CN110449413A - A kind of laser chamber endoparticle inspection arranging device - Google Patents
A kind of laser chamber endoparticle inspection arranging device Download PDFInfo
- Publication number
- CN110449413A CN110449413A CN201810431941.9A CN201810431941A CN110449413A CN 110449413 A CN110449413 A CN 110449413A CN 201810431941 A CN201810431941 A CN 201810431941A CN 110449413 A CN110449413 A CN 110449413A
- Authority
- CN
- China
- Prior art keywords
- suction nozzle
- ultraviolet lamp
- dust catcher
- laser chamber
- arranging device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
Landscapes
- Cleaning In General (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention relates to field of laser device technology, disclose a kind of laser chamber endoparticle inspection arranging device, which includes: ultraviolet lamp, suction nozzle and dust catcher；Ultraviolet lamp issues ultraviolet light and finds intracavitary particle for naked eyes macroscopic examination, the light of ultraviolet lamp is radiated at the front end of suction nozzle, the rear end of suction nozzle is connected with dust catcher, suction nozzle is in elongate shape, there is first passage inside suction nozzle, first passage runs through suction nozzle from the front end of suction nozzle to rear end, and first passage is connected with the suction inlet of dust catcher.A kind of laser chamber endoparticle provided by the invention examines arranging device, and setting ultraviolet lamp, can the intracavitary microparticle of with the naked eye macroscopic examination discovery in intracavitary generation fluorescence；Setting suction nozzle can go deep into narrow space, carry out the exclusion of short distance strong attraction to the microparticle of device surface；By making ultraviolet light in the front end range of suction nozzle, suction nozzle can be made accurately to arrive at microparticle and precisely excluded, inspection row's effect is improved；So that it is guaranteed that it is clean in laser chamber, ensure laser device reliability.
Description
Technical field
The present invention relates to field of laser device technology, examine arranging device more particularly to a kind of laser chamber endoparticle.
Background technique
Currently, high power (ultra high power) laser is in industry and military field using more and more extensive, cost is high,
Structure is complicated, and maintenance cycle is long, therefore the reliability index of superpower laser is more and more important.However, in superpower laser
Surface optical device carries high laser power density, will after the intracavitary microparticle of surface optical device absorption laser
Hot part can be caused sharply to accumulate, the membrane damage or beam quality being coated with so as to cause surface optical device deteriorate, and reduce high
The reliability of power laser diode.
The intracavitary microparticle elimination technique of existing laser mainly has: dust catcher elimination technique, is arranged with strong wind dust catcher
Except the intracavitary microparticle of laser；High-purity gas replacement technique, with the intracavity gas of high-purity gas (such as nitrogen) displacement laser
Exclude suspension microparticle；Installation auxiliary remover apparatus technology installs the devices such as electrostatic for excluding in laser cavity in laser cavity
Microparticle.
But for high power (ultra high power) laser, the intracavitary microparticle elimination technique of above-mentioned existing laser is deposited
In deficiency: firstly, because the intraluminal device of superpower laser is more, structure is complicated, there is adherency on narrow space, part of devices surface
Power, and the prior art can not reach part of devices surface and carry out the exclusion of short distance strong attraction, lead to the intracavitary microparticle row in part
Except difficulty；Secondly, above-mentioned intracavitary microparticle elimination technique can not visual inspection discovery laser intracavitary microparticle, especially those
Visually sightless microparticle is thorough it is even more impossible to intuitively ensure to exclude.In use, those are not thorough for superpower laser
There is certain probability to be adsorbed on the film that surface optical device is coated with after the intracavitary microparticle random motion that bottom excludes, while there is also
Intracavitary microparticle is adsorbed onto the situation on the film that surface optical device is coated with, laser in exclusion process because external disturbance is elegant
Reliability Customers ' Legal Right.
It is existing that exist mostly for microparticle elimination technique in high power (ultra high power) laser chamber can not be to inside
Device surface carry out short distance strong attraction exclude microparticle the technical issues of, and can not macroscopic examination ensure intracavitary microparticle
Exclude thorough technical problem.
Summary of the invention
(1) technical problems to be solved
The object of the present invention is to provide a kind of laser chamber endoparticles to examine arranging device, solves for solution or part existing
Internal device surface can not be carried out closely by existing mostly for microparticle elimination technique in high power (ultra high power) laser chamber
Apart from strong attraction exclude microparticle, and can not macroscopic examination ensure that intracavitary microparticle excludes thorough technical problem.
(2) technical solution
In order to solve the above technical problem, the present invention provides a kind of laser chamber endoparticles to examine arranging device, which includes:
Ultraviolet lamp, suction nozzle and dust catcher；The ultraviolet lamp issues ultraviolet light and finds intracavitary particle for naked eyes macroscopic examination, described ultraviolet
The light of lamp is radiated at the front end of the suction nozzle, and the rear end of the suction nozzle is connected with the dust catcher, and the suction nozzle is in elongate shape,
There is first passage, the first passage runs through the suction nozzle from the front end of the suction nozzle to rear end, described inside the suction nozzle
First passage is connected with the suction inlet of the dust catcher.
On the basis of above scheme, the dust catcher is that wind-force swashs with electrostatic force mixing dust catcher, for excluding to fix
The intracavitary particle of light device, dust catcher inside setting electric exhaust fan and high voltage electric field, the electric exhaust fan are strong for generating
Wind attraction, the high voltage electric field is for generating electrostatic adsorption force.
On the basis of above scheme, inefficient filtering reticular structure, the inefficient filter screen are set inside the dust catcher
Shape structure is for being filtered interception to the particle of attraction.
On the basis of above scheme, a kind of laser chamber endoparticle inspection arranging device further include: operation handle；The operation
One end of handle is connected with the rear end of the suction nozzle, and the other end of the operation handle is connected by hose with the dust catcher,
There is second channel, the first passage, second channel and hose are connected inside the operation handle.
On the basis of above scheme, a supporting block, the supporting block are fixedly installed on the lateral wall of the operation handle
It is inclined-plane away from an end face of the operation handle, a groove parallel with the inclined-plane is set on the inclined-plane, it is described ultraviolet
The front end that lamp is placed in the groove and the light of the ultraviolet lamp is made to be radiated at the suction nozzle.
On the basis of above scheme, convex block, the convex block position are set in the light end out of the ultraviolet lamp, the groove
In the lower edge of the ultraviolet lamp light hole, the convex block is for being supported and positioning to the ultraviolet lamp.
On the basis of above scheme, at least one fixation hole is set, the fixation hole is used for described in the groove
Ultraviolet lamp carries out installation fixation.
On the basis of above scheme, the suction nozzle has magnetism；The suction nozzle is fabricated from a flexible material.
On the basis of above scheme, the first passage and the second channel are circle, and the first passage and
The diameter of the second channel is equal are as follows: 0.2mm-20mm；The internal diameter of the hose are as follows: 0.2mm-20mm；The light of the ultraviolet lamp
The axis crosspoint of line and the suction nozzle is at a distance from the suction nozzle front end surface are as follows: 1mm-10mm.
On the basis of above scheme, the suction nozzle, operation handle, hose and dust catcher are sequentially connected and in junctions
It is detachably connected respectively by threaded fastener, at the interface position of the threaded fastener, setting O encloses sealing.
(3) beneficial effect
A kind of laser chamber endoparticle provided by the invention examines arranging device, and ultraviolet lamp is arranged, can make in intracavitary generation fluorescence
Microparticle naked eyes as it can be seen that can with the naked eye macroscopic examination find intracavitary microparticle, avoid the blindness of existing blind elimination technique；If
Suction nozzle is set, narrow space can be goed deep into, the exclusion of short distance strong attraction is carried out to the microparticle of device surface；It is set by special angle
Ultraviolet lamp is set, makes ultraviolet light in the front end range of suction nozzle, suction nozzle can be made accurately to arrive at microparticle position and carry out essence
Standard excludes, and improves inspection row's effect.
The inspection arranging device makes intracavitary microparticle have no place to hide, it is ensured that superpower laser is clean, prevents intracavitary microparticle and inhales
It is attached in surface optical device plating film, optical device membrane damage caused by avoiding therefore or beam quality deteriorate, to protect
Hinder the reliability of superpower laser, saves maintenance time and economic cost.
Detailed description of the invention
Fig. 1 is the overall structure diagram that arranging device is examined according to a kind of laser chamber endoparticle of the embodiment of the present invention；
Fig. 2 is the front view that operation handle in arranging device is examined according to a kind of laser chamber endoparticle of the embodiment of the present invention；
Fig. 3 is the cross-sectional view that operation handle in arranging device is examined according to a kind of laser chamber endoparticle of the embodiment of the present invention；
Fig. 4 is the structural schematic diagram that suction nozzle in arranging device is examined according to a kind of laser chamber endoparticle of the embodiment of the present invention；
Fig. 5 is the structural schematic diagram that hose in arranging device is examined according to a kind of laser chamber endoparticle of the embodiment of the present invention.
Description of symbols:
1-ultraviolet lamp；2-dust catchers；3-hoses；
4-operation handles；5-suction nozzles；6-pedal switch；
7-inclined-planes.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Following instance
For illustrating the present invention, but it is not intended to limit the scope of the invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The present embodiment provides a kind of laser chamber endoparticle inspection arranging device according to the present invention, and with reference to Fig. 1, which includes:
Ultraviolet lamp 1, suction nozzle 5 and dust catcher 2；The ultraviolet lamp 1 issues ultraviolet light and finds intracavitary particle for naked eyes macroscopic examination, described
The light of ultraviolet lamp 1 is radiated at the front end of the suction nozzle 5, and the rear end of the suction nozzle 5 is connected with the dust catcher 2, the suction nozzle 5
It is in elongate shape, there is first passage, the first passage runs through institute from the front end of the suction nozzle 5 to rear end inside the suction nozzle 5
Suction nozzle 5 is stated, the first passage is connected with the suction inlet of the dust catcher 2.
A kind of laser chamber endoparticle provided in this embodiment examines arranging device, and setting ultraviolet lamp 1 is used for naked eyes macroscopic examination
It was found that intracavitary microparticle.The intracavitary microparticle position that suction nozzle 5 arrives at inspected discovery for protruding into narrow space is set, is realized close
It is excluded apart from strong attraction.
Ultraviolet lamp 1 is arranged using special angle, and ultraviolet lamp 1 and suction nozzle 5 should meet specific position angular relationship, so that ultraviolet
The light that lamp 1 issues is irradiated to the front end range of suction nozzle 5, i.e., is just irradiated at a certain distance from the front of suction nozzle 5.
Ultraviolet lamp 1, which is irradiated in laser chamber, can produce fluorescence, so as to keep intracavitary microparticle naked eyes visible.
The light of ultraviolet lamp 1 is irradiated to the front end range of suction nozzle 5, so that excluding using suction nozzle 5 to microparticle
When, microparticle suction nozzle 5 front end range under the irradiation of ultraviolet light naked eyes as it can be seen that can clearly see the position of microparticle clearly,
Microparticle position is directly arrived at convenient for suction nozzle 5, improves inspection row's effect.
Suction nozzle 5 is connected by hose 3 with dust catcher 2.Dust catcher 2 generates attraction to microparticle, by microparticle by inhaling
Mouth 5 and hose 3 are sucked out from intracavitary into dust catcher 2.First passage is set inside suction nozzle 5, first passage runs through suction nozzle 5, and
First passage is arranged along from 5 front end of suction nozzle to the direction of rear end.First passage is connected with hose 3, so that 5 front end of suction nozzle is micro-
Particle flows through first passage and hose 3 into dust catcher 2 under the attraction of dust catcher 2.
The rear end of suction nozzle 5 can also be connected by other any connection pipes with dust catcher 2, to be able to achieve first passage and dust suction
For the purpose of the suction inlet of device 2 is connected, do not limit this.
Set elongate for suction nozzle 5, with adapt to superpower laser intraluminal device is more, structure is complicated, narrow space with
And there is the environment of adhesion strength on part of devices surface.Elongated suction nozzle 5 convenient for protrude between intracavitary and each device to microparticle into
Row is closely effective to be removed.
A kind of laser chamber endoparticle provided in this embodiment examines arranging device, and ultraviolet lamp 1 is arranged, can be glimmering in intracavitary generation
Light, make microparticle naked eyes as it can be seen that can with the naked eye macroscopic examination find intracavitary microparticle, avoid the blindness of existing blind elimination technique
Property；Suction nozzle 5 is set, narrow space can be goed deep into, the exclusion of short distance strong attraction is carried out to the microparticle of device surface；By special
Ultraviolet lamp 1 is arranged in angle, makes ultraviolet light in the front end range of suction nozzle 5, suction nozzle 5 can be made accurately to arrive at microparticle institute in place
It sets and is precisely excluded, improve inspection row's efficiency and effect.
The inspection arranging device makes intracavitary microparticle have no place to hide, it is ensured that superpower laser is clean, prevents intracavitary microparticle and inhales
It is attached in surface optical device plating film, optical device membrane damage caused by avoiding therefore or beam quality deteriorate, to protect
Hinder the reliability of superpower laser, saves maintenance time and economic cost.
Further, the wavelength that ultraviolet lamp 1 generates ultraviolet light can be 295nm-420nm.For microparticle, in normal illumination
Under be often difficult to be found, even more difficulty detects by an unaided eye.Experiment proves that laser chamber is under the irradiation of ultraviolet light fluorescence, it can
Show microparticle clearly, realizes the directly visible of naked eyes, therefore the present embodiment is based on verification experimental verification and ultraviolet lamp 1 is arranged, from
And avoid and other complex components for being used to find microparticle are set, making inspection arranging device, structure is simple and easy to implement.
By ultraviolet light for make microparticle naked eyes macroscopic examination find for the purpose of, the wavelength of ultraviolet light is preferably 295nm-
420nm。
On the basis of the above embodiments, further, the dust catcher 2 is wind-force and electrostatic force mixing dust catcher 2, use
In excluding lock chamber endoparticle, electric exhaust fan is set inside the dust catcher 2 and high voltage electric field, the electric exhaust fan are used for
High wind attraction is generated, the high voltage electric field is for generating electrostatic adsorption force.
On the basis of the above embodiments, further, inefficient filtering reticular structure, institute are set inside the dust catcher 2
Inefficient filtering reticular structure is stated for being filtered interception to the particle of attraction.
The present embodiment based on the above embodiment, is illustrated the setting of dust catcher 2.Dust catcher 2 is used for microparticle
Attraction is generated, it is fixed from intracavitary exclusion.Suction is mixed with electrostatic force using wind-force in inspection arranging device provided in this embodiment
Dirt device 2 had both generated wind-force attraction to microparticle, while having generated electrostatic adsorption force.
Wind-force and electrostatic force mixing dust catcher 2, for excluding the intracavitary microparticle of fixed laser；Can produce high wind attraction and
Strong electrostatic adsorption force mixing force, wherein high wind attraction is generated by high-speed rotation electric exhaust fan, intuitive for excluding
Check the intracavitary microparticle of discovery；The intracavitary microparticle excluded by high wind attraction transmits arrival after flowing through suction nozzle 5 and hose 3
At the microparticle collector for mixing dust catcher 2.
Electrostatic adsorption force is generated by setting high voltage electric field in dust catcher 2, generates electrostatic to microparticle in dust catcher 2
Adsorption capacity excludes the smaller lighter microparticle that transmission comes by high wind attraction for securely fixing, prevents smaller lighter
Microparticle spills into open space and is floatd again into high power laser light chamber.
Further, inefficient filtering reticular structure is set inside dust catcher 2, and inefficient filtering reticular structure and wind-force flow
Direction is vertically arranged.Heavier biggish microparticle is filtered interception by inefficient filtering reticular structure.By heavier biggish micro-
Grain is blocked at inefficient filtering reticular structure, is removed convenient for being collected concentration to these impurity.
Inefficient filtering reticular structure is the biggish filtering reticular structure of mesh, is mainly used for intercepting the larger heavier particle of blocking
Pass through.If comparatively dense filtering reticular structure is arranged, it will lead to microparticle and accumulated at filtering reticular structure, it can be right
The flowing of wind-force forms resistance, to increase windage, reduces the attraction to microparticle in laser chamber.
Further, setting pedal switch 6 is connected with dust catcher 2, and pedal switch 6 is used to control the start and stop of dust catcher 2.If
Pedal switch 6 is set, the personnel that are convenient to operation control dust catcher 2.
On the basis of the above embodiments, further, with reference to Fig. 1, a kind of laser chamber endoparticle inspection arranging device is also wrapped
It includes: operation handle 4；One end of the operation handle 4 is connected with the rear end of the suction nozzle 5, and the other end of the operation handle 4 is logical
It crosses hose 3 to be connected with the dust catcher 2, there is second channel, the first passage, second channel inside the operation handle 4
And hose 3 is connected.
Based on the above embodiment, operation handle 4 is arranged in the present embodiment, hand-held for staff, and control suction nozzle 5 is facilitated to support
Up at particle.Operation handle 4 is arranged between suction nozzle 5 and hose 3.The both ends of operation handle 4 respectively with the rear end of suction nozzle 5 and soft
One end of pipe 3 is connected.
And should have second channel inside operation handle 4, second channel runs through operation handle 4.And it is first passage, second logical
Road and hose 3 are sequentially connected, and form a channel being connected.Operation handle 4 can be any shape, to facilitate operation personnel's hand
For the purpose of holding, this is not construed as limiting.
On the basis of the above embodiments, further, it with reference to Fig. 2, is fixedly installed on the lateral wall of the operation handle 4
One supporting block, the supporting block are inclined-plane 7 away from an end face of the operation handle 4, on the inclined-plane 7 setting one with it is described tiltedly
The parallel groove in face 7, the ultraviolet lamp 1 are placed in the groove and the light of the ultraviolet lamp 1 are made to be radiated at the suction
The front end of mouth 5.
The present embodiment based on the above embodiment, further explains the structure and purposes of operation handle 4.It is ultraviolet
Lamp 1 can be fixed by operation handle 4 and meet special angle positional relationship.
The lateral wall of operation handle 4 is fixedly connected with a supporting block.One end face of the supporting block and the outside of operation handle 4
Wall is connected.The supporting block and the opposed other end in the end face are inclined-plane 7 away from the end face of operation handle 4, have inclination
Degree.
A groove is set on end face of the supporting block away from operation handle 4.Groove is arranged along inclined-plane 7, with place inclined-plane 7
Gradient having the same.Ultraviolet lamp 1 is placed in a groove, and the light hole of ultraviolet lamp 1 is arranged towards suction nozzle 5.
The angle on supporting block inclined-plane 7 is consistent with the angle of the angle of groove and ultraviolet lamp 1.The inclined-plane 7 and groove
Angle should meet special angle positional relationship by design, and the light of ultraviolet lamp 1 should be made to meet and above-mentioned be radiated at suction nozzle 5
Front end within the scope of.
Specifically, the gradient of ultraviolet lamp 1 changes according to the length of suction nozzle 5 and is changed, and is irradiated always with meeting ultraviolet light
For the purpose of in 5 front end a certain range of suction nozzle.
On the basis of the above embodiments, further, with reference to Fig. 3, go out light end, the groove in the ultraviolet lamp 1
Interior setting convex block, the convex block are located at the lower edge of 1 light hole of ultraviolet lamp, the convex block be used for the ultraviolet lamp 1 into
Row support and positioning.
On the basis of the above embodiments, further, at least one fixation hole, the fixation hole are set in the groove
For carrying out installation fixation to the ultraviolet lamp 1.
Further, in convex block of one end of groove setting higher than bottom portion of groove.Convex block is located at one that ultraviolet lamp 1 goes out light
End.Convex block can be located at the lower edge of 1 light hole of ultraviolet lamp, be supported to light hole, so that ultraviolet lamp 1 is supported and be consolidated
It is fixed.Setting convex block is supported ultraviolet lamp 1, can keep the firm of ultraviolet lamp 1, keep the light issued more stable.
Further, at least one settable mounting hole in groove can pass through the side such as screw thread to ultraviolet lamp 1 at mounting hole
Formula is fixed, and keeps ultraviolet lamp 1 more firm.Mounting hole can be the blind hole being arranged in groove, not limit this.
On the basis of the above embodiments, further, the suction nozzle 5 has magnetism；The suction nozzle 5 is by flexible material system
At.
Set suction nozzle 5 to there is magnetism, suction nozzle 5, which can attract, twists screw in adjustment superpower laser process and generate
Metallic particles.Suction nozzle 5 can be used magnetic material and be made, and can also have magnetism by magnetization treatment, not limit this.
Suction nozzle 5 should have flexibility, can carry out a degree of deformation.Preferably, the flexible degree of suction nozzle 5 is adult both hands
Suction nozzle 5 can firmly deformed, to adapt to different narrow space conditions.
On the basis of the above embodiments, further, the first passage and the second channel are circle, and described
The diameter of first passage and the second channel is equal are as follows: 0.2mm-20mm；The internal diameter of the hose 3 are as follows: 0.2mm-20mm；It is described
The axis crosspoint of the light of ultraviolet lamp 1 and the suction nozzle 5 is at a distance from 5 front end surface of the suction nozzle are as follows: 1mm-10mm.
The present embodiment based on the above embodiment, illustrates the size of each component in inspection arranging device.First is logical
Road and second channel can be circular channel.And it is 0.2mm-20mm that the diameter of first passage and second channel, which can be diameter,.Hose 3
Inner wall is circle, and diameter can be 0.2mm-20mm.
With reference to Fig. 4, whole suction nozzle 5 can be the cylinder of elongate, and suction nozzle 5 is straight close to one section of lateral wall of operation handle 4
Diameter is greater than one section of outer sidewall diameter of the suction nozzle 5 far from operation handle 4.Suction nozzle 5 can be with 4 coupling part overall diameter of operation handle
5mm-22mm, and rest part overall diameter can be 0.5-22mm.And 5 whose forwardmost end portions of suction nozzle are smooth, convenient for protruding into narrow space
It is interior.
Ultraviolet lamp 1 and suction nozzle 5 meet special angle positional relationship, can make the optical axis for installing rear ultraviolet lamp 1 and suction nozzle 5
Axis intersects in the distance range of 5 front end 1mm-10mm of suction nozzle.
Further, first passage, second channel and hose 3 can coaxially connected formation channels.
Further, first passage and hose 3 directly can be connected to form channel, at this point, can be by suction nozzle 5 and hose 3
The side connection of operation handle 4 is set, the channel of particulate removal can be formed, while settable operation handle 4 is convenient for artificial
Operation, does not limit this.
With reference to Fig. 5, hose 3 is the tubular structure that both ends have connector.One end of hose 3 be connected with operation handle 4 or
Person is directly connected with suction nozzle 5, and the other end of hose 3 is connected with dust catcher 2.
On the basis of the above embodiments, further, the suction nozzle 5, operation handle 4, hose 3 and dust catcher 2 according to
It is secondary to be connected and pass through threaded fastener respectively in junction and be detachably connected, it is set at the interface position of the threaded fastener
Set O circle sealing.
The rear end of suction nozzle 5 and 4 connecting place of operation handle, operation handle 4 and 3 connecting place of hose and hose 3 and dust catcher 2
Connecting place can be attached by threaded fastener.And enclose and be sealed in the interface position of threaded fastener setting O, to protect
It demonstrate,proves the attraction effect of wind-force attraction and prevents particle from overflowing and disorderly fly.
Embodiment 1:
On the basis of the above embodiments, further, a kind of laser chamber endoparticle inspection arranging device includes ultraviolet lamp 1,
Wind-force and electrostatic force mixing dust catcher 2, hose 3, operation handle 4, magnetic force suction nozzle 5 and pedal switch 6.
Ultraviolet lamp 1 finds intracavitary microparticle for naked eyes macroscopic examination；Ultraviolet lamp 1 is mounted on oblique recessed in operation handle 4
On slot, meet specific position angular relationship.Oblique groove upper surface and 1 housing side of ultraviolet lamp are tangent.Oblique groove is leaning near ultraviolet
Lamp 1 goes out light one end and stays convex block, and bump height is lower than the lower edge of 1 light hole of ultraviolet lamp.Bump height is 1.5mm, for positioning
And support ultraviolet lamp 1.
4 fixed M3 screw holes, screw hole depth 10mm, for fixing ultraviolet lamp 1 are stayed in oblique groove.Ultraviolet lamp 1 issues
Illumination is mapped to the front end range of magnetic force suction nozzle 5.The optical axis and 5 axis of magnetic force suction nozzle for installing rear ultraviolet lamp 1 intersect at magnetic force
At the 5 front end position 5mm of suction nozzle.
Ultraviolet lighting, which is mapped to the intracavitary generation fluorescence of superpower laser, makes intracavitary microparticle naked eyes as it can be seen that ensure operation
Personnel realize that naked eyes macroscopic examination finds intracavitary microparticle, avoid existing blind elimination technique；Ensure intracavitary microparticle simultaneously
It is transferred in attracting exclusion process.The a length of 295nm-420nm of ultraviolet light wave, radiant power are greater than 0.1mW, beam divergence angle
Better than 100mrad.
Wind-force is with electrostatic force mixing dust catcher 2 for excluding the intracavitary microparticle of fixed laser.The mixing dust catcher 2 can produce
High wind attraction and strong electrostatic adsorption force mixing force；Wherein high wind attraction is generated by high-speed rotation electric exhaust fan, is turned
Speed is greater than 400 revolutions per seconds.The intracavitary microparticle found by macroscopic examination is excluded by magnetic force suction nozzle 5.It is excluded by high wind attraction
Transmission reaches the microparticle collection for mixing dust catcher 2 after intracavitary microparticle flows through magnetic force suction nozzle 5, operation handle 4, hose 3
At device.
In order to reduce influence of the windage to high wind attraction, double-filtration interception mode is used inside dust catcher 2: first
Interception is filtered using inefficient filtering reticular structure, heavier and big microparticle is intercepted；Then it is inhaled using strong electrostatic
Lighter and small microparticle is filtered interception by attached power, is securely fixed, and prevents microparticle from spilling into open space and again
It floats into high power laser light chamber；And strong electrostatic adsorption force is generated by the interior high voltage electric field that sets.
Operation handle 4 is hand-held for staff, operates convenient for staff.Operation handle 4 is also used to special bit angle setting
Degree installation ultraviolet lamp 1, hose 3 and magnetic force suction nozzle 5.There are circular second channel, second channel diameter inside operation handle 4
For 2mm.
5 carrying magnetic of magnetic force suction nozzle can attract in the metallic particles that adjustment superpower laser process twists screw and generates.Magnetic
There is circular first passage, the diameter of first passage is 2mm in power suction nozzle 5.Suction nozzle 5 with it is straight outside 4 coupling part of operation handle
Diameter is 5mm, and rest part overall diameter is 3mm, and whose forwardmost end portions are smooth；Adult both hands can firmly be such that magnetic force suction nozzle 5 deforms,
Adapt to different narrow space conditions.
Pedal switch 6, for controlling the start and stop of wind-force with electrostatic force mixing dust catcher 2.
Wind-force and electrostatic force mixing dust catcher 2, hose 3, operation handle 4, magnetic force suction nozzle 5 be connected to each other position use
Threaded fastener is fixed, and screw thread specification is M5 × 0.75, and interface position is arranged O and encloses sealing.It is φ 3, thickness that O, which encloses specification interior diameter,
For 1.8mm, material is silicon rubber.First passage, second channel and hose 3 are coaxially connected, form channel.
A kind of laser chamber endoparticle of the present embodiment examines arranging device, can not reach device for solving existing elimination technique
Part surface causes the intracavitary microparticle in part to exclude difficult technical problem, and solves existing elimination technique and belong to a kind of blind row
Remove, can not visual inspection discovery laser intracavitary microparticle exclude thorough technical problem, to ensure high power (superelevation function
Rate) laser reliability.
The inspection arranging device issues light irradiation using the ultraviolet light that specific position angular relationship is mounted in operation handle 4 is met
Make intracavitary microparticle naked eyes to the intracavitary generation fluorescence of superpower laser as it can be seen that realizing intracavitary micro- of naked eyes macroscopic examination discovery
Grain；Further the magnetic force suction nozzle 5 of special designing is combined to find macroscopic examination with electrostatic force mixing dust catcher 2 by wind-force
Intracavitary microparticle carries out precisely excluding to fix.
Naked eyes macroscopic examination discovery may be implemented using the inspection arranging device and exclude the intracavitary micro- of fixed superpower laser
Particle makes intracavitary microparticle have no place to hide, it is ensured that the intracavitary cleaning of superpower laser prevents intracavitary microparticle and is adsorbed onto optics device
Cause hot part sharply to accumulate and the optical device membrane damage of superpower laser or beam quality is caused to deteriorate on part film, protects
Hinder the reliability of superpower laser.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of laser chamber endoparticle examines arranging device characterized by comprising ultraviolet lamp, suction nozzle and dust catcher；It is described ultraviolet
Lamp issues ultraviolet light and finds intracavitary particle for naked eyes macroscopic examination, before the light of the ultraviolet lamp is radiated at the suction nozzle
End, the rear end of the suction nozzle are connected with the dust catcher, and the suction nozzle is in elongate shape, have first passage inside the suction nozzle,
The first passage runs through the suction nozzle, the sucking of the first passage and the dust catcher from the front end of the suction nozzle to rear end
Mouth is connected.
2. laser chamber endoparticle according to claim 1 examines arranging device, which is characterized in that the dust catcher be wind-force with
Electrostatic force mixing dust catcher, for excluding the intracavitary particle of fixed laser, setting electric exhaust fan and height inside the dust catcher
Piezoelectric field, the electric exhaust fan is for generating high wind attraction, and the high voltage electric field is for generating electrostatic adsorption force.
3. laser chamber endoparticle according to claim 2 examines arranging device, which is characterized in that setting inside the dust catcher
Inefficient filtering reticular structure, the inefficient filtering reticular structure is for being filtered interception to the particle of attraction.
4. laser chamber endoparticle according to claim 1 or 2 or 3 examines arranging device, which is characterized in that further include: operation
Handle；One end of the operation handle is connected with the rear end of the suction nozzle, and the other end of the operation handle passes through hose and institute
It states dust catcher to be connected, there is second channel inside the operation handle, the first passage, second channel and hose are connected
It is logical.
5. laser chamber endoparticle according to claim 4 examines arranging device, which is characterized in that the outside of the operation handle
A supporting block is fixedly installed on wall, the supporting block is inclined-plane away from an end face of the operation handle, is arranged on the inclined-plane
One groove parallel with the inclined-plane, the ultraviolet lamp are placed in the groove and the light of the ultraviolet lamp are radiated at
The front end of the suction nozzle.
6. laser chamber endoparticle according to claim 5 examines arranging device, which is characterized in that go out light in the ultraviolet lamp
Convex block is set in end, the groove, and the convex block is located at the lower edge of the ultraviolet lamp light hole, and the convex block is used for described
Ultraviolet lamp is supported and positions.
7. laser chamber endoparticle according to claim 6 examines arranging device, which is characterized in that be arranged at least in the groove
One fixation hole, the fixation hole is for carrying out installation fixation to the ultraviolet lamp.
8. laser chamber endoparticle according to claim 1 or 2 or 3 examines arranging device, which is characterized in that the suction nozzle has
It is magnetic；The suction nozzle is fabricated from a flexible material.
9. laser chamber endoparticle according to claim 4 examines arranging device, which is characterized in that the first passage and described
Second channel is circle, and the diameter of the first passage and the second channel is equal are as follows: 0.2mm-20mm；The hose it is interior
Diameter are as follows: 0.2mm-20mm；The axis crosspoint of the light of the ultraviolet lamp and the suction nozzle and the suction nozzle front end surface away from
From are as follows: 1mm-10mm.
10. laser chamber endoparticle according to claim 4 examines arranging device, which is characterized in that the suction nozzle, manipulator
Handle, hose and dust catcher are sequentially connected and pass through threaded fastener respectively in junction and be detachably connected, in the spiral shell
The interface position setting O of line fastener encloses sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810431941.9A CN110449413B (en) | 2018-05-08 | 2018-05-08 | Laser intracavity particle detecting and arranging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810431941.9A CN110449413B (en) | 2018-05-08 | 2018-05-08 | Laser intracavity particle detecting and arranging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110449413A true CN110449413A (en) | 2019-11-15 |
| CN110449413B CN110449413B (en) | 2021-06-25 |
Family
ID=68480260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810431941.9A Active CN110449413B (en) | 2018-05-08 | 2018-05-08 | Laser intracavity particle detecting and arranging device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110449413B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5047072A (en) * | 1988-11-10 | 1991-09-10 | Surgical Laser Products, Inc. | Ultraviolet air enhancement and laser plume evacuation method and system |
| DE19807353A1 (en) * | 1998-01-30 | 1999-08-05 | Haug Gmbh & Co Kg | Air ionization apparatus |
| CN1770388A (en) * | 2004-11-03 | 2006-05-10 | 力晶半导体股份有限公司 | Cleaning clamp for wafer carrying bench of semiconductor machine |
| CN204294090U (en) * | 2014-11-20 | 2015-04-29 | 武汉华日精密激光有限责任公司 | A kind of laser optical cavity circulation high purification system for sealing |
| CN205128186U (en) * | 2015-11-30 | 2016-04-06 | 上海依瓦达环境技术有限公司 | Static adsorption of air filtration system |
| CN205667970U (en) * | 2016-06-12 | 2016-11-02 | 重庆沣品科技有限责任公司 | A kind of air gun for electronic product assembling |
| CN206424731U (en) * | 2017-01-02 | 2017-08-22 | 陈万法 | A kind of electric automatization industrial dedusting device |
-
2018
- 2018-05-08 CN CN201810431941.9A patent/CN110449413B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5047072A (en) * | 1988-11-10 | 1991-09-10 | Surgical Laser Products, Inc. | Ultraviolet air enhancement and laser plume evacuation method and system |
| DE19807353A1 (en) * | 1998-01-30 | 1999-08-05 | Haug Gmbh & Co Kg | Air ionization apparatus |
| CN1770388A (en) * | 2004-11-03 | 2006-05-10 | 力晶半导体股份有限公司 | Cleaning clamp for wafer carrying bench of semiconductor machine |
| CN204294090U (en) * | 2014-11-20 | 2015-04-29 | 武汉华日精密激光有限责任公司 | A kind of laser optical cavity circulation high purification system for sealing |
| CN205128186U (en) * | 2015-11-30 | 2016-04-06 | 上海依瓦达环境技术有限公司 | Static adsorption of air filtration system |
| CN205667970U (en) * | 2016-06-12 | 2016-11-02 | 重庆沣品科技有限责任公司 | A kind of air gun for electronic product assembling |
| CN206424731U (en) * | 2017-01-02 | 2017-08-22 | 陈万法 | A kind of electric automatization industrial dedusting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110449413B (en) | 2021-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9694369B2 (en) | Air purifier device with ionizing means | |
| CN105588036B (en) | Dust catcher lighting device | |
| WO2019007378A1 (en) | Glass-cleaning robot capable of spraying water mist | |
| KR20140038899A (en) | Static eliminating and dust removing apparatus | |
| CN107468159A (en) | Dust suction subassembly and dust catcher | |
| CN105849473B (en) | The air purifier of air-conditioning | |
| CN110449413A (en) | A kind of laser chamber endoparticle inspection arranging device | |
| JP2014210003A (en) | Suction device | |
| KR20170025527A (en) | Sterilizing mask with electric precipitation | |
| CN107204561B (en) | Closed loop discharge excitation pulse repetition gas laser and its operation method | |
| CN109549776A (en) | Jet printing protecting device | |
| KR102198334B1 (en) | Wet Type Dust Collector having Multiple Nozzles with Electrospraying using Water Level Difference | |
| ES2953634T3 (en) | Cooking field device | |
| CN110035828A (en) | Electric dust collecting means and humidifying air clarifier including the electric dust collecting means | |
| CN1281328C (en) | Electric dust-collector | |
| WO2015025685A1 (en) | Ion generator and air conditioner | |
| KR102123851B1 (en) | Cyclone module capable of removing fine dust and ultrafine dust | |
| KR102022381B1 (en) | Apparatus for collecting fine dust | |
| CN208869644U (en) | A kind of coating machine with cleaning function | |
| CN105546663B (en) | Air purifier | |
| CN105546662B (en) | Air purifier | |
| CN110116268A (en) | Laser cutting device and sucking unit | |
| CN108856153B (en) | The positive and negative wind pressure automatic cleaning method of optical device | |
| TW201321543A (en) | Cleaning module and cleaning method for substrates and/or substrate carriers | |
| CN105725917B (en) | A kind of light carpet sweeper |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |