CN110492775A - A kind of high powered plasma power supply - Google Patents
A kind of high powered plasma power supply Download PDFInfo
- Publication number
- CN110492775A CN110492775A CN201910650998.2A CN201910650998A CN110492775A CN 110492775 A CN110492775 A CN 110492775A CN 201910650998 A CN201910650998 A CN 201910650998A CN 110492775 A CN110492775 A CN 110492775A
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- China
- Prior art keywords
- circuit
- plasma
- voltage
- busbar voltage
- power supply
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M11/00—Power conversion systems not covered by the preceding groups
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
- H02M1/007—Plural converter units in cascade
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
Abstract
The invention discloses a kind of high powered plasma power supplys, including input circuit, busbar voltage rectification circuit, busbar voltage inverter circuit, busbar voltage booster, busbar voltage current rectifying and wave filtering circuit, accumulator occurs for plasma, plasma booster, plasma second level output circuit and sample circuit, cycle of oscillation is generated in circuit, DC voltage is switched into an action of low-voltage pulse, the action of low-voltage pulse boosts by pulse transformer, form high-voltage pulse signal, reach 1000A or more using final output side secondary current peak-to-peak value after secondary circuit, outlet side secondary voltage peak-to-peak value reaches the high-power electric current of 80KV or more, improve plasma power supply output energy and output voltage, it is small low with output voltage to efficiently solve existing plasma power supply output energy, present environmental requirement is higher and higher, plasma at this stage Technology is not up to the problem of ideal effect.
Description
Technical field
The present invention relates to fume treatment component related fieldss, are specifically a kind of high powered plasma power supplys.
Background technique
Fume treatment auxiliary be poisonous and harmful substance contained in flue gas is effectively treated to normal concentration, and
Equipment should be avoided and generate the bad phenomenons such as corrosion or obstruction, generally, the fume treatment auxiliary applied to garbage burning factory, which is divided into, to be removed
Dirt equipment and acid gas removal facility two major classes, now, with the raising that people require environment matter daytime, most of rubbish are burnt
It burns factory and increases active carbon adsorption heavy metal equipment in flue gas treating process again, plasma power supply is the key that in fume treatment
One of component, plasma power supply has application in fields such as the de- pump dedustings of current flue gas desulfurization and denitrification, but primarily now imitates
Fruit is all less desirable, and existing plasma power supply output energy is small low with output voltage, and present environmental requirement is higher and higher, existing
Stage plasma technology is not up to ideal effect.
Summary of the invention
Therefore, in order to solve above-mentioned deficiency, the present invention provides a kind of high powered plasma power supply herein.
The invention is realized in this way constructing a kind of high powered plasma power supply, which includes input circuit, bus electricity
Voltage rectifier, busbar voltage inverter circuit, busbar voltage booster, busbar voltage current rectifying and wave filtering circuit, plasma store up
Energy circuit, plasma booster, plasma second level output circuit and sample circuit, the input circuit and busbar voltage rectified current
Road docking, input circuit export DC voltage, the busbar voltage rectification circuit and bus electricity by busbar voltage rectification circuit
Converting Unit and the boosting rectification composition series resonant circuit generation adjustable frequency-changing AC of frequency are formed after pressing inverter circuit docking
Signal, the busbar voltage inverter circuit are docked with busbar voltage booster, and the busbar voltage booster output voltage arrives
High-voltage rectifying, the input circuit, busbar voltage rectification circuit, busbar voltage inversion are realized in busbar voltage current rectifying and wave filtering circuit
Busbar voltage, the busbar voltage rectification filter is collectively formed in circuit, busbar voltage booster and busbar voltage current rectifying and wave filtering circuit
Wave circuit rectification after with plasma occur accumulator dock, plasma occur accumulator generate action of low-voltage pulse, it is described wait from
Son occurs the action of low-voltage pulse that accumulator generates and inputs into boosting in plasma booster, and the plasma booster exports high pressure
Pulse signal is exported through plasma second level output circuit, the plasma second level output circuit circuit output to sample circuit.
Preferably, it is provided with QF main circuit breaker in the input circuit, is provided in the busbar voltage rectification circuit
Three phase rectifier bridge module D1, QF main circuit breaker exports 510VDC DC voltage through three phase rectifier bridge module D1.
Preferably, the busbar voltage inverter circuit becomes TMf by tetra- IGBT of Q1-Q4, capacitor C2 and boosting and forms,
510VDC DC voltage forms Converting Unit by tetra- IGBT of Q1-Q4, and 510VDC DC voltage and capacitor C2 and boosting become
TMf primary side forms series resonant circuit and generates the adjustable frequency-changing AC signal of frequency.
Preferably, rectifier bridge D3-D6, filter capacitor C3, rectifier bridge are provided in the busbar voltage current rectifying and wave filtering circuit
D3-D6 becomes TMf with the boosting in busbar voltage inverter circuit and docks.
Preferably, it includes inductance L1, storage capacitor C4, IGBT power tube Q5 and correspondence that accumulator, which occurs, for the plasma
Diode is provided with pulse transformer TMp, inductance L1, storage capacitor C4, pulse transformer TMp in the plasma booster
Leakage inductance and second level output circuit form series resonance.
Preferably, the plasma second level output circuit includes capacitor C5, L2, C6, L3, L2, C5 composition level-one electricity
Road, L3, C6 form secondary circuit.
The present invention has the advantage that the present invention provides a kind of high powered plasma power supply by improving herein, and it is similar
Type equipment is compared, have the advantages that as follows improve and;
A kind of high powered plasma power supply of the present invention, circuit is interior to generate cycle of oscillation, and DC voltage is switched to one
Action of low-voltage pulse, the action of low-voltage pulse boost by pulse transformer, form high-voltage pulse signal, using final defeated after secondary circuit
Secondary current peak-to-peak value in side reaches 1000A or more out, and outlet side secondary voltage peak-to-peak value reaches the high-power electric current of 80KV or more,
Plasma power supply output energy and output voltage is improved, efficiently solves that existing plasma power supply output energy is small and output
The problem of voltage is low, and present environmental requirement is higher and higher, and plasma technology is not up to ideal effect at this stage.
Detailed description of the invention
Fig. 1 is overall structure of the present invention;
Fig. 2 is circuit principle structure schematic diagram of the present invention.
Wherein: input circuit -1, busbar voltage rectification circuit -2, busbar voltage inverter circuit -3, busbar voltage booster -
4, accumulator -6, plasma booster -7, plasma second level output electricity occur for busbar voltage current rectifying and wave filtering circuit -5, plasma
Road -8, sample circuit -9.
Specific embodiment
Below in conjunction with attached drawing 1-2, the present invention is described in detail, and technical solution in the embodiment of the present invention carries out
It clearly and completely describes, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
Every other embodiment, shall fall within the protection scope of the present invention.
The present invention provides a kind of high powered plasma power supply by improving herein, including the rectification of input circuit 1, busbar voltage
Energy storage occurs for circuit 2, busbar voltage inverter circuit 3, busbar voltage booster 4, busbar voltage current rectifying and wave filtering circuit 5, plasma
Circuit 6, plasma booster 7, plasma second level output circuit 8 and sample circuit 9, input circuit 1 and busbar voltage rectified current
Road 2 is docked, and input circuit 1 exports DC voltage, busbar voltage rectification circuit 2 and bus electricity by busbar voltage rectification circuit 2
Composition Converting Unit and boosting rectification composition series resonant circuit generate the adjustable frequency-changing AC of frequency after pressing inverter circuit 3 to dock
Signal, busbar voltage inverter circuit 3 docked with busbar voltage booster 4,4 output voltage of busbar voltage booster to bus electricity
Press current rectifying and wave filtering circuit 5 in realize high-voltage rectifying, input circuit 1, busbar voltage rectification circuit 2, busbar voltage inverter circuit 3,
Busbar voltage, busbar voltage current rectifying and wave filtering circuit 5 is collectively formed in busbar voltage booster 4 and busbar voltage current rectifying and wave filtering circuit 5
Accumulator 6 occurs with plasma after rectification to dock, plasma occurs accumulator 6 and generates action of low-voltage pulse, and plasma stores up
Can the action of low-voltage pulse that generates of circuit 6 input into boosting in plasma booster 7, plasma booster 7 exports high-voltage pulse signal
It is exported through plasma second level output circuit 8,8 circuit output of plasma second level output circuit to sample circuit 9.
Further, it is provided with QF main circuit breaker in the input circuit 1, is set in the busbar voltage rectification circuit 2
It is equipped with three phase rectifier bridge module D1, QF main circuit breaker and exports 510VDC DC voltage, input voltage through three phase rectifier bridge module D1
Stablize, rectification effect is good.
Further, the busbar voltage inverter circuit 3 becomes TMf by tetra- IGBT of Q1-Q4, capacitor C2 and boosting and forms,
510VDC DC voltage forms Converting Unit by tetra- IGBT of Q1-Q4, and 510VDC DC voltage and capacitor C2 and boosting become
TMf primary side forms series resonant circuit and generates the adjustable frequency-changing AC signal of frequency, can power to series load, and can be right
Frequency variation signal is adjusted.
Further, it is provided with rectifier bridge D3-D6, filter capacitor C3 in the busbar voltage current rectifying and wave filtering circuit 5, rectifies
Bridge D3-D6 becomes TMf with the boosting in busbar voltage inverter circuit 3 and docks, and after filter capacitor C3, connects R2 load both ends, thus structure
At small high frequency electric source as plasma power supply busbar voltage.
Further, the plasma occur accumulator 6 include inductance L1, storage capacitor C4, IGBT power tube Q5 and
Diode is corresponded to, is provided with pulse transformer TMp, inductance L1, storage capacitor C4, pulse transforming in the plasma booster 7
The leakage inductance and second level output circuit 8 of device TMp form series resonance, when closure, so that action of low-voltage pulse is formed.
Further, the plasma second level output circuit 8 includes capacitor C5, L2, C6, L3, and described L2, C5 form level-one
Circuit, L3, C6 form secondary circuit, and final output side secondary current is to load.
The present invention provides a kind of high powered plasma power supply by improving, and runs as follows;
First, the three phase mains in input circuit 1 is through QF main circuit breaker by being arranged in busbar voltage rectification circuit 2 first
Three phase rectifier bridge module D1 export about 510VDC DC voltage, then using by being arranged in busbar voltage inverter circuit 3
C1 capacitor filtering is followed by load R1;
Second, the 510VDC DC voltage after then inputting is by the Q1-Q4IGBT composition in busbar voltage inverter circuit 3
Then Converting Unit is generated with 3 capacitor C2 of busbar voltage inverter circuit boosting rectification TMf primary side composition series resonant circuit again
The adjustable frequency-changing AC signal of frequency, then rectified after the boosting inside busbar voltage inverter circuit 3 becomes TMf by busbar voltage
The D3-D6 high-voltage rectifying being arranged in filter circuit 5 connects R2 load both ends, the small height thus constituted most afterwards after filter capacitor C3
Frequency power is as plasma power supply busbar voltage;
Third, above-mentioned plasma power supply varying DC link voltage range is≤2600VDC, before pulse generates, it is equal at this time from
Son occurs the IGBT switch Q5 inside accumulator 6 and disconnects, and the DC power supply that is produced from front is that storage in accumulator 6 occurs for plasma
Energy capacitor C4 charging, the load that inductance L1, storage capacitor C4, the leakage inductance of pulse transformer TMp and back secondary circuit form are total
It is same to form a series resonance;
4th, then IGBT is connected, and resonance circuit closure, the positive half period of sine-wave current is by IGBT, when electric current mistake
When zero point, controller controls IGBT shutdown, and electric current negative half-cycle plasma occurs diode in accumulator 6 and passes through, feedback energy
It measures and gives storage capacitor C4 reverse charge, a cycle of oscillation completes, and forms an action of low-voltage pulse, which passes through pulse transforming
Device boosting, forms high-voltage pulse signal;
5th, the level-one that last high-voltage pulse signal is formed using L2, the C5 being arranged in plasma second level output circuit 8
Final output side secondary current peak-to-peak value reaches 1000A or more, outlet side secondary voltage after circuit, L3, C6 composition secondary circuit
Peak-to-peak value reaches the high-power electric current of 80KV or more, voltage gives load ontology, the corona being then inputted into fume treatment auxiliary
It on line and dust collection plate, then can start to work, power supply output quantity is big and output voltage is high, fume treatment better effect.
The present invention provides a kind of high powered plasma power supply by improving, and DC voltage is switched to an action of low-voltage pulse, should
Action of low-voltage pulse boosts by pulse transformer, high-voltage pulse signal is formed, using the secondary electricity in final output side after secondary circuit
Stream peak peak value reaches 1000A or more, and outlet side secondary voltage peak-to-peak value reaches the high-power electric current of 80KV or more, improve etc. from
Sub- power supply output energy and output voltage, it is small low with output voltage to efficiently solve existing plasma power supply output energy, shows
It is higher and higher in environmental requirement, the problem of plasma technology is not up to ideal effect at this stage.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (6)
1. a kind of high powered plasma power supply, it is characterised in that: its structure includes input circuit (1), busbar voltage rectification circuit
(2), busbar voltage inverter circuit (3), busbar voltage booster (4), busbar voltage current rectifying and wave filtering circuit (5), plasma occur
Accumulator (6), plasma booster (7), plasma second level output circuit (8) and sample circuit (9), the input circuit
(1) it being docked with busbar voltage rectification circuit (2), input circuit (1) exports DC voltage by busbar voltage rectification circuit (2),
The busbar voltage rectification circuit (2) forms Converting Unit and boosting rectification composition after docking with busbar voltage inverter circuit (3)
Series resonant circuit generates the adjustable frequency-changing AC signal of frequency, the busbar voltage inverter circuit (3) and busbar voltage liter
Depressor (4) docking, busbar voltage booster (4) output voltage realize high pressure to busbar voltage current rectifying and wave filtering circuit (5) is interior
Rectification, the input circuit (1), busbar voltage rectification circuit (2), busbar voltage inverter circuit (3), busbar voltage booster
(4) and busbar voltage, busbar voltage current rectifying and wave filtering circuit (5) rectification is collectively formed in busbar voltage current rectifying and wave filtering circuit (5)
Accumulator (6) occur with plasma afterwards to dock, plasma occurs accumulator (6) and generates action of low-voltage pulse, the plasma hair
The action of low-voltage pulse that raw accumulator (6) generate is inputted into boosting in plasma booster (7), and the plasma booster (7) is defeated
High-voltage pulse signal is exported through plasma second level output circuit (8) out, and plasma second level output circuit (8) circuit output arrives
Sample circuit (9).
2. a kind of high powered plasma power supply according to claim 1, it is characterised in that: setting in the input circuit (1)
There is QF main circuit breaker, is provided with three phase rectifier bridge module D1, QF main circuit breaker through three in the busbar voltage rectification circuit (2)
Commutating phase bridge module D1 exports 510VDC DC voltage.
3. a kind of high powered plasma power supply according to claim 1, it is characterised in that: the busbar voltage inverter circuit
(3) become TMf by tetra- IGBT of Q1-Q4, capacitor C2 and boosting to form, 510VDC DC voltage is by tetra- IGBT compositions of Q1-Q4
Converting Unit, and 510VDC DC voltage and capacitor C2 and boosting change TMf primary side composition series resonant circuit generation frequency are adjustable
Frequency-changing AC signal.
4. a kind of high powered plasma power supply according to claim 3, it is characterised in that: the busbar voltage rectifying and wave-filtering electricity
Rectifier bridge D3-D6, filter capacitor C3, the boosting in rectifier bridge D3-D6 and busbar voltage inverter circuit (3) are provided in road (5)
Become TMf docking.
5. a kind of high powered plasma power supply according to claim 1, it is characterised in that: accumulator occurs for the plasma
(6) include inductance L1, storage capacitor C4, IGBT power tube Q5 and corresponding diode, be provided in the plasma booster (7)
Pulse transformer TMp, inductance L1, storage capacitor C4, the leakage inductance of pulse transformer TMp and second level output circuit (8) composition series connection
Resonance.
6. a kind of high powered plasma power supply according to claim 1, it is characterised in that: the plasma second level output circuit
It (8) include capacitor C5, L2, C6, L3, described L2, C5 form primary circuit, and L3, C6 form secondary circuit.
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CN201910650998.2A CN110492775A (en) | 2019-07-18 | 2019-07-18 | A kind of high powered plasma power supply |
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CN201910650998.2A CN110492775A (en) | 2019-07-18 | 2019-07-18 | A kind of high powered plasma power supply |
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Citations (6)
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US7589476B2 (en) * | 2007-12-06 | 2009-09-15 | Inshore Holdings, Llc | Power supply for external electrode fluorescent lamps |
CN201648318U (en) * | 2009-12-11 | 2010-11-24 | 北京石油化工学院 | All-digital control secondary inversion type high-voltage variable-frequency rectangular-wave alternating current power supply device for crude oil dehydration |
CN103219913A (en) * | 2013-03-15 | 2013-07-24 | 东南大学 | High-voltage pulse power supply for plasma sewage treatment system |
CN103491697A (en) * | 2013-10-16 | 2014-01-01 | 丹东市无损检测设备有限公司 | High-frequency high-voltage switching power supply device for industrial X-ray flaw detector |
CN104868746A (en) * | 2015-05-22 | 2015-08-26 | 北京工业大学 | Electromagnetic transmitter |
CN207251499U (en) * | 2017-07-18 | 2018-04-17 | 浙江大维高新技术股份有限公司 | Pulse plasma power circuit |
-
2019
- 2019-07-18 CN CN201910650998.2A patent/CN110492775A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US7589476B2 (en) * | 2007-12-06 | 2009-09-15 | Inshore Holdings, Llc | Power supply for external electrode fluorescent lamps |
CN201648318U (en) * | 2009-12-11 | 2010-11-24 | 北京石油化工学院 | All-digital control secondary inversion type high-voltage variable-frequency rectangular-wave alternating current power supply device for crude oil dehydration |
CN103219913A (en) * | 2013-03-15 | 2013-07-24 | 东南大学 | High-voltage pulse power supply for plasma sewage treatment system |
CN103491697A (en) * | 2013-10-16 | 2014-01-01 | 丹东市无损检测设备有限公司 | High-frequency high-voltage switching power supply device for industrial X-ray flaw detector |
CN104868746A (en) * | 2015-05-22 | 2015-08-26 | 北京工业大学 | Electromagnetic transmitter |
CN207251499U (en) * | 2017-07-18 | 2018-04-17 | 浙江大维高新技术股份有限公司 | Pulse plasma power circuit |
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Application publication date: 20191122 |