CN205670125U - A kind of dynamically Jie based on crystal sees the photo-thermal road module altogether of defects detection - Google Patents
A kind of dynamically Jie based on crystal sees the photo-thermal road module altogether of defects detection Download PDFInfo
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- CN205670125U CN205670125U CN201620525989.2U CN201620525989U CN205670125U CN 205670125 U CN205670125 U CN 205670125U CN 201620525989 U CN201620525989 U CN 201620525989U CN 205670125 U CN205670125 U CN 205670125U
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- 230000007547 defect Effects 0.000 title claims abstract description 48
- 239000013078 crystal Substances 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 title claims abstract description 13
- 239000000523 sample Substances 0.000 claims abstract description 28
- 238000012360 testing method Methods 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 230000008859 change Effects 0.000 claims abstract description 9
- 238000009826 distribution Methods 0.000 claims abstract description 5
- 238000004364 calculation method Methods 0.000 claims abstract description 4
- 238000005086 pumping Methods 0.000 claims abstract description 4
- 238000004093 laser heating Methods 0.000 claims abstract description 3
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 description 16
- 239000002178 crystalline material Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035800 maturation Effects 0.000 description 2
- 235000019796 monopotassium phosphate Nutrition 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010561 standard procedure Methods 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910017502 Nd:YVO4 Inorganic materials 0.000 description 1
- 208000031481 Pathologic Constriction Diseases 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910000402 monopotassium phosphate Inorganic materials 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 238000004867 photoacoustic spectroscopy Methods 0.000 description 1
- WYOHGPUPVHHUGO-UHFFFAOYSA-K potassium;oxygen(2-);titanium(4+);phosphate Chemical compound [O-2].[K+].[Ti+4].[O-]P([O-])([O-])=O WYOHGPUPVHHUGO-UHFFFAOYSA-K 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012113 quantitative test Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 210000001215 vagina Anatomy 0.000 description 1
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 description 1
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- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
nullA kind of dynamically Jie based on crystal sees the photo-thermal road module altogether of defects detection，Crystal defect measuring instrument based on this module by focusing on the same point of sample by pumping laser and exploring laser light，Defect is seen in being dynamically situated between of test sample，The dynamic defect three-dimensional distribution map of sample is obtained by the movement of sample，Photo-thermal common path interference module of the present utility model includes pump light source、Probe source、Path of Convergent Rays、Specimen holder、Optical path、Laser power meter and wave front detector，Pumping laser heating test point，Residue laser is received by laser power meter，Exploring laser light is by heated test point，Temperature Distribution due to test point，Wavefront interferes change，Weak laser through sample passes through optical path，It is irradiated to wave front detector，Measure the wavefront information after change，Pass through comparing calculation，Obtain the heat condition of point of irradiation and absorb size.
Description
Technical field
The present invention relates to crystal defect fields of measurement, particularly to a kind of based on crystal dynamically be situated between see defects detection photo-thermal
Road module altogether.
Background technology
Up to now, the most not yet set up upper crystal and be dynamically situated between and see the standard method of test of defect, market does not has yet
The test instrunment of commercialization.But, crystal is dynamically situated between and sees the defect importance that affect light laser and caused and study both at home and abroad
The attention of personnel, crystal body under laser irradiates absorbs problem and receives publicity.Along with the development of superlaser, to crystalline material
Propose the highest requirement, and crystalline material is due to manufacturing process (growth technique), the existence of raw material impurity, unavoidably
Existence absorb.Correlational study surface, crystal causes internal local temperature to raise because body absorbs, the absorption system of 100ppm/cm
Number can cause the intensification of crystalline material about 0.4 °, and then causes the instability of optical system.Big absorptance is to limit crystal
One of principal element that material is applied in superlaser.Spectrophotometer is typically used in the measurement traditional sense of absorptance
Study, but its certainty of measurement is only to 0.1%.The major technique that can measure ppm magnitude absorptance has: photo-thermal road altogether is done
Relate to method, photothermal deflection method, surface thermal lens method, optical heat radiation technology, amount of laser light thermal technology and optoacoustic spectroscopy etc., wherein
Photo-thermal common path interference law technology relative maturity.Utilizing photo-thermal common path interference law technology to measure film absorption characteristic, oneself is by both at home and abroad
Colleague's accreditation and employing, but the research measuring crystalline material absorbed inside is relatively fewer.Other measuring method, despite higher
Sensitivity, regulate the most relatively difficult, and less stable, it is difficult to meet the practical requirement of means of testing.And dynamic defect
Scattering property critically important in observation and stress birfringence performance, have not yet to see research report.
The instrument that the present invention develops, will change three most important parameters to meso-scale from absorption, scattering, birefringence
Dynamic defect characterizes, and dynamically produces the sight defect that is situated between and the deep understanding of dynamic evolution to obtain, instructs crystalline material to grind
System.As the test instrunment of a kind of practicality, except having high certainty of measurement, big measurement scope, it is necessary to have good
Versatility and autgmentability, simple operation method, it is possible to the quick test request of batch samples.This be also crystal dynamically be situated between sight lack
Fall into the following main developing direction of measuring instrument.
Crystal is dynamically situated between sight defectoscopy instrument, and it is mainly used in laser and nonlinear optical crystal and is dynamically situated between and sees the survey of defect
Amount.The fields such as light laser is made at first system, national security play the most important effect, high energy, ultrashort, ultrafast and superpower
Laser and application, listed China's " national medium-to long-range program for scientific and technological development " in.Large scale high-quality laser and non-linear crystalline substance
Body is the core component of light laser, the research of one of 16 key special subjects " inertial confinement fusion igniting engineering (2020) " in planning
One of target develops high-quality oversize nonlinear optical crystal exactly.According to the specific demand of light laser application, for
Property carries out the systematic study of the relevant rudimentary problem in science such as laser and the defect of nonlinear crystalline material, absorption, to China future
High-tech industry and national defense construction have great strategic significance and the realistic meaning of " without being bound by people ".
Laser and non-linear optical crystal material in preparation process, due to melt temperature fluctuation, seed crystal defect extend, former
The factors such as material impurity, cause crystals to there is number of drawbacks.In middle low power laser instrument, due to laser power density relatively
Little, the impact of crystal defect is inconspicuous；But in superpower laser, these defects can cause crystal local heating, produce
Thermal lens and stress birfringence effect, cause laser beam quality deterioration, material property degradation even to make the laser instrument cannot be normal
Work.Defect has become as the important bottlenecks that crystal is applied in light laser field.
Producing the time according to defect different, crystal defect also can be divided into static defect and dynamic defect.Static defect be
Crystal growth, device fabrication process produce and solidify, the most in time with laser load and change, the method for its observation
The most, technology also relative maturity.Dynamic defect is then that crystal is in use lacked by the most small particular static
It is trapped under outer field action differentiation and produces, and change along with the change of laser load.Dynamic defect has a strong impact on laser
Can, but outer field action is once withdrawn, and dynamic defect may alleviate the most again and even recover, it is impossible to follow-up see in a static condition
Survey, lack effective dynamic defect defect observation method at present.
According to the size of defect yardstick, crystal defect can be divided into macroscopic view (mm level), be situated between and see (μm level), microcosmic (nm level), its
Middle gross imperfection observation procedure is a lot, and technology maturation；Microdefect size is the least, less to laser effect；Be situated between see defect by
Close with optical maser wavelength in yardstick, it is maximum on the impact of laser activity, but is a lack of the observation procedure of maturation.
Owing to lacking the observation method of " dynamically, be situated between and see " crystal defect necessity, research worker is in crystalline material preparation process
In general the most not pin be prepared technique improvement.In recent years, along with the development of strong technology technology, conventional method is used to prepare
Laser and nonlinear crystal cannot meet it and use requirement, such as: the body of LBO (three Lithium biborates) absorbs and causes region light beam
Quality deterioration problem, the induced with laser ash mark problem of KTP (potassium titanium oxide phosphate), the compound boundary of originated multi-section vanadate composite crystal
Face absorbs problem, the composite growth stricture of vagina problem of KDP (potassium dihydrogen phosphate).According to early-stage Study, the problems referred to above and crystal dynamic
It is closely related that state Jie sees defect.Crystal is dynamically situated between and sees the elimination of defect, has become as one of important directions of superlaser development.
Realize crystal to be dynamically situated between the sight form of defect, position and the isoparametric accurate measurement of distribution density, be to eliminate defect
Primary precondition.Up to now, the most not yet set up crystal dynamically be situated between see defect standard method of test, on market also
There is no the test instrunment of commercialization.Scientific research personnel usually uses the method for non-outfield load, static test crystal property, comes big
Cause the optical characteristics judging in crystal real work in the laser, but the result obtained by these methods is actual with laser instrument
Crystal property under working condition has the biggest difference, and is all non-quantitative test, the test result phase that different observers obtain
Not possessing comparability between Hu, this makes dynamically being situated between of crystalline material see the research of defect, measures the standard that shortage is unified, significantly makes
The about research and development of related crystalline material.
Summary of the invention
The invention aims to realize the sight defect that is dynamically situated between of photo-thermal drive test amount crystal altogether, it is achieved in that one
Dynamically being situated between based on crystal and see the photo-thermal road module altogether of defects detection, described photo-thermal common path interference module includes pump light source, detection
Light source, Path of Convergent Rays, specimen holder, optical path, laser power meter and wave front detector, wherein pump light source and probe source
Focus in the same point of sample by Path of Convergent Rays, pumping laser heating test point, residue laser is received by laser power meter,
Exploring laser light is by heated test point, and due to the Temperature Distribution of test point, wavefront interferes change, weak through sample
Laser passes through optical path, is irradiated to wave front detector, measures the wavefront information after change, passes through comparing calculation, it is thus achieved that irradiate
The heat condition of point and absorption size, described pump light source can use same type laser, it would however also be possible to employ dissimilar
LASER Light Source assemble formed, described pump light source power bracket is 5～30W, described probe source laser power scope be 1～
10mw, it is 20 μm that described pump light source focuses on the focal spot size on sample by Path of Convergent Rays, and probe source passes through converging light
It is 50 μm that road focuses on the focal spot size on sample, and described specimen holder is by the adjustment frame that can move with precision three-dimensional, described sample
The minimum moving step length of frame is 10 microns.
Accompanying drawing explanation
Fig. 1 is the structural representation of photo-thermal common path interference module.Wherein 11 is probe source, and 12 is pump light source, and 13 are
Path of Convergent Rays, 14 is specimen holder, and 15 is sample, and 16 is light power meter, and 17 is optical path, and 18 is wave front detector
Detailed description of the invention
Embodiment 1: choose laser crystal Nd:YVO4Sample is placed on specimen holder, and pump light source uses power to be 10W's
1064nm laser instrument, testing light source uses power to be the helium neon laser of 1mw, and pump light source focuses on by intersecting with testing light source
Light path converges at same point, and pump light source power passes through light power meter record, and testing light source is allowed to be irradiated to by optical system for testing
On wave front detector and record numerical value, adjust specimen holder, make laser focusing on sample by adjusting specimen holder, record now
Energy meter numerical value and Wavefront detecting numerical value, by comparing calculation draw this point heat condition and absorb size, pass through sample
Three-dimensional mobile, the distributed in three dimensions of one-piece sample can be gone out by scanning survey.
Claims (7)
1. one kind is dynamically situated between based on crystal and to see the photo-thermal altogether road module of defects detection, it is characterised in that described photo-thermal common path interference
Module includes pump light source, probe source, Path of Convergent Rays, specimen holder, optical path, laser power meter and wave front detector,
Wherein pump light source and probe source focus in the same point of sample by Path of Convergent Rays, pumping laser heating test point, surplus
Remaining laser is received by laser power meter, and exploring laser light is by heated test point, and due to the Temperature Distribution of test point, wavefront is sent out
The raw interference changes, and the weak laser through sample passes through optical path, is irradiated to wave front detector, measures the wavefront letter after change
Breath, passes through comparing calculation, it is thus achieved that the heat condition of point of irradiation and absorption size.
A kind of dynamically Jie based on crystal the most according to claim 1 sees the photo-thermal road module altogether of defects detection, and its feature exists
In, described pump light source can use same type laser, it would however also be possible to employ dissimilar LASER Light Source is assembled and formed.
A kind of dynamically Jie based on crystal the most according to claim 1 sees the photo-thermal road module altogether of defects detection, and its feature exists
In, described pump light source power bracket is 5～30W.
A kind of dynamically Jie based on crystal the most according to claim 1 sees the photo-thermal road module altogether of defects detection, and its feature exists
In, described probe source laser power scope is 1～10mW.
A kind of dynamically Jie based on crystal the most according to claim 1 sees the photo-thermal road module altogether of defects detection, and its feature exists
In, it is 20 μm that described pump light source focuses on the focal spot size on sample by Path of Convergent Rays, and probe source passes through Path of Convergent Rays
Focusing on the focal spot size on sample is 50 μm.
A kind of dynamically Jie based on crystal the most according to claim 1 sees the photo-thermal road module altogether of defects detection, and its feature exists
In, described specimen holder is by the adjustment frame that can move with precision three-dimensional.
A kind of dynamically Jie based on crystal the most according to claim 1 sees the photo-thermal road module altogether of defects detection, and its feature exists
In, the minimum moving step length of described specimen holder is 10 microns.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620525989.2U CN205670125U (en) | 2016-06-02 | 2016-06-02 | A kind of dynamically Jie based on crystal sees the photo-thermal road module altogether of defects detection |
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| CN201620525989.2U CN205670125U (en) | 2016-06-02 | 2016-06-02 | A kind of dynamically Jie based on crystal sees the photo-thermal road module altogether of defects detection |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270083A (en) * | 2018-08-30 | 2019-01-25 | 中国工程物理研究院激光聚变研究中心 | A kind of optic element damage detection device based on optically erasing |
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2016
- 2016-06-02 CN CN201620525989.2U patent/CN205670125U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270083A (en) * | 2018-08-30 | 2019-01-25 | 中国工程物理研究院激光聚变研究中心 | A kind of optic element damage detection device based on optically erasing |
| CN109270083B (en) * | 2018-08-30 | 2023-08-04 | 中国工程物理研究院激光聚变研究中心 | Optical element damage detection device based on optical parametric amplification |
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Granted publication date: 20161102 |