CN110475188A - A kind of flexible piezoelectric energy converter and system - Google Patents
A kind of flexible piezoelectric energy converter and system Download PDFInfo
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- CN110475188A CN110475188A CN201910697022.0A CN201910697022A CN110475188A CN 110475188 A CN110475188 A CN 110475188A CN 201910697022 A CN201910697022 A CN 201910697022A CN 110475188 A CN110475188 A CN 110475188A
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- LLLVZDVNHNWSDS-UHFFFAOYSA-N 4-methylidene-3,5-dioxabicyclo[5.2.2]undeca-1(9),7,10-triene-2,6-dione Chemical compound C1(C2=CC=C(C(=O)OC(=C)O1)C=C2)=O LLLVZDVNHNWSDS-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
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- Acoustics & Sound (AREA)
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Abstract
This application involves a kind of flexible piezoelectric energy converter and system, the flexible piezoelectric energy converter includes: flexible substrates, is in the first state round, is in the second condition concave spherical surface shape, and can be bent and deformed dynamic change radius of curvature;Flexible piezoelectric film layer in the flexible substrates is set, the upper surface of the flexible piezoelectric film layer is provided at least one spiral electrode item, at least one described spiral electrode item origin having the same, the lower surface of the flexible piezoelectric film layer are provided with complete electrode coated.The flexible piezoelectric energy converter and system of the application improves device integration;By the bending deformation of flexible substrates and flexible piezoelectric film layer, so that after phased excitation sound spiral wave beam, dynamic may be implemented and change focal spot depth, transmitting directivity is set to broaden, being superimposed in focal zone self-energy is enhanced, the stabilization that focusing acoustic vortex becomes, is able to maintain that longer distance in the propagation direction.
Description
Technical field
This application involves technical field of acoustics, in particular to a kind of flexible piezoelectric energy converter and system.
Background technique
The sound vortex wave beam for possessing helical phase dislocation in recent years attracts wide attention, and energy and phase distribution make it
With very big application potential.The technology is especially being cured to Acoustic detection, imaging or to the manipulation of fine particle, capture
Field has boundless application prospect.The non-contact transmitting of angular momentum is so that sound vortex wave beam may be used as acoustics and pull
Hand;The circular distribution of acoustical power makes them may be used as sound tweezer;It is logical in the underwater sound that the multistage property of topological dimension shows channel multiplexing
Great potential in letter.Sound vortex wave beam has the prospect of development sound tweezer or acoustics spanner.
The bottleneck of development sound vortex wave beam application is that the system integrated circuit of current generation sound whirlpool wave beam is complicated, small-sized
Change and integrated aspect is there are serious limitation, and higher cost.In addition, current system can not dynamically change focal spot depth
Degree, narrow so as to cause transmitting directivity, poor in the superposition of focal zone self-energy, focusing acoustic vortex is unstable, In
The distance maintained on the direction of propagation is shorter.
Summary of the invention
To capture above-mentioned problem, the invention proposes a kind of flexible piezoelectric energy converter and systems, by a flexible substrate
Flexible piezoelectric film layer is set, coats spiral electrode in the upper surface of flexible piezoelectric film layer, lower surface coats full electrode, In
Sinusoidal signal is applied to upper/lower electrode, thus generation sound vortex wave beam.Above-mentioned technical proposal does not use traditional PZT (piezoelectric transducer)
Array reduces the volume of device;By the bending deformation of flexible substrates and flexible piezoelectric film layer so that phased excitation sound snail
After revolving wave beam, the concave spherical surface that bending deformation is formed may be implemented dynamic and change focal spot depth, so that transmitting directivity is broadened, In
Focal zone self-energy, which is superimposed, to be enhanced, focusing acoustic vortex become stabilization, be able to maintain that in the propagation direction it is longer away from
From.
The first aspect of the present invention provides a kind of flexible piezoelectric energy converter, comprising: flexible substrates, in the first state
It is in the second condition concave spherical surface shape for circle, and dynamic change radius of curvature can be bent and deformed;It is arranged described
The upper surface of flexible piezoelectric film layer in flexible substrates, the flexible piezoelectric film layer is provided at least one spiral electrode
Item, at least one described spiral electrode item origin having the same, the lower surface of the flexible piezoelectric film layer is provided with entirely
It is electrode coated.
Further, the spiral electrode item is equiangular spiral shape electrode strip.
Further, the flexible piezoelectric film layer is that multiple flexible piezoelectric films are overlapped, apart from the flexible base
The lower surface of the nearest flexible piezoelectric film in bottom is provided with complete electrode coated, and the flexible piezoelectric farthest apart from the flexible substrates is thin
The upper surface of film is provided at least one spiral electrode item, and is electrically connected in series each other between multiple flexible piezoelectric films.
Further, the flexible piezoelectric film layer is PVDF piezoelectric thin film layer.
Further, the coating width of each spiral electrode item changes according to the following formula:
D=(a2-a1)ebθ;
Wherein, d is the width of spiral electrode item, a1For the initial inside diameter of spiral electrode item, a2For spiral electrode item
Original outer diameter, b be orientation ascent, θ is azimuth, wherein the termination point of azimuth angle theta be 0-12 π.
Further, each spiral electrode item initial inside diameter having the same and the original outer diameter.
Further, the material of the complete electrode coated and described spiral electrode item is silver.
The second aspect of the present invention provides a kind of flexible piezoelectric transducer system, comprising: the flexibility that first aspect provides
PZT (piezoelectric transducer);Sine signal source is used to apply same frequency to each of the flexible piezoelectric energy converter spiral electrode item
The sinusoidal signal of same-phase.
Further, the sine signal source is multiple sine signal sources of same frequency same-phase, each sine signal source
First terminal be respectively connected to each spiral electrode item, the Second terminal of the multiple sine signal source is connected to described
It is complete electrode coated.
Further, the quantity of the sine signal source is 1, and each spiral electrode is connected to the sine signal source
First terminal, each complete electrode coated Second terminal for being connected to the sine signal source.
The flexible piezoelectric energy converter and system of the application reduce the volume of device, improve device integration;By soft
Property substrate and flexible piezoelectric film layer bending deformation so that after phased excitation sound spiral wave beam, recessed ball that bending deformation is formed
Face may be implemented dynamic and change focal spot depth, and transmitting directivity is made to broaden, and being superimposed in focal zone self-energy is enhanced,
The stabilization that focusing acoustic vortex becomes, is able to maintain that longer distance in the propagation direction.
Detailed description of the invention
One or more embodiments are illustrated by the picture in corresponding attached drawing, these exemplary theorys
The bright restriction not constituted to embodiment, the element in attached drawing with same reference numbers label are expressed as similar element, remove
Non- to have special statement, composition does not limit the figure in attached drawing.
Fig. 1 is that the flexible piezoelectric energy converter of the screw electrode coating of the embodiment of the present invention generates the work of radiation sound vortex field
Schematic diagram;
Fig. 2 is the structure chart of the flexible piezoelectric energy converter of the screw electrode coating of the embodiment of the present invention 1;
Fig. 3 is the structure chart of the flexible piezoelectric energy converter of the screw electrode coating of the embodiment of the present invention 2;
Fig. 4 is curved schematic of the flexible piezoelectric energy converter of the embodiment of the present invention under different stress bending conditions.
Fig. 5 is the flexible piezoelectric energy converter zoom spot depth schematic diagram of the embodiment of the present invention;
Fig. 6 is single-screw electrode, double spiral electrode, three screw electrodes and the coating of four screw electrodes of the embodiment of the present invention
The simulated effect figure of flexible piezoelectric energy converter;
Fig. 7 is the normalization vibration of the simulation sonic pressure field of the flexible piezoelectric energy converter of the screw electrode coating of the embodiment of the present invention
Width and phase distribution schematic diagram;
Specific embodiment
The exemplary embodiment of the application is more fully described below with reference to accompanying drawings.Although showing the application in attached drawing
Exemplary embodiment, it being understood, however, that may be realized in various forms the disclosure without should be by embodiments set forth here
It is limited.On the contrary, these embodiments are provided to facilitate a more thoroughly understanding of the present invention, and can be by the scope of the present disclosure
It is fully disclosed to those skilled in the art.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
Applicant's discovery when studying different types of PZT (piezoelectric transducer) is driven when applying driving voltage
When, screw electrode coating zone generates extensional vibration by piezoelectric effect, thus the radiative acoustic wave into space, and near acoustic axis
Synthesize the acoustics vortex beam of focusing.Energy converter is coated to single armed electrode, in theoretical model (Fig. 1), spiral strip electrode can
Be considered as equipotential lines, thus be located at each point on spiral electrode face receive electric excitation generate vibration amplitude and phase it is all identical.Simultaneously
Assuming that piezoelectric patches is embedded on infinitely great baffle, taking the center of piezoelectric patches acoustic radiation disc is coordinate origin O, and the plane is with r, the angle θ
Coordinate representation.Assuming that certain in the plane at distance z is arranged a point of observation P, and by plane locating for point of observation with ρ,
Angular coordinate is indicated.The position vector of point of observation and the angle of z-axis forward direction are set as α.Spread out using Rayleigh-Sommerfeld
Penetrate the acoustic pressure of integral calculation given viewpoint.In the normalization pressure of viewpoint P:
Wherein, h be point of observation P on screw electrode at a distance from face element dS:
R is the linear distance of point of observation and origin:
K=2 π/λ is wave number, and λ=c/f is the wavelength of sound wave in sound transmission medium, and ρ 0 is Media density, and c is in medium
The velocity of sound, ω are the vibration angular frequency of transducer face particle.
The synthetic sound field energy excited in space is enough to be calculated by formula (1), which can expand to multiple cantilever electrodes
The case where circular piezoelectric plate of coating, such as following formula:
The structure can pass through the amplitude and phase that sound field composition principle adjusts sound wave in space near acoustic axis, make sound wave
It spatially rotates in the shape of a spiral, generates stable focusing vortex acoustic beam.
The studies above can break through traditional scale limitation that vortex acoustic beam is actively generated by acoustic array, to active
The micromation of mode brings possibility.
Embodiment 1
In order to which structure is complicated for the piezoelectric transducer array that breaks through generation sound vortex velocity of wave, it is difficult to the problem of minimizing, this reality
Apply example and abandoned array PZT (piezoelectric transducer) structure, it is creative propose it is a kind of based on flexible substrates and flexible piezoelectric film
The flexible piezoelectric energy converter of non-array formula, thus to solve the problems, such as to be solved by this invention to provide an effective approach.
Fig. 2 is the structural schematic diagram of flexible piezoelectric energy converter provided in this embodiment.As shown in Fig. 2, the present embodiment will be soft
Property PVDF piezoelectric film be overlying in flexible substrates, the materials of the flexible substrates is with very strong receiving deformability and ductility
Material, preferably are as follows: ethylene terephthalate (PET), polycarbonate (PC) or polyimides (PI).Specifically, flexible piezoelectric
Energy converter includes: flexible substrates 1, hearth electrode 2, PVDF piezoelectric membrane 3, top electrode item 4;Wherein, the flexible substrates 1 are located at and change
The bottom of energy device structure can make energy converter have very strong receiving deformability and keep normal function, the PVDF pressure
The upper surface of conductive film 3 is provided with one or more helical form top electrode item 4, and lower surface is provided with the hearth electrode 2 that full coat covers.On
Stating flexible substrates and PVDF piezoelectric membrane is circle in the case where not stressing, and the elasticity of itself is relied on, in use state
Under can be bent into concave spherical surface shape, and during the work time, due to the variation of external force, can dynamically adjust concave spherical surface
Radius of curvature.
Preferably, the half with a thickness of sound vortex beam wavelength of the PVDF piezoelectric membrane 3, at this time PVDF piezoelectric membrane
3 generate resonance, and sonic wave amplitude is maximum.
Preferably, the spiral electrode item 4 and complete electrode coated used electrode coated material are preferably silver.
Further, spiral electrode item 4 can be any spiral form, all can under the excitation of sine signal source generation sound
Vortex wave beam, but preferably equiangular spiral shape electrode strip.When spiral electrode item is a plurality of, for example, single-screw electrode, double spiral shells
Revolve electrode, three screw electrodes or four screw electrodes, multiple spiral electrode origins having the same, when PVDF piezoelectric membrane is unchanged
When being circle before shape, it is preferred that each screw electrode item is using the center of circle as origin.
Further, each spiral electrode item 4 initial inside diameter having the same and initial outer on PVDF piezoelectric membrane 3
The original width of diameter, i.e., each spiral electrode item 4 is identical, and the difference of outer diameter and inner diameter is the width of spiral electrode.
When helical is equiangular spiral, the function polar form of equiangular spiral are as follows:
R=aebθ (5)
Wherein, r indicates that radial coordinate, θ indicate that orientation angles coordinate, a indicate that initial radium, b indicate orientation ascent.
Further, the width of the equiangular spiral shape electrode strip on PVDF piezoelectric membrane 3 is with equiangular spiral azimuth angle theta
Change and change, the sound vortex beam energy generated can be made more to concentrate in this way.
Specifically, obtaining the variation of each equiangular spiral shape electrode strip width according to the following formula:
D=(a2-a1)ebθ (6)
Wherein, d is the width of equiangular spiral shape electrode strip, a1For the initial inside diameter of equiangular spiral shape electrode strip, a2For isogonism
The original outer diameter of spiral electrode item, b are orientation ascent, and θ is azimuth, and wherein the termination point of azimuth angle theta is 0~12 π.
According to the width range of above-mentioned spiral electrode item, the sound of PZT (piezoelectric transducer) generation can be calculated according to the following formula
The range of the wavelength X of vortex wave beam:
λ=0.5dmin~0.5dmax (7)
Wherein, the dminFor the minimum widith of spiral electrode item, dmaxFor the maximum width of spiral electrode item.
Example 1:
When the equiangular spiral shape electrode strip is a plurality of, by taking 4 spiral arms as an example, initial inside diameter a1=13.8mm, initially
Outer diameter a2=14.85mm, corresponding topological charge number l are respectively that the orientation ascent of 1,2,3 and 4 screw electrode is respectively b1=
0.0225、b2=0.0451, b3=0.0676, b4=0.0902, azimuthal termination point is respectively θ1=12 π, θ2=6 π, θ3
=4 π, θ4=3 π.At this point, the minimum widith of equiangular spiral shape electrode strip is dmin=1mm, the maximum of equiangular spiral shape electrode strip
Width is dmax=2.47mm can produce the vortex sound of 305kHz~750kHz after applying same frequency with the sinusoidal excitation signal of phase
Wave.
Example 2:
When the equiangular spiral shape electrode strip is single, initial inside diameter 13.8mm, original outer diameter 14.85mm, side
Parallactic angle coefficient b=0.0225, azimuth angle theta rotate to 12 π from 0, can produce the vortex of 425kHz after application sinusoidal excitation signal
Sound wave.
Flexible substrates and PVDF piezoelectric membrane stress can be bent at different conditions.Referring to fig. 4, it illustrates differences
Under stress condition, the deformation schematic diagram of flexible piezoelectric energy converter.Fig. 5 shows flexible substrates and PVDF piezoelectric membrane is curved in stress
Zoom spot depth in Qu Yanzhan variation, the flexible substrates for being provided with PVDF piezoelectric membrane are concave spherical in a state of use,
In use with the variation of stress condition, flexible substrates are bent and deformed change radius of curvature, and then realize zoom
Spot depth.R in Fig. 5SRFor the curvature of concave spherical surface, P (x, y, z) point is position coordinates of the focal spot in space.The present embodiment it is soft
Property PZT (piezoelectric transducer) by deformation change radius of curvature to dynamic change focal spot depth, can have in this way in focal zone
Preferable energy supposition.
Embodiment 2
Applicant has found that the flexible piezoelectric transducer architecture in embodiment 1 is due to using single PVDF in an experiment
Piezoelectric membrane 3 is easy to happen fragmentation after PVDF thin film reaches certain thickness when deforming with flexible substrates.Therefore, this implementation
Example improves the stepped construction in embodiment 1.
Specifically, covering PVDF thin film 301 on a flexible substrate referring to Fig. 3, it is thin to cover PVDF in PVDF thin film 301
Film 302, the PVDF thin film 301 and PVDF thin film 302 are cascaded, and are electrically connected to each other.In the lower surface of PVDF thin film 301
Setting is complete electrode coated, and an at least spiral electrode is arranged in the upper surface of PVDF thin film 302.Compared to embodiment 1, two weights
Folded PVDF thin film becomes so that the thickness of each PVDF thin film reduces with flexible substrates instead of single PVDF thin film
When shape, it is not easy to it is chipping, to extend the service life of flexible piezoelectric energy converter, reduce use cost.
Optionally, the PVDF thin film can be not limited to two, and multiple PVDF thin films are overlapped and electrical series each other
Together using technical effect of the invention may be implemented completely.When PVDF thin film is multiple, nearest apart from flexible substrates
The lower surface setting of PVDF thin film is complete electrode coated, and an at least spiral shell is arranged in the upper surface of the PVDF thin film farthest apart from flexible substrates
Revolve shape electrode.Preferably, the origin of multiple spiral electrodes is identical.
The other parts of the present embodiment are same as Example 1, and details are not described herein.
The simulating, verifying of embodiment 1,2
The mode of finite element modelling can be used in the present invention, emulates and observes its sonic pressure field amplitude and phase on viewing surface
Distribution situation.Using comsol multiple physical field finite element emulation software, the PVDF that the spiral arm electrode number of coating is 1 to 4 is simulated
It is overlying on radiation fields situation of the flexible substrates in using water as background media, specific embodiment is as follows:
The velocity of sound in water is 1500m/s, density 1000kg/m3.Piezoelectric material is arranged in Solid Mechanics physical field is
PVDF conductive film 3 is overlying in flexible substrates 1, and the radius of plectane is 38mm, and thickness is set as 5mm;In electrostatic module, piezoelectricity is enabled
The complete electrode coated ground connection in the far water face of plectane, sets 100V for the potential of near water end screw electrode;Interior frequency is used in water
Domain sonic pressure field, and spherical surface wave radiation is set by the boundary condition of waters outer boundary.It emulates and observes in PVDF conductive film 3
Thickness vibration mode to 425kHz frequency under the sonic pressure field that excites.
Fig. 6 is the COMSOL simulation model of 4 kinds of electrode coated structures, and in simulations, strip-spiral top electrode item is modeled
At isopotential bar.
Fig. 7 is by the inspection surface setting schematic diagram at 2.5 wavelength of distance PVDF conductive film in water, such as Fig. 7 first
Row is the sound pressure distribution after the maximum value of respective sonic pressure field is normalized, and the second row is the phase point on viewing surface
Cloth.Above each structure produces the acoustics rotation for focusing on the l=1,2,3,4 of the topological charge number near acoustic axis respectively on inspection surface
Whirlpool.In the annular ring for the diffraction phase field that Monobrachial spiral shape electrode to four arm spiral electrode structures generates, 2 π of phase change,
4 π, 6 π and 8 π, this demonstrate that the topological structure of corresponding acoustics vortex field.
Embodiment 3
This embodiment discloses herein a kind of flexible piezoelectric transducer system, including the flexible piezoelectric energy converter in embodiment 1,2,
And sine signal source, driving source of the sine signal source as PVDF piezoelectric membrane, it is used for each spiral electrode item
Apply the sinusoidal signal of same frequency same-phase.Theoretically, which can be sinusoidal voltage source, can be one,
Or it is multiple.
When sinusoidal voltage source is multiple sinusoidal voltage sources of same frequency same-phase, the quantity and spiral shell of multiple sinusoidal voltage sources
The quantity for revolving electrode is identical, and each spiral electrode item is respectively connected to one in the multiple sinusoidal voltage source, simultaneously
On the complete electrode coated other end for being also connected to the sinusoidal voltage source of PVDF piezoelectric membrane.Preferably, entirely electrode coated to connect
Ground.
When the quantity of the sine signal source is 1, each spiral electrode item is connected to the sine signal source
One end, entirely on the electrode coated other end for being also connected to the sinusoidal voltage source.Preferably, complete electrode coated ground connection.
The PVDF piezoelectric membrane excitation that above-mentioned signal exciting circuit through this embodiment can be such that screw electrode coats produces
Raw stable focusing acoustic vortex, and longer distance is maintained in the propagation direction.
Finally, it should be noted that above embodiments are only to illustrate the technical solution of the application, rather than its limitations;Although
The application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features;
And these are modified or replaceed, each embodiment technical solution of the application that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of flexible piezoelectric energy converter characterized by comprising
Flexible substrates are round, are in the second condition concave spherical surface shape, and can be bent and deformed dynamic in the first state
The change radius of curvature of state;
Flexible piezoelectric film layer in the flexible substrates is set, and the upper surface of the flexible piezoelectric film layer is provided at least
One spiral electrode item, at least one described spiral electrode item origin having the same, the flexible piezoelectric film layer
Lower surface is provided with complete electrode coated.
2. flexible piezoelectric energy converter according to claim 1, which is characterized in that the spiral electrode item is equiangular spiral
Shape electrode strip.
3. flexible piezoelectric energy converter according to claim 1, which is characterized in that the flexible piezoelectric film layer is multiple soft
Property piezoelectric membrane is overlapped, and the lower surface of the flexible piezoelectric film nearest apart from the flexible substrates is provided with full coat and covers electricity
The upper surface of pole, the flexible piezoelectric film farthest apart from the flexible substrates is provided at least one spiral electrode item, and more
It is electrically connected in series each other between a flexible piezoelectric film.
4. -3 flexible piezoelectric energy converter according to claim 1, which is characterized in that the flexible piezoelectric film layer is
PVDF piezoelectric thin film layer.
5. flexible piezoelectric energy converter according to claim 2, which is characterized in that the coating width of each spiral electrode item
Change according to the following formula:
D=(a2-a1)ebθ;
Wherein, d is the width of spiral electrode item, a1For the initial inside diameter of spiral electrode item, a2For the first of spiral electrode item
Beginning outer diameter, b are orientation ascent, and θ is azimuth, and wherein the termination point of azimuth angle theta is 0-12 π.
6. flexible piezoelectric energy converter according to claim 5, which is characterized in that each spiral electrode item is having the same
The initial inside diameter and the original outer diameter.
7. flexible piezoelectric energy converter according to claim 1, which is characterized in that the complete electrode coated and described helical form
The material of electrode strip is silver.
8. a kind of flexible piezoelectric transducer system characterized by comprising
Any flexible piezoelectric energy converter of claim 1-7;
Sine signal source is used to apply same frequency same-phase to each of the flexible piezoelectric energy converter spiral electrode item
Sinusoidal signal.
9. flexible piezoelectric transducer system according to claim 8, which is characterized in that
The sine signal source is multiple sine signal sources of same frequency same-phase, the first terminal difference of each sine signal source
It is connected to each spiral electrode item, the Second terminal of the multiple sine signal source is connected to described complete electrode coated.
10. flexible piezoelectric transducer system according to claim 8, which is characterized in that
The quantity of the sine signal source is 1, and each spiral electrode is connected to the first terminal of the sine signal source, often
A complete electrode coated Second terminal for being connected to the sine signal source.
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CN112885955A (en) * | 2021-01-11 | 2021-06-01 | 中国科学院声学研究所 | Piezoelectric sensor and microphone |
CN112911464A (en) * | 2021-01-18 | 2021-06-04 | 中国科学院成都生物研究所 | Method and device for generating super-mode number synthetic vortex sound field |
CN113938055A (en) * | 2021-10-25 | 2022-01-14 | 江西农业大学 | Low-frequency multi-dimensional vibration energy collector based on centrosymmetric curve piezoelectric beam |
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