CN110373519A - A kind of preparation method of the stainless steel of high-hardness wear-resistant - Google Patents
A kind of preparation method of the stainless steel of high-hardness wear-resistant Download PDFInfo
- Publication number
- CN110373519A CN110373519A CN201910627542.4A CN201910627542A CN110373519A CN 110373519 A CN110373519 A CN 110373519A CN 201910627542 A CN201910627542 A CN 201910627542A CN 110373519 A CN110373519 A CN 110373519A
- Authority
- CN
- China
- Prior art keywords
- ion
- stainless steel
- arc
- film layer
- matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010935 stainless steel Substances 0.000 title claims abstract description 51
- 229910001220 stainless steel Inorganic materials 0.000 title claims abstract description 51
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 70
- 239000010936 titanium Substances 0.000 claims abstract description 51
- 239000011159 matrix material Substances 0.000 claims abstract description 48
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 35
- 238000007733 ion plating Methods 0.000 claims abstract description 29
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 21
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000000151 deposition Methods 0.000 claims abstract description 18
- 238000005468 ion implantation Methods 0.000 claims abstract description 18
- 238000005498 polishing Methods 0.000 claims abstract description 15
- 230000009977 dual effect Effects 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 9
- 229910052720 vanadium Inorganic materials 0.000 claims description 9
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 229910010037 TiAlN Inorganic materials 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000002513 implantation Methods 0.000 claims description 6
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 description 76
- 239000010408 film Substances 0.000 description 46
- 239000010410 layer Substances 0.000 description 16
- 239000002585 base Substances 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 13
- 239000002344 surface layer Substances 0.000 description 13
- 239000002253 acid Substances 0.000 description 11
- 239000012530 fluid Substances 0.000 description 11
- 239000010959 steel Substances 0.000 description 11
- 229910000997 High-speed steel Inorganic materials 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 10
- 239000003513 alkali Substances 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 7
- 238000000227 grinding Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 229910003460 diamond Inorganic materials 0.000 description 6
- 239000010432 diamond Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 230000003628 erosive effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000010791 quenching Methods 0.000 description 5
- 230000000171 quenching effect Effects 0.000 description 5
- 238000005496 tempering Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 238000002679 ablation Methods 0.000 description 4
- 238000010306 acid treatment Methods 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000005422 blasting Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 4
- 238000010849 ion bombardment Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 239000012046 mixed solvent Substances 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 238000007788 roughening Methods 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 239000008399 tap water Substances 0.000 description 4
- 235000020679 tap water Nutrition 0.000 description 4
- 238000007545 Vickers hardness test Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- QFUKUPZJJSMEGE-UHFFFAOYSA-N 5-(hydroxymethyl)-1-(3-methylbutyl)pyrrole-2-carbaldehyde Chemical compound CC(C)CCN1C(CO)=CC=C1C=O QFUKUPZJJSMEGE-UHFFFAOYSA-N 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007542 hardness measurement Methods 0.000 description 1
- 238000001239 high-resolution electron microscopy Methods 0.000 description 1
- 238000000024 high-resolution transmission electron micrograph Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/18—Hardening; Quenching with or without subsequent tempering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/08—Iron or steel
- C23G1/088—Iron or steel solutions containing organic acids
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/19—Iron or steel
Abstract
The present invention provides a kind of preparation method of the stainless steel of high-hardness wear-resistant, its step specifically includes: being machined, is heat-treated to matrix first, polished and polishing treatment, then it cleaned, dried, the ion implanting of titanium and nitrogen dual element is carried out using ion implantation, then the depositing Ti AlN film layer in multi-Arc Ion Plating, then VN film layer is deposited in multi-Arc Ion Plating.The stainless steel that the present invention prepares hardness with higher, good machinability, electric conductivity, thermal conductivity etc., while the functional complete, high yield rate of the method for the present invention condition controllable precise, stainless steel watch finishing coat.
Description
Technical field
The present invention relates to a kind of technical field of alloy steel, and in particular to a kind of stainless steel of high-hardness wear-resistant.
Background technique
Stainless steel refers to the steel of the chemical etchings dielectric corrosions such as the weak corrosive medium such as resistance to air, steam, water and acid, alkali, salt,
Also known as stainless acid resistant steel.In practical application, often the steel by resistance to weak corrosive medium corrosion is known as stainless steel, and resistant to chemical media is rotten
The steel of erosion is known as acid resisting steel.Due to difference of the two in chemical component, not necessarily resistant to chemical media corrodes for the former, and the latter is then
Generally there is rustless property.The corrosion resistance of stainless steel depends on alloying element contained in steel.
In modern society, stainless steel has extremely extensive purposes, it not only can be applied in household products, but also can be used for
In industrial production.As people are more and more widely used stainless steel, properties are also gradually increased.But current existing skill
In art, still not publicly realized for the high-temperature machinery of representative, requirement from room temperature for some such as all kinds of high-performance aeroengines
To continuously running as the stainless steel in the high tech equipments fields such as the geological drilling field of representative for high temperature because its hardness with it is wear-resisting
The requirement of high-strength working is not achieved in performance.Therefore, prepare that a kind of hardness is high, fusing point is high, stability is good, coefficient of friction is low not
Rust steel will be an important technological means in industrial production from now on.
By the patent of 104520472 A of application publication number CN it is found that TiAlN has high hardness, height as coating
Elasticity modulus；By the patent of 103726014 A of application publication number CN it is found that VN is as coating, mill high with abrasive resistance
The inefficient fruit of loss rate.But due to low etc. in the presence of very big internal stress, adhesiveness between TiAlN and VN combination painting interlayer, coating and matrix
Problem, the problem of layering occurs so as to cause film, peels off and fails；So still not publicly being combined at present using TiAlN and VN
Composite coating, make stainless steel surface that there is the characteristic of high rigidity, self-lubricating (i.e. abrasive resistance high).
Summary of the invention
For the above technical problem, it is an object of that present invention to provide a kind of preparation sides of the stainless steel of high-hardness wear-resistant
Method, the stainless steel hardness prepared is high, fusing point is high, stability is good, coefficient of friction is low, is applicable to aero-engine, geology
Drill contour strength fields.
The object of the invention is achieved through the following technical solutions:
A kind of preparation method of the stainless steel of high-hardness wear-resistant, selection stainless steel are basis material, which is characterized in that it
Through the following steps that carrying out: being machined, be heat-treated to matrix first, polished and polishing treatment, then carried out clear
It washes, dry, the ion implanting of titanium and nitrogen dual element is carried out using ion implantation, is then deposited in multi-Arc Ion Plating
TiAlN film layer, then VN film layer is deposited in multi-Arc Ion Plating.
The stainless steel that high-hardness wear-resistant is prepared using above-mentioned steps is effectively reduced the internal stress of film and matrix, mentioned
High binding force between film and matrix avoids film that layering occurs, peels off and the problems such as failure, guarantee prepares high hardness wear-resisting
The yield rate of the stainless steel of damage.
Further, above-mentioned heat treatment need to carry out 1240 DEG C of high temperature quenchings and three times 560 DEG C of high temperings；The polishing exists
It is carried out on grinding machine, successively uses 800#, 1000#, 1500# liquid honing；The polishing treatment carries out on polishing machine, uses grain
The diamond that diameter is 0.1 μm is as polishing agent.
Further, above-mentioned cleaning uses Acid-Base treatment fluid, first carries out alkali process, then carry out sour processing.
In using the preprocessing process before ion implanting, if matrix surface there are scratch or matrix hardness are lower, carries out
Acid-Base treatment fluid processing when, Acid-Base treatment fluid can react with matrix surface, thus influence subsequent ion injection and it is thin
Film deposition.Using step combination of the invention and treatment process, ensure matrix surface in the case where guaranteeing matrix hardness
Smooth degree guarantees after pretreatment that ion implanting and film deposit and goes on smoothly, so that it is guaranteed that prepare film condition controllable precise,
Film is fully functional.
Further, above-mentioned ion implantation uses metal vapor vacuum arc (Metal Vapor Vacuum Arc, MEVVA)
Ion implantation apparatus；Above-mentioned ion implantation be using high purity titanium as target and be passed through nitrogen progress titanium and nitrogen dual element ion
Injection.
Further, the energy of above-mentioned ion implantation Ti ion are as follows: the projected range Rp and range of 45-50keV, Ti ion
Straggling is 45.1,16.5nm, and the implantation dosage of Ti ion is fixed are as follows: 1.0 × 1017-1.5×1017ions/cm2；N ion implanting
Parameter are as follows: vacuum chamber background vacuum 1.0x10-3Pa, N20.6-0.9Pa is divided, applies the inclined of -2.5~-2.0kV on matrix
Pressure, frequency 16-20kHz, N ion implanting time are 2.5-3.5h；It injects during Ti ion, incident ion is stainless with substrate
Steel surface keeps 90 ° of angles, and beam intensity is controlled in 4.0-4.5A/cm2, increased to avoid temperature caused by ion implantation process
Effect；It injects during N ion, N ion vertical incidence.
When using ion implantation, due to ion motion trace unstability and ion incidence matrix surface when generate
Impact, cause ion implanting matrix to there is the technical problem reunited, when preparing plural layers so as to cause subsequent step
Failure or it is uneven, preparation yield rate is not high, while also will affect the binding force of matrix Yu each layer film；Using place of the invention
Science and engineering skill and step combination, it is ensured that dispersibility and uniformity when ion implanting, it is ensured that subsequent step is gone on smoothly, and is guaranteed
Bond strength between the uniformity of film, yield rate and matrix and film.
Further, above-mentioned multi-Arc Ion Plating uses WH-800 type multi-Arc Ion Plating, main coating process
Parameter is depositing temperature: 450-500 DEG C, nitrogen partial pressure: and 0.8-1.0Pa, flow: 80sccm, arc current: 80-90A, negative voltage :-
220~-180V, vacuum degree: 4 × 10-3Pa, plated film time: 60-80min.
Further, the above-mentioned depositing Ti AlN film layer in multi-Arc Ion Plating is using high purity titanium and rafifinal as target,
And it is passed through nitrogen；VN film layer is deposited in multi-Arc Ion Plating using high purity vanadium as target, and is passed through nitrogen.
Further, TiAlN film layer obtained above is 110nm-130nm；VN film layer is 120nm-140nm.
A kind of stainless steel of high-hardness wear-resistant and preparation method thereof, which is characterized in that it is through the following steps that carry out:
A, it selects stainless steel as basis material, machining appropriate is carried out to basis material, becomes and meets work
Industry uses the tool or mold shape of standard；Then matrix is carried out carrying out 1240 DEG C of high temperature quenchings and three times 560 DEG C of high temperature
The heat treatment of tempering is successively polished with 800#, 1000#, 1500# waterproof abrasive paper on grinding machine, the gold for the use of partial size being 0.1 μm
Hard rock is processed by shot blasting on polishing machine as polishing agent；
B, the mixed solvents such as tap water, alcohol, Acid-Base treatment fluid, high purity water-are successively carried out to tool or die matrix
The cleaning of the multisteps such as ultrasonic wave, acetone-ultrasonic wave and pretreatment, then dry, spare；Wherein soda acid treatment fluid is respectively HF+HN
O3+ HAC (molar ratio 1: 1: 1) mixed acid and K3(Fe(CN)6)+KOH (mass ratio 1: 1) mixed ammonium/alkali solutions, and first carry out alkali process
Surface roughening is carried out to basis material, then carries out the impurity that acid processing removes matrix surface；
C, the matrix after pretreatment and cleaning is put into the flood chamber of ion implantation apparatus, flood chamber is first evacuated to vacuum shape
State using titanium target and injects nitrogen and carries out titanium and nitrogen dual element using injecting 3~10min of element target needed for argon purge
Ion implanting processing；Wherein, the energy of Ti ion are as follows: the projected range Rp and range straggling of 45-50keV, Ti ion be 45.1,
The implantation dosage of 16.5nm, Ti ion is fixed are as follows: 1.0 × 1017-1.5×1017ions/cm2；N ion implanting parameter are as follows: vacuum
Room background vacuum 1.0x10-3Pa, N20.6-0.9Pa is divided, applies the bias of -2.5~-2.0kV on matrix, frequency is
16-20kHz, N the ion implanting time are 2.5-3.5h；It injects during Ti ion, incident ion and substrate stainless steel surface are protected
90 ° of angles are held, beam intensity is controlled in 4.0-4.5A/cm2, effect is increased to avoid temperature caused by ion implantation process；Note
During entering N ion, N ion vertical incidence；
D, the matrix after injection ion is put into multi-Arc Ion Plating, first with Nitrogen ion Bombardment and cleaning adsorption
Impurity recycles titanium, aluminium as target, and arc erosion generates N3-、Al3+、Ti2+Ion, these ions act in back bias voltage
Product obtains certain thickness film as high rigidity surface layer；Wherein, using WH-800 type multi-Arc Ion Plating, coating process ginseng
Number is depositing temperature: 450-500 DEG C, nitrogen partial pressure: 0.8-1.0Pa, flow: 80sccm, arc current: 80-90A, negative voltage: -220
~-180V, vacuum degree: 4 × 10-3Pa, plated film time: 60-80min；
E, the matrix for having high rigidity surface layer is put into multi-Arc Ion Plating, is passed through nitrogen, is target, electric arc using vanadium
Ablation generates N3-、V3+, these ions back bias voltage effect under deposition obtain certain thickness film as self-lubricating surface layer；Its
In, using WH-800 type multi-Arc Ion Plating, coating process parameter is depositing temperature: 450-500 DEG C, nitrogen partial pressure: 0.8-
1.0Pa, flow: 80sccm, arc current: 80-90A, negative voltage: -220~-180V, vacuum degree: 4 × 10-3Pa, plated film time:
60-80min。
The present invention has the following technical effect that:
The present invention provides a kind of preparation method of the stainless steel of high-hardness wear-resistant so that the stainless steel prepared have compared with
High hardness, good machinability, electric conductivity, thermal conductivity etc.；It is but also with ceramic characteristics, such as higher springform simultaneously
Amount, good corrosion resistance and high temperature oxidation resistance etc..Meanwhile the stainless steel of high-hardness wear-resistant is prepared using this method,
The functional complete, high yield rate of condition controllable precise, stainless steel watch finishing coat, solves its hardness as caused by coating film treatment
Elasticity modulus reduces, rub secondary lubrication under different condition；Also solve the problems, such as that ion is reunited when ion implanting, it is ensured that thin
Bond strength between the uniformity and matrix and film of film.
Detailed description of the invention
Fig. 1 is stainless steel surface cross-sectional view obtained in the embodiment of the present invention 1.
Fig. 2 is the shape appearance figure of stainless steel and SiC ball opposite grinding obtained in the embodiment of the present invention 2.
Fig. 3 is the impression figure of stainless steel binding force test obtained in the embodiment of the present invention 3.
Fig. 4 is the scratch figure of stainless steel binding force test obtained in the embodiment of the present invention 3.
Wherein, figure (a) is scratch exterior view, and figure (b) is electron microscope.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical solution in the embodiment of the present invention is explicitly described, it is clear that described embodiment is the present invention
A part of the embodiment, instead of all the embodiments.
Embodiment 1
A kind of preparation method of the stainless steel of high-hardness wear-resistant, selection grade of steel are Cr25Mo3Ti, having a size of 60x60mm's
Stainless steel is basis material, it is characterised in that:
It a, is Cr to grade of steel25Mo3Ti, the stainless steel base material having a size of 60x60mm carry out machining appropriate, make
It becomes the tool or mold shape for meeting industrial application standard；Then matrix is carried out carrying out 1240 DEG C of high temperature quenchings and three
The heat treatment of secondary 560 DEG C of high temperings, is successively polished with 800#, 1000#, 1500# waterproof abrasive paper on grinding machine, uses partial size
Diamond for 0.1 μm is processed by shot blasting on polishing machine as polishing agent；
B, the mixed solvents such as tap water, alcohol, Acid-Base treatment fluid, high purity water-are successively carried out to tool or die matrix
The cleaning of the multisteps such as ultrasonic wave, acetone-ultrasonic wave and pretreatment, then dry, spare；Wherein soda acid treatment fluid is respectively HF+HN
O3+ HAC (molar ratio 1: 1: 1) mixed acid and K3(Fe(CN)6)+KOH (mass ratio 1: 1) mixed ammonium/alkali solutions, and first carry out alkali process
Surface roughening is carried out to basis material, then carries out the impurity that acid processing removes matrix surface；
C, the matrix after pretreatment and cleaning is put into the flood chamber of ion implantation apparatus, flood chamber is first evacuated to vacuum shape
State using titanium target and injects nitrogen and carries out titanium and nitrogen dual element using injecting 3~10min of element target needed for argon purge
Ion implanting processing；Wherein, the energy of Ti ion are as follows: the projected range Rp and range straggling of 45ke V, Ti ion be 45.1,
The implantation dosage of 16.5nm, Ti ion is fixed are as follows: 1.0 × 1017ions/cm2；N ion implanting parameter are as follows: vacuum chamber base vacuum
Spend 1.0x10-3Pa, N20.6Pa is divided, the bias of application -2.0kV on matrix, frequency 16kHz, N the ion implanting time is
2.5h；It injects during Ti ion, incident ion and substrate stainless steel surface keep 90 ° of angles, and beam intensity is controlled in 4.0A/
cm2, effect is increased to avoid temperature caused by ion implantation process；It injects during N ion, N ion vertical incidence；
D, the matrix after injection ion is put into multi-Arc Ion Plating, first with Nitrogen ion Bombardment and cleaning adsorption
Impurity recycles titanium, aluminium as target, and arc erosion generates N3-、Al3+、Ti2+Ion, these ions act in back bias voltage
Product obtains the film with a thickness of 110nm as high rigidity surface layer；Wherein, using WH-800 type multi-Arc Ion Plating, plated film work
Skill parameter is depositing temperature: 450 DEG C, nitrogen partial pressure: 0.8Pa, flow: 80sccm, arc current: 80A, negative voltage: -180V, vacuum
Degree: 4 × 10-3Pa, plated film time: 60min；
E, the matrix for having high rigidity surface layer is put into multi-Arc Ion Plating, is passed through nitrogen, is target, electric arc using vanadium
Ablation generates N3-、V3+, these ions back bias voltage effect under deposition obtain the film with a thickness of 120nm as self-lubricating surface layer；
Wherein, using WH-800 type multi-Arc Ion Plating, coating process parameter is depositing temperature: 450 DEG C, nitrogen partial pressure: 0.8Pa, stream
Amount: 80sccm, arc current: 80A, negative voltage: -180V, vacuum degree: 4 × 10-3Pa, plated film time: 60min.
Embodiment 2
A kind of preparation method of the stainless steel of high-hardness wear-resistant, selection grade of steel are Cr17Mo2Ti, having a size of 80x80mm's
Stainless steel is basis material, it is characterised in that:
It a, is Cr to matrix number17Mo2Ti, the stainless steel material having a size of 80x80mm carry out machining appropriate, make it
As the tool or mold shape for meeting industrial application standard；Then carry out 1240 DEG C of high temperature quenching and three times to matrix
The heat treatment of 560 DEG C of high temperings, is successively polished with 800#, 1000#, 1500# waterproof abrasive paper on grinding machine, is using partial size
0.1 μm of diamond is processed by shot blasting on polishing machine as polishing agent；
B, the mixed solvents such as tap water, alcohol, Acid-Base treatment fluid, high purity water-are successively carried out to tool or die matrix
The cleaning of the multisteps such as ultrasonic wave, acetone-ultrasonic wave and pretreatment, then dry, spare；Wherein soda acid treatment fluid is respectively HF+HN
O3+ HAC (molar ratio 1: 1: 1) mixed acid and K3(Fe(CN)6)+KOH (mass ratio 1: 1) mixed ammonium/alkali solutions, and first carry out alkali process
Surface roughening is carried out to basis material, then carries out the impurity that acid processing removes matrix surface；
C, the matrix after pretreatment and cleaning is put into the flood chamber of ion implantation apparatus, flood chamber is first evacuated to vacuum shape
State using titanium target and injects nitrogen and carries out titanium and nitrogen dual element using injecting 3~10min of element target needed for argon purge
Ion implanting processing；Wherein, the energy of Ti ion are as follows: the projected range Rp and range straggling of 47ke V, Ti ion be 45.1,
The implantation dosage of 16.5nm, Ti ion is fixed are as follows: 1.2 × 1017ions/cm2；N ion implanting parameter are as follows: vacuum chamber base vacuum
Spend 1.0x10-3Pa, N20.75Pa is divided, the bias of application -2.2kV on matrix, frequency 18kHz, N the ion implanting time is
3.0h；It injects during Ti ion, incident ion and substrate stainless steel surface keep 90 ° of angles, and beam intensity is controlled in 4.2A/
cm2, effect is increased to avoid temperature caused by ion implantation process；It injects during N ion, N ion vertical incidence；
D, the matrix after injection ion is put into multi-Arc Ion Plating, first with Nitrogen ion Bombardment and cleaning adsorption
Impurity recycles titanium, aluminium as target, and arc erosion generates N3-、Al3+、Ti2+Ion, these ions act in back bias voltage
Product obtains the film with a thickness of 120nm as high rigidity surface layer；Wherein, using WH-800 type multi-Arc Ion Plating, plated film work
Skill parameter is depositing temperature: 475 DEG C, nitrogen partial pressure: 0.9Pa, flow: 80sccm, arc current: 85A, negative voltage: -200V, vacuum
Degree: 4 × 10-3Pa, plated film time: 70min；
E, the matrix for having high rigidity surface layer is put into multi-Arc Ion Plating, is passed through nitrogen, is target, electric arc using vanadium
Ablation generates N3-、V3+, these ions back bias voltage effect under deposition obtain the film with a thickness of 130nm as self-lubricating surface layer；
Wherein, using WH-800 type multi-Arc Ion Plating, coating process parameter is depositing temperature: 475 DEG C, nitrogen partial pressure: 0.9Pa, stream
Amount: 80sccm, arc current: 85A, negative voltage: -200V, vacuum degree: 4 × 10-3Pa, plated film time: 70min.
Embodiment 3
A kind of preparation method of the stainless steel of high-hardness wear-resistant, the selection trade mark are 0Cr19Ni9, having a size of 60x70mm's
Stainless steel is basis material, it is characterised in that:
It a, is 0Cr to the trade mark19Ni9, stainless steel base material having a size of 60x70mm carry out machining appropriate, make
It becomes the tool or mold shape for meeting industrial application standard；Then matrix is carried out carrying out 1240 DEG C of high temperature quenchings and three
The heat treatment of secondary 560 DEG C of high temperings, is successively polished with 800#, 1000#, 1500# waterproof abrasive paper on grinding machine, uses partial size
Diamond for 0.1 μm is processed by shot blasting on polishing machine as polishing agent；
B, the mixed solvents such as tap water, alcohol, Acid-Base treatment fluid, high purity water-are successively carried out to tool or die matrix
The cleaning of the multisteps such as ultrasonic wave, acetone-ultrasonic wave and pretreatment, then dry, spare；Wherein soda acid treatment fluid is respectively HF+HN
O3+ HAC (molar ratio 1: 1: 1) mixed acid and K3(Fe(CN)6)+KOH (mass ratio 1: 1) mixed ammonium/alkali solutions, and first carry out alkali process
Surface roughening is carried out to basis material, then carries out the impurity that acid processing removes matrix surface；
C, the matrix after pretreatment and cleaning is put into the flood chamber of ion implantation apparatus, flood chamber is first evacuated to vacuum shape
State using titanium target and injects nitrogen and carries out titanium and nitrogen dual element using injecting 3~10min of element target needed for argon purge
Ion implanting processing；Wherein, the energy of Ti ion are as follows: the projected range Rp and range straggling of 50ke V, Ti ion be 45.1,
The implantation dosage of 16.5nm, Ti ion is fixed are as follows: 1.5 × 1017ions/cm2；N ion implanting parameter are as follows: vacuum chamber base vacuum
Spend 1.0x10-3Pa, N20.9Pa is divided, the bias of application -2.5kV on matrix, frequency 20kHz, N the ion implanting time is
3.5h；It injects during Ti ion, incident ion and substrate stainless steel surface keep 90 ° of angles, and beam intensity is controlled in 4.5A/
cm2, effect is increased to avoid temperature caused by ion implantation process；It injects during N ion, N ion vertical incidence；
D, the matrix after injection ion is put into multi-Arc Ion Plating, first with Nitrogen ion Bombardment and cleaning adsorption
Impurity recycles titanium, aluminium as target, and arc erosion generates N3-、Al3+、Ti2+Ion, these ions act in back bias voltage
Product obtains the film with a thickness of 130nm as high rigidity surface layer；Wherein, using WH-800 type multi-Arc Ion Plating, plated film work
Skill parameter is depositing temperature: 500 DEG C, nitrogen partial pressure: 1.0Pa, flow: 80sccm, arc current: 90A, negative voltage: -220V, vacuum
Degree: 4 × 10-3Pa, plated film time: 80min；
E, the matrix for having high rigidity surface layer is put into multi-Arc Ion Plating, is passed through nitrogen, is target, electric arc using vanadium
Ablation generates N3-、V3+, these ions back bias voltage effect under deposition obtain the film with a thickness of 140nm as self-lubricating surface layer；
Wherein, using WH-800 type multi-Arc Ion Plating, coating process parameter is depositing temperature: 500 DEG C, nitrogen partial pressure: 1.0Pa, stream
Amount: 80sccm, arc current: 90A, negative voltage: -220V, vacuum degree: 4 × 10-3Pa, plated film time: 80min.
Stainless steel obtained by embodiment 1-3 carries out micro-hardness testing, hard using DUH-211S Shimadzu dynamic submicroscopic
Degree meter, pressure head are diamond micro Vickers pressure head, test load 10mN, maximum load retention time 5sec.Test result shows,
The microhardness value of stainless steel is in 38-42GPa.
Fig. 1 is the cross-sectional view of high speed steel obtained in embodiment 1, as shown in Figure 1, prepared by the present invention hard
Anti abrasive high-speed steel is spent, clear layer between surface layers, uniformly, each layer has the function of more complete.
Fig. 2 is the shape appearance figure of high speed steel and SiC ball opposite grinding obtained by embodiment 2, wherein load 3N, angle of rotation
Speed is 95.49rmp, abrasion radius is 3.00mm, 50,000 turns of abrasion；Surface of high speed steel after experiment is without significant change, micro-
The specific pattern of microscopic observation high-speed steel, as shown in Figure 2, surface of high speed steel is small by friction area, friction depth is shallow, it was demonstrated that high rigidity
Anti abrasive high-speed steel shows good wear-resistant and wear-resisting property in an experiment, to prove that its self-lubricating effect is good.
Film substrate bond strength can qualitative or be semi-quantitatively evaluated by vickers indentation.This experiment is for made in embodiment 3
High speed steel, use Vickers indentation method apex angle for the tapered pressure head of 136 diamond, indentation test adopt the load of 3N into
Row test.As seen from Figure 3, the high-speed steel after test integrally observe almost without crackle, only indentation edge have it is very slight
Crackle does not occur any film separation phenomenon, shows preferable film-substrate cohesion.
Scratch experiment method be it is a kind of be widely used in measure ganoine thin film-basal body interface bond strength method of inspection.This
Experiment uses pressure head for Ф 2 (mm) ball of GCr15 material for high speed steel obtained in embodiment 3, scratch experiment,
Load is gradually increased to 100N by 0N, and scratch uses continuous loading method.Found out by Fig. 4 (a), it is whole in load 100N clearing end
It is not peeled off during a load swiping, the scratch due to being plastically deformed generation on a small quantity only occurs, what film still maintained
Extremely complete, this illustrates that film has excellent toughness and plasticity_resistant deformation ability, and plural layers have good intrinsic combination strong
Degree and film-substrate cohesion.
Fig. 4 (b) is resulting HRTEM image, as can be seen that the area different in two layers of contrast from high resolution electron microscopy photo
There is one layer of mixed zone between domain, brightness differentiation is unobvious, and it is very fuzzy, form apparent transitional region.The presence of transition region, can
Effectively to enhance the binding characteristic between film layer.
Comprehensive Vickers indentation and scratch experiment as a result, bonding state has obtained a degree of change between film and matrix
It is kind.It is multiple with dual extension-compression modulus layer formed composite constructions can Stopping cross section microcrack initiation, and then play improve film base
The effect of binding force and the overall flexibility of plural layers.
Claims (5)
1. a kind of preparation method of the stainless steel of high-hardness wear-resistant, selection stainless steel is basis material, which is characterized in that it is
It is carried out by following steps: matrix being machined first, is heat-treated, is polished and polishing treatment, then cleaned,
It dries, the ion implanting of titanium and nitrogen dual element is carried out using ion implantation, then the depositing Ti AlN in multi-Arc Ion Plating
Film layer, then VN film layer is deposited in multi-Arc Ion Plating.
2. a kind of preparation method of the stainless steel of high-hardness wear-resistant according to claim 1, it is characterised in that: the ion
The energy of injection method Ti ion are as follows: the projected range Rp and range straggling of 45-50keV, Ti ion be 45.1,16.5nm, Ti from
The implantation dosage of son is fixed are as follows: 1.0 × 1017-1.5×1017ions/cm2；N ion implanting parameter are as follows: vacuum chamber background vacuum
1.0x10-3Pa, N20.6-0.9Pa is divided, applies the bias of -2.5~-2.0kV, frequency 16-20kHz, N ion on matrix
Injection length is 2.5-3.5h；It injects during Ti ion, incident ion and substrate stainless steel surface keep 90 ° of angles, line
Strength control is in 4.0-4.5A/cm2, effect is increased to avoid temperature caused by ion implantation process；It injects during N ion, N
Ion vertical incidence.
3. a kind of preparation method of the stainless steel of high-hardness wear-resistant according to claim 2, it is characterised in that: the multi sphere
Ion plating equipment uses WH-800 type multi-Arc Ion Plating, and main coating process parameter is depositing temperature: 450-500
DEG C, nitrogen partial pressure: 0.8-1.0Pa, flow: 80sccm, arc current: 80-90A, negative voltage: -220~-180V, vacuum degree: 4 ×
10-3Pa, plated film time: 60-80min.
4. a kind of preparation method of the stainless steel of high-hardness wear-resistant according to claim 3, it is characterised in that: described more
Depositing Ti AlN film layer is using high purity titanium and rafifinal as target in arc ion plating equipment, and is passed through nitrogen；In multi-arc ion coating
VN film layer is deposited in film machine using high purity vanadium as target, and is passed through nitrogen.
5. a kind of preparation method of the stainless steel of high-hardness wear-resistant according to claim 4, it is characterised in that: the above-mentioned system of institute
The TiAlN film layer obtained is 110nm-130nm；VN film layer is 120nm-140nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910627542.4A CN110373519B (en) | 2019-07-12 | 2019-07-12 | Preparation method of high-hardness wear-resistant stainless steel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910627542.4A CN110373519B (en) | 2019-07-12 | 2019-07-12 | Preparation method of high-hardness wear-resistant stainless steel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110373519A true CN110373519A (en) | 2019-10-25 |
| CN110373519B CN110373519B (en) | 2021-03-16 |
Family
ID=68252891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910627542.4A Active CN110373519B (en) | 2019-07-12 | 2019-07-12 | Preparation method of high-hardness wear-resistant stainless steel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110373519B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110791735A (en) * | 2019-12-06 | 2020-02-14 | 重庆文理学院 | Method for improving high-temperature wear performance of titanium alloy workpiece |
| CN114892128A (en) * | 2022-05-13 | 2022-08-12 | 安徽信息工程学院 | Stainless coating structure for steel and preparation method thereof |
| CN114959570A (en) * | 2022-05-07 | 2022-08-30 | 安徽信息工程学院 | Hard film for steel and preparation method thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58181863A (en) * | 1982-04-14 | 1983-10-24 | Sumitomo Electric Ind Ltd | Surface treatment method |
| CN1272510A (en) * | 2000-05-26 | 2000-11-08 | 清华大学 | Ion implantation surface modification method of high abrasion performance engineering plastics |
| EP1387082A2 (en) * | 2002-07-30 | 2004-02-04 | Robert Bosch Gmbh | Component of an internal combustion engine with a tribological exposed element |
| CN101187009A (en) * | 2007-11-30 | 2008-05-28 | 洛阳轴研科技股份有限公司 | GCr15 bearing steel ball surface intensified ion injection technology |
| KR20100079560A (en) * | 2008-12-31 | 2010-07-08 | 주식회사 동부하이텍 | Semiconductor device and method for manufacturing the same |
| CN102534514A (en) * | 2012-02-03 | 2012-07-04 | 长春工业大学 | Method for plating films of multi-arc ion plating |
| CN103658790A (en) * | 2012-09-21 | 2014-03-26 | 无锡慧明电子科技有限公司 | Novel high-speed steel milling cutter plated with ultrahard coating layer |
| CN103898469A (en) * | 2012-12-26 | 2014-07-02 | 核工业西南物理研究院 | Method for interface-less strengthening treatment on material surface under conditions of low temperature and high load |
| CN108517487A (en) * | 2018-03-26 | 2018-09-11 | 华南理工大学 | A kind of TiAlN/W of high rigidity and high abrasion2N laminated coatings and preparation method thereof |
-
2019
- 2019-07-12 CN CN201910627542.4A patent/CN110373519B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58181863A (en) * | 1982-04-14 | 1983-10-24 | Sumitomo Electric Ind Ltd | Surface treatment method |
| CN1272510A (en) * | 2000-05-26 | 2000-11-08 | 清华大学 | Ion implantation surface modification method of high abrasion performance engineering plastics |
| EP1387082A2 (en) * | 2002-07-30 | 2004-02-04 | Robert Bosch Gmbh | Component of an internal combustion engine with a tribological exposed element |
| CN101187009A (en) * | 2007-11-30 | 2008-05-28 | 洛阳轴研科技股份有限公司 | GCr15 bearing steel ball surface intensified ion injection technology |
| KR20100079560A (en) * | 2008-12-31 | 2010-07-08 | 주식회사 동부하이텍 | Semiconductor device and method for manufacturing the same |
| CN102534514A (en) * | 2012-02-03 | 2012-07-04 | 长春工业大学 | Method for plating films of multi-arc ion plating |
| CN103658790A (en) * | 2012-09-21 | 2014-03-26 | 无锡慧明电子科技有限公司 | Novel high-speed steel milling cutter plated with ultrahard coating layer |
| CN103898469A (en) * | 2012-12-26 | 2014-07-02 | 核工业西南物理研究院 | Method for interface-less strengthening treatment on material surface under conditions of low temperature and high load |
| CN108517487A (en) * | 2018-03-26 | 2018-09-11 | 华南理工大学 | A kind of TiAlN/W of high rigidity and high abrasion2N laminated coatings and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| D.BLEWIS ETC: ""The effect of (Ti+Al):V ratio on the structure and oxidation behaviour of TiAlN/VN nano-scale multilayer coatings"，D.BLewis etc，《Surface and Coatings Technology》，Volumes 177–178，30 January 2004，Pages 252-259", 《SURFACE AND COATINGS TECHNOLOGY》 * |
| 田修波 等: ""利用MEVVA源的离子混合形成氮化钛薄膜"，田修波 等，《机械工程师》，1999年12期，第3-5页", 《机械工程师》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110791735A (en) * | 2019-12-06 | 2020-02-14 | 重庆文理学院 | Method for improving high-temperature wear performance of titanium alloy workpiece |
| CN114959570A (en) * | 2022-05-07 | 2022-08-30 | 安徽信息工程学院 | Hard film for steel and preparation method thereof |
| CN114892128A (en) * | 2022-05-13 | 2022-08-12 | 安徽信息工程学院 | Stainless coating structure for steel and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110373519B (en) | 2021-03-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110373519A (en) | A kind of preparation method of the stainless steel of high-hardness wear-resistant | |
| Zhang et al. | Improving dry machining performance of TiAlN hard-coated tools through combined technology of femtosecond laser-textures and WS2 soft-coatings | |
| JP2018521862A (en) | Tool with multilayer arc PVD coating | |
| JP6525310B2 (en) | Coated tools | |
| CN108118301B (en) | AlCrSiN coating with intermediate layer with gradient change of Si content and preparation method | |
| JP2020537048A (en) | AlCrSiN coating that changes the gradient of Si content and crystal size of ion source reinforcement | |
| CN104694893A (en) | Carbon-based antifriction wear resistant coat and production method thereof | |
| KR20200019199A (en) | Sheath cutting tool | |
| CN109023365A (en) | A kind of lip type oil sealing rotary shaft wear resistant friction reducing composite coating and preparation method thereof | |
| Kumar et al. | Characterization of HiPIMS and DCMS deposited TiAlN coatings and machining performance evaluation in high speed dry machining of low and high carbon steel | |
| CN102918183A (en) | PVD coating for metal machining | |
| CN111500973A (en) | Manufacturing method for modifying surface of austenitic stainless steel | |
| CN110205579A (en) | A kind of plasma spraying rewind roll and preparation method thereof | |
| JP6034579B2 (en) | Durable coated tool | |
| Tillmann et al. | Influence of PVD-duplex-treated, bionic surface structures on the wetting behavior for sheet-bulk metal forming tools | |
| JP5765627B2 (en) | Coated tool having excellent durability and method for producing the same | |
| CN110373637A (en) | A kind of high speed steel and preparation method thereof | |
| CN109182983A (en) | A method of TiAlSiN coating is prepared for carbide rotary tool surface | |
| CN103938157B (en) | A kind of ZrNbAlN superlattice coating and preparation method | |
| CN110344005A (en) | A kind of micro- stack TiN-TiAlSiN of TA15 titanium alloy surface high-temperature wearable and the preparation method and application thereof | |
| CN106191790A (en) | The preparation method of wear-resistant coating | |
| CN111549322B (en) | AlCrTiSiN/AlCrTiSiON multilayer composite coating and preparation process thereof | |
| JP3654918B2 (en) | Sliding material | |
| CN114150269B (en) | Cutting tool coating and method of making the same | |
| Yao et al. | Fretting fatigue life improvement of nickel-based superalloy GH4169 dovetail slots by deflecting abrasive waterjet peening process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231101 Address after: 518000 1104, Building A, Zhiyun Industrial Park, No. 13, Huaxing Road, Henglang Community, Longhua District, Shenzhen, Guangdong Province Patentee after: Shenzhen Hongyue Information Technology Co.,Ltd. Address before: 402160 Shuangzhu Town, Yongchuan District, Chongqing Patentee before: CHONGQING University OF ARTS AND SCIENCES |
|
| TR01 | Transfer of patent right |