CN110360919B - Ultra-high temperature displacement sensor - Google Patents
Ultra-high temperature displacement sensor Download PDFInfo
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- CN110360919B CN110360919B CN201910724433.4A CN201910724433A CN110360919B CN 110360919 B CN110360919 B CN 110360919B CN 201910724433 A CN201910724433 A CN 201910724433A CN 110360919 B CN110360919 B CN 110360919B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
An ultra-high temperature displacement sensor belongs to the technical field of displacement detection control. The invention solves the problems of larger zero voltage and low precision of the existing differential transformer type displacement sensor caused by the restriction of the winding process and the use temperature of the enameled wire. The shell is of a cylindrical structure, and two ports of the cylindrical structure are provided with end covers; the hollow cylinder penetrates through the through holes of the two end covers and is fixedly connected with the end covers; the hollow cylinder, the end cover and the shell form a sealed cavity; an iron core is inserted in the hollow cylinder, and the iron core axially feeds the displacement in the hollow cylinder; the framework is sleeved on the outer wall of the hollow cylinder, the excitation winding and the two groups of output windings are sleeved on the framework, and the excitation winding is arranged between the two groups of output windings; the excitation winding and the two groups of output windings are all integrated structures formed by sintering and connecting a plurality of ceramic sensitive cores through high-temperature glass. The invention is suitable for a large displacement detection system under ultra-high temperature and severe environment.
Description
Technical Field
The invention belongs to the technical field of displacement detection control.
Background
The displacement sensor is a key component for measuring the displacement of various large-scale mechanical regulation control systems, can be mounted on a valve core of a pipeline control valve, is used for detecting the displacement of the valve core with high precision, has the functions of monitoring the operation condition of a machine, alarming at overspeed, stopping emergently and the like, and has important functions of monitoring and evaluating the operation state of a unit and controlling the operation state of the unit.
The differential transformer type displacement sensor widely applied at present adopts a manual or automatic winding process to wind coils, the working temperature of the sensor is limited by the use temperature of an enameled wire, and the maximum working temperature is only 220 ℃. And, multilayer winding can't guarantee coil winding's roughness and uniformity, leads to sensor zero position voltage great, and the precision is lower.
Disclosure of Invention
The invention provides an ultrahigh-temperature displacement sensor, which aims to solve the problems that the zero voltage of the sensor is higher and the precision is low due to the restriction of a winding process and the use temperature of an enameled wire of the existing differential transformer type displacement sensor.
The invention relates to an ultra-high temperature displacement sensor, which comprises an end cover 2, a shell 4, an excitation winding 5, an iron core 6, a hollow cylinder 7, a framework 8 and two groups of output windings 9;
the shell 4 is a cylindrical structure, and two ports of the cylindrical structure are respectively provided with an end cover 2; the centers of the two end covers 2 are both provided with circular through holes, and the hollow cylinder 7 penetrates through the through holes of the two end covers 2 and is fixedly connected with the end covers 2; and the hollow cylinder 7, the end cover 2 and the shell 4 form a sealed cavity;
an iron core 6 is inserted into the hollow cylinder 7, and the iron core 6 axially feeds a displacement in the hollow cylinder 7;
the framework 8, the excitation winding 5 and the two groups of output windings 9 are all arranged in the sealed cavity;
the framework 8 is sleeved on the outer wall of the hollow cylinder 7, the excitation winding 5 and the two groups of output windings 9 are both sleeved on the framework 8, and the excitation winding 5 is arranged between the two groups of output windings 9;
the excitation winding 5 and the two groups of output windings 9 are all integrated structures formed by sintering a plurality of ceramic sensitive cores through high-temperature glass.
According to the invention, the ceramic sensitive core body is manufactured by a high-temperature co-sintering technology, so that the sensor has the capability of stably working in an ultra-high temperature environment of 1000 ℃. The excitation winding and the two groups of output winding sensors are manufactured in a module integration mode, the number of the modules can be adjusted according to the measuring range, the process flow is simplified, the working efficiency is improved, and the high-sensitivity signal output of the displacement sensor in a small volume, a wide temperature range and a large range is realized. The sensor adopts a high-temperature co-sintering ceramic process technology, and the high-precision screen printing is adopted, so that the number of turns of the sintered core body is the same, the zero voltage is obviously reduced, the later compensation is not needed, and the measurement precision of the sensor is effectively improved.
Drawings
FIG. 1 is a schematic structural diagram of an ultra-high temperature displacement sensor according to the present invention;
fig. 2 is a exploded view of the mounting of the excitation winding 5 and the two sets of output windings 9 with the framework 8;
fig. 3 is a schematic diagram of the structure of the excitation winding 5 or the output winding 9;
fig. 4 is a schematic diagram showing a step arrangement of the excitation winding 5 and the two groups of output windings 9;
FIG. 5 is a schematic structural diagram of a ceramic sensitive core;
fig. 6 is an equivalent circuit diagram of the module-assembled ultra-high temperature displacement sensor after being electrified.
Detailed Description
The following detailed description of the embodiments of the present invention will be provided with reference to the accompanying drawings and examples, so that how to apply the technical means to solve the technical problems and achieve the corresponding technical effects can be fully understood and implemented. The embodiments and the features of the embodiments can be combined without conflict, and the technical solutions formed are all within the scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
First embodiment, the present embodiment is described below with reference to fig. 1 to 6, and the displacement sensor in the present embodiment includes an end cap 2, a shell 4, an excitation winding 5, an iron core 6, a hollow cylinder 7, a skeleton 8, and two sets of output windings 9;
the shell 4 is a cylindrical structure, and two ports of the cylindrical structure are respectively provided with an end cover 2; the centers of the two end covers 2 are both provided with circular through holes, and the hollow cylinder 7 penetrates through the through holes of the two end covers 2 and is fixedly connected with the end covers 2; and the hollow cylinder 7, the end cover 2 and the shell 4 form a sealed cavity;
an iron core 6 is inserted into the hollow cylinder 7, and the iron core 6 axially feeds a displacement in the hollow cylinder 7;
the framework 8, the excitation winding 5 and the two groups of output windings 9 are all arranged in the sealed cavity;
the framework 8 is sleeved on the outer wall of the hollow cylinder 7, the excitation winding 5 and the two groups of output windings 9 are both sleeved on the framework 8, and the excitation winding 5 is arranged between the two groups of output windings 9;
the excitation winding 5 and the two groups of output windings 9 are all integrated structures formed by sintering a plurality of ceramic sensitive cores through high-temperature glass.
In the embodiment, the excitation winding 5 and the two groups of output windings 9 are connected into a whole by a plurality of ceramic sensitive cores through high-temperature glass sintering and sleeved on the framework 8, the radial degree of freedom is restricted through positioning holes on the framework 8, glass powder is filled between the framework 8 and the excitation winding 5 and between the framework 8 and the two groups of output windings 9 and is sintered, the axial degree of freedom of the excitation winding 5 and the two groups of output windings 9 is restricted, the end cover 2 is welded with the hollow cylinder through electron beams, the end cover 2 is welded with the high-temperature coaxial cable 1 through electron beams, the end cover 2 is welded with the shell 4 through electron beams, the locking spring 10 is welded with the hollow cylinder through electron beams, and the locking spring 10 is welded with.
The invention utilizes the high-temperature co-sintering technology to screen print platinum metal slurry on high-temperature ceramic, then carries out multi-layer lamination and co-sintering at 1450 ℃ to obtain a ceramic sensitive core, calculates the length and the turns of an excitation winding and an output winding according to the requirements of measurement range and precision index, adopts a mode of combining and assembling a plurality of modules, sequentially assembles the sintered ceramic sensitive core on a fixed framework by penetrating through a positioning hole, fills high-temperature glass on a connecting surface and sinters the connecting surface, fills the platinum metal slurry in a signal leading-out hole, and then carries out high-temperature sintering. The invention adopts the high-temperature co-sintering ceramic process technology, and because the high-precision screen printing is adopted, the turns of the windings sintered in the same batch are the same, the zero voltage is greatly reduced, and the later compensation is not needed.
Further, in this embodiment, the sealing device further includes a spring 10, the spring 10 is disposed in the sealing cavity and sleeved on the outer wall of the hollow cylinder 7, one end of the spring 10 is welded on the outer surface of the hollow cylinder, and the other end of the spring 10 is welded on the end cover 2 adjacent to the spring.
In the present embodiment, the high-temperature coaxial cable 1 is further included, and the high-temperature coaxial cable 1 is used for connecting the excitation winding 5 and the signal outgoing lines of the two sets of output windings 9.
In the embodiment, the high-temperature coaxial cable further comprises an adapter plate 3, wherein the adapter plate 3 is sleeved on the framework 8 and used for connecting the signal outgoing lines of the excitation winding 5 and the two groups of output windings 9 to the connecting end of the high-temperature coaxial cable 1 in a switching mode.
In the present embodiment, the two sets of output windings 9 are arranged in a stepped manner from high to low in the direction of the excitation winding 5 at both ends.
In the present embodiment, the placing ports of the end cap 2 and the housing 4 are welded by electron beams. The high-temperature coaxial cable 1 and the end cover 2 are welded by adopting electron beams.
In the embodiment, the end cover and the hollow cylinder are welded by adopting an electron beam, the end cover 2 and the shell 4 are welded by adopting an electron beam, the hollow cylinder and the spring 10 are welded by adopting an electron beam, the shell 4 and the spring 10 are welded by adopting an electron beam, the high-temperature coaxial cable 3 and the end cover 4 are welded by adopting an electron beam, a vacuum sealing cavity is integrally formed, and the spring is designed into a flexible end cover and is used for absorbing the thermal expansion of a winding caused by high temperature. Skeleton 8 includes that cavity cylinder and center open have the plectane of round hole, the one end of cavity cylinder and the central fixed connection of plectane, a port that the plectane of skeleton 8 closes on casing 4 is placed.
The module-assembled ultra-high temperature displacement sensor described in this embodiment applies a differential transformer test principle, and its working principle is a device that converts the change of the measured displacement into the change of magnetic circuit reluctance to cause the change of winding mutual inductance M. When the exciting winding is connected to the exciting power supply, the output winding will produce induced voltage, and when the mutual inductance changes, the output voltage will change correspondingly, and 2 output windings are connected into a differential form, i.e. 2 induced electromotive forces are connected in series in reverse. The excitation winding is positioned in the middle, the output winding is separated from the two sides of the excitation winding and integrally forms a three-section type differential transformer structure, in order to improve the linear output length of the sensor, the output winding is arranged in a ladder shape, and the working principle schematic diagram is shown in fig. 4.
Further, in the present embodiment, the ceramic sensitive core is an integral structure formed by co-sintering N functional layer substrates at a high temperature, where N is a positive integer greater than or equal to 2;
the functional layer substrate comprises a ceramic substrate 15, a spiral coil 13, filled ceramics 14 and a signal leading-out hole 12;
the ceramic substrate 15 is circular, the spiral coil 13 is spirally printed on the ceramic substrate 15, and the filling ceramic 14 is sintered at the position, where the spiral coil 13 is not printed, on the ceramic substrate 15, so that the surface of the ceramic substrate 15 is planar;
the spiral coils 13 on adjacent functional layer substrates are oppositely wound.
In the present embodiment, the signal drawing hole 12 is a through hole for electrical connection.
In this embodiment, the spiral coils 13 on adjacent functional layer substrates have opposite rotation directions, so that the magnetic field directions of the coils of the respective layers can be ensured to be consistent.
In this embodiment, the filled ceramic 14 prevents edge cracking when adjacent functional layer substrates are stacked.
And N is 18-21.
The spiral coil 13 is prepared using platinum metal paste.
The signal leading-out hole 12 is filled with platinum metal slurry.
In the present embodiment, the excitation winding 5, the two output windings 9, and the bobbin 8 are all filled with glass powder and sintered into an integral structure.
Calculating and obtaining the lengths and the turns of the primary coil winding and the secondary coil winding according to the measurement range and the precision requirement of the ultra-high temperature displacement sensor;
and obtaining the layer number of the functional layer substrate and the number of turns, the line spacing and the line width of the spiral coil 13 according to the lengths and the number of turns of the primary coil winding and the secondary coil winding and the power consumption of the sensor.
According to the invention, the number of the required ceramic sensitive cores is determined according to the technical indexes of the ultra-high temperature displacement sensor, the cores are sintered together through glass powder, and the signal leading-out holes are filled with platinum metal slurry and sintered at high temperature, so that the effective leading-out of the signals of the sensitive cores is realized.
The excitation winding and the output winding are connected into a whole by a plurality of ceramic sensitive cores through high-temperature glass sintering, high-temperature glass is filled between the adapter plate and the output winding and is sintered, the sintered winding is installed on the framework, the high-temperature glass is filled between the framework and the winding and is sintered and fixed, the high-temperature glass is filled between the framework and the end cover and is sintered and fixed, a plurality of signal leading-out holes are formed in the adapter plate, each leading-out hole is communicated with one ceramic sensitive core, platinum metal slurry is filled in the leading-out holes and then is sintered at high temperature, electrical connection between each ceramic sensitive core and the adapter plate is realized, a high-temperature coaxial cable lead is penetrated in a through hole reserved in the adapter plate, and the platinum metal slurry is filled in the holes and then is sintered at high temperature.
The excitation winding and the output winding are connected into a whole by a plurality of ceramic sensitive cores through high-temperature glass sintering and are sleeved on the framework, the radial degree of freedom is restrained through a positioning hole in the framework, glass powder is filled between the framework and the winding and is sintered, the axial degree of freedom is restrained, the end cover and the sealing cavity are welded through electron beams, the end cover and the high-temperature coaxial cable are welded through electron beams, the end cover and the shell are welded through electron beams, the locking spring and the sealing cavity are welded through electron beams, and the locking spring and the shell are welded through electron beams.
The equivalent circuit of the sensor of the present invention is shown in FIG. 6, where e1Exciting voltage for the exciting winding; l is1、R1The inductance value and the resistance value of the exciting winding are used; l is21、L22Inductance values for the left and right output windings; r21、R22Resistance values of the left and right output windings; m1 and M2 are mutual inductance values between the excitation winding and the left and right output windings respectively.
Although the embodiments of the present invention have been described above, the above descriptions are only for the convenience of understanding the present invention, and are not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. An ultra-high temperature displacement sensor is characterized by comprising an end cover (2), a shell (4), an excitation winding (5), an iron core (6), a hollow cylinder (7), a framework (8) and two groups of output windings (9);
the shell (4) is of a cylindrical structure, and two ports of the cylindrical structure are respectively provided with an end cover (2); circular through holes are formed in the centers of the two end covers (2), and the hollow cylinder (7) penetrates through the through holes of the two end covers (2) to be fixedly connected with the end covers (2); the hollow cylinder (7), the end cover (2) and the shell (4) form a sealed cavity;
an iron core (6) is inserted into the hollow cylinder (7), and the iron core (6) axially feeds a displacement in the hollow cylinder (7);
the framework (8), the excitation winding (5) and the two groups of output windings (9) are all arranged in the sealed cavity;
the framework (8) is sleeved on the outer wall of the hollow cylinder (7), the excitation winding (5) and the two groups of output windings (9) are sleeved on the framework (8), and the excitation winding (5) is arranged between the two groups of output windings (9);
the excitation winding (5) and the two groups of output windings (9) are integrated structures formed by sintering and connecting a plurality of ceramic sensitive cores through high-temperature glass;
the ceramic sensitive core body is an integral structure formed by co-sintering N functional layer substrates at high temperature, wherein N is a positive integer greater than or equal to 2;
the functional layer substrate comprises a ceramic substrate (15), a spiral coil (13), filled ceramic (14) and a signal leading-out hole (12);
the ceramic substrate (15) is circular, the spiral coil (13) is spirally printed on the ceramic substrate (15), and filling ceramics (14) are sintered at the positions, which are not printed with the spiral coil (13), on the ceramic substrate (15) so that the surface of the ceramic substrate (15) is planar;
the spiral coils (13) on adjacent functional layer substrates are oppositely wound.
2. The ultra-high temperature displacement sensor according to claim 1, wherein the excitation winding (5) and the two groups of output windings (9) are all filled with glass powder and sintered into an integral structure with the skeleton (8).
3. The ultra-high temperature displacement sensor according to claim 1, further comprising a spring (10), wherein the spring (10) is disposed in the sealed cavity and sleeved on the outer wall of the hollow cylinder (7), and the spring (10) is located between the set of output windings (9) and one of the end caps (2).
4. The ultra-high temperature displacement sensor according to claim 2, further comprising a high temperature coaxial cable (1), wherein the high temperature coaxial cable (1) is used for connecting signal lead-out wires of the excitation winding (5) and the two groups of output windings (9).
5. The ultra-high temperature displacement sensor according to claim 2, further comprising an adapter plate (3), wherein the adapter plate (3) is sleeved on the frame (8) and is used for connecting signal outgoing lines of the excitation winding (5) and the two groups of output windings (9) to the connecting end of the high temperature coaxial cable (1).
6. The ultra-high temperature displacement sensor according to claim 1 or 4, wherein the two groups of output windings (9) are arranged in a manner that the two ends of each output winding are stepped towards the direction of the excitation winding (5) and are sequentially arranged in a descending manner from high to low.
7. The ultra-high temperature displacement sensor according to claim 1 or 5, wherein the placing openings of the end cover (2) and the shell (4) are welded by electron beams.
8. An ultra-high temperature displacement sensor according to claim 3, wherein one end of the spring (10) is welded to the outer surface of the hollow cylinder, and the other end of the spring (10) is welded to the end cap (2) adjacent thereto.
9. The ultra-high temperature displacement sensor according to claim 4, wherein the high temperature coaxial cable (1) and the end cover (2) are welded by electron beams.
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