CN110349923A - A kind of CMOS chip flexible support structure - Google Patents

A kind of CMOS chip flexible support structure Download PDF

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Publication number
CN110349923A
CN110349923A CN201910618369.1A CN201910618369A CN110349923A CN 110349923 A CN110349923 A CN 110349923A CN 201910618369 A CN201910618369 A CN 201910618369A CN 110349923 A CN110349923 A CN 110349923A
Authority
CN
China
Prior art keywords
chip
support structure
flexible arm
flexible
cmos chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910618369.1A
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Chinese (zh)
Inventor
王晓宇
徐抒岩
董吉洪
王克军
薛闯
姜萍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Original Assignee
Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CN201910618369.1A priority Critical patent/CN110349923A/en
Publication of CN110349923A publication Critical patent/CN110349923A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/32Holders for supporting the complete device in operation, i.e. detachable fixtures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/562Protection against mechanical damage

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

A kind of CMOS chip flexible support structure, including soft section, the soft section include support frame and flexible arm, and the multiple flexible arm is evenly arranged on the outside of the support frame, and each flexible arm is equipped with the soft slot of S type that radial distribution bending is formed.Chip is influenced to be deformed in refrigeration work by temperature change, and the soft slot of S type can absorb the deformation of chip, is reduced flexible support structure to the pulling force of chip, can be effectively reduced the variation of chip surface face shape PV value, keep chip performance more excellent.

Description

A kind of CMOS chip flexible support structure
Technical field
The invention belongs to remote sensing technology field, in particular to a kind of CMOS chip flexible support structure.
Background technique
For Space Remote Sensors when being detected, the superiority and inferiority of imager chip performance is directly related to the good of remote sensor image quality It is bad.Particularly with the remote sensor for carrying out space exploration, image device usually works under refrigerating environment, to the light of image device Electrical property has very high requirement, and the structural parameters such as position to detector and surface face shape PV value also have very high requirement.
Traditional detector mounting means predominantly rigidly fixes installation, and mechanical environment smaller for size requires not tight The detector of lattice, is installed as a whole after usually chip pin is soldered on pcb board;It is biggish to volume weight Under detector or the more demanding operating condition of environmental mechanics, usually detector is installed to corresponding outline border, installation is fixed. It is the decline for not adapting to surface face shape PV value caused by chip is deformed by temperature loading that detector, which rigidly fixes the shortcomings that installation, Component is when by temperature loading, due to multichip ceramic substrate and the swollen mismatch of support construction line of material, chip and support construction Between can generate relative deformation.
Summary of the invention
In view of this, being solved in the prior art it is an object of the invention to propose a kind of CMOS chip flexible support structure Existing chip does not adapt to the problem of face shape PV value caused by being deformed by temperature loading declines.
To achieve the above object, the flexible support structure of a kind of CMOS chip of the invention, including soft section, the soft section packet Support frame and flexible arm are included, the multiple flexible arm is evenly arranged on the outside of the support frame, and each flexible arm is equipped with radial distribution The soft slot of S type that bending is formed.
Preferably, the multiple flexible arm is 3 or 4.
Preferably, the multiple flexible arm is 3.
It preferably, further include chip, heat conduction copper sheet and nut, metal installation base, the metal is arranged in the chip lower end Screw rod is arranged in mounting base lower end, and the heat conduction copper sheet and the flexible arm are equipped with through-hole compatible with screw rod, and the screw rod is worn The through-hole is crossed, the nut is mounted on the screw rod, tightens the nut for the heat conduction copper sheet and the flexible arm pressure Tightly in the metal installation base.
Preferably, the heat conduction copper sheet is mounted between the metal installation base and soft section.
The beneficial effects of the present invention are: the flexible support structure of CMOS chip provided by the invention, for leading for refrigeration Hot copper sheet is between soft section and chip;For multiple flexible arm circumference uniform distributions on the outside of support frame, the installation that can satisfy chip is fixed Position requires, and each flexible arm is equipped with the radially-arranged soft slot of S type, reduces radial rigidity, chip is in refrigeration work Shi Shouwen Degree variation influences to be deformed, and the soft slot of S type can absorb the deformation of chip, reduce soft section to the pulling force of chip, can be effective Ground reduces the variation of chip surface face shape PV value, keeps chip performance more excellent.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of CMOS chip flexible support structure of the present invention;
Fig. 2 is the front view of CMOS chip flexible support structure of the present invention;
Fig. 3 is the structural schematic diagram of the soft section of the present invention.
Wherein: 1- chip;2- metal installation base;3- heat conduction copper sheet;The soft section of 4-;41- support frame;42- flexible arm;421-S The soft slot of type;5- nut.
Specific embodiment
The present invention is described in more detail with reference to the accompanying drawings and examples.
In conjunction with shown in Fig. 1 and Fig. 2: a kind of flexible support structure of CMOS chip provided by the invention, including soft section 4, it is soft Section 4 includes support frame 41 and flexible arm 42, and multiple flexible arms 42 are evenly arranged on 41 outside of support frame, and the installation that can satisfy chip is fixed Position requires, and each flexible arm 42 is equipped with the soft slot 421 of S type that radial distribution bending is formed, and reduces radial rigidity, chip is being made It is influenced to be deformed by temperature change when cold work, the soft slot of S type can absorb the deformation of chip, reduce flexible support structure pair The pulling force of chip can be effectively reduced the variation of chip surface face shape PV value, keep chip performance more excellent.
The soft slot of S type can be formed by a S type structure or multiple S type folded structures.
Further, multiple flexible arms 42 are 3 or 4.
Multiple flexible arms are 3.
The shape of support frame 41 is round or regular polygon.
As shown in Figure 3: in the present embodiment, the shape of support frame 41 is positive triangle, and the quantity of flexible arm is three, equal respectively Cloth is on three angles on the outside of positive triangle.
It further include chip 1, heat conduction copper sheet 3 and nut 5, metal installation base 2,2 lower end of metal installation base is arranged in 1 lower end of chip Screw rod is set, and heat conduction copper sheet 3 and flexible arm 42 are equipped with through-hole compatible with screw rod, and screw rod passes through through-hole, and nut 5 is mounted on spiral shell On bar, tightens nut and heat conduction copper sheet 3 and flexible arm 42 are pressed in metal installation base 2.
Heat conduction copper sheet 3 is mounted between metal installation base 2 and soft section 4.
The flexible support structure of CMOS chip provided by the invention, the heat conduction copper sheet for refrigeration be located at soft section and chip it Between directly contacted with chip, multiple flexible arm circumference uniform distributions can satisfy the installation positioning requirements of chip on the outside of support frame;Often A flexible arm is equipped with the radially-arranged soft slot of S type, reduces radial rigidity, chip is influenced in refrigeration work by temperature change It can be deformed, the soft slot of S type can absorb the deformation of chip, and reduction flexible support structure, can be effectively to the pulling force of chip The variation for reducing chip surface face shape PV value, keeps chip performance more excellent.
It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability It include so that the process, method, commodity or the equipment that include a series of elements not only include those elements, but also to wrap Include other elements that are not explicitly listed, or further include for this process, method, commodity or equipment intrinsic want Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including described want There is also other identical elements in the process, method of element, commodity or equipment.
The above description is only an example of the present application, is not intended to limit this application.For those skilled in the art For, various changes and changes are possible in this application.All any modifications made within the spirit and principles of the present application are equal Replacement, improvement etc., should be included within the scope of the claims of this application.

Claims (5)

1. a kind of CMOS chip flexible support structure, which is characterized in that including soft section (4), the soft section (4) includes support frame (41) with flexible arm (42), the multiple flexible arm (42) circumference uniform distribution is on the outside of the support frame (41), each flexible arm (42) it is equipped with the soft slot of S type (421) that radial distribution bending is formed.
2. CMOS chip flexible support structure as described in claim 1, which is characterized in that the multiple flexible arm (42) is 3 Or 4.
3. CMOS chip flexible support structure as claimed in claim 2, which is characterized in that the multiple flexible arm (42) is 3.
4. CMOS chip flexible support structure as described in claim 1, which is characterized in that further include chip (1), heat conduction copper sheet (3) and metal installation base (2) are arranged in nut (5), chip (1) lower end, and screw rod is arranged in metal installation base (2) lower end, The heat conduction copper sheet (3) and the flexible arm (42) are equipped with through-hole compatible with screw rod, and the screw rod passes through the through-hole, institute It states nut (5) to be mounted on the screw rod, tightens the nut (5) and press the heat conduction copper sheet (3) and the flexible arm (42) Tightly on the metal installation base (2).
5. CMOS chip flexible support structure as claimed in claim 4, which is characterized in that the heat conduction copper sheet (3) is mounted on institute It states between metal installation base (2) and soft section (4).
CN201910618369.1A 2019-07-10 2019-07-10 A kind of CMOS chip flexible support structure Pending CN110349923A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910618369.1A CN110349923A (en) 2019-07-10 2019-07-10 A kind of CMOS chip flexible support structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910618369.1A CN110349923A (en) 2019-07-10 2019-07-10 A kind of CMOS chip flexible support structure

Publications (1)

Publication Number Publication Date
CN110349923A true CN110349923A (en) 2019-10-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910618369.1A Pending CN110349923A (en) 2019-07-10 2019-07-10 A kind of CMOS chip flexible support structure

Country Status (1)

Country Link
CN (1) CN110349923A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008302499A (en) * 2007-06-05 2008-12-18 Toyota Motor Corp Jig for cooling piping and method for manufacturing cooling apparatus
JP2010194896A (en) * 2009-02-25 2010-09-09 Brother Ind Ltd Substrate storage member, and liquid delivery device
KR101317251B1 (en) * 2007-12-31 2013-10-10 (주) 미코에스앤피 Probe Card
CN203491869U (en) * 2013-09-02 2014-03-19 比亚迪股份有限公司 Motor and lens module group
CN103792645A (en) * 2014-01-24 2014-05-14 中国科学院长春光学精密机械与物理研究所 Small reflector ultrahigh power thermal stability supporting structure
CN109116502A (en) * 2018-08-15 2019-01-01 中国科学院光电技术研究所 Optical element flexible support and surface shape precision improving method
CN109683278A (en) * 2019-01-30 2019-04-26 杭州电子科技大学 Heavy caliber infrared telescope adjustable support based on gradient type porous structure

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008302499A (en) * 2007-06-05 2008-12-18 Toyota Motor Corp Jig for cooling piping and method for manufacturing cooling apparatus
KR101317251B1 (en) * 2007-12-31 2013-10-10 (주) 미코에스앤피 Probe Card
JP2010194896A (en) * 2009-02-25 2010-09-09 Brother Ind Ltd Substrate storage member, and liquid delivery device
CN203491869U (en) * 2013-09-02 2014-03-19 比亚迪股份有限公司 Motor and lens module group
CN103792645A (en) * 2014-01-24 2014-05-14 中国科学院长春光学精密机械与物理研究所 Small reflector ultrahigh power thermal stability supporting structure
CN109116502A (en) * 2018-08-15 2019-01-01 中国科学院光电技术研究所 Optical element flexible support and surface shape precision improving method
CN109683278A (en) * 2019-01-30 2019-04-26 杭州电子科技大学 Heavy caliber infrared telescope adjustable support based on gradient type porous structure

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Application publication date: 20191018

RJ01 Rejection of invention patent application after publication