CN110504943A - A kind of interdigital transducer array and production method - Google Patents
A kind of interdigital transducer array and production method Download PDFInfo
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- CN110504943A CN110504943A CN201910789049.2A CN201910789049A CN110504943A CN 110504943 A CN110504943 A CN 110504943A CN 201910789049 A CN201910789049 A CN 201910789049A CN 110504943 A CN110504943 A CN 110504943A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 21
- 239000002033 PVDF binder Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 7
- 229910000906 Bronze Inorganic materials 0.000 claims description 5
- 239000010974 bronze Substances 0.000 claims description 5
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 claims description 3
- 230000004044 response Effects 0.000 description 11
- 238000013461 design Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- 235000019687 Lamb Nutrition 0.000 description 9
- 230000005284 excitation Effects 0.000 description 9
- 239000006185 dispersion Substances 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000036541 health Effects 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical group FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000009659 non-destructive testing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000021615 conjugation Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 238000005086 pumping Methods 0.000 description 1
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- 230000035484 reaction time Effects 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14547—Fan shaped; Tilted; Shifted; Slanted; Tapered; Arched; Stepped finger transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type
Abstract
The invention discloses a kind of interdigital transducer array and production method, interdigital transducer array includes Kynoar substrate and N number of trapezoidal interdigital electrode array element；Kynoar substrate is disc, and multiple trapezoidal interdigital electrode array elements are distributed uniformly and circumferentially on the surface of Kynoar substrate centered on the center of circle of Kynoar substrate；The positive interdigital electrode of trapezoidal interdigital electrode array element includes positive external connection end and multiple positive electrodes being spaced apart from each other, and the cathode interdigital electrode of trapezoidal interdigital electrode array element includes cathode external connection end and multiple negative electrodes being spaced apart from each other；Multiple positive electrodes and the arrangement of multiple negative electrode alternate intervals in each trapezoidal interdigital electrode array element；Each two adjacent trapezoidal interdigital electrode array elements share a positive external connection end, and each two adjacent trapezoidal interdigital electrode array elements share a cathode external connection end.The present invention has the advantages that broadband, low-loss, multi-faceted transmitting and receives, and improves damage check efficiency.
Description
Technical field
The present invention relates to interdigital transducer technical fields, more particularly to a kind of interdigital transducer array and production method.
Background technique
In the method for being suitable for large-area sheet monitoring structural health conditions (Structural Health Monitoring, SHM)
In the related technology, it is all to still remain that human interference factor is larger, application range is narrow etc. for many advanced signal processing methods
It is mostly insufficient.The energy transducer of electroacoustic conversion has been increasingly becoming in SHM system because of the function of its distinctive transferring structure security information
Key components.Existing structural healthy monitoring system has always further improves its detection sensitivity and precision
Demand, explore can be used for large area composite material with multi-faceted transmitting and reception, wideband and mode selectable punction it is soft
Property interdigital wave guide energy converter can be to realize that real-time quick SHM solves critical technology barrier.
The existing SHM system based on supersonic guide-wave has one frequently with ultrasonic transducer building unit that is embedded or pasting
Determine driving/sensor array of spatial distribution form or the sensing network of sparse distribution, can be used for overcoming large-area sheet or compound
The problems such as decaying of material structure middle impedance and low signal response.Sparse distribution sensing network is according to guided wave signals between sensing unit
Transition time information is implemented to structure partial damage check, and damage imaging positioning accuracy depend heavilys on sparse sensor
It structures the formation scheme.
For the tectonic sieving of energy converter, the fork of interdigital transducer (Interdigital Transducer, IDT)
Refer to that structure is the most basic form for generating orientation guided wave in SHM system, however, still depositing in IDT in the prior art design
In many deficiencies, such as have relatively narrow bandwidth and single directionality, to adapt to smaller damage check scale, needs skilful
Wonderful transducer architecture is designed to improve bandwidth, to realize multi-faceted driving and sensing.
Interdigital transducer is put forward in nineteen sixty-eight as the extension of building block design method by Hyodo et al. earliest.It
Afterwards in 1973, the filter of the advantages of Daniel and de Klerk compares trapezoidal interdigital transducer and frequency modulation on pulse and apodization passband
Wave device structure, this demonstrate interdigital transducers can be used for band logical application program.From nineteen eighty-two to 1987, Campbell is described
The detailed step of design broadband linear phase filter, and pass through 70MHz 50% bandwidth on yz- lithium niobate and filter
Device is tested, and effectively inhibits the > secondary lobe of 35db, while frequency response is improved.
From the point of view of the development of comprehensive IDT application, existing rectangle IDT is mature to be applied to SAW device and obtains
Very big development, and rectangle IDT also starts gradually to be applied among damage check, and frequency response is maximum under the centre frequency,
So being typically designed its centre frequency is driving frequency.With the development of monitoring structural health conditions, engineering structure becomes increasingly complex, and
Ask IDT loss also lower and lower, performance is being continuously improved.The line width of existing rectangle IDT, is not able to satisfy higher and higher frequency
Repeated stress effect and increasing power, so research broadband, low-loss, high performance IDT are for structural health
It monitors most important.However, being directed to trapezoidal interdigital transducer, but it is mainly used for being filtered the design of device, is applied to
Damage check is also immature.Because the interdigital structure of interdigital transducer is for SHM system for the tectonic sieving of energy converter
The most basic form of orientation guided wave is generated in system, however, there are still many deficiencies in IDT in the prior art design, is such as had
Relatively narrow bandwidth and single directionality etc..
Summary of the invention
The object of the present invention is to provide a kind of interdigital transducer array and production method, there is broadband, low-loss, multi-party
The advantages of position transmitting and reception, improve damage check efficiency.
To achieve the above object, the present invention provides following schemes:
A kind of interdigital transducer array, which is characterized in that the interdigital transducer array include: Kynoar substrate and
N number of trapezoidal interdigital electrode array element, N are the integer greater than 3；The Kynoar substrate is disc, multiple trapezoidal forks
Refer to that electrode array element is distributed uniformly and circumferentially centered on the center of circle of the Kynoar substrate in the Kynoar
The surface of substrate；
The positive interdigital electrode of the trapezoidal interdigital electrode array element includes positive external connection end and multiple positive electricity being spaced apart from each other
Pole, one end of multiple positive electrodes are connect with the positive external connection end, and multiple positive electrodes are coplanar, described trapezoidal interdigital
The cathode interdigital electrode of electrode array element includes cathode external connection end and multiple negative electrodes being spaced apart from each other, and the one of multiple negative electrodes
End is connect with the cathode external connection end, and multiple negative electrodes are coplanar；Multiple institutes in each trapezoidal interdigital electrode array element
State positive electrode and multiple negative electrode alternate intervals arrangements；
Each two adjacent trapezoidal interdigital electrode array elements share the positive external connection end, each two adjacent institutes
It states trapezoidal interdigital electrode array element and shares a cathode external connection end.
Optionally, the width of the width of positive electrode described in the trapezoidal interdigital electrode array element and the negative electrode is from described
Positive external connection end gradually becomes smaller to the cathode external connection end.
Optionally, the trapezoidal interdigital electrode array element is made of bronze.
Optionally, the polyvinylidene fluoride bottom is with a thickness of 0.3mm.
The present invention also provides a kind of interdigital transducer production methods, which is characterized in that the described method includes:
Polyvinylidene fluoride material through-thickness is polarized, Kynoar substrate, the Kynoar are obtained
Substrate is disc；
Using the Kynoar substrate as bottom surface, the figure of N number of trapezoidal interdigital electrode array element is designed on the bottom surface,
N is the integer greater than 3, and multiple trapezoidal interdigital electrode array elements are along the circumferential direction uniformly divided centered on the center of circle of the bottom surface
Surface of the cloth in the bottom surface；The positive interdigital electrode of the trapezoidal interdigital electrode array element include positive external connection end and it is multiple mutually
The positive electrode at interval, one end of multiple positive electrodes are connect with the positive external connection end, and multiple positive electrodes are coplanar, institute
The cathode interdigital electrode for stating trapezoidal interdigital electrode array element includes cathode external connection end and multiple negative electrodes being spaced apart from each other, multiple described
One end of negative electrode is connect with the cathode external connection end, and multiple negative electrodes are coplanar；Each trapezoidal interdigital electrode array element
In multiple positive electrodes and the arrangement of multiple negative electrode alternate intervals；Each two adjacent trapezoidal interdigital electrode battle arrays
Member shares the positive external connection end, and it is external that each two adjacent trapezoidal interdigital electrode array elements share a cathode
End；
Using metal spraying technique, according to N number of trapezoidal interdigital electrode array element figure of the design, by N number of trapezoidal interdigital electrode
Array element is deposited on the surface of the Kynoar substrate, obtains the trapezoidal interdigital transducer array of polyvinylidene fluoride；
The trapezoidal interdigital transducer array of the polyvinylidene fluoride is packaged using polymer protective layer.
Optionally, the width of the width of positive electrode described in the trapezoidal interdigital electrode array element and the negative electrode is from described
Positive external connection end gradually becomes smaller to the cathode external connection end.
Optionally, the trapezoidal interdigital electrode array element is made of bronze.
Optionally, the polyvinylidene fluoride bottom is with a thickness of 0.3mm.
The summary of the invention provided according to the present invention, the invention discloses following technical effects:
The present invention provides a kind of interdigital transducer array and production methods, comprising: Kynoar substrate and N number of trapezoidal
Interdigital electrode array element, Kynoar substrate are disc, and multiple trapezoidal interdigital electrode array elements are with the Kynoar substrate
The center of circle centered on be distributed uniformly and circumferentially on the surface of the Kynoar substrate；In each trapezoidal interdigital electrode array element
Multiple positive electrodes and multiple negative electrode alternate intervals arrangement；Each two adjacent trapezoidal interdigital electrode array elements share one
The anode external connection end, each two adjacent trapezoidal interdigital electrode array elements share a cathode external connection end, have width
The characteristics of frequency band, low-loss, multi-faceted transmitting and reception, it is able to detect the material of different structure, improves damage check efficiency.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is interdigital transducer of embodiment of the present invention array structure schematic diagram；
Fig. 2 is single trapezoidal interdigital electrode array element structure schematic diagram in interdigital transducer of embodiment of the present invention array；
Fig. 3 is aluminium sheet of embodiment of the present invention phase velocities dispersion curve and IDT electrode design schematic diagram；
Fig. 4 is that the trapezoidal interdigital transducer of Different electrodes of embodiment of the present invention width is answered with the unit voltage that substrate thickness changes
Become variation diagram；
Fig. 5 is the frequency response chart of interdigital transducer of embodiment of the present invention array；
Fig. 6 is tradition of embodiment of the present invention IDT frequency response chart；
Fig. 7 is the displacement amplitude response diagram that IDT of the embodiment of the present invention and PZT excitation generates Lamb wave；
Fig. 8 is interdigital transducer of embodiment of the present invention production method flow diagram.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of interdigital transducer array and production method, there is broadband, low-loss, multi-party
The advantages of position transmitting and reception, improve damage check efficiency.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
The invention discloses a kind of interdigital transducer array, Fig. 1 is that interdigital transducer of embodiment of the present invention array structure shows
It is intended to, Fig. 2 is single trapezoidal interdigital electrode array element structure schematic diagram, such as Fig. 1-2 in interdigital transducer of embodiment of the present invention array
Shown, interdigital transducer array includes: Kynoar { Poly (vinylidene fluoride) PVDF } substrate 1 and N number of ladder
Shape interdigital electrode array element, N are the integer greater than 3；Kynoar substrate is disc, and multiple trapezoidal interdigital electrode array elements are with poly-
It is distributed uniformly and circumferentially centered on the center of circle of vinylidene substrate 1 on the surface of Kynoar substrate 1；Kynoar
Substrate 1 is poly meta fluoroethylene piezoelectric film substrate, and trapezoidal interdigital electrode array element is made of bronze, and Kynoar substrate 1 has
Good flexibility so that interdigital transducer array of the present invention adapts to the surface of irregular complex structure, or even is directly embedded into host
Structure carries out damage check.Meanwhile the Kynoar substrate 1 implemented of the present invention have high resiliency density, the ultrashort reaction time,
The good characteristics such as high mechanical-electric coupling efficiency, lightweight, using poly meta fluoroethylene piezoelectric film as substrate, for structure detection spirit
Sensitivity improves, and the energy enhancing in polarization direction, is conducive to improve damage check rate.
The positive interdigital electrode 2 of trapezoidal interdigital electrode array element includes positive external connection end and 4 positive electrodes being spaced apart from each other, and 4
One end of a positive electrode is connect with positive external connection end, and 4 positive electrodes are coplanar, the cathode interdigital electrode of trapezoidal interdigital electrode array element
3 include that cathode external connection end and 4 negative electrodes being spaced apart from each other, one end of 4 negative electrodes are connect with cathode external connection end, and 4 negative
Electrode is coplanar；4 positive electrodes and 4 negative electrodes are with the arc-shaped of width；4 in each trapezoidal interdigital electrode array element are just
Electrode and 4 negative electrode alternate intervals arrangements；Each two adjacent trapezoidal interdigital electrode array elements share a positive external connection end, respectively
The trapezoidal interdigital electrode array element of adjacent two shares a cathode external connection end.Each two adjacent trapezoidal interdigital electrode array elements
Positive external connection end or cathode external connection end where straight line intersection in the center of the Kynoar substrate 1, each adjacent two
The trapezoidal interdigital electrode array element is symmetrical about positive external connection end or cathode external connection end.
In the present embodiment, to guarantee accuracy of electrode processing, the minimum widith of the positive electrode of positive interdigital electrode 2 is and maximum
Width is respectively 0.25mm and 0.5mm, and the minimum widith of the negative electrode of cathode interdigital electrode 3 is and maximum width is 0.25mm
And 0.5mm, the width of positive electrode and the width of negative electrode are from positive external connection end to cathode external connection end in trapezoidal interdigital electrode array element
It gradually becomes smaller, as shown in Fig. 2, the spacing d ' between two neighboring positive electrode and negative electrode, also referred to as electrode spacing d ', from anode
External connection end gradually becomes smaller to cathode external connection end, and maximum spacing d ' and minimum spacing d ' are respectively 0.5mm and 0.25mm.Electrode spacing
Variation result in the variation of frequency, make bandwidth that there is designability, to realize the wide band characteristic of IDT, Jin Ershi
Existing guided wave modal selection when motivating and receive for guided wave, replaces detection energy converter without changing according to structural material, thus
Improve the discrimination of useful signal in engineering structure damage detection.
Fig. 3 is aluminium sheet phase velocities dispersion curve and IDT electrode design schematic diagram, as shown in figure 3, Lamb wave, that is, Lamb wave tool
There is multi-modal, frequency dispersion characteristic, and in practical non-destructive testing, it is desirable that single mode could improve precision in this way, therefore
The frequency thickness product designed in aluminium sheet does not exceed A1Cutoff frequency.Symmetric pattern includes curve S in Fig. 30, curve S1With curve S2,
Antisymmetric mode includes curve A0, curve A1With curve A2, the wavelength X of any Lamb mode is given by:Wherein
cpIt is phase velocity, f is frequency, then can also be write asD is plate thickness, then the track of constant λ/d is by phase velocity dispersion
The straight line by origin on curve.As shown in figure 3, the IDT for the Wavelength design intersects with the dispersion curve of different mode
Point can be used to the point for being designed as excitation mode.λ/d=1,2,3,4,5 is respectively corresponded and A0Curve intersection is in different
Point, in λ=5, the frequency thickness product corresponding to abscissa is 0.3MHz-mm；In λ=1, the frequency thickness product corresponding to abscissa is
2.8MHz-mm.Assuming that aluminium plate thickness is 1mm, then the frequency that λ=1 corresponds to is 0.3MHz, and the corresponding frequency in λ=5 is
2.8MHz.In IDT, to make synergistic effect best, interdigital electrode a cycle length is equal to a wavelength X, i.e., a pair of of fork
Refer to that the width of electrode (a pair of of interdigital electrode refers to adjacent a positive electrode and a negative electrode) is equal to wavelength X, therefore single electrode
Width=1/2 electrode spacing=λ/4.λ=1 at this time, 2,3,4, the 5mm electrode widths for corresponding to uniform IDT are 0.25mm,
0.5mm, 0.75mm, 1mm, 1.25mm.Therefore, in the present embodiment, select cathode interdigital electrode 3 in negative electrode minimum widith with
Positive electrode and negative electrode interval minimum spacing are 0.25mm.
Calculating, calculated result such as Fig. 4 institute are optimized to electrode size by COMSOL Multiphysics software
Show.In figure, what the 0.25mm of square icon representation was represented is electrode width and electrode spacing is the rectangle IDT of 0.25mm,
The thickness for the substrate that abscissa indicates is from 0.1mm-0.6mm.Figure 4, it is seen that rectangle IDT is in list in PVDF substrate
Strain value is still larger relative to the value of other trapezoidal interdigital transducers under the voltage of position.It is all one in trapezoidal interdigital transducer
Start all begin to decline with increase when reaching a maximum value with the increase of substrate thickness, unit voltage strain value,
And a stable trend can be tended to.Also, the same substrate thickness the case where, the numerical value of bottom end positive electrode size a is smaller, single
Position voltage strain value is bigger.Therefore in the present invention, as left end maximum positive electrode width a=0.5mm, substrate thickness h=0.3mm
Unit voltage strain value is maximum.
As shown in figure 5, being the frequency response chart of interdigital transducer array of the present invention.Bandwidth can be indicated by formula:Wherein λmin、λmaxThe respectively period at positive electrode or negative electrode both ends, the electrode spacing and 4 equal to 2 times
Electrode width again, V indicate velocity of wave.In addition, increasing secondary lobe is presented in frequency response curve with the increase of bandwidth, and
Broadband shows inhomogeneities, downtrend, illustrate bandwidth increase be not it is unlimited, can not arbitrarily increase band
It is wide.By Fig. 5,6 comparisons, it is apparent that the frequency response range of interdigital transducer array of the present invention obviously expands, therefore practical application
In can motivate Lamb wave under different frequency, meet more multi-state.
As shown in fig. 7, being IDT and lead titanate piezoelectric ceramics (piezoelectric ceramic transducer
PZT) excitation generates the displacement amplitude response diagram of Lamb wave.As it can be seen that compared to the Lamb wave that traditional PZT excitation generates, IDT excitation
The Lamb wave energy of generation is relatively more concentrated, and amplitude response has obtained substantially enhancing.
Interdigital transducer array designed by the present invention, in pumping signal, amplitude is maximum in horizontal direction, in vertical direction
Amplitude very little, and left and right has symmetry.Equally, most sensitive to the excitation of horizontal direction when as sensor, and erect
The upward disturbance of histogram influences it smaller.For rectangle IDT, trapezoidal interdigital transducer excitation and the angle for receiving signal
It is wider to spend range, more can be suitably used for the excitation and reception of signal in different angle, there is certain filter effect.
In addition, interdigital transducer array of the present invention can be used for being pasted onto tested component surface, component itself property will not influence
Can, it can be used for multi-faceted excitation broadband Lamb wave signal, frequency range can be adjusted accordingly according to electrode spacing, can
The application of field of non destructive testing suitable for metal material, nonmetallic materials and composite material, is also integrated into material for energy converter
In, it realizes intelligence, can promote the exploitation such as micro-nano sensor, energy harvester and be widely applied.
Fig. 8 is interdigital transducer of embodiment of the present invention production method flow diagram, as shown in figure 8, interdigital transducer system
Include: as method
Step 801: polyvinylidene fluoride material through-thickness being polarized, Kynoar substrate is obtained.
Wherein, step 801 further includes that Kynoar substrate is polyvinylidene fluoride base pressure conductive film, Kynoar
Substrate is disc, the residual materials in cleaning preparation substrate before Kynoar substrate solidifies.
Step 802: using Kynoar substrate as bottom surface, the figure of N number of trapezoidal interdigital electrode array element is designed on bottom surface.
Wherein, step 802 further includes, using the Kynoar substrate as bottom surface, designing on the bottom surface N number of trapezoidal
The figure of interdigital electrode array element, N are the integer greater than 3, and multiple trapezoidal interdigital electrode array elements are with the center of circle of the bottom surface
Center is distributed uniformly and circumferentially the surface in the bottom surface；The positive interdigital electrode of the trapezoidal interdigital electrode array element includes
Positive external connection end and multiple positive electrodes being spaced apart from each other, one end of multiple positive electrodes are connect with the positive external connection end,
Multiple positive electrodes are coplanar, the cathode interdigital electrode of the trapezoidal interdigital electrode array element include cathode external connection end and it is multiple mutually
The negative electrode at interval, one end of multiple negative electrodes are connect with the cathode external connection end, and multiple negative electrodes are coplanar；Respectively
Multiple positive electrodes and multiple negative electrode alternate intervals arrangements in the trapezoidal interdigital electrode array element；Each adjacent two
A trapezoidal interdigital electrode array element shares the positive external connection end, each two adjacent trapezoidal interdigital electrode array elements
Share a cathode external connection end.
Step 803: will be N number of trapezoidal interdigital according to N number of trapezoidal interdigital electrode array element figure of design using metal spraying technique
Electrode array element is deposited on the surface of Kynoar substrate, obtains the trapezoidal interdigital transducer array of polyvinylidene fluoride.
Wherein, step 803 further includes, using JFC-1600 particle sputter, Kynoar substrate being placed in cloche
In, using gold bullion as target, after cloche is vacuumized, applies high voltage, make golden ionization, deposit to film surface, in flexibility
The surface of Kynoar substrate deposits annular interdigital electrode, the i.e. trapezoidal interdigital transducer array of polyvinylidene fluoride.
Step 804: the trapezoidal interdigital transducer array of polyvinylidene fluoride being packaged using polymer protective layer.
Wherein, further include before step 804, by the trapezoidal interdigital transducer array baking and curing of polyvinylidene fluoride.
Trapezoidal interdigital transducer array is sprayed by metal spraying technique in interdigital transducer production method disclosed by the invention
Method onto Kynoar substrate, using metal spraying technique, high current melts metal spraying silk, and high pressure blow-gas, metal spraying is at powder, spray
It is coated in poly meta fluoroethylene piezoelectric film surface, electrode and polyvinylidene difluoride film conjugation are high, and surface roughness is small, easily realize and criticize
Amount produces and can obtain quality assurance.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
Used herein a specific example illustrates the principle and implementation of the invention, and above embodiments are said
It is bright to be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art, foundation
Thought of the invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (8)
1. a kind of interdigital transducer array, which is characterized in that the interdigital transducer array includes: Kynoar substrate and N
A trapezoidal interdigital electrode array element, N are the integer greater than 3；The Kynoar substrate is disc, multiple described trapezoidal interdigital
Electrode array element is distributed uniformly and circumferentially centered on the center of circle of the Kynoar substrate in the polyvinylidene fluoride
The surface at bottom；
The positive interdigital electrode of the trapezoidal interdigital electrode array element includes positive external connection end and multiple positive electrodes being spaced apart from each other, more
One end of a positive electrode is connect with the positive external connection end, and multiple positive electrodes are coplanar, the trapezoidal interdigital electrode
The cathode interdigital electrode of array element includes cathode external connection end and multiple negative electrodes being spaced apart from each other, and one end of multiple negative electrodes is equal
It is connect with the cathode external connection end, multiple negative electrodes are coplanar；In each trapezoidal interdigital electrode array element it is multiple it is described just
Electrode and multiple negative electrode alternate intervals arrangements；
Each two adjacent trapezoidal interdigital electrode array elements share the positive external connection end, each two adjacent ladders
Shape interdigital electrode array element shares a cathode external connection end.
2. a kind of interdigital transducer array according to claim 1, which is characterized in that in the trapezoidal interdigital electrode array element
The width of the width of the positive electrode and the negative electrode gradually becomes smaller from the positive external connection end to the cathode external connection end.
3. a kind of interdigital transducer array according to claim 1, which is characterized in that the trapezoidal interdigital electrode array element by
Bronze is made.
4. a kind of interdigital transducer array according to claim 1, which is characterized in that the polyvinylidene fluoride base thickness degree
For 0.3mm.
5. a kind of interdigital transducer production method, which is characterized in that the described method includes:
Polyvinylidene fluoride material through-thickness is polarized, Kynoar substrate, the Kynoar substrate are obtained
For disc；
Using the Kynoar substrate as bottom surface, the figure of N number of trapezoidal interdigital electrode array element is designed on the bottom surface, N is
Integer greater than 3, multiple trapezoidal interdigital electrode array elements are distributed uniformly and circumferentially centered on the center of circle of the bottom surface
On the surface of the bottom surface；The positive interdigital electrode of the trapezoidal interdigital electrode array element include positive external connection end and it is multiple each other
Every positive electrode, one end of multiple positive electrodes connect with the positive external connection end, and multiple positive electrodes are coplanar, described
The cathode interdigital electrode of trapezoidal interdigital electrode array element includes cathode external connection end and multiple negative electrodes being spaced apart from each other, multiple described negative
One end of electrode is connect with the cathode external connection end, and multiple negative electrodes are coplanar；In each trapezoidal interdigital electrode array element
Multiple positive electrodes and the arrangement of multiple negative electrode alternate intervals；Each two adjacent trapezoidal interdigital electrode array elements
The positive external connection end is shared, it is external that each two adjacent trapezoidal interdigital electrode array elements share a cathode
End；
N number of trapezoidal interdigital electrode array element is deposited on according to N number of trapezoidal interdigital electrode array element figure using metal spraying technique
On the surface of the Kynoar substrate, the trapezoidal interdigital transducer array of polyvinylidene fluoride is obtained；
The trapezoidal interdigital transducer array of the polyvinylidene fluoride is packaged using polymer protective layer.
6. interdigital transducer production method according to claim 5, which is characterized in that in the trapezoidal interdigital electrode array element
The width of the width of the positive electrode and the negative electrode gradually becomes smaller from the positive external connection end to the cathode external connection end.
7. interdigital transducer production method according to claim 5, which is characterized in that the trapezoidal interdigital electrode array element by
Bronze is made.
8. interdigital transducer production method according to claim 5, which is characterized in that the polyvinylidene fluoride base thickness degree
For 0.3mm.
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