CN110459853A - A kind of split type easy tuning microwave cavity suitable for PCVD technique - Google Patents
A kind of split type easy tuning microwave cavity suitable for PCVD technique Download PDFInfo
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- CN110459853A CN110459853A CN201910774674.XA CN201910774674A CN110459853A CN 110459853 A CN110459853 A CN 110459853A CN 201910774674 A CN201910774674 A CN 201910774674A CN 110459853 A CN110459853 A CN 110459853A
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- cavity
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- coaxial rings
- split type
- chamber lid
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- 238000000034 method Methods 0.000 title claims abstract description 37
- 239000011521 glass Substances 0.000 claims abstract description 11
- 230000005855 radiation Effects 0.000 claims abstract description 9
- 230000008878 coupling Effects 0.000 claims abstract description 6
- 238000010168 coupling process Methods 0.000 claims abstract description 6
- 238000005859 coupling reaction Methods 0.000 claims abstract description 6
- 239000000498 cooling water Substances 0.000 claims description 20
- 238000007789 sealing Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000011161 development Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 230000004323 axial length Effects 0.000 abstract description 8
- 230000010355 oscillation Effects 0.000 abstract description 7
- 230000008569 process Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000009514 concussion Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
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- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/04—Coaxial resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/06—Cavity resonators
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Abstract
The present invention discloses a kind of split type easy tuning microwave cavity suitable for PCVD technique, including there is the cavity of opening and be removably fastened in the opening of cavity, the chamber lid for forming closure cavity between the two, offered on the side wall of cavity for making microwave coupling enter the waveguide entrance in the closure cavity；The first coaxial rings axially extended, for inserting glass base tube one end are offered on the inner wall of cavity, offer the second coaxial rings axially extended, for inserting the glass base tube other end on the inner wall of chamber lid, the distal end faces of the distal end faces of the first coaxial rings and the second coaxial rings mutually face and there are the radiation slits passed through for resonant microwave between the two.The present invention changes the axial length of closure cavity by the chamber lid of the disassembling, assembling and replacing difference inner wall surface thickness on cavity, realize the resonance frequency tunings operation of microwave cavity, guarantee microwave in closure cavity can smooth starting of oscillation so that resonance frequency and plasma load keep matching.
Description
Technical field
The present invention relates to PCVD technical field, in particular to a kind of split type easy tuning microwave suitable for PCVD technique is humorous
Shake chamber.
Background technique
PCVD (Plasma Chemical Vapor Deposition, plasma activated chemical vapour deposition) technology is
Carry out the main technique technology of preform manufacture.
Wherein, microwave plasma system is the peculiar part different from other techniques of the technique, is its core.It is micro-
Wave plasma system is made of microwave generator, waveguide assembly and microwave cavity, and waveguide assembly generates microwave generator
Electromagnetic wave energy be transmitted to microwave cavity, the electromagnetic wave of input is carried out resonance and to PCVD process deposits by microwave cavity
Area emits high frequency microwave energy, to complete the deposition process of PCVD technique.
Currently, the microwave cavity for executing PCVD technique generally uses cylindrical or coaxial shape resonant cavity, to guarantee
The glass uniformity of deposition.Coaxial shape resonant cavity has the advantages that concussion mode is simple, field structure is stable, and tunes convenient, easy
It in starting of oscillation, is easily worked, makes, it is made of the coaxial line of one section of regular length of two terminal shortcircuits, and axial length is general
The integral multiple for taking half wavelength, such as λ/2.The structure design of resonant cavity is extremely important, and irrational mix size not only will affect
Coupling effect causes the loss of microwave energy, influences the machining accuracy of PCVD technique, is also easy to damage microwave device, influences to give birth to
Production process.Microwave cavity due to executing PCVD technique is that the reciprocal shifting of high speed is carried out in about 1200 DEG C of hot environment
It is dynamic, installed in resonant cavity reliable tuner be it is very difficult, therefore, in the actual production of PCVD technique, microwave
Resonant cavity is mostly untunable, and cavity body structure size is fixed, this by the requirement on machining accuracy to resonance frequency and resonant cavity very
It is high.
In actual production, the body deviation, dimension deviation of resonance inner cavity surface, inner surface electrical conductivity and coupling
The depth etc. for closing probe (antenna) insertion resonant cavity all impacts the resonance frequency of resonant cavity, leads to electromagnetic wave in the cavity
It is difficult to starting of oscillation or microwave resonance frequency and the unmatched problem of plasma load.Therefore, in practice, it is necessary to carry out microwave
The Thermal test of transmission, and the structure size of resonant cavity is carried out amendment repeatedly and repeatedly processes just be finally completed to meet PCVD work
The qualified resonant cavity that skill deposition requires.However, microwave cavity in the prior art is Integral mounting structure, it is difficult to easily
It is easy to cause remaining structure size with connection relationship to produce when realizing and adjust to the structure size of microwave cavity, and adjusting
Raw corresponding variation, it is very careful that adjustment process needs, therefore the Thermal test process of entire microwave transmission is very loaded down with trivial details, and processing capacity
Very big, efficiency is very low.
Therefore, how simply and easily to realize the tuner operation to microwave cavity, guarantee microwave in resonant cavity smoothly
Starting of oscillation, and resonance frequency is matched with plasma load holding, is the technical issues of those skilled in the art are faced.
Summary of the invention
The object of the present invention is to provide a kind of split type easy tuning microwave cavities suitable for PCVD technique, can be simple
Conveniently realize the tuner operation to microwave cavity, guarantee microwave smooth starting of oscillation in resonant cavity, and resonance frequency with etc. from
Daughter load keeps matching.
In order to solve the above technical problems, the present invention provides a kind of split type easy tuning microwave resonance suitable for PCVD technique
Chamber, including there is the cavity of opening and be removably fastened in the opening of the cavity, empty for forming closure between the two
The chamber lid of chamber offers on the side wall of the cavity for making microwave coupling enter the waveguide entrance in the closure cavity；
The first coaxial rings axially extended, for inserting glass base tube one end, institute are offered on the inner wall of the cavity
State the second coaxial rings for offering and axially extending, for inserting the glass base tube other end on the inner wall of chamber lid, described first
The distal end faces of the distal end faces of coaxial rings and second coaxial rings mutually face and there are pass through for resonant microwave between the two
Radiation slit.
Preferably, if offering the cooling water cavity that arterial highway is distributed in a ring along its axial direction in the side wall of the cavity,
And it offers on the side wall of the cavity and is connected to each cooling water cavity to form the intake-outlet of circulation waterway.
Preferably, the collecting ring being connected to the intake-outlet is circumferentially offered on the both ends end face of the cavity
Road, the both ends nozzle of each cooling water cavity are connected to the corresponding circuit that catchments respectively, and on each circuit that catchments
Liquid sealing is realized by the sealing ring being installed on the cavity end face.
Preferably, several mounting holes are offered along its circumferential direction on the outer end face of each chamber lid, and each chamber lid is equal
It is detachably connected by the inner face of the fastener and the cavity that are installed in the mounting hole.
Preferably, the internal-and external diameter of first coaxial rings and second coaxial rings is equal, and the central axes of the two are total
Line.
Preferably, the internal diameter of the closure cavity is 80~120mm, first coaxial rings and second coaxial rings
Outer diameter is 40~60mm；The development length of first coaxial rings is 30~33mm, the development length of second coaxial rings
Width for 18~22mm, the radiation slit is 10~14mm.
Preferably, the coating for reducing lossy microwave is provided on the inner surface of the closure cavity.
Split type easy tuning microwave cavity provided by the present invention suitable for PCVD technique mainly includes cavity and chamber
Lid.Wherein, cavity is the main structure of microwave cavity, has opening, and chamber lid is fastened in the opening of cavity, and the two fastens
Closure cavity is formed in centre afterwards, using as resonant cavity, i.e. microwave resonance place.Waveguide is offered on the side wall of cavity to enter
Mouthful, enter the channel in closure cavity as microwave coupling.Meanwhile first axially extended is offered on the inner wall of cavity
Coaxial rings offer the second coaxial rings axially extended on the inner wall of chamber lid, the rwo for inserting PCVD technique jointly
Glass base tube.Also, the first coaxial rings and the second coaxial rings not in contact with, the distal end faces of the two mutually face, and there are
Slit is radiated, the microwave for being available in closure cavity interior resonance passes through, and then is radiated in glass base tube by the radiation slit, right
Admixture of gas in it carries out activation ionization and forms non-equilibrium plasma, realizes PCVD technique.Importantly, microwave is humorous
Shake chamber generally split type structure, and to be detachably connected between chamber lid and cavity, can be convenient on cavity to chamber lid into
Row installation and removal operation, to install corresponding chamber lid, on cavity selectively to pass through replacement inner wall surface thickness
Different chamber lids come change be formed by closure cavity axial length, thus make be closed cavity axial length and microwave it is humorous
Vibration half-wavelength matches, and then realizes the resonance frequency tunings operation of microwave cavity.In conclusion provided by the present invention
Suitable for the split type easy tuning microwave cavity of PCVD technique, pass through the disassembling, assembling and replacing difference inner wall surface thickness on cavity
The mode of chamber lid changes the axial length of the closure cavity formed between the two, realizes the resonance frequency tunings behaviour of microwave cavity
Make, guarantee microwave in closure cavity can smooth starting of oscillation so that resonance frequency and plasma load keep matching.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of overall structure diagram of specific embodiment provided by the present invention.
Fig. 2 is the cross section view of cavity shown in Fig. 1.
Wherein, in Fig. 1-Fig. 2:
Cavity -1, chamber lid -2, waveguide entrance -3 radiate slit -4, fastener -5；
First coaxial rings -101, cooling water cavity -102, intake-outlet -103, catchment circuit -104, sealing ring -
105, the second coaxial rings -201.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to FIG. 1, Fig. 1 is a kind of overall structure diagram of specific embodiment provided by the present invention.
In a kind of specific embodiment provided by the present invention, the split type easy tuning microwave suitable for PCVD technique is humorous
The chamber that shakes mainly includes cavity 1 and chamber lid 2.
Wherein, cavity 1 is the main structure of microwave cavity, has opening, and chamber lid 2 is fastened in the opening of cavity 1,
The two forms in centre after fastening and is closed cavity, as microwave resonance place.Waveguide entrance 3 is offered on the side wall of cavity 1,
Enter the channel in closure cavity as microwave coupling.
Meanwhile the first coaxial rings 101 axially extended are offered on the inner wall of cavity 1, it is opened on the inner wall of chamber lid 2
Equipped with the second coaxial rings 201 axially extended, it is provided commonly for the glass base tube of inserting PCVD technique.Also, the first coaxial rings
101 and second coaxial rings 201 not in contact with, the distal end faces of the two mutually face, and there are radiation slit 4, be available in closure
The microwave of cavity interior resonance passes through, and then is radiated in glass base tube by the radiation slit 4, to the admixture of gas in it into
Line activating ionizes to form non-equilibrium plasma, realizes PCVD technique.
Importantly, microwave cavity generally split type structure, and to be detachably connected between chamber lid 2 and cavity 1, it can
Easily to carry out installation and removal operation to chamber lid 2 on cavity 1, to selectively be installed on cavity 1 corresponding
Chamber lid 2, to change the axial length for being formed by closure cavity by the different chamber lid 2 of replacement inner wall surface thickness, thus
It matches its axial length with the resonance half-wavelength of microwave, and then realizes the resonance frequency tunings operation of microwave cavity.
In conclusion being suitable for the split type easy tuning microwave cavity of PCVD technique provided by the present embodiment, pass through
The mode of the chamber lid 2 of disassembling, assembling and replacing difference inner wall surface thickness changes the axial direction of the closure cavity formed between the two on cavity 1
Length, realize microwave cavity resonance frequency tunings operation, guarantee microwave in resonant cavity can smooth starting of oscillation so that resonance
Frequency is matched with plasma load holding.
As shown in Figure 1, axial length L=a+b+t of microwave cavity, wherein a is that the extension of the first coaxial rings 101 is long
Degree, b are the development length of the second coaxial rings 201, and t is radiation 4 ground width of slit, and b size is related to c size, and c size is
The c size of adjustable dimension, different chamber lids 2 is different, and the surface thickness of the inner concave of chamber lid 2 is bigger, and c size is smaller, instead
.In general, a size, within the scope of 30~33mm, b size is within the scope of 18~22mm, and t size is in 10~14mm range
It is interior, and c size is within the scope of 0~4mm.Meanwhile first the outer diameters of coaxial rings 101 and the second coaxial rings 201 be 40~60mm, and
The central axes of the two are conllinear, and the internal diameter for being closed cavity can be 80~120mm.
In a specific embodiment, for convenience of the inner wall surface thickness adjusting for realizing chamber lid 2, by chamber lid 2 from cavity 1
After disassembly, surface is carried out to the inner concave of chamber lid 2 strike off or be ground etc. to be simply surface-treated, can be gradually reduced chamber lid 2
Inner concave surface thickness increases c size value and b size value.Certainly, such adjusting method can only unidirectionally adjust the inner wall of chamber lid 2
Surface thickness is gradually reduced its inner wall surface thickness.
In addition, microwave cavity can generate heat in operation process, for the operating condition steady in a long-term for guaranteeing microwave cavity,
Cooling structure is additionally arranged on cavity 1 in the present embodiment.
As shown in Fig. 2, Fig. 2 is the cross section view of cavity 1 shown in Fig. 1.
If specifically, offering arterial highway cooling water cavity 102 in the side wall of cavity 1, and the equal edge of each road cooling water cavity 102
The axial directional distribution of cavity 1, and cooling water cavity 102 is whole is distributed in the side wall of cavity 1 in a ring.Meanwhile this implementation
Predetermined position of the example also on 1 side wall of cavity offers intake-outlet 103, and the intake-outlet 103 is general to be provided with 2 simultaneously
A, one of them is as water inlet, and another is as water outlet, is both connected to each road cooling water cavity 102.In this way, cold
But it after water is introduced from the external world, can be entered in each road cooling water cavity 102 by one of intake-outlet 103, flow through way
In absorb the heat of microwave cavity generation after, then flow out from another intake-outlet 103, it is cold arrive extraneous progress later
But it, then is again flow back into first intake-outlet 103, so realizes circulating for cooling water.Certainly, due in cavity 1
Waveguide entrance 3 is also provided on side wall, therefore the position that opens up of cooling water cavity 102 needs to avoid waveguide entrance 3.
Further, to improve flow efficiency of the cooling water in cavity 1, the present embodiment is on the both ends end face of cavity 1
The circuit 104 that catchments circumferentially is opened up.Point of the nozzle of the distributed areas of the circuit 104 that catchments and each road cooling water cavity 102
Cloth area coincidence, and the nozzle of each road cooling water cavity 102 is connected to the corresponding circuit 104 that catchments, while the circuit that catchments
104 are also connected to intake-outlet 103, so set, cooling water will circumferentially flow and first after the entrance of intake-outlet 103
It respectively enters in each road cooling water cavity 102 full of one of them circuit 104 that catchments, then during circumferential flow, converges again later
Collect in another circuit 104 that catchments, is flowed out from another intake-outlet 103.
Connect above-mentioned, for the hydraulic tightness for guaranteeing cavity 1, the present embodiment is also mounted on the inner and outer ends face of cavity 1
Sealing ring 105.Specifically, the sealing ring 105 is welded on the end face of cavity 1, and it is pressed on the opening for the circuit 104 that catchments
On, the cooling water in the circuit 104 that prevents from catchmenting generates leakage in circumferential flow, guarantees hydraulic tightness.
In addition, for convenience of the disassembling, assembling and replacing realized to chamber lid 2 on cavity 1, in the present embodiment, in the outer of each chamber lid 2
Several mounting holes are offered along its circumferential direction on end face, thus tensed chamber lid 2 and cavity 1 by the effect of fastener 5,
It is fixed.In general, the standard components such as bolt can be used in fastener 5, disassembling operations are convenient.
In addition, to reduce the lossy microwave of microwave cavity in the process of running, interior table of the present embodiment in closure cavity
Face is provided with coating.Specifically, the coating is silver coating.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (7)
1. a kind of split type easy tuning microwave cavity suitable for PCVD technique, which is characterized in that including having the chamber of opening
Body (1) and be removably fastened in the opening of the cavity (1), for formed between the two closure cavity chamber lid (2), institute
It states and is offered on the side wall of cavity (1) for making microwave coupling enter the waveguide entrance (3) in the closure cavity；
The first coaxial rings axially extended, for inserting glass base tube one end are offered on the inner wall of the cavity (1)
(101), the second coaxial rings axially extended, for inserting the glass base tube other end are offered on the inner wall of the chamber lid (2)
(201), the distal end faces of the distal end faces of first coaxial rings (101) and second coaxial rings (201) mutually face and
There are the radiation slits (4) passed through for resonant microwave between the two.
2. the split type easy tuning microwave cavity according to claim 1 suitable for PCVD technique, which is characterized in that institute
State cavity (1) if side wall in along its axial direction offer the cooling water cavity (102) that arterial highway is distributed in a ring, and the cavity
(1) it offers on side wall and is connected to each cooling water cavity (102) to form the intake-outlet of circulation waterway (103).
3. the split type easy tuning microwave cavity according to claim 2 suitable for PCVD technique, which is characterized in that institute
The circuit that catchments (104) for circumferentially offering on the both ends end face of cavity (1) and being connected to the intake-outlet (103) is stated, respectively
The both ends nozzle of the cooling water cavity (102) is connected to the corresponding circuit that catchments (104) respectively, and each circuit that catchments
(104) liquid sealing is realized by the sealing ring (105) being installed on the cavity (1) end face on.
4. the split type easy tuning microwave cavity according to claim 1 suitable for PCVD technique, which is characterized in that each
Several mounting holes are offered along its circumferential direction on the outer end face of the chamber lid (2), and each chamber lid (2) is by being installed on
The fastener (5) and the inner face of the cavity (1) stated in mounting hole are detachably connected.
5. the split type easy tuning microwave cavity according to claim 1 suitable for PCVD technique, which is characterized in that institute
It states the first coaxial rings (101) and the internal-and external diameter of second coaxial rings (201) is equal, and the central axes of the two are conllinear.
6. the split type easy tuning microwave cavity according to claim 5 suitable for PCVD technique, which is characterized in that institute
The internal diameter for stating closure cavity is 80~120mm, and the outer diameter of first coaxial rings (101) and second coaxial rings (201) is equal
For 40~60mm；The development length of first coaxial rings (101) is 30~33mm, the extension of second coaxial rings (201)
Length is 18~22mm, and the width of radiation slit (4) is 10~14mm.
7. the split type easy tuning microwave cavity according to claim 1 suitable for PCVD technique, which is characterized in that institute
State the coating being provided on the inner surface of closure cavity for reducing lossy microwave.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910774674.XA CN110459853A (en) | 2019-08-21 | 2019-08-21 | A kind of split type easy tuning microwave cavity suitable for PCVD technique |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910774674.XA CN110459853A (en) | 2019-08-21 | 2019-08-21 | A kind of split type easy tuning microwave cavity suitable for PCVD technique |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111542166A (en) * | 2020-05-08 | 2020-08-14 | 烽火通信科技股份有限公司 | Annular microwave plasma resonant cavity |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4877938A (en) * | 1986-09-26 | 1989-10-31 | U.S. Philips Corporation | Plasma activated deposition of an insulating material on the interior of a tube |
| NL1025155C2 (en) * | 2003-12-30 | 2005-07-04 | Draka Fibre Technology Bv | Device for performing PCVD, as well as method for manufacturing a preform. |
| CN101853768A (en) * | 2010-04-09 | 2010-10-06 | 长飞光纤光缆有限公司 | Cylindrical plasma resonant cavity |
| US20130125817A1 (en) * | 2011-11-17 | 2013-05-23 | Draka Comteq B.V. | Apparatus for performing a plasma chemical vapour deposition process |
| CN210326075U (en) * | 2019-08-21 | 2020-04-14 | 上海至纯洁净系统科技股份有限公司 | Split type easily-tuned microwave resonant cavity suitable for PCVD (plasma chemical vapor deposition) process |
| CN117528893A (en) * | 2023-10-23 | 2024-02-06 | 武汉长盈通光电技术股份有限公司 | Coaxial plasma resonant cavity |
-
2019
- 2019-08-21 CN CN201910774674.XA patent/CN110459853A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4877938A (en) * | 1986-09-26 | 1989-10-31 | U.S. Philips Corporation | Plasma activated deposition of an insulating material on the interior of a tube |
| NL1025155C2 (en) * | 2003-12-30 | 2005-07-04 | Draka Fibre Technology Bv | Device for performing PCVD, as well as method for manufacturing a preform. |
| CN101853768A (en) * | 2010-04-09 | 2010-10-06 | 长飞光纤光缆有限公司 | Cylindrical plasma resonant cavity |
| US20130033342A1 (en) * | 2010-04-09 | 2013-02-07 | Yangtze Optical Fibre And Cable Company, Ltd. | Plasma resonant cavity |
| US20130125817A1 (en) * | 2011-11-17 | 2013-05-23 | Draka Comteq B.V. | Apparatus for performing a plasma chemical vapour deposition process |
| CN210326075U (en) * | 2019-08-21 | 2020-04-14 | 上海至纯洁净系统科技股份有限公司 | Split type easily-tuned microwave resonant cavity suitable for PCVD (plasma chemical vapor deposition) process |
| CN117528893A (en) * | 2023-10-23 | 2024-02-06 | 武汉长盈通光电技术股份有限公司 | Coaxial plasma resonant cavity |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111542166A (en) * | 2020-05-08 | 2020-08-14 | 烽火通信科技股份有限公司 | Annular microwave plasma resonant cavity |
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