CN110398989A - The auxiliary device of mass flow controller - Google Patents
The auxiliary device of mass flow controller Download PDFInfo
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- CN110398989A CN110398989A CN201910825687.5A CN201910825687A CN110398989A CN 110398989 A CN110398989 A CN 110398989A CN 201910825687 A CN201910825687 A CN 201910825687A CN 110398989 A CN110398989 A CN 110398989A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/002—Switching arrangements with several input- or output terminals
- H03K17/005—Switching arrangements with several input- or output terminals with several inputs only
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/965—Switches controlled by moving an element forming part of the switch
- H03K17/967—Switches controlled by moving an element forming part of the switch having a plurality of control members, e.g. keyboard
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Abstract
This application discloses a kind of auxiliary device of mass flow controller, which includes the input selection circuit of circuit board and setting on circuit boards；Wherein, input selection circuit has a first port and at least two second ports；First port is used for quality of connection flow controller；Second port is used for the external control components of quality of connection flow controller；External control components are used to carry out signal interaction with mass flow controller to control mass flow controller；Input selection circuit is used to connect the target port at least two second ports and the external control components of connection, so that the external control components and mass flow controller of the connection of target second port are connected to carry out signal interaction.Different external control components are selected using input selection circuit, while not influencing original control mode, can save equipment use space, it is alternative to increase user.
Description
Technical field
This application involves microelectronics technologies, and in particular to a kind of auxiliary device of mass flow controller.
Background technique
Mass flow controller is widely used in the accurate control of all kinds of process gas flows, have reaction speed fastly and
Control the advantages that precision is high.
In the related technology, mass flow controller is normally applied there are two types of modes: the first is for without number
The mass flow controller of communication function can be controlled by the external secondary meter of data line；Second is for batch
The mass flow controller used can directly control mass flow controller using equipment such as programmable logic controller (PLC)s
System.
However, the secondary meter of mass flow controller is mostly on panel for the first above-mentioned application mode
Frame installation form is desk-top, two kinds of forms no matter single channel or multichannel, the size of the display instrument of external secondary meter is generally 96*
96*150mm or more, volume is larger, considerably beyond mass flow controller size itself, is caused unavoidably in research and development, experiment etc.
The problems such as with occupying excessive space on the way or nowhere placing, directly uses programmable logic for above-mentioned second of application mode
The equipment such as controller control mass flow controller, and usually make equipment control mode single, and user's use is not square
Just.
Summary of the invention
In view of this, the application's aims to overcome that the deficiencies in the prior art, a kind of mass flow controller is provided
Auxiliary device.
In order to achieve the above object, the application adopts the following technical scheme that
A kind of auxiliary device of mass flow controller, comprising: circuit board and the input being arranged on the circuit board are selected
Select circuit；
Wherein, the input selection circuit has a first port and at least two second ports；
The first port is used for quality of connection flow controller；
The second port is used to connect the external control components of the mass flow controller；The external control components
For carrying out signal interaction with the mass flow controller to control the mass flow controller；The different second ends
The type of the external control components of mouth connection is different；
The input selection circuit is used for the institute of target second port and connection at least two second port
External control components connection is stated, so that the external control components of target second port connection and the mass flow control
Device processed is connected to carry out signal interaction.
Optionally, the input selection circuit includes toggle switch；The toggle switch includes and each second port
One-to-one key；Each key is correspondingly arranged there are two pin；Pin connection in two pins of each key
The corresponding second port, another pin connect the first port；When the key is opened, the key is corresponding
The second port and the external control components of connection are connected.
Optionally, the external control components include the first external control components and the second external control components；
First external control components are the external control assembly of the auxiliary device；
Second external control components are the control assembly being arranged on the circuit board.
Optionally, second external control components include:
Processor；
The coding module and/or wireless communication module being connected to the processor；
The coding module, for providing control signal by adjusting encoder；
The wireless communication module, for providing control signal by wireless communication technique；
The processor is controlled for the control signal to be supplied to the mass flow by the first port
Device.
Optionally, second external control components further include display module, and the display module and the processor connect
It connects, for showing flow value.
Optionally, the coding module includes knob and the digital encoder that connect with the knob；
The knob is used to adjust the voltage in the digital encoder by rotation；
When the control signal is supplied to the mass flow controller by the first port, the processing utensil
Body is used to generate the control signal according to the voltage value of the digital encoder and is supplied to the mass flow controller.
Optionally, the wireless communication module include in following item at least one of: ZIGBEE module, WIFI module or
Bluetooth module.
It optionally, further include that the power supply being arranged on the circuit board integrates processing circuit, the power supply integration processing electricity
The power input port on road is connect with external input power, and the power supply integrates the output port of power source and the matter of processing circuit
The supply port connection of flow controller is measured, the power supply integrates processing circuit for the external input power to be supplied to institute
State mass flow controller.
Optionally, power supply needed for the mass flow controller includes single supply or dual power supply；
The power supply integrates processing circuit and is specifically used for providing single supply and dual power supply.
Optionally, it includes relay that the power supply, which integrates processing circuit, the relay include movable contact, normally opened contact and
Normally-closed contact；
The movable contact connects the external input power；
The normally opened contact connects the dual power supply；
The normally-closed contact connects the single supply.
The application uses above technical scheme, has the following beneficial effects:
The scheme of the application provides a kind of auxiliary device of mass flow controller, due to the circuit board of the auxiliary device
Provided with input selection circuit, which passes through second port by first port quality of connection flow controller
External control components are connected, since second port is there are two more than, it is possible to connect different external control components, are inputted
Selection circuit can be come by connecting one of second port (i.e. target second port) with the external control components connecting
The external control components and mass flow controller for realizing the connection of target second port are connected, after connection, mass flow control
Device can carry out signal interaction with the external control components of connection, in application process, can pass through the external control of connection
Component obtain control signal, and get control signal after, which is sent to mass flow controller, using as
The input signal of mass flow controller, meanwhile, the output signal that quality of reception flow controller is sent, in this way, may be implemented
Signal interaction between mass flow controller, so that user can go to select according to their own needs under different scenes
The external control components of suitable type realize the signal interaction with mass flow controller, compared with above-mentioned the relevant technologies, not
While influencing quality flow path controller original application mode, other application modes are added additional by auxiliary device,
In original application mode, if external control components (such as secondary meter) need to occupy larger space, auxiliary can be passed through
Device can not only save equipment use space, but also increase user not using the external control components of other small volumes
With the alternative under application scenarios.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of application for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is a kind of a kind of structural representation of the auxiliary device for mass flow controller that the application one embodiment provides
Figure.
Fig. 2 is that a kind of another structure of the auxiliary device for mass flow controller that the application one embodiment provides is shown
It is intended to.
Fig. 3 is that a kind of another structure of the auxiliary device for mass flow controller that the application one embodiment provides is shown
It is intended to.
Fig. 4 is that a kind of another structure of the auxiliary device for mass flow controller that the application one embodiment provides is shown
It is intended to.
Fig. 5 is that a kind of another structure of the auxiliary device for mass flow controller that the application one embodiment provides is shown
It is intended to.
Fig. 6 is that a kind of another structure of the auxiliary device for mass flow controller that the application one embodiment provides is shown
It is intended to.
Fig. 7 is a kind of a kind of circuit connection of the auxiliary device for mass flow controller that the application one embodiment provides
Schematic diagram.
Specific embodiment
To keep the purposes, technical schemes and advantages of the application clearer, the technical solution of the application will be carried out below
Detailed description.Obviously, described embodiment is only a part of the embodiment of the application, instead of all the embodiments.
Based on the embodiment in the application, those of ordinary skill in the art obtained institute without making creative work
There is other embodiment, belongs to the range that the application is protected.
Embodiment
It is a kind of one kind of the auxiliary device for mass flow controller that the application one embodiment provides referring to Fig. 1, Fig. 1
Structural schematic diagram.
Referring to fig. 2, Fig. 2 is a kind of the another of the auxiliary device for mass flow controller that the application one embodiment provides
Kind structural schematic diagram.
It is a kind of the another of the auxiliary device for mass flow controller that the application one embodiment provides referring to Fig. 3, Fig. 3
Kind structural schematic diagram.
Referring to fig. 4, Fig. 4 is a kind of the another of the auxiliary device for mass flow controller that the application one embodiment provides
Kind structural schematic diagram.
It is a kind of the another of the auxiliary device for mass flow controller that the application one embodiment provides referring to Fig. 5, Fig. 5
Kind structural schematic diagram.
It is a kind of the another of the auxiliary device for mass flow controller that the application one embodiment provides referring to Fig. 6, Fig. 6
Kind structural schematic diagram.
It is a kind of one kind of the auxiliary device for mass flow controller that the application one embodiment provides referring to Fig. 7, Fig. 7
Circuit connection diagram.
As shown in Figure 1, embodiments herein provides a kind of auxiliary device 1 of mass flow controller, comprising: circuit board
2 input selection circuit 3 with setting on the circuit board 2；
Wherein, input selection circuit 3 has a first port 4 and at least two second ports 5；
First port 4 is used for quality of connection flow controller 10；
Second port 5 is used for the external control components of quality of connection flow controller 10；External control components 7 are used for and matter
It measures flow controller 10 and carries out signal interaction to control mass flow controller 10；The different second ports connects described
The type of external control components is different；
Input selection circuit 3 is used to control the target second port at least two second ports 5 with the outside connecting
Component is connected, so that the external control components and mass flow controller of the connection of target second port are connected to carry out signal friendship
Mutually.
Specifically, the quantity of the second port of input selection circuit can be set according to practical situations, herein
It is not construed as limiting.
Wherein, target second port refers to the corresponding second port of external control components for currently needing to connect.
The scheme of the application provides a kind of auxiliary device of mass flow controller, due to the circuit board of the auxiliary device
Provided with input selection circuit, which passes through second port by first port quality of connection flow controller
External control components are connected, since second port is there are two more than, it is possible to connect different external control components, are inputted
Selection circuit can be come by connecting one of second port (i.e. target second port) with the external control components connecting
The external control components and mass flow controller for realizing the connection of target second port are connected, after connection, mass flow control
Device can carry out signal interaction with the external control components of connection, in application process, can pass through the external control of connection
Component obtain control signal, and get control signal after, which is sent to mass flow controller, using as
The input signal of mass flow controller, meanwhile, the output signal that quality of reception flow controller is sent, in this way, may be implemented
Signal interaction between mass flow controller, so that user can go to select according to their own needs under different scenes
The external control components of suitable type realize the signal interaction with mass flow controller, compared with above-mentioned the relevant technologies, not
While influencing quality flow path controller original application mode, other application modes are added additional by auxiliary device,
In original application mode, if external control components (such as secondary meter) need to occupy larger space, auxiliary can be passed through
Device can not only save equipment use space, but also increase user not using the external control components of other small volumes
With the alternative under application scenarios.
Installation site of the auxiliary device of mass flow controller provided in this embodiment on mass flow controller can
To be set according to the actual situation, it is not construed as limiting herein.For example, as shown in Fig. 2, auxiliary device 1 can be installed on matter
The top for measuring flow controller 10, auxiliary device 1 is carried using mass flow controller 10, increases the peace of auxiliary device 1
Fill stability.
There are many specific structures of input selection circuit.For example, in some embodiments, input selection circuit includes dial-up
Switch.Toggle switch is a kind of microswitch for needing to be manually operated, and general toggle switch may include multiple keys, each
The corresponding back side of key is there are two pin, and when work, key is allocated to the side ON, and corresponding two pins will be connected,
Conversely, two pins just will disconnect.As shown in figure 3, toggle switch 01 include with the one-to-one key 02 of each second port 5 and
03；Each key is correspondingly arranged there are two pin 04,05 and 06,07；A pin 05,07 in two pins of each key
Corresponding second port 5 is connected, another pin 04,06 connects first port 4；When key is opened, key corresponding second
Port 5 is connected with the external control components connecting, i.e., mass flow controller is connected to the external control components.In implementation, when
When key is allocated to the side ON, second port corresponding with the key is target second port.
Specifically, there are many models of toggle switch, for example, the model of toggle switch can be, but not limited to include SW-
DIP4。
In some embodiments, input selection circuit can also include relay, jumper cap, etc..
In some embodiments, as shown in figure 4, external control components include the first external control components 6 and the second outside control
Component 7 processed；First external control components 6 are the external control assembly of auxiliary device 1；Second external control components 7 are circuit board 2
On control assembly.
In the present embodiment, two kinds of external control components are provided.
First external control components be mass flow controller factory when default connect the external control components used,
The original control mode of mass flow controller may be implemented.In implementation, mass flow controller is in addition to that can be detached from this implementation
The auxiliary device of example is directly connected to outside first external control components, can also auxiliary device through this embodiment connect this
One external control components in this way, can not only keep original control mode, but also can be given on the basis of original control mode
User increases more alternative.Specifically,
First external control components include secondary meter, such as display instrument, integrating instrument, etc..
Second external control components are that mass flow controller defaults the control that can be connected other than the external control components used
The control mode other than the original control mode of mass flow controller may be implemented in component processed.Mass flow controller can be with
By auxiliary connecting device, the connection with second external control components is realized.
When it is implemented, auxiliary device is mounted between mass flow controller and the first external control components, work as dial-up
When the first external control components of switch connection, the first external control components and mass flow controller carry out signal interaction；Dial-up
Switch disconnect the first external control components and when connecting the second external control components, mass flow controller no longer with first outside
Control assembly carries out signal interaction, but carries out signal interaction with the second external control components.
In order to make the control mode of the second external control components have more alternatives, as shown in figure 5, some embodiments
In, the second external control components 7 include: processor 13；The coding module 14 and/or wireless communication module being connect with processor 13
11；Coding module 14, for providing control signal by adjusting encoder；Wireless communication module 11, for passing through wireless telecommunications
Technology provides control signal；Processor 13 is supplied to mass flow controller by first port for that will control signal.
When it is implemented, wireless communication module, which can receive, pre-establishes the carrying flow that the client of wireless connection is sent
The signal received is simultaneously sent to processor by the signal of controlling value, and processor generates corresponding control according to the received signal
Signal is supplied to the second port of input selection circuit, is supplied to mass flow control by first port by input selection circuit
Device processed so that mass flow controller according to the control signal come controlling opening of valve, to control flow, in this way, realizing
Long-range control mass flow controller.
Wireless communication module includes at least one in following item: ZIGBEE module, WIFI module or bluetooth module.Tool
Body, the specific implementation of ZIGBEE module, WIFI module or bluetooth module can refer to the relevant technologies, no longer superfluous herein
It states.
In some embodiments, coding module includes knob and the digital encoder that connect with knob；Knob is for passing through rotation
Voltage in modulation section digital encoder；When control signal is supplied to mass flow controller by first port, processor
Specifically for generating control signal according to the voltage value of digital encoder and being supplied to mass flow controller.In the present embodiment,
The size for the voltage value being input in digital encoder is adjusted by way of rotating knob, processor identifies corresponding voltage value
And corresponding signal is generated by digital-to-analogue conversion, to obtain the control signal.
As shown in figure 5, in some embodiments, the second external control components 7 further include display module 12, display module 12 with
Processor 13 connects, for showing flow value.Mass flow controller can detecte flow value, and the flow value that will test is sent
To processor, flow value is sent to display module real-time display by processor.For example, when using as described above having to compile
When the second external control components of code module, the big of the control signal of mass flow controller is adjusted by way of rotating knob
Small, at this moment, display module shows corresponding flow according to the output signal of mass flow controller corresponding with control signal
Value.In the present embodiment, the flow value of pipeline is flowed through by the way that display module real-time display is arranged, can be convenient user's real time inspection pipe
Flow in road, to adjust according to the actual situation.
Above-mentioned display module can be, but not limited to include liquid crystal display, light emitting diode (Light Emitting
Diode, LED) display screen, etc..
When secondary meter can not be installed again after mass flow controller by causing to install due to external condition limitation, volume
Small, alternative high supplementary module can substitute original control mode well, i.e., outside toggle switch disconnection and first
The connection of control assembly, the connection of connection and the second external control components, in this way, when the second external control components only have channel radio
When interrogating module without coding module, user can remotely control mass flow controller by wireless communication technique；When second
When external control components only have coding module without wireless communication module, user can control matter by way of rotating knob
Measure flow controller；When the existing wireless communication module of the second external control components has coding module again, user both can be long-range
Mass flow controller is controlled, and mass flow controller can be controlled by way of rotating knob.
In practical application, the power supply mode and disunity of the power supply of the mass flow controller produced on the market, this is with regard to normal
Often result in the power requirement that great care mass flow controller is wanted when user's purchase.For this purpose, as shown in fig. 6, some realities
It applies in example, which further includes that the power supply of setting on the circuit board 2 integrates processing circuit 8, and power supply integrates processing circuit 8
Power input port connect with external input power 9, power supply integrate processing circuit 8 output port of power source and mass flow control
The supply port of device processed connects, and power supply integrates processing circuit 8 for external input power 9 to be supplied to mass flow controller.
In some embodiments, power supply needed for above-mentioned mass flow controller includes single supply or dual power supply.For example, existing
Power supply needed for having mass flow controller on the market is typically all dual power supply ± 15V either single supply 24V.
In some application scenarios, the required power supply of external input power and mass flow controller is not consistent, for example, outside
Connecing input power is single supply, and the required power supply of mass flow controller is dual power supply, alternatively, external input power is double electricity
Source, and the required power supply of mass flow controller be single supply, at this moment, due to mass flow controller required power supply with it is external
Input power is inconsistent, and mass flow controller is resulted in not to be available.In order to meet the needs of different user, above-mentioned power supply is whole
Processing circuit is closed to be specifically used for providing single supply and dual power supply for the mass flow controller.In this way, user can be according to need
Ask selection using single supply and dual power supply, to meet the power demands of mass flow controller, no longer need to the bought equipment of worry and
It is happened using power supply is unmatched.
In order to facilitate selection power supply, in some embodiments, it includes relay that power supply, which integrates processing circuit, and relay includes dynamic
Contact, normally opened contact and normally-closed contact；Movable contact connects external input power；Normally opened contact connects dual power supply；Normally-closed contact connects
Order power supply.In this way, power supply, which integrates processing circuit default, provides single supply, after being switched by relay, can provide double
Power supply.
Power supply is integrated there are many specific implementations of processing circuit.For example, in some embodiments, power supply integration processing
Circuit specifically includes: DC-DC power module, which may be implemented the conversion of DC-DC, and concrete model can
With but be not limited to TPV2415S, the pin of the DC-DC power module of the TPV2415S includes that grounding pin GND, power input are drawn
Foot VIN, the first power supply output pin V-, second source output pin 0V, third power supply output pin V+.
Below by taking the DC-DC power module of the TPV2415S as an example, the specific structure for integrating processing circuit to power supply is carried out
It illustrates.
It is specifically included as shown in fig. 7, power supply integrates processing circuit: DC-DC power module U, first capacitor C1, the second capacitor
C2, third capacitor C3, the 4th capacitor C4, the 5th capacitor C5, the 6th capacitor C6 and relay K；Wherein, DC-DC power module U
Grounding pin GND ground connection, the normally opened contact P1 of power input pin VIN connection relay K, the first power supply output pin V- pass through
First end, the first end of third capacitor C3 that first capacitor C1 is grounded, is also respectively connected with the second capacitor C2, second source output are drawn
Foot 0V ground connection, be also respectively connected with the second capacitor C2 second end, the second end of third capacitor C3, the first end of the 5th capacitor C5,
The first end of 6th capacitor C6, third power supply output pin V+ pass through the 4th capacitor C4 connection power input pin VIN, also distinguish
Connect the second end of the 5th capacitor C5, the second end of the 6th capacitor C6；Wherein, the movable contact P2 connection external input of relay K
Power supply 9, normally-closed contact P3 connection single supply output end VCC1.Wherein, the first power supply output pin V- is defeated as dual power supply cathode
Outlet VDD, third power supply output pin V+ is as dual power supply cathode output end VCC2.
By taking dual power supply ± 15V, single supply 24V as an example, the voltage of dual power supply cathode output end VDD is -15V, and dual power supply is just
Pole output end VCC2 is+15V, and the voltage of single supply output end VCC1 is 24V, correspondingly, in practical application, external input is electric
Source can be directly disposed as 24V, and when the power requirement of mass flow controller is 24V, the power supply of auxiliary device integrates module
Relay normally closed contact be in connection status, external input power is integrated processing circuit by power supply and is handled without integration,
Directly output 24V supplies mass flow controller；When the power requirement of mass flow controller is dual power supply ± 15V, relay
Device work, the normally opened of script become normally closed, and the normally closed of script becomes normally opened, and external input power integrates processing circuit by power supply
Integration processing after output ± 15V supply mass flow controller.
In some embodiments, it can also include jumper cap, toggle switch, etc. that power supply, which integrates processing circuit,.
It is understood that same or similar part can mutually refer in the various embodiments described above, in some embodiments
Unspecified content may refer to the same or similar content in other embodiments.
It should be noted that term " first ", " second " etc. are used for description purposes only in the description of the present application, without
It can be interpreted as indication or suggestion relative importance.In addition, in the description of the present application, unless otherwise indicated, the meaning of " multiple "
Refer at least two.
Any process described otherwise above or method description are construed as in flow chart or herein, and expression includes
It is one or more for realizing specific logical function or process the step of executable instruction code module, segment or portion
Point, and the range of the preferred embodiment of the application includes other realization, wherein can not press shown or discussed suitable
Sequence, including according to related function by it is basic simultaneously in the way of or in the opposite order, Lai Zhihang function, this should be by the application
Embodiment person of ordinary skill in the field understood.
It should be appreciated that each section of the application can be realized with hardware, software, firmware or their combination.Above-mentioned
In embodiment, software that multiple steps or method can be executed in memory and by suitable instruction execution system with storage
Or firmware is realized.It, and in another embodiment, can be under well known in the art for example, if realized with hardware
Any one of column technology or their combination are realized: having a logic gates for realizing logic function to data-signal
Discrete logic, with suitable combinational logic gate circuit specific integrated circuit, programmable gate array (PGA), scene
Programmable gate array (FPGA) etc..
Those skilled in the art are understood that realize all or part of step that above-described embodiment method carries
It suddenly is that relevant hardware can be instructed to complete by program, the program can store in a kind of computer-readable storage medium
In matter, which when being executed, includes the steps that one or a combination set of embodiment of the method.
It, can also be in addition, can integrate in a processing module in each functional unit in each embodiment of the application
It is that each unit physically exists alone, can also be integrated in two or more units in a module.Above-mentioned integrated mould
Block both can take the form of hardware realization, can also be realized in the form of software function module.The integrated module is such as
Fruit is realized and when sold or used as an independent product in the form of software function module, also can store in a computer
In read/write memory medium.
Storage medium mentioned above can be read-only memory, disk or CD etc..
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is contained at least one embodiment or example of the application.In the present specification, schematic expression of the above terms are not
Centainly refer to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be any
One or more embodiment or examples in can be combined in any suitable manner.
Although embodiments herein has been shown and described above, it is to be understood that above-described embodiment is example
Property, it should not be understood as the limitation to the application, those skilled in the art within the scope of application can be to above-mentioned
Embodiment is changed, modifies, replacement and variant.
Claims (10)
1. a kind of auxiliary device of mass flow controller characterized by comprising circuit board and setting are on the circuit board
Input selection circuit；
Wherein, the input selection circuit has a first port and at least two second ports；
The first port is used for quality of connection flow controller；
The second port is used to connect the external control components of the mass flow controller；The external control components are used for
Signal interaction is carried out with the mass flow controller to control the mass flow controller；The different second ports connects
The type of the external control components connect is different；
The input selection circuit be used for by least two second port target second port and connection it is described outer
Portion's control assembly is connected, so that the external control components and the mass flow controller of target second port connection
It connects to carry out signal interaction.
2. auxiliary device according to claim 1, which is characterized in that the input selection circuit includes toggle switch；Institute
Stating toggle switch includes and each one-to-one key of second port；Each key is correspondingly arranged there are two pin；Each
A pin in two pins of key connects the corresponding second port, another pin connects the first port；
When the key is opened, the external control components of the corresponding second port of the key and connection are connected.
3. auxiliary device according to claim 1, which is characterized in that the external control components include the first outside control
Component and the second external control components；
First external control components are the external control assembly of the auxiliary device；
Second external control components are the control assembly being arranged on the circuit board.
4. auxiliary device according to claim 3, which is characterized in that second external control components include:
Processor；
The coding module and/or wireless communication module being connected to the processor；
The coding module, for providing control signal by adjusting encoder；
The wireless communication module, for providing control signal by wireless communication technique；
The processor, for the control signal to be supplied to the mass flow controller by the first port.
5. auxiliary device according to claim 4, which is characterized in that second external control components further include display mould
Block, the display module is connected to the processor, for showing flow value.
6. auxiliary device according to claim 4, which is characterized in that the coding module include knob and with the knob
The digital encoder of connection；
The knob is used to adjust the voltage in the digital encoder by rotation；
When the control signal is supplied to the mass flow controller by the first port, the processing implement body is used
In generating the control signal according to the voltage value of the digital encoder and be supplied to the mass flow controller.
7. according to auxiliary device according to claim 4, which is characterized in that the wireless communication module includes in following item
At least one of: ZIGBEE module, WIFI module or bluetooth module.
8. auxiliary device according to claim 1, which is characterized in that further include that the power supply that is arranged on the circuit board is whole
Processing circuit is closed, the power input port that the power supply integrates processing circuit is connect with external input power, the power supply integration
The output port of power source of processing circuit is connect with the supply port of the mass flow controller, and the power supply integrates processing circuit
For the external input power to be supplied to the mass flow controller.
9. auxiliary device according to claim 8, which is characterized in that power supply needed for the mass flow controller includes
Single supply or dual power supply；
The power supply integrates processing circuit and is specifically used for providing single supply and dual power supply.
10. auxiliary device according to claim 9, which is characterized in that it includes relay that the power supply, which integrates processing circuit,
The relay includes movable contact, normally opened contact and normally-closed contact；
The movable contact connects the external input power；
The normally opened contact connects the dual power supply；
The normally-closed contact connects the single supply.
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