CN110462266A - Exhaust apparatus - Google Patents
Exhaust apparatus Download PDFInfo
- Publication number
- CN110462266A CN110462266A CN201780089140.2A CN201780089140A CN110462266A CN 110462266 A CN110462266 A CN 110462266A CN 201780089140 A CN201780089140 A CN 201780089140A CN 110462266 A CN110462266 A CN 110462266A
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- Prior art keywords
- tube
- inner tube
- exhaust
- outer tube
- exhaust apparatus
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
- F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
- F16K11/0856—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug having all the connecting conduits situated in more than one plane perpendicular to the axis of the plug
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/08—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks
- F16K11/085—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only taps or cocks with cylindrical plug
Abstract
Present invention discloses a kind of exhaust apparatus for multiple gases separation exhaust.Exhaust apparatus (100) includes outer tube (102), inner tube (103) and actuator (104).Outer tube (102) includes tube body (1021).The side wall of tube body (1021) is equipped with multiple exhaust outlets (1022).Inner tube (103) is contained in the tube body (1021) of outer tube (102).One end of inner tube (103) is opening, and the other end of inner tube (103) is closed.The side wall of inner tube (103) is equipped with a through-hole (1033) or multiple through-holes (1033).Actuator (104) be configured as driving inner tube (103) outer tube (102) tube body (1021) in rotate so that inner tube (103) through-hole (1033) to an exhaust outlet (1022) of upper exterior tube (102) a kind of gas is discharged, at the same time other exhaust outlets (1022) of outer tube (102) by inner tube (103) side wall close.
Description
Technical field
The present invention relates to a kind of exhaust apparatus more particularly to a kind of improved exhaust apparatus, are suitable for several gases and separate
Exhaust.
Background technique
It is well known that the primary pollution source in semiconductor production process is for example to etch, generated during cleaning etc.
Sour gas, alkaline gas, fuel gas etc..Since sour gas, alkaline gas and fuel gas have different processing methods,
Therefore, it is necessary to separated discharge, Collecting and dealing sour gas, alkaline gas and fuel gas.It is set in traditional semiconductors manufacture
In standby, in order to which separated discharge sour gas, alkaline gas and fuel gas, traditional semiconductor manufacturing facility are typically provided with three
Exhaust apparatus.Each exhaust apparatus is for discharging a kind of gas.Specifically, there is each exhaust apparatus gas access and gas to go out
Mouthful.The gas vent of the gas access Joining Technology chamber of each exhaust apparatus, each exhaust apparatus connects factory service exhaust system.It is right
Should have factory service sour gas exhaust system, factory service alkalinity in sour gas, alkaline gas and fuel gas, factory service exhaust system
Gas exhaust system and factory service fuel gas exhaust system.According to exhaust gas in process cavity (sour gas, alkaline gas or combustible gas
Body) property, need to select corresponding exhaust apparatus and corresponding factory service exhaust system.
Although being discharged using the separation that multiple gases may be implemented in multiple exhaust apparatus, there is disadvantages.One
Aspect, multiple exhaust apparatus cause semiconductor manufacturing facility to become too fat to move in occupation of big quantity space.On the other hand, when one is arranged
When in use, other exhaust apparatus are in idle state to device of air, result in the reduction of exhaust apparatus utilization rate.Traditional row
Device of air occupies space and cost, this is clearly worthless.
Summary of the invention
Correspondingly, the object of the present invention is to provide a kind of exhaust apparatus for the separation exhaust of several gases.
According to one embodiment of present invention, the exhaust apparatus of proposition includes outer tube, inner tube and actuator.Outer tube includes pipe
Body.The side wall of tube body is equipped with multiple exhaust outlets.Inner tube is contained in the tube body of outer tube.One end of inner tube is opening, inner tube
The other end is closed.The side wall of inner tube is equipped with a through-hole.Actuator is configured as driving inner tube in the tube body inward turning of outer tube
Turn so that inner tube through-hole to an exhaust outlet of upper exterior tube to discharge a kind of gas, other exhaust outlets of outer tube are then at the same time
It is closed by the side wall of inner tube.
According to another embodiment of the invention, the exhaust apparatus of proposition includes outer tube, inner tube and actuator.Outer tube includes
Tube body.The side wall of tube body is equipped with multiple exhaust outlets.Inner tube is contained in the tube body of outer tube.One end of inner tube is opening, inner tube
The other end be closed.The side wall of inner tube is equipped with multiple through-holes.Actuator is configured as driving inner tube in the tube body of outer tube
It rotates so that a through-hole of inner tube discharges a kind of gas to an exhaust outlet of upper exterior tube, at the same time other rows of outer tube
Port is closed by the side wall of inner tube, other through-holes of inner tube are closed by the side wall of the tube body of outer tube.
In conclusion exhaust apparatus of the invention is rotated in outer tube by driving inner tube, to keep the through-hole of inner tube every
It is secondary that the corresponding exhaust outlet of upper exterior tube is discharged to realize that multiple gases separate.Compared with traditional exhaust apparatus, row of the invention
Device of air not only realizes multiple gases separation discharge, but also structure is simple, and manufacturing cost is low and the space occupied is few.
Detailed description of the invention
Fig. 1 discloses the perspective view of the exhaust apparatus of an exemplary embodiments according to the present invention.
Fig. 2 discloses the top view of exhaust apparatus shown in Fig. 1.
Fig. 3 is disclosed in Fig. 2 along the sectional view of A-A.
Fig. 4 discloses the perspective view of the outer tube of exhaust apparatus of the present invention.
Fig. 5 discloses the perspective view of the inner tube of exhaust apparatus of the present invention.
Fig. 6 discloses another perspective view of exhaust apparatus of the present invention.
Fig. 7 discloses the perspective view of the detection plate of exhaust apparatus of the present invention.
Fig. 8 discloses the perspective view of the outer tube of another embodiment of exhaust apparatus according to the present invention.
Fig. 9 discloses the perspective view of the inner tube of another embodiment of exhaust apparatus according to the present invention.
Figure 10 discloses the perspective view of the outer tube of another embodiment of exhaust apparatus according to the present invention.
Figure 11 discloses the perspective view of the inner tube of another embodiment of exhaust apparatus according to the present invention.
Figure 12 discloses the perspective view of the outer tube of another embodiment of exhaust apparatus according to the present invention.
Specific embodiment
Shown in referring to figs. 1 to Fig. 3, the exhaust apparatus of an embodiment according to the present invention is disclosed.Exhaust apparatus 100 includes
Air inlet pipe 101, outer tube 102, inner tube 103 and actuator 104.101 substantially l-shaped of air inlet pipe and including lateral part 1011 and vertical
To part 1012.Lateral part 1011 includes air inlet 1013.The tube wall of lateral part 1011 is equipped with drainage hole 1014, the row
Fluid apertures 1014 passes through 105 connected drainage pipe of connector.Longitudinal portion 1012 protrudes outward to form support portion 1015.
Outer tube 102 is fixed on the support portion 1015 of air inlet pipe 101.As shown in figure 4, outer tube 102 has cylindrical pipe
Body 1021.The side wall of tube body 1021 is set there are three exhaust outlet 1022.The center of three exhaust outlets 1022 is located in same level.
It will be recognized that the quantity of exhaust outlet 1022 is not limited only to 3.According to the gaseous species to be discharged, the side of tube body 1021
Wall can be equipped with the exhaust outlet 1022 of respective numbers.For the ease of being connected to factory service exhaust system, each exhaust outlet 1022 is all connected
Exhaust pipe 1023.One end of each exhaust pipe 1023 connects an exhaust outlet 1022, and the other end of exhaust pipe 1023 connects factory service
Exhaust system.Preferably, the size and shape of three exhaust outlets 1022 are the same.
Inner tube 103 is contained in the tube body 1021 of outer tube 102 and is supported by the support portion of air inlet pipe 101 1015.Although
Gap is formed between the outer wall of inner tube 103 and the inner wall of tube body 1021, but because gap is very small, and factory service exhaust system exists
It is persistently evacuated in exhaust process, so a possibility that leading to air leakage is very small.Inner tube 103 connects air inlet pipe 101.Such as Fig. 5
Shown, inner tube 103 is cylindrical.One end of inner tube 103 is to be open and connect air inlet pipe 101, and the other end of inner tube 103 is envelope
It is closing and connect connecting shaft 106, as shown in Figure 3.Specifically, the other end of inner tube 103 is sealed by sealing plate 1031.Sealing plate
1031 center is equipped with mounting groove 1032.One end of connecting shaft 106 is mounted and fixed in the mounting groove 1032 of inner tube 103.It is interior
The side wall of pipe 103 is equipped with through-hole 1033.Through-hole 1033 and the exhaust outlet 1022 of outer tube 102 match.Preferably, through-hole 1033 with
The size and shape having the same of exhaust outlet 1022.
One end of connecting shaft 106 is fixed on the mounting groove 1032 of inner tube 103.The other end of connecting shaft 106 is fixed on shaft coupling
On device 107.Shaft coupling 107 connects actuator 104.Actuator 104 drives inner tube 103 to exist by shaft coupling 107 and connecting shaft 106
Rotation in the tube body 1021 of outer tube 102, so that the through-hole 1033 of inner tube 103 arranges an exhaust outlet 1022 of upper exterior tube 102
A kind of gas out.Actuator 104 can be motor.
Exhaust apparatus 100 has good leakproofness.Specifically, the first sealing ring 108 is arranged in outer tube 102 and air inlet pipe
Between 101 support portion 1015.In addition, cover board 109 is fixed on outer tube 102.Connecting shaft 106 passes through the center of cover board 109.The
Two sealing rings 110 are arranged between cover board 109 and outer tube 102.The setting of third sealing ring 111 connecting shaft 106 and cover board 109 it
Between.Fixed ring 112 is arranged on third sealing ring 111 for placing third sealing ring 111.
As shown in fig. 6, exhaust apparatus 100 further comprises four sensors 113.Four sensors 113 are located at four
On a support base 114, four support bases 114 are fixed on cover board 109 and are located at around shaft coupling 107.Every two adjacent biography
Interval is equipped between sensor 113.Preferably, the angle between every two adjacent sensors 113 is 90 °.Four sensors 113 can
To be photoelectric sensor.Detection plate 115 is fixed on shaft coupling 107 and as shaft coupling 107 rotates together.As shown in fig. 7, inspection
Drafting board 115 is annular and is equipped with notch 1151 in the outer edge of detection plate 115.Four sensors 113 respectively correspond outer tube 102
Three exhaust outlets 1022 and initial position.The through-hole 1033 of the corresponding inner tube 103 of the notch 1151 of detection plate 115.In order to apparent
Ground illustrates that three exhaust outlets 1022 of outer tube 102 are respectively labeled as 1022A, 1022B and 1022C.Three exhaust pipes 1023 are distinguished
Labeled as 1023A, 1023B and 1023C.Four sensors 113 are respectively labeled as 113A, 113B, 113C and 113D.Sensor
113A corresponds to exhaust outlet 1022A.Sensor 113B corresponds to exhaust outlet 1022B.Sensor 113C corresponds to exhaust outlet 1022C.Sensing
Device 113D corresponds to initial position.
At least whether the through-hole 1033 of two methods detection inner tube 103 before exhaust is to the exhaust outlet of upper exterior tube 102
1022.A kind of method is that the position of three exhaust outlets 1022 and initial position of outer tube 102 is detected using four sensors 113
Coordinate and position coordinates are recorded in software systems.Specifically, actuator 104 drives shaft coupling 107 to rotate, inner tube 103
With detection plate 115 as shaft coupling 107 rotates together.When sensor 113D detects the notch 1151 of detection plate 115, software
The position coordinates of system record initial position.When sensor 113A detects the notch 1151 of detection plate 115, this indicates that interior
The through-hole 1033 of pipe 103 records the position coordinates of exhaust outlet 1022A to the upper exhaust outlet 1022A of outer tube 102, software systems.
When sensor 113B detects the notch 1151 of detection plate 115, this indicates that the through-hole 1033 of inner tube 103 to upper outer tube
102 exhaust outlet 1022B, software systems record the position coordinates of exhaust outlet 1022B.When sensor 113C detects detection plate
When 115 notch 1151, this indicates that the through-hole 1033 of inner tube 103 to the upper exhaust outlet 1022C of outer tube 102, software systems
Record the position coordinates of exhaust outlet 1022C.In the position coordinates of three exhaust outlets 1022A, 1022B and 1022C and initial position
After being identified, a kind of gas is discharged if necessary, and control actuator 104 is so that the through-hole 1033 of inner tube 103 is revolved from initial position
Turn respective angles and to the respective vent ports of upper exterior tube 102 1022.Remaining exhaust outlet 1022 of outer tube 102 by inner tube 103 side
Wall closing.
Another method is to detect the notch 1151 of detection plate 115 using sensor 113 before being vented each time.Example
Such as, if the gas being discharged is sour gas, before discharging sour gas, actuator 104 drives shaft coupling 107 to rotate,
To drive inner tube 103 and detection plate 115 to rotate, when sensor 113A detects the notch 1151 of detection plate 115, this is with regard to table
The through-hole 1033 of bright inner tube 103 is to the upper exhaust outlet 1022A of outer tube 102.Sour gas is discharged from exhaust outlet 1022A.Exhaust
Mouth 1022B, 1022C are closed by the side wall of inner tube 103.If the gas being discharged is alkaline gas, discharge alkaline gas it
Before, actuator 104 drives shaft coupling 107 to rotate, to drive inner tube 103 and detection plate 115 to rotate, when sensor 113B is detected
To detection plate 115 notch 1151 when, this indicates that the through-hole of inner tube 103 to the upper exhaust outlet 1022B of outer tube 102.Alkalinity
Gas is discharged from exhaust outlet 1022B.Exhaust outlet 1022A, 1022C are closed by the side wall of inner tube 103.If the gas being discharged is
Fuel gas, before discharging fuel gas, actuator 104 drives shaft coupling 107 to rotate, to drive inner tube 103 and detection
Plate 115 rotates, and when sensor 113C detects the notch 1151 of detection plate 115, this indicates that the through-hole 1033 of inner tube 103 is right
The exhaust outlet 1022C of outer tube 102 is gone up.Fuel gas is discharged from exhaust outlet 1022C.Exhaust outlet 1022A, 1022B are by inner tube 103
Side wall closing.
It is one advantage of the present invention that being adjustable by the gas flow that the exhaust outlet 1022 of outer tube 102 is discharged.
Specifically, after the through-hole 1033 of inner tube 103 is to 102 ground respective vent ports 1022 of upper exterior tube, control actuator 104 makes inner tube
103 turn an angle clockwise or counterclockwise, therefore the openings of sizes that gas is discharged is adjustable.
In field of semiconductor manufacture, if sour gas, alkaline gas or fuel gas is discharged using exhaust apparatus 100,
The air inlet 1013 of air inlet pipe 101 can Joining Technology chamber, in process cavity can be performed cleaning, etching etc. techniques.When needing to arrange
Out when sour gas, firstly, actuator 104 drives shaft coupling 107 to rotate, so that inner tube 103 and detection plate 115 be driven to rotate.
It is then detected that whether the through-hole 1033 of inner tube 103 is to the upper exhaust outlet 1022A of outer tube 102.If the through-hole of inner tube 103
1033 couples of exhaust outlet 1022A for having gone up outer tube 102, the sour gas in process cavity enter inner tube 103 by air inlet pipe 101, and
From the through-hole 1033, the exhaust outlet 1022A of outer tube 102 and the exhaust pipe of connection factory service sour gas exhaust system of inner tube 103
1023A discharge.When needing that alkaline gas is discharged, firstly, actuator 104 drives shaft coupling 107 to rotate, to drive inner tube
103 and detection plate 115 rotate.It is then detected that whether the through-hole 1033 of inner tube 103 is to the upper exhaust outlet 1022B of outer tube 102.
If the through-hole 1033 of inner tube 103, to the upper exhaust outlet 1022B of outer tube 102, the alkaline gas in process cavity passes through air inlet pipe
101 enter inner tube 103, and arrange from the through-hole of inner tube 103 1033, the exhaust outlet 1022B of outer tube 102 and connection factory service alkaline gas
The exhaust pipe 1023B of gas system is discharged.When needing that fuel gas is discharged, firstly, actuator 104 drives shaft coupling 107 to rotate,
To drive inner tube 103 and detection plate 115 to rotate.It is then detected that whether the through-hole 1033 of inner tube 103 is to the row of upper exterior tube 102
Port 1022C.If fuel gas of the through-hole 1033 of inner tube 103 to the upper exhaust outlet 1022C of outer tube 102, in process cavity
By air inlet pipe 101 enter inner tube 103, and from the through-hole of inner tube 103 1033, outer tube 102 exhaust outlet 1022C and connection factory service
The exhaust pipe 1023C of fuel gas exhaust system is discharged.As sour gas, alkaline gas or fuel gas enter air inlet pipe
101 liquid is flowed out by drainage hole 1014.
Exhaust apparatus 100 of the invention is equipped with multiple exhaust outlets 1022 and in inner tube 103 equipped with one on outer tube 102
Through-hole 1033, and inner tube 103 is driven in rotation in the tube body 1021 of outer tube 102, to make the through-hole 1033 of inner tube 103 every time
One of exhaust outlet 1022 of outer tube 102 is connected so that a kind of gas is discharged, remaining exhaust outlet 1022 of outer tube 102 is by inner tube
103 side wall closing.Therefore, exhaust apparatus 100 of the invention realizes the purpose of multiple gases separation exhaust, furthermore exhaust dress
Set 100 structure it is simple, manufacturing cost is low and the space occupied is small.
Refering to what is shown in Fig. 8, disclosing outer tube according to another embodiment of the present invention.Analogously, outer tube 202 includes cylinder
The tube body 2021 of shape.The side wall of tube body 2021 is set there are three exhaust outlet 2022.The center of three exhaust outlets 2022 is located at same flat
On face.For the ease of being connected to factory service exhaust system, each exhaust outlet 2022 connects an exhaust pipe 2023.Each exhaust pipe
2023 one end connects an exhaust outlet 2022, and the other end of exhaust pipe 2023 connects factory service exhaust system.Preferably, three rows
The size and shape of port 2022 are identical.Respectively between the two axial lines by the center of every two adjacent exhaust outlet 2022
Angle be 120 °.Therefore, the distance between every two adjacent row port 2022 is very big, when gas is from 2022 row of exhaust outlet
When out, avoid from 2022 gas leakage of adjacent row port.
Fig. 9 to Figure 10 discloses inner and outer tubes according to another embodiment of the present invention.Inner tube 303 is cylindrical.Inner tube
303 one end is to be open and connect air inlet pipe 101, and the other end of inner tube 303 is closed.Specifically, inner tube 303 is another
It is closed by sealing plate 3031 at end.The center of sealing plate 3031 is equipped with mounting groove 3032.One end of connecting shaft 106 is fixed on inner tube
303 mounting groove 3032.The side wall of inner tube 303 is set there are three through-hole 3033.Three through-holes 3033 are vertically arranged in the same line
On.Sealing element 3034 is arranged between two adjacent through-holes 3033.Sealing element 3034 is o ring or magnetic fluid.Outer tube 302 wraps
Include cylindrical tube 3021.The side wall of tube body 3021 is set there are three exhaust outlet 3022.Three exhaust outlets 3022 are located at Different Plane
Above and it is interspersed.Each exhaust outlet 3022 connects an exhaust pipe 3023.One end of each exhaust pipe 3023 connects a row
The other end of port 3022, exhaust pipe 3023 connects factory service exhaust system.Inner tube 303 is contained in the tube body 3021 of outer tube 302.
When a through-hole 3033 of inner tube 303 to one of upper exterior tube 302 corresponding exhaust outlet 3022 a kind of gas is discharged when, outer tube
302 other exhaust outlets 3022 by inner tube 303 side wall closing and inner tube 303 other through-holes 3033 by outer tube 302 tube body
3021 side wall closing.
Figure 11 to Figure 12 discloses inner and outer tubes according to another embodiment of the present invention.Inner tube 403 is cylindrical.Inner tube
403 one end is opening and connection air inlet pipe 101, and the other end of inner tube 403 is closed.Specifically, inner tube 403 is another
End is sealed by sealing plate 4031.The center of sealing plate 4031 is equipped with mounting groove 4032.One end of connecting shaft 106 is fixed on inner tube
403 mounting groove 4032.The side wall of inner tube 403 is set there are four through-hole 4033.Four through-holes 4033 are vertically arranged in the same line
On.Sealing element 4034 is arranged between two adjacent through-holes 4033.Sealing element 4034 is o ring or magnetic fluid.Outer tube 402 wraps
Include cylindrical tube 4021.The side wall of tube body 4021 is set there are four exhaust outlet 4022.Four exhaust outlets 4022 are located at Different Plane
It goes up and is interspersed.Each exhaust outlet 4022 connects an exhaust pipe 4023.One end of each exhaust pipe 4023 connects a row
The other end of port 4022 and exhaust pipe 4023 connects factory service exhaust system.Inner tube 403 is contained in the tube body 4021 of outer tube 402
It is interior.When a through-hole 4033 of inner tube 403 to one of upper exterior tube 402 corresponding exhaust outlet 4022 a kind of gas is discharged when,
Other exhaust outlets 4022 of outer tube 402 are closed by the side wall of inner tube 403, and other through-holes 4033 of inner tube 403 are then by outer tube 403
Tube body 4021 side wall closing.
It should be appreciated that the quantity of exhaust outlet and through-hole is unlimited.According to the gaseous species to be discharged, outer tube pipe
The exhaust outlet of the side wall setting respective numbers of body, the through-hole of the side wall setting respective numbers of inner tube.
In conclusion the present invention is illustrated by above embodiment and correlative type, oneself is specific, full and accurate to disclose correlation
Technology implements those skilled in the art accordingly.And embodiment described above is used only to illustrate the present invention, rather than
Interest field of the invention for limiting, of the invention should be defined by claim of the invention.As for member described herein
The change of number of packages purpose or the replacement of equivalence element etc. still all should belong to interest field of the invention.
Claims (18)
1. a kind of exhaust apparatus characterized by comprising
The side wall of outer tube, including tube body, tube body is equipped with multiple exhaust outlets；
Inner tube is contained in the tube body of outer tube, and one end of inner tube is opening, and the other end of inner tube is closed, the side of inner tube
Wall is equipped with through-hole；And
Actuator is configured as driving inner tube and is rotated in the tube body of outer tube so that the through-hole of inner tube is vented one of upper exterior tube
Mouth is to discharge a kind of gas, other exhaust outlets of outer tube are then closed by the side wall of inner tube at the same time.
2. exhaust apparatus according to claim 1, which is characterized in that the center of multiple exhaust outlets of the outer tube is located at same
In one plane.
3. exhaust apparatus according to claim 1, which is characterized in that the ruler of the exhaust outlet of the through-hole and outer tube of said inner tube
It is very little identical with shape.
4. exhaust apparatus according to claim 1, which is characterized in that further comprise air inlet pipe, outer tube and air inlet pipe are solid
One end of fixed and interior tube opening is connect with air inlet pipe.
5. exhaust apparatus according to claim 4, which is characterized in that the air inlet pipe substantially l-shaped and including transverse part
Divide and longitudinal portion, the wall of lateral part are equipped with drainage hole.
6. exhaust apparatus according to claim 4, which is characterized in that further comprise the first sealing ring, be arranged in outer tube
Between air inlet pipe.
7. exhaust apparatus according to claim 1, which is characterized in that the corresponding row of each exhaust outlet connection of the outer tube
Tracheae.
8. exhaust apparatus according to claim 1, which is characterized in that further comprise connecting shaft, one end of connecting shaft with
The closed end of inner tube is fixed, and the other end of connecting shaft is fixed in shaft coupling, and actuator connects shaft coupling, and actuator passes through shaft coupling
Device and connecting shaft driving inner tube rotate in the tube body of outer tube.
9. exhaust apparatus according to claim 8, which is characterized in that further comprise the cover board being fixed on outer tube, even
Spindle passes through the center of cover board, and the second sealing ring is arranged between cover board and outer tube, and third sealing ring is arranged in connecting shaft and lid
Between plate.
10. exhaust apparatus according to claim 8, which is characterized in that further comprise multiple sensors and detection plate, be somebody's turn to do
Whether multiple sensors and detection plate are configured as detecting the through-hole of inner tube before exhaust to a upper exhaust outlet of outer tube,
In, the multiple sensor is distributed in around shaft coupling, and detection plate is arranged on shaft coupling and as shaft coupling rotates together,
The outer edge of detection plate is equipped with notch, and the multiple sensor respectively corresponds the multiple exhaust outlets and initial position of outer tube, detects
The notch of plate corresponds to the through-hole of inner tube, the notch of the multiple sensor detection detection plate.
11. exhaust apparatus according to claim 10, which is characterized in that the multiple sensor is photoelectric sensor.
12. exhaust apparatus according to claim 1, which is characterized in that corresponding row of the through-hole of said inner tube to upper exterior tube
After port, control actuator makes inner tube turn an angle clockwise or counterclockwise to adjust the opening size of exhaust.
13. exhaust apparatus according to claim 1, which is characterized in that the quantity of the exhaust outlet is three and two points
It is not 120 ° by angle between the axis at every two adjacent row port center.
14. a kind of exhaust apparatus characterized by comprising
The side wall of outer tube, including tube body, tube body is equipped with multiple exhaust outlets；
Inner tube is contained in the tube body of outer tube, and one end of inner tube is opening, and the other end of inner tube is closed, the side of inner tube
Wall is equipped with multiple through-holes；And
Actuator is configured as driving inner tube and is rotated in the tube body of outer tube so that a through-hole of inner tube is to one of upper exterior tube
Exhaust outlet is to be discharged a kind of gas, other exhaust outlets of outer tube are closed by the side wall of inner tube at the same time, other through-holes of inner tube
By the side wall closing of the tube body of outer tube.
15. exhaust apparatus according to claim 14, which is characterized in that multiple through-holes of said inner tube are vertically arranged, outside
Multiple exhaust outlets of pipe are located at Different Plane and are interspersed.
16. exhaust apparatus according to claim 14, which is characterized in that the exhaust outlet of the through-hole and outer tube of said inner tube
Size and shape are identical.
17. exhaust apparatus according to claim 14, which is characterized in that further comprise sealing element, be arranged in two phases
Between adjacent through-hole.
18. exhaust apparatus according to claim 17, which is characterized in that the sealing element is o ring or magnetic fluid.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2017/078736 WO2018176308A1 (en) | 2017-03-30 | 2017-03-30 | Exhaust apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110462266A true CN110462266A (en) | 2019-11-15 |
Family
ID=63673834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780089140.2A Pending CN110462266A (en) | 2017-03-30 | 2017-03-30 | Exhaust apparatus |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110462266A (en) |
| WO (1) | WO2018176308A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111888594A (en) * | 2020-08-26 | 2020-11-06 | 胡可铭 | Closed atomizing device and atomization treatment equipment |
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| CN2127758Y (en) * | 1992-03-23 | 1993-03-03 | 北京市海淀区海颐金属结构厂 | Normally open three-way valve for small atmospheric tea-bath boiler |
| CN2913764Y (en) * | 2006-05-25 | 2007-06-20 | 新昌新涛电气有限公司 | Gas control valve for domestic gas kitchen range |
| US20080223464A1 (en) * | 2007-03-15 | 2008-09-18 | Merrell Douglas E | Flow Diverters for Valves, Valves, and In-Floor Pool Cleaning Systems |
| CN106153090A (en) * | 2014-10-30 | 2016-11-23 | 株式会社岛津制作所 | Detecting apparatus for rotor position and rotary valve |
| CN105221796A (en) * | 2015-10-16 | 2016-01-06 | 徐州卓弘机械制造有限公司 | Divided fluid stream control gear |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111888594A (en) * | 2020-08-26 | 2020-11-06 | 胡可铭 | Closed atomizing device and atomization treatment equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018176308A1 (en) | 2018-10-04 |
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Address after: 201203 building 4, No. 1690, Cailun Road, free trade zone, Pudong New Area, Shanghai Applicant after: Shengmei semiconductor equipment (Shanghai) Co., Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Cailun Road No. fourth 1690 Applicant before: ACM (SHANGHAI) Inc. |
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