CN110349903A - A kind of novel chip adsorbent equipment - Google Patents
A kind of novel chip adsorbent equipment Download PDFInfo
- Publication number
- CN110349903A CN110349903A CN201910626778.6A CN201910626778A CN110349903A CN 110349903 A CN110349903 A CN 110349903A CN 201910626778 A CN201910626778 A CN 201910626778A CN 110349903 A CN110349903 A CN 110349903A
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- adsorbent equipment
- pedestal
- fixedly connected
- outside
- suction inlet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Sampling And Sample Adjustment (AREA)
- Manipulator (AREA)
Abstract
The present invention relates to chip testing technology fields, and disclose a kind of novel chip adsorbent equipment, including adsorbent equipment, the lower inside of the adsorbent equipment slidably connects suction inlet dust guard, it the surface of suction inlet dust guard and is mounted on adsorbent equipment and is fixedly connected with the first compressed spring, the upper end of adsorbent equipment is fixedly connected with the first rolling bearing, and pedestal is fixedly connected with above the first rolling bearing, and the lower inside of pedestal is fixedly connected with ratchet shell.It is moved in wide sliding slot by the rectangular shaped slider on suction inlet dust guard, first compressed spring pushes the playback of suction inlet dust guard, to the inner wall cleaning of sucker and suction ring during playback, and device to hole and suction ring are closed, the external clamping structure being arranged on ratchet shell and the single direction turning mechanism cooperation with the setting of adsorbent equipment bottom outside, this knot have haved the function that adjust chip angle and fixed chip.
Description
Technical field
The present invention relates to chip testing technology field, specially a kind of novel chip adsorbent equipment.
Background technique
In recent years, integrated circuit is partial to smaller overall dimensions development, and each chip is allowed to encapsulate more electricity
Road, the intelligent articles volume that us can in this way made is smaller easy to carry, as outer dimension reduces, almost all of finger
Mark improves, and unit cost and switch power consumption decline, speed improve.Modern computing, manufacture, traffic system and internet,
The presence of integrated circuit is all relied on, so integrated circuit bring digital revolution is very important thing in human history
Part.
It is mounted on chip after the completion of production of integrated circuits, when detection needs chip to be measured to be adsorbed on probe, still
Current chip is all smaller to cause adsorption capacity insufficient, and sucker is easy blocking, has devised ten to solve these problems certainly
The suction nozzles such as word, rectangle, porous improve the adsorption capacity of chip, however the solution sucker that these can not be basic holds susceptible to plugging ask
Topic, and traditional adsorbent equipment cannot rotate adjusting, cannot be efficiently completed the test job to the integrated circuit on chip.
We have proposed a kind of novel chip adsorbent equipments in order to solve problem above.
Summary of the invention
(1) the technical issues of solving
In view of the deficiencies of the prior art, the present invention provides a kind of novel chip adsorbent equipments, and having every task terminates
The advantages of function of closing sucker, rotating device are when Shi Zidong clears up sucker inner wall and do not work to improve working efficiency, solution
Sucker of having determined is easy blocking, traditional adsorbent equipment cannot rotate adjusting, cannot be efficiently completed to the integrated circuit on chip
Test job the problem of.
(2) technical solution
Closing sucker, rotating device are when having automatic cleaning sucker inner wall for realization is above-mentioned and do not work to improve work
The purpose of efficiency, the invention provides the following technical scheme: a kind of novel chip adsorbent equipment, including adsorbent equipment, the absorption
The lower inside of device slidably connects suction inlet dust guard, the surface of suction inlet dust guard and is mounted on adsorbent equipment solid
Surely it is connected with the first compressed spring, the upper end of adsorbent equipment is fixedly connected with the first rolling bearing, the top of the first rolling bearing
It is fixedly connected with pedestal, the lower inside of pedestal is fixedly connected with ratchet shell, is fixedly connected on the inside of the upper end of ratchet shell
Second rolling bearing, the roll inside of the second rolling bearing are connected with ratchet device, are fixedly connected with vacuum right above pedestal
Pipeline.
Preferably, the inside of the adsorbent equipment offers wide sliding slot, the inside of adsorbent equipment be connected with wide sliding slot and
Its top offers narrow sliding slot, and adsorbent equipment interior lower end offers sucker respectively and inhales ring, wide sliding slot and narrow sliding slot be used to and
Suction inlet dust guard is used cooperatively, and on the one hand makes sucker and suction ring open-minded, is on the other hand increased vacuum tube and is extracted space.
Preferably, the upper outside of the suction inlet dust guard is fixedly installed with rectangular shaped slider, and rectangular shaped slider is that suction inlet is anti-
Dirt device moves up and down, and the position by changing suction inlet dust guard can prevent sucker and suction ring blocking on adsorbent equipment, and
And sucker can be cleared up when using every time automatically and inhales the inner wall of ring.
Preferably, the inner lower of the pedestal offers rotation circular trough, and the middle position of the lower part two sides of pedestal is solid
Dingan County is equipped with circular column, rotates circular trough to place the adsorbent equipment and inside and outside ratchet of rotation.
Preferably, the lower outside for inhaling pedestal offers trapezoidal groove, the lower outside of pedestal and in trapezoidal groove
Left pivot movement be connected with pawl, the lower outside of pedestal and block is fixedly installed on the left of pawl, outside the lower part of pedestal
Adsorbent equipment and inside and outside may be implemented in side and and being fixedly connected with the second compressed spring on the right side of trapezoidal groove, this structure
Unidirectional rotation of ratchet.
Preferably, arc groove, the outside of ratchet shell and the right side in arc groove are offered on the outside of the ratchet shell
Be rotatably connected to runing rest, the outside of ratchet shell and be provided with pressing plate being mounted on runing rest, ratchet shell it is interior
Portion and clamping block is provided with being mounted on runing rest, ratchet shell is fixedly connected with third by pressing plate thereon and compresses
Bullet, this structure, which is realized through the pressing plate on ratchet shell, realizes clamping adsorbent equipment, and same can cross pressing plate
To manually adjust the rotation angle of rotating device.
Preferably, offer rectangular recess on the inside of the upper end of the rotating device, in terms of rectangular recess inside and outside ratchet and the
Two rolling bearings are coupled.
Preferably, the inside and outside ratchet of the inside and outside ratchet is contrary, and inner part may be implemented in the inside and outside ratchet of opposite direction
With external clamping function.
(3) beneficial effect
Compared with prior art, the present invention provides a kind of novel chip adsorbent equipment, have it is following the utility model has the advantages that
1, novel chip adsorbent equipment, by vacuum pipe to the internal air exhausting of adsorbent equipment, on suction inlet dust guard
Rectangular shaped slider moved in wide sliding slot, when moving to narrow sliding slot, sucker and inhale ring be in complete opening state, the dust-proof dress of suction inlet
It sets continuation to move in narrow sliding slot, when moving to narrow sliding slot, since there are annulus hole skies for the junction of narrow sliding slot and wide sliding slot
Gap increases, so the gas passage in adsorbent equipment becomes larger, the annulus gap between narrow sliding slot and suction inlet dust guard at this time
Gas extraction puts more effort, at the end of work, the first compressed spring push suction inlet dust guard playback, during playback device to hole and
The inner wall cleaning for inhaling ring closes sucker and suction ring after the completion of playback, and This arrangement solves suckers to hold susceptible to plugging ask
Topic.
2, the novel chip adsorbent equipment, the position restriction by the pawl on pedestal by block, this makes inside and outside spine
Wheel can only rotate clockwise, and thrust of the pressing plate and clamping block being similarly arranged on ratchet shell by third compression bullet is not having
When pressing pressing plate, this rotate inside and outside ratchet can only needle counterclockwise, pass through the external card tight knot being arranged on ratchet shell
Structure and cooperate with the single direction turning mechanism being arranged on the outside of base bottom, this knot, which has reached, adjusts chip angle and fixed chip
Effect.Adjusting cannot be rotated to solve traditional adsorbent equipment, cannot be efficiently completed to the integrated circuit on chip
The problem of test job.
Detailed description of the invention
Fig. 1 is entirety sectional view of the present invention；
Fig. 2 is the portion A ratchet cross-sectional view of the present invention；
Fig. 3 is the portion B adsorbent equipment cross-sectional view of the present invention；
Fig. 4 is pedestal front sectional view of the present invention；
Fig. 5 is pedestal overlooking structure diagram of the present invention；
Fig. 6 is ratchet front section view inside and outside the present invention
Fig. 7 is the external clamping apparatus structure side schematic view of the present invention.
In figure: ring, 2 suction inlet dust guards, 201 are inhaled in 1 adsorbent equipment, 101 wide sliding slots, 102 narrow sliding slots, 103 suckers, 104
It is rectangular shaped slider, 3 first compressed springs, 4 first rolling bearings, 5 pedestals, 501 rotation circular troughs, 502 circular columns, 503 trapezoidal recessed
Slot, 504 pawls, 505 blocks, 506 second compressed springs, 6 ratchet shells, 601 arc grooves, 602 runing rests, 603 pressing plate,
604 clamping blocks, 605 thirds compression bullet, 606 rectangular recess, 7 second rolling bearings, ratchet, 9 vacuum pipes inside and outside 8.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-7, a kind of novel chip adsorbent equipment, including adsorbent equipment 1, the inside of adsorbent equipment 1 is please referred to offer
Wide sliding slot 101, the inside of adsorbent equipment 1 are connected with wide sliding slot 101 and offer narrow sliding slot 102 above it, in adsorbent equipment 1
Subordinate end offers sucker 103 respectively and inhales ring 104, and wide sliding slot 101 and narrow sliding slot 102 are used to cooperate with suction inlet dust guard 2
It uses, on the one hand makes sucker 103 and suction ring 104 open-minded, on the other hand increase vacuum tube and extract space, adsorbent equipment 1
Lower inside slidably connects suction inlet dust guard 2, and the upper outside of suction inlet dust guard 2 is fixedly installed with rectangular shaped slider 201,
Rectangular shaped slider 201 is that suction inlet dust guard 2 moves up and down, and the position by changing suction inlet dust guard 2 can prevent adsorbent equipment
On sucker 103 and inhale ring 104 block, and every time use when can clear up automatically sucker 103 and inhale ring 104 inner wall, inhale
It the surface of mouthful dust guard 2 and is mounted on adsorbent equipment 1 and is fixedly connected with the first compressed spring 3, the upper end of adsorbent equipment 1
It is fixedly connected with the first rolling bearing 4.
The top of first rolling bearing 4 is fixedly connected with pedestal 5, and the inner lower of pedestal 5 offers rotation circular trough
501, the middle position of the lower part two sides of pedestal 5 is fixedly installed with circular column 502, rotates circular trough 501 to place rotation
Adsorbent equipment 1 and inside and outside ratchet 8, the lower inside of pedestal 5 are fixedly connected with ratchet shell 6, and the outside of ratchet shell 6 offers
Arc groove 601, the outside of ratchet shell 6 and is rotatably connected to runing rest 602 on the right side of arc groove 601, ratchet shell 6
Outside and pressing plate 603 is provided with being mounted on runing rest 602, the inside of ratchet shell 6 and be mounted on runing rest 602
It is provided with clamping block 604, ratchet shell 6 is fixedly connected with third by pressing plate 603 thereon and compresses bullet 605, this structure
It realizes through the pressing plate 603 on ratchet shell 6 and realizes clamping adsorbent equipment 1, and hand can be carried out with pressing plate 603 is crossed
The rotation angle of dynamic adjusting rotating device, the upper end inside of rotating device 6 offer rectangular recess 606,606 aspect of rectangular recess
It is fixedly connected with the second rolling bearing 7 on the inside of the upper end for being coupled ratchet shell 6 of inside and outside ratchet 8 and the second rolling bearing 7,
The roll inside of second rolling bearing 7 is connected with ratchet device 8, and the inside and outside ratchet of inside and outside ratchet 8 is contrary, opposite direction
Inner part and external clamping function may be implemented in inside and outside ratchet, and the surface of pedestal 5 is fixedly connected with vacuum pipe 9.
Working principle: when not working, suction inlet dust guard 2 is in the lower end of adsorbent equipment 1, at this point, inhaling 103 holes and inhaling ring
104 are in closed state, and at work, by vacuum pipe 7 to the internal air exhausting of adsorbent equipment 1, suction inlet dust guard 2 is upward
Mobile, the rectangular shaped slider 201 on suction inlet dust guard 2 moves in wide sliding slot 101, when moving to narrow sliding slot 102, due to narrow
There are the increases of annulus hole gap for the junction of sliding slot 102 and wide sliding slot 101, so the gas passage in adsorbent equipment 1 becomes larger, inhale
Hole 103 and suction ring 104 are in complete opening state, and suction inlet dust guard 2 is oriented to by narrow sliding slot 102 and is up moved at this time, is inhaled
The mouth continuation of dust guard 2 is moved in narrow sliding slot 102, at this time since the intermediate gaps of suction inlet dust guard 2 and narrow sliding slot 102 become
Greatly, a generally annulus hole, so that the gas extraction in the annulus gap between narrow sliding slot 102 and suction inlet dust guard 2
It puts more effort, at the end of work, the first compressed spring 3 pushes suction inlet dust guard 2 to playback, to 103 holes and suction during playback
The inner wall cleaning of ring 104, after the completion of playback to 103 holes and inhale ring 104 close, while the pawl 504 on pedestal 5 by
The position restriction of block 505, this rotate clockwise inside and outside ratchet 8 can only, the pressing plate being similarly arranged on ratchet shell 6
603 and clamping block 604 by third compression bullet 605 thrust, when not pressing pressing plate 603, this makes inside and outside 8, ratchet
It needle can rotate, turn by the external clamping structure being arranged on ratchet shell 6 and with the unidirectional of 5 bottom outside of pedestal setting counterclockwise
Dynamic device cooperation, this knot have haved the function that adjust chip angle and fixed chip.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (8)
1. a kind of novel chip adsorbent equipment, including adsorbent equipment (1), it is characterised in that: the interior subordinate of the adsorbent equipment (1)
Side slidably connects suction inlet dust guard (2), the surface of suction inlet dust guard (2) and is mounted on adsorbent equipment (1) fixed
It is connected with the first compressed spring (3), the upper end of adsorbent equipment (1) is fixedly connected with the first rolling bearing (4), the first rolling bearing
(4) it is fixedly connected with above pedestal (5), the lower inside of pedestal (5) is fixedly connected with rotating device (6), rotating device (6)
Upper end on the inside of be fixedly connected with the second rolling bearing (7), the roll inside of the second rolling bearing (7) is connected with ratchet device
(8), vacuum pipe (9) are fixedly connected with right above pedestal (5).
2. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: the adsorbent equipment (1) it is interior
Portion offers wide sliding slot (101), and the inside of adsorbent equipment (1) is connected with wide sliding slot (101) and offers narrow sliding slot above it
(102), adsorbent equipment (1) interior lower end offers sucker (103) respectively and inhales ring (104).
3. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: the suction inlet dust guard (2)
Upper outside be fixedly installed with rectangular shaped slider (201).
4. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: the interior subordinate of the pedestal (5)
Side offers rotation circular trough (501), and the middle position of the lower part two sides of pedestal (5) is fixedly installed with circular column (502).
5. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: the lower part for inhaling pedestal (5)
Outside offers trapezoidal groove (503), the lower outside of pedestal (5) and the left pivot movement in trapezoidal groove (503) is connected with spine
Pawl (504), the lower outside of pedestal (5) and is fixedly installed with block (505), the lower part of pedestal (5) on the left of pawl (504)
Outside and and being fixedly connected with the second compressed spring (506) on the right side of trapezoidal groove (503).
6. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: outside the rotating device (6)
Side offers arc groove (601), the outside of rotating device (6) and is rotatably connected to runing rest on the right side of arc groove (601)
(602), it the outside of rotating device (6) and is provided with pressing plate (603) being mounted on runing rest (602), rotating device (6)
Internal and be provided with clamping block (604) being mounted on runing rest (602), rotating device (6) passes through pressing plate (603) thereon
It is fixedly connected with third compression bullet (605).
7. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: the rotating device (6) it is upper
End inside offers rectangular recess (606).
8. a kind of novel chip adsorbent equipment according to claim 1, it is characterised in that: ratchet (8) is interior inside and outside described
Outer ratchet is contrary.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910626778.6A CN110349903B (en) | 2019-07-11 | 2019-07-11 | Chip adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910626778.6A CN110349903B (en) | 2019-07-11 | 2019-07-11 | Chip adsorption device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110349903A true CN110349903A (en) | 2019-10-18 |
| CN110349903B CN110349903B (en) | 2021-11-09 |
Family
ID=68174951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910626778.6A Active CN110349903B (en) | 2019-07-11 | 2019-07-11 | Chip adsorption device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110349903B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112394202A (en) * | 2020-10-29 | 2021-02-23 | 西安微电子技术研究所 | Interconnection test fixture and interconnection test method for silicon adapter plate |
| CN115627533A (en) * | 2022-11-01 | 2023-01-20 | 江苏汉印机电科技股份有限公司 | High-temperature silicon carbide epitaxial wafer taking equipment |
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| CN206349383U (en) * | 2016-12-21 | 2017-07-21 | 江苏晶鼎电子材料有限公司 | A kind of cell silicon chip automatic dust removing mechanism |
| CN108705690A (en) * | 2018-05-29 | 2018-10-26 | 李涵 | A kind of semiconductor crystal wafer scribing machine |
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| KR101016325B1 (en) * | 2008-12-18 | 2011-02-22 | 주식회사 티에프이스트포스트 | vacuum adsorption picker test for semiconductor package using ejectpin |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112394202A (en) * | 2020-10-29 | 2021-02-23 | 西安微电子技术研究所 | Interconnection test fixture and interconnection test method for silicon adapter plate |
| CN112394202B (en) * | 2020-10-29 | 2023-06-27 | 珠海天成先进半导体科技有限公司 | Interconnection test fixture and interconnection test method for silicon adapter plate |
| CN115627533A (en) * | 2022-11-01 | 2023-01-20 | 江苏汉印机电科技股份有限公司 | High-temperature silicon carbide epitaxial wafer taking equipment |
| CN115627533B (en) * | 2022-11-01 | 2023-11-14 | 江苏汉印机电科技股份有限公司 | Silicon carbide epitaxial wafer high temperature gets piece equipment |
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| CN110349903B (en) | 2021-11-09 |
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