CN110412606A - Measure the devices and methods therefor of distance and displacement simultaneously based on heterodyne laser interferometer - Google Patents
Measure the devices and methods therefor of distance and displacement simultaneously based on heterodyne laser interferometer Download PDFInfo
- Publication number
- CN110412606A CN110412606A CN201910757968.1A CN201910757968A CN110412606A CN 110412606 A CN110412606 A CN 110412606A CN 201910757968 A CN201910757968 A CN 201910757968A CN 110412606 A CN110412606 A CN 110412606A
- Authority
- CN
- China
- Prior art keywords
- digital
- laser
- circuit
- signal
- laser interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000012360 testing method Methods 0.000 claims abstract description 23
- 238000012545 processing Methods 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims description 29
- 230000010287 polarization Effects 0.000 claims description 16
- 230000028161 membrane depolarization Effects 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 10
- 230000003321 amplification Effects 0.000 claims description 9
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 9
- 230000005611 electricity Effects 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 20
- 230000005540 biological transmission Effects 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000035559 beat frequency Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 241000931526 Acer campestre Species 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses a kind of devices and methods therefors for measuring distance and displacement simultaneously based on heterodyne laser interferometer, are related to laser interference accurate measurement and digital processing field.The present apparatus includes object under test (40), is provided with signal source (10), digital demodulating circuit (20) and heterodyne laser interferometer (30)；Signal source (10) is connect with heterodyne laser interferometer (20), for modulating laser frequency and driving acousto-optic frequency shifters；Signal source (10) is connect with digital demodulating circuit (30) simultaneously, for providing reference signal；Heterodyne laser interferometer (20) is connected to object under test (40), for generating laser interference beat signal；Heterodyne laser interferometer (20) is connect with digital demodulating circuit (30), for providing beat signal.The present invention is suitable for the field of precision measurement of laser ranging, can be used for improving range accuracy index and makes the senser element of high-acruracy survey distance and displacement.
Description
Technical field
The present invention relates to laser interference accurate measurement and digital processing fields, more particularly to one kind to be based on heterodyne laser
Interferometer measures the devices and methods therefor of distance and displacement simultaneously, suitable for the field of precision measurement of laser ranging, while can also
For making the senser element of high-acruracy survey distance and displacement.
Background technique
The fields such as base application, industry and aeronautical manufacture and space engineering have ahead of the curve for accurate measurement length or distance
There is particularly important meaning.With aeronautical technology, satellite formation flying, deep space exploration imaging and high-end manufacturing technology it is quick
Development, the demand to large-scale dimension accurate measurement is more more and more urgent, and main indicator requires to be embodied in large scale/distance, high-precision
Degree and quick response, need the range of range measurement from several meters to millions of kilometers, the precision of measurement is from micron to rice magnitude.
Laser interferometer is one of key devices in the works such as satellite earth gravity field measurement, the detection of spatial attraction wave,
It obtains the relative displacement of two satellites by the phase of the beat signal of two beam laser of measurement, and precision reaches nanometer even skin
Rice magnitude.Time delay interferometric method can inhibit influence of the laser frequency noise to displacement measurement, wherein crucial skill
Art first is that measurement at a distance of gigameter two satellites between absolute distance, measurement accuracy needs reach a meter magnitude.
Currently, measuring absolute distance and relative displacement simultaneously in the field, high-precision heterodyne laser interferometer is needed
Relative displacement is measured, measures absolute distance in combination with pseudo-random code ranging and Deep Space Network.The precision of pseudo-random code ranging can
Da Ya meter magnitude, range are about hundreds of kilometer；For Deep Space Network ranging range up to gigameter magnitude, range accuracy is about meter Zhi Qian
Rice magnitude.Numerous, complicated disadvantage that there is also measuring devices when the prior art measures absolute distance and relative displacement at the same time.Cause
This realizes high-acruracy survey absolute distance and relative displacement simultaneously, is method or technical challenge.
Summary of the invention
The purpose of the present invention is to provide it is a kind of based on heterodyne laser interferometer simultaneously measure distance and displacement device and
Its method has the features such as easy to implement the method, measurement accuracy is high.By doing sinusoidal tune to the laser frequency in heterodyne laser interferometer
System, recycle digital demodulating circuit realize simultaneously obtain distance and displacement data, overcome the prior art and meanwhile measure absolutely away from
From the difficulty numerous and complicated with the device of relative displacement.
One, the device (abbreviation device) of distance and displacement is measured simultaneously based on heterodyne laser interferometer
The present apparatus includes object under test, is provided with signal source, heterodyne laser interferometer and digital demodulating circuit；
Signal source is connect with heterodyne laser interferometer, for modulating laser frequency and driving acousto-optic frequency shifters；Signal source is same
When connect with digital demodulating circuit, for providing reference signal；Heterodyne laser interferometer is connected to object under test, sharp for generating
Interference of light beat signal；Heterodyne laser interferometer is connect with digital demodulating circuit, for providing beat signal.
Two, the method (abbreviation method) of distance and displacement is measured simultaneously based on heterodyne laser interferometer
This method includes the following steps:
1. from the reference signal fr of signal source, and the beat signal fh from heterodyne laser interferometer, respectively by
Digital signal is converted to after 1st analog to digital conversion circuit and the acquisition of the 2nd analog to digital conversion circuit；
2. above-mentioned digital signal does phase demodulating operation by the digital phase-locked loop in FPGA circuitry, reference signal fr is obtained
With the phase of beat signal fh；Phase obtains phase data after subtracting, and the variation of the data reflects the phase of object under test
To displacement x；
3. digital phase-locked loop demodulates the frequency of beat signal fh simultaneously；Frequency data pass through again amplitude demodulation data processing it
Afterwards, the sine amplitude data of frequency are obtained, which reflects the distance L of object under test；
4. the amplitude data of phase data, frequency sine variation is after desampling fir filter is handled, then passes through serial ports
Communication is sent to computer and carries out graphical display and storage.
The present invention has the advantages that:
1) phase-locked loop clock, digital phase-locked loop, amplitude demodulation, desampling fir filter and digital controlled oscillator are based on FPGA
(Field-Programmable Gate Array) chip is realized.
2) digital controlled oscillator, D/A converting circuit and filter amplification circuit can be used for substitution signal source, at this time reference signal
Directly it is numerical control oscillation signal, without passing through analog to digital conversion circuit, reduces making an uproar for analog-to-digital conversion hardware circuit and its introducing
Sound.
3) due to doing Sine Modulated to the laser frequency in heterodyne laser interferometer, believed using digital phase-locked loop demodulation beat frequency
Number phase and frequency, the variation of the DC component of phase data can reflect displacement, further by amplitude demodulation data
Reason extracts the amplitude of the AC compounent of frequency data, can obtain range data simultaneously；Displacement measurement has measurement accuracy
It is high and the advantages of trace to the source to laser frequency, range data can be demarcated to displacement data, be conducive to the essence for improving range measurement
Degree.
The present invention is suitable for the field of precision measurement of laser ranging, can be used for improving range accuracy index and production is high
The senser element of precision measure distance and displacement.
Detailed description of the invention
Fig. 1 is the structural block diagram of the present apparatus；
Fig. 2 is the index path of heterodyne laser interferometer 20；
Fig. 3 is the electrical schematic diagram of digital demodulating circuit 30.
Wherein:
10-signal sources；
20-heterodyne laser interferometers,
21-lasers, 22-power amplifiers, 23-acousto-optic frequency shifters (AOFS),
241-the 1 reflecting mirror, the 242-the 2 reflecting mirror, the 243-the 3 reflecting mirror,
25-polarization beam apparatus (PBS), 26-depolarization beam splitters (BS),
The wave plate of 27-λ/2, the wave plate of 28-λ/4,29-photodetectors (PD)；
30-digital demodulating circuits,
31-reference clocks,
321-the 1 analog to digital conversion circuit, the 322-the 2 analog to digital conversion circuit,
33-FPGA circuitries, 34-serial communications, 35-computers, 36-D/A converting circuits,
37-filter amplification circuits；
40-objects under test.
Specific embodiment
It is described in detail with reference to the accompanying drawings and examples:
One, device
1, overall
Such as Fig. 1, the present apparatus includes object under test 40, is provided with signal source 10, heterodyne laser interferometer 20 and digital demodulation
Circuit 30；
Its connection relationship is:
Signal source 10 is connect with heterodyne laser interferometer 20, for modulating laser frequency and driving acousto-optic frequency shifters；Signal
Source 10 is connect with digital demodulating circuit 30 simultaneously, for providing reference signal；Heterodyne laser interferometer 20 and object under test 40 connect
It is logical, for generating laser interference beat signal；Heterodyne laser interferometer 20 is connect with digital demodulating circuit 30, for providing beat frequency
Signal.
2, functional unit
1) signal source 10
Signal source 10 needs to export 3 tunnel sinusoidal signals, and the frequency of output signal is not less than 100MHz.
2) heterodyne laser interferometer 20
Such as Fig. 2, heterodyne laser interferometer 20 includes laser 21, power amplifier 22, acousto-optic frequency shifters (AOFS) 23, the
1 reflecting mirror 241, the 2nd reflecting mirror 242 and the 3rd reflecting mirror 243, polarization beam apparatus (PBS) 25, depolarization beam splitter (BS) 26, λ/
2 wave plates 27, the wave plate of λ/4 28 and photodetector (PD) 29；
Its relationship is:
Signal source 10 is connect with laser 21, power amplifier 22 and digital demodulating circuit 30 respectively, power amplifier 22
It is connected with acousto-optic frequency shifters 23, photodetector 29 and digital demodulating circuit 30 connect；
Laser 21, the 1st reflecting mirror 241 and acousto-optic frequency shifters 23 are sequentially communicated；It is produced after laser light acousto-optic frequency shifters 23
Raw zero order light and level-one light；Level-one light, the 2nd reflecting mirror 242, the 3rd reflecting mirror 243, depolarization beam splitter 26 and photodetector
29 are sequentially communicated；The wave plate of zero order light, λ/2 27, polarization beam apparatus 25, the wave plate of λ/4 28 and object under test 40 are sequentially communicated；From to be measured
Laser, the wave plate of λ/4 28, polarization beam apparatus 25, depolarization beam splitter 26 and the photodetector 29 that object 40 reflects are sequentially communicated.
(1) laser 21
The wavelength of laser 21 selects 1064nm；The coherence length of laser 21 has to be larger than testing distance, the phase of laser
Dry length is bigger, then requires the line width of laser narrower；For example, the range of testing distance is 1km, then the line width of laser needs small
In 100kHz；Laser has frequency tuning function, and modulating frequency is greater than 1kHz, and modulation depth is greater than 1GHz.
(2) power amplifier 22
Power amplifier exports the radiofrequency signal of 1~2W, and driving acousto-optic frequency shifters 23 generate level-one light, the frequency of radiofrequency signal
Rate is selected near the centre frequency of acousto-optic frequency shifters 23.
(3) acousto-optic frequency shifters 23
The centre frequency of acousto-optic frequency shifters 23 is 80MHz；After laser passes through acousto-optic frequency shifters 23, zero order light and level-one are generated
Diffraction light.
(4) the 1st reflecting mirrors 241, the 2nd reflecting mirror 242 and the 3rd reflecting mirror 243
Reflecting mirror needs to plate anti-reflection film, and incidence angle is 45 degree.
(5) polarization beam apparatus 25
Polarization beam apparatus 25 needs to plate anti-reflection film；For laser after polarization beam apparatus 25, the laser components of horizontal polarization are anti-
It penetrates, the laser components transmission of vertical polarization.
(6) depolarization beam splitter 26
Depolarization beam splitter 26 needs to plate anti-reflection film；Laser swashs after splitting ratio is the depolarization beam splitter 26 of 50:50
50% reflection, 50% transmission of optical power；
(7) wave plate of λ/2 27
The wave plate of λ/2 needs to plate anti-reflection film；λ refers to the wavelength of laser, the zero-th order waveplates that selection matches with optical maser wavelength；Swash
After light passes through the wave plate of λ/2, the polarization direction of laser changes.
(8) wave plate of λ/4 28
The wave plate of λ/4 needs to plate anti-reflection film；λ refers to the wavelength of laser, can choose the zero order wave to match with optical maser wavelength
Piece；After laser passes through the wave plate of λ/4, the polarization state of laser changes.
(9) photodetector 29；
Photodetector 29 converts optical signal into electric signal, and bandwidth requirement is greater than 100MHz, and electric signal is by amplification
After processing of circuit, the amplitude for exporting AC signal is about 1Vpp.
Its working mechanism is:
Signal source 10 generates 3 tunnel sinusoidal signals, and the 1st tunnel output sinusoidal signal (fm=1kHz) is connected to the frequency of laser 21
Rate modulation port, for modulating the frequency of laser；2nd tunnel (fd=80MHz) is connected to power amplifier 22, for driving acousto-optic
Frequency shifter 23；3rd tunnel (fr=fd) is connected to digital demodulating circuit 30, reference signal when as measurement beat signal.
The laser that laser 21 is emitted adjusts the incidence angle that light beam is incident on acousto-optic frequency shifters 23 by the 1st reflecting mirror 241,
Zero order light and level-one light are generated after laser light acousto-optic frequency shifters 23；Zero order light is identical as the frequency of incident laser, level-one light with
The difference on the frequency of zero order light is fd；Level-one light reaches depolarization beam splitter 26 after the 2nd reflecting mirror 242 and the 3rd reflecting mirror 243；
Zero order light, which successively penetrates, to be reached the surface of object under test 40 after the wave plate of λ/2 27, polarization beam apparatus 25, the wave plate of λ/4 28 and is reflected, and is returned
It is back to polarization beam apparatus 25；The direction for rotating the wave plate of λ/4 makes the laser returned by 25 back reflection of polarization beam apparatus to depolarization
Beam splitter 26；Zero order light after above-mentioned different brachium, closes beam to photodetection by depolarization beam splitter 26 from level-one light
Device 29 obtains interference beat signal fh；After beat signal fh and reference signal fr are input to digital demodulating circuit 30, at the same it is defeated
The data of displacement and distance out.
The phase difference of beat signal fh and reference signal fr can indicate are as follows: the π ν of Δ φ=4 nL/c；
Wherein, the frequency of laser is ν, and the light velocity in vacuum is c, and the medium refraction index for propagating light beam is n；Define determinand
The dead-center position of body is R, which makes two arm length differences of laser interferometer be equal to zero；Measured distance L is object under test
Distance of the physical location T-phase for dead-center position R；If doing Sine Modulated to laser frequency, laser frequency can be written as: ν
=ν 0+ Δ fsin (2 π fmt), wherein ν 0 is the original frequency of laser, and Δ f is warbled amplitude, and fm is modulation frequency
Rate；At this point, the phase difference that digital demodulating circuit measurement obtains can be written as:
Δ φ=4 π ν 0nL/c+4 π Δ fnL/csin (2 π fmt)=φDC+φAC
1st φDCThe variation of (DC quantity of phase) reflects the displacement x of object under test, the 2nd φAC(phase
Of ac) amplitude proportional in the product of distance L and frequency modulation(PFM) amplitude, ao f；In the premise item of given frequency modulation amplitude Δ f
It, can be by φ under partACAmplitude the numerical value of distance L is calculated.
3) digital demodulating circuit 30
Such as Fig. 3, digital demodulating circuit 30 includes reference clock 31, the 1st analog to digital conversion circuit 321, the 2nd analog to digital conversion circuit
322, FPGA circuitry 33, serial communication 34, computer 35, D/A converting circuit 36 and filter amplification circuit 37；
Its connection relationship is:
Signal source 10, the 1st analog to digital conversion circuit 321 and FPGA circuitry 33 are sequentially connected, heterodyne laser interferometer the 20, the 2nd
Analog to digital conversion circuit 321 and FPGA circuitry 33 are sequentially connected；Reference clock 31 is connected with the clock of FPGA circuitry 33；FPGA circuitry
33 clock is connected with the 1st analog to digital conversion circuit 321, the 2nd analog to digital conversion circuit 322 respectively；FPGA circuitry 33, serial communication 34
It is sequentially connected with computer 35；FPGA circuitry 33, D/A converting circuit 36 and filter amplification circuit 37 are sequentially connected.
(1) reference clock 31
The crystal oscillator of reference clock selection 10MHz or 50MHz.
(2) the 1st analog to digital conversion circuits 321 and the 2nd analog to digital conversion circuit 322
The simulation input tape of 1st analog to digital conversion circuit 321 and the 2nd analog to digital conversion circuit 322 is wider than 100MHz, and modulus turns
The digit of parallel operation is 12~16bits.
(3) FPGA circuitry 33
FPGA (Field-Programmable Gate Array), i.e. field programmable gate array, it be PAL,
The product further developed on the basis of the programming devices such as GAL, CPLD.It is as in the field specific integrated circuit (ASIC)
A kind of semi-custom circuit and occur, not only solved the deficiency of custom circuit, but also overcome original programming device gate circuit
The limited disadvantage of number.In FPGA circuitry, pass through software realization phase-locked loop clock, digital phase-locked loop, amplitude demodulation, down-sampled filter
The function of wave device, serial data transmission and digital controlled oscillator.
(4) serial communication 34
Serial communication selects RS232 or RS485 chip, Configuration of baud rate 115200bps.
(5) computer 35
Computer is used to receive the data of serial communication transmission, and data are carried out graphical display and storage.
(6) D/A converting circuit 36
Digital controlled oscillator in FPGA circuitry is converted into analog signal；Data updating rate is acousto-optic frequency shifters driving frequency
2 times, data bit width be 14~16bits.
(7) filter amplification circuit 37
Filter circuit is bandwidth-limited circuit, and centre frequency is set as the driving frequency of acousto-optic frequency shifters；Amplifying circuit
Bandwidth be 100MHz；Digital controlled oscillator, D/A converting circuit and filter amplification circuit can be used for substitution signal source 10.
Its working mechanism is:
The reference signal fr that signal source 10 exports is connected to the 1st analog to digital conversion circuit 321, and heterodyne laser interference circuit 20 is defeated
Beat signal fh out is connected to the 2nd analog to digital conversion circuit 322, and reference signal fr and beat signal fh are adopted by analog to digital conversion circuit
Digital signal is converted to after collection；Reference clock 31 is connected to the phase-locked loop clock of FPGA circuitry 33, generates needed for FPGA circuitry 33
Work clock and the 1st analog to digital conversion circuit 321 and the 2nd analog to digital conversion circuit 322 needed for encoded clock；FPGA circuitry
The phase of digital phase-locked loop demodulated reference signal fr and beat signal fh in 33, can be calculated relatively by its phase difference
Displacement x；Meanwhile digital phase-locked loop carries out frequency demodulation to beat signal fh, if doing frequency to laser frequency is fm sinusoidal
It modulates, will there is the sinusoidal signal that frequency is fm in the frequency data of demodulation, the amplitude proportional of the signal is dry in heterodyne laser
The arm length difference of interferometer 20；According to Such phase of ac φACExpression formula, from principle can directly demodulation phase data modulating
Amplitude of variation at frequency fm, to obtain distance L of the object under test 40 relative to dead-center position R；But due to phase difference
According to can not deduct there are unknown DC quantity and drift and in real time, therefore the present invention first demodulates beat frequency using digital phase-locked loop
The frequency of signal, frequency data obtain amplitude of variation of the frequency data at fm frequency after amplitude demodulation, then by the amplitude
Data can be obtained by the of ac of phase multiplied by modulating frequency fm, and object under test 40 may finally be calculated relative to zero point
The distance L of position R.
4) object under test 40
The reflecting surface of object under test 40 needs smooth, reflectivity with higher.
Claims (4)
1. a kind of device for measuring distance and displacement simultaneously based on heterodyne laser interferometer, including object under test (40), feature
It is:
It is provided with signal source (10), heterodyne laser interferometer (20) and digital demodulating circuit (30)；
Its connection relationship is:
Signal source (10) is connect with heterodyne laser interferometer (20), for modulating laser frequency and driving acousto-optic frequency shifters；Signal
Source (10) is connect with digital demodulating circuit (30) simultaneously, for providing reference signal；Heterodyne laser interferometer (20) and determinand
Body (40) connection, for generating laser interference beat signal；Heterodyne laser interferometer (20) is connect with digital demodulating circuit (30),
For providing beat signal.
2. device according to claim 1, it is characterised in that:
The heterodyne laser interferometer (20) includes laser (21), power amplifier (22), acousto-optic frequency shifters (23), the 1st
Reflecting mirror (241), the 2nd reflecting mirror (242) and the 3rd reflecting mirror (243), polarization beam apparatus (25), depolarization beam splitter (26), λ/
2 wave plates (27), the wave plate of λ/4 (28) and photodetector (29)；
Signal source (10) is connect with laser (21), power amplifier (22) and digital demodulating circuit (30) respectively, power amplification
Device (22) and acousto-optic frequency shifters (23) connection, photodetector (29) and digital demodulating circuit (30) connection；
Laser (21), the 1st reflecting mirror (241) and acousto-optic frequency shifters (23) are sequentially communicated；Laser light acousto-optic frequency shifters (23)
Zero order light and level-one light are generated afterwards；Level-one light, the 2nd reflecting mirror (242), the 3rd reflecting mirror (243), depolarization beam splitter (26) and
Photodetector (29) is sequentially communicated；The wave plate of zero order light, λ/2 (27), polarization beam apparatus (25), the wave plate of λ/4 (28) and determinand
Body (40) is sequentially communicated；Laser, the wave plate of λ/4 (28), polarization beam apparatus (25), depolarization beam splitting reflected from object under test (40)
Device (26) and photodetector (29) are sequentially communicated.
3. device according to claim 1, it is characterised in that:
The digital demodulating circuit (30) includes reference clock (31), the 1st analog to digital conversion circuit (321), the 2nd analog-to-digital conversion electricity
Road (322), FPGA circuitry (33), serial communication (34), computer (35), D/A converting circuit (36), filter amplification circuit
(37)；
Signal source (10), the 1st analog to digital conversion circuit (321) and FPGA circuitry (33) are sequentially connected, heterodyne laser interferometer (20),
2nd analog to digital conversion circuit (321) and FPGA circuitry (33) are sequentially connected；The clock of reference clock (31) and FPGA circuitry (33) connects
It connects；The clock of FPGA circuitry (33) and the 1st analog to digital conversion circuit (321), the 2nd analog to digital conversion circuit (322) are separately connected；FPGA
Circuit (33), serial communication (34) and computer (35) are sequentially connected；FPGA circuitry (33), D/A converting circuit (36) and filtering
Amplifying circuit (37) is sequentially connected.
4. measuring the method for distance and displacement based on claim 1,2 or while 3 described device, it is characterised in that:
1. with the beat signal fh from heterodyne laser interferometer (20), dividing from the reference signal fr of signal source (10)
Digital signal is not converted to after the 1st analog to digital conversion circuit (321) and the acquisition of the 2nd analog to digital conversion circuit (322)；
2. above-mentioned digital signal does phase demodulating operation by the digital phase-locked loop in FPGA circuitry (33), obtain reference signal and
The phase of beat signal；Phase obtains phase data after subtracting, and the variation of the data reflects the phase of object under test (40)
To displacement x；
3. digital phase-locked loop demodulates the frequency of beat signal simultaneously；After frequency data pass through amplitude demodulation data processing again, obtain
To the sine amplitude data of frequency, which reflects the distance L of object under test (40)；
4. the amplitude data of phase data, frequency sine variation is after desampling fir filter is handled, then passes through serial communication
(34) computer (35) are sent to and carry out graphical display and storage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910757968.1A CN110412606A (en) | 2019-08-16 | 2019-08-16 | Measure the devices and methods therefor of distance and displacement simultaneously based on heterodyne laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910757968.1A CN110412606A (en) | 2019-08-16 | 2019-08-16 | Measure the devices and methods therefor of distance and displacement simultaneously based on heterodyne laser interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110412606A true CN110412606A (en) | 2019-11-05 |
Family
ID=68367774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910757968.1A Pending CN110412606A (en) | 2019-08-16 | 2019-08-16 | Measure the devices and methods therefor of distance and displacement simultaneously based on heterodyne laser interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110412606A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157098A (en) * | 2019-12-31 | 2020-05-15 | 中国科学院长春光学精密机械与物理研究所 | Demodulation device for simultaneously obtaining amplitude and phase of vibration signal |
| CN111464281A (en) * | 2020-05-12 | 2020-07-28 | 清华大学 | Microwave recovery device and distributed microwave synchronization system |
| CN113607047A (en) * | 2021-08-04 | 2021-11-05 | 中国科学院长春光学精密机械与物理研究所 | Heterodyne interference signal simulation system |
| CN114112000A (en) * | 2020-08-27 | 2022-03-01 | 精工爱普生株式会社 | Laser interferometer and method for controlling laser interferometer |
| CN114858264A (en) * | 2022-07-06 | 2022-08-05 | 天津大学 | Sound velocity measurement device and method for submarine surveying and sonar surveying |
| CN115342737A (en) * | 2022-09-06 | 2022-11-15 | 中国科学院长春光学精密机械与物理研究所 | Inter-satellite laser heterodyne interference signal multi-frequency information capturing system and capturing method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5784161A (en) * | 1995-06-20 | 1998-07-21 | Carl Zeiss Jena Gmbh | Heterodyne interferometer arrangement with tunable lasers, a heterodyne interferometer, a comparison interferometer and a reference interferometer |
| CN101533096A (en) * | 2009-04-23 | 2009-09-16 | 哈尔滨工业大学 | Dual-frequency laser ranging method and device based on polarization state regulation and wavelength synthesis |
| CN103307985A (en) * | 2013-06-09 | 2013-09-18 | 中国科学院力学研究所 | Equal-arm-length heterodyne laser interferometry ranging system |
| CN105300274A (en) * | 2015-11-13 | 2016-02-03 | 山东神戎电子股份有限公司 | Heterodyne interference measuring system convenient in splitting ratio adjustment |
| CN210803717U (en) * | 2019-08-16 | 2020-06-19 | 中国科学院武汉物理与数学研究所 | Device for simultaneously measuring distance and displacement based on heterodyne laser interferometer |
-
2019
- 2019-08-16 CN CN201910757968.1A patent/CN110412606A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5784161A (en) * | 1995-06-20 | 1998-07-21 | Carl Zeiss Jena Gmbh | Heterodyne interferometer arrangement with tunable lasers, a heterodyne interferometer, a comparison interferometer and a reference interferometer |
| CN101533096A (en) * | 2009-04-23 | 2009-09-16 | 哈尔滨工业大学 | Dual-frequency laser ranging method and device based on polarization state regulation and wavelength synthesis |
| CN103307985A (en) * | 2013-06-09 | 2013-09-18 | 中国科学院力学研究所 | Equal-arm-length heterodyne laser interferometry ranging system |
| CN105300274A (en) * | 2015-11-13 | 2016-02-03 | 山东神戎电子股份有限公司 | Heterodyne interference measuring system convenient in splitting ratio adjustment |
| CN210803717U (en) * | 2019-08-16 | 2020-06-19 | 中国科学院武汉物理与数学研究所 | Device for simultaneously measuring distance and displacement based on heterodyne laser interferometer |
Non-Patent Citations (1)
| Title |
|---|
| 李志栋 等: "频率扫描干涉法绝对测距中运动误差的补偿研究", 《光学学报》, vol. 31, no. 3, 15 March 2011 (2011-03-15), pages 0314001 - 1 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157098A (en) * | 2019-12-31 | 2020-05-15 | 中国科学院长春光学精密机械与物理研究所 | Demodulation device for simultaneously obtaining amplitude and phase of vibration signal |
| CN111464281A (en) * | 2020-05-12 | 2020-07-28 | 清华大学 | Microwave recovery device and distributed microwave synchronization system |
| CN114112000A (en) * | 2020-08-27 | 2022-03-01 | 精工爱普生株式会社 | Laser interferometer and method for controlling laser interferometer |
| CN114112000B (en) * | 2020-08-27 | 2024-01-16 | 精工爱普生株式会社 | Laser interferometer and control method for laser interferometer |
| CN113607047A (en) * | 2021-08-04 | 2021-11-05 | 中国科学院长春光学精密机械与物理研究所 | Heterodyne interference signal simulation system |
| CN114858264A (en) * | 2022-07-06 | 2022-08-05 | 天津大学 | Sound velocity measurement device and method for submarine surveying and sonar surveying |
| CN115342737A (en) * | 2022-09-06 | 2022-11-15 | 中国科学院长春光学精密机械与物理研究所 | Inter-satellite laser heterodyne interference signal multi-frequency information capturing system and capturing method thereof |
| CN115342737B (en) * | 2022-09-06 | 2024-04-16 | 中国科学院长春光学精密机械与物理研究所 | Inter-satellite laser heterodyne interference signal multi-frequency information capturing system and capturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110412606A (en) | Measure the devices and methods therefor of distance and displacement simultaneously based on heterodyne laser interferometer | |
| CN108692663B (en) | Phase modulation type orthogonal polarization laser feedback grating interferometer and measuring method thereof | |
| CN110411335B (en) | Differential sine phase modulation laser interference nano displacement measuring device and method | |
| CN100429475C (en) | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component | |
| CN109029246A (en) | Dynamic frequency scanning interfeerometry ranging system and distance measuring method based on optics frequency dividing locking phase gamma correction | |
| CN108007572B (en) | A kind of rotation disturbance measuring system based on vortex beams and Sa Ge clarke interferometer | |
| CN102564564A (en) | Non-contact micro-vibration measuring system based on non-equilibrium Michelson fiber-optic interferometer | |
| CN107192336A (en) | Displacement measurement system and method during dual wavelength superhet interference large-range high-precision real | |
| CN109188453A (en) | Dynamic frequency scanning interfeerometry ranging system and distance measuring method based on locking phase gamma correction | |
| CN109188454A (en) | Dynamic frequency scanning interfeerometry ranging system and method based on digital servo-control gamma correction | |
| CN109541621B (en) | Vibration compensation method of frequency scanning interference absolute ranging system | |
| CN104931833A (en) | Photoelectric detector amplitude-frequency response calibration method | |
| CN104777376A (en) | Laser amplifier phase noise measurement system | |
| CN110332980A (en) | A kind of two-way quadrature phase optical fiber acoustic vibration sensor demodulating equipment and demodulation method | |
| CN103809166A (en) | Resonant frequency locking device and method for Michelson interference type spectrum filter | |
| CN104049248B (en) | Superhet and heterodyne convolution anti-light aliasing laser ranging system and method | |
| CN210803717U (en) | Device for simultaneously measuring distance and displacement based on heterodyne laser interferometer | |
| CN109031341B (en) | Object movement speed measuring method using continuous frequency modulation laser radar device | |
| CN104655029B (en) | A kind of position phase reinforced membranes method for measuring thickness and system | |
| CN100451581C (en) | Method and apparatus for measuring laser wave-length using heterodyne in interference method | |
| CN108732580A (en) | A kind of absolute distance measurement system and measurement method based on phase method Yu composite wave regular way | |
| CN115507933A (en) | Tracing method and device for broadband laser vibration meter calibrating device | |
| CN104035088A (en) | Multi-frequency aliasing prevention traceable synchronous measuring tape double-light-source laser ranging device and method | |
| CN104049250B (en) | The high-precise synchronization of anti-multifrequency aliasing surveys chi semiconductor laser range apparatus and method | |
| CN112129229A (en) | Quasi-distributed displacement measuring device and method based on photoelectric oscillator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |