CN110380335A - A kind of mid and far infrared external cavity laser debugging apparatus and method based on single point detector - Google Patents
A kind of mid and far infrared external cavity laser debugging apparatus and method based on single point detector Download PDFInfo
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- CN110380335A CN110380335A CN201910636846.7A CN201910636846A CN110380335A CN 110380335 A CN110380335 A CN 110380335A CN 201910636846 A CN201910636846 A CN 201910636846A CN 110380335 A CN110380335 A CN 110380335A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
A kind of mid and far infrared external cavity laser debugging apparatus and method based on single point detector of the present invention.The laser that this method is suitable for any wavelength of extenal cavity tunable exports.It include: installation laser chip and intracavitary collimator；Laser chip powers on generation fluorescence；Make the fluorescent signals of laser chip highly collimated using collimator in single point detector adjusting cavity；The angle of diffraction is calculated according to grating equation, and tunable optical devices are tentatively installed；The outer collimator of installation cavity and light power meter；Adjustment tunable optical devices make itself and collimation fluorescence optical axis high perpendicular, until there is laser output；Fine tuning tuning optical device, obtains laser power maximum output；The outer collimator pitch position of chamber is adjusted, until output laser alignment is parallel.The present invention solves the problems such as low mid and far infrared external cavity laser chip light feedback efficiency, laser output multimode oscillation, can not be engineered.
Description
Technical field
The invention belongs to outside tunable laser technical field more particularly to a kind of mid and far infrared quanta cascade Littrow
The debugging apparatus and method of cavate broad tuning Optical Maser System.
Background technique
Mid and far infrared quanta cascade broad tuning laser is illicit drugs inspection, chemical leakage detection, medical diagnosis, imaging detection
The perfect light source in the laser sensings such as system field.Tuning range, the line width, output of mid and far infrared quanta cascade broad tuning laser
Power directly affects the detection performance of quanta cascade laser sensing system.Therefore to high-precision quanta cascade broad tuning laser
Adjustment method have urgent design requirement.Mid and far infrared quanta cascade wide range laser chip exports week fluorescent, collimates mesh to it
Preceding common approach combines the method debugged using multi-dimensional optical adjustment frame and mechanical location, and no direct signal detects,
Glimmering light collimation performance is low, exports easy multimode oscillation；Fluorescence can not be parallel with tunable optical unit optical axis, the light energy of selected mode
Effectively return laser light chip, reduction optical conversion efficiency it cannot influence laser output power；Fluorescence at laser chip spectral edges
Laser generation cannot be generated by tunable optical unit modeling, laser tunable range is had a greatly reduced quality；Optical adjusting frame external component
Cause laser to can not achieve engineering, is only limited to Laboratory Principle model machine.
Summary of the invention
Technical problem solved by the present invention is overcome the deficiencies in the prior art, proposes a kind of efficiently feasible with universality
Mid and far infrared outside cavity gas laser debugging apparatus and method, it is low, sharp to solve mid and far infrared external cavity laser chip light feedback efficiency
Light output multimode oscillation, the problems such as can not being engineered.
The technical scheme is that a kind of mid and far infrared external cavity laser debugging apparatus based on single point detector, including
The outer collimator of laser chip, intracavitary collimator, tunable optical devices, single point detector, oscillograph, chamber, light power meter and sense
Light-card；
Laser chip: the hypofluorescence signal of output mid and far infrared wide spectrum provides modeling source for outside cavity gas laser；Laser core
Piece need to be equipped with temperature control system, guarantee the constant temperature working condition of laser chip；By semiconductor cooler (TEC) to laser chip into
Row temperature control.
Intracavitary collimator: carrying out beam path alignment to the hypofluorescence signal of laser chip output, reduce fluorescent emission angle, so that
Output fluorescence tends to be parallel；
Tunable optical devices: the hypofluorescence signal after collimation is subjected to modeling, and according to original optical path return laser light
Chip output, laser chip export laser；
Single point detector: the hypofluorescence signal after collimation is detected near field and far field, so that it is determined that chamber
The position of interior collimator；
Oscillograph: connecting near field far field single point detector, the signal strength of Real-time Feedback near field far field single point detector；
The outer collimator of chamber: beam path alignment is carried out to the laser of laser chip output, realizes the parallel light output of external cavity laser；
Light power meter: the laser exported after collimation carries out optical power test, as final on-line debugging tunable optical
The reference of device position and the outer collimator position of chamber；
Photosensitive card: for being observed to the hot spot that laser exports.
The laser chip is that front end face plates anti-reflection film, rear end face not plated film, and exports mid and far infrared under normal temperature state
The wide range quanta cascade chip of fluorescence；Specifically use fluorescence Spectra for 6~11 μm of wide range quanta cascade chip；
The tunable optical devices are balzed grating,；
The intracavitary collimator and the outer collimator of chamber are the lens for being coated with wide range laser chip spectral coverage optical anti-reflective film；
The single point detector is multistage Pa Reer patch refrigeration optical detector；
The light power meter is pyroelectricity light power meter；
The photosensitive card is the photosensitive card that laser facula is converted to visible waveband hot spot.
A kind of mid and far infrared external cavity laser adjustment method based on single point detector, steps are as follows:
(1) laser chip and intracavitary collimator are tentatively installed；
(2) laser chip powers on generation fluorescence；
(3) using collimator in single point detector adjusting cavity, so that the fluorescent signals collimation of laser chip output；
(4) angle of diffraction is calculated according to grating equation, tentatively installation tunable optical devices；Laser is calculated according to grating equation
The angle of diffraction of chip center's wavelength tentatively installs tunable optical devices, and preliminary installation need to guarantee fluorescence centre in grating
The heart, fluorescence is lost during preventing grating from tuning.Specifically using 150 grooves/mm balzed grating, according to laser center wave
It is about 39.6 ° that long 8.5 μm, which obtain preliminary setting angle,.
(5) the outer collimator of preliminary installation cavity and light power meter；
(6) it is vertical with collimation fluorescence optical axis to make it for adjustment tunable optical devices, until having laser output, and light power meter
Registration is maximum；
(7) the outer collimator pitch position of adjustment chamber, until output laser power is maximum and parallel.
The detailed process of the step (1) are as follows:
According to the focal length of intracavitary collimator, laser chip is tentatively installed on to the front focus of collimator.
The detailed process of the step (3) are as follows:
Using single point detector carry out fluorescent signals collimation, by single point detector be respectively placed in the coaxial near field of fluorescence,
Far-field position, in adjusting cavity before and after collimator, two-dimensional deflection direction, so that the single point detector intensity of scope response is coaxial
Near field, far-field position are consistent.
The detailed process of the step (5) are as follows:
According to the focal length of collimator outside chamber, the outer collimator of installation cavity, before making laser chip be located at the outer collimator of chamber
Focal point；Light power meter is installed on outside chamber focal point after collimator.
Step (6) process are as follows:
The two-dimensional deflection direction of tunable optical devices is adjusted, while observing optical power, optical power shows have in respect of registration
Laser output, is at this time finely adjusted the two-dimensional deflection direction of tunable optical devices, until light power meter registration is maximum.
Step (7) process are as follows:
The outer collimator front-rear position of chamber is finely tuned, when light power meter registration is maximum, stopping front-rear position being adjusted, and removes optical power
Meter；The outer collimator two-dimensional deflection direction of chamber is finely tuned, photosensitive card is respectively placed in Laser Near, far field coaxial position, it is ensured that light at two
Spot is located at photosensitive card same position, i.e. laser is parallel.
The laser that the debugging apparatus is directed to is Littrow outside cavity gas laser.
The advantages of the present invention over the prior art are that: current common external cavity laser debugging plan is using multidimensional light
The method for learning the blind tune of adjustment frame, each optical device tune simultaneously.In existing debugging plan, intracavitary collimating effect is not judged
Means, collimation is poor, and the present invention detects the hypofluorescence signal of collimator in transit chamber using single point detector, has directly
Signal strength feedback.The light energy low efficiency of return laser light chip in existing debugging plan influences laser output power and tuning
Range and it is also easy to produce multimode oscillation, the good fluorescence of collimation makes the luminous energy by tunable optical unit modeling in the present invention
Amount can maximize return laser light chip, and effective improving laser output power inhibits multimode laser oscillation, it is ensured that laser broad tuning
Output.In existing debugging plan, each optical element is the mode of joint debugging, to configure multiple external optical adjustment frames simultaneously, be
It is limited to the debugging plan of laboratory condition, each optical element is successively installation and debugging in the present invention, is conducive to each optical component
Successively fix, be easy to implement laser complete machine engineering.
Detailed description of the invention
Fig. 1 is a kind of mid and far infrared external cavity laser debugging flow chart based on single point detector provided by the invention；
Fig. 2 is a kind of mid and far infrared external cavity laser debugging apparatus schematic diagram based on single point detector provided by the invention；
Fig. 3 is a kind of Littrow outside cavity gas laser functional block diagram provided in an embodiment of the present invention；
Fig. 4 causes multimode laser to export when being intracavitary collimator deviation；
Fig. 5 be based on adjustment method single point detector of the present invention debugging under after laser narrow linewidth output；
Fig. 6 is to export tuning range based on adjustment method mid and far infrared outside cavity gas laser of the present invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
It should be noted that similar or identical part all uses identical figure number in attached drawing or specification description.It is attached
The size of each section is not proportional to full-size(d) to facilitate mark in figure.Furthermore the element for not being painted or describing in attached drawing
Or implementation, it is form known to a person of ordinary skill in the art in technical field.Specific example described herein is only used
To explain, it is not intended to limit the present invention.
In one embodiment of the invention, refering to fig. 1 and Fig. 2, Fig. 1 are provided by the invention a kind of detected based on single-point
The mid and far infrared external cavity laser of device debugs flow chart；Fig. 2 is external cavity laser debugging apparatus schematic diagram provided by the invention；The present invention
The adjustment method of the mid and far infrared outside cavity gas laser of offer includes:
As shown in Figure 1, laser debugging apparatus includes: laser chip: the hypofluorescence signal of output mid and far infrared wide spectrum is
Outside cavity gas laser provides modeling source；Intracavitary collimator: beam path alignment is carried out to the hypofluorescence signal of laser chip output, is reduced glimmering
The light angle of divergence, so that output fluorescence tends to be parallel；Tunable optical devices: the hypofluorescence signal after collimation is selected
Mould, and according to original optical path return laser light chip output, laser chip exports laser；Single point detector: to after collimation
Hypofluorescence signal is detected near field and far field, so that it is determined that the position of intracavitary collimator；Oscillograph: near field far field list
Point detector connection, the signal strength of Real-time Feedback near field far field single point detector；The outer collimator of chamber: to laser chip output
Laser carries out beam path alignment, realizes the closely parallel light output of external cavity laser；Light power meter: the laser exported after collimation carries out light function
Rate test, the reference as collimator position outside final on-line debugging tunable optical devices position and chamber；Photosensitive card: it is used for
The hot spot of laser output is observed.
External cavity laser adjustment method of the present invention, embodiments thereof are: preliminary installation laser chip and intracavitary collimation
Device.This laser chip refers to front end face plating anti-reflection film, rear end face not plated film, and the mid and far infrared of fluorescence is exported under normal temperature state
Wide range quanta cascade laser chip, the wide range quanta cascade chip for being 6~11 μm using fluorescence Spectra in the present embodiment；According to
Laser chip, is tentatively installed on the front focus of collimator by the focal length of intracavitary collimator, in the intracavitary collimator of the present embodiment
Using aspherics lens.
Laser chip powers on generation fluorescence, it should be noted that laser chip all has certain photoelectric conversion efficiency, such as
Heat is excessive, can not achieve natural cooling, and laser chip need to be equipped with temperature control system, guarantees the constant temperature working condition of laser chip.
As shown in Figure 3, temperature control is carried out to laser chip by semiconductor cooler (TEC) in the present embodiment.
Using collimator in single point detector adjusting cavity, so that the fluorescent signals collimation of laser chip output, described
Single point detector is multistage Pa Reer patch refrigeration optical detector.Single point detector is respectively placed in the coaxial near field of fluorescence, far field
Position, in adjusting cavity before and after collimator, two-dimensional deflection direction, so that the single point detector intensity of scope response is in coaxial near field
(≤20cm), far field (≤100cm) position consistency, be considered as the debugging of intracavitary collimator at this time and complete to fix.Described is faint
The highly collimated debugging of optical signal, suitable for front end plating anti-reflection film rear end not plated film and any wavelength of laser generation can not be constituted
Laser chip fluorescence output collimation and test；The good vertical for collimating fluorescence and tunable optical devices optical axis guarantees exocoel
Laser efficient photoelectricity treater transfer efficiency；To realize any wave band of laser output of narrow linewidth, broad tuning.
Debugging laser described in the present embodiment is Littrow outside cavity gas laser, and schematic illustration is as shown in Figure 3.It can
It tunes optical device and uses balzed grating,；When rotating shutter makes the first-order diffraction light of different angle along backtracking laser chip
When, the optical maser wavelength selected changes therewith.It is tentatively installed according to the angle of diffraction that grating equation calculates laser chip central wavelength
Tunable optical devices, preliminary installation need to guarantee fluorescence centre close to raster center, and fluorescence is lost during preventing grating from tuning.
Using 150 grooves/mm balzed grating, in the present embodiment, preliminary setting angle is obtained according to 8.5 μm of laser center wavelength
About 39.6 °.
The outer collimator of installation cavity and light power meter, according to the focal length of collimator outside chamber, the outer collimator of installation cavity makes to swash
Optical chip is located at the front focus of the outer collimator of chamber；Light power meter is installed on outside chamber focal point after collimator；The present embodiment is adopted
Optical power is pyroelectricity light power meter, and detection area is much larger than laser output facula size；It is collimated outside the present embodiment chamber
Using aspherics lens in device.
Grating pitch angle is adjusted, until there is optical power in respect of registration；Grating pitch angle is finely tuned, until power meter registration is most
Greatly；The outer collimator front-rear position of chamber is finely tuned, when light power meter registration is maximum, stopping front-rear position being adjusted, and removes light power meter.Most
The outer collimator of fine tuning chamber eventually, finely tunes two-dimensional deflection direction, observes coaxial output Laser Near (≤20cm), far field (≤100cm) sense
The position of light-card laser facula, it is ensured that hot spot is located at photosensitive card same position at two, and laser exports in parallel；The photosensitive card is will
Laser is converted to the photosensitive card of visible waveband hot spot.
In embodiments of the present invention, as shown in Figure 4 and Figure 5, do not use respectively single point detector mechanical location installation and
In the case where debugging intracavitary collimator using single point detector, external cavity laser output spectrum is obtained using the method for the invention
It is less than 1cm-1In the output of infrared narrow-linewidth laser.It is the broad tuning output realized in the embodiment of the present invention, tuning as shown in Figure 6
Range reaches 794cm-1。
Quanta cascade outside cavity gas laser adjustment method disclosed by the invention, innovative proposition are debugged using single point detector
The scheme of intracavitary fluorescence light path collimation, and all optical devices are subjected to optimization debugging, improve outside cavity gas laser debugging
Precision, effectively promotion photoelectric conversion efficiency, are advantageously implemented such laser engineering, and the embodiment of the present invention has carried out reality
Debugging specification and verifying.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of mid and far infrared external cavity laser debugging apparatus based on single point detector, it is characterised in that: including laser chip, chamber
The outer collimator of interior collimator, tunable optical devices, single point detector, oscillograph, chamber, light power meter and photosensitive card；
Laser chip: the hypofluorescence signal of output mid and far infrared wide spectrum provides modeling source for outside cavity gas laser；
Intracavitary collimator: beam path alignment is carried out to the hypofluorescence signal of laser chip output, reduces fluorescent emission angle, so that output
Fluorescence tends to be parallel；
Tunable optical devices: the hypofluorescence signal after collimation is subjected to modeling, and according to original optical path return laser light chip
Output end, laser chip export laser；
Single point detector: the hypofluorescence signal after collimation is detected near field and far field, so that it is determined that intracavitary standard
The position of straight device；
Oscillograph: connecting near field far field single point detector, the signal strength of Real-time Feedback near field far field single point detector；
The outer collimator of chamber: beam path alignment is carried out to the laser of laser chip output, realizes the parallel light output of external cavity laser；
Light power meter: the laser exported after collimation carries out optical power test, as final on-line debugging tunable optical devices
The reference of position and the outer collimator position of chamber；
Photosensitive card: for being observed to the hot spot that laser exports.
2. a kind of mid and far infrared external cavity laser debugging apparatus based on single point detector according to claim 1, feature
Be: the laser chip is that front end face plates anti-reflection film, rear end face not plated film, and mid and far infrared fluorescence is exported under normal temperature state
Wide range quanta cascade chip.
3. a kind of mid and far infrared external cavity laser debugging apparatus based on single point detector according to claim 1, feature
It is:
The tunable optical devices are balzed grating,；
The intracavitary collimator and the outer collimator of chamber are the lens for being coated with wide range laser chip spectral coverage optical anti-reflective film；
The single point detector is multistage Pa Reer patch refrigeration optical detector；
The light power meter is pyroelectricity light power meter；
The photosensitive card is the photosensitive card that laser facula is converted to visible waveband hot spot.
4. a kind of mid and far infrared external cavity laser adjustment method based on single point detector, it is characterised in that:
(1) laser chip and intracavitary collimator are tentatively installed；
(2) laser chip powers on generation fluorescence；
(3) using collimator in single point detector adjusting cavity, so that the fluorescent signals collimation of laser chip output；
(4) angle of diffraction is calculated according to grating equation, tentatively installation tunable optical devices；
(5) the outer collimator of preliminary installation cavity and light power meter；
(6) it is vertical with collimation fluorescence optical axis to make it for adjustment tunable optical devices, until having laser output, and light power meter registration
It is maximum；
(7) the outer collimator pitch position of adjustment chamber, until output laser power is maximum and parallel.
5. a kind of mid and far infrared external cavity laser adjustment method based on single point detector as claimed in claim 4, feature exist
In: the detailed process of the step (1) are as follows:
According to the focal length of intracavitary collimator, laser chip is tentatively installed on to the front focus of collimator.
6. a kind of mid and far infrared external cavity laser adjustment method based on single point detector as claimed in claim 4, feature exist
In: the detailed process of the step (3) are as follows:
Fluorescent signals collimation is carried out using single point detector, single point detector is respectively placed in the coaxial near field of fluorescence, far field
Position, in adjusting cavity before and after collimator, two-dimensional deflection direction, so that the single point detector intensity of scope response is coaxial close
Field, far-field position are consistent.
7. a kind of mid and far infrared external cavity laser adjustment method based on single point detector as claimed in claim 4, feature exist
In: the detailed process of the step (5) are as follows:
According to the focal length of collimator outside chamber, the outer collimator of installation cavity makes laser chip be located at the front focus of the outer collimator of chamber
Place；Light power meter is installed on outside chamber focal point after collimator.
8. a kind of mid and far infrared external cavity laser adjustment method based on single point detector as claimed in claim 4, feature exist
In: step (6) process are as follows:
The two-dimensional deflection direction of tunable optical devices is adjusted, while observing optical power, optical power shows there is laser in respect of registration
Output, is at this time finely adjusted the two-dimensional deflection direction of tunable optical devices, until light power meter registration is maximum.
9. a kind of mid and far infrared external cavity laser adjustment method based on single point detector as claimed in claim 4, feature exist
In: step (7) process are as follows:
The outer collimator front-rear position of chamber is finely tuned, when light power meter registration is maximum, stopping front-rear position being adjusted, and removes light power meter；
The outer collimator two-dimensional deflection direction of chamber is finely tuned, photosensitive card is respectively placed in Laser Near, far field coaxial position, it is ensured that hot spot position at two
In photosensitive card same position, i.e. laser is parallel.
10. a kind of mid and far infrared external cavity laser debugging apparatus based on single point detector as claimed in claim 2, feature exist
In:
The laser that the debugging apparatus is directed to is Littrow outside cavity gas laser.
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| CN113759350A (en) * | 2021-09-29 | 2021-12-07 | 宁波未感半导体科技有限公司 | Laser radar debugging device and method |
| CN115014725A (en) * | 2022-08-10 | 2022-09-06 | 武汉精立电子技术有限公司 | Optical measurement equipment, installation method and application method of display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113759350A (en) * | 2021-09-29 | 2021-12-07 | 宁波未感半导体科技有限公司 | Laser radar debugging device and method |
| CN113759350B (en) * | 2021-09-29 | 2023-10-27 | 宁波未感半导体科技有限公司 | Laser radar debugging device and debugging method |
| CN115014725A (en) * | 2022-08-10 | 2022-09-06 | 武汉精立电子技术有限公司 | Optical measurement equipment, installation method and application method of display device |
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