CN110518150A - Display base plate and its manufacturing method, display device - Google Patents

Display base plate and its manufacturing method, display device Download PDF

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Publication number
CN110518150A
CN110518150A CN201910844152.2A CN201910844152A CN110518150A CN 110518150 A CN110518150 A CN 110518150A CN 201910844152 A CN201910844152 A CN 201910844152A CN 110518150 A CN110518150 A CN 110518150A
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China
Prior art keywords
encapsulated layer
layer
base plate
flexible substrate
viewing area
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CN201910844152.2A
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CN110518150B (en
Inventor
田宏伟
牛亚男
王品凡
张帅
刘明
王晶
刘政
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

This application discloses a kind of display base plate and its manufacturing methods, display device.Display base plate includes flexible substrate, spaced array has multiple pixel islands in flexible substrate, pixel island includes viewing area and the encapsulation region around viewing area, pixel island is sequentially formed with the first encapsulated layer and the second encapsulated layer backwards to the side of flexible substrate, first encapsulated layer is transparent encapsulated layer, and the second encapsulated layer is Metal Packaging layer.Display device, including display base plate.The manufacturing method of display base plate provides a flexible substrate;Multiple pixel islands of spaced array are formed on flexible substrates, and pixel island includes viewing area and the encapsulation region around viewing area;The first encapsulated layer is formed in the encapsulation region on each pixel island;The side for being formed with the first encapsulated layer on flexible substrates forms the second encapsulated layer, and the second encapsulated layer is patterned Metal Packaging film layer, the fringe region and the encapsulation region around fringe region that the second encapsulated layer covers the first encapsulated layer.It can be improved the resolution ratio of display device.

Description

Display base plate and its manufacturing method, display device
Technical field
The present invention relates generally to field of display technology, and in particular to flexible display technologies field more particularly to a kind of display Substrate and its manufacturing method, display device.
Background technique
Organic electroluminescent display panel (Organic Light Emitted Diode, OLED) relies on its low-power consumption, height Color saturation, thin thickness, is able to achieve the excellent properties such as flexibility at wide viewing angle, is increasingly becoming the mainstream of display field, can be extensive Applied to end products such as smart phone, tablet computer, TVs.Wherein, and it is the most significant with flexible OLED product, gradually with it It can satisfy various special constructions and become OLED and show mainstream.It is curved from bending (Bendable) with the development of flexible technology It rolls over (Foldable), is gradually transitioned into resilient flexibility (Stretchable), the requirement to the flexible aspect of device also steps up. Resilient flexibility device has come into everybody visual field.
In existing stretchable device, island-bridge-vacancy structure is generallyd use.And in island-bridge-vacancy structure, it needs Each island is individually encapsulated.The packaged type on existing island is pure inorganic encapsulated, and the encapsulation region of pure inorganic encapsulated accounts for island Large percentage so that display area scale smaller, leads to lack of resolution.
Summary of the invention
In view of drawbacks described above in the prior art or deficiency, it is intended to provide a kind of display base plate for reducing packaging area length And its manufacturing method, display device.
In a first aspect, display base plate of the invention, including flexible substrate, spaced array has multiple pictures in the flexible substrate Plain island, the pixel island include viewing area and around the encapsulation region of the viewing area, and the pixel island is backwards to the flexible liner The side at bottom is sequentially formed with the first encapsulated layer and the second encapsulated layer, and first encapsulated layer covers the viewing area and is located at The encapsulation region of the edge of display area, second encapsulated layer cover the fringe region of first encapsulated layer and are located at The encapsulation region around the fringe region, first encapsulated layer are transparent encapsulated layer, and second encapsulated layer is metal Encapsulated layer.
Second aspect, display device of the invention, including display base plate.
The third aspect, the manufacturing method of display base plate of the invention, comprising the following steps:
One flexible substrate is provided;
Multiple pixel islands of spaced array are formed in the flexible substrate, wherein the pixel island include viewing area with And the encapsulation region around the viewing area;
The first encapsulated layer is formed backwards to the side of the flexible substrate on each pixel island, wherein first envelope Dress layer covers the viewing area and the encapsulation region positioned at the edge of display area, and first encapsulated layer is transparent enclosure Layer;
The side that first encapsulated layer is formed in the flexible substrate forms the second encapsulated layer, wherein described the Two encapsulated layers be patterned Metal Packaging film layer, second encapsulated layer cover first encapsulated layer fringe region and The encapsulation region around the fringe region.
It is improved according to technical solution provided by the embodiments of the present application by setting Metal Packaging layer for the second encapsulated layer The package strength of display base plate is guaranteeing package strength phase meanwhile, it is capable to reduce the length of encapsulation region relative to pure inorganic encapsulated Degree to reduce the ratio on pixel island shared by encapsulation region, that is, improves the ratio on pixel island shared by viewing area, to improve aobvious The resolution ratio of showing device is able to solve the problem of existing stretchable structure definition deficiency.
Detailed description of the invention
By reading a detailed description of non-restrictive embodiments in the light of the attached drawings below, the application's is other Feature, objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of the display base plate of the embodiment of the present invention;
Fig. 2 is flexible substrate, the first encapsulated layer and the cooperation of the second encapsulated layer of the display base plate of the embodiment of the present invention Structural schematic diagram;
Fig. 3 is the reeded inorganic film of setting, the first encapsulated layer and second of the display base plate of the embodiment of the present invention The structural schematic diagram of encapsulated layer cooperation;
Fig. 4 is a kind of structure of distribution mode of the inorganic encapsulated film layer upper groove of the display base plate of the embodiment of the present invention Schematic diagram;
Fig. 5 is the knot of another distribution mode of the inorganic encapsulated film layer upper groove of the display base plate of the embodiment of the present invention Structure schematic diagram.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched The specific embodiment stated is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that in order to Convenient for description, part relevant to invention is illustrated only in attached drawing.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
One of embodiment of the invention is, referring to FIG. 1, a kind of display base plate, including flexible substrate 10, flexible liner Spaced array has multiple pixel islands 20 on bottom 10, and pixel island 20 includes viewing area 21 and the encapsulation region 22 around viewing area 21, Pixel island 20 is sequentially formed with the first encapsulated layer 23 and the second encapsulated layer 24, the first encapsulated layer 23 backwards to the side of flexible substrate 10 It covers viewing area 21 and positioned at the encapsulation region 22 at 21 edge of viewing area, the second encapsulated layer 24 covers the edge of the first encapsulated layer 23 Region and the encapsulation region 22 around fringe region, the first encapsulated layer 23 are transparent encapsulated layer, and the second encapsulated layer 24 is gold Belong to encapsulated layer.
In an embodiment of the present invention, the first encapsulated layer is inorganic encapsulated layer, and the second encapsulated layer is Metal Packaging layer.Metal Encapsulated layer is more preferable relative to inorganic encapsulated layer fitting effect, and Metal Packaging layer has the defects of less pin hole, Neng Gouti High package strength.Relative to pure inorganic encapsulated, guaranteeing package strength phase meanwhile, it is capable to reduce the length of encapsulation region, to drop The ratio on pixel island shared by low encapsulation region, that is, improve the ratio on pixel island shared by viewing area.On pixel island of the same area It is interior, using the composite package mode of Metal Packaging layer and inorganic encapsulated layer, greater area of viewing area can be obtained, to improve The resolution ratio of display device, so that display device obtains better display effect, the user experience is improved.The covering of first encapsulated layer Viewing area and encapsulation region positioned at edge of display area, the first encapsulated layer are transparent encapsulated layer, and viewing area is normally shown Show, the fringe region and the encapsulation region around fringe region that the second encapsulated layer covers the first encapsulated layer can guarantee the The packaging effect of one encapsulated layer and the second encapsulated layer improves the reliability of display base plate.
With reference to Fig. 2, further, the second encapsulated layer 24 includes the first encapsulation part 241 and the second encapsulation part 242, the first envelope Dress portion 241 is located at the area of the first not set first encapsulated layer 23 in the side of flexible substrate 10, encapsulation region 22 of encapsulated layer 23 Domain is formed with the second encapsulation part 242.
In an embodiment of the present invention, the first encapsulation part is located at the first encapsulated layer backwards to the side of flexible substrate, Neng Goubao The packaging effect for demonstrate,proving the first encapsulated layer and the second encapsulated layer improves the reliability of display base plate.Not set first envelope in encapsulation region The region of dress layer is formed with the second encapsulation part.Namely the second encapsulated layer can cover side of first encapsulated layer far from viewing area side Edge and it is paved with the region for not covering the first encapsulated layer in encapsulation region, improves steam from the first encapsulated layer far from viewing area side Edge enter the difficulty inside display base plate, reduce steam from the first encapsulated layer far from viewing area side edge enter Possibility inside to display base plate ensure that the packaging effect of the first encapsulated layer and the second encapsulated layer, be effectively protected display Substrate improves the reliability of display base plate.
With reference to Fig. 3, further, flexible substrate 10 is formed with inorganic film 11, and inorganic film 11 is located at flexible substrate 10 Between the first encapsulated layer 23, inorganic film 11 forms fluted 12 backwards to 10 side of flexible substrate, and groove 12 is located at encapsulation region In 22.
In an embodiment of the present invention, buffer layer, active layer, the first gate insulation layer, are sequentially formed on flexible substrates One grid layer, the second gate insulation layer, second grid layer, wall, source-drain electrode layer, planarization layer, anode layer, pixel defining layer, Supporting layer etc. completes the production of array structure on flexible substrates.Inorganic film can be, but not limited to include buffer layer, the first grid Insulating layer, the second gate insulation layer, intermediate dielectric layer etc..The content that inorganic film specifically includes can be gone according to the difference of array structure Change.Groove is arranged on inorganic film can reduce the influence to display base plate.It is corresponding with encapsulation region on inorganic film Region in groove is set, backwards to the side of flexible substrate form the first encapsulated layer in inorganic film and when the second encapsulated layer, In The first encapsulated layer and the second encapsulated layer can generate fluctuating, effective encapsulation length of the first encapsulated layer and the second encapsulated layer in recess region Degree will increase, and can be improved the package strength and packaging effect of the first encapsulated layer and the second encapsulated layer, further decreases encapsulation region Length the ratio on pixel island shared by viewing area is improved, to improve display to reduce the ratio on pixel island shared by encapsulation region The resolution ratio of device.Meanwhile in the position of setting groove, steam is more difficult to enter from the first encapsulated layer and the second encapsulated layer aobvious Show the inside of substrate.
Further, 25 effective package length is equal along a first direction in encapsulation region 22, and first direction 22 is from aobvious Show in area 21 to viewing area 21 outside and perpendicular to the direction of encapsulation region 22.
In an embodiment of the present invention, with reference to Fig. 4, in encapsulation region effective package length of certain be here on, edge First direction split encapsulation region, that is, split envelope to outside viewing area and perpendicular to the direction of encapsulation region along out of viewing area Area is filled, effective package length of the first encapsulated layer is the path length of the first encapsulated layer on section in encapsulation region, the in encapsulation region Effective package length of two encapsulated layers is the path length of the second encapsulated layer on section.
When the local setting groove in inorganic film, the first encapsulated layer and the second envelope can be increased at the corresponding position of groove The package length and package strength for filling layer, still, for the region of not set groove, the envelope of the first encapsulated layer and the second encapsulated layer Dress length and package strength do not change, and in the region of not set groove, a possibility that steam enters inside display base plate can compare It is larger, that is, do not significantly improve the reliability of display base plate.Guarantee effective encapsulation length along a first direction in encapsulation region It spends equal or suitable, that is, guarantees that groove can be arranged in inorganic film on some first direction, in another first direction On groove can be also set, position of the groove on inorganic film can change, as long as guaranteeing that effective package length is equal or phase When effective package length of encapsulation region can be increased on the whole, to improve the reliability of display base plate.
With reference to Figure 4 and 5, further, in a first direction on 25, inorganic film 11 is formed with multiple spaced grooves 12。
In an embodiment of the present invention, multiple grooves are set in a first direction, further increase steam from the first encapsulation Layer and the second encapsulated layer enter the difficulty inside display base plate.Further increase the first encapsulated layer and the second encapsulated layer has Package length and package strength are imitated, the length of encapsulation region is further decreased, to reduce the ratio on pixel island shared by encapsulation region, mentions The ratio on pixel island shared by high viewing area, to improve the resolution ratio of display device.
With reference to Fig. 5, further, in second direction 26, inorganic film 11 is formed with multiple spaced grooves 12, Second direction 26 is vertical with first direction 25.
In an embodiment of the present invention, in a second direction, groove interval is arranged, after some groove is invaded by steam, The first encapsulated layer or the second encapsulated layer formed in groove can play barrier effect to steam, and steam will not invade quickly Neighbouring groove, Fig. 5 are the groove that setting groove in interval connects together in a second direction relative to Fig. 4 in a second direction, Spaced groove can reduce the rate of propagation of steam, improve the reliability of display base plate.
Further, 12 depth of groove is the 5~80% of inorganic film thickness.
In an embodiment of the present invention, depth of groove is the 5~80% of inorganic film thickness, be can be, but not limited to, groove Depth is the 30~60% of inorganic film thickness.Groove can be guaranteed to be formed on inorganic film not to display base plate other structures Under the premise of having an impact, increases the effective package length and package strength of the first encapsulated layer and the second encapsulated layer, ensure that aobvious Show the reliability of substrate.
Further, the second encapsulated layer 24 is multiplexed with touch control layer.
In an embodiment of the present invention, Metal Packaging layer can be multiplexed with touch control layer, realize touch function.In general, adjacent Pixel island between bridge can be set, conductor wire can be set in bridge, and adjacent pixel island passes through conductor wire and realizes electrical connection, multiple pictures Metal Packaging layer on plain island can be electrically connected by conductor wire, to form the metal grill for being used for touch-control, certainly such as Metal Packaging layer on the adjacent pixel island of fruit does not need to be electrically connected, and can disconnect the conductor wire between two pixel islands.It will be golden Belong to encapsulated layer and be multiplexed with touch control layer, when needing display device to realize touch function, does not need that touch control layer in addition is arranged, simplify The structure of display device reduces the difficulty of processing of display device, reduces the manufacturing cost of display device.
Another embodiment of the invention is a kind of display device, including display base plate.
In an embodiment of the present invention, the first encapsulated layer is inorganic encapsulated layer, and the second encapsulated layer is Metal Packaging layer.Metal Encapsulated layer is more preferable relative to inorganic encapsulated layer fitting effect, and Metal Packaging layer has the defects of less pin hole, Neng Gouti High package strength.Relative to pure inorganic encapsulated, guaranteeing package strength phase meanwhile, it is capable to reduce the length of encapsulation region, to drop The ratio on pixel island shared by low encapsulation region improves the ratio on pixel island shared by viewing area.Namely on pixel island of the same area It is interior, using the composite package mode of Metal Packaging layer and inorganic encapsulated layer, greater area of viewing area can be obtained, to improve The resolution ratio of display device, so that display device obtains better display effect, the user experience is improved.Second encapsulated layer is at least Part is located at the first encapsulated layer backwards to the side of flexible substrate, can guarantee the encapsulation effect of the first encapsulated layer and the second encapsulated layer Fruit improves the reliability of display device.
Another embodiment of the invention is, with reference to Fig. 1, a kind of manufacturing method of display base plate, comprising the following steps:
One flexible substrate 10 is provided;
In flexible substrate 10 formed spaced array multiple pixel islands 20, wherein pixel island 20 include viewing area 21 with And the encapsulation region 22 around viewing area 21;
The first encapsulated layer 23 is formed backwards to the side of flexible substrate 10 on each pixel island 20, wherein the first encapsulated layer 23 It covers viewing area 21 and positioned at the encapsulation region 22 at 21 edge of viewing area, the first encapsulated layer 23 is transparent encapsulated layer;
The side that the first encapsulated layer 23 is formed in flexible substrate 10 forms the second encapsulated layer 24, wherein the second encapsulation Layer 24 is patterned Metal Packaging film layer, and the second encapsulated layer 24 covers the fringe region of the first encapsulated layer 23 and is located at edge Encapsulation region 22 around region.
In an embodiment of the present invention, buffer layer, active layer, the first gate insulation layer, are sequentially formed on flexible substrates One grid layer, the second gate insulation layer, second grid layer, wall, source-drain electrode layer, planarization layer, anode layer, pixel defining layer, Supporting layer etc. completes the production of array structure on flexible substrates.Then EL (electroluminescent, electroluminescent hair are completed Light) vapor deposition.The encapsulation region on pixel island is usually in the marginal portion on pixel island.The first encapsulated layer, the first envelope are formed in encapsulation region Filling layer can be with but not just for inorganic encapsulated layer.After forming the first encapsulated layer, patterned Metal Packaging film is continuously formed Layer, that is, the second encapsulated layer.Forming patterned Metal Packaging film layer can carry out depositing directly by way of FMM Mask It connects to form patterned Metal Packaging film layer;Pattern can also be carried out to Metal Packaging film layer after first deposited metal encapsulation film layer Change processing, obtains patterned Metal Packaging film layer.Patterned process can be, but not limited to carry out photoetching, etching, ashing or stripping Separating process.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art Member is it should be appreciated that invention scope involved in the application, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic Scheme, while should also cover in the case where not departing from the inventive concept, it is carried out by above-mentioned technical characteristic or its equivalent feature Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed herein Can technical characteristic replaced mutually and the technical solution that is formed.

Claims (10)

1. a kind of display base plate, which is characterized in that including flexible substrate, spaced array has multiple pixels in the flexible substrate Island, the pixel island include viewing area and around the encapsulation region of the viewing area, and the pixel island is backwards to the flexible substrate Side be sequentially formed with the first encapsulated layer and the second encapsulated layer, first encapsulated layer covers the viewing area and is located at institute The encapsulation region of edge of display area is stated, second encapsulated layer covers the fringe region of first encapsulated layer and is located at institute The encapsulation region around fringe region is stated, first encapsulated layer is transparent encapsulated layer, and second encapsulated layer is metal envelope Fill layer.
2. display base plate according to claim 1, which is characterized in that second encapsulated layer includes the first encapsulation part and the Two encapsulation parts, first encapsulation part are located at first encapsulated layer in the side of the flexible substrate, the encapsulation region The region of not set first encapsulated layer is formed with second encapsulation part.
3. display base plate according to claim 1, which is characterized in that the flexible substrate is formed with inorganic film, described Inorganic film is between the flexible substrate and first encapsulated layer, and the inorganic film is backwards to the flexible substrate side Formed fluted, the groove is located in the encapsulation region.
4. display base plate according to claim 3, which is characterized in that effective envelope in the encapsulation region along a first direction Equal length is filled, the first direction is out of described viewing area to outside the viewing area and perpendicular to the side of the encapsulation region To.
5. display base plate according to claim 4, which is characterized in that in said first direction, the inorganic film shape At there is multiple spaced grooves.
6. display base plate according to claim 4, which is characterized in that in a second direction, the inorganic film is formed with Multiple spaced grooves, the second direction are vertical with the first direction.
7. display base plate according to claim 3, which is characterized in that the depth of groove is the inorganic film thickness 5~80%.
8. display base plate according to claim 1, which is characterized in that second encapsulated layer is multiplexed with touch control layer.
9. a kind of display device, which is characterized in that including the described in any item display base plates of claim 1-8.
10. a kind of manufacturing method of display base plate, which comprises the following steps:
One flexible substrate is provided;
Multiple pixel islands of spaced array are formed in the flexible substrate, wherein the pixel island includes viewing area and encloses Around the encapsulation region of the viewing area;
The first encapsulated layer is formed backwards to the side of the flexible substrate on each pixel island, wherein first encapsulated layer The viewing area and the encapsulation region positioned at the edge of display area are covered, first encapsulated layer is transparent encapsulated layer;
The side that first encapsulated layer is formed in the flexible substrate forms the second encapsulated layer, wherein second envelope Dress layer is patterned Metal Packaging film layer, and second encapsulated layer covers the fringe region of first encapsulated layer and is located at The encapsulation region around the fringe region.
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CN109920334A (en) * 2019-03-27 2019-06-21 京东方科技集团股份有限公司 A kind of array substrate and display device

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CN111029484A (en) * 2019-12-20 2020-04-17 上海天马微电子有限公司 Display panel and display device
CN111162197A (en) * 2020-01-02 2020-05-15 京东方科技集团股份有限公司 Display substrate, preparation method thereof and display device
CN111525047A (en) * 2020-05-08 2020-08-11 京东方科技集团股份有限公司 Display substrate, preparation method thereof and display device
CN111916484A (en) * 2020-07-27 2020-11-10 昆山国显光电有限公司 Display panel and preparation method thereof
CN111916484B (en) * 2020-07-27 2022-09-13 昆山国显光电有限公司 Display panel and preparation method thereof
CN113471223A (en) * 2021-07-05 2021-10-01 京东方科技集团股份有限公司 Display substrate and display device
CN113471223B (en) * 2021-07-05 2024-05-24 京东方科技集团股份有限公司 Display substrate and display device
CN114665041A (en) * 2022-03-16 2022-06-24 深圳市华星光电半导体显示技术有限公司 Display panel and preparation method thereof
CN115275052A (en) * 2022-07-26 2022-11-01 武汉华星光电半导体显示技术有限公司 Display panel and display device
CN115275052B (en) * 2022-07-26 2023-09-26 武汉华星光电半导体显示技术有限公司 Display panel and display device

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