CN110346846A - Anti-reflection waterproof membrane and preparation method thereof, optical lens - Google Patents
Anti-reflection waterproof membrane and preparation method thereof, optical lens Download PDFInfo
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- CN110346846A CN110346846A CN201910694392.9A CN201910694392A CN110346846A CN 110346846 A CN110346846 A CN 110346846A CN 201910694392 A CN201910694392 A CN 201910694392A CN 110346846 A CN110346846 A CN 110346846A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/111—Anti-reflection coatings using layers comprising organic materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
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Abstract
The invention discloses a kind of anti-reflection waterproof membranes and preparation method thereof, optical lens, the anti-reflection waterproof membrane includes substrate, the anti-reflection layer on substrate and the waterproof layer on anti-reflection layer, the anti-reflection layer includes several low-index film and high refractive index layer being arranged alternately, the refractive index of the low-index film is less than or equal to 1.5, the refractive index of high refractive index layer is greater than or equal to 1.8, and the material of waterproof layer contains fluoride.Anti-reflection waterproof membrane of the invention passes through the setting of anti-reflection layer and membrane waterproofing, anti-reflection layer is arranged alternately by high low-index film, the average reflectance in visible-range can be substantially reduced, greatly improve light transmission rate, membrane waterproofing is capable of increasing the contact angle of water droplet, Water-proof and oil-proof, the anti-fouling effect for improving film solve the problems, such as that the remaining influences such as rainy day camera lens surface water dirt are imaged.
Description
Technical field
The present invention relates to optical film technology fields, more particularly to a kind of anti-reflection waterproof membrane and preparation method thereof, optics
Camera lens.
Background technique
Light transmission rate is an important parameter of on-vehicle lens, and an on-vehicle lens group usually has 4~6 eyeglasses, 8~12
A face, each face visible reflectance of non-anti-reflection coated are 4~8%, and entire camera lens light transmission rate is about 46%, lower light
It is dim that line light penetration will cause image, and picture center is in the bright surrounding dark in the big generation center of periphery difference the case where, Yi Jiguang
Line occurs in camera lens internal reflection veiling glare, ghost, at situations such as image distortions.
In addition, on-vehicle lens are in rainy day and bad weather in use, the pollutants such as camera lens remained on surface droplet, mud are attached
, generation, which is blocked, can not carry out normal imaging, be easy to cause the generation of accident.
Therefore, in view of the above technical problems, it is necessary to which a kind of anti-reflection waterproof membrane and preparation method thereof, optical lens are provided.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of anti-reflection waterproof membranes and preparation method thereof, optical lens.
To achieve the goals above, the technical solution that one embodiment of the invention provides is as follows:
A kind of anti-reflection waterproof membrane, the anti-reflection waterproof membrane include substrate, the anti-reflection layer on substrate and be located at anti-reflection layer
On waterproof layer, the anti-reflection layer includes several low-index films and high refractive index layer being arranged alternately, the low refraction
The refractive index of rate film layer is less than or equal to 1.5, and the refractive index of high refractive index layer is greater than or equal to 1.8, and the material of waterproof layer contains
There is fluoride.
As a further improvement of the present invention, the material of the low-index film is bifluoride magnesium or silica, height
The material of refractivity film layer is tantalum pentoxide, titanium dioxide or zirconium dioxide, and the fluoride is that alkylsiloxane is functional
Perfluoropolyether hybridized polymer, the alkoxy silane blocked by perfluoropolyether polymer and single function is reacted to be formed.
As a further improvement of the present invention, the anti-reflection layer includes the first low-index film being arranged alternately, first
High refractive index layer, the second low-index film, the second high refractive index layer, third low-index film, third high refractive index
Film layer, the 4th low-index film.
As a further improvement of the present invention, in the anti-reflection waterproof membrane:
First low-index film with a thickness of 52nm~58nm；
First high refractive index layer with a thickness of 17nm~19nm；
Second low-index film with a thickness of 45nm~51nm；
Second high refractive index layer with a thickness of 44nm~49nm；
Third low-index film with a thickness of 18nm~20nm；
Third high refractive index layer with a thickness of 39nm~43nm；
4th low-index film with a thickness of 101nm~111nm；
Waterproof layer with a thickness of 45nm~55nm.
As a further improvement of the present invention, in the anti-reflection waterproof membrane:
First low-index film with a thickness of 55.4nm；
First high refractive index layer with a thickness of 17.9nm；
Second low-index film with a thickness of 48.1nm；
Second high refractive index layer with a thickness of 46.6nm；
Third low-index film with a thickness of 18.9nm；
Third high refractive index layer with a thickness of 41.4nm；
4th low-index film with a thickness of 106.8nm；
Waterproof layer with a thickness of 50nm.
Another embodiment of the present invention provides technical solution it is as follows:
A kind of preparation method of anti-reflection waterproof membrane, the preparation method include:
S1, a substrate is provided；
S2, anti-reflection layer is deposited on substrate by passing through ion source auxiliary electron rifle vapour deposition method, anti-reflection layer includes several friendships
For the low-index film and high refractive index layer of setting, the refractive index of low-index film is less than or equal to 1.5, high refractive index
The refractive index of film layer is greater than or equal to 1.8；
S3, waterproof layer is deposited on anti-reflection layer by passing through electron gun vapour deposition method, the material of waterproof layer is fluoride.
As a further improvement of the present invention, the deposition rate of low-index film is less than or equal in the step S2
0.6nm/s, the deposition rate of high refractive index layer are less than or equal to 0.3nm/s, and the deposition rate of waterproof layer is less than in step S3
Or it is equal to 1.5nm/s.
As a further improvement of the present invention, the vacuum degree that beginning is deposited in the step S2 is 0.00002Torr, deposition
Temperature is 295 DEG C~305 DEG C；The vacuum degree that beginning is deposited in step S3 is 0.00002Torr, and depositing temperature is 245 DEG C~255
℃。
As a further improvement of the present invention, the deposition of thick of the waterproof layer, low-index film and high refractive index layer
Degree is monitored by way of crystal oscillation.
The technical solution that yet another embodiment of the invention provides is as follows:
A kind of optical lens, which is characterized in that the optical lens includes several optical mirror slips, and the optical mirror slip is upper
The anti-reflection waterproof membrane stated, the substrate in the anti-reflection waterproof membrane are glass lens.
The beneficial effects of the present invention are:
Anti-reflection waterproof membrane passes through the setting of anti-reflection layer and membrane waterproofing, and anti-reflection layer is arranged alternately by high low-index film,
The average reflectance in visible-range can be substantially reduced, light transmission rate is greatly improved, membrane waterproofing is capable of increasing water droplet
Contact angle improves Water-proof and oil-proof, the anti-fouling effect of film, efficiently solves the imaging of the remaining influences such as rainy day camera lens surface water dirt
The problem of.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The some embodiments recorded in invention, for those of ordinary skill in the art, without creative efforts,
It is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of anti-reflection waterproof membrane in first embodiment in the present invention；
Fig. 2 is the flow diagram of anti-reflection waterproof membrane preparation method in the present invention；
Fig. 3 is the side structure schematic view of optical lens in second embodiment of the invention；
Fig. 4 is the schematic cross-sectional view of optical lens in second embodiment of the invention；
Fig. 5 is the side structure schematic view of glass lens in second embodiment of the invention；
Fig. 6 is reflectivity comparison diagram of the optical mirror slip in visible-range in second embodiment of the invention；
Fig. 7 is transmissivity comparison diagram of the optical mirror slip in visible-range in second embodiment of the invention；
Fig. 8 a is status diagram of the water droplet on the optical mirror slip for not plating waterproof layer in second embodiment of the invention；
Fig. 8 b is status diagram of the water droplet on the optical mirror slip for being coated with waterproof layer in second embodiment of the invention.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, below in conjunction with of the invention real
The attached drawing in example is applied, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described implementation
Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work, all should belong to protection of the present invention
Range.
Join shown in Fig. 1, the invention discloses a kind of anti-reflection waterproof membranes, anti-reflection layer 20 including substrate 10, on substrate,
And the waterproof layer 30 on anti-reflection layer, anti-reflection layer 20 include several low-index films and high refractive index film being arranged alternately
Layer.
Substrate is optical glass or optical plastic etc. in the present invention；The material of waterproof layer contains fluoride, and fluoride is alkane
Radical siloxane functionalized perfluoropolyethers (PFPE) hybridized polymer, by the alcoxyl of perfluoropolyether polymer and single function sealing end
Base silane is reacted to be formed.
The refractive index of low-index film is less than or equal to 1.5, and material is bifluoride magnesium or silica etc.；Height refraction
The refractive index of rate film layer is greater than or equal to 1.8, and material is tantalum pentoxide, titanium dioxide or zirconium dioxide etc..
Total number of plies of antireflective coating is 2~10 layers in the present invention, by suitable film layer quantity, can be effectively controlled plated film at
This, and optical mirror slip has the effect of antireflective, and specular gloss can be greatly reduced whereby.
Preferably, anti-reflection layer includes the 4 layers of low-index film and 3 layers of high refractive index layer being arranged alternately in the present invention,
Respectively the first low-index film 211, the first high refractive index layer 221, second the 212, second high refraction of low-index film
Rate film layer 222, third low-index film 213, third high refractive index layer 223, the 4th low-index film 214.
In anti-reflection waterproof membrane:
First low-index film with a thickness of 52nm~58nm；
First high refractive index layer with a thickness of 17nm~19nm；
Second low-index film with a thickness of 45nm~51nm；
Second high refractive index layer with a thickness of 44nm~49nm；
Third low-index film with a thickness of 18nm~20nm；
Third high refractive index layer with a thickness of 39nm~43nm；
4th low-index film with a thickness of 101nm~111nm；
Waterproof layer with a thickness of 45nm~55nm.
In the first embodiment of the present invention, anti-reflection waterproof membrane successively includes:
Substrate 10, the substrate are optical glass；
First low-index film, material are silica, with a thickness of 55.4nm, refractive index 1.46；
First high refractive index layer, material are titanium dioxide, with a thickness of 17.9nm, refractive index 2.34；
Second low-index film, material are silica, with a thickness of 55.4nm, refractive index 1.46；
Second high refractive index layer, material are titanium dioxide, with a thickness of 17.9nm, refractive index 2.34；
Third low-index film, material are silica, with a thickness of 55.4nm, refractive index 1.46；
Third high refractive index layer, material are titanium dioxide, with a thickness of 17.9nm, refractive index 2.34；
4th low-index film, material are silica, with a thickness of 55.4nm, refractive index 1.46；
Waterproof layer, material are alkylsiloxane functionalized perfluoropolyethers hybridized polymer, and with a thickness of 50nm, refractive index is
1.3。
The thickness deviation of each layer is ± 5% in the present embodiment.
The material selection of antireflective coating is upper extremely important, and thicknesses of layers is also required to accurately match, and thicknesses of layers benchmark is
1/4 wavelength of light weakens, it is desirable that the thickness of each film layer supports the reflection light of each layer mutually to minimize reflection light
Disappear, need to calculate initial membrane system using the method for equal effect, matrix method, is designed using the interlaced stacking of high low-refraction, and with
Computer software auxiliary optimization reaches the other thickness of optimal layer.Each thicknesses of layers after optimizing in the present invention joins above-mentioned specific thickness
Value.
Ginseng Fig. 3, Fig. 4 show one of second embodiment of the invention optical lens 100, and optical lens includes several light
Eyeglass 101 is learned, optical mirror slip includes glass lens 1011 and vapor deposition in anti-reflection layer 20 and waterproof on 1011 surface of glass lens
Layer 30, anti-reflection layer and waterproof layer are identical with above-described embodiment, are no longer repeated herein.
Join shown in Fig. 5, the spherical setting of 1011 lateral surface of glass lens in the present embodiment, side portion is in indent
Spherical surface, anti-reflection layer 20 and the vapor deposition of waterproof layer 30 are on the lateral surface of glass lens 1011.
Ginseng Fig. 6 show optical mirror slip in visible-range (450nm~650nm) reflectivity comparison diagram, it is seen then that not
The reflectivity of the optical mirror slip (Non-coating) of plated film is 7%~8%, and average reflectance is 7.2% or so, general light
Learning eyeglass and can achieve visible-range average reflectance is about 2.5% or so, the optical mirror slip (s-ar- in the present embodiment
Coating) visible-range average reflectance can be accomplished less than 1%.
Ginseng Fig. 7 show optical mirror slip in visible-range (450nm~650nm) transmissivity comparison diagram, it is seen then that not
The optical mirror slip transmitance of plated film is 85% or so, and the optical mirror slip transmitance in the present embodiment can reach 97% or more,
The transmitance of whole optical lens can reach 80% or more.
Join shown in Fig. 8 a, 8b, the water droplet contact angle of optical mirror slip is greater than or equal to 110 ° in the present invention, in the present embodiment
About 118 °, and the water droplet contact angle of anti-reflection film is about 59 ° in the prior art, it is seen then that the optical lens surface in the present embodiment
Hydrophobicity improves, and has good water-proof function, in addition, equally having good grease proofing, anti-pollution function.
Optical lens in the present invention is mainly used for automotive rear-view camera lens, side view camera lens and front-view mirror head etc..
Join shown in Fig. 2, the invention also discloses a kind of preparation methods of anti-reflection waterproof membrane, comprising:
S1, a substrate is provided；
S2, anti-reflection layer is deposited on substrate by passing through ion source auxiliary electron rifle vapour deposition method, anti-reflection layer includes several friendships
For the low-index film and high refractive index layer of setting, the refractive index of low-index film is less than or equal to 1.5, high refractive index
The refractive index of film layer is greater than or equal to 1.8；
S3, waterproof layer is deposited on anti-reflection layer by passing through electron gun vapour deposition method, the material of waterproof layer is fluoride.
Preferably, the deposition rate of low-index film is less than or equal to 0.6nm/s in step S2, high refractive index layer
Deposition rate is less than or equal to 0.3nm/s, and the vacuum degree for depositing beginning is 0.00002Torr, and depositing temperature is 295 DEG C~305
℃；
The deposition rate of waterproof layer is less than or equal to 1.5nm/s in step S3；Depositing the vacuum degree started is
0.00002Torr, depositing temperature are 245 DEG C~255 DEG C.
Further, the side that the deposition thickness of waterproof layer, low-index film and high refractive index layer passes through crystal oscillation
Formula is monitored.
Anti-reflection layer in the present invention assists vapour deposition method to deposit by ion source, auxiliary using electron gun system and ion source
Auxiliary system, the volatilization avoided between material influence.
As can be seen from the above technical solutions, the invention has the following beneficial effects:
Anti-reflection waterproof membrane passes through the setting of anti-reflection layer and membrane waterproofing, and anti-reflection layer is arranged alternately by high low-index film,
The average reflectance in visible-range can be substantially reduced, light transmission rate is greatly improved, membrane waterproofing is capable of increasing water droplet
Contact angle improves Water-proof and oil-proof, the anti-fouling effect of film, efficiently solves the imaging of the remaining influences such as rainy day camera lens surface water dirt
The problem of.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (10)
1. a kind of anti-reflection waterproof membrane, which is characterized in that the anti-reflection waterproof membrane include substrate, the anti-reflection layer on substrate and
Waterproof layer on anti-reflection layer, the anti-reflection layer include several low-index films and high refractive index layer being arranged alternately,
The refractive index of the low-index film is less than or equal to 1.5, and the refractive index of high refractive index layer is greater than or equal to 1.8, waterproof
The material of layer contains fluoride.
2. anti-reflection waterproof membrane according to claim 1, which is characterized in that the material of the low-index film is bifluoride
Magnesium or silica, the material of high refractive index layer are tantalum pentoxide, titanium dioxide or zirconium dioxide, and the fluoride is alkane
Radical siloxane functionalized perfluoropolyethers hybridized polymer, by the alkoxy silane of perfluoropolyether polymer and single function sealing end
It is reacted to form.
3. anti-reflection waterproof membrane according to claim 2, which is characterized in that the anti-reflection layer include be arranged alternately it is first low
Refractivity film layer, the first high refractive index layer, the second low-index film, the second high refractive index layer, third low refractive index film
Layer, third high refractive index layer, the 4th low-index film.
4. anti-reflection waterproof membrane according to claim 3, which is characterized in that in the anti-reflection waterproof membrane:
First low-index film with a thickness of 52nm~58nm；
First high refractive index layer with a thickness of 17nm~19nm；
Second low-index film with a thickness of 45nm~51nm；
Second high refractive index layer with a thickness of 44nm~49nm；
Third low-index film with a thickness of 18nm~20nm；
Third high refractive index layer with a thickness of 39nm~43nm；
4th low-index film with a thickness of 101nm~111nm；
Waterproof layer with a thickness of 45nm~55nm.
5. anti-reflection waterproof membrane according to claim 3, which is characterized in that in the anti-reflection waterproof membrane:
First low-index film with a thickness of 55.4nm；
First high refractive index layer with a thickness of 17.9nm；
Second low-index film with a thickness of 48.1nm；
Second high refractive index layer with a thickness of 46.6nm；
Third low-index film with a thickness of 18.9nm；
Third high refractive index layer with a thickness of 41.4nm；
4th low-index film with a thickness of 106.8nm；
Waterproof layer with a thickness of 50nm.
6. a kind of preparation method of anti-reflection waterproof membrane, which is characterized in that the preparation method includes:
S1, a substrate is provided；
S2, anti-reflection layer is deposited on substrate by passing through ion source auxiliary electron rifle vapour deposition method, anti-reflection layer includes that several alternatings are set
The refractive index of the low-index film and high refractive index layer set, low-index film is less than or equal to 1.5, high refractive index layer
Refractive index be greater than or equal to 1.8；
S3, waterproof layer is deposited on anti-reflection layer by passing through electron gun vapour deposition method, the material of waterproof layer is fluoride.
7. preparation method according to claim 6, which is characterized in that the deposition speed of low-index film in the step S2
Rate is less than or equal to 0.6nm/s, and the deposition rate of high refractive index layer is less than or equal to 0.3nm/s, waterproof layer in step S3
Deposition rate is less than or equal to 1.5nm/s.
8. preparation method according to claim 7, which is characterized in that the vacuum degree for depositing beginning in the step S2 is
0.00002Torr, depositing temperature are 295 DEG C~305 DEG C；The vacuum degree that beginning is deposited in step S3 is 0.00002Torr, deposition
Temperature is 245 DEG C~255 DEG C.
9. preparation method according to claim 7, which is characterized in that the waterproof layer, low-index film and high refraction
The deposition thickness of rate film layer is monitored by way of crystal oscillation.
10. a kind of optical lens, which is characterized in that the optical lens includes several optical mirror slips, and the optical mirror slip is power
Benefit require any one of 1~5 described in anti-reflection waterproof membrane, the substrate in the anti-reflection waterproof membrane is glass lens.
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| CN111399095A (en) * | 2020-05-15 | 2020-07-10 | 浙江舜宇光学有限公司 | Optical element, method of manufacturing optical element, and optical lens |
| CN111835896A (en) * | 2020-06-10 | 2020-10-27 | 深圳市锐欧光学电子有限公司 | Cell-phone camera apron coating film structure |
| CN111962026A (en) * | 2020-07-30 | 2020-11-20 | 苏州瑞康真空科技有限公司 | Film coating method for spectacle lens |
| CN113009601A (en) * | 2021-03-10 | 2021-06-22 | 浙江舜宇光学有限公司 | Antireflection film system, optical element, and method for producing film system |
| CN113031119A (en) * | 2020-09-21 | 2021-06-25 | 威海世高光电子有限公司 | Optical lens, manufacturing method of optical lens and micro projection system |
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| CN113031119A (en) * | 2020-09-21 | 2021-06-25 | 威海世高光电子有限公司 | Optical lens, manufacturing method of optical lens and micro projection system |
| CN113009601A (en) * | 2021-03-10 | 2021-06-22 | 浙江舜宇光学有限公司 | Antireflection film system, optical element, and method for producing film system |
| CN113009601B (en) * | 2021-03-10 | 2023-02-24 | 浙江舜宇光学有限公司 | Antireflection film system, optical element, and method for producing film system |
| CN113703074A (en) * | 2021-08-25 | 2021-11-26 | 孔运辉 | Optical film and forming method thereof |
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