CN110412666A - A kind of production method and application of microarray optical element mold - Google Patents
A kind of production method and application of microarray optical element mold Download PDFInfo
- Publication number
- CN110412666A CN110412666A CN201810404564.XA CN201810404564A CN110412666A CN 110412666 A CN110412666 A CN 110412666A CN 201810404564 A CN201810404564 A CN 201810404564A CN 110412666 A CN110412666 A CN 110412666A
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- China
- Prior art keywords
- optical
- microarray
- mould
- optical element
- polishing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
Abstract
The present invention relates to optical technical fields, more particularly, to a kind of production method of microarray optical element mold comprising following steps: 1) carving optical mould compatible with microarray optical element shape with femtosecond laser；2) surface melting or polishing method are used, the surface of optical mould is fabricated to the optical surface of optical grade, obtains microarray optical element mold；The surface melting method are as follows: use continuous laser to focus the surface of optical mould to melt its surface rapidly, generate nature tension and make optical mould that there is optical surface；The polishing method are as follows: using the optical surface of one or more of soft polishing pad polishing, microballoon polishing, Magnetorheological Polishing and the polishing of dimpling syringe needle production optical mould.A kind of application of microarray optical element mold carries out press process to optical material using microarray optical element mold, microarray optical element is made.
Description
Technical field
The present invention relates to optical technical field, a kind of production method more particularly, to microarray optical element mold and answer
With.
Background technique
Currently, microlens array generally uses the methods of ion-exchange, photosensitive glass hot-forming method, nuda rice
It is made.The each have their own advantage and disadvantage of these methods, such as ion-exchange parameter are difficult to control, photosensitive glass hot-forming method curvature
Radius is more difficult to control, and the applicable lens material of nuda rice is limited etc., and these methods all have process-cycle length, hardly possible
The defects of to be mass produced.Also no one proposes that femtosecond laser makes the concept of microlens array mold at present, is swashed using femtosecond
Light production microarray mold can shorten the microarray optical element process-cycle, and large-scale production becomes a kind of possibility.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to provide, a kind of design is reasonable, and structure is simple, production letter
Easily, the production method and application of low-cost microarray optical element mold.
To achieve the above object, the invention adopts the following technical scheme:
A kind of production method of microarray optical element mold comprising following steps:
1) optical mould compatible with microarray optical element shape is carved with femtosecond laser；
2) surface melting or polishing method are used, the surface of optical mould is fabricated to the optical surface of optical grade, is obtained micro-
Array optical element mold；
The surface melting method are as follows: the surface for using continuous laser to focus optical mould is produced from melting its surface rapidly
Right tension makes optical mould have optical surface；
The polishing method are as follows: using one of soft polishing pad polishing, microballoon polishing, Magnetorheological Polishing and the polishing of dimpling syringe needle
The optical surface of the above production optical mould.
Preferably, the optical mould is by glass or metal forming.
A kind of application of microarray optical element mold, suppresses optical material using microarray optical element mold
Microarray optical element is made in processing.
Preferably, the microarray optical element is microlens array or micro- V slot.
Preferably, the optical mould in step 1) has multiple when the microarray optical element is microlens array
The convex spherical or concave spherical surface that radius R is 10-100 μm.
Preferably, surface melting method described in step 2 are as follows: using continuous laser focus optical mould dimple or
Person's dimpling spherical surface generates nature tension and optical mould is made to have optical surface to melt its surface rapidly.
Preferably, the optical mould in step 1) has multiple V-grooves when the microarray optical element is micro- V slot.
Preferably, surface melting method described in step 2 are as follows: focus the V-shaped groove surface of optical mould using continuous laser
To melt its surface rapidly, generates nature tension and make optical mould that there is optical surface.
The invention adopts the above technical scheme, and efficiently removal (0.01- can be achieved on hard brittle material using femto-second laser
1 μm/pulse) processing, can 10 μm of -100 μm of magnitudes of processing and fabricating lenticule mold, made using femtosecond laser micro-
Mirror mold can shorten the microlens array process-cycle, can greatly reduce cost, be advantageously implemented large-scale production.The present invention
Rationally, structure is simple for design, and production is simple, low in cost.The present invention make micro- V slot principle and thinking and production lenticule battle array
It arranges identical.
Femto-second laser die sinking, although carving spherical surface or non-face microlens shape is not have any problems, in the past
Why unmanned die sinking is successful, and a most serious problem is that sculpture surface is not optical surface, and this patent above method can make
The surface for obtaining the microarrays optical element such as microlens array mold and micro- V groove mould reaches optics rank surface.
Detailed description of the invention
The present invention is described in further details below in conjunction with the drawings and specific embodiments:
Fig. 1 is 1 schematic diagram of production method embodiment of microarray optical element of the present invention；
Fig. 2 is polishing method schematic diagram in the embodiment of the present invention 1；
Fig. 3 is surface melting method schematic diagram in the embodiment of the present invention 2；
Fig. 4 is the micro- V groove mould structural schematic diagram of the present invention.
Specific embodiment
The present invention will be further described in detail with reference to the specific embodiments:
Shown in one of picture 1-4, the production method of microarray optical element of the present invention comprising following steps:
1) optical mould compatible with microarray optical element shape is carved with femtosecond laser；
2) surface melting or polishing method are used, the surface of optical mould is fabricated to the optical surface of optical grade, is obtained micro-
Array optical element mold；
The surface melting method are as follows: the surface for using continuous laser to focus optical mould is produced from melting its surface rapidly
Right tension makes optical mould have optical surface；
The polishing method are as follows: using one of soft polishing pad polishing, microballoon polishing, Magnetorheological Polishing and the polishing of dimpling syringe needle
The optical surface of the above production optical mould.
Preferably, the optical mould is by glass or metal forming.
A kind of application of microarray optical element mold, suppresses optical material using microarray optical element mold
Microarray optical element is made in processing.
Preferably, the microarray optical element is microlens array or micro- V slot.
Embodiment 1
As shown in Figure 1, the microarray optical element be microlens array when, the production method of microlens array mold include with
Lower step:
1) optical mould compatible with microlens array shape is carved with femtosecond laser, which has multiple radius R
For 10-100 μm of convex spherical or concave spherical surface；
2) polishing method is used, the surface of optical mould is fabricated to the optical surface of optical grade, obtains microlens array mold；
The polishing method are as follows: using one of soft polishing pad polishing, microballoon polishing, Magnetorheological Polishing and the polishing of dimpling syringe needle
The optical surface of the above production optical mould.
A kind of application of microlens array mold carries out press process, system to optical material using microlens array mold
Obtain microlens array.
As shown in Fig. 2, preferably, the microballoon polishes are as follows: using microglass bead or micro- steel ball rotation polishing production
The optical surface of microarray mold；Specifically, it is sticked on one thin stick using microglass bead or micro- steel ball through mechanical rotation
Microlens array mold is polished one by one.
Embodiment 2
As shown in figure 3, surface melting method is used in step 2, by light when the microarray optical element is microlens array
The surface for learning mold is fabricated to the optical surface of optical grade, obtains microlens array mold；
The surface melting method are as follows: the dimple or dimpling spherical surface for using continuous laser to focus optical mould are to melt rapidly its table
Face generates nature tension and optical mould is made to have optical surface.
Preferably, the optical mould is by glass or metal forming.
Preferably, the optical mould in step 1) has multiple V-grooves when the microarray optical element is micro- V slot.
Preferably, method A is that continuous laser is used to focus the V-shaped groove surface of optical mould to melt it rapidly in step 2
Surface generates nature tension and optical mould is made to have optical surface.
Embodiment 3
As shown in figure 4, when the microarray optical element is micro- V slot, the production method of micro- V groove mould the following steps are included:
1) optical mould compatible with micro- V groove shape is carved with femtosecond laser；
2) surface melting or polishing method are used, the surface of optical mould is fabricated to the optical surface of optical grade, obtains micro- V
Groove mould；
The surface melting method are as follows: the V-shaped groove surface for using continuous laser to focus optical mould is generated with melting its surface rapidly
Natural tension makes optical mould have optical surface；
The polishing method are as follows: one in polishing is repaired using soft polishing pad polishing, microballoon polishing, Magnetorheological Polishing and dimpling syringe needle
Kind or more production optical mould optical surface.
A kind of application of micro- V groove mould carries out press process molding to optical material using micro- V groove mould, obtains micro- V
Slot.
The invention adopts the above technical scheme, and principle and the thinking for making micro- V slot are identical as production microlens array.
Femto-second laser die sinking, although carving spherical surface or non-face microlens shape is not have any problems, in the past
Why unmanned die sinking is successful, and a most serious problem is that sculpture surface is not optical surface, and this patent above method can make
The surface for obtaining microlens array mold and micro- V groove mould reaches optics rank surface.
Claims (8)
1. a kind of production method of microarray optical element mold, it is characterised in that: itself the following steps are included:
1) optical mould compatible with microarray optical element shape is carved with femtosecond laser；
2) surface melting or polishing method are used, the surface of optical mould is fabricated to the optical surface of optical grade, is obtained micro-
Array optical element mold；
The surface melting method are as follows: the surface for using continuous laser to focus optical mould is produced from melting its surface rapidly
Right tension makes optical mould have optical surface；
The polishing method are as follows: using one of soft polishing pad polishing, microballoon polishing, Magnetorheological Polishing and the polishing of dimpling syringe needle
The optical surface of the above production optical mould.
2. a kind of production method of microarray optical element mold according to claim 1, it is characterised in that: the optics
Mold is by glass or metal forming.
3. a kind of application of microarray optical element mold according to claim 1, it is characterised in that: utilize microarray light
It learns component mold and press process is carried out to optical material, microarray optical element is made.
4. a kind of application of microarray optical element mold according to claim 3, it is characterised in that: the microarray light
Learning element is microlens array or micro- V slot.
5. a kind of application of microarray optical element mold according to claim 4, it is characterised in that: the microarray light
When element is microlens array, it is 10-100 μm of convex spherical or recessed ball that the optical mould in step 1), which has multiple radius R,
Face.
6. a kind of application of microarray optical element mold according to claim 5, it is characterised in that: described in step 2
Surface melting method are as follows: the dimple or dimpling spherical surface for using continuous laser to focus optical mould are produced with melting its surface rapidly
Being born from right tension makes optical mould have optical surface.
7. a kind of application of microarray optical element mold according to claim 4, it is characterised in that: the microarray light
When element is micro- V slot, the optical mould in step 1) has multiple V-grooves.
8. a kind of application of microarray optical element mold according to claim 7, it is characterised in that: described in step 2
Surface melting method are as follows: use continuous laser to focus the V-shaped groove surface of optical mould to melt its surface rapidly, generate nature tension
So that optical mould has optical surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810404564.XA CN110412666A (en) | 2018-04-28 | 2018-04-28 | A kind of production method and application of microarray optical element mold |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810404564.XA CN110412666A (en) | 2018-04-28 | 2018-04-28 | A kind of production method and application of microarray optical element mold |
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| CN110412666A true CN110412666A (en) | 2019-11-05 |
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| CN201810404564.XA Pending CN110412666A (en) | 2018-04-28 | 2018-04-28 | A kind of production method and application of microarray optical element mold |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005324296A (en) * | 2004-05-14 | 2005-11-24 | Ricoh Co Ltd | Method of polishing die for molding optical element |
| RU2007149070A (en) * | 2007-12-25 | 2009-06-27 | Общество с ограниченной ответственностью Вятское машиностроительное предприятие "Лазерная техника и технология" (RU) | METHOD OF LASER-PLASMA POLISHING OF METAL SURFACE |
| CN101564824A (en) * | 2009-06-05 | 2009-10-28 | 湖南大学 | Method and device for polishing magneto-rheological inclined shaft |
| FR2977182A1 (en) * | 2011-07-01 | 2013-01-04 | Commissariat Energie Atomique | PROCESS FOR PRODUCING AN OPTICAL COMPONENT FOR REMOVING SURFACE DEFECTS |
| CN104985523A (en) * | 2015-06-16 | 2015-10-21 | 中国工程物理研究院激光聚变研究中心 | Fragile hollow micro-sphere polishing machine and polishing method |
| CN106501883A (en) * | 2016-10-26 | 2017-03-15 | 北京航空航天大学 | A kind of micro-nano preparation method of high accuracy microlens array structure |
| CN107790875A (en) * | 2017-10-09 | 2018-03-13 | 江苏大学 | A kind of gradual laser blast wave polishing method |
-
2018
- 2018-04-28 CN CN201810404564.XA patent/CN110412666A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005324296A (en) * | 2004-05-14 | 2005-11-24 | Ricoh Co Ltd | Method of polishing die for molding optical element |
| RU2007149070A (en) * | 2007-12-25 | 2009-06-27 | Общество с ограниченной ответственностью Вятское машиностроительное предприятие "Лазерная техника и технология" (RU) | METHOD OF LASER-PLASMA POLISHING OF METAL SURFACE |
| CN101564824A (en) * | 2009-06-05 | 2009-10-28 | 湖南大学 | Method and device for polishing magneto-rheological inclined shaft |
| FR2977182A1 (en) * | 2011-07-01 | 2013-01-04 | Commissariat Energie Atomique | PROCESS FOR PRODUCING AN OPTICAL COMPONENT FOR REMOVING SURFACE DEFECTS |
| CN104985523A (en) * | 2015-06-16 | 2015-10-21 | 中国工程物理研究院激光聚变研究中心 | Fragile hollow micro-sphere polishing machine and polishing method |
| CN106501883A (en) * | 2016-10-26 | 2017-03-15 | 北京航空航天大学 | A kind of micro-nano preparation method of high accuracy microlens array structure |
| CN107790875A (en) * | 2017-10-09 | 2018-03-13 | 江苏大学 | A kind of gradual laser blast wave polishing method |
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Application publication date: 20191105 |
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