CN107204561A - Closed loop discharge excitation pulse repetition gas laser and its operation method - Google Patents
Closed loop discharge excitation pulse repetition gas laser and its operation method Download PDFInfo
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- CN107204561A CN107204561A CN201710363586.1A CN201710363586A CN107204561A CN 107204561 A CN107204561 A CN 107204561A CN 201710363586 A CN201710363586 A CN 201710363586A CN 107204561 A CN107204561 A CN 107204561A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
- H01S3/0346—Protection of windows or mirrors against deleterious effects
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
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Abstract
The invention discloses a kind of closed loop discharge excitation pulse repetition gas laser and its operation method with automatically cleaning optical window based on electrostatic precipitation principle, laser includes laser bodies, pulsed discharge pumping source, resonator, automatically cleaning optical window, gas-recycling plant, gas feed unit and vacuum unit；Automatically cleaning optical window is made up of optical window cleaner and window；Optical window cleaner includes baffle box, tracheae and pneumatic filter.Pneumatic filter is based on electrostatic precipitation principle, including square exocoel, air inlet, multiple layer metal net, electrostatic precipitation ionized region, electrostatic precipitation collecting region, ash bucket, end filter screen, gas outlet and high-voltage DC power supply.When laser is run, the working gas of certain flow is drawn in blower fan exit from gas-recycling plant, the air-flow removes a large amount of particulates that previous pulsed discharge is produced in pneumatic filter through electrostatic precipitation and double-filtration, it is transformed into the working gas of cleaning, and laser optical window is delivered to, realize the real-time automatically cleaning of laser optical window.
Description
Technical field
The present invention relates to discharge stimulation gas laser technology field, more particularly, to having certainly based on electrostatic precipitation principle
Clean the closed loop discharge excitation pulse repetition gas laser and its operation method of optical window.
Background technology
Discharge excitation pulse repetition gas laser generally uses closed circulation mode, is realized and put using gas-recycling plant
Electric zone gas Rapid replacement, eliminates influence of the previous pulsed discharge to succeeding impulse.But in order to ensure the electricity of laser
Insulation, laser optical window typically uses the gas in outwardly protruding structure, laser running in optical window to pass through gas
EGR realizes effective displacement, and a large amount of particles agglomerates for generation of discharging are in laser optical window region.These particulates can be attached to
Window glass inner surface, pollutes laser window glass, reduces the transmitance of window glass, causes laser to export energy reduction.
The content of the invention
In order to solve the window glass pollution problem of discharge excitation pulse repetition gas laser, the present invention provides a kind of base
In the automatically cleaning optical window and closed loop discharge excitation pulse repetition gas laser of electrostatic precipitation principle.
The technical solution of the present invention is to provide a kind of closed loop discharge excitation pulse repetition gas laser, including laser
Device main body 1, gas-recycling plant 4, gas feed unit 7 and vacuum unit 6, above-mentioned laser bodies 1 include entry/exit gas end
Mouthful, above-mentioned gas EGR 4 is connected with the entry/exit gas port of laser bodies 1, above-mentioned gas feed unit 7 and vacuum list
Member 6 is both connected on gas-recycling plant 4, and it is characterized in that：
Also include automatically cleaning optical window 2, above-mentioned automatically cleaning optical window 2 includes window glass 11 and optical window cleaner；
Above-mentioned optical window cleaner includes baffle box 10 and pneumatic filter 9；
Above-mentioned baffle box 10 includes the inclined cylinder 101 in one end, and above-mentioned inner barrel has been radially arranged multiple energy dissipating pieces 12；
Above-mentioned window glass 11 seals the beveled end for being fixed on cylinder 101, and the exit end sealing of the other end and laser of cylinder 101 is solid
Even；Secondary air interface 103 is opened up on cylinder 101；
Above-mentioned gas filter 9 includes cavity 98, the air inlet 91 being arranged on cavity 98 and gas outlet 92, above-mentioned air inlet
Mouth 91 is connected by tracheae with gas-recycling plant 4, and above-mentioned gas outlet 92 passes through tracheae and the secondary air interface 103 of baffle box
Connection.
Preferably, set gradually multiple layer metal net 93 from air inlet to gas outlet in the cavity of above-mentioned gas filter, it is quiet
Electric precipitation ionized region 94, electrostatic precipitation collecting region 95, filter screen 96；
Also include the adjustable power supply unit of output voltage, the insulating supporting 90 of wall within the cavity with being received positioned at electrostatic precipitation
Collect the ash bucket 97 below area；
Above-mentioned electrostatic precipitation ionized region includes multilayer tabular ground electrode and netted high-field electrode, the ground electrode and high-tension electricity
Pole cross parallel is placed, and high-field electrode is arranged on insulating supporting 90, is connected with power supply unit；Ground electrode is arranged on cavity 98
On, ground electrode and high-field electrode are parallel to gas flow direction；
Above-mentioned electrostatic precipitation collecting region includes tabular ground electrode and tabular high-field electrode, and ground electrode and high-field electrode intersect flat
Row is placed, and high-field electrode is arranged on insulating supporting 90, is connected with high-voltage DC power supply 99；Ground electrode is arranged on cavity 98,
Ground electrode and high-field electrode are parallel to gas flow direction.
Preferably, above-mentioned multiple layer metal net 93 is stainless (steel) wire；Electrostatic precipitation ionized region high-field electrode is stainless (steel) wire, ground
Electrode is stainless steel plate；Electrostatic precipitation collecting region high-field electrode and ground electrode are stainless steel plate；Filter screen is fine using manganese-nickel
Dimension is made into.
Preferably, disk with holes centered on above-mentioned energy dissipating piece 102, an in addition to caudal peduncle 107, will by caudal peduncle 107
Energy dissipating piece 102 is fixed on the cylinder 101 of baffle box.
Preferably, baffle box cylinder 101 is provided at both ends with flange, and window glass 11 is arranged on cylinder by flange seal
Beveled end；The cylinder other end is arranged in laser bodies 1 by flange seal.
Preferably, above-mentioned gas EGR 4 includes gas recycling duct 41, the position that two ends are connected with laser bodies 1
In the blower fan 42 in pipeline and aperture plate 43；From blower fan to laser bodies direction, circulating line is expanded using laterally (optical axis direction)
Open structure, longitudinal direction (perpendicular to optical axis direction) contraction structure.
Preferably, laser bodies use stainless steel metal framework, are simultaneously provided with nylon sheet, the pulsed discharge of laser
Pumping source 5 is connected in nylon sheet.
Preferably, the gas flow that above-mentioned gas feed unit 7 includes source of the gas 71, connected by tracheae, valve with source of the gas
Controller 72 and the air gauge 73 for monitoring laser interior working gas pressure, wherein source of the gas are Stainless steel pressure vessels；
Above-mentioned vacuum unit 6 includes vavuum pump 61, pressure sensor 62 and vacuum display instrument 63.
Preferably, secondary air interface 15 is located at close to one end of window glass；The cylinder of optical window cleaner is stainless steel
Cylinder, energy dissipating piece is stainless steel wafer.
The present invention also provides a kind of above-mentioned electric discharge excited gaseous laser operation method, comprises the following steps：
First, adjust laser resonant cavity；
Second, vacuum unit is vacuumized to laser；
3rd, gas feed unit meets the working gas of requirement to being filled with laser；
4th, laser gas EGR is opened, working gas flows in gas-recycling plant；
5th, unbalanced pulse discharge pumped source, laser repetition electric discharge；
6th, in laser running, tracheae draws the working gas of certain flow at fan outlet, and the air-flow exists
A large amount of particulates that previous pulsed discharge is produced are removed through electrostatic precipitation and double-filtration in pneumatic filter, are transformed into cleaning
Working gas, and laser optical window is delivered to, it is internally formed turbulent flow in optical window；
7th, close electric discharge excited gaseous laser.
When closed loop discharge excitation pulse Repetition Frequency Laser device is run, gas-recycling plant driving laser interior working gas is followed
Circulation is moved, and one air-flow is drawn in automatically cleaning optical window blower fan exit from gas-recycling plant, net by pneumatic filter dedusting
After change, it is transported in baffle box, turbulent flow is formed in laser optical window, weakens electric discharge and form kinetic energy of the particulate to optical window, make this
Grain can not reach laser window interior surfaces of glass slightly, and real time cleaning window glass prevents window glass to be contaminated.
The advantageous effects that the present invention has are as follows：
1st, present invention employs the pneumatic filter based on electrostatic precipitation principle and automatically cleaning optical window, laser has effectively been purified
Working gas, the secondary air of cleaning can be provided for laser optical window and discharge excitation pulse repetition is completed in situation about keeping mum
The cleaning of gas laser window glass inner surface, the running environment of laser is not destroyed.
2nd, the present invention is drawn from the gas-recycling plant of discharge excitation pulse repetition gas laser for cleaning optical window
Secondary air, it is not necessary to additionally supply secondary air, simplify laser structure.
3rd, the present invention quotes laser interior working gas as the secondary air of cleaning optical window, does not change laser work
Make the component and pressure of gas, laser internal gas state is not influenceed.
4th, the present invention in automatically cleaning optical window secondary air size and discharge frequency and discharge voltage auto-correlation, it is not necessary to enter
The extra control of row.
5th, the present invention realizes discharge excitation pulse repetition gas laser optical window automatically cleaning, and electric discharge particulate can not reach sharp
Light device window glass inner surface, real-time guard window glass is not contaminated in laser running, is conducive to laser defeated
Go out energy stability.
Brief description of the drawings
Fig. 1 is closed loop discharge excitation pulse repetition gas laser structure schematic front view；
Fig. 2 is closed loop discharge excitation pulse repetition gas laser structure schematic side view；
Fig. 3 is automatically cleaning optical window structural representation；
Fig. 4 is window and baffle box structural representation；
Fig. 5 is the pneumatic filter structural representation based on electrostatic precipitation principle.
Reference is：1- laser bodies, 2- automatically cleaning optical windows, 3- resonators, 4- gas-recycling plants, 41- gases
Circulating line, 42- blower fans, 43- aperture plates, 5- pulsed discharge pumping sources；6- vacuum units, 61- vavuum pumps, 62- pressure sensors,
63- vacuum display instruments, 7- gas feed units, 71- sources of the gas, 72- gas flow controllers, 73- air gauges, 8- nylon sheets, 9-
Pneumatic filter, 90- insulating supportings, 91- air inlets, 92- gas outlets, 93- multiple layer metal nets, 94- electrostatic precipitation ionized regions,
95- electrostatic precipitation collecting regions, 96- filter screens, 97- ash buckets, 98- cavitys, 99- high-voltage DC power supplies, 10- baffle boxs, 101- cylinders,
102- energy dissipating pieces, 103- secondary air interfaces, 104- mounting flanges, 105- window adpting flanges, 106- grooves, 107- caudal peduncles,
11- window glass, 12a, 12b, 12c- gas stop valve door, 13a, 13b, 13c- tracheae.
Embodiment
As described in Figure 1, in closed loop discharge excitation pulse repetition gas laser, laser bodies 1 are using stainless steel gold
Belong to framework, size is 700mm × 180mm × 80mm, is simultaneously provided with nylon sheet 8, is used as laser pulse discharge pumped source 5
Connection end.Two automatically cleaning optical windows 2 are separately mounted to the two ends of laser bodies 1, and laser cavity is collectively formed with laser bodies 1
Room.Pulsed discharge pumping source 5 is connected in nylon sheet, for providing repetition high voltage pumping pulse to laser.Resonator 3 is made
Endovenous laser vibration is formed with being, realizes that laser is exported, it is made up of a pair of diameter 50mm optical mirror slip, preceding mirror is to output
Laser part is passed through, and rear mirror is to output laser total reflection.
As described in Figure 2, gas-recycling plant 4 is connected on the entry/exit gas terminal port flange of laser bodies 1, with laser master
The gas circulation loop of body composition closure, for driving direction of the working gas along along figure shown in arrow in laser inner recirculation flow
Dynamic, it includes gas recycling duct 41, blower fan 42 and aperture plate 43.From blower fan to laser bodies direction, circulating line is using horizontal
To expansion structure (optical axis direction), longitudinal contraction structure (perpendicular to optical axis direction), the port diameter being connected with blower fan is
300mm, the interface size being connected with laser bodies is 640mm × 48mm.Blower fan selects axial flow blower, is gas circulating flow
Power is provided, port diameter is 300mm, and rotating speed is maximum 8000 revs/min, metered flow 540m3/h.Aperture plate is used to homogenize gas
Stream, is placed on fan outlet and laser bodies entrance, using honeycomb web frame, thickness 20mm.
Gas feed unit 7 is used to be filled with working gas to laser, including source of the gas 71, gas stop valve door 12a and
12b, gas flow controller 72, tracheae 13a and air gauge 73.Source of the gas 71 be stainless steel gas pressure vessel, volume 40L, most
Big pressure 15MPa, filled with laser works gas, outlet 0~10atm of air pressure is adjustable.Gas stop valve door 12a's and 12b is logical
Footpath is 3mm, and interface is standard D6 interfaces.Gas flow controller 72 is used for the flow velocity for controlling gas feed unit gas, selects
Gas mass flow controller, 0~200SLM of flow adjustment range.Tracheae 13a is external diameter 6mm metal tracheae.Air gauge 73
For digital pressure gauge, for monitoring laser interior working gas pressure.
Vacuum unit 6 is vacuumized for laser, including vavuum pump 61, gas stop valve door 12c, pressure sensor 62,
Vacuum display instrument 63 and tracheae 13b.The pumping speed of vavuum pump is 4L/s, and interface is KF25 types；Gas stop valve door 12c latus rectum be
20mm, interface is KF25；Tracheae 13b is diameter 25mm bellows；Pressure sensor 62 is that ZJ52 metallic resistances are regulated, and is detected
End vacuum is 10-1Pa, is connected with vacuum display instrument, monitors the vacuum of laser.
Automatically cleaning optical window shown in Fig. 3 includes two parts of optical window cleaner and window, its act on be make working gas with
External world's isolation, and allow laser high efficiency of transmission to pass through.Window is by 105 groups of window glass 11, mounting flange 104 and window adpting flange
Into (Fig. 4), window glass diameter 60mm；Mounting flange 104 is stainless steel, external diameter 80mm, central through hole diameter 50mm, and four straight
Footpath 5mm mounting hole is distributed on flange；Window adpting flange 105 uses nylon material, and one end is inclined-plane.Window glass passes through
Mounting flange 104 and window adpting flange 105 are arranged on optical window cleaner, and window mounting inclination angle degree is 7 degree.Optical window is cleaned
Device includes baffle box 10, tracheae 13c and pneumatic filter 9, and tracheae 13c draws one air-flow from laser gas circulating line
Go out, by delivering to baffle box 10 after pneumatic filter, tracheae 13c is diameter 12mm metal tracheae.
As described in Figure 4, baffle box 10 includes metal shell cylinder 101, secondary air interface 103 and energy dissipating piece 102.Metal
Casing cylinder 101 is used to set secondary air interface 103 and lays energy dissipating piece group 102, using stainless steel cylinder structure, its external diameter
For 80mm, internal diameter is 50mm, long 50mm, and both sides end face respectively has to be distributed with a mounting flange 104, each mounting flange 104
Seal groove and multiple mounting holes, metal shell cylinder 101 are connected by the flange at two ends with laser bodies and window aperture seal.It is auxiliary
Help air-flow interface 103 close to laser window, for connecting tracheae 13c, introduce secondary air.In order to easy to connect, and with good
Good air-tightness, secondary air interface 103 uses standard D12 type cutting ferrule air pipe interface forms, and latus rectum is 12mm, using stainless steel
Material.Energy dissipating piece 102 mainly has two effects：One is that perturbation of gas stream is moved, and is conducive to gas to form turbulent flow in metallic cavity,
Two be to collectively form groove 106 for deposited particles with metal shell cylinder 101, and it is made up of three energy dissipating pieces, and three disappear
Energy piece is center stainless steel wafer with holes, and its external diameter is 50mm, and internal diameter is 30mm, and thickness is 2mm.Each energy dissipating piece has one
There is diameter 4mm hole on individual caudal peduncle 107, caudal peduncle, be fixed on by M3 screws on stainless steel metal shell.
Fig. 5 is based on electrostatic precipitation principle gaseous filter, including square outer chamber 98, air inlet 91, multiple layer metal net
93rd, electrostatic precipitation ionized region 94, electrostatic precipitation collecting region 95, insulating supporting 90, ash bucket 97, end filter screen 96, the and of gas outlet 92
High-voltage DC power supply 99.Square outer chamber 98 uses stainless steel material, wall thickness 2mm, and size is 200mm × 160mm × 40mm, is used
In placement multiple layer metal net 93, electrostatic precipitation ionized region 94, electrostatic precipitation collecting region 95, ash bucket 97 and end filter screen 96.Air inlet
Mouth 91 and gas outlet 92 are separately positioned on the two ends of square exocoel 98, and using standard D12 type cutting ferrule air pipe interface forms, latus rectum is
12mm, using stainless steel material, is connected with tracheae 13c.Multiple layer metal net 93 is the stainless (steel) wire composition of 4 layer of 80 mesh, per interlayer
Every 3mm, its role is to be filtered for the first time to gas, the particulate of large-size is eliminated, air-flow is homogenized, while eliminating in gas
Residual charge.The purposes of electrostatic precipitation ionized region 94 be by electrostatic ionized gas so that the charge particles in gas, it
Placed and constituted by multilayer tabular ground electrode and netted high-field electrode cross parallel, high-field electrode and ground electrode spacing are 5mm, high pressure
Electrode is the stainless (steel) wire of 80 mesh, on insulating supporting 90, is connected with high-voltage DC power supply 99；Ground electrode is thickness 1.5mm
Stainless steel plate, on square outer chamber 98, ground electrode and high-field electrode are parallel to gas flow direction, along airflow direction
Size is 30mm.Electrostatic precipitation collecting region 95 is close to electrostatic precipitation ionized region 94 and laid, and it is as passing through electrostatic absorption principle
Powered particulate is collected, same to use ground electrode and high-field electrode cross parallel mounting structure, ground electrode and high-field electrode are
Stainless steel plate thick 1.5mm, high-field electrode is arranged on insulating supporting 90, is connected to high-voltage DC power supply, ground electrode is arranged on
On square outer chamber 98.It is 60mm along the size of airflow direction.The lower section of electrostatic precipitation collecting region 95 is provided with ash bucket 97, for depositing
Dust.End filter screen 96 is made into using manganese-nickel fiber, and the double effects of particulate are intercepted with reinforcing Electrostatic and filtering,
Its thickness is 15mm.High-voltage DC power supply is DC high-voltage power supply, and 0~10kV of output voltage is adjustable.
Closed loop discharge excitation pulse repetition gas laser running with automatically cleaning optical window is as follows：
First, laser resonant cavity is ready；
Second, vacuum unit is vacuumized to laser；
3rd, gas feed unit meets the working gas of requirement to being filled with laser；
4th, pulsed discharge pumping source is ready；
5th, laser gas EGR is opened, and working gas flows in gas-recycling plant；
6th, unbalanced pulse discharge pumped source, laser repetition electric discharge, while exporting Repetition Frequency Laser pulse；
7th, in laser running, tracheae draws the working gas of certain flow at fan outlet, and the air-flow exists
A large amount of particulates that previous pulsed discharge is produced are removed through electrostatic precipitation and double-filtration in pneumatic filter, are transformed into cleaning
Working gas, and laser optical window is delivered to, turbulent flow is internally formed in optical window, the kinetic energy that electric discharge particulate flies to window is slackened, makes to put
Electric particulate can not be reached and be attached to window glass inner surface, and these electric discharge particulates are blown off optical window region, and real time cleaning swashs
Light device optical window；
8th, close electric discharge excited gaseous laser.
The present invention is not limited to above-mentioned embodiment, such as laser bodies are not limited to above-mentioned size and structure；Gas
Body circulation pipeline is not limited to outer circulation mode；Blower fan is not limited to axial flow blower and above-mentioned interface size；Resonator mirror diameter is not limited
In 50mm；Laser source of the gas is not limited to 40L；Laser optical window is not limited to cylindrical shape, and window glass diameter is not limited to 60mm, optical window
The material of the metal shell of cleaner is not limited to stainless steel；The number of energy dissipating piece is not limited to 3, the shape of energy dissipating piece in energy dissipating piece group
Shape is not limited to hollow disk-shaped, and the material of energy dissipating piece is not limited to stainless steel；Air pipe interface is not limited to standard D12 type cutting ferrule air pipe interfaces
Form；Tracheae is not limited to external diameter 12mm；Pneumatic filter is not limited to square structure, size be not limited to 200mm × 160mm ×
40mm, the material of multiple layer metal net is not limited to stainless (steel) wire, and the number of plies is not limited to 4 layers；Electrostatic precipitation area is not limited to above-mentioned specific chi
Very little, ionized region and collecting region are not limited to unpack format；End filter screen is not limited to manganese-nickel web.
Claims (10)
1. a kind of closed loop discharge excitation pulse repetition gas laser, including laser bodies (1), gas-recycling plant (4), gas
Object supply unit (7) and vacuum unit (6), the laser bodies (1) include entry/exit gas port, the gas-recycling plant
(4) connected with the entry/exit gas port of laser bodies (1), the gas feed unit (7) is both connected to vacuum unit (6)
On gas-recycling plant (4), it is characterised in that：
Also include automatically cleaning optical window (2), the automatically cleaning optical window (2) includes window glass (11) and optical window cleaner；
The optical window cleaner includes baffle box (10) and pneumatic filter (9)；
The baffle box (10) includes the inclined cylinder in one end (101), and the inner barrel has been radially arranged multiple energy dissipating pieces
(12)；The window glass (11) sealing is fixed on the beveled end of cylinder (101), the other end of cylinder (101) and laser
Exit end sealing is connected；Secondary air interface (103) is opened up on cylinder (101)；
The pneumatic filter (9) includes cavity (98), the air inlet (91) being arranged on cavity (98) and gas outlet (92), institute
State air inlet (91) to connect with gas-recycling plant (4) by tracheae, the gas outlet (92) is auxiliary by tracheae and baffle box
Air-flow interface (103) is helped to connect.
2. closed loop discharge excitation pulse repetition gas laser according to claim 1, it is characterised in that：The gas mistake
Multiple layer metal net (93), electrostatic precipitation ionized region (94), electrostatic are set gradually in the cavity of filter from air inlet to gas outlet to remove
Dirt collecting region (95), filter screen (96)；
Also include the adjustable power supply unit of output voltage, the insulating supporting (90) of wall within the cavity with being collected positioned at electrostatic precipitation
Ash bucket (97) below area；
The electrostatic precipitation ionized region includes multilayer tabular ground electrode and netted high-field electrode, and the ground electrode and high-field electrode are handed over
Fork is placed in parallel, and high-field electrode is arranged on insulating supporting (90), is connected with power supply unit；Ground electrode is arranged on cavity (98)
On, ground electrode and high-field electrode are parallel to gas flow direction；
The electrostatic precipitation collecting region includes tabular ground electrode and tabular high-field electrode, and ground electrode and high-field electrode cross parallel are put
Put, high-field electrode is arranged on insulating supporting (90), is connected with high-voltage DC power supply (99)；Ground electrode is arranged on cavity (98)
On, ground electrode and high-field electrode are parallel to gas flow direction.
3. closed loop discharge excitation pulse repetition gas laser according to claim 2, it is characterised in that：The multilayer gold
It is stainless (steel) wire to belong to net (93)；Electrostatic precipitation ionized region high-field electrode is stainless (steel) wire, and ground electrode is stainless steel plate；Electrostatic precipitation
Collecting region high-field electrode and ground electrode are stainless steel plate；Filter screen is made into using manganese-nickel fiber.
4. the closed loop discharge excitation pulse repetition gas laser according to claim 1 or 2 or 3, it is characterised in that：It is described
Disk with holes centered on energy dissipating piece (102), in addition to a caudal peduncle (107), it is by caudal peduncle (107) that energy dissipating piece (102) is solid
It is scheduled on the cylinder of baffle box (101).
5. closed loop discharge excitation pulse repetition gas laser according to claim 4, it is characterised in that：Baffle box cylinder
(101) be provided at both ends with flange, window glass (11) is arranged on the beveled end of cylinder by flange seal；The cylinder other end leads to
Flange seal is crossed in laser bodies (1).
6. closed loop discharge excitation pulse repetition gas laser according to claim 5, it is characterised in that：The gas is followed
Loop device (4) include two ends connected with laser bodies (1) gas recycling duct (41), the blower fan (42) in pipeline and
Aperture plate (43)；From blower fan to laser bodies direction, circulating line uses lateral magnification structure, longitudinal contraction structure.
7. closed loop discharge excitation pulse repetition gas laser according to claim 6, it is characterised in that：Laser bodies
Using stainless steel metal framework, nylon sheet is simultaneously installed, the pulsed discharge pumping source (5) of laser is connected in nylon sheet.
8. closed loop discharge excitation pulse repetition gas laser according to claim 7, it is characterised in that：The gas is supplied
Include source of the gas (71), the gas flow controller (72) connected with source of the gas by tracheae, valve and sharp for monitoring to unit (7)
The air gauge (73) of light device interior working gas pressure, wherein source of the gas are Stainless steel pressure vessels；The vacuum unit (6) includes
Vavuum pump (61), pressure sensor (62) and vacuum display instrument (63).
9. closed loop discharge excitation pulse repetition gas laser according to claim 8, it is characterised in that：Secondary air connects
Mouth (15) is located at close to one end of window glass；The cylinder of optical window cleaner is stainless steel cylinder, and energy dissipating piece is stainless steel wafer.
10. a kind of any described closed loop discharge excitation pulse repetition gas laser operation method of claim 1 to 9, it is special
Levy and be：Comprise the following steps：
First, adjust laser resonant cavity；
Second, vacuum unit is vacuumized to laser；
3rd, gas feed unit meets the working gas of requirement to being filled with laser；
4th, laser gas EGR is opened, working gas flows in gas-recycling plant；
5th, unbalanced pulse discharge pumped source, laser repetition electric discharge；
6th, in laser running, tracheae draws the working gas of certain flow at fan outlet, and the air-flow is in gas
A large amount of particulates that previous pulsed discharge is produced are removed through electrostatic precipitation and double-filtration in filter, are transformed into the work of cleaning
Gas, and laser optical window is delivered to, it is internally formed turbulent flow in optical window；
7th, close electric discharge excited gaseous laser.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109621615A (en) * | 2019-01-24 | 2019-04-16 | 宁波市天马空压机厂 | A kind of clarifier assisting gas for filtering laser cutting machine |
| US20210036478A1 (en) * | 2018-02-05 | 2021-02-04 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Optical system element, for receiving a pressurised functional fluid |
| CN115347448A (en) * | 2022-08-23 | 2022-11-15 | 西北核技术研究所 | Method and system for stably outputting pulse laser energy by adopting gas supply |
| CN115347439A (en) * | 2022-08-23 | 2022-11-15 | 西北核技术研究所 | Gas laser and method of outputting pulsed laser light |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20210036478A1 (en) * | 2018-02-05 | 2021-02-04 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Optical system element, for receiving a pressurised functional fluid |
| US11721946B2 (en) * | 2018-02-05 | 2023-08-08 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Optical system element, for receiving a pressurised functional fluid |
| CN109621615A (en) * | 2019-01-24 | 2019-04-16 | 宁波市天马空压机厂 | A kind of clarifier assisting gas for filtering laser cutting machine |
| CN109621615B (en) * | 2019-01-24 | 2024-03-29 | 宁波市天马空压机厂 | Purifier for filtering auxiliary gas of laser cutting machine |
| CN115347448A (en) * | 2022-08-23 | 2022-11-15 | 西北核技术研究所 | Method and system for stably outputting pulse laser energy by adopting gas supply |
| CN115347439A (en) * | 2022-08-23 | 2022-11-15 | 西北核技术研究所 | Gas laser and method of outputting pulsed laser light |
| CN115347448B (en) * | 2022-08-23 | 2024-06-11 | 西北核技术研究所 | Method and system for stably outputting pulse laser energy by adopting gas supply |
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