CN110441266A - A kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie - Google Patents
A kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie Download PDFInfo
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- CN110441266A CN110441266A CN201910380863.9A CN201910380863A CN110441266A CN 110441266 A CN110441266 A CN 110441266A CN 201910380863 A CN201910380863 A CN 201910380863A CN 110441266 A CN110441266 A CN 110441266A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4788—Diffraction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4788—Diffraction
- G01N2021/479—Speckle
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8477—Investigating crystals, e.g. liquid crystals
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Abstract
A kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie.This method focuses on the pump light source that crystal Jie sees defectoscopy instrument in the same point of sample with probe source by Path of Convergent Rays, and pumping laser heats the test point in sample, and remaining laser is received by laser power meter；Optical path requires detection light that must pass through the test point being heated completely through sample, exploring laser light, and due to the Temperature Distribution of test point, defect speckle will change；Micro- microscope group optical path lateral focus in the test point in sample, and collect sample interior defect light for scattering after by detection light irradiation, finally image in the photosurface of CCD；Position of the detection light in sample need to be only controlled by motor mobile example frame, can be obtained the defect scattering intensity of sample interior difference test point.
Description
Technical field
The present invention relates to crystal defect fields of measurement, in particular to a kind of dynamic for seeing defectoscopy instrument based on crystal Jie dissipates
Spot detection method.
Background technique
So far, the standard method of test that above-mentioned crystal dynamic Jie sees defect is not yet established both at home and abroad, is not also had in the market
There is the test equipment of commercialization.But crystal dynamic is situated between, sight defect has caused the importance that light laser influences grinds both at home and abroad
Study carefully the attention of personnel, body of the crystal under laser irradiation absorbs problem and attract attention.With the development of superlaser, to crystal material
Material proposes increasingly higher demands, and crystalline material can not be kept away due to the presence of manufacturing process (growth technique), raw material impurity
The presence exempted from absorbs.Correlative study shows crystal because body absorption causes internal local temperature to increase, and the body of 100ppm/cm is inhaled
Receiving coefficient will lead to about 0.4 ° of crystalline material of heating, and then lead to the unstable of optical system.Big absorption coefficient is limitation
One of the principal element that crystalline material is applied in superlaser.Generally using light splitting light in the measurement traditional sense of absorption coefficient
Degree meter is studied, but its measurement accuracy is only to 0.1%.The major technique for being capable of measuring ppm magnitude absorption coefficient has: photo-thermal is total
Road interferometry, photothermal deflection method, surface thermal lens method, optical heat radiation technology, laser Calorimetric Techniques and optoacoustic spectroscopy etc.
Deng wherein photo-thermal common path interference law technology relative maturity.Using photo-thermal common path interference law technology measure film absorption characteristic, by
Colleague approves and uses both at home and abroad, but the research for measuring crystalline material absorbed inside is relatively fewer.Other measurement methods, although
There is higher sensitivity, adjusting is relatively difficult, and stability is poor, it is difficult to meet means of testing functionization requirement.And it moves
Critically important scattering property and stress birfringence performance in the observation of state defect, have not yet to see research report.
The instrument that the present invention develops, by from three absorption, scattering, birefringent variation most important parameters to meso-scale
Dynamic defect is characterized, and to obtain to the deep understanding for seeing the generation of defect dynamic and dynamic evolution that is situated between, instructs crystalline material
It develops.As a kind of practical test equipment, in addition to high measurement accuracy, big measurement range, it is necessary to have good
Versatility and scalability, simple operation method, can satisfy the quick test request of batch samples.This is also crystal dynamic
It is situated between and sees the following main developing direction of defectoscopy instrument.
Laser and non-linear optical crystal material during the preparation process, since melt temperature fluctuation, seed crystal defect extend, former
Expect the factors such as impurity, crystals is caused to have a variety of defects.In middle low power laser, these defects will lead to crystal office
Portion's heating, generates thermal lens and stress birfringence effect, and laser beam quality deterioration, material property degradation is caused even to make laser
Device can not work normally.Defect has become the important bottlenecks that crystal is applied in light laser field.
Different according to defect generation time, crystal defect can also be divided into static defect and dynamic defect.Static defect be
Generate and solidify to get off in crystal growth, device fabrication process, not at any time with laser load and change, the method for observation
Compare more, technology also relative maturity.Dynamic defect is then that crystal is lacked by originally very small particular static in use
It is trapped under outer field action and develops and generate, and change with the variation of laser load.Dynamic defect seriously affects laser
Can, but outer field action is once withdrawn, dynamic defect may often mitigate again and even restore, and subsequent can not see in a static condition
It surveys, lacks effectively dynamic defect observation method at present.
According to the size of flaw size, crystal defect can be divided into macroscopical (mm grades), be situated between and see (μm grade), microcosmic (nm grades),
There are many middle gross imperfection detection method, and technology maturation；Microdefect size is too small, smaller to laser effect；Be situated between see defect by
Close with optical maser wavelength in scale, the influence to laser activity is maximum, but is a lack of mature observation method.
Due to shortage " dynamic is situated between and sees " the necessary observation method of crystal defect, researcher is in crystalline material preparation process
In general do not carry out technology of preparing improvement targetedly.In recent years, it with the development of High-power Laser Technologies, is prepared using conventional method
Laser and nonlinear crystal can no longer meet its requirement, such as: the absorption of the body of LBO (three lithium borates) leads to region light beam
Quality deteriorates problem, the induced with laser ash mark problem of KTP (potassium titanium oxide phosphate), the compound boundary of originated multi-section vanadate composite crystal
Face absorbs problem, the composite growth line problem of KDP (potassium dihydrogen phosphate).According to early-stage study, the dynamic of the above problem and crystal
Being situated between, it is closely related to see defect.Crystal dynamic, which is situated between, sees the elimination of defect, has become one of the important directions of superlaser development.
It realizes that crystal dynamic Jie sees the precise measurement of the parameters such as form, position and the distribution density of defect, is to eliminate defect
Primary precondition.So far, the standard method of test that crystal dynamic Jie sees defect is not yet established both at home and abroad, in the market
The test equipment not being commercialized.The method that non-outfield load is usually used in scientific research personnel, static test crystal property come big
Cause judge optical characteristics of the crystal in the laser in real work, but the result and laser reality obtained with these methods
Crystal property under operating condition has very big difference, and is all non-quantitative test, the test result phase that different observers obtain
Do not have comparativity between mutually, this makes, and dynamic Jie of crystalline material sees the research of defect, measurement lacks unified standard, makes significantly
The about research and development of related crystalline material.
Summary of the invention
The purpose of the invention is to realize that photo-thermal is total to dynamic Jie's sight defect of drive test amount crystal, it is achieved in that one kind
Based on crystal be situated between see defectoscopy instrument dynamic speckle detection method, the dynamic speckle detection method include probe source,
Pump light source, pumping optical path, specimen holder, optical path, power meter, micro- microscope group, ccd detector and data processing software；
Wherein pump light source and probe source are focused in the same point of sample by Path of Convergent Rays, and pumping laser heats the survey in sample
Pilot, remaining laser are received by laser power meter；Optical path require detection light must pass through completely through sample, exploring laser light by
The test point of heating, due to the Temperature Distribution of test point, defect speckle will change；Lateral focus of the micro- microscope group in optical path
In the test point in sample, and the light that sample interior defect scatters after by detection light irradiation is collected, finally images in the light of CCD
Quick face；Position of the detection light in sample need to be only controlled by motor mobile example frame, can be obtained the survey of sample interior difference
The defect scattering intensity of pilot；The measurement method belongs to a measurement, need be by two axial end faces of sample and two sides
Face is polished；Specimen holder is motor-controlled adjustment frame that can be mobile with precision three-dimensional, minimum step 0.1mm；Pumping
Optical source wavelength is 1064nm, and focus point spot radius is 20 μm, and power density adjusting range is 0~1.6MW/cm2；Probe source
Power bracket is 1~10nW；The micro- microscope group enlargement ratio adjusting range is 0.75x~5x；The frame of the ccd detector
Rate is 30 frames or more.
Detailed description of the invention
Fig. 1 is to be situated between to see the schematic diagram of the dynamic speckle detection method of defectoscopy instrument based on crystal.Wherein 1 is pump light
Source, 2 be probe source, and 3 be Path of Convergent Rays, and 4 be electric three-dimensional specimen holder, and 5 be sample, 6 for the micro- microscope group of scatterometry and at
As CCD, 7 be power meter, and 8 be photodetector.
Specific embodiment
Two end faces of laser crystal sample and two sides must be polished first；
Crystal prototype after polishing is placed on specimen holder；
Pump light source uses power for 1064 lasers of 20W, and testing light source uses power for the He-Ne laser of 10mw；
Pump light source is converged at a bit with testing light source by intersecting focused light passages；
Pump light source power is recorded by light power meter, and testing light source is surveying pumping focal beam spot by optical system for testing
Try the center of focal beam spot；
Micro- microscope group is focused on and intersects focused light passages convergence test point, and adjusts height；
Specimen holder is adjusted, focuses on laser on sample by adjusting specimen holder, the intensity of defect speckle is read by CCD
Value；
Defective locations and size can be labeled and the storage and analysis of speckle intensity in data processing software.
Three-dimensional movement is carried out by motor driven sample, the distributed in three dimensions of one-piece sample can be scanned.
Claims (11)
1. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie, which is characterized in that the dynamic speckle
Detection method includes probe source, pump light source, pumping optical path, specimen holder, optical path, power meter, micro- microscope group, CCD spy
Survey device and data processing software；Wherein pump light source and probe source are focused in the same point of sample by Path of Convergent Rays,
Pumping laser heats the test point in sample, and remaining laser is received by laser power meter；Optical path requires detection light must be completely
Through sample, exploring laser light passes through the test point being heated, and due to the Temperature Distribution of test point, defect speckle will change；
Micro- microscope group optical path lateral focus in the test point in sample, and collect sample interior defect by detection light irradiation after scatter
Light, finally image in the photosurface of CCD；Position of the detection light in sample need to be only controlled by motor mobile example frame,
It can be obtained the defect scattering intensity of sample interior difference test point.
2. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the measurement method belongs to a measurement.
3. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, two axial end faces of the sample need polish.
4. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, two sides of the sample need polish.
5. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the specimen holder is motor-controlled adjustment frame that can be mobile with precision three-dimensional, minimum step 0.1mm.
6. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the pump light source wavelength is 1064nm.
7. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the focus point spot radius of the pumping optical path is 20 μm.
8. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the focus point power density adjusting range of the pumping optical path is 0~1.6MW/cm2。
9. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the probe source power bracket is 1~10mW.
10. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the micro- microscope group enlargement ratio adjusting range is 0.75x~5x.
11. a kind of dynamic speckle detection method for seeing defectoscopy instrument based on crystal Jie according to claim 1, feature
It is, the frame per second of the ccd detector is 30 frames or more.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1065525A (en) * | 1991-03-30 | 1992-10-21 | 中国科学院福建物质结构研究所 | Light scattering chromatography for nondestructive testing of transparent materials and apparatus therefor |
| CN107121395A (en) * | 2016-05-27 | 2017-09-01 | 中国科学院福建物质结构研究所 | A kind of photo-thermal common path interference module and its method for measuring crystal defect |
| CN108562547A (en) * | 2018-03-13 | 2018-09-21 | 中国科学院福建物质结构研究所 | Laser crystal thermal stress double refractive inde measuring device and its method |
-
2019
- 2019-05-08 CN CN201910380863.9A patent/CN110441266A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1065525A (en) * | 1991-03-30 | 1992-10-21 | 中国科学院福建物质结构研究所 | Light scattering chromatography for nondestructive testing of transparent materials and apparatus therefor |
| CN107121395A (en) * | 2016-05-27 | 2017-09-01 | 中国科学院福建物质结构研究所 | A kind of photo-thermal common path interference module and its method for measuring crystal defect |
| CN108562547A (en) * | 2018-03-13 | 2018-09-21 | 中国科学院福建物质结构研究所 | Laser crystal thermal stress double refractive inde measuring device and its method |
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Application publication date: 20191112 |