CN110456498A - Based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation - Google Patents

Based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation Download PDF

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Publication number
CN110456498A
CN110456498A CN201910722522.5A CN201910722522A CN110456498A CN 110456498 A CN110456498 A CN 110456498A CN 201910722522 A CN201910722522 A CN 201910722522A CN 110456498 A CN110456498 A CN 110456498A
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CN
China
Prior art keywords
mirror cell
bar group
shaft coupling
thermal deformation
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910722522.5A
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Chinese (zh)
Inventor
郭利泉
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NANJING INTANE OPTICS ENGINEERING Co Ltd
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NANJING INTANE OPTICS ENGINEERING Co Ltd
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Application filed by NANJING INTANE OPTICS ENGINEERING Co Ltd filed Critical NANJING INTANE OPTICS ENGINEERING Co Ltd
Priority to CN201910722522.5A priority Critical patent/CN110456498A/en
Publication of CN110456498A publication Critical patent/CN110456498A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0977Reflective elements
    • G02B27/0983Reflective elements being curved

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Telescopes (AREA)

Abstract

The present invention provides a kind of based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation.The present invention includes lens barrel, the primary mirror cell's pedestal for being separately positioned on lens barrel both ends and secondary mirror cell's pedestal, primary mirror cell is installed on primary mirror cell's pedestal, primary mirror is installed inside primary mirror cell, time mirror cell is installed by guide rail on secondary mirror cell's pedestal, secondary mirror is installed inside secondary mirror cell, Control Thermal Deformation component is connected between primary mirror cell and secondary mirror cell;Control Thermal Deformation component includes the first bar group connecting with primary mirror cell's pedestal and the second bar group connecting with secondary mirror cell, first bar group is fixedly connected with shaft coupling one, second bar group is fixedly connected with shaft coupling two, solidified between shaft coupling one and shaft coupling two by viscose glue and is connected, first bar group and shaft coupling one use identical material, and the second bar group and shaft coupling two use identical material.The present invention enables to the primary and secondary mirror spacing of beam-expanding system heat distortion amount under the influence of 40 DEG C of temperature difference to control within 2 μm.

Description

Based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation
Technical field:
The present invention relates to a kind of based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation, belongs to optics and sets Standby technical field.
Background technique:
The main beam-expanding system of optics is to meet over-the-counter requirement, in 30 DEG C of the temperature difference ranges, primary and secondary mirror optical axis direction heat distortion amount It need to control within 2 μm, just be able to satisfy main beam-expanding system beam quality requirement;Existing solution is common ultra low heat expansion system Several materials (such as invar), the cost of one side ultra-low thermal expansion material is high, and there is also poles for another aspect material itself Small thermal expansion coefficient,
The calculation formula of heat distortion amount is as follows:
In formula:Primary and secondary mirror optical axis direction is heat distortion amount;
It is 0.15 for the thermal expansion coefficient of material, such as thermal expansion coefficient of invar;
Based on, the length of secondary mirror optical axis direction;
For the heat differential of use environment;
In the case where heat differential range larger (being greater than 30 DEG C), primary and secondary mirror optical axis length dimension larger (600mm), above formula is substituted into Obtain heat distortion amount are as follows:
Heat distortion amount be to be unable to satisfy high-precision requirement, consider further that the parameters such as primary and secondary curvature radius and set The influence for counting error is difficult to effectively solve the problems, such as this only by using the material of ultra-low thermal expansion.
Summary of the invention:
It is a kind of based on adjustable and reversed thermal compensation progress thermal deformation the purpose of the present invention is providing in view of the above problems The main beam-expanding system of control by adjusting the effective thermal expansion coefficients of primary and secondary mirror optical axis direction overall length, and then controls primary and secondary mirror Spacing heat distortion amount under the influence of 40 DEG C of temperature difference controls within 2 μm.
Above-mentioned purpose is realized by following technical scheme:
Based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation, including lens barrel, it is separately positioned on lens barrel Primary mirror cell's pedestal at both ends and time mirror cell pedestal install primary mirror cell on primary mirror cell's pedestal, installation master inside the primary mirror cell Mirror passes through guide rail on secondary mirror cell's pedestal and installs time mirror cell, installs secondary mirror, the primary mirror cell and secondary mirror inside the secondary mirror cell Control Thermal Deformation component is connected between room;
The Control Thermal Deformation component includes the first bar group connecting with primary mirror cell's pedestal and connect with the secondary mirror cell The second bar group, the first bar group is fixedly connected with shaft coupling one, and the second bar group is fixedly connected with shaft coupling two, described Solidified between shaft coupling one and the shaft coupling two by viscose glue and connected, the first bar group and shaft coupling one use identical material Matter, the second bar group and shaft coupling two use identical material.
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the first bar group With the thermal linear expansion coefficient of shaft coupling one are as follows:
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the second bar group With the thermal linear expansion coefficient of shaft coupling two are as follows:
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the first bar group The ratio of length A1 and the length A2 of the second bar group are as follows:
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the thermal deformation control Component processed is between the primary mirror cell and the secondary mirror cell circumferentially at least provided with two groups.
The utility model has the advantages that
1. the present invention passes through the variation of the first bar group and the second bar group length, the effective heat for adjusting Control Thermal Deformation component overall length is swollen Swollen coefficient, and then control primary and secondary mirror spacing heat distortion amount under the influence of 40 DEG C of temperature difference and control within 2 μm, this compensation method is complete Face considers the influence of all factors, such as machinery, the thermal expansion coefficient of optical material, primary and secondary curvature radius thermal deformation shadow The influence etc. of loud, all connecting link thermal reliabilities.
Detailed description of the invention:
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is left view of the invention.
Fig. 3 is the portion the E enlarged drawing of Fig. 1.
Fig. 4 is light path schematic diagram of the invention.
In figure: 1, lens barrel;2, primary mirror cell's pedestal;3, secondary mirror cell's pedestal;4, primary mirror cell;5, primary mirror;6, guide rail;7, secondary mirror Room;8, secondary mirror;9, the first bar group;10, the second bar group, 11, shaft coupling one;12, shaft coupling two.
Specific embodiment:
It is as shown in Figs. 1-2: the main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation of the present embodiment, packet The primary mirror cell's pedestal 2 and secondary mirror cell's pedestal 3 for including lens barrel 1, being separately positioned on lens barrel both ends install primary mirror on primary mirror cell's pedestal Room 4, installs primary mirror 5 inside the primary mirror cell, installs time mirror cell 7 by guide rail 6 on secondary mirror cell's pedestal, in the secondary mirror cell Secondary mirror 8 is installed in face, and Control Thermal Deformation component is connected between the primary mirror cell and secondary mirror cell;
The Control Thermal Deformation component includes the first bar group 9 connecting with primary mirror cell's pedestal and connect with the secondary mirror cell The second bar group 10, the first bar group is fixedly connected with shaft coupling 1, the second bar group and shaft coupling 2 12 is fixed connects It connects, is solidified between the shaft coupling one and the shaft coupling two by viscose glue and connected, the first bar group and shaft coupling one use Identical material, the second bar group and shaft coupling two use identical material.
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the first bar group With the thermal linear expansion coefficient of shaft coupling one are as follows:
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the second bar group With the thermal linear expansion coefficient of shaft coupling two are as follows:
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the first bar group The ratio of length A1 and the length A2 of the second bar group are as follows:
The main beam-expanding system that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, the thermal deformation control Component processed is between the primary mirror cell and the secondary mirror cell circumferentially at least provided with two groups.
As shown in figure 3, the main beam-expanding system of the invention that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation Heat distortion amount test method is as follows:
Using high-precision standard flat mirror, interferometer, light path as shown in Figure 4 is built, first adjustment sheet at normal temperature Main beam-expanding system primary and secondary mirror to the system wave aberration of invention meets technical requirements;Then temperature control room temperature is adjusted, according to system The variation of wave aberration adjusts adjustment link, i.e., by changing the first bar group and the second bar group length ratio, changes Control Thermal Deformation The linear expansion coefficient of component, and then meet main beam-expanding system system image quality under 40 DEG C of temperature difference and be all satisfied technical requirements, it may be assumed that
Under room temperature, Wen Bianhou
The technical means disclosed in the embodiments of the present invention is not limited to the technical means disclosed in the above technical means, and further includes The technical solution as composed by the above technical characteristic equivalent replacement.Unaccomplished matter of the invention, belongs to those skilled in the art's Common knowledge.

Claims (5)

1. a kind of based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation, including lens barrel, it is respectively set Primary mirror cell's pedestal and time mirror cell pedestal at lens barrel both ends, install primary mirror cell on primary mirror cell's pedestal, inside the primary mirror cell Primary mirror is installed, it is characterized in that: installing time mirror cell by guide rail on secondary mirror cell's pedestal, secondary mirror is installed inside the secondary mirror cell, Control Thermal Deformation component is connected between the primary mirror cell and secondary mirror cell;
The Control Thermal Deformation component includes the first bar group connecting with primary mirror cell's pedestal and connect with the secondary mirror cell The second bar group, the first bar group is fixedly connected with shaft coupling one, and the second bar group is fixedly connected with shaft coupling two, described Solidified between shaft coupling one and the shaft coupling two by viscose glue and connected, the first bar group and shaft coupling one use identical material Matter, the second bar group and shaft coupling two use identical material.
2. the main beam-expanding system according to claim 1 that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, It is characterized in: the thermal linear expansion coefficient of the first bar group and shaft coupling one are as follows:
3. the main beam-expanding system according to claim 1 that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, It is characterized in: the thermal linear expansion coefficient of the second bar group and shaft coupling two are as follows:
4. the main beam-expanding system according to claim 1 that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, It is characterized in: the ratio of the length A1 of the first bar group and the length A2 of the second bar group are as follows:
5. the main beam-expanding system according to claim 1 that Control Thermal Deformation is carried out based on adjustable and reversed thermal compensation, Be characterized in: the Control Thermal Deformation component is between the primary mirror cell and the secondary mirror cell circumferentially at least provided with two groups.
CN201910722522.5A 2019-08-06 2019-08-06 Based on the adjustable main beam-expanding system for carrying out Control Thermal Deformation with reversed thermal compensation Pending CN110456498A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115308918A (en) * 2022-09-29 2022-11-08 中国科学院长春光学精密机械与物理研究所 Machine body device of large-caliber coaxial collimator

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WO2002039160A1 (en) * 2000-11-09 2002-05-16 Cambridge University Technical Services Ltd. Platform with controlled thermal expansion coefficient
EP1208402A2 (en) * 2000-03-01 2002-05-29 Raytheon Company Semi-active focus and thermal compensation of a centrally-obscured reflective telescope
US20020141699A1 (en) * 2001-02-13 2002-10-03 Broptics Communication Corporation Optical fiber bragg grating thermal compensating device and method for manufacturing same
CN102636838A (en) * 2012-05-16 2012-08-15 杭州联光电子有限公司 Package method and device for fiber bragg grating with adjustable central wavelength and adjustable temperature coefficient
CN103134609A (en) * 2011-11-23 2013-06-05 成都酷玩网络科技有限公司 High-sensitivity fiber bragg grating temperature sensor with adjustable sensitivity coefficient
CN203164521U (en) * 2013-03-18 2013-08-28 中国工程物理研究院应用电子学研究所 Simple Cassegrain type beam expanding device
CN104166217A (en) * 2014-08-25 2014-11-26 中国电子科技集团公司第十一研究所 Large-aperture off-axis optical system and passive athermal method
CN106951597A (en) * 2017-02-24 2017-07-14 上海理工大学 Electro spindle thermal distortion compensation method for designing based on carbon fibre material heat-shrinkable
CN110018547A (en) * 2018-01-09 2019-07-16 北京振兴计量测试研究所 The passive athermal device of machinery for wide temperature range infrared collimator
CN210427946U (en) * 2019-08-06 2020-04-28 南京英田光学工程股份有限公司 Main beam expanding system for thermal deformation control based on adjustable and reverse thermal compensation

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000269391A (en) * 1999-03-18 2000-09-29 Mitsubishi Electric Corp Thermal distortion absorber and power semiconductor device using the same
EP1208402A2 (en) * 2000-03-01 2002-05-29 Raytheon Company Semi-active focus and thermal compensation of a centrally-obscured reflective telescope
WO2002039160A1 (en) * 2000-11-09 2002-05-16 Cambridge University Technical Services Ltd. Platform with controlled thermal expansion coefficient
US20020141699A1 (en) * 2001-02-13 2002-10-03 Broptics Communication Corporation Optical fiber bragg grating thermal compensating device and method for manufacturing same
CN103134609A (en) * 2011-11-23 2013-06-05 成都酷玩网络科技有限公司 High-sensitivity fiber bragg grating temperature sensor with adjustable sensitivity coefficient
CN102636838A (en) * 2012-05-16 2012-08-15 杭州联光电子有限公司 Package method and device for fiber bragg grating with adjustable central wavelength and adjustable temperature coefficient
CN203164521U (en) * 2013-03-18 2013-08-28 中国工程物理研究院应用电子学研究所 Simple Cassegrain type beam expanding device
CN104166217A (en) * 2014-08-25 2014-11-26 中国电子科技集团公司第十一研究所 Large-aperture off-axis optical system and passive athermal method
CN106951597A (en) * 2017-02-24 2017-07-14 上海理工大学 Electro spindle thermal distortion compensation method for designing based on carbon fibre material heat-shrinkable
CN110018547A (en) * 2018-01-09 2019-07-16 北京振兴计量测试研究所 The passive athermal device of machinery for wide temperature range infrared collimator
CN210427946U (en) * 2019-08-06 2020-04-28 南京英田光学工程股份有限公司 Main beam expanding system for thermal deformation control based on adjustable and reverse thermal compensation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115308918A (en) * 2022-09-29 2022-11-08 中国科学院长春光学精密机械与物理研究所 Machine body device of large-caliber coaxial collimator
CN115308918B (en) * 2022-09-29 2023-01-03 中国科学院长春光学精密机械与物理研究所 Machine body device of large-caliber coaxial collimator

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