CN110405953A - The dust suction mechanism of lineation device - Google Patents
The dust suction mechanism of lineation device Download PDFInfo
- Publication number
- CN110405953A CN110405953A CN201910281425.7A CN201910281425A CN110405953A CN 110405953 A CN110405953 A CN 110405953A CN 201910281425 A CN201910281425 A CN 201910281425A CN 110405953 A CN110405953 A CN 110405953A
- Authority
- CN
- China
- Prior art keywords
- processing apparatus
- dust suction
- lineation device
- suction mechanism
- scribe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Laser Beam Processing (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
Abstract
Technical problem: providing a kind of dust suction mechanism, can simply be assemblied in the multi-head mounted scribing device with multiple scribe heads.A kind of solution: dust suction mechanism of lineation device (A), it consists of, lineation device (A) processes dividing line to the brittle material substrate (W) that is placed on operation post (6) equipped with multiple scribe heads (2) respectively with processing apparatus (1) and using processing apparatus (1), and the dust suction mechanism of the lineation device (A) has: the beam (4) that each scribe head (2) is kept in a manner of moveable in the same direction；Pump orifice (11a) with the movement routine side opening along processing apparatus (1) and the suction tube (11) fixed in the part being connected with beam (4)；It is installed on scribe head (2) and in the wind scooper (12) for covering the front end periphery part of processing apparatus (1) dome-shapedly, when processing apparatus (1) is moved to above operation post (6), the backside openings portion for being set to wind scooper (12) faces the pump orifice (11a) of suction tube (11).
Description
Technical field
The present invention relates to the dust suction mechanisms in a kind of multi-head mounted scribing device, and the lineation device can be simultaneously
Multiple dividing lines are formed on brittle material substrate.
Background technique
Generally, during cutting out unit substrate from mother substrate, the laser irradiation mouth, the break bar that keep scribe head
Equal processing apparatus are crossed along preset lines are disconnected, by the crackle penetrated on the thickness direction of substrate, the dividing line cut through
It is processed into clathrate, and cuts out unit product along the dividing line.
When carrying out dividing line processing using the processing apparatus, the small dust separated from substrate can disperse or generate
Clast.This dust, clast can pollute on tool periphery, and adhere on the unit product cut out, become quality drop
It is low, generate defective products the reason of.
Thus, for example shown in patent document 1 like that, be equipped near processing apparatus in scribe head and offer pumping in the past
The suction nozzle with battery unit of suction inlet, and the dust object that suction removes is sent via hose to disposal box.
Existing technical literature
Patent document
Patent document 1: Japanese Patent Publication 2017-205999 bulletin
Summary of the invention
(1) technical problems to be solved
But in order to realize the efficient activity of scribing line operation and equipped with multiple, such as five to eight scribe heads scribing line
In device, it is very difficult for installing the hose being connected with disposal box to each scribe head.Therefore, also have in fixed beam
(crossbeam) installs the suction unit being substantially open along scribe head moving direction and the method for carrying out dust in entire job area,
Wherein, each scribe head is movably supported by fixed beam (crossbeam) in the rear position of scribe head, but due to processing apparatus, example
As the flow velocity on the irradiation mouth periphery of laser irradiation mouth reduces and efficiently dust suction can not be removed.
In order to solve such prior art problem, the object of the present invention is to provide a kind of dust suction mechanism, energy
It is enough to be simply assemblied in the multi-head mounted scribing device with multiple scribe heads, and can effectively remove dust suction.
(2) technical solution
To achieve the goals above, following technological means is taken in the present invention.That is, being related in composition of the invention
And a kind of dust suction mechanism of lineation device, the lineation device equipped with respectively with processing apparatus multiple scribe heads simultaneously
Dividing line is processed to the brittle material substrate being placed on operation post using the processing apparatus, the dust of the lineation device is taken out
It inhales mechanism to have: the beam that each scribe head is kept in a manner of moveable in the same direction；With along the processing
The pump orifice of the movement routine side opening of utensil and the suction tube fixed in the part being connected with the beam；It is installed on described draw
The end of a thread and in the wind scooper for covering the front end periphery part of the processing apparatus dome-shapedly, the dust suction mechanism is formed
Are as follows: when the processing apparatus is moved to above the workbench as operation post, it is set to the backside openings portion of the wind scooper
In face of the pump orifice of the suction tube.
Here, can be formed as, top-open portion is formed in the upper wall of the wind scooper, and be inserted into from the top-open portion
The front end portion of the processing apparatus.
(3) beneficial effect
Using the above structure due to the present invention, when processing apparatus moves on operation post, the wind-guiding of processing apparatus
The backside openings portion of cover faces the pump orifice of suction tube.It therefore, can be in the feelings for weakening the strong suction force from pump orifice
It is imported under condition into wind scooper, thus, it is possible to will carry out the dust generated when dividing line processing, clast height using processing apparatus
The suction removal of effect ground.In addition, due to without the hose to the connection suction of each processing apparatus, as with multiple scribe heads
Multi-head mounted scribing device dust suction mechanism, have the effect of simply being assembled.
Detailed description of the invention
Fig. 1 is the approximate stereogram for indicating the lineation device with dust suction mechanism of the invention.
Fig. 2 is the main view of the lineation device of Fig. 1.
Fig. 3 is the perspective view for indicating main portions of the invention.
Fig. 4 is the side view in partial cross-section for indicating main portions of the invention.
Fig. 5 is the perspective view from overleaf observing wind scooper.
Fig. 6 is the perspective view for indicating another embodiment of wind scooper.
Description of symbols
A- lineation device；W- brittle material substrate；1- laser irradiation mouth (processing apparatus)；2- scribe head；4- beam；6- work
Platform (operation post)；11- suction tube；11a- pump orifice；12- wind scooper；12c- top-open portion；12e- backside openings portion.
Specific embodiment
Dust suction mechanism of the invention is described in detail below.Herein, by dust suction mechanism of the invention
Applied to the multi-head mounted scribing device with laser to brittle material substrate processing dividing line.
Lineation device A has multiple scribe heads 2, is five in the present embodiment, and multiple scribe heads 2 are respectively provided with as adding
The laser irradiation mouth 1 of Work tool.These scribe heads 2 are via guiding piece 5 and can be in the side X by driving mechanism (not shown)
The mode moved up is installed on the beam (crossbeam) 4 supported by the pillar 3 of left and right.
As the workbench 6 for the processing microscope carrier for loading and adsorbing the brittle material substrate W for keeping to be processed, via with the longitudinal axis
It is maintained on pedestal 8 for the rotating mechanism 7 of fulcrum, pedestal 8 is formed as using screw rod 9 in the Y direction (front-rear direction in Fig. 2)
Upper movement, wherein screw rod 9 is driven by servo motor.The laser irradiated from laser irradiation mouth (processing apparatus) 1 is formed
To make the laser for carrying out self-excitation light source (not shown) in the mirror for being set to 2 top of scribe head respectively like that as indicated by the arrows of fig. 2
10 reflect and guide to irradiation mouth.
In addition, suction tube 11 is configured at the top of workbench 6, suction tube 11 has to be moved together along with scribe head 2
The pump orifice 11a of the movement routine side opening of dynamic laser irradiation mouth 1.Suction tube 11 is mounted on the part being connected with beam 4,
Pump orifice 11a is towards 1 side opening of laser irradiation mouth.The length of pump orifice 11a is with big with the width along the X direction of workbench 6
Identical length is caused to be formed preferably.In addition, suction tube 11 is connect with suction air-source (not shown), the dust aspirated is conveyed
To disposal box (not shown).
Further, wind scooper 12 is installed on scribe head 2, which is in cover laser irradiation mouth 1 dome-shapedly
Front end periphery part.As shown in figure 5, the wind scooper 12 is formed as downwardly open section by left and right sidewall 12a and upper wall 12b
In the form of "U" shape.Upper wall 12b is in the upper mode of inclination with rear portion and is formed obliquely, and sets in upper wall 12b
There is the opening portion 12c for being inserted into the front end of laser irradiation mouth 1, and is conjointly equipped with installation sheet 12d with upper wall 12b.In addition,
Overleaf it is formed with the backside openings portion 12e towards the direction of the pump orifice 11a of suction tube 11 opening.
Also, be formed as illustrated in fig. 4, when laser irradiation mouth 1 is moved on workbench 6, the back side of wind scooper 12
Opening portion 12e faces the pump orifice 11a of suction tube 11, and the strong suction force from pump orifice 11a can be made to import in wind scooper 12.
In addition, wind scooper 12 shown in above-described embodiment is formed in such a way that its front end face is open as described above, still
It can also be formed as shown in Figure 6 by the way of wall surface 12f closed front face.
The brittle material substrate W processing loaded on workbench 6 is being divided using above-mentioned multi-head mounted scribing device A
In the case where line, as shown in Fig. 2, making required amount of scribe head, e.g. all five scribe heads 2 are moved to fragile material base
The top of plate W and with desired spacing arrangement.Also, make workbench 6 in the side Y while irradiating laser from laser irradiation mouth 1
It moves up, so as to simultaneously process five dividing lines along the Y direction.
When carrying out dividing line processing, it is at for the wind scooper 12 of the laser irradiation mouth 1 of 6 top of workbench,
Backside openings portion 12e faces the pump orifice 11a of suction tube 11, therefore the strong suction force from pump orifice 11a can not made to subtract
Laser irradiation part in the case where weak into wind scooper 12 imports, and thus, it is possible to the dust that will be generated in laser processing, broken
Bits efficiently suction removal.In addition, due to the hose for not needing to connect each laser irradiation mouth 1 suction, as having
The dust suction mechanism of the multi-head mounted scribing device of multiple scribe heads, can simply be assembled.
Above the representative embodiment of the present invention is described, but the present invention is it is not necessary to specific to above-mentioned
Embodiment.Although being also possible to knife for example, using laser irradiation mouth as processing apparatus in the above-described embodiments
The two, also can be installed on identical scribe head to implement by the mechanical tools such as wheel.In addition, being installed on scribing line dress
The quantity for the scribe head set is also without specific.Furthermore in the present invention, it can realize its purpose and not depart from claims
It is suitably modified, changes in range.
Industrial applicibility
The present invention can be in the multi-head mounted scribing device equipped with multiple scribe heads for will generate in scribing line
Dust suction removal.
Claims (3)
1. a kind of dust suction mechanism of lineation device, the lineation device is equipped with respectively with multiple scribe heads of processing apparatus
And dividing line, the dust of the lineation device are processed to the brittle material substrate being placed on operation post using the processing apparatus
Aspirating mechanism has:
The beam that each scribe head is kept in a manner of moveable in the same direction；
With along the processing apparatus movement routine side opening pump orifice and fixed in the part being connected with the beam
Suction tube；
It is installed on the scribe head and is in the wind scooper for dome-shapedly covering the front end periphery part of the processing apparatus,
The dust suction mechanism is formed are as follows: when the processing apparatus is moved to above the workbench as operation post, setting
The pump orifice of the suction tube is faced in the backside openings portion of the wind scooper.
2. the dust suction mechanism of lineation device according to claim 1, which is characterized in that formed are as follows: in the wind-guiding
The upper wall of cover forms top-open portion, and the front end portion of the processing apparatus is inserted into from the top-open portion.
3. the dust suction mechanism of lineation device according to claim 1, which is characterized in that the processing apparatus is irradiation
The laser irradiation mouth of laser.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-086931 | 2018-04-27 | ||
| JP2018086931A JP2019188454A (en) | 2018-04-27 | 2018-04-27 | Dust suction mechanism of scribe device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110405953A true CN110405953A (en) | 2019-11-05 |
Family
ID=68357602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910281425.7A Pending CN110405953A (en) | 2018-04-27 | 2019-04-09 | The dust suction mechanism of lineation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2019188454A (en) |
| KR (1) | KR20190125221A (en) |
| CN (1) | CN110405953A (en) |
| TW (1) | TW201945148A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113149419B (en) * | 2021-03-19 | 2022-08-30 | 彩虹（合肥）液晶玻璃有限公司 | Dust collection device used during edge breaking of substrate glass |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2452774A1 (en) * | 2009-07-07 | 2012-05-16 | Kataoka Corporation | Laser cutting machine |
| CN104096967A (en) * | 2013-04-10 | 2014-10-15 | 株式会社迪思科 | Laser processing apparatus |
| CN204434482U (en) * | 2014-12-31 | 2015-07-01 | 郑州旭飞光电科技有限公司 | A kind of ruling machine line suction device |
| CN205762865U (en) * | 2016-05-19 | 2016-12-07 | 青岛路博宏业环保技术开发有限公司 | Pneumatic movable dust absorbing air passage |
| CN206406142U (en) * | 2016-12-27 | 2017-08-15 | 东旭科技集团有限公司 | Pen machine and scoring system |
| CN206486434U (en) * | 2017-02-16 | 2017-09-12 | 东旭科技集团有限公司 | Base plate glass pen machine scribe head shield and base plate glass pen machine |
| CN107379300A (en) * | 2016-05-16 | 2017-11-24 | 三星钻石工业股份有限公司 | Brittle base scriber dust removal device |
-
2018
- 2018-04-27 JP JP2018086931A patent/JP2019188454A/en active Pending
-
2019
- 2019-03-21 TW TW108109685A patent/TW201945148A/en unknown
- 2019-04-09 CN CN201910281425.7A patent/CN110405953A/en active Pending
- 2019-04-26 KR KR1020190049001A patent/KR20190125221A/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2452774A1 (en) * | 2009-07-07 | 2012-05-16 | Kataoka Corporation | Laser cutting machine |
| CN104096967A (en) * | 2013-04-10 | 2014-10-15 | 株式会社迪思科 | Laser processing apparatus |
| CN204434482U (en) * | 2014-12-31 | 2015-07-01 | 郑州旭飞光电科技有限公司 | A kind of ruling machine line suction device |
| CN107379300A (en) * | 2016-05-16 | 2017-11-24 | 三星钻石工业股份有限公司 | Brittle base scriber dust removal device |
| CN205762865U (en) * | 2016-05-19 | 2016-12-07 | 青岛路博宏业环保技术开发有限公司 | Pneumatic movable dust absorbing air passage |
| CN206406142U (en) * | 2016-12-27 | 2017-08-15 | 东旭科技集团有限公司 | Pen machine and scoring system |
| CN206486434U (en) * | 2017-02-16 | 2017-09-12 | 东旭科技集团有限公司 | Base plate glass pen machine scribe head shield and base plate glass pen machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201945148A (en) | 2019-12-01 |
| JP2019188454A (en) | 2019-10-31 |
| KR20190125221A (en) | 2019-11-06 |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20221111 |
|
| AD01 | Patent right deemed abandoned |