CN110470612A - A kind of operation wavelength and with the adjustable Optical coherence tomography of broad range - Google Patents

A kind of operation wavelength and with the adjustable Optical coherence tomography of broad range Download PDF

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Publication number
CN110470612A
CN110470612A CN201910664232.XA CN201910664232A CN110470612A CN 110470612 A CN110470612 A CN 110470612A CN 201910664232 A CN201910664232 A CN 201910664232A CN 110470612 A CN110470612 A CN 110470612A
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China
Prior art keywords
prism
light
coherence tomography
optical coherence
reflecting mirror
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CN201910664232.XA
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Chinese (zh)
Inventor
张磊
方强
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Shantou University
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Shantou University
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Priority to CN201910664232.XA priority Critical patent/CN110470612A/en
Publication of CN110470612A publication Critical patent/CN110470612A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/14Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a kind of operation wavelength and with the adjustable Optical coherence tomography of broad range, it include: laser, sample arm, reference arm, spectrum acquisition device, photo-coupler and filter, the filter includes: D-shaped reflecting mirror, prism to, shelter and the first reflecting mirror, laser issues complex light, the complex light projects after entering filter filtering and respectively enters sample arm and reference arm, the light that the sample arm and reference arm are returned forms interference fringe in photo-coupler and passes to spectrum acquisition device, the coherent tomographic of complete paired samples.The Optical coherence tomography is adjusted wavelength and bandwidth using filter, so that the operation wavelength and bandwidth of entire Optical coherence tomography are adjustable, facilitate and adapts to different detection environment.Present invention is mainly used for optical coherence tomography equipment technical fields.

Description

A kind of operation wavelength and with the adjustable Optical coherence tomography of broad range
Technical field
The present invention relates to optical coherence tomography equipment technical field, in particular to a kind of operation wavelength and can with broad range The Optical coherence tomography of tune.
Background technique
Optical coherence tomography can obtain the three-dimensional structure information of sample.Current Optical coherence tomography desorption device is all Fixed wave length, the system of fixed-bandwidth, so that Optical coherence tomography desorption device is only applicable to specifically apply, and performance indicator is Fixed.
Summary of the invention
The object of the present invention is to provide the adjustable Optical coherence tomographies of a kind of operation wavelength, bandwidth.
The solution that the present invention solves its technical problem is: a kind of operation wavelength and with the adjustable optics phase of broad range Dried layer analysis system, comprising: laser, sample arm, reference arm, spectrum acquisition device, photo-coupler and filter, the filter It include: D-shaped reflecting mirror, prism to, shelter and the first reflecting mirror, laser issues complex light, and the prism is to including: first The optical characteristics of prism and the second prism, first prism and the second prism is all the same, and the complex light is with cloth This special angle incidence of scholar enters the first prism, and the light incident surface of second prism and the light-emitting face of the first prism are flat Row, the complex light successively form dispersed light after the first prism and the second prism, and the dispersed light is blocked object filter The first reflecting mirror is reached after wave, first reflecting mirror is with first angle towards prism to inclination, the angle of the first angle Value is 1 ° -2 °, and the dispersed light is reflected and is back to prism to being mixed into detection complex light, the spy by first reflecting mirror It surveys complex light and is projected by D-shaped reflecting mirror and enter photo-coupler, the detection complex light is divided into two-way light by the photo-coupler, the Light enters sample arm all the way, and the second road light enters reference arm, the light that the sample arm and reference arm are returned shape in photo-coupler At interference fringe and pass to spectrum acquisition device.
Further, the reference arm includes: the second reflecting mirror, dispersion compensator, attenuator, half-wave plate, second tunnel Light passes sequentially through half-wave plate, attenuator, dispersion compensator and reaches the second reflecting mirror.
Further, spectrum acquisition device includes: InGaAs spectrometer, two-way Look mirror and CMOS spectrometer, the bidirectional color The interference fringe passed over is distinguished and respectively enters CMOS spectrometer and InGaAs spectrometer by mirror.
Further, the material of first prism is N-SF11, optical transmission window is 420nm-2.3 μm.
Further, the material of first prism is F2, optical transmission window is 385nm-2 μm.
Further, the material of first prism is calcirm-fluoride, optical transmission window is 600nm-8 μm.
Further, the material of first prism is zinc selenide, optical transmission window is 2 μm -16 μm.
Further, the shelter is connected with motorized precision translation stage, and the motorized precision translation stage is moved for controlling the shelter It moves to control shelter to the amount of blocking of dispersed light, the shelter is filtered dispersed light with shielding mode.
Further, the shelter is plate-like.
The beneficial effects of the present invention are: the Optical coherence tomography is adjusted wavelength and bandwidth using filter, So that the operation wavelength and bandwidth of entire Optical coherence tomography are adjustable, facilitate and adapt to different detection environment.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment Attached drawing is briefly described.Obviously, described attached drawing is a part of the embodiments of the present invention, rather than is all implemented Example, those skilled in the art without creative efforts, can also be obtained according to these attached drawings other designs Scheme and attached drawing.
Fig. 1 is the index path of Optical coherence tomography;
Fig. 2 is the location diagram of reflecting mirror.
Specific embodiment
It is carried out below with reference to technical effect of the embodiment and attached drawing to design of the invention, specific structure and generation clear Chu is fully described by, to be completely understood by the purpose of the present invention, feature and effect.Obviously, described embodiment is this hair Bright a part of the embodiment, rather than whole embodiments, based on the embodiment of the present invention, those skilled in the art are not being paid Other embodiments obtained, belong to the scope of protection of the invention under the premise of creative work.In addition, be previously mentioned in text All connection/connection relationships not singly refer to that component directly connects, and referring to can be added deduct according to specific implementation situation by adding Few couple auxiliary, Lai Zucheng more preferably coupling structure.Each technical characteristic in the invention, in not conflicting conflict Under the premise of can be with combination of interactions.
Embodiment 1, with reference to Fig. 1 and Fig. 2, a kind of operation wavelength and with the adjustable Optical coherence tomography of broad range, It include: laser 510, sample arm 700, reference arm 600, spectrum acquisition device 800, photo-coupler 520 and filter, the filter Wave device includes: D-shaped reflecting mirror 100, prism to 200, shelter 300 and the first reflecting mirror 400, and shelter 400 is preferably plate Shelter, laser 510 issue complex light 110, and the prism includes: the first prism 210 and the second prism 220 to 200, The optical characteristics of first prism 210 and the second prism 220 is all the same, and the complex light 110 is entered with Brewster's angle It injecting into the first prism 210, the light incident surface of second prism 220 is parallel with the light-emitting face of the first prism 210, The complex light 110 successively forms dispersed light 120, the dispersed light after the first prism 210 and the second prism 220 120, which are blocked, reaches the first reflecting mirror 400 after object 300 filters, wherein the first reflecting mirror 400 is with first angle α towards prism pair Inclination is expressed for convenience with reference to Fig. 1 and 2, draws coordinate system in fig. 1, wherein the plane of drawing is the face x-y, deeply Drawing direction is the direction z.With reference to Fig. 2, the first reflecting mirror 400 is tilted towards prism to 200 with first angle α, first angle α's Angle value is 1 ° -2 °, which refers to the angle value between z-axis.First reflecting mirror 400 is by the dispersed light 120 reflection be back to prism to be mixed into detection complex light 130, the detection complex light 130 by D-shaped reflecting mirror 100 project into Enter photo-coupler 520, the detection complex light 130 is divided into two-way light by the photo-coupler 520, and first via light enters sample arm 700, the second road light enters reference arm 600, and the light that the sample arm 700 and reference arm 600 are returned is formed in photo-coupler 520 Interference fringe simultaneously passes to spectrum acquisition device 800.
When this system needs to adjust operation wavelength and bandwidth, it is only necessary to adjust the spatial position of shelter 300.Tool Body principle is as follows: the first prism 210 and the second prism 220 composition prism are to 200, when complex light 110 passes through the first trigone When mirror 210, complex light 110 is done only once dispersion, and complex light 110 is opened according to spectrum by dispersion, the complex light 110 after dispersion into Enter the second prism 220, under the action of the second prism 220, the complex light 110 after dispersion forms dispersed light by dispersion again 120, by dispersion twice, so that dispersed light 120 scatters completely in space according to wavelength, when needing to operation wavelength and bandwidth When being adjusted, shelter 300 is adjusted, it can spatially the light of stop portions wavelength passes through.By shelter 300 to hide The mode of gear is filtered dispersed light 120, it is preferred that by motorized precision translation stage control shelter to needs filter out at Light splitting is stopped, so that it can not reach the first reflecting mirror 400.First reflecting mirror 400 reflects dispersed light 120, from And changing the transmission route for the astigmatism 120 that fades, dispersed light 120 returns.During return, again by prism to 200, color Astigmatism 120 is combined into outgoing complex light 130, and the outgoing complex light 130 is compared with original complex light 110, spectral component Filtered.The outgoing complex light 130 projects by D-shaped reflecting mirror 100 and enters photo-coupler 520, and photo-coupler 520 will Outgoing complex light 130 is divided into two-way light, and first via light enters sample arm 700, and the second road light enters reference arm 600, the sample The light that arm 700 and reference arm 600 are returned forms interference fringe in photo-coupler 520 and passes to spectrum acquisition device 800, complete It is operated at coherent tomographic.
The Optical coherence tomography is adjusted wavelength and bandwidth using filter, so that entire optical coherence tomography The operation wavelength and bandwidth of system are adjustable, facilitate and adapt to different detection environment.
As optimization, the reference arm 600 includes: the second reflecting mirror 610, dispersion compensator 620, attenuator 630, half-wave Piece 640, second road light pass sequentially through half-wave plate 640, attenuator 630, dispersion compensator 620 and reach the second reflecting mirror 610.
As optimization, spectrum acquisition device 800 includes: InGaAs spectrometer 830, two-way Look mirror 820 and CMOS spectrometer 810, the interference fringe passed over is distinguished and respectively enters CMOS spectrometer 810 and InGaAs light by the two-way Look mirror 820 Spectrometer 830.
As optimization, the material of first prism 210 is N-SF11, optical transmission window is 420nm-2.3 μm.Passing through will The material selection of first prism 210 is N-SF11, optical transmission window is 420nm-2.3 μm, be may be implemented to 420nm-2.3 μm Spectrum segment is filtered.
As optimization, the material of first prism 210 is F2, optical transmission window is 385nm-2 μm.By by the one or three The material of prism 210 is F2, optical transmission window is 385nm-2 μm, and effective filtering of the spectrum segment to 385nm-2 μm may be implemented.
As optimization, the material of first prism 210 is calcirm-fluoride, optical transmission window is 600nm-8 μm.By by The material of one prism 210 is selected as calcirm-fluoride, optical transmission window is 600nm-8 μm, and the spectrum segment to 600nm-8 μm may be implemented Effectively filtering.
As optimization, the material of first prism 210 is zinc selenide, optical transmission window is 2 μm -16 μm.By by The material of one prism 210 is selected as zinc selenide, optical transmission window is 2 μm -16 μm, and having for the spectrum segment to 2 μm -16 μm may be implemented Effect filtering.
Better embodiment of the invention is illustrated above, but the invention is not limited to the implementation Example, those skilled in the art can also make various equivalent modifications on the premise of without prejudice to spirit of the invention or replace It changes, these equivalent variation or replacement are all included in the scope defined by the claims of the present application.

Claims (9)

1. a kind of operation wavelength and with the adjustable Optical coherence tomography of broad range characterized by comprising laser, Sample arm, reference arm, spectrum acquisition device, photo-coupler and filter, the filter include: D-shaped reflecting mirror, prism to, Shelter and the first reflecting mirror, laser issue complex light, and the prism is to including: the first prism and the second prism, institute The optical characteristics for stating the first prism and the second prism is all the same, and the complex light enters the one or three with brewster angle incidence The light incident surface of prism, second prism is parallel with the light-emitting face of the first prism, and the complex light successively passes through Dispersed light is formed after one prism and the second prism, the dispersed light is blocked after object filters and reaches the first reflecting mirror, described First reflecting mirror with first angle towards prism to inclination, the angle value of the first angle is 1 ° -2 °, first reflecting mirror The dispersed light is reflected and is back to prism and is projected to detection complex light, the detection complex light is mixed by D-shaped reflecting mirror Into photo-coupler, the detection complex light is divided into two-way light by the photo-coupler, and first via light enters sample arm, the second tunnel Light enters reference arm, and the light that the sample arm and reference arm are returned, which forms interference fringe in photo-coupler and passes to spectrum, to be connect Receiving apparatus.
2. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that the reference arm includes: the second reflecting mirror, dispersion compensator, attenuator, half-wave plate, and second road light successively leads to It crosses half-wave plate, attenuator, dispersion compensator and reaches the second reflecting mirror.
3. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that spectrum acquisition device includes: InGaAs spectrometer, two-way Look mirror and CMOS spectrometer, and the two-way Look mirror will be transmitted The interference fringe to come over is distinguished and respectively enters CMOS spectrometer and InGaAs spectrometer.
4. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that the material of first prism is N-SF11, optical transmission window is 420nm-2.3 μm.
5. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that the material of first prism is F2, optical transmission window is 385nm-2 μm.
6. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that the material of first prism is calcirm-fluoride, optical transmission window is 600nm-8 μm.
7. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that the material of first prism is zinc selenide, optical transmission window is 2 μm -16 μm.
8. a kind of operation wavelength according to claim 1 and with the adjustable Optical coherence tomography of broad range, special Sign is that the shelter is connected with motorized precision translation stage, and the motorized precision translation stage is mobile to control for controlling the shelter Shelter is filtered the amount of blocking of dispersed light, the shelter with shielding mode to dispersed light.
9. a kind of operation wavelength according to claim 8 and with the adjustable Optical coherence tomography of broad range, special Sign is that the shelter is plate-like.
CN201910664232.XA 2019-07-23 2019-07-23 A kind of operation wavelength and with the adjustable Optical coherence tomography of broad range Pending CN110470612A (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201542612U (en) * 2009-11-26 2010-08-11 浙江大学 Acousto-optic gating light spectrum fast detection system for spectral domain OCT
CN103815868A (en) * 2014-02-26 2014-05-28 中国科学院光电技术研究所 Full-eye optical coherence tomography imager
CN104483291A (en) * 2014-12-12 2015-04-01 渭南师范学院 Rapid full-field detecting method of OCT (optical coherence tomography)
CN106821323A (en) * 2017-02-21 2017-06-13 苏州大学 The adjustable optical coherence tomography method and system of image planes form
CN108141003A (en) * 2015-10-16 2018-06-08 统雷有限公司 For the linear electric machine or voice coil of quick tuning laser device chamber
CN108732133A (en) * 2018-04-12 2018-11-02 杭州电子科技大学 It is a kind of based on the plant disease of optical image technology in body nondestructive detection system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201542612U (en) * 2009-11-26 2010-08-11 浙江大学 Acousto-optic gating light spectrum fast detection system for spectral domain OCT
CN103815868A (en) * 2014-02-26 2014-05-28 中国科学院光电技术研究所 Full-eye optical coherence tomography imager
CN104483291A (en) * 2014-12-12 2015-04-01 渭南师范学院 Rapid full-field detecting method of OCT (optical coherence tomography)
CN108141003A (en) * 2015-10-16 2018-06-08 统雷有限公司 For the linear electric machine or voice coil of quick tuning laser device chamber
CN106821323A (en) * 2017-02-21 2017-06-13 苏州大学 The adjustable optical coherence tomography method and system of image planes form
CN108732133A (en) * 2018-04-12 2018-11-02 杭州电子科技大学 It is a kind of based on the plant disease of optical image technology in body nondestructive detection system

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