CN110346041A - A kind of spectrometer - Google Patents
A kind of spectrometer Download PDFInfo
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- CN110346041A CN110346041A CN201910641022.9A CN201910641022A CN110346041A CN 110346041 A CN110346041 A CN 110346041A CN 201910641022 A CN201910641022 A CN 201910641022A CN 110346041 A CN110346041 A CN 110346041A
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- detection device
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- spectrum detection
- grating
- rowland circle
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- 238000001514 detection method Methods 0.000 claims abstract description 91
- 238000001228 spectrum Methods 0.000 claims abstract description 74
- 239000000835 fiber Substances 0.000 claims abstract description 35
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 230000003595 spectral effect Effects 0.000 claims abstract description 9
- 230000004888 barrier function Effects 0.000 claims abstract description 8
- 239000013307 optical fiber Substances 0.000 claims description 6
- 239000006185 dispersion Substances 0.000 claims description 5
- 230000011514 reflex Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 14
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001782 photodegradation Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Spectrometer provided by the invention belongs to the technical field of spectrometer, comprising: luminaire has at least two spectrum detection device interfaces, and the spectrum detection device interface includes fiber spectrum detection interface and Rowland circle spectral detection interface；Rowland circle spectrum detection device, it is connect with the Rowland circle spectrum detection device interface of the luminaire, with shell, the circular light room of rowland is formed in the inside of the shell, shell is equipped with entrance slit module, is disposed with grating module, zero level light barrier and CCD detection module along optical path in the light room；The grating module includes concave grating, and the concave grating only has one group；Fiber spectrum detection device and Rowland circle spectrum detection device are connect by the present invention with luminaire for the first time, while being acquired to light, in the case where not needing replacement grating, while obtaining the range of the wavelength of bigger measurement, easy to operate, convenient.
Description
Technical field
The present invention relates to the technical fields of spectrometer, and in particular to a kind of spectrometer.
Background technique
Spectrometer is also known as spectroscope, is the scientific instrument by the photodegradation of complicated component for spectrum line.It is by an incidence
Slit, a dispersion system, an imaging system and one or more exit slit compositions.With dispersion element by the electricity of radiation source
Wavelength required for magnetic radiation is isolated or wavelength region, and (or a certain wave band of scanning) carries out intensity survey on selected wavelength
It is fixed.
Combined Rowland circle device for spectrometer disclosed in Chinese patent literature CN102519590A, including Rowland circle pedestal, sieve
Orchid circle bracket goes out seamed belt, multiple CCD modules and multiple photomultiplier transit tube modules, and the Rowland circle bracket is fixedly mounted on rowland
On the upper surface of round bottom seat, Rowland circle bracket is in the arc-shaped, and the long stripes through hole of left and right settings is offered on leading flank, described
Arc-shaped seamed belt out is fixedly mounted on the leading flank of Rowland circle bracket, is opened in the upper and lower surfaces of the Rowland circle bracket
Equipped with multiple location holes, the location hole is connected to long stripes through hole, and the CCD module includes pallet, CCD element, reflective mirror
With reflective mirror fixed block, the CCD element is fixedly mounted on tray upper surface, and the reflective mirror is solid by reflective mirror fixed block
Dingan County is on pallet, and reflective mirror is located at the front upper side of CCD element, and the pallet is fixedly mounted on positioning hole, and described
Reflective mirror is located in the long stripes through hole, and the photomultiplier transit tube module includes photomultiplier tube and fixed plate, the photoelectricity
Multiplier tube is fixedly mounted on Rowland circle pedestal by fixed plate, and photomultiplier tube is located on front side of seamed belt, and optic spectrum line
It can be by long stripes through hole and seamed belt is irradiated on photomultiplier tube out.Above-mentioned combined Rowland circle device for spectrometer is by CCD mould
Block, which is placed on out on the inside of seamed belt circular arc, acquires spectral signal, and photomultiplier tube is mounted on out acquisition spectrum letter on front side of seamed belt circular arc
Number, and photomultiplier tube is not installed in the region of installation CCD module, realize that CCD module and photomultiplier tube acquire spectrum jointly
Signal ensure that the analysis precision of instrument, effectively increase separate unit spectrometer can analytical element number, to improve spectrum
Instrument can analyze the type of material.
With the development of technology, our demands to the measurement of wide range of wavelengths is realized are increasing.In the prior art, exist
It is general using the method for changing grating line if realizing the measurement of big wave-length coverage in one spectrometer, that is, carrying out different waves
When long range detection, the grating using different levels is needed to change, to realize the extension of wavelength.However, carrying out replacement grating
When operation, replacement and debugging to grating are more troublesome, so greatly inconvenient using spectrometer.
Summary of the invention
Therefore, the technical problem to be solved in the present invention is that separate unit spectrometer in the prior art is overcome to measure different waves
When long range, grating is needed replacing, causes to operate relatively complicated defect, to provide a kind of using Rowland circle light path principle light
Spectrometer.
In order to solve the above technical problems, spectrometer provided by the invention, comprising:
Luminaire has at least two spectrum detection device interfaces, and the spectrum detection device interface includes optical fiber light
Spectrum detection interface and Rowland circle spectral detection interface；
Rowland circle spectrum detection device is connect with the Rowland circle spectrum detection device interface of the luminaire, is had outer
Shell is formed with the circular light room of rowland in the inside of the shell, and shell is equipped with entrance slit module, the edge in the light room
Optical path is disposed with grating module, zero level light barrier and CCD detection module；
The grating module includes concave grating, and the concave grating only has one group.
Preferably, the light room of the Rowland circle spectrum detection device uses vacuum type.
Preferably, the CCD detection module includes multiple ccd sensors, and multiple ccd sensors pass through solid
Reservation is in the light room with the arrangement of rowland round.
Preferably, the ccd sensor has seven.
Preferably, the entrance slit module includes:
Entrance port is arranged on the shell of the Rowland circle spectrum detection device；
Cylindrical mirror is connected on the entrance port, and is extended towards the external of shell；
Condenser is connected on the outside port of the cylindrical mirror.
Preferably, further includes:
Fiber spectrum detection device detects interface with the fiber spectrum of the luminaire by optical fiber and connect.
Preferably, the fiber spectrum detection device includes:
Box body, has the entrance slit for entering light on side wall, and inside has the sky for accommodating detection module
Chamber；
Collimating mirror is obliquely installed in the tray interior towards the entrance slit direction；
Grating is opposite with the collimating mirror in the tray interior；
Ccd sensor, in the tray interior, for receiving the light beam of the grating dispersion.
Preferably, the fiber spectrum detection device further include: light trapping is arranged in the box body；It is described
Light trapping includes:
First light trapping is arranged between the entrance slit and the collimating mirror；
Second light trapping is arranged between the collimating mirror and the grating.
Preferably, the fiber spectrum detection device further include:
Focus lamp is oppositely arranged in the tray interior with the grating, passes through the reflective light beam for dispersing the grating
It reflexes in the ccd sensor.
Preferably, the light trapping further include:
Third light trapping is arranged between the focus lamp and the ccd sensor.
Technical solution of the present invention has the advantages that
1. spectrometer provided by the invention, including luminaire and Rowland circle spectrum detection device；Wherein, on light emitting device
There are two be suitable for install fiber spectrum detection device and Rowland circle spectrum detection device interface, by two equipment simultaneously with shine
Equipment connection, while light is acquired, in the case where not needing replacement grating, while obtaining the wavelength of bigger measurement
Range, it is easy to operate, it is convenient.
Rowland circle spectrum detection device is provided with grating module, zero level light barrier and CCD detection mould along optical path in light room
Block, wherein zero level light barrier is for stopping zero order light, in measurement wavelength in the 130-500nm light time, without passing through two light of setting
Grid disperse away zero order light, therefore its design simplifies the internal structure of grating module, reduces the volume of light room；
Needing to measure lithium, sodium when long wavelengths' element such as potassium, matches suitable fiber spectrum detection device, by optical fiber light
Spectrum detection device is linked into the fiber spectrum detection interface of luminaire, with optical fiber spectrum detection device and Rowland circle spectral detection
Device is used cooperatively the measurement that 130-800nm wavelength can be achieved.
Using fiber spectrum detection device as apolegamy, so that more diversification in purchase and use process, is selected according to demand
It selects, and realizes the combination of Rowland circle spectrum detection device and fiber spectrum detection device for the first time.
2. spectrometer provided by the invention, the light room of Rowland circle detection device is vacuum type, can be met by vacuumizing
The measurement demand of 130-200nm light.
It include 7 ccd sensors in CCD detection module, and by fixing seat with rowland 3. spectrometer provided by the invention
Round is fixed in light room；So that measurement range increases, resolution ratio is improved.
4. spectrometer provided by the invention, the entrance slit module includes: entrance port, cylindrical mirror and condenser；Light harvesting
The light that luminaire enters is focused by mirror；Cylindrical mirror amplifies the optical path come in by condenser, so as to better
It measures.
5. spectrometer provided by the invention, we pass through optical fiber for the interface in fiber spectrum detection device and luminaire
Connection, expands the detection range of the spectrometer, can measure lithium, sodium, and long wavelengths' element such as potassium adapts to more need
It asks.
6. spectrometer provided by the invention, the fiber spectrum detection device includes: box body, and collimating mirror, grating and CCD are passed
Sensor；By the simplification of fiber spectrometer structure and modularization, only retain the most crucial element of spectrometer, thus guaranteeing to be able to achieve survey
The simplification of fiber spectrometer is realized in the case where the precision of amount.
7. spectrometer provided by the invention, the fiber spectrum detection device includes light trapping, the light trapping includes the
One light trapping and the second light trapping stop in incident light wherein the first light trapping is arranged between entrance slit and collimating mirror
Stray light enters in optical path, that is, blocks high angle incident light intake collimating mirror, while can also prevent the stray light of collimating mirror
It is reflected into entrance slit region；Second light trapping is arranged between the collimating mirror and the grating, blocking reflected big angle
Degree light enters imaging pipeline；Third light trapping is arranged between the focus lamp and the ccd sensor, stops focus lamp anti-
It penetrates horizontal direction high angle scattered light and is reflected into the second ccd sensor.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the vertical view schematic diagram of internal structure of Rowland circle spectrum detection device.
Fig. 3 is the vertical view schematic diagram of internal structure of fiber spectrum detection device.
Description of symbols:
1, luminaire；2, Rowland circle spectrum detection device；3, concave grating；4, zero level light barrier；5, CCD detects mould
Block；6, entrance port；7, cylindrical mirror；8, condenser；9, fiber spectrum detection device；10, box body；11, collimating mirror；12, grating；
13, the second ccd sensor；14, the first light trapping；15, the second light trapping；16, focus lamp；17, third light trapping；18, incident
Slit.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second " are only
For descriptive purposes, it is not understood to indicate or imply relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
As long as in addition, the non-structure each other of technical characteristic involved in invention described below different embodiments
It can be combined with each other at conflict.
Spectrometer provided in this embodiment is as shown in Figure 1, comprising: luminaire 1, Rowland circle spectrum detection device 2 and light
Fine spectrum detection device 9, wherein fiber spectrum detection device 9 is the apolegamy that can be carried out according to actual needs, passes through Rowland circle light
Spectrum detection device 2 can realize the measurement of 130-500nm wavelength；It is filled by fiber spectrum detection device 9 and Rowland circle spectral detection
Set 2 be used cooperatively, it can be achieved that 130-800nm wavelength measurement.Fiber spectrum detection interface is provided on the luminaire 1
With Rowland circle spectral detection interface, wherein fiber spectrum detection device is connect with fiber spectrum detection interface, the inspection of Rowland circle spectrum
Device is surveyed to connect with Rowland circle spectral detection interface.
As shown in Fig. 2, the focal length of the optical texture of Rowland circle spectrum detection device 2 is 498.8mm, the Rowland circle spectrum
The interior of shell of detection device 2 is formed with the circular light room of rowland, and the light room uses vacuum type, can be mentioned by vacuumizing
The precision of high measurement 130-200nm light.The shell is equipped with entrance slit module, has grating module, zero in the light room
Grade wind deflector and CCD detection module 5.
Wherein, entrance slit module includes: the entrance port 6 being arranged on the shell of Rowland circle spectrum detection device, connection
Entrance port 6, and towards the condenser 8 on the external cylindrical mirror 7 extended of shell and the outside port for being connected to cylindrical mirror 7；Light
Grid module includes one group of concave grating 3, is matched with zero level light barrier 4, realizes that wavelength is the measurement of 130-500nm range.CCD
Detection module is photoelectric sensor, model TCD1304, pixel 3648, including multiple first ccd sensors, wherein this reality
Example is applied with seven, is arranged according to the exit positions in optical path are fixed by fixing seat in the light room with rowland round.
As shown in figure 3, fiber spectrum detection device 9, uses focal length for the Cheney of 72.5mm-Tener Czerny-Turner
Light channel structure, the wave-length coverage of measurement are 500-800nm, including box body 10, collimating mirror 11, grating 12, the second ccd sensor 13
It further include the first light trapping 14, the second light trapping 15 and third light trapping 17 with focus lamp 16；
Wherein, there is the entrance slit 18 for entering light, inside has for accommodating detection mould on the side wall of box body 10
The cavity of block has the collimating mirror 11 being obliquely installed towards entrance slit direction in the inside of box body 10, opposite with collimating mirror 11
The grating 12 of setting, the focus lamp 16 being oppositely arranged with grating 12, focus lamp 16 are reflected by the reflective light beam by grating dispersion
To the second ccd sensor；The first light trapping 14 is provided between entrance slit and collimating mirror 11, in collimating mirror 11 and grating
It is provided with the second light trapping 15 between 12, is provided with third light trapping between focus lamp 16 and the second ccd sensor 13.
In addition, when omission focus lamp 16, and the setting of the second ccd sensor 13 is existed as a kind of alternative embodiments
When at focus lamp 16, the third light trapping 17 can be omitted.
Application method and principle:
Fiber spectrum detection device 9 is connect with the fiber spectrum of luminaire 1 detection interface, Rowland circle spectrum detection device
2 connect with the Rowland circle spectral detection interface of luminaire 1, angle and the position of an optical element are adjusted, by luminaire 1
It issues and needs the light to be measured with measurement, Rowland circle spectrum detection device 2 and fiber spectrum detection device 9 simultaneously adopt light
Collection；
After light enters Rowland circle spectrum detection device 2, light is entered by entrance port 6, by leading to after 8 optically focused of condenser
Cylindrical mirror 7 is crossed, is projected on concave grating 3 later, CCD detection module is entered after the diffraction of concave grating 3, by recessed
Concave grating 3 enters during the optical path of CCD detection module, and zero level light barrier 4 absorbs the zero order light in optical path, makes
It is more accurate to obtain testing result, obtains analysis map by CCD detection module.
Meanwhile light has also entered in fiber spectrum detection device 9, incident light is after entrance slit entrance, collimated mirror
11 collimations, collimated light beam carries out diffraction by grating 12, then projects the second ccd sensor via 16 focal imaging of focus lamp
On, carry out data analysis.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (10)
1. a kind of spectrometer characterized by comprising
Luminaire (1) has at least two spectrum detection device interfaces, and the spectrum detection device interface includes fiber spectrum
Detect interface and Rowland circle spectral detection interface；
Rowland circle spectrum detection device (2) is connect with the Rowland circle spectrum detection device interface of the luminaire, is had outer
Shell is formed with the circular light room of rowland in the inside of the shell, and shell is equipped with entrance slit module, the edge in the light room
Optical path is disposed with grating module, zero level light barrier (4) and CCD detection module (5)；
The grating module includes concave grating (3), and the concave grating (3) only has one group.
2. spectrometer according to claim 1, which is characterized in that the light room of the Rowland circle spectrum detection device (2) is adopted
Use vacuum type.
3. spectrometer according to claim 1, which is characterized in that the CCD detection module includes multiple first CCD sensings
Device, multiple first ccd sensors are by fixing seat with the arrangement of rowland round in the light room.
4. spectrometer according to claim 3, which is characterized in that the ccd sensor has seven.
5. spectrometer according to claim 1, which is characterized in that the entrance slit module includes:
Entrance port (6) is arranged on the shell of the Rowland circle spectrum detection device (2)；
Cylindrical mirror (7) is connected on the entrance port (6), and is extended towards the external of shell；
Condenser (8), is connected on the outside port of the cylindrical mirror (7).
6. spectrometer according to any one of claims 1 to 5, which is characterized in that further include:
Fiber spectrum detection device (9) detects interface with the fiber spectrum of the luminaire (1) by optical fiber and connect.
7. spectrometer according to claim 6, which is characterized in that the fiber spectrum detection device (9) includes:
Box body (10), has the entrance slit (18) for entering light on side wall, and inside has for accommodating detection module
Cavity；
Collimating mirror (11) is obliquely installed in the tray interior towards the entrance slit (18) direction；
Grating (12) is opposite with the collimating mirror (11) in the tray interior；
Second ccd sensor (13), in the tray interior, for receiving the light beam of the grating dispersion.
8. spectrometer according to claim 7, which is characterized in that the fiber spectrum detection device (9) further include: light is fallen into
Trap is arranged in the box body；The light trapping includes:
First light trapping (14) is arranged between the entrance slit and the collimating mirror (11)；
Second light trapping (15) is arranged between the collimating mirror (11) and the grating (12).
9. spectrometer according to claim 8, which is characterized in that the fiber spectrum detection device further include:
Focus lamp (16), it is internal in the box body (10), it is oppositely arranged with the grating (12), by reflective by the grating
(12) light beam dispersed reflexes in second ccd sensor (13).
10. spectrometer according to claim 9, which is characterized in that the light trapping further include:
Third light trapping (17) is arranged between the focus lamp (16) and second ccd sensor (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910641022.9A CN110346041A (en) | 2019-07-16 | 2019-07-16 | A kind of spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910641022.9A CN110346041A (en) | 2019-07-16 | 2019-07-16 | A kind of spectrometer |
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| Publication Number | Publication Date |
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| CN110346041A true CN110346041A (en) | 2019-10-18 |
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| CN201910641022.9A Pending CN110346041A (en) | 2019-07-16 | 2019-07-16 | A kind of spectrometer |
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| CN108254075A (en) * | 2018-01-04 | 2018-07-06 | 南京邮电大学 | A kind of micro integrated CMOS fiber spectrometers |
| CN109297927A (en) * | 2018-08-21 | 2019-02-01 | 深圳市太赫兹科技创新研究院 | The debugging device and method of spectrometer |
| CN210089856U (en) * | 2019-07-16 | 2020-02-18 | 昆山书豪仪器科技有限公司 | Spectrum appearance |
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