CN107204561B - Closed loop discharge excitation pulse repetition gas laser and its operation method - Google Patents
Closed loop discharge excitation pulse repetition gas laser and its operation method Download PDFInfo
- Publication number
- CN107204561B CN107204561B CN201710363586.1A CN201710363586A CN107204561B CN 107204561 B CN107204561 B CN 107204561B CN 201710363586 A CN201710363586 A CN 201710363586A CN 107204561 B CN107204561 B CN 107204561B
- Authority
- CN
- China
- Prior art keywords
- gas
- laser
- optical window
- electrostatic precipitation
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Abstract
The invention discloses a kind of closed loop discharge excitation pulse repetition gas laser and its operation method with automatically cleaning optical window based on electrostatic precipitation principle, laser includes laser bodies, pulsed discharge pumping source, resonant cavity, automatically cleaning optical window, gas-recycling plant, gas feed unit and vacuum unit；Automatically cleaning optical window is made of optical window cleaner and window；Optical window cleaner includes baffle box, tracheae and pneumatic filter.Pneumatic filter is based on electrostatic precipitation principle, including rectangular exocoel, air inlet, multiple layer metal net, electrostatic precipitation ionized region, electrostatic precipitation collecting region, ash bucket, end strainer, gas outlet and high-voltage DC power supply.When laser is run, the working gas of certain flow is drawn in blower exit from gas-recycling plant, the air-flow removes a large amount of particles that previous pulsed discharge generates through electrostatic precipitation and double-filtration in pneumatic filter, it is transformed into clean working gas, and give to laser optical window, realize the real-time automatically cleaning of laser optical window.
Description
Technical field
The present invention relates to discharge stimulation gas laser technology fields, more particularly, to having certainly based on electrostatic precipitation principle
Clean the closed loop discharge excitation pulse repetition gas laser and its operation method of optical window.
Background technique
Discharge excitation pulse repetition gas laser generallys use closed circulation mode, is put using gas-recycling plant realization
Electric zone gas Rapid replacement eliminates influence of the previous pulsed discharge to succeeding impulse.However in order to guarantee the electricity of laser
Insulation, laser optical window generally use outwardly protruding structure, and the gas in laser operational process in optical window cannot pass through gas
Circulator realizes effectively displacement, and a large amount of particles agglomerates for generation of discharging are in laser optical window region.These particles can be attached to
Window glass inner surface pollutes laser window glass, reduces the transmitance of window glass, and laser output energy is caused to reduce.
Summary of the invention
In order to solve the window glass pollution problem of discharge excitation pulse repetition gas laser, the present invention provides a kind of base
In the automatically cleaning optical window and closed loop discharge excitation pulse repetition gas laser of electrostatic precipitation principle.
The technical solution of the invention is as follows provides a kind of closed loop discharge excitation pulse repetition gas laser, including laser
Device main body 1, gas-recycling plant 4, gas feed unit 7 and vacuum unit 6, above-mentioned laser bodies 1 include entry/exit gas end
Mouthful, above-mentioned gas circulator 4 is connected to the entry/exit gas port of laser bodies 1, above-mentioned gas feed unit 7 and vacuum list
Member 6 is both connected on gas-recycling plant 4, is characterized in that
It further include automatically cleaning optical window 2, above-mentioned automatically cleaning optical window 2 includes window glass 11 and optical window cleaner；
Above-mentioned optical window cleaner includes baffle box 10 and pneumatic filter 9；
Above-mentioned baffle box 10 includes the inclined cylinder 101 in one end, and above-mentioned inner barrel has been arranged radially multiple energy dissipating pieces
102；Above-mentioned window glass 11 seals the beveled end for being fixed on cylinder 101, and the other end of cylinder 101 and the exit end of laser are close
Sealing connects；Secondary air interface 103 is opened up on cylinder 101；
Above-mentioned gas filter 9 includes cavity 98, the air inlet 91 being set on cavity 98 and gas outlet 92, above-mentioned air inlet
Mouth 91 is connected to by tracheae with gas-recycling plant 4, and above-mentioned gas outlet 92 passes through the secondary air interface 103 of tracheae and baffle box
Connection.
Preferably, multiple layer metal net 93, quiet is set gradually from air inlet to gas outlet in the cavity of above-mentioned gas filter
Electric precipitation ionized region 94, electrostatic precipitation collecting region 95, strainer 96；
Further include the adjustable power supply unit of output voltage, wall within the cavity insulating supporting 90 be located at electrostatic precipitation receive
Collect the ash bucket 97 below area；
Above-mentioned electrostatic precipitation ionized region includes multilayer plate ground electrode and netted high-field electrode, the ground electrode and high-voltage electricity
Pole cross parallel is placed, and high-field electrode is mounted on insulating supporting 90, is connected with power supply unit；Ground electrode is mounted on cavity 98
On, ground electrode and high-field electrode are parallel to gas flow direction；
Above-mentioned electrostatic precipitation collecting region includes plate ground electrode and plate high-field electrode, and ground electrode and high-field electrode intersect flat
Row is placed, and high-field electrode is mounted on insulating supporting 90, is connected with high-voltage DC power supply 99；Ground electrode is mounted on cavity 98,
Ground electrode and high-field electrode are parallel to gas flow direction.
Preferably, above-mentioned multiple layer metal net 93 is stainless (steel) wire；Electrostatic precipitation ionized region high-field electrode is stainless (steel) wire, ground
Electrode is stainless steel plate；Electrostatic precipitation collecting region high-field electrode and ground electrode are stainless steel plate；Strainer is fine using manganese-nickel
Dimension is made into.
Preferably, disk with holes centered on above-mentioned energy dissipating piece 102 further includes a caudal peduncle 107, will by caudal peduncle 107
Energy dissipating piece 102 is fixed on the cylinder 101 of baffle box.
Preferably, the both ends of baffle box cylinder 101 are provided with flange, and window glass 11 is mounted on cylinder by flange seal
Beveled end；The cylinder other end is mounted in laser bodies 1 by flange seal.
Preferably, above-mentioned gas circulator 4 includes gas recycling duct 41, the position that both ends are connected to laser bodies 1
In blower 42 and aperture plate 43 in pipeline；From blower to laser bodies direction, circulating line is expanded using laterally (optical axis direction)
Open structure, longitudinal (perpendicular to optical axis direction) contraction structure.
Preferably, laser bodies use stainless steel metal frame, are equipped with nylon sheet, the pulsed discharge of laser on one side
Pumping source 5 is connected in nylon sheet.
Preferably, the gas flow that above-mentioned gas feed unit 7 includes gas source 71, is connected to by tracheae, valve with gas source
Controller 72 and air gauge 73 for monitoring laser interior working gas pressure, wherein gas source is Stainless steel pressure vessels；
Above-mentioned vacuum unit 6 includes vacuum pump 61, pressure sensor 62 and vacuum display instrument 63.
Preferably, secondary air interface 103 is located at close to one end of window glass；The cylinder of optical window cleaner is stainless steel
Cylinder, energy dissipating piece are stainless steel wafer.
The present invention also provides a kind of above-mentioned electric discharge excited gaseous laser operation methods, comprising the following steps:
First, adjust laser resonant cavity；
Second, vacuum unit is vacuumized to laser；
Third, gas feed unit is to being filled with the working gas met the requirements in laser；
4th, laser gas circulator is opened, working gas flows in gas-recycling plant；
5th, unbalanced pulse discharge pumped source, laser repetition electric discharge；
6th, in laser operational process, tracheae draws the working gas of certain flow from fan outlet, which exists
A large amount of particles that previous pulsed discharge generates are removed through electrostatic precipitation and double-filtration in pneumatic filter, are transformed into clean
Working gas, and give to laser optical window, turbulent flow is formed inside optical window；
7th, close electric discharge excited gaseous laser.
When closed loop discharge excitation pulse Repetition Frequency Laser device is run, gas-recycling plant driving laser interior working gas is followed
Circulation is dynamic, one air-flow is drawn in automatically cleaning optical window blower exit from gas-recycling plant, net by pneumatic filter dedusting
It after change, is transported in baffle box, forms turbulent flow in laser optical window, weaken electric discharge and form kinetic energy of the particle to optical window, make this
Grain cannot reach laser window interior surfaces of glass slightly, and real time cleaning window glass prevents window glass contaminated.
The advantageous effects that the present invention has are as follows:
1, present invention employs pneumatic filter and automatically cleaning optical window based on electrostatic precipitation principle, laser has effectively been purified
Working gas can provide clean secondary air for laser optical window and complete discharge excitation pulse repetition the case where keeping mum
The cleaning of gas laser window glass inner surface, does not destroy the running environment of laser.
2, the present invention is drawn from the gas-recycling plant of discharge excitation pulse repetition gas laser for cleaning optical window
Secondary air, do not need to additionally supply secondary air, simplify laser structure.
3, secondary air of the present invention reference laser interior working gas as cleaning optical window, does not change laser work
The component and pressure for making gas do not influence laser internal gas state.
4, in the present invention automatically cleaning optical window secondary air size and discharge frequency and discharge voltage auto-correlation, do not need into
The additional control of row.
5, the present invention realizes discharge excitation pulse repetition gas laser optical window automatically cleaning, and electric discharge particle cannot reach sharp
Light device window glass inner surface, real-time guard window glass is not contaminated in laser operational process, and it is defeated to be conducive to laser
Energy stability out.
Detailed description of the invention
Fig. 1 is closed loop discharge excitation pulse repetition gas laser structure of the main view；
Fig. 2 is closed loop discharge excitation pulse repetition gas laser structure schematic side view；
Fig. 3 is automatically cleaning optical window structural schematic diagram；
Fig. 4 is window and baffle box structural schematic diagram；
Fig. 5 is the pneumatic filter structural schematic diagram based on electrostatic precipitation principle.
Appended drawing reference are as follows: 1- laser bodies, 2- automatically cleaning optical window, 3- resonant cavity, 4- gas-recycling plant, 41- gas
Circulating line, 42- blower, 43- aperture plate, 5- pulsed discharge pumping source；6- vacuum unit, 61- vacuum pump, 62- pressure sensor,
63- vacuum display instrument, 7- gas feed unit, 71- gas source, 72- gas flow controller, 73- air gauge, 8- nylon sheet, 9-
Pneumatic filter, 90- insulating supporting, 91- air inlet, the gas outlet 92-, 93- multiple layer metal net, 94- electrostatic precipitation ionized region,
95- electrostatic precipitation collecting region, 96- strainer, 97- ash bucket, 98- cavity, 99- high-voltage DC power supply, 10- baffle box, 101- cylinder,
102- energy dissipating piece, 103- secondary air interface, 104- mounting flange, 105- window connecting flange, 106- groove, 107- caudal peduncle,
11- window glass, 12a, 12b, 12c- gas stop valve door, 13a, 13b, 13c- tracheae.
Specific embodiment
As described in Figure 1, in closed loop discharge excitation pulse repetition gas laser, laser bodies 1 are using stainless steel gold
Belong to frame and nylon sheet 8 is installed on one side having a size of 700mm × 180mm × 80mm, as laser pulse discharge pumped source 5
Connecting pin.Two automatically cleaning optical windows 2 are separately mounted to the both ends of laser bodies 1, collectively form laser cavity with laser bodies 1
Room.Pulsed discharge pumping source 5 is connected in nylon sheet, for providing the pumping pulse of repetition high voltage to laser.Resonant cavity 3 is made
Endovenous laser oscillation is formed with being, laser output is realized, is made of the optical mirror slip of a pair of of diameter 50mm, preceding mirror is to output
Laser part penetrates, and rear mirror is to output laser total reflection.
As described in Figure 2, gas-recycling plant 4 is connected on 1 entry/exit gas terminal port flange of laser bodies, with laser master
Body composition closure gas circulation loop, for drive working gas along figure direction shown in arrow in laser inner recirculation flow
It is dynamic comprising gas recycling duct 41, blower 42 and aperture plate 43.From blower to laser bodies direction, circulating line is using horizontal
To expansion structure (optical axis direction), longitudinal contraction structure (perpendicular to optical axis direction), the port diameter being connected with blower is
300mm, the connection size being connected with laser bodies are 640mm × 48mm.Blower selects axial flow blower, is gas circulating flow
Power is provided, port diameter 300mm, revolving speed is 8000 revs/min maximum, metered flow 540m3/h.Aperture plate is for homogenizing gas
Stream, is placed on fan outlet and laser bodies entrance, using honeycomb web frame, thickness 20mm.
Gas feed unit 7 is used to be filled with working gas to laser, including gas source 71, gas stop valve door 12a and
12b, gas flow controller 72, tracheae 13a and air gauge 73.Gas source 71 be stainless steel gas pressure vessel, volume 40L, most
It is adjustable to export 0~10atm of air pressure filled with laser works gas by big pressure 15MPa.Gas stop valve door 12a's and 12b is logical
Diameter is 3mm, and interface is standard D6 interface.Gas flow controller 72 is used to control the flow velocity of gas feed unit gas, selects
Gas mass flow controller, 0~200SLM of flow adjustment range.Tracheae 13a is the metal tracheae of outer diameter 6mm.Air gauge 73
For digital pressure gauge, for monitoring laser interior working gas pressure.
Vacuum unit 6 is vacuumized for laser, including vacuum pump 61, gas stop valve door 12c, pressure sensor 62,
Vacuum display instrument 63 and tracheae 13b.The pumping speed of vacuum pump is 4L/s, and interface is KF25 type；The latus rectum of gas stop valve door 12c is
20mm, interface KF25；Tracheae 13b is the bellows of diameter 25mm；Pressure sensor 62 is that ZJ52 metallic resistance is regulated, and is detected
Ultimate vacuum is 10-1Pa is connected with vacuum display instrument, monitors the vacuum degree of laser.
Automatically cleaning optical window shown in Fig. 3 includes two parts of optical window cleaner and window, effect be make working gas with
External world's isolation, and laser high efficiency of transmission is allowed to pass through.Window is by window glass 11, mounting flange 104 and 105 groups of window connecting flange
At (Fig. 4), window glass diameter 60mm；Mounting flange 104 is stainless steel, and outer diameter 80mm, central through hole diameter 50mm, four straight
The mounting hole of diameter 5mm is evenly arranged on flange；Window connecting flange 105 uses nylon material, and one end is inclined-plane.Window glass passes through
Mounting flange 104 and window connecting flange 105 are mounted on optical window cleaner, and window mounting inclination angle degree is 7 degree.Optical window cleaning
Device includes baffle box 10, tracheae 13c and pneumatic filter 9, and tracheae 13c draws one air-flow from laser gas circulating line
Out, by being sent after pneumatic filter to baffle box 10, tracheae 13c is the metal tracheae of diameter 12mm.
As described in Figure 4, baffle box 10 includes metal shell cylinder 101, secondary air interface 103 and energy dissipating piece 102.Metal
Casing cylinder 101 is for being arranged secondary air interface 103 and placing energy dissipating piece group 102, using stainless steel cylinder structure, outer diameter
For 80mm, internal diameter 50mm, long 50mm, both sides of the face respectively have a mounting flange 104, are distributed on each mounting flange 104
Seal groove and multiple mounting holes, metal shell cylinder 101 are connect by the flange at both ends with laser bodies and window aperture seal.It is auxiliary
Air-flow interface 103 is helped to introduce secondary air for connecting tracheae 13c close to laser window.In order to easy to connect, and have good
Good air-tightness, secondary air interface 103 use standard D12 type cutting ferrule air pipe interface form, latus rectum 12mm, using stainless steel
Material.Mainly there are two effects for energy dissipating piece 102: first is that perturbation of gas stream is dynamic, is conducive to gas and forms turbulent flow in metal cavity,
Second is that collectively forming the groove 106 for deposited particles with metal shell cylinder 101, it is made of three energy dissipating pieces, and three disappear
Energy piece is center stainless steel wafer with holes, outer diameter 50mm, internal diameter 30mm, with a thickness of 2mm.Each energy dissipating piece has one
A caudal peduncle 107 has the hole of a diameter 4mm on caudal peduncle, is fixed on stainless steel metal shell by M3 screw.
Fig. 5 is based on electrostatic precipitation principle gaseous filter, including rectangular outer chamber 98, air inlet 91, multiple layer metal net
93, electrostatic precipitation ionized region 94, electrostatic precipitation collecting region 95, insulating supporting 90, ash bucket 97, end strainer 96,92 and of gas outlet
High-voltage DC power supply 99.Rectangular outer chamber 98 uses stainless steel material, and wall thickness 2mm is used having a size of 200mm × 160mm × 40mm
In placement multiple layer metal net 93, electrostatic precipitation ionized region 94, electrostatic precipitation collecting region 95, ash bucket 97 and end strainer 96.Air inlet
Mouth 91 and gas outlet 92 are separately positioned on the both ends of rectangular exocoel 98, and using standard D12 type cutting ferrule air pipe interface form, latus rectum is
12mm is connect using stainless steel material with tracheae 13c.Multiple layer metal net 93 is the stainless (steel) wire composition of 4 layer of 80 mesh, every interlayer
The particle of larger size is eliminated its role is to be filtered for the first time to gas every 3mm, homogenizes air-flow, while eliminating in gas
Residual charge.The purposes of electrostatic precipitation ionized region 94 be by electrostatic ionized gas, to make the charge particles in gas, it
It is made of multilayer plate ground electrode and the placement of netted high-field electrode cross parallel, high-field electrode and ground electrode spacing are 5mm, high pressure
Electrode is the stainless (steel) wire of 80 mesh, is mounted on insulating supporting 90, is connected with high-voltage DC power supply 99；Ground electrode is thickness 1.5mm
Stainless steel plate, be mounted on rectangular outer chamber 98, ground electrode and high-field electrode are parallel to gas flow direction, along airflow direction
Size is 30mm.Electrostatic precipitation collecting region 95 is close to electrostatic precipitation ionized region 94 and is placed, and is used as and passes through electrostatic absorption principle
The particle of electrification is collected, is equally using ground electrode and high-field electrode cross parallel mounting structure, ground electrode and high-field electrode
The stainless steel plate of 1.5mm thickness, high-field electrode are mounted on insulating supporting 90, are connected to high-voltage DC power supply, and ground electrode is mounted on
On rectangular outer chamber 98.Size along airflow direction is 60mm.Ash bucket 97 is equipped with below electrostatic precipitation collecting region 95, for storing
Dust.End strainer 96 is made into using manganese-nickel fiber, is had and is strengthened the double effects that Electrostatic intercepts particle with filtering,
It is with a thickness of 15mm.High-voltage DC power supply is DC high-voltage power supply, and 0~10kV of output voltage is adjustable.
Closed loop discharge excitation pulse repetition gas laser operational process with automatically cleaning optical window is as follows:
First, laser resonant cavity is ready；
Second, vacuum unit is vacuumized to laser；
Third, gas feed unit is to being filled with the working gas met the requirements in laser；
4th, pulsed discharge pumping source is ready；
5th, laser gas circulator is opened, and working gas flows in gas-recycling plant；
6th, unbalanced pulse discharge pumped source, laser repetition electric discharge, while exporting Repetition Frequency Laser pulse；
7th, in laser operational process, tracheae draws the working gas of certain flow from fan outlet, which exists
A large amount of particles that previous pulsed discharge generates are removed through electrostatic precipitation and double-filtration in pneumatic filter, are transformed into clean
Working gas, and give to laser optical window, turbulent flow is formed inside optical window, is slackened the kinetic energy that electric discharge particle flies to window, is made to put
Electric particle cannot reach and be attached to window glass inner surface, and these electric discharge particles are blown off optical window region, and real time cleaning swashs
Light device optical window；
8th, close electric discharge excited gaseous laser.
The present invention is not limited to above-mentioned specific embodiment, for example laser bodies are not limited to above-mentioned size and structure；Gas
Body circulation pipeline is not limited to outer circulation mode；Blower is not limited to axial flow blower and above-mentioned connection size；Resonator mirror diameter is unlimited
In 50mm；Laser gas source is not limited to 40L；Laser optical window is not limited to cylindrical shape, and window glass diameter is not limited to 60mm, optical window
The material of the metal shell of cleaner is not limited to stainless steel；The number of energy dissipating piece is not limited to 3 in energy dissipating piece group, the shape of energy dissipating piece
Shape is not limited to hollow disk-shaped, and the material of energy dissipating piece is not limited to stainless steel；Air pipe interface is not limited to standard D12 type cutting ferrule air pipe interface
Form；Tracheae is not limited to outer diameter 12mm；Pneumatic filter is not limited to square structure, size be not limited to 200mm × 160mm ×
40mm, the material of multiple layer metal net are not limited to stainless (steel) wire, and the number of plies is not limited to 4 layers；Electrostatic precipitation area is not limited to above-mentioned specific ruler
Very little, ionized region and collecting region are not limited to unpack format；End strainer is not limited to manganese-nickel web.
Claims (7)
1. a kind of closed loop discharge excitation pulse repetition gas laser, including laser bodies (1), gas-recycling plant (4), gas
Object supply unit (7) and vacuum unit (6), the laser bodies (1) include entry/exit gas port, the gas-recycling plant
(4) it is connected to the entry/exit gas port of laser bodies (1), the gas feed unit (7) is both connected to vacuum unit (6)
On gas-recycling plant (4), it is characterised in that:
It further include automatically cleaning optical window (2), the automatically cleaning optical window (2) includes window glass (11) and optical window cleaner；
The optical window cleaner includes baffle box (10) and pneumatic filter (9)；
The baffle box (10) includes the inclined cylinder in one end (101), and the inner barrel has been arranged radially multiple energy dissipating pieces
(102)；The window glass (11) sealing is fixed on the beveled end of cylinder (101), the other end of cylinder (101) and laser
Exit end sealing is connected；Secondary air interface (103) are opened up on cylinder (101)；
The pneumatic filter (9) includes cavity (98), the air inlet (91) being set on cavity (98) and gas outlet (92), institute
It states air inlet (91) and is connected to gas-recycling plant (4) by tracheae, the gas outlet (92) passes through the auxiliary of tracheae and baffle box
Air-flow interface (103) are helped to be connected to；Multiple layer metal net is set gradually from air inlet to gas outlet in the cavity of the pneumatic filter
(93), electrostatic precipitation ionized region (94), electrostatic precipitation collecting region (95), strainer (96)；
Further include the adjustable power supply unit of output voltage, wall within the cavity insulating supporting (90) be located at electrostatic precipitation collect
Ash bucket (97) below area；
The electrostatic precipitation ionized region includes multilayer plate ground electrode and netted high-field electrode, and the ground electrode and high-field electrode are handed over
Fork is placed in parallel, and high-field electrode is mounted on insulating supporting (90), is connected with high-voltage DC power supply；Ground electrode is mounted on cavity
(98) on, ground electrode and high-field electrode are parallel to gas flow direction；
The electrostatic precipitation collecting region includes plate ground electrode and plate high-field electrode, and ground electrode and high-field electrode cross parallel are put
It sets, high-field electrode is mounted on insulating supporting (90), is connected with high-voltage DC power supply (99)；Ground electrode is mounted on cavity (98)
On, ground electrode and high-field electrode are parallel to gas flow direction；
The gas flow controller that the gas feed unit (7) includes gas source (71), is connected to by tracheae, valve with gas source
(72) air gauge (73) and for monitoring laser interior working gas pressure, wherein gas source is Stainless steel pressure vessels；Institute
Stating vacuum unit (6) includes vacuum pump (61), pressure sensor (62) and vacuum display instrument (63)；The energy dissipating piece (102) is
Center disk with holes further includes a caudal peduncle (107), energy dissipating piece (102) is fixed on to the cylinder of baffle box by caudal peduncle (107)
On body (101).
2. closed loop discharge excitation pulse repetition gas laser according to claim 1, it is characterised in that: the multilayer gold
Belonging to net (93) is stainless (steel) wire；Electrostatic precipitation ionized region high-field electrode is stainless (steel) wire, and ground electrode is stainless steel plate；Electrostatic precipitation
Collecting region high-field electrode and ground electrode are stainless steel plate；Strainer is made into using manganese-nickel fiber.
3. closed loop discharge excitation pulse repetition gas laser according to claim 2, it is characterised in that: baffle box cylinder
(101) both ends are provided with flange, and window glass (11) is mounted on the beveled end of cylinder by flange seal；The cylinder other end is logical
Flange seal is crossed to be mounted on laser bodies (1).
4. closed loop discharge excitation pulse repetition gas laser according to claim 3, it is characterised in that: the gas follows
Loop device (4) include both ends be connected to laser bodies (1) gas recycling duct (41), the blower (42) in pipeline with
Aperture plate (43)；From blower to laser bodies direction, circulating line uses lateral magnification structure, longitudinal contraction structure.
5. closed loop discharge excitation pulse repetition gas laser according to claim 4, it is characterised in that: laser bodies
Using stainless steel metal frame, nylon sheet is installed on one side, the pulsed discharge pumping source (5) of laser is connected in nylon sheet.
6. closed loop discharge excitation pulse repetition gas laser according to claim 5, it is characterised in that: secondary air connects
Mouth (103) is located at close to one end of window glass；The cylinder of optical window cleaner is stainless steel cylinder, and energy dissipating piece is stainless steel circle
Piece.
7. a kind of any closed loop discharge excitation pulse repetition gas laser operation method of claim 1 to 6, feature
It is: the following steps are included:
First, adjust laser resonant cavity；
Second, vacuum unit is vacuumized to laser；
Third, gas feed unit is to being filled with the working gas met the requirements in laser；
4th, laser gas circulator is opened, working gas flows in gas-recycling plant；
5th, unbalanced pulse discharge pumped source, laser repetition electric discharge；
6th, in laser operational process, tracheae draws the working gas of certain flow from fan outlet, and the air-flow is in gas
A large amount of particles that previous pulsed discharge generates are removed through electrostatic precipitation and double-filtration in filter, are transformed into clean work
Gas, and give to laser optical window, turbulent flow is formed inside optical window；
7th, close electric discharge excited gaseous laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710363586.1A CN107204561B (en) | 2017-05-22 | 2017-05-22 | Closed loop discharge excitation pulse repetition gas laser and its operation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710363586.1A CN107204561B (en) | 2017-05-22 | 2017-05-22 | Closed loop discharge excitation pulse repetition gas laser and its operation method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107204561A CN107204561A (en) | 2017-09-26 |
| CN107204561B true CN107204561B (en) | 2019-09-27 |
Family
ID=59905948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710363586.1A Active CN107204561B (en) | 2017-05-22 | 2017-05-22 | Closed loop discharge excitation pulse repetition gas laser and its operation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107204561B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3077686B1 (en) * | 2018-02-05 | 2020-09-25 | Commissariat Energie Atomique | ELEMENT OF AN OPTICAL SYSTEM, TO RECEIVE A FUNCTIONAL FLUID UNDER PRESSURE. |
| CN109621615B (en) * | 2019-01-24 | 2024-03-29 | 宁波市天马空压机厂 | Purifier for filtering auxiliary gas of laser cutting machine |
| CN115347448A (en) * | 2022-08-23 | 2022-11-15 | 西北核技术研究所 | Method and system for stably outputting pulse laser energy by adopting gas supply |
| CN115347439A (en) * | 2022-08-23 | 2022-11-15 | 西北核技术研究所 | Gas laser and method of outputting pulsed laser light |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1059426A (en) * | 1990-08-20 | 1992-03-11 | 中国科学院上海光学精密机械研究所 | Discharge tube of metal vapour |
| CN101455929A (en) * | 2008-12-11 | 2009-06-17 | 上海纳米技术及应用国家工程研究中心有限公司 | High wind-speed tunnel air electric dust-collection system |
| CN102006939A (en) * | 2008-02-11 | 2011-04-06 | 亚达帕丽·空达拉·姚 | A vaccum pump suction filter meant for collecting impurities from function |
| CN104779517A (en) * | 2015-02-10 | 2015-07-15 | 西北核技术研究所 | Closed circulating repetition-frequency optical pumping xenon fluoride laser system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2792689B2 (en) * | 1989-11-22 | 1998-09-03 | 三菱電機株式会社 | Optical component protection method |
-
2017
- 2017-05-22 CN CN201710363586.1A patent/CN107204561B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1059426A (en) * | 1990-08-20 | 1992-03-11 | 中国科学院上海光学精密机械研究所 | Discharge tube of metal vapour |
| CN102006939A (en) * | 2008-02-11 | 2011-04-06 | 亚达帕丽·空达拉·姚 | A vaccum pump suction filter meant for collecting impurities from function |
| CN101455929A (en) * | 2008-12-11 | 2009-06-17 | 上海纳米技术及应用国家工程研究中心有限公司 | High wind-speed tunnel air electric dust-collection system |
| CN104779517A (en) * | 2015-02-10 | 2015-07-15 | 西北核技术研究所 | Closed circulating repetition-frequency optical pumping xenon fluoride laser system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107204561A (en) | 2017-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107204561B (en) | Closed loop discharge excitation pulse repetition gas laser and its operation method | |
| WO2017161801A1 (en) | High efficiency air filter device and operating method thereof | |
| CN211726300U (en) | Low-energy-consumption recycling device for quick color changing electrostatic powder spraying room | |
| CN204240488U (en) | Electronics dam air purifier | |
| CN210674576U (en) | Filter cartridge dust remover for furnace gas purification of submerged arc furnace | |
| CN107093482A (en) | Radioaerosol cancellation element in air | |
| CN109622555B (en) | Dynamic cleanness maintaining system and method for high-power terminal optical system | |
| CN108421325A (en) | A kind of vertical bag filter | |
| CN204214076U (en) | A kind of purification fresh air | |
| CN206566628U (en) | Novel bag-type dust remover | |
| CN107017544B (en) | A kind of electric discharge excited gaseous laser and its operation method | |
| CN107626163A (en) | A kind of feeding head dust arrester for coaxial powder-feeding equipment | |
| CN207929416U (en) | A kind of pipeline self cleaning type fume clarifier | |
| CN103623925B (en) | Atmospheric particulates bipolarity charge device | |
| CN103480210A (en) | Dust collector for energy-saving environment-friendly axial flow fan group | |
| JP2008523978A (en) | Self-cleaning and voltage-controlled electrostatic filtration method and electrostatic filtration device | |
| CN204745887U (en) | Spark trapping apparatus that plasma cutting machine bag collector used | |
| CN213995286U (en) | Dust removal unit | |
| CN108425611A (en) | A kind of air purification vent window based on impulse electric corona plasma | |
| CN205361910U (en) | Belt cleaning device of old and useless fluorescent tube phosphor powder separation | |
| CN208275151U (en) | A kind of filtering tube sheet and pulse backblowing deashing device | |
| CN210966290U (en) | Dust collector in alumina powder preparation process | |
| CN203556230U (en) | Bag-type dust collector | |
| CN206577531U (en) | High efficiency particulate air filter | |
| CN206372642U (en) | It is a kind of portable except radon device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |