CN110361104A - A kind of method and its caliberating device using crystal thermometric - Google Patents

A kind of method and its caliberating device using crystal thermometric Download PDF

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Publication number
CN110361104A
CN110361104A CN201810317633.3A CN201810317633A CN110361104A CN 110361104 A CN110361104 A CN 110361104A CN 201810317633 A CN201810317633 A CN 201810317633A CN 110361104 A CN110361104 A CN 110361104A
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crystal
thermometric
temperature
lattice
sample
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雷蒋
武俊梅
张科
李欣虎
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Xian Jiaotong University
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Xian Jiaotong University
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Priority to CN201810317633.3A priority Critical patent/CN110361104A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00Testing or calibrating of thermometers
    • G01K15/007Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00Measuring temperature based on the expansion or contraction of a material
    • G01K5/48Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/486Measuring temperature based on the expansion or contraction of a material the material being a solid using microstructures, e.g. made of silicon
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

The present invention relates to a kind of method using crystal thermometric and the caliberating devices of crystal temperature effect, this method comprises: being made annealing treatment to sample crystal to obtain standard calibration curve;It is provided with thermometric crystal in test system, fire trial is carried out to test system, obtains the temperature rise curve of thermometric crystal, and obtains the temperature hold-time of the thermometric crystal according to the temperature rise curve;Obtain the lattice percentage of elongation of the thermometric crystal;The temperature of the test system is determined according to the lattice percentage of elongation of the standard calibration curve, the temperature hold-time and the thermometric crystal.Present invention utilizes crystal after receiving high-intensitive neutron irradiation, microstructure in a big way can changed characteristic, by carrying out heating anneal processing after irradiation to this crystalloid, so that the spacing of lattice of crystal is restored to the initial value of predose;And the recovery extent of crystal lattices spacing is directly related with annealing temperature and annealing time, and the test of its highest or operating temperature are obtained during fire trial to the thrust chamber of liquid-propellant rocket engine by crystal using this relationship.

Description

A kind of method and its caliberating device using crystal thermometric
Technical field
The present invention relates to technical field of temperature measurement, fill more particularly to a kind of method using crystal thermometric and its calibration It sets.
Background technique
Aircraft is the instrument to fly in endoatmosphere or exoatmosphere space (space).Aircraft is divided into 3 classes: aviation Device, spacecraft, vehicle.The referred to as aircraft, such as dirigible, aircraft of flight in endoatmosphere, they lean on the quiet buoyancy of air Or the air force lift-off flight that air relative motion generates.It is known as spacecraft in space flight, such as artificial earth satellite carries People's airship, space probe, space shuttle etc., they rely primarily on inertia during task and do the track fortune similar with celestial body It is dynamic.Vehicle mainly on ground and space orbit to orbit shuttle, transports load, such as rocket and guided missile.In recent years, flight is closing on sky Between (atmosphere top) high-speed aircraft, with aircraft, spacecraft and vehicle characteristic, three has been carried out organically In conjunction with.Aircraft propulsion is provided dynamic by converting mechanical energy for chemical energy, nuclear energy or solar energy for all kinds of aircraft Power.
High temperature measurement is the key technology of aerospace field, because aircraft and its propulsion system often work extreme In the environment of high fever, for example, the hypersonic aircraft of near space in flight course or spacecraft and vehicle enter it is big During gas-bearing formation, due to Aerodynamic Heating, the hull-skin temperature of aircraft reaches as high as 2000 DEG C or more, needs outside aircraft Surface lays heat-barrier material and carries out Convective heat tranfer cooling from inside, to guarantee the safety of aircraft body structure.In addition, to inhale Gas formula engine and rocket engine are the aircraft propulsion of representative, in combustion chamber fuel gas temperature be also up to 1500 DEG C with On, it needs to take high-temperature component cooling and heat-insulated two methods, just can guarantee its safe operation.Therefore, hot environment pair The influence highly significant of the military service performance and service life of aircraft and its propulsion system, when being design an important factor for must be taken into consideration it One.In order to cope with this demand, the temperature of precise measurement aircraft and its propulsion system high-temperature component working surface, for analysis Its military service performance and expected life, there is extremely important realistic meaning.
Traditional technology means currently used for high-temperature component surface temperature measurement specifically include that pyrometer couple, high temperature show Temperature paint, infrared thermal imager.Wherein, the first is the measurement method of pyrometer couple, for the part temperature of high-temp solid wall surface Degree measurement can take pre-buried and sputtering (film) two kinds of mounting means.The mode of pre-buried thermocouple is by part dimension and knot The limitation of structure, and the structural intergrity of component is reduced, the part that may cause component aerodynamic configuration changes.The film heat of sputtering Galvanic couple is extremely short (Millisecond or second grade) in the life span of hot environment, is unable to satisfy aircraft task process and propulsion system The demand of high temperature test, in addition, the measurement of thermocouple is believed for having the high-temperature component of relative motion (turbine in such as engine) It number needs to draw by conducting wire and slip ring, brings biggish uncertainty and error, technical difficulty is very high;Second of high temperature Temperature indicating paint is mainly used in hypersonic aircraft and the test of propulsion system high-temperature component and prototype test, but it has examination Test the deficiencies of time is short, temperature measurement accuracy is lower, coating easily peels off, interpretation is difficult, test efficiency-cost ratio is lower;The third it is infrared heat at As instrument is the high-temperature component surface temperature measurement technology of relative maturity, but uses thermal infrared imager to realize aircraft or promote system Temperature measurement under operating condition of uniting, there is also larger technical difficulty.
In conclusion existing high-temperature component surface temperature measurement technological means not can effectively solve limited always at present Under conditions of space, high-speed aircraft and propulsion system high temperature component surface temperature are accurately measured.
Summary of the invention
To solve technological deficiency of the existing technology and deficiency, the present invention propose a kind of method using crystal thermometric and The caliberating device of crystal temperature effect.
Specifically, a kind of method using crystal thermometric that one embodiment of the invention proposes, comprising:
Sample crystal is made annealing treatment to obtain standard calibration curve;
It is provided with thermometric crystal in test system, fire trial is carried out to test system, the temperature rise for obtaining thermometric crystal is bent Line, and obtain according to the temperature rise curve temperature hold-time of the thermometric crystal;
Obtain the lattice percentage of elongation of the thermometric crystal;
Institute is determined according to the lattice percentage of elongation of the standard calibration curve, the temperature hold-time and the thermometric crystal State the temperature of test system.
In one embodiment of the invention, sample crystal is made annealing treatment to obtain standard calibration curve, comprising:
The first spacing of lattice that the sample crystal is determined by X-ray diffractometer carries out neutron to the sample crystal Irradiation;
At an annealing temperature, the sample crystal after irradiation is made annealing treatment in annealing time, and to annealing Treated, and the sample crystal carries out lattice analysis, to obtain the second spacing of lattice of the sample crystal;
The sample is determined according to the second spacing of lattice of the first spacing of lattice of the sample crystal and the sample crystal The lattice percentage of elongation of this crystal;
According to the annealing temperature of the sample crystal, the lattice percentage of elongation of the annealing time and the sample crystal Obtain the standard calibration curve.
In one embodiment of the invention, it is provided with thermometric crystal in the test system, test system is carried out Fire trial obtains the temperature rise curve of thermometric crystal, and is kept according to the temperature that the temperature rise curve obtains the thermometric crystal Before time, further includes:
The first spacing of lattice that the thermometric crystal is measured by X-ray diffractometer carries out neutron to the thermometric crystal Irradiation.
In one embodiment of the invention, the lattice percentage of elongation of the thermometric crystal is obtained, comprising:
To the thermometric crystal after fire trial, the second of the thermometric crystal is determined by the X-ray diffractometer Spacing of lattice;
The survey is determined according to the second spacing of lattice of the first spacing of lattice of the thermometric crystal and the thermometric crystal The lattice percentage of elongation of warm crystal.
In one embodiment of the invention, according to the standard calibration curve, the temperature hold-time and the survey The lattice percentage of elongation of warm crystal determines the temperature of the test system, comprising:
The lattice percentage of elongation of the temperature hold-time and the thermometric crystal is substituting to the standard calibration curve, with Determine the temperature of the test system.
In one embodiment of the invention, according to the standard calibration curve, the temperature hold-time and described The lattice percentage of elongation of thermometric crystal determines after the temperature of the test system, further includes:
The heat flow density of the test system is obtained using Fourier Heat Conduction law.
In one embodiment of the invention, the sample crystal and the thermometric crystal are SiC crystal.
A kind of caliberating device that one embodiment of the invention proposes, including scaling board, multiple thermocouples, wherein the mark The first side wall of fixed board offers the T shape blind hole for burying crystal, the symmetrical second sidewall of two of the scaling board it is symmetrical Position opens up blind hole, and multiple thermocouples are embedded in respectively in the blind hole of the scaling board.
In one embodiment of the invention, the scaling board is made of nickel base superalloy.
In one embodiment of the invention, the thermocouple is S type or R type noble-metal thermocouple.
The embodiment of the present invention has following advantage:
Present invention utilizes crystal after receiving high-intensitive neutron irradiation, and microstructure can change in a big way Characteristic, by carrying out heating anneal processing after irradiation to this crystalloid, so that the spacing of lattice of crystal is restored to predose Initial value;And the recovery extent of crystal lattices spacing is directly related with annealing temperature and annealing time, it is logical using this relationship It crosses crystal and the test of its highest or operating temperature is obtained during fire trial to the thrust chamber of liquid-propellant rocket engine, have non- Contact, the advantages such as small in size, precision is high, robustness is high, survival rate is high, efficiency-cost ratio is high, packing density is big.
Through the following detailed description with reference to the accompanying drawings, other aspects of the invention and feature become obvious.But it should know Road, which is only the purpose design explained, not as the restriction of the scope of the present invention, this is because it should refer to Appended claims.It should also be noted that unless otherwise noted, it is not necessary to which scale attached drawing, they only try hard to concept Ground illustrates structure and process described herein.
Detailed description of the invention
Below in conjunction with attached drawing, specific embodiments of the present invention will be described in detail.
Fig. 1 is a kind of flow diagram of the method using crystal thermometric provided in an embodiment of the present invention;
Fig. 2 is a kind of standard calibration curve provided in an embodiment of the present invention;
Fig. 3 is a kind of structural schematic diagram of microcrystal temperature measurement component placement location provided in an embodiment of the present invention;
Fig. 4 is a kind of temperature rise curve provided in an embodiment of the present invention;
Fig. 5 is a kind of structural schematic diagram of caliberating device provided in an embodiment of the present invention.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing to the present invention Specific embodiment be described in detail.
Embodiment one
Referring to Figure 1, Fig. 1 is a kind of flow diagram of the method using crystal thermometric provided in an embodiment of the present invention. The temp measuring method includes:
Sample crystal is made annealing treatment to obtain standard calibration curve;
It is provided with thermometric crystal in test system, fire trial is carried out to test system, the temperature rise for obtaining thermometric crystal is bent Line, and obtain according to the temperature rise curve temperature hold-time of the thermometric crystal;
Obtain the lattice percentage of elongation of the thermometric crystal;
Institute is determined according to the lattice percentage of elongation of the standard calibration curve, the temperature hold-time and the thermometric crystal State the temperature of test system.
The present invention first obtains the spacing of lattice of crystal, obtains the lattice percentage of elongation of crystal by spacing of lattice, further The calibration curve for determining crystal, by the calibration curve of crystal, anneal maximum temperature retention time and lattice percentage of elongation again into One step obtains the maximum operating temperature of test system, and this temp measuring method to test system has precision height, robustness high Feature.
Wherein, sample crystal is installed in caliberating device, and is carried out at annealing to the caliberating device for being equipped with sample crystal Reason, to establish standard calibration curve;
Test system is the practical test-fired device of carry out, such as thrust chamber and aero-turbine leaf Piece;
Thermometric crystal is the crystal being installed in test system, wherein sample crystal is as the type of thermometric crystal.
Standard calibration curve refers to the lattice percentage of elongation by the annealing temperature of sample crystal, annealing time and sample crystal Determining curve.
Fire trial, which refers to, is at working condition by carrying out igniting to engine, thus to obtain the temperature of engine The parameter changed over time.
Temperature rise curve refers to when carrying out fire trial to test system, the temperature of the thermometric crystal being arranged in test system with The curve of time change.
The lattice percentage of elongation of thermometric crystal refers to annealed treated the lattice variations situation of thermometric crystal after irradiation.
Specifically, the present embodiment will be described in detail to using the temp measuring method of crystal:
Step 1 makes annealing treatment sample crystal to obtain standard calibration curve;
Step 1.1, the angle of diffraction that sample crystal is measured first with X-ray diffractometer, determine sample according to Bragg equation Sample crystal, is placed in neutron source again carries out neutron irradiation later by first spacing of lattice of this crystal.
Preferably, neutron source is reactor or accelerator.
Preferably, sample crystal is SiC crystal.
The present invention selects SiC crystal, so that the upper limit for height of measurement method thermometric of the invention, reaches as high as 1400 DEG C, warp The microstructure of SiC crystal after crossing irradiation is highly sensitive to the process of annealing, so that carrying out high temperature side using SiC crystal The precision of amount is high, and temperature measurement accuracy is ± 10 DEG C, and the physicochemical properties of SiC crystal are highly stable, and crystal can be in hot environment Lower long-time existence.
Step 1.2 prepares caliberating device using the sample crystal after irradiation;
Step 1.3 chooses multiple caliberating devices configured with sample crystal, and multiple caliberating devices are individually positioned in high temperature In electric furnace, carries out the processing of different annealing times respectively under same annealing temperature, respectively take sample crystal after the completion of processing Out, then multiple caliberating devices configured with sample crystal are chosen, then multiple caliberating devices is individually positioned in high-temperature electric resistance furnace, pressed According to interval temperature raising anneal temperature, the processing of different annealing times is then carried out, in certain temperature range, according to above-mentioned examination Proved recipe method carries out at annealing multiple annealing temperatures in different annealing times using caliberating device to the sample crystal after irradiation Reason.Wherein, annealing region and interval temperature can be adjusted according to the test system of actual measurement.
For example, being directed to liquid rocket engine thrust chamber, temperature range is set as 800 DEG C~1050 DEG C, is spaced temperature It is set as 50 DEG C, two caliberating devices configured with sample crystal is individually positioned in high-temperature electric resistance furnace first, by high-temperature electric resistance furnace When being heated to 800 DEG C, isothermal holding is carried out to two caliberating devices respectively, the insulation annealing time is respectively set as 2 minutes and 20 Minute, and after annealing respectively take out sample crystal;Two caliberating devices configured with sample crystal are chosen again later to distinguish It is placed in high-temperature electric resistance furnace, is 50 DEG C according to interval temperature and high-temperature electric resistance furnace is heated to 850 DEG C, then respectively to two caliberating devices Insulation annealing processing is carried out, the insulation annealing time is respectively set as 2 minutes and 20 minutes, and after annealing respectively by sample crystal It takes out;In the manner described above, then respectively it is made annealing treatment when annealing temperature is 900 DEG C, 950 DEG C, 1000 DEG C and 1050 DEG C.
Step 1.4, the angle of diffraction for measuring annealed treated multiple sample crystal respectively using X-ray diffractometer, The second spacing of lattice of sample crystal is determined according to Bragg equation;
Step 1.5 determines warp according to the first spacing of lattice of multiple sample crystal and the second spacing of lattice of sample crystal The lattice percentage of elongation of all sample crystal after annealing, lattice percentage of elongation calculation formula are as follows:
Wherein, D is lattice percentage of elongation, and A1 is the spacing of lattice of predose crystal, and A2 is the spacing of lattice of crystal after annealing.
Step 1.6 obtains standard mark according to the corresponding annealing temperature of multiple sample crystal, annealing time and lattice percentage of elongation Determine curve, refer to Fig. 2, Fig. 2 is a kind of standard calibration curve provided in an embodiment of the present invention.
Step 2 carries out fire trial to test system to obtain temperature rise curve;
Preferably, the test system is thrust chamber and aero engine turbine blades.
Step 2.1, the angle of diffraction that the thermometric crystal after irradiation is measured using X-ray diffractometer, it is true according to Bragg equation Determine the first spacing of lattice of thermometric crystal, neutron irradiation is carried out to thermometric crystal later;
It should be noted that sample crystal and thermometric crystal are selected from a collection of crystal, the two preparation process is identical, and Receive identical neutron irradiation jointly.
Step 2.2 chooses multiple thermometric crystal, and by multiple thermometric crystal, equidistantly (Δ x) is placed on high temperature alloy bellows It is interior, and by the interstitial site filled high-temperature powder metallurgy in metal bellows, and be packaged to be prepared into crystallite using spot welding Body temperature measurement component, wherein microcrystal temperature measurement component is installed in test system, when test system carries out fire trial, crystallite The spacing of lattice of thermometric crystal in body temperature measurement component can be with the variation of test system temperature.
Preferably, microcrystal temperature measurement component is prepared using three thermometric crystal.
Preferably, metal bellows is high temperature alloy bellows.
Preferably, the material of high temperature powder alloy is identical as the case material of the test system.
Microcrystal temperature measurement component is put into the micropore of test system shell by step 2.3, refers to Fig. 3, and Fig. 3 is this hair A kind of structural schematic diagram for microcrystal temperature measurement component placement location that bright embodiment provides.
Preferably, micro-pore diameter 0.5mm.
Preferably, the width of microcrystal temperature measurement component is 0.2~0.5mm.
Step 2.4 carries out fire trial to test system, is to carry out fire trial to motor power room, works as igniting After the test, microcrystal temperature measurement component is taken out from test system, then by multiple thermometric crystal from microcrystal temperature measurement component Middle taking-up, and responded by being installed on the temperature of zero dimension during the thermocouple measurement fire trial of test system surface of shell The relationship of curve and time, so that it is determined that temperature rise curve, refers to Fig. 4, Fig. 4 is that a kind of temperature rise provided in an embodiment of the present invention is bent Line.
Microcrystal temperature measurement component of the invention is mountable to the enclosure interior of thrust chamber, this for motor power room High temperature measurement in restricted clearance realizes that crystal volume is utilized in this high temperature measurement mode by minute yardstick crystal measurement Small feature is able to carry out pre-buried installation, and will not influence the flow field inside thrust chamber and thermal field, and microcrystal temperature measurement component Size is small, will not influence the integrality of thrust cell structure.Avoiding the thermal imaging system installed outside thrust chamber can not take The profiling temperatures of inner wall, and the cooling duct size of thrust chamber and the limitation of wall thickness are difficult to arrange that lead is logical Thermocouple measurement inner wall temperature is crossed, and the working time of rocket engine is shorter, does not meet the requirement of high temperature temperature indicating paint.
Step 3, the temperature hold-time that thermometric crystal is obtained by the temperature rise curve;
Step 3.1 is determined measurement temperature of the test system in fire trial by temperature rise curve, and further determined that Measure the temperature hold-time of temperature.
Preferably, measurement temperature is the maximum temperature that test system thermocouple in fire trial measures.
Step 4, the lattice percentage of elongation for obtaining the thermometric crystal;
The angle of diffraction of step 4.1, the thermometric crystal taken out from microcrystal temperature measurement component using X-ray diffractometer measurement Degree, the second spacing of lattice of thermometric crystal is determined according to Bragg equation;
Step 4.2 determines thermometric crystalline substance according to the first spacing of lattice of thermometric crystal and the second spacing of lattice of thermometric crystal The lattice percentage of elongation of body.
Step 5, according to the standard calibration curve, the lattice percentage of elongation of the temperature hold-time and the thermometric crystal Determine the temperature of the test system;
Step 5.1 substitutes into thermometric crystal in the temperature hold-time of maximum temperature and the lattice percentage of elongation of thermometric crystal To standard calibration curve, with the temperature of the determination test system, wherein the temperature of test system refers to that test system is being lighted a fire The maximum temperature of real work when test.
For example, determining that the lattice percentage of elongation of thermometric crystal reduces 1.8%, as shown in figure 4, logical after fire trial Overtemperature curve obtains the maximum temperature (T that test system thermocouple in fire trial measures thermometric crystalmax) temperature keep Time is 2.9min, as shown in Fig. 2, being that 1.8% and retention time 2.9min is substituting to mark by the lattice percentage of elongation of thermometric crystal In quasi- calibration curve, available test system maximum temperature locating during fire trial is 1027 DEG C.
The measureing method of high-temperature of the invention is not influenced by signal transmission, null offset and radiation etc., Shandong with higher Stick, and caliberating device and microcrystal temperature measurement component are easy to implement large-scale preparation, reduce whole cost, the present embodiment Microcrystal temperature measurement component can intensively be installed on the object surface of thrust chamber, average 1~2/cm2, make it possible to pushing away The temperature of power chamber interior walls different location is accurately measured.
Step 6, the heat flow density that the test system is obtained using Fourier Heat Conduction law;
Step 6.1, the temperature obtained based on thermometric crystal measurements multiple in microcrystal temperature measurement component, can be according to Fourier The heat flow density of test system wall surface radial direction is calculated in thermally conductive law, that is, q=k (T1-2T2+T3)/(2 Δ x), wherein k It is the coefficient of heat conduction of thrust chamber wall surface metal material.
Embodiment two
Fig. 5 is referred to, Fig. 5 is a kind of structural schematic diagram of caliberating device provided in an embodiment of the present invention.In above-mentioned implementation On the basis of example, the present embodiment will describe to caliberating device of the invention in detail.
Caliberating device is the device before carrying out high temperature measurement to test system for being demarcated to crystal, calibration dress Set including scaling board and multiple thermocouples, scaling board using being made with a thickness of the nickel base superalloy of 12~18mm, avoid because It is influenced caused by the even property of circumferential asymmetry of the interior thorax heating of high-temperature electric resistance furnace, T shape blind hole is offered on the first side wall of scaling board, For burying crystal, the outer bore dia of T shape blind hole is 4~8mm, and the diameter of bore of T shape blind hole is 2~4mm, between T shape blind hole It is opened up respectively in the symmetric position of the symmetrically arranged second sidewall of scaling board filled with ceramic high temperature glue as adhesive at gap There is blind hole, each blind hole is filled with ceramic high temperature glue as adhesive for burying thermocouple, in the gap location of blind hole, wherein Diameter of blind hole is 5~8mm, and the depth of blind hole is 3~7mm, crystal the installation site in T shape blind hole should in all blind holes Thermocouple keep on the same line.
Preferably, thermocouple is S type or R type noble-metal thermocouple.
Caliberating device of the invention can guarantee that under steady state conditions, a reactor, the observed temperature of thermocouple and crystal is very close, Accurate reference temperature is provided for crystal calibration.
In conclusion specific case used herein explains the principle and embodiment of the embodiment of the present invention It states, the above description of the embodiment is only used to help understand the method for the present invention and its core ideas;Meanwhile for this field Those skilled in the art, according to the thought of the present invention, there will be changes in the specific implementation manner and application range, to sum up institute It states, the contents of this specification are not to be construed as limiting the invention, and protection scope of the present invention should be with the attached claims It is quasi-.

Claims (10)

1. a kind of method using crystal thermometric characterized by comprising
Sample crystal is made annealing treatment to obtain standard calibration curve;
It is provided with thermometric crystal in test system, fire trial is carried out to test system, obtains the temperature rise curve of thermometric crystal, and The temperature hold-time of the thermometric crystal is obtained according to the temperature rise curve;
Obtain the lattice percentage of elongation of the thermometric crystal;
According to the lattice percentage of elongation of the standard calibration curve, the temperature hold-time and the thermometric crystal determine it is described to Survey the temperature of device.
2. the method according to claim 1, wherein being made annealing treatment sample crystal to obtain standard calibration Curve, comprising:
The first spacing of lattice that the sample crystal is determined by X-ray diffractometer carries out neutron irradiation to the sample crystal;
At an annealing temperature, the sample crystal after irradiation is made annealing treatment in annealing time, and to annealing The sample crystal afterwards carries out lattice analysis, to obtain the second spacing of lattice of the sample crystal;
Determine that the sample is brilliant according to the second spacing of lattice of the first spacing of lattice of the sample crystal and the sample crystal The lattice percentage of elongation of body;
It is obtained according to the lattice percentage of elongation of the annealing temperature of the sample crystal, the annealing time and the sample crystal The standard calibration curve.
3. being treated the method according to claim 1, wherein being provided with thermometric crystal in the test system It surveys device and carries out fire trial, obtain the temperature rise curve of thermometric crystal, and the thermometric crystal is obtained according to the temperature rise curve Temperature hold-time before, further includes:
The first spacing of lattice that the thermometric crystal is determined by X-ray diffractometer carries out neutron irradiation to the thermometric crystal.
4. according to the method described in claim 3, it is characterized in that, obtaining the lattice percentage of elongation of the thermometric crystal, comprising:
To the thermometric crystal after fire trial, the second lattice of the thermometric crystal is determined by the X-ray diffractometer Spacing;
Determine that the thermometric is brilliant according to the second spacing of lattice of the first spacing of lattice of the thermometric crystal and the thermometric crystal The lattice percentage of elongation of body.
5. the method according to claim 1, wherein when being kept according to the standard calibration curve, the temperature Between and the lattice percentage of elongation of the thermometric crystal determine the temperature of the test system, comprising:
The lattice percentage of elongation of the temperature hold-time and the thermometric crystal is substituting to the standard calibration curve, with determination The temperature of the test system.
6. the method according to claim 1, wherein according to the standard calibration curve, temperature holding The lattice percentage of elongation of time and the thermometric crystal determines after the temperature of the test system, further includes:
The heat flow density of the test system is obtained using Fourier Heat Conduction law.
7. the method according to claim 1, wherein the sample crystal and the thermometric crystal are SiC crystalline substance Body.
8. a kind of caliberating device using crystal thermometric, which is characterized in that including scaling board, multiple thermocouples, wherein the mark The first side wall of fixed board offers the T shape blind hole for burying crystal, the symmetrical second sidewall of two of the scaling board it is symmetrical Position opens up blind hole, and multiple thermocouples are embedded in respectively in the blind hole of the scaling board.
9. caliberating device according to claim 8, which is characterized in that the scaling board is made of nickel base superalloy.
10. caliberating device according to claim 8, which is characterized in that the thermocouple is S type or R type noble metal thermoelectricity It is even.
CN201810317633.3A 2018-04-10 2018-04-10 A kind of method and its caliberating device using crystal thermometric Pending CN110361104A (en)

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CN110793662A (en) * 2019-10-31 2020-02-14 深圳第三代半导体研究院 Method for calibrating temperature field of large-size silicon carbide high-temperature reaction device
CN113405683A (en) * 2021-05-20 2021-09-17 长江存储科技有限责任公司 Wafer temperature measuring method
CN113916400A (en) * 2021-09-01 2022-01-11 北京机电工程研究所 Method for measuring surface temperature of high-temperature component
CN114858304A (en) * 2022-07-11 2022-08-05 中国航发四川燃气涡轮研究院 Method for measuring temperature by utilizing micro-scale crystal
CN115468676A (en) * 2022-11-15 2022-12-13 中国航发沈阳发动机研究所 Crystal temperature measurement test method for aircraft engine

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Application publication date: 20191022