
It should be noted that the focal length of first lens is smaller, the slave reflecting element that first lens can be collected
The three-dimensional viewpoin of the Raman optical signal of injection is bigger, and the Raman optical signal of the first lens convergence is more；The coke of second lens
Away from bigger, the three-dimensional viewpoin for the converged light that the second directional light of outgoing is converted into is smaller, so that the convergence optical signal exists
When being transmitted to the Spectrum Formation structure of under test gas through transmission line (such as optical fiber), it is coupled in the transmission line (such as optical fiber)
Solid angle it is smaller so that propagation loss of the converged light in optical fiber is smaller, to reduce converged light in transmission process
Loss, to further increase the Raman light signal strength for the spectrogram to form the under test gas.Therefore in any of the above-described implementation
On the basis of example, in one embodiment of the application, the focal length of first lens is less than the focal length of second lens, with
Further increase the Raman light signal strength to form the spectrogram of the under test gas.
Based on any of the above embodiments, in one embodiment of the application, the light transmittance of first lens
More than or equal to 95%, to reduce reflected light of Raman optical signal when by first lens, enhancing Raman optical signal exists
Transmitted light when by first lens improves the transmissivity of Raman optical signal；Similarly, the light transmittance of second lens is big
In or be equal to 95%, to reduce reflected light of first directional light when by second lens, it is flat to enhance described first
Transmitted light of row light when by second lens, improves the Raman light for being subsequently used for being formed the spectrogram of the under test gas
Signal strength.
Based on any of the above embodiments, in one embodiment of the application, as shown in figure 5, described first is logical
There is the first transfer conduit between hole and the vacuum pump 40, there is the first control valve K in first transfer conduit1, described
First control valve K1For controlling the on-off of access between the vacuum pump 40 and the seal cavity 10；
There is the second transfer conduit, second transfer conduit between second through-hole and the gas input element 50
It is upper that there is the second control valve K2, the second control valve K2For controlling the gas input element 50 and the seal cavity 10
Between access on-off.
Optionally, first control valve is stainless steel control valve, to prevent from having corrosive under test gas to described
First control valve causes to corrode；Second control valve is stainless steel control valve, to prevent from having corrosive under test gas pair
Second control valve causes to corrode, in the other embodiments of the application, first control valve and second control valve
It can also be made of other materials with corrosion resistance, the application does not limit this, and specifically depends on the circumstances.
On the basis of the application any of the above-described embodiment, in one embodiment of the application, the detection device is also
It include: pressure detecting meter, for detecting the pressure inside the seal cavity, in order to control institute by the pressure detecting meter
The shutdown of the second control valve is stated, to control the under test gas amount that the gas input element is inputted into the seal cavity.
Based on any of the above embodiments, in one embodiment of the application, continue as shown in Figure 5, further includes:
Processing element, the Raman optical signal that the processing element is used to project based on the acquisition elements 30 form the under test gas
Spectrogram；Optionally, the processing element includes spectrometer 61 and computer 62, wherein the spectrometer is used for Raman light
Signal is converted into electric signal, and the electric signal that the computer is used to be converted into based on the Raman optical signal forms under test gas
Spectrogram.
Optionally, on the basis of the above embodiments, in one embodiment of the application, the acquisition elements 30 are projected
Raman optical signal the spectrometer 61 is transferred to by optical fiber 80, the processing element is acquired based on the acquisition elements 30
Raman optical signal forms the spectrogram of the under test gas, and the spectrogram is shown on computer 62.
It should be noted that the computer can be desktop computer, and in the application other embodiments, the calculating
Machine can also be laptop, and the application is not limited this, specifically depended on the circumstances.
Based on any of the above embodiments, in one embodiment of the application, the detection device further include:
Laser 70, for by the first window A to the first spherical mirror described in the seal cavity 10 and described
Exciting light is injected between second spherical mirror, in order to the gas to be measured between first spherical mirror and second spherical mirror
Body generates Raman optical signal under the action of exciting light.
Optionally, on the basis of the above embodiments, in one embodiment of the application, the laser transmitting swashs
The laser that luminous wavelength is 532nm, power is 300mW, in the other embodiments of the application, the laser can also be selected
With the laser for the laser that can emit other wavelength and power, the application is not limited this, and is specifically depended on the circumstances.
To sum up, in the detection device provided in the embodiment of the present application, include positioned at the intracorporal reflecting element of the seal chamber
The first spherical mirror and the second spherical mirror in the same plane and be oppositely arranged, wherein the focal length of first spherical mirror and
The focal length of second spherical mirror is identical, and has between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror
Pre-determined distance, the pre-determined distance are greater than zero, can be with thus after incident light is injected between the first spherical mirror and the second spherical mirror
Pass through multiple reflections in the first spherical mirror and the second spherical mirror, first spherical mirror and second spherical surface are located at enhancing
The Raman light signal strength that under test gas between mirror generates under the action of the incident light, and then improve detection device and be based on
The Raman optical signal carries out the sensitivity of signal detection.
Correspondingly, present invention also provides a kind of detection method, applied to the detection dress provided in any of the above-described embodiment
It sets, as shown in fig. 6, the detection method includes:
S1: vacuum pump is utilized, seal cavity is vacuumized, is then filled using gas input element into the seal cavity
Enter under test gas；
S2: pass through first spherical mirror and second ball of the first window into the seal cavity in the reflecting element
Exciting light is injected between the mirror of face, the under test gas generates Raman optical signal under the excitation of the exciting light；
S3: the Raman optical signal is acquired using acquisition elements, the Raman optical signal is after second window injection
It is used to form the spectrogram of the under test gas.
It needs, in detection method provided by the embodiment of the present application, after first being vacuumized to seal cavity, then to institute
Stating and being filled under test gas in seal cavity is the interference in order to exclude the intracorporal non-under test gas of seal chamber, is located at convenient for calibration close
Seal the qualitative and quantitative analysis of the concentration and under test gas of each ingredient in intracavitary under test gas.
On the basis of the above embodiments, in one embodiment of the application, first spherical mirror and described second
Spherical mirror is in the same plane and is oppositely arranged, the focal length phase of the focal length of first spherical mirror and second spherical mirror
Together, and between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror there is pre-determined distance, the pre-determined distance
Greater than zero.Specifically, in one embodiment of the application, the ball of the centre of sphere of first spherical mirror and second spherical mirror
The heart has pre-determined distance in a first direction, wherein the first direction is parallel to the plane where the reflecting element and hangs down
Directly in second direction, the second direction is to be directed toward second spherical mirror by first spherical mirror；Optionally, described default
The value range of distance is 0.2mm-0.5mm, including endpoint value.
On the basis of the application any of the above-described embodiment, in one embodiment of the application, the first window
Light transmittance is greater than or equal to 95%, to increase the light transmittance of the first window, so that described in incident light entrance as much as possible
Seal cavity, to increase under test gas in the seal cavity under the premise of not increasing the emitter cost of incident light
The intensity for the incident light being subject to；Similarly, the light transmittance of second window is greater than or equal to 95%, to increase by second window
Light transmittance so that the Raman optical signal generated in the seal cavity it is as much as possible through second window project,
And then increase the optical signal for being used to form the spectrogram of under test gas, improve the sensitivity of the detection device.
Based on any of the above embodiments, in one embodiment of the application, the acquisition elements include first
Lens, optical filter and the second lens, wherein it is (i.e. incident in incident light that first lens are used to converge the under test gas
Exciting light) excitation under the Raman optical signal that generates, and convert thereof into the first parallel light output to the optical filter；The filter
Mating plate is for being filtered first directional light, by mixed incident light and Rayleigh scattering light in the Raman optical signal
(i.e. under test gas generate under the excitation of exciting light the light with incident light phase co-wavelength) is filtered out, and it is parallel to form second
Light output gives second lens, to avoid the incident light and Rayleigh scattering light (i.e. with the scattering light of incident light phase co-wavelength)
The subsequent spectrogram for being formed by under test gas is had an impact, testing result is influenced；Second lens are used for described the
Two directional lights are converted into converged light and project by second window, to improve the drawing for the spectrogram to form the under test gas
Graceful light signal strength.Optionally, optical filter is long pass filter.
It should be noted that the focal length of first lens is smaller, the slave reflecting element that first lens can be collected
The three-dimensional viewpoin of the Raman optical signal of injection is bigger, and the Raman optical signal of the first lens convergence is more；The coke of second lens
Away from bigger, the three-dimensional viewpoin for the converged light that the second directional light of outgoing is converted into is smaller, so that the convergence optical signal exists
When being transmitted to the Spectrum Formation structure of under test gas through transmission line (such as optical fiber), it is coupled in the transmission line (such as optical fiber)
Solid angle it is smaller so that propagation loss of the converged light in optical fiber is smaller, to reduce converged light in transmission process
Loss, to further increase the Raman light signal strength for the spectrogram to form the under test gas.Therefore in any of the above-described implementation
On the basis of example, in one embodiment of the application, the focal length of first lens is less than the focal length of second lens, with
Further increase the Raman light signal strength to form the spectrogram of the under test gas.
Based on any of the above embodiments, in one embodiment of the application, the light transmittance of first lens
More than or equal to 95%, to reduce reflected light of Raman optical signal when by first lens, enhancing Raman optical signal exists
Transmitted light when by first lens improves the transmissivity of Raman optical signal；Similarly, the light transmittance of second lens is big
In or be equal to 95%, to reduce reflected light of first directional light when by second lens, it is flat to enhance described first
Transmitted light of row light when by second lens, improves the Raman light for being subsequently used for being formed the spectrogram of the under test gas
Signal strength.
Based on any of the above embodiments, in one embodiment of the application, the focal length of first lens is big
In the focal length of first spherical mirror and second spherical mirror, to prevent the transmission to Raman optical signal from impacting.
Based on any of the above embodiments, in one embodiment of the application, the first through hole and described true
There is the first transfer conduit between sky pump, there is the first control valve in first transfer conduit, correspondingly, this method is also wrapped
It includes:
By controlling the first control valve, the on-off of access between the vacuum pump and the seal cavity is controlled, with control
The intracorporal vacuum degree of seal chamber.
Based on any of the above embodiments, in one embodiment of the application, second through-hole and the gas
There is the second transfer conduit between body input element, there is the second control valve in second transfer conduit, correspondingly, this method
Further include:
By controlling the second control valve, the on-off of access between the gas input element and the seal cavity is controlled,
To control the intracorporal under test gas amount of the seal chamber.
On the basis of the above embodiments, in one embodiment of the application, the detection device further includes pressure inspection
Meter is surveyed, correspondingly, this method further include:
The intracorporal pressure of seal chamber detected based on pressure detecting controls cut-offfing for second control valve, to control
Make the under test gas amount that the gas input element is inputted into the seal cavity.
Detection method provided by the embodiment of the present application, by first window into the seal cavity reflecting element
In the first spherical mirror and second spherical mirror between inject exciting light, first spherical mirror and the second spherical mirror are located at same
It in one plane and is oppositely arranged, wherein the focal length of first spherical mirror is identical and described with the focal length of second spherical mirror
There is pre-determined distance between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror, the pre-determined distance is greater than zero, from
And in incident light after being injected between the first spherical mirror and the second spherical mirror, it is passed through between the first spherical mirror and the second spherical mirror
Multiple reflections are crossed, are generated under the action of incident light with enhancing the under test gas between the first spherical mirror and the second spherical mirror
Raman light signal strength, and then improve the detection method based on the Raman optical signal carry out signal detection sensitivity.
Optionally, continue as shown in figure 5, based on any of the above embodiments, in one embodiment of the application,
The utilization acquisition elements 30 acquire before the Raman optical signal further include:
Adjust the central axis H of the acquisition elements 301H2Relative to the first spherical mirror M1With second spherical mirror
M2Line of centres T1T2Between angle α, wherein the first spherical mirror M1With the second spherical mirror M2The line of centres
T1T2It is parallel to the second direction X, so that the collected Raman optical signal of the acquisition elements 30 is most, thus described in improving
The intensity of Raman optical signal further increases the sensitivity of detection.It should be noted that in the embodiment of the present application, described
One spherical mirror M1With the second spherical mirror M2Line of centres T1T2For the first spherical mirror M1With the second spherical mirror M2
Centre of sphere line O1O2Perpendicular bisector.
Optionally, the central axis H of the acquisition elements 301H2Relative to the first spherical mirror M1With second ball
Face mirror M2Line of centres T1T2Between angle α value be 30 ° -90 ° include endpoint value.
Based on any of the above embodiments, in one embodiment of the application, the detection device further include: swash
Light device 70, correspondingly, this method further include:
Laser is adjusted, so that the exciting light of laser transmitting injects institute in the seal cavity by first window
It states between the first spherical mirror and second spherical mirror, in order between first spherical mirror and second spherical mirror
Under test gas under the action of the exciting light, generate Raman optical signal.
Based on any of the above embodiments, in one embodiment of the application, the detection device further includes place
Element is managed, the processing element includes spectrometer and computer, correspondingly, this method further include:
The Raman optical signal projected using acquisition elements described in the spectrometer collection through second window, and by its turn
Electric signal is changed into export to the computer；
The electric signal is handled using the computer, forms the Raman spectrogram of the under test gas, and will
It is exported.
It should be noted that the computer can be desktop computer, and in the application other embodiments, the calculating
Machine can also be laptop, and the application is not limited this, specifically depended on the circumstances.
Below with reference to a specific embodiment, the course of work of detection device provided by the present application is described:
Seal cavity is vacuumized first with vacuum pump, is then filled with using gas input element into the seal cavity
Under test gas；
Then pass through the first spherical mirror and described second of the first window into the seal cavity in the reflecting element
Exciting light is injected between spherical mirror, the exciting light passes through the centre of sphere O of the second spherical mirror2It is irradiated on the first spherical mirror, then passes through
The centre of sphere O of the first spherical mirror is passed through in the reflection of first spherical mirror1It reaches on the second spherical mirror, is then reflecting warp through the second spherical mirror
Cross the centre of sphere O of the second spherical mirror2The upper of the first spherical mirror is reached, through excessive so between the first spherical mirror and the second spherical mirror
Secondary reflection, so that being located at the centre of sphere O of the first spherical mirror1With the centre of sphere O of the second spherical mirror2Neighbouring under test gas is in the exciting light
The lower Raman light signal enhancing formed of excitation；
Then the angle by adjusting the acquisition elements relative to the exciting light input path, so that the acquisition is first
The collected Raman optical signal of part is most, and collected Raman optical signal is projected by second window；
Finally, the Raman optical signal that the acquisition elements project is transferred to the spectrometer in processing element, institute by optical fiber
It states processing element and the spectrogram of the under test gas is formed based on the Raman optical signal that acquisition elements acquisition is projected, and by institute
Spectrogram is stated to show on computers.
Experiment shows that the ball positioned at the first spherical mirror can be made using detection method provided by the embodiment of the present application
Heart O1With the centre of sphere O of the second spherical mirror2The intensity of neighbouring Raman optical signal improves the 10-100 order of magnitude；
In conclusion reflecting element includes being located at together in the detection device and detection method that provide in the embodiment of the present application
In one plane and the first spherical mirror and the second spherical mirror that are oppositely arranged, wherein the focal length of first spherical mirror and described
The focal length of two spherical mirrors is identical, and have between the centre of sphere of first spherical mirror and the centre of sphere of second spherical mirror it is default away from
From the pre-determined distance is greater than zero, to inject first spherical mirror and the second ball in incident light (i.e. incident exciting light)
After between the mirror of face, multiple reflections can be carried out between first spherical mirror and second spherical mirror, institute is located at enhancing
State the Raman light letter that the under test gas between the first spherical mirror and second spherical mirror generates under the action of the incident light
Number intensity, and then improve the sensitivity that the detection device carries out signal detection based on the Raman optical signal.
Therefore, detection device provided by the embodiment of the present application is being used for SF6It is sensitive when the detection of characteristics of decomposition gas
Degree is higher, thus utilizing SF6Characteristics of decomposition gas carries out GIS fault detection, can be fast and efficiently to SF6Characteristics of decomposition gas
Micro constitutent contained in body is detected, so as to be subsequent to SF6Each characteristic component is determined in characteristics of decomposition gas
Property, quantitative analysis provide solution, to reach as far as possible under environment at the scene carry out GIS fault detection demand.
Various pieces are described by the way of progressive and arranged side by side in this specification, what each some importance illustrated be and its
The difference of his part, same and similar part may refer to each other between various pieces.
The foregoing description of the disclosed embodiments makes professional and technical personnel in the field can be realized or use the application.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the application.Therefore, the application
It is not intended to be limited to embodiment illustrated herein, and is to fit to consistent with the principles and novel features disclosed in this article
Widest scope.
Claims (10)
1. a kind of detection device characterized by comprising
Seal cavity has first window and the second window in the seal cavity, and has gas to be measured in the seal cavity
Body, the under test gas generate Raman optical signal under the excitation by the exciting light of the first window incidence；
Positioned at the intracorporal reflecting element of the seal chamber, the reflecting element include it is in the same plane and be oppositely arranged
One spherical mirror and the second spherical mirror, wherein the focal length of first spherical mirror is identical with the focal length of second spherical mirror, and institute
Stating has pre-determined distance between the centre of sphere of the first spherical mirror and the centre of sphere of second spherical mirror, the pre-determined distance is greater than zero；
Positioned at the intracorporal acquisition elements of the seal chamber, the acquisition elements are for acquiring the Raman optical signal, the Raman
Optical signal is used to form the spectrogram of the under test gas after second window injection；
Vacuum pump, the vacuum pump are connected with the first through hole in the seal cavity, true for taking out to the seal cavity
It is empty；
Gas input element, the gas input element are connected with the second through-hole in the seal cavity, for described
Seal cavity inputs under test gas.
2. detection device as described in claim 1, which is characterized in that the centre of sphere of first spherical mirror and second spherical surface
The centre of sphere of mirror has pre-determined distance in a first direction, wherein the first direction is parallel to flat where the reflecting element
Face and perpendicular to second direction, the second direction are to be directed toward second spherical mirror by first spherical mirror；
The value range of the pre-determined distance is 0.2mm-0.5mm, including endpoint value.
3. detection device as described in claim 1, which is characterized in that the acquisition elements include the first lens, optical filter and
Second lens, wherein first lens are used to converge the Raman light letter that the under test gas generates under the excitation of incident light
Number, and the first directional light is converted thereof into, it is parallel to form second for being filtered to first directional light for the optical filter
Light, second lens are used to for second directional light to be converted into converged light to project by second window, to be formed
State the spectrogram of under test gas.
4. detection device as claimed in claim 3, which is characterized in that the focal length of first lens is less than second lens
Focal length.
5. detection device as described in claim 1, which is characterized in that have the between the first through hole and the vacuum pump
One transfer conduit has the first control valve in first transfer conduit, and first control valve is for controlling the vacuum pump
The on-off of access between the seal cavity；
There is the second transfer conduit between second through-hole and the gas input element, have in second transfer conduit
Second control valve, second control valve are used to control the logical of access between the gas input element and the seal cavity
It is disconnected.
6. detection device as described in claim 1, which is characterized in that the seal cavity is stainless steel seal cavity.
7. detection device as described in claim 1, which is characterized in that further include:
Processing element, the processing element include spectrometer and computer, the drawing for being projected based on acquisition elements acquisition
Graceful optical signal forms the spectrogram of the under test gas；
Laser, for injecting exciting light to the seal cavity by the first window.
8. detection device as described in claim 1, which is characterized in that further include: pressure detecting meter, for detecting the sealing
The pressure of inside cavity.
9. a kind of detection method is applied to the described in any item detection devices of claim 1-8, which is characterized in that this method packet
It includes:
Seal cavity is vacuumized using vacuum pump, is then filled with gas to be measured into the seal cavity using gas input element
Body；
By first spherical mirror of the first window into the seal cavity in the reflecting element and second spherical mirror it
Between inject exciting light, the under test gas generates Raman optical signal under the excitation of the exciting light；
The Raman optical signal is acquired using acquisition elements, the Raman optical signal is used to form described after the injection of the second window
The spectrogram of under test gas；
Wherein, first spherical mirror and second spherical mirror are in the same plane and be oppositely arranged, first spherical surface
The focal length of mirror is identical with the focal length of second spherical mirror, and the ball of the centre of sphere of first spherical mirror and second spherical mirror
There is pre-determined distance, the pre-determined distance is greater than zero between the heart.
10. detection method as claimed in claim 9, which is characterized in that described to acquire the Raman light letter using acquisition elements
Before number further include:
Adjust the line of centres of the central axis of the acquisition elements relative to first spherical mirror and second spherical mirror
Between angle so that the collected Raman optical signal of the acquisition elements is most.
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Cited By (1)
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