CN110459672A - A kind of piezoceramic transducer and preparation method thereof - Google Patents
A kind of piezoceramic transducer and preparation method thereof Download PDFInfo
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- CN110459672A CN110459672A CN201910643824.3A CN201910643824A CN110459672A CN 110459672 A CN110459672 A CN 110459672A CN 201910643824 A CN201910643824 A CN 201910643824A CN 110459672 A CN110459672 A CN 110459672A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Further insulation means against electrical, physical or chemical damage, e.g. protective coatings
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Abstract
The invention discloses a kind of piezoceramic transducers and preparation method thereof, the sensor includes upper flexible film substrate and lower flexible film substrate, the first conductive layer, piezoelectric layer and the second conductive layer are disposed between the upper flexible film substrate and the lower flexible film substrate, the piezoelectric layer includes several spaced piezoelectric ceramics, and 2 electrodes of the piezoelectric ceramics are electrically kept in contact with first conductive layer, second conductive layer respectively.Prepared piezoelectric transducer uses piezoceramic material in the present invention, compares flexible material PVDF, thermal stability is good, puncture-resistant, and piezoelectric efficiency is higher.Meanwhile preparation process of the invention is directly cut using the piezoelectric ceramics after polarization, and realizes being intervally arranged for potsherd using the material loss in cutting process, simple process is controllable, and yields is high, can be realized large-scale production.
Description
Technical field
The present invention relates to piezoelectric transducer fields, more particularly, to a kind of piezoceramic transducer and preparation method thereof.
Background technique
Certain electrolyte in a certain direction by external force effect deform when, inside can generate polarization phenomena, together
When there is positive and negative opposite charge on its two apparent surfaces.After external force is removed, it can be restored to uncharged shape again
State, this phenomenon are known as direct piezoelectric effect, and the material that can generate piezoelectric effect is known as piezoelectric material.Piezoelectric transducer is benefit
With this piezoelectric effect, the power and energy between mechanical energy and electric energy is realized.The piezoelectric transducer prepared using piezoelectric material
The advantages that simple with structure, stability height is at low cost, and response is fast, and Hz-KHz is wide, and sensitivity is big, and dynamic range is big.With
The development of electronics industry, piezoelectric transducer are widely used in the related fieldss such as acoustics, mechanics, medical treatment and aerospace.
It is the arrangement mode because special between atom in lattice that piezoelectric material, which has piezoelectric effect, can be divided into piezoelectric monocrystal
Body, piezoelectricity polycrystal (piezoelectric ceramics), piezopolymer (PVDF) and four kinds of piezo-electricity composite material.Piezoelectric ceramics is with higher
Electromechanical coupling factor, piezoelectric constant is larger, and sensing sensitivity is higher, performance stablize, however, piezoceramic material itself without
Flexibility can not use in curved surface annular.Organic piezoelectric materials PVDF is to have both flexible and piezoelectric property material simultaneously, still
The material thermal stability is poor, not puncture-resistant, and piezoelectric constant is low compared with ceramic material.
In the prior art, the piezoelectric device with certain flexible is prepared, complex process, yield rate are low.
Summary of the invention
The present invention is directed to solve one of the technical problem in related describe at least to a certain extent.For this purpose, of the invention
One purpose is to provide a kind of simple, flexible, high reliablity the piezoceramic transducer of structure.
For this purpose, a second object of the present invention is to provide a kind of simple processes, the piezoceramic transducer system of high yield rate
Preparation Method.
The technical scheme adopted by the invention is that:
In a first aspect, the present invention provides a kind of piezoceramic transducer, including upper flexible film substrate and lower flexible thin
Film substrate is disposed with the first conductive layer, piezoelectric layer between the upper flexible film substrate and the lower flexible film substrate
With the second conductive layer, the piezoelectric layer includes several spaced piezoelectric ceramics, is passed through between several piezoelectric ceramics viscous
Property material is fixed between first conductive layer and second conductive layer, 2 electrodes of the piezoelectric ceramics respectively with institute
State the first conductive layer, second conductive layer is electrically connected.
Further, first conductive layer and second conductive layer include at least one conductive electrode and will be described
Conductive electrode connection and/or draw circuit, the two end electrodes of the piezoelectric ceramics respectively with first conductive layer at least
One conductive electrode is electrically connected, at least one conductive electrode of second conductive layer is electrically connected, and the conductive electrode connects
The circuit surface covering insulating protective layer for connecing and/or drawing.
Further, between the conductive electrode on first conductive layer and second conductive layer on conductive electrode it
Between mutual string and/or in parallel and/or draw connection and/or test and/or output port as sensor respectively.
Further, the conductive electrode is conduction with the material for the circuit that the conductive electrode is connected and/or drawn
At least one of materials such as metal, alloy, polymer.
Further, the material of the upper flexible film substrate, the lower flexible film substrate and the insulating protective layer
For at least one of flexible thin-film materials such as polyester film, Kapton, polypropylene film, polyvinyl chloride film.
Further, the cohesive material thickness is not higher than the thickness of the conductive layer.
Second aspect, the present invention also provides a kind of piezoceramic transducer preparation methods comprising following steps:
Step 1, it by the piezoelectric ceramics after sintering and polarization, is cut using cutting machine, the piezoelectric ceramics is divided
At several required sizes small pieces piezoelectric ceramics and make to retain a fixed spacing between several small pieces piezoelectric ceramics；
Step 2, it prints or deposits respectively or printed conductive layer on two fexible film surfaces；
Step 3, several small pieces piezoelectric ceramics prepared in step 1 are transferred to the flexibility prepared in step 2
Film surface guarantees that each small pieces piezoelectric ceramics surface is electrically connected with the conductive layer respectively in transfer；
Step 4, the prepared fexible film in the potsherd surface covering step 2 after transferring in step 3, guarantees
Several small pieces piezoelectric ceramics and the conductive layer are electrically connected.
Further, the step 2 further includes carrying out anti-oxidant process to the conductive layer surface.
Further, in the step 3, spacing is remained unchanged between several small pieces piezoelectric ceramic pieces of transfer front and back.
The beneficial effects of the present invention are:
The present invention is made using cutting technique with certain intervals between piezoelectric ceramic piece, and the piezoelectric transducer after encapsulation has
Certain flexible.Compare flexible material PVDF, prepared piezoelectric transducer uses piezoceramic material in the present invention, and heat is steady
Qualitative good, puncture-resistant, piezoelectric efficiency is higher.The technique is directly cut using the piezoelectric ceramics after polarization simultaneously, and is utilized
Material loss in cutting process realizes being intervally arranged for potsherd, and simple process is controllable, and yields is high, can be realized extensive
Production.
Detailed description of the invention
Fig. 1 is a kind of side view of one specific embodiment of piezoceramic transducer in the present invention；
Fig. 2 is curved schematic in a kind of one specific embodiment of piezoceramic transducer in the present invention；
Fig. 3 is electrode layer top view in a kind of one specific embodiment of piezoceramic transducer in the present invention；
Fig. 4 is electrode layer top view in a kind of piezoceramic transducer another specific embodiment in the present invention；
Fig. 5 is electrode layer top view in a kind of piezoceramic transducer still another embodiment in the present invention；
Fig. 6 is the flow diagram in the present invention in a kind of one specific embodiment of piezoceramic transducer preparation method.
Specific embodiment
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.
Referring to figs. 1 to Fig. 2, it illustrates a kind of piezoceramic transducers, including upper flexible film substrate 1 and lower flexible thin
Film substrate 5, it is preferred that upper flexible film substrate 1 and lower 5 material of flexible film substrate are polyester film, Kapton, gather
At least one of flexible thin-film materials such as Polypropylene film, polyvinyl chloride film.Upper flexible film substrate 1 and lower fexible film base
The first conductive layer 2, piezoelectric layer and the second conductive layer 9 are disposed between bottom 5, wherein the first conductive layer 2 and the second conductive layer 9
Material be at least one of materials such as conductive metal, alloy, polymer, have certain flexibility, include in conductive layer
Electrode 202 covers insulation protection film 8 with the circuit 201 that the electrode is connected and/or drawn, 201 surface of circuit.Piezoelectric layer
Including several spaced piezoelectric ceramics 4, first conductive layer, 2 He is fixed on by cohesive material 3 between several piezoelectric ceramics 4
Between second conductive layer 9.2 electrodes of piezoelectric ceramics 4 are electrically connected with the first conductive layer 2, the second conductive layer 9 respectively, are realized
Measurable electric signal is exported under certain loads.
Further, first conductive layer 2 and second conductive layer 9 include several conductive electrodes 202, piezoelectricity pottery
Two electrodes (upper and lower surface) of porcelain 4 are electrically connected at least one conductive electrode of first conductive layer 2 respectively, are described
At least one conductive electrode of second conductive layer 9 is electrically connected, and contact area is not less than the 50% of 4 surface area of piezoelectric ceramics,
Wherein retain certain intervals 7 between the piezoelectric ceramic piece.It is conductive with described second between conductive electrode on first conductive layer 2
Between conductive electrode on layer 9 mutually string and/or it is in parallel and/or draw respectively as sensor connection and/or test and/or
Output port.
Preferably, as shown in figure 3, illustrating the first conductive layer 1 and the second conductive layer 2 in Fig. 3,1 He of the first conductive layer
The conductive electrode of second conductive layer 2 is serially connected respectively, and the first conductive layer 1 has unique exit A, and the second conductive layer 2 has
Unique exit B connects the port A, B using high-speed record instrument after encapsulation, that is, can record the suffered of such as 16 electrode positions of figure
Plus load situation.Since each electrode is serially connected, sensor prepared by the film is able to record that large area data acquire.
With reference to Fig. 4, the conductive electrode of the first conductive layer 1 altogether, has unique output mouth A, the conduction of the second conductive layer 2
Electrode (1,2,5,6) altogether, connect exit C, conductive electrode (3,4,7,8) altogether, connect exit B, conductive electrode (11,
12, exit D 15,16) altogether, is connected, conductive electrode (9,10,13,14) altogether, connects exit E.After encapsulation, using height
Speed recording instrument one end connects upper electrode output port A, and the other end is separately connected port B, C, D, E, can not interfere with each other output
Institute is by plus load situation at each ground electrode position altogether.
With reference to Fig. 5, the conductive electrode of the first conductive layer 1 altogether, has unique output mouth A, the conduction of the second conductive layer 2
Electrode draws respective output port respectively, as shown in the figure.After encapsulation, upper electrode output end is connected using high-speed record instrument one end
Mouthful A, the other end be separately connected port B, C, D ..., Q, suffered plus load feelings respectively can be exported at 16 electrodes respectively
Condition realizes small-sized piezoelectric sensor integration.
Further, the port of the first conductive layer and the second conductive layer is provided with the interface circuit being electrically connected therewith.
The material of interface circuit is at least one of materials such as conductive metal, alloy, polymer.
With reference to Fig. 6, the present invention also provides a kind of piezoceramic transducer preparation methods comprising following steps:
Step 1, it by the piezoelectric ceramics 1 after sintering and polarization, is cut using cutting machine, if piezoelectric ceramics is divided into
The small pieces piezoelectric ceramics of size needed for dry simultaneously makes to retain a fixed spacing between several small pieces piezoelectric ceramics；
Step 2, it prints or deposits respectively or printed conductive layer 2 on two fexible film surfaces；
Step 3, several small pieces piezoelectric ceramics prepared in step 1 are transferred to fexible film prepared in step 2
Surface guarantees that each small pieces piezoelectric ceramics surface is electrically connected with conductive layer respectively in transfer；
Step 4, prepared fexible film in the potsherd surface covering step 2 after transferring in step 3, guarantees several
Small pieces piezoelectric ceramics and conductive layer are electrically connected.
Piezoelectric ceramics after sintering and polarization is precut before packaging, by sheet without piezoelectric ceramic piece flexible point
Several small pieces piezoelectric ceramics of required size are segmented into, the material loss generated using cutting is as the encapsulation of integrated piezoelectric ceramic piece
Interval, be directly transferred to printing conductive electrode and circuit film surface, formed by more than one piezoelectric ceramic piece integrate can
It is bent piezoelectric transducer.
It is further used as preferred embodiment, step 2 further includes carrying out anti-oxidant process to conductive layer surface.
It is further used as preferred embodiment, in step 3, spacing is protected between several small pieces piezoelectric ceramic pieces in transfer front and back
It holds constant.
Embodiment
A kind of piezoceramic transducer preparation method is provided in the present embodiment comprising following steps:
Step 1: the piezoelectric ceramic piece after sintering and polarization is cut using ceramic laser cutting machine, it will be having a size of
40mm × 40mm × 1mm potsherd is divided into 16 blocks of small potsherds, the small potsherd having a size of 8mm × 8mm × 1mm,
Potsherd spacing (cutting loss size) is 2mm；
Step 2: printing 16 counter electrodes and connection in polyimide flex film surface and/or draw circuit, In
Connection and/or extraction circuit position surface mount Kapton, as insulating protective layer, and in exit and electrode surface
Carry out the processing of surface turmeric, after cohesive material is fixed around conductive electrode；
Step 3: potsherd prepared in step 1 is aligned to and is transferred to fexible film surface prepared in step 2,
Guarantee that each potsherd is inlayed and is fixed between cohesive material in transfer, piezoelectric ceramics surface conductive layer respectively with counter electrode
It is kept in contact, each potsherd spacing in transfer front and back remains unchanged；
Step 4: the prepared second layer is flexible in the alignment of potsherd surface and covering step 2 after transferring in step 3
Film guarantees that each potsherd is kept in contact with conductive electrode respectively.
It is to be illustrated to preferable implementation of the invention, but the invention is not limited to the implementation above
Example, those skilled in the art can also make various equivalent variations on the premise of without prejudice to spirit of the invention or replace
It changes, these equivalent deformations or replacement are all included in the scope defined by the claims of the present application.
Claims (9)
1. a kind of piezoceramic transducer, it is characterised in that: including upper flexible film substrate and lower flexible film substrate, it is described on
The first conductive layer, piezoelectric layer and the second conductive layer are disposed between flexible film substrate and the lower flexible film substrate,
The piezoelectric layer includes several spaced piezoelectric ceramics, is fixed on institute by cohesive material between several piezoelectric ceramics
State between the first conductive layer and second conductive layer, 2 electrodes of the piezoelectric ceramics respectively with first conductive layer, institute
State the electric connection of the second conductive layer.
2. piezoceramic transducer according to claim 1, it is characterised in that: first conductive layer and described second is led
Electric layer include at least one conductive electrode with circuit that the conductive electrode is connected and/or drawn, the piezoelectric ceramics
Two end electrodes respectively at least one conductive electrode of first conductive layer be electrically connected, second conductive layer at least one
A conductive electrode is electrically connected, and the conductive electrode connection and/or the circuit surface drawn cover insulating protective layer.
3. piezoceramic transducer according to claim 2, it is characterised in that: the conductive electrode on first conductive layer
Between and second conductive layer on conductive electrode between mutual string and/or in parallel and/or draw respectively as sensor
Connection and/or test and/or output port.
4. piezoceramic transducer according to claim 2, it is characterised in that: the conductive electrode and will the conductive electricity
The material of pole connection and/or the circuit drawn is at least one of llowing group of materials: conductive metal, alloy, polymer.
5. piezoceramic transducer according to any one of claims 1 to 4, it is characterised in that: the upper fexible film base
The material at bottom, the lower flexible film substrate and the insulating protective layer is at least one of following flexible thin-film material:
Polyester film, Kapton, polypropylene film, polyvinyl chloride film.
6. piezoceramic transducer preparation method according to claim 5, it is characterised in that: the cohesive material thickness is not
Higher than the thickness of the conductive layer.
7. a kind of piezoceramic transducer preparation method, which comprises the following steps:
Step 1, it by the piezoelectric ceramics after sintering and polarization, is cut using cutting machine, if the piezoelectric ceramics is divided into
The small pieces piezoelectric ceramics of size needed for dry simultaneously makes to retain a fixed spacing between several small pieces piezoelectric ceramics；
Step 2, it prints or deposits respectively or printed conductive layer on two fexible film surfaces；
Step 3, several small pieces piezoelectric ceramics prepared in step 1 are transferred to the flexibility prepared in step 2
Film surface guarantees that each small pieces piezoelectric ceramics surface is electrically connected with the conductive layer respectively in transfer；
Step 4, the prepared fexible film in the potsherd surface covering step 2 after transferring in step 3, described in guarantee
Several small pieces piezoelectric ceramics and the conductive layer are electrically connected.
8. piezoceramic transducer preparation method according to claim 7, it is characterised in that: the step 2 further includes pair
The conductive layer surface carries out anti-oxidant process.
9. piezoceramic transducer preparation method according to claim 8, it is characterised in that: in the step 3, before transfer
Spacing remains unchanged between several small pieces piezoelectric ceramic pieces afterwards.
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Cited By (1)
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| CN111446359A (en) * | 2020-05-15 | 2020-07-24 | 京东方科技集团股份有限公司 | Piezoelectric device and manufacturing method thereof, electronic device and control method |
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