CN110398989B - Auxiliary device for mass flow controller - Google Patents
Auxiliary device for mass flow controller Download PDFInfo
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- CN110398989B CN110398989B CN201910825687.5A CN201910825687A CN110398989B CN 110398989 B CN110398989 B CN 110398989B CN 201910825687 A CN201910825687 A CN 201910825687A CN 110398989 B CN110398989 B CN 110398989B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/002—Switching arrangements with several input- or output terminals
- H03K17/005—Switching arrangements with several input- or output terminals with several inputs only
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/965—Switches controlled by moving an element forming part of the switch
- H03K17/967—Switches controlled by moving an element forming part of the switch having a plurality of control members, e.g. keyboard
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Abstract
The application discloses an auxiliary device of a mass flow controller, which comprises a circuit board and an input selection circuit arranged on the circuit board; wherein the input selection circuit has a first port and at least two second ports; the first port is used for connecting a mass flow controller; the second port is used for connecting an external control component of the mass flow controller; the external control component is used for interacting with the mass flow controller to control the mass flow controller; the input selection circuit is used for connecting the target port of the at least two second ports with the connected external control component, so that the external control component connected with the target second port is connected with the mass flow controller for signal interaction. Different external control components are selected by utilizing the input selection circuit, so that the use space of equipment can be saved and the user selectivity can be increased while the original control mode is not influenced.
Description
Technical Field
The application relates to the technical field of microelectronics, in particular to an auxiliary device of a mass flow controller.
Background
The mass flow controller is widely applied to precise control of various process gas flows, and has the advantages of high reaction speed, high control precision and the like.
In the related art, there are two general application methods of mass flow controllers: the first is that the mass flow controller without digital communication function can be controlled by the secondary instrument connected with the data line; the second is for mass flow controllers for mass use, which can be controlled directly using devices such as programmable logic controllers.
However, for the first application mode, most of the secondary meters of the mass flow controller are installed on a panel in a rack or on a desk, the sizes of the two types of secondary meters are 96 x 150mm or more, the size of the display meter externally connected with the secondary meters is larger than that of the mass flow controller, the problems that the mass flow controller occupies too much space or is placed in no place in research and development, experiments and the like are avoided, and for the second application mode, the mass flow controller is controlled by directly using equipment such as a programmable logic controller, and the like, so that the equipment control mode is single, and the use is inconvenient for users.
Disclosure of Invention
In view of the foregoing, it is an object of the present application to overcome the deficiencies of the prior art and to provide an auxiliary device for a mass flow controller.
In order to achieve the above purpose, the present application adopts the following technical scheme:
an auxiliary device for a mass flow controller, comprising: a circuit board and an input selection circuit disposed on the circuit board;
wherein the input selection circuit has a first port and at least two second ports;
the first port is used for being connected with a mass flow controller;
the second port is used for connecting an external control component of the mass flow controller; the external control assembly is used for interacting with the mass flow controller to control the mass flow controller; the external control components of different second port connections are of different types;
the input selection circuit is used for connecting a target second port of the at least two second ports with the connected external control component, so that the external control component connected with the target second port is connected with the mass flow controller for signal interaction.
Optionally, the input selection circuit includes a dial switch; the dial switch comprises keys which are in one-to-one correspondence with the second ports; each key is correspondingly provided with two pins; one of the two pins of each key is connected with the corresponding second port, and the other pin is connected with the first port; when the key is opened, the second port corresponding to the key is communicated with the connected external control component.
Optionally, the external control assembly includes a first external control assembly and a second external control assembly;
the first external control component is a control component externally connected with the auxiliary device;
the second external control component is a control component arranged on the circuit board.
Optionally, the second external control assembly includes:
a processor;
the coding module and/or the wireless communication module is connected with the processor;
the encoding module is used for providing a control signal through an adjusting encoder;
the wireless communication module is used for providing control signals through a wireless communication technology;
the processor is configured to provide the control signal to the mass flow controller through the first port.
Optionally, the second external control component further includes a display module, and the display module is connected with the processor, and is used for displaying the flow value.
Optionally, the encoding module includes a knob and a digital encoder connected to the knob;
the knob is used for adjusting the voltage in the digital encoder through rotation;
when the control signal is provided to the mass flow controller through the first port, the processor is specifically configured to generate the control signal according to the voltage value of the digital encoder and provide the control signal to the mass flow controller.
Optionally, the wireless communication module includes at least one of: ZIGBEE module, WIFI module or bluetooth module.
Optionally, the device further comprises a power integration processing circuit arranged on the circuit board, wherein a power input port of the power integration processing circuit is connected with an external input power supply, a power output port of the power integration processing circuit is connected with a power supply port of the mass flow controller, and the power integration processing circuit is used for providing the external input power supply for the mass flow controller.
Optionally, the power source required by the mass flow controller comprises a single power source or a dual power source;
the power supply integration processing circuit is particularly used for providing a single power supply and a double power supply.
Optionally, the power supply integration processing circuit comprises a relay, wherein the relay comprises a movable contact, a normally open contact and a normally closed contact;
the movable contact is connected with the external input power supply;
the normally open contact is connected with the dual power supply;
and the normally closed contact is connected with the single power supply.
The application adopts the technical scheme and has the following beneficial effects:
the proposal of the application provides an auxiliary device of a mass flow controller, because the circuit board of the auxiliary device is provided with an input selection circuit, the input selection circuit is connected with the mass flow controller through a first port, and is connected with an external control component through a second port, as the second port has more than two external control components, different external control components can be connected, the input selection circuit can connect one of the second ports (namely, the target second port) with the connected external control component, so as to realize the connection of the external control component connected with the target second port with the mass flow controller, after the connection, the mass flow controller can perform signal interaction with the connected external control component, in the application process, the control signal can be acquired through the connected external control component, and after the control signal is acquired, the control signal is sent to the mass flow controller to serve as the input signal of the mass flow controller, and simultaneously, the output signal sent by the mass flow controller can be received, thus, the signal interaction between the mass flow controller and the external control component can be realized, the user can select a proper type of external control component according to the own requirement, the external control component can be connected with the mass flow controller, the auxiliary device can occupy a small space compared with the auxiliary device by using other auxiliary devices, the auxiliary device has a small occupied space, and other modes can be realized by using other auxiliary devices, such as the auxiliary devices, and the original devices have small occupied space, and the selectivity of the user in different application scenes is increased.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Fig. 2 is a schematic diagram of another structure of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Fig. 3 is a schematic diagram of another structure of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Fig. 4 is a schematic diagram of another structure of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Fig. 5 is a schematic diagram of another structure of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Fig. 6 is a schematic diagram of another configuration of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Fig. 7 is a schematic diagram of a circuit connection of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be described in detail below. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. All other embodiments, based on the examples herein, which are within the scope of the protection sought by those of ordinary skill in the art without undue effort, are intended to be encompassed by the present application.
Examples
Referring to fig. 1, fig. 1 is a schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Referring to fig. 2, fig. 2 is another schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Referring to fig. 3, fig. 3 is another schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Referring to fig. 4, fig. 4 is another schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Referring to fig. 5, fig. 5 is another schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Referring to fig. 6, fig. 6 is another schematic structural view of an auxiliary device of a mass flow controller according to an embodiment of the present application.
Referring to fig. 7, fig. 7 is a schematic diagram of a circuit connection of an auxiliary device of a mass flow controller according to an embodiment of the present application.
As shown in fig. 1, an embodiment of the present application provides an auxiliary device 1 of a mass flow controller, including: a circuit board 2 and an input selection circuit 3 provided on the circuit board 2;
wherein the input selection circuit 3 has one first port 4 and at least two second ports 5;
the first port 4 is used for connecting a mass flow controller 10;
the second port 5 is used to connect an external control component of the mass flow controller 10; the external control assembly 7 is used for signal interaction with the mass flow controller 10 to control the mass flow controller 10; the external control components of different second port connections are of different types;
the input selection circuit 3 is used to connect a target second port of the at least two second ports 5 with a connected external control component such that the target second port connected external control component is connected with the mass flow controller for signal interaction.
Specifically, the number of the second ports of the input selection circuit may be set according to the actual application, which is not limited herein.
The target second port is a second port corresponding to an external control component which needs to be turned on at present.
The proposal of the application provides an auxiliary device of a mass flow controller, because the circuit board of the auxiliary device is provided with an input selection circuit, the input selection circuit is connected with the mass flow controller through a first port, and is connected with an external control component through a second port, as the second port has more than two external control components, different external control components can be connected, the input selection circuit can connect one of the second ports (namely, the target second port) with the connected external control component, so as to realize the connection of the external control component connected with the target second port with the mass flow controller, after the connection, the mass flow controller can perform signal interaction with the connected external control component, in the application process, the control signal can be acquired through the connected external control component, and after the control signal is acquired, the control signal is sent to the mass flow controller to serve as the input signal of the mass flow controller, and simultaneously, the output signal sent by the mass flow controller can be received, thus, the signal interaction between the mass flow controller and the external control component can be realized, the user can select a proper type of external control component according to the own requirement, the external control component can be connected with the mass flow controller, the auxiliary device can occupy a small space compared with the auxiliary device by using other auxiliary devices, the auxiliary device has a small occupied space, and other modes can be realized by using other auxiliary devices, such as the auxiliary devices, and the original devices have small occupied space, and the selectivity of the user in different application scenes is increased.
The installation position of the auxiliary device of the mass flow controller provided in this embodiment on the mass flow controller may be set according to the actual situation, which is not limited herein. For example, as shown in fig. 2, the auxiliary device 1 can be mounted on top of the mass flow controller 10, and the auxiliary device 1 is carried by the mass flow controller 10, increasing the mounting stability of the auxiliary device 1.
The specific structure of the input selection circuit is various. For example, in some embodiments, the input selection circuit includes a dial switch. The dial switch is a micro switch needing manual operation, and a general dial switch can comprise a plurality of keys, two pins are arranged ON the back surface corresponding to each key, when the dial switch works, the keys are dialed to one side of ON, the two pins corresponding to the keys are turned ON, and otherwise, the two pins are turned off. As shown in fig. 3, the dial switch 01 includes keys 02 and 03 in one-to-one correspondence with each second port 5; each key is correspondingly provided with two pins 04, 05, 06 and 07; one of the two pins 05 and 07 of each key is connected with the corresponding second port 5, and the other pin 04 and 06 is connected with the first port 4; when the key is opened, the second port 5 corresponding to the key is communicated with the connected external control component, namely the mass flow controller is communicated with the external control component. In implementation, when the key is turned to the ON side, the second port corresponding to the key is the target second port.
In particular, the number of types of dial switches is varied, for example, the number of dial switches may include, but is not limited to, SW-DIP4.
In some embodiments, the input selection circuit may also include relays, jumper caps, and the like.
In some embodiments, as shown in fig. 4, the external control assembly comprises a first external control assembly 6 and a second external control assembly 7; the first external control component 6 is a control component externally connected with the auxiliary device 1; the second external control assembly 7 is a control assembly on the circuit board 2.
In this embodiment, two types of external control components are provided.
The first external control component is a default external control component which can be used in a connection mode when the mass flow controller leaves a factory, and the original control mode of the mass flow controller can be realized. In implementation, the mass flow controller may be separated from the auxiliary device of the present embodiment and directly connected to the first external control component, and may also be connected to the first external control component through the auxiliary device of the present embodiment, so that the original control mode may be maintained, and more selectivity may be added to the user based on the original control mode. In particular, the method comprises the steps of,
the first external control component includes a secondary meter such as a display, integrator, or the like.
The second external control component is a control component except for the external control component which can be used by default in a connection mode of the mass flow controller, and can realize a control mode except for the original control mode of the mass flow controller. The mass flow controller may be connected to the second external control assembly by a connection aid.
In the implementation, the auxiliary device is arranged between the mass flow controller and the first external control component, and when the dial switch is connected with the first external control component, the first external control component performs signal interaction with the mass flow controller; when the dial switch is disconnected from the first external control component and is connected with the second external control component, the mass flow controller does not interact with the first external control component any more, but interacts with the second external control component.
To make the control manner of the second external control unit more selectable, as shown in fig. 5, in some embodiments, the second external control unit 7 includes: a processor 13; a coding module 14 and/or a wireless communication module 11 connected to the processor 13; an encoding module 14 for providing a control signal by adjusting the encoder; a wireless communication module 11 for providing a control signal by a wireless communication technology; a processor 13 for providing a control signal to the mass flow controller via the first port.
In specific implementation, the wireless communication module may receive a signal carrying a flow control value sent by a client that establishes a wireless connection in advance and send the received signal to the processor, the processor generates a corresponding control signal according to the received signal, and provides the control signal to the second port of the input selection circuit, and the input selection circuit provides the control signal to the mass flow controller through the first port, so that the mass flow controller adjusts the valve opening according to the control signal, thereby controlling the flow, and thus, remote control of the mass flow controller is realized.
The wireless communication module comprises at least one of the following: ZIGBEE module, WIFI module or bluetooth module. Specifically, the specific implementation manner of the ZIGBEE module, the WIFI module, or the bluetooth module may refer to related technologies, which are not described herein.
In some embodiments, the encoding module includes a knob and a digital encoder coupled to the knob; the knob is used for adjusting the voltage in the digital encoder through rotation; when the control signal is provided to the mass flow controller through the first port, the processor is specifically configured to generate the control signal according to the voltage value of the digital encoder and provide the control signal to the mass flow controller. In this embodiment, the voltage value input to the digital encoder is adjusted by rotating the knob, and the processor recognizes the corresponding voltage value and generates a corresponding signal by digital-to-analog conversion, thereby obtaining the control signal.
As shown in fig. 5, in some embodiments, the second external control assembly 7 further includes a display module 12, the display module 12 being coupled to the processor 13 for displaying the flow value. The mass flow controller can detect the flow value, send the detected flow value to the processor, and send the flow value to the display module for real-time display by the processor. For example, when using the second external control assembly with the encoding module as described above, the magnitude of the control signal of the mass flow controller is adjusted by rotating the knob, and the display module displays a corresponding flow value according to the output signal of the mass flow controller corresponding to the control signal. In this embodiment, the display module is configured to display the flow value flowing through the pipeline in real time, so that a user can conveniently view the flow in the pipeline in real time, and thus, adjustment can be made according to actual conditions.
The display module may include, but is not limited to, a liquid crystal display, a light emitting diode (Light Emitting Diode, LED) display, and the like.
When the secondary instrument cannot be installed after the mass flow controller is installed due to the limitation of external conditions, the auxiliary module with small volume and high selectivity can well replace the original control mode, namely the dial switch is disconnected with the first external control component and is connected with the second external control component, so that when the second external control component has only the wireless communication module and no coding module, a user can remotely control the mass flow controller through the wireless communication technology; when the second external control component only has the coding module and does not have the wireless communication module, a user can control the mass flow controller by rotating the knob; when the second external control component is provided with the wireless communication module and the coding module, a user can remotely control the mass flow controller and can control the mass flow controller in a knob rotating mode.
In practical applications, the power supply modes of the power supplies of mass flow controllers produced in the market are not uniform, which often leads to the user paying extra attention to the power supply requirements of the mass flow controllers when purchasing the mass flow controllers. To this end, as shown in fig. 6, in some embodiments, the auxiliary device 1 further includes a power integration processing circuit 8 disposed on the circuit board 2, a power input port of the power integration processing circuit 8 is connected to an external input power supply 9, a power output port of the power integration processing circuit 8 is connected to a power supply port of the mass flow controller, and the power integration processing circuit 8 is configured to provide the external input power supply 9 to the mass flow controller.
In some embodiments, the power source required by the mass flow controller comprises a single power source or a dual power source. For example, the current mass flow controllers on the market require a power supply of either + -15V dual or 24V single.
In some application scenarios, the external input power source is inconsistent with the required power source of the mass flow controller, for example, the external input power source is a single power source, and the required power source of the mass flow controller is a dual power source, or the external input power source is a dual power source, and the required power source of the mass flow controller is a single power source, and at this time, the mass flow controller cannot be used due to the inconsistent between the required power source of the mass flow controller and the external input power source. In order to meet the needs of different users, the power supply integration processing circuit is specifically used for providing a single power supply and a double power supply for the mass flow controller. Therefore, a user can select to use the single power supply and the double power supplies according to the requirements so as to meet the power supply requirements of the mass flow controller, and the situation that the purchased equipment is not matched with the used power supplies is not required.
To facilitate selection of the power source, in some embodiments, the power source integration processing circuit includes a relay including a movable contact, a normally open contact, and a normally closed contact; the movable contact is connected with an external input power supply; the normally open contact is connected with a double power supply; the normally closed contact is connected with a single power supply. Thus, the power integration processing circuit provides a single power source by default, and can provide double power sources after switching through the relay.
There are various specific implementations of the power supply integration processing circuit. For example, in some embodiments, the power integrated processing circuit specifically includes: the DC-DC power module may implement DC-DC conversion, and the specific model may be, but is not limited to, TPV2415S, where pins of the DC-DC power module of TPV2415S include a ground pin GND, a power input pin VIN, a first power output pin V-, a second power output pin 0V, and a third power output pin v+.
The specific configuration of the power integration processing circuit is illustrated below using the DC-DC power module of TPV2415S as an example.
As shown in fig. 7, the power supply integration processing circuit specifically includes: the DC-DC power supply module U, a first capacitor C1, a second capacitor C2, a third capacitor C3, a fourth capacitor C4, a fifth capacitor C5, a sixth capacitor C6 and a relay K; the grounding pin GND of the DC-DC power supply module U is grounded, the power supply input pin VIN is connected with the normally open contact P1 of the relay K, the first power supply output pin V-is grounded through the first capacitor C1 and is also respectively connected with the first end of the second capacitor C2 and the first end of the third capacitor C3, the second power supply output pin 0V is grounded and is also respectively connected with the second end of the second capacitor C2, the second end of the third capacitor C3, the first end of the fifth capacitor C5 and the first end of the sixth capacitor C6, and the third power supply output pin V+ is connected with the power supply input pin VIN through the fourth capacitor C4 and is also respectively connected with the second end of the fifth capacitor C5 and the second end of the sixth capacitor C6; the movable contact P2 of the relay K is connected with an external input power supply 9, and the normally closed contact P3 is connected with a single power supply output end VCC1. The first power output pin V-is used as a dual-power negative output end VDD, and the third power output pin V+ is used as a dual-power positive output end VCC2.
Taking the dual power supply +/-15V and the single power supply 24V as examples, the voltage of the negative output end VDD of the dual power supply is-15V, the voltage of the positive output end VCC2 of the dual power supply is +15V, the voltage of the single power supply output end VCC1 is 24V, correspondingly, when the dual power supply +/-15V and the single power supply are actually applied, the external input power supply can be directly set to 24V, when the power supply requirement of the mass flow controller is 24V, the normally closed contact of the relay of the power supply integration module of the auxiliary device is in a connection state, the external input power supply is not integrated by the power supply integration processing circuit, and the external input power supply is directly output for 24V to be supplied to the mass flow controller; when the power supply requirement of the mass flow controller is double power supply +/-15V, the relay works, the original normally open is changed into normally closed, the original normally closed is changed into normally open, and the external input power supply outputs +/-15V to be supplied to the mass flow controller after being integrated by the power supply integrated processing circuit.
In some embodiments, the power integrated processing circuitry may also include jumper caps, dip switches, and the like.
It is to be understood that the same or similar parts in the above embodiments may be referred to each other, and that in some embodiments, the same or similar parts in other embodiments may be referred to.
It should be noted that in the description of the present application, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Furthermore, in the description of the present application, unless otherwise indicated, the meaning of "plurality" means at least two.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and further implementations are included within the scope of the preferred embodiment of the present application in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present application.
It is to be understood that portions of the present application may be implemented in hardware, software, firmware, or a combination thereof. In the above-described embodiments, the various steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, may be implemented using any one or combination of the following techniques, as is well known in the art: discrete logic circuits having logic gates for implementing logic functions on data signals, application specific integrated circuits having suitable combinational logic gates, programmable Gate Arrays (PGAs), field Programmable Gate Arrays (FPGAs), and the like.
Those of ordinary skill in the art will appreciate that all or a portion of the steps carried out in the method of the above-described embodiments may be implemented by a program to instruct related hardware, where the program may be stored in a computer readable storage medium, and where the program, when executed, includes one or a combination of the steps of the method embodiments.
In addition, each functional unit in each embodiment of the present application may be integrated in one processing module, or each unit may exist alone physically, or two or more units may be integrated in one module. The integrated modules may be implemented in hardware or in software functional modules. The integrated modules may also be stored in a computer readable storage medium if implemented in the form of software functional modules and sold or used as a stand-alone product.
The above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, or the like.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the application.
Claims (7)
1. An auxiliary device for a mass flow controller, comprising: a circuit board and an input selection circuit disposed on the circuit board;
wherein the input selection circuit has a first port and at least two second ports;
the first port is used for being connected with a mass flow controller;
the second port is used for connecting an external control component of the mass flow controller; the external control assembly is used for interacting with the mass flow controller to control the mass flow controller; the external control components of different second port connections are of different types;
the input selection circuit is used for connecting a target second port of the at least two second ports with the connected external control component, so that the external control component connected with the target second port is connected with the mass flow controller for signal interaction;
the input selection circuit comprises a dial switch; the dial switch comprises keys which are in one-to-one correspondence with the second ports; each key is correspondingly provided with two pins; one of the two pins of each key is connected with the corresponding second port, and the other pin is connected with the first port; when the key is opened, the second port corresponding to the key is communicated with the connected external control component;
the external control assembly comprises a first external control assembly and a second external control assembly;
the first external control component is a control component externally connected with the auxiliary device;
the second external control component is a control component arranged on the circuit board;
the second external control assembly includes:
a processor;
the coding module and/or the wireless communication module is connected with the processor;
the encoding module is used for providing a control signal through an adjusting encoder;
the wireless communication module is used for providing control signals through a wireless communication technology;
the processor is configured to provide the control signal to the mass flow controller through the first port.
2. The auxiliary device of claim 1, wherein the second external control assembly further comprises a display module coupled to the processor for displaying the flow value.
3. The auxiliary device of claim 1 wherein the encoding module comprises a knob and a digital encoder coupled to the knob;
the knob is used for adjusting the voltage in the digital encoder through rotation;
when the control signal is provided to the mass flow controller through the first port, the processor is specifically configured to generate the control signal according to the voltage value of the digital encoder and provide the control signal to the mass flow controller.
4. The accessory device of claim 1, wherein the wireless communication module comprises at least one of: ZIGBEE module, WIFI module or bluetooth module.
5. The auxiliary device of claim 1, further comprising a power integration processing circuit disposed on the circuit board, a power input port of the power integration processing circuit being connected to an external input power source, a power output port of the power integration processing circuit being connected to a power supply port of the mass flow controller, the power integration processing circuit being configured to provide the external input power source to the mass flow controller.
6. The auxiliary device of claim 5 wherein the power source required by the mass flow controller comprises a single power source or a dual power source;
the power supply integration processing circuit is particularly used for providing a single power supply and a double power supply.
7. The auxiliary device of claim 6, wherein the power integrated processing circuit comprises a relay comprising a movable contact, a normally open contact, and a normally closed contact;
the movable contact is connected with the external input power supply;
the normally open contact is connected with the dual power supply;
and the normally closed contact is connected with the single power supply.
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