CN110333223A - The recognition methods of black phosphorus crystal orientation and device - Google Patents
The recognition methods of black phosphorus crystal orientation and device Download PDFInfo
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- CN110333223A CN110333223A CN201910639342.0A CN201910639342A CN110333223A CN 110333223 A CN110333223 A CN 110333223A CN 201910639342 A CN201910639342 A CN 201910639342A CN 110333223 A CN110333223 A CN 110333223A
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- 239000013078 crystal Substances 0.000 title claims abstract description 171
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title claims abstract description 167
- 238000000034 method Methods 0.000 title claims abstract description 50
- 230000010287 polarization Effects 0.000 claims abstract description 121
- 238000001069 Raman spectroscopy Methods 0.000 claims abstract description 97
- 238000001228 spectrum Methods 0.000 claims abstract description 24
- 238000013075 data extraction Methods 0.000 claims abstract description 12
- 239000011574 phosphorus Substances 0.000 claims description 9
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 30
- 238000010586 diagram Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 241001269238 Data Species 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- -1 phosphorus alkene Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4792—Polarisation of scatter light
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention provides a kind of recognition methods of black phosphorus crystal orientation and devices, this method comprises: the incident light for acquiring different polarization angle is irradiated the Raman diffused light spectrum information at generated target signature peak to black phosphorus to be identified under Raman system orthogonal polarization modes；The Raman diffused light spectrum information at target signature peak corresponding to the incident light to different polarization angle carries out data extraction, obtains target data pair；The crystal orientation of black phosphorus to be identified is determined according to fitting result to being fitted to target data by the Raman scattering effectiveness formula at target signature peak.The crystal orientation accuracy for the black phosphorus to be identified that the recognition methods of black phosphorus crystal orientation of the invention finally identifies is good, when being identified to the black phosphorus to be identified of different-thickness, finally obtained black phosphorus crystal orientation alleviates the technical problem of the recognition methods accuracy difference of existing black phosphorus crystal orientation than more consistent.
Description
Technical field
The present invention relates to the technical fields of semiconductor material, recognition methods and dress more particularly, to a kind of black phosphorus crystal orientation
It sets.
Background technique
It is identified in relation to the crystal orientation of black phosphorus or phosphorus alkene, existing laboratory facilities mainly include based on TEM (Transmission
Electron microscope, transmission electron microscope), AFM (Atomic Force Microscope, atomic force microscope)
Deng the spectral classes means such as microscopic observation method, angular resolution conductivity method and infrared, Raman.Wherein, angular resolution conductivity side
Method is the measurement of contact, and spatial resolution and angular resolution sensitivity are lower；The mode of microscopic observation be difficult to realize it is lossless,
The quantitative measurment of line；The spectral resolution of infrared spectrometry and the spatial resolution of equipment are also difficult to meet the black of miniature scale
Phosphate material accurately measures.The crystal orientation of black phosphorus can quickly, accurately, be contactlessly identified based on polarization Raman spectrum.
Currently, generalling use polarization configuration (the scatter light polarization direction detected and the excitation of parallel polarization (collaboration)
Light polarization direction remains parallel) black phosphorus crystal orientation is identified.Under the polarization configuration, by with a fixed step size at one week
(360 degree) continuously turn partially and acquire the Raman information under different polarization direction, fitting polarization angle and corresponding spectrum in range
Middle Ag 2The relation curve of Raman signatures peak intensity, the angle where the extreme value of peak intensity in relation curve determine the crystalline substance of black phosphorus
To.However, causing to pass through A using parallel polarization due to effects such as the birefringent and light absorptions of black phosphorusg 2Characteristic peak is identifying not
With thickness black phosphorus crystal orientation when, be easy to appear misrecognition.As it can be seen that the recognition methods accuracy of existing black phosphorus crystal orientation is poor.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of recognition methods of black phosphorus crystal orientation and device, it is existing to alleviate
Black phosphorus crystal orientation recognition methods accuracy difference technical problem.
In a first aspect, the embodiment of the invention provides a kind of recognition methods of black phosphorus crystal orientation, comprising: vertical in Raman system
Under polarization mode, the incident light for acquiring different polarization angle is irradiated the drawing at generated target signature peak to black phosphorus to be identified
Graceful scattering spectrum information；The Raman diffused light spectrum information at target signature peak corresponding to the incident light to the different polarization angle
Data extraction is carried out, target data pair is obtained, wherein the target data is to for incident light polarization angle and target signature peak
The data pair that light intensity is constituted；By target Raman scattering effectiveness formula to the target data to being fitted, and according to fitting
As a result the crystal orientation of the black phosphorus to be identified is determined, wherein the target Raman scattering effectiveness formula is that the Raman system is vertical
The Raman scattering effectiveness formula at the target signature peak under polarization mode, the crystal orientation of the black phosphorus to be identified are described to be identified black
The armchair direction of phosphorus.
Further, the target signature peak includes AgCharacteristic peak, the AgCharacteristic peak includes at least one of: Ag 1It is special
Levy peak, Ag 2Characteristic peak.
Further, when the target signature peak is the Ag 1When characteristic peak, the target data is to for first object number
According to right, wherein the first object data are to for the incident light polarization angle and the Ag 1Number between the light intensity of characteristic peak
According to right；By target Raman scattering effectiveness formula to the target data to being fitted, and described in determining according to fitting result
The crystal orientation of black phosphorus to be identified, comprising:
The target Raman scattering effectiveness formula such as formula (1)
Wherein,Indicate the Ag 1The light intensity of characteristic peak, a1、c1Indicate the A of the black phosphorus to be identifiedg 1The drawing of characteristic peak
Graceful tensor element, φ1Indicate a1With the c1Between phase difference,Indicate the incident light polarization angle, θ1It is first
Crystal orientation match value；By formula (1) to the first object data to being fitted, the first crystal orientation match value is obtained；Work as a1<
c1When, the first crystal orientation match value is the crystal orientation of the black phosphorus to be identified；Work as a1>c1When, the first crystal orientation match value is just
Handing over direction is the crystal orientation of the black phosphorus to be identified.
Further, when the target signature peak is the Ag 2When characteristic peak, the target data is to for the second number of targets
According to right, wherein second target data is to for the incident light polarization angle and the Ag 2Number between the light intensity of characteristic peak
According to right；By target Raman scattering effectiveness formula to the target data to being fitted, and described in determining according to fitting result
The crystal orientation of black phosphorus to be identified, comprising:
The target Raman scattering effectiveness formula such as formula (2)
Wherein,Indicate the Ag 2The light intensity of characteristic peak, a2、c2Indicate the A of the black phosphorus to be identifiedg 2The drawing of characteristic peak
Graceful tensor element, φ2Indicate a2With the c2Between phase difference,Indicate the incident light polarization angle, θ2It is second
Crystal orientation match value；By formula (2) to second target data to being fitted, the second crystal orientation match value is obtained；Work as a2<
c2When, the second crystal orientation match value is the crystal orientation of the black phosphorus to be identified；Work as a2>c2When, the second crystal orientation match value is just
Handing over direction is the crystal orientation of the black phosphorus to be identified.
Further, when the target signature peak is the Ag 1Characteristic peak and the Ag 2When characteristic peak, the target data
To the respectively described first object data to second target data pair；By target Raman scattering effectiveness formula to described
Target data determines the crystal orientation of the black phosphorus to be identified according to fitting result to being fitted, comprising:
The target Raman scattering effectiveness formula is formula (1) and formula (2)
Wherein,Respectively indicate the Ag 1The light intensity of characteristic peak, Ag 2The light intensity of characteristic peak, a1、c1Described in expression
The A of black phosphorus to be identifiedg 1The Raman tensor element of characteristic peak, φ1Indicate a1With the c1Between phase difference, a2、c2It indicates
The A of the black phosphorus to be identifiedg 2The Raman tensor element of characteristic peak, φ2Indicate a2With the c2Between phase difference,Table
Show the incident light polarization angle, θ1、θ2Respectively the first crystal orientation match value, the second crystal orientation match value；By formula (1) to described
First object data obtain the first crystal orientation match value to being fitted, and by formula (2) to second target data pair
It is fitted, obtains the second crystal orientation match value；Work as a1<c1And a2<c2When, the first crystal orientation match value and described second
The average value of crystal orientation match value is the crystal orientation of the black phosphorus to be identified；Work as a1>c1And a2>c2When, the first crystal orientation match value and
The orthogonal direction of the average value of the second crystal orientation match value is the crystal orientation of the black phosphorus to be identified.
Second aspect, the embodiment of the invention also provides a kind of identification devices of black phosphorus crystal orientation, comprising: acquisition module is used
Produced by the incident light under Raman system orthogonal polarization modes, acquiring different polarization angle is irradiated black phosphorus to be identified
Target signature peak Raman diffused light spectrum information；Data extraction module, for the incident light institute to the different polarization angle
The Raman diffused light spectrum information at corresponding target signature peak carries out data extraction, obtains target data pair, wherein the number of targets
According to the data pair constituted to the light intensity for incident light polarization angle and target signature peak；Fitting module, for passing through target Raman
Scattering efficiency formula to being fitted, and determines the crystal orientation of the black phosphorus to be identified according to fitting result to the target data,
Wherein, the target Raman scattering effectiveness formula is the Raman at the target signature peak under the Raman system orthogonal polarization modes
Scattering efficiency formula, the crystal orientation of the black phosphorus to be identified are the armchair direction of the black phosphorus to be identified.
The embodiment of the present invention bring it is following the utility model has the advantages that
It in embodiments of the present invention, is to acquire the incident light of different polarization angle under Raman system orthogonal polarization modes
The Raman diffused light spectrum information at generated target signature peak is irradiated to black phosphorus to be identified；Then, to different polarization angle
Incident light corresponding to target signature peak Raman diffused light spectrum information carry out data extraction, obtain target data pair；Finally,
By the Raman scattering effectiveness formula at target signature peak to target data to being fitted, and determine according to fitting result to be identified
The crystal orientation of black phosphorus.The crystal orientation accuracy for the black phosphorus to be identified that the recognition methods of black phosphorus crystal orientation of the invention finally identifies is good,
When identifying to the black phosphorus to be identified of different-thickness, finally obtained black phosphorus crystal orientation alleviates existing black phosphorus than more consistent
The technical problem of the recognition methods accuracy difference of crystal orientation.
Other features and advantages of the present invention will illustrate in the following description, also, partly become from specification
It obtains it is clear that understand through the implementation of the invention.The objectives and other advantages of the invention are in specification, claims
And specifically noted structure is achieved and obtained in attached drawing.
To enable the above objects, features and advantages of the present invention to be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate
Appended attached drawing, is described in detail below.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of flow chart of the recognition methods of black phosphorus crystal orientation provided in an embodiment of the present invention；
Fig. 2 is the schematic diagram of coordinate system provided in an embodiment of the present invention；
Fig. 3 a be it is provided in an embodiment of the present invention under orthogonal polarization modes, for the polarization angle and A of measurement point 1g 1It is special
Levy the schematic diagram of the relation curve between the light intensity at peak；
Fig. 3 b be it is provided in an embodiment of the present invention under orthogonal polarization modes, for the polarization angle and A of measurement point 1g 2It is special
Levy the schematic diagram of the relation curve between the light intensity at peak；
Fig. 4 a be it is provided in an embodiment of the present invention under orthogonal polarization modes, for the polarization angle and A of measurement point 2g 1It is special
Levy the schematic diagram of the relation curve between the light intensity at peak；
Fig. 4 b be it is provided in an embodiment of the present invention under orthogonal polarization modes, for the polarization angle and A of measurement point 2g 2It is special
Levy the schematic diagram of the relation curve between the light intensity at peak；
Fig. 5 a be it is provided in an embodiment of the present invention under orthogonal polarization modes, for the polarization angle and A of measurement point 3g 1It is special
Levy the schematic diagram of the relation curve between the light intensity at peak；
Fig. 5 b be it is provided in an embodiment of the present invention under orthogonal polarization modes, for the polarization angle and A of measurement point 3g 2It is special
Levy the schematic diagram of the relation curve between the light intensity at peak；
Fig. 6 be it is provided in an embodiment of the present invention under parallel polarization mode, for the polarization angle and A of measurement point 1g 2Feature
The schematic diagram of relation curve between the light intensity at peak；
Fig. 7 be it is provided in an embodiment of the present invention under parallel polarization mode, for the polarization angle and A of measurement point 2g 2Feature
The schematic diagram of relation curve between the light intensity at peak；
Fig. 8 be it is provided in an embodiment of the present invention under parallel polarization mode, for the polarization angle and A of measurement point 3g 2Feature
The schematic diagram of relation curve between the light intensity at peak；
Fig. 9 is a kind of schematic diagram of the identification device of black phosphorus crystal orientation provided in an embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with attached drawing to the present invention
Technical solution be clearly and completely described, it is clear that described embodiments are some of the embodiments of the present invention, rather than
Whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Under every other embodiment obtained, shall fall within the protection scope of the present invention.
For the identification convenient for understanding the present embodiment, first to a kind of black phosphorus crystal orientation disclosed in the embodiment of the present invention
Method describes in detail.
Embodiment one:
According to embodiments of the present invention, a kind of embodiment of the recognition methods of black phosphorus crystal orientation is provided, it should be noted that
The step of process of attached drawing illustrates can execute in a computer system such as a set of computer executable instructions, also,
It, in some cases, can be to be different from shown in sequence execution herein although logical order is shown in flow charts
The step of out or describing.
Fig. 1 is a kind of flow chart of the recognition methods of black phosphorus crystal orientation of the embodiment of the present invention, as shown in Figure 1, this method packet
Include following steps:
Step S102 acquires the incident light of different polarization angle to be identified black under Raman system orthogonal polarization modes
Phosphorus is irradiated the Raman diffused light spectrum information at generated target signature peak；
In embodiments of the present invention, Raman system is specifically Raman spectroscopy system, and Raman system orthogonal polarization modes are
Refer to that the scatter light polarization direction of detection remains vertical with incident light polarization direction.Under the orthogonal polarization modes, such as Fig. 2 institute
Show, wherein AC indicates the armchair direction of black phosphorus to be identified, i.e., the crystal orientation of black phosphorus to be identified；X-Y indicates that sample coordinate system, θ are
The crystal orientation of black phosphorus to be identified and the angle of sample coordinate system X-axis,For incident light polarization direction eiWith sample coordinate system X-axis angle
(i.e. incident light polarization angle).
Before the identification for carrying out black phosphorus crystal orientation, the preparation of black phosphorus to be identified is first carried out.When preparing black phosphorus to be identified, by block
The black phosphorus monocrystalline of shape separates the black phosphorus thin slice of different thickness, and the black phosphorus thin slice removed is black phosphorus to be identified, should be wait know
There is different thickness at the different location of other black phosphorus.
Adjusting Raman system is orthogonal polarization modes, and the continuously adjustable half-wave of optical axis direction is inserted into the optical path of incident light
Piece.The change of incident light polarization angle can be realized by continuous rotation half-wave plate, found under optical microscopy different thickness to
It identifies black phosphorus, focuses incident light to the surface of black phosphorus to be identified.If counterclockwise angle is positive, rotatable halfwave plate counterclockwise, every time
5 ° (being adjusted according to specific needs, the embodiment of the present invention is to the angle without concrete restriction) of rotation, 180 ° of corotating,
Realize incident light polarization angleIt is rotated counterclockwise with 10 ° of step-lengths since 0 ° (X-direction in such as Fig. 2), 360 ° of corotating.
And then the incident light (incident light under 37 different polarization angles as above) of different polarization angle is collected to be identified black
Phosphorus is irradiated the Raman diffused light spectrum information at generated target signature peak.
Step S104, the Raman diffused light spectrum information at target signature peak corresponding to the incident light to different polarization angle into
Row data are extracted, and obtain target data pair, wherein target data is to the light intensity structure for incident light polarization angle and target signature peak
At data pair；
The drawing at generated target signature peak is irradiated to black phosphorus to be identified in the incident light for obtaining different polarization angle
After graceful scattering spectrum information, the Raman diffused light spectrum information at target signature peak corresponding to the incident light to different polarization angle into
Row data are extracted, and the data pair of the light intensity composition at incident light polarization angle and target signature peak are obtained.
Step S106, by target Raman scattering effectiveness formula to target data to being fitted, and according to fitting result
Determine the crystal orientation of black phosphorus to be identified, wherein target Raman scattering effectiveness formula is that target is special under Raman system orthogonal polarization modes
The Raman scattering effectiveness formula at peak is levied, the crystal orientation of black phosphorus to be identified is the armchair direction of black phosphorus to be identified.
Target data is being obtained to rear, further by the Raman scattering effectiveness formula at target signature peak to target data pair
It is fitted, and then determines the crystal orientation of black phosphorus to be identified according to fitting result.The process will hereinafter be described, herein not
It repeats again.
It in embodiments of the present invention, is to acquire the incident light of different polarization angle under Raman system orthogonal polarization modes
The Raman diffused light spectrum information at generated target signature peak is irradiated to black phosphorus to be identified；Then, to different polarization angle
Incident light corresponding to target signature peak Raman diffused light spectrum information carry out data extraction, obtain target data pair；Finally,
By the Raman scattering effectiveness formula at target signature peak to target data to being fitted, and determine according to fitting result to be identified
The crystal orientation of black phosphorus.The crystal orientation accuracy for the black phosphorus to be identified that the recognition methods of black phosphorus crystal orientation of the invention finally identifies is good,
When identifying to the black phosphorus to be identified of different-thickness, finally obtained black phosphorus crystal orientation alleviates existing black phosphorus than more consistent
The technical problem of the recognition methods accuracy difference of crystal orientation.
Above content carried out brief introduction to the recognition methods of black phosphorus crystal orientation of the invention, below to being directed to
Particular content describes in detail.
In alternative embodiment of the invention, target signature peak includes AgCharacteristic peak, AgCharacteristic peak include it is following at least it
One: Ag 1Characteristic peak, Ag 2Characteristic peak.
In an alternate embodiment of the present invention where, when target signature peak is Ag 1When characteristic peak, target data is to being first
Target data pair, wherein first object data are to for incident light polarization angle and Ag 1Data pair between the light intensity of characteristic peak；
By target Raman scattering effectiveness formula to target data to being fitted, and determine according to fitting result to be identified
The crystal orientation of black phosphorus, comprising:
Target Raman scattering effectiveness formula such as formula (1)
Wherein,Indicate Ag 1The light intensity of characteristic peak, a1、c1Indicate the A of black phosphorus to be identifiedg 1The Raman tensor member of characteristic peak
Element, φ1Indicate a1With c1Between phase difference,Indicate incident light polarization angle, θ1For the first crystal orientation match value；
By formula (1) to first object data to being fitted, the first crystal orientation match value is obtained；
Work as a1<c1When, the first crystal orientation match value is the crystal orientation of black phosphorus to be identified；
Work as a1>c1When, the orthogonal direction of the first crystal orientation match value is the crystal orientation of black phosphorus to be identified.
In embodiments of the present invention, the measurement point of 3 different locations of same black phosphorus sample, and measurement point are measured altogether
The number of plies of 1 corresponding black phosphorus to be identified is about 377 layers, and the number of plies of the corresponding black phosphorus to be identified of measurement point 2 is about 20 layers, and is surveyed
The amount 3 corresponding black phosphorus numbers of plies to be identified of point are about 37 layers.With the corresponding incident light polarization angle of measurement point 1,2,3 and Ag 1Characteristic peak
Light intensity between data to (as described above, having 37 pairs of data) as shown in the following table 1, table 2, table 3, wherein table 1 gives measurement
The A in vertical polarization of point 1g 1Characteristic peak light intensity data of the characteristic peak at incident light different polarization direction, table 2 give measurement point
2 in vertical polarization Ag 1Characteristic peak light intensity data of the characteristic peak at incident light different polarization direction, table 3 give measurement point 3
The A in vertical polarizationg 1Characteristic peak light intensity data of the characteristic peak at incident light different polarization direction:
Table 1
Table 2
Table 3
Pass through the data in above-mentioned formula (1) fitting table 1, table 2, table 3, obtained matched curve such as Fig. 3 a, Fig. 4 a, figure
Shown in 5a, and respectively -2.4 ° of crystal orientation of black phosphorus to be identified are obtained, -0.2 °, 0.1 °, and its size does not change substantially, also
It is to identify that the black phosphorus crystal orientation to be identified of obtained different thickness is essentially the same (namely crystal orientation is unique), illustrates black phosphorus of the invention
The recognition methods accuracy of crystal orientation is good, can the crystal orientation to the black phosphorus of different-thickness correctly identified.
In another alternative embodiment of the invention, when target signature peak is Ag 2When characteristic peak, target data is to being
Two target datas pair, wherein the second target data is to for incident light polarization angle and Ag 2Data pair between the light intensity of characteristic peak；
By target Raman scattering effectiveness formula to target data to being fitted, and determine according to fitting result to be identified
The crystal orientation of black phosphorus, comprising:
Target Raman scattering effectiveness formula such as formula (2)
Wherein,Indicate Ag 2The light intensity of characteristic peak, a2、c2Indicate the A of black phosphorus to be identifiedg 2The Raman tensor member of characteristic peak
Element, φ2Indicate a2With c2Between phase difference,Indicate incident light polarization angle, θ2For the second crystal orientation match value；
By formula (2) to the second target data to being fitted, the second crystal orientation match value is obtained；
Work as a2<c2When, the second crystal orientation match value is the crystal orientation of black phosphorus to be identified；
Work as a2>c2When, the orthogonal direction of the second crystal orientation match value is the crystal orientation of black phosphorus to be identified.
In embodiments of the present invention, the measurement point of 3 different locations of same black phosphorus sample, and measurement point are measured altogether
The number of plies of 1 corresponding black phosphorus to be identified is about 377 layers, and the number of plies of the corresponding black phosphorus to be identified of measurement point 2 is about 20 layers, and is surveyed
The amount 3 corresponding black phosphorus numbers of plies to be identified of point are about 37 layers.With the corresponding incident light polarization angle of measurement point 1,2,3 and Ag 2Characteristic peak
Light intensity data between data to (as described above, having 37 pairs of data) as shown in the following table 4, table 5, table 6, wherein table 4 gives
The A in vertical polarization of measurement point 1g 2Characteristic peak light intensity data of the characteristic peak at incident light different polarization direction, table 5 give survey
The A in vertical polarization of amount point 2g 2Characteristic peak light intensity data of the characteristic peak at incident light different polarization direction, table 6 give measurement
The A in vertical polarization of point 3g 2Characteristic peak light intensity data of the characteristic peak at incident light different polarization direction:
Table 4
Table 5
Table 6
Pass through the data in above-mentioned formula (2) fitting table 4, table 5, table 6, obtained matched curve such as Fig. 3 b, Fig. 4 b, figure
Shown in 5b, and respectively -2.1 ° of crystal orientation of black phosphorus to be identified are obtained, -1.4 °, -1.1 °, and its size does not change substantially,
The black phosphorus crystal orientation to be identified of the different thickness exactly identified is essentially the same (namely crystal orientation is unique), illustrates of the invention black
The recognition methods accuracy of phosphorus crystal orientation is good, can the crystal orientation to the black phosphorus of different-thickness correctly identified.
In another alternative embodiment of the invention, when target signature peak is Ag 1Characteristic peak and Ag 2When characteristic peak, target
Data to respectively first object data to and the second target data pair；
By target Raman scattering effectiveness formula to target data to being fitted, and determine according to fitting result to be identified
The crystal orientation of black phosphorus, comprising:
Target Raman scattering effectiveness formula is formula (1) and formula (2)
Wherein,Respectively indicate Ag 1The light intensity of characteristic peak, Ag 2The light intensity of characteristic peak, a1、c1Indicate to be identified black
The A of phosphorusg 1The Raman tensor element of characteristic peak, φ1Indicate a1With c1Between phase difference, a2、c2Indicate the A of black phosphorus to be identifiedg 2It is special
Levy the Raman tensor element at peak, φ2Indicate a2With c2Between phase difference,Indicate incident light polarization angle, θ1、θ2Respectively
One crystal orientation match value, the second crystal orientation match value；
By formula (1) to first object data to being fitted, the first crystal orientation match value is obtained, and by formula (2) to the
Two target datas obtain the second crystal orientation match value to being fitted；
Work as a1<c1And a2<c2When, the average value of the first crystal orientation match value and the second crystal orientation match value is black phosphorus to be identified
Crystal orientation；
Work as a1>c1And a2>c2When, the orthogonal direction of the average value of the first crystal orientation match value and the second crystal orientation match value be to
Identify the crystal orientation of black phosphorus.
The data of table 1, table 2, table 3 are fitted by above-mentioned formula (1), by above-mentioned formula (2) fitting table 4, table 5, table 6
Data, it is available:
For measurement point 1, crystal orientation=(- 2.4 ° -2.1 °) of corresponding black phosphorus to be identified/2=-2.25 °；
For measurement point 2, crystal orientation=(- 0.2 ° -1.4 °) of corresponding black phosphorus to be identified/2=-0.8 °；
For measurement point 3, crystal orientation=(0.1 ° -1.1 °) of corresponding black phosphorus to be identified/2=-0.5 °.
The result that three above application example obtains is essentially the same (namely crystal orientation is unique), illustrates that black phosphorus of the invention is brilliant
To recognition methods accuracy it is good.
It is more accurate in order to the crystal orientation that illustrates that the recognition methods of the black phosphorus crystal orientation in the present invention finally identifies, under
Face is with traditional method (being identified using the polarization configuration of parallel polarization (collaboration) to black phosphorus crystal orientation) to above-mentioned measurement
Point is calculated, and carries out the number obtained in identification process to black phosphorus crystal orientation about the polarization configuration using parallel polarization (collaboration)
According to the data as described in table 7 in following the description, table 8, table 9, following target Raman scattering effectiveness formula (3) is finally used
Wherein,Indicate A when parallel polarizationg 2The light intensity of characteristic peak, a, c indicate black phosphorus A to be identifiedg 2The Raman of characteristic peak
Tensor element, φ indicate the phase difference between a and c,Indicate incident light polarization angle, θ is crystal orientation match value；
Data corresponding to parallel polarization mode in following table 7, table 8, table 9 are fitted, and to be fitted obtained Ag 2
Crystal orientation of the angle as black phosphorus to be identified corresponding to characteristic peak light intensity maximum value.
Table 7
Table 8
Table 9
Table 7, table 8, the data in table 9 are fitted, obtained matched curve can be obtained parallel as shown in Fig. 6, Fig. 7, Fig. 8
Polarization mode Ag 2Angle corresponding to the light intensity maximum value of characteristic peak is respectively 3.8 °, 98.4 °, 96.5 °.
Therefore, for measurement point 1,2,3, the first crystal orientation match value, the second crystal orientation match value under orthogonal polarization modes,
A under the average value and parallel polarization mode of first crystal orientation match value and the second crystal orientation match valueg 2The light intensity maximum value of characteristic peak
Corresponding angle (i.e. conventional method) is as shown in the table.
Table 10
It can be seen that method proposed by the present invention, crystal orientation identifies that angle is more consistent, and conventional method then occur it is conflicting or
The inconsistent misrecognition phenomenon of result between measurement point, it was demonstrated that method of the invention is more effective, accurate.
From the above results, parallel polarization Mode Ag 2Angle corresponding to the light intensity maximum value of characteristic peak is in different surveys
At amount point (i.e. on the black phosphorus of different thickness), biggish change is had occurred in size, will lead to the mistake of black phosphorus crystal orientation in this way
Identification.And the crystal orientation for the black phosphorus to be identified that the present invention is obtained in different measurement points it is more consistent (because crystal orientation be it is unique,
It is unrelated with thickness, so the crystal orientation finally obtained should be consistent), illustrate that the recognition methods of black phosphorus crystal orientation of the invention finally identifies
Obtained crystal orientation is more accurate, can the crystal orientation to the black phosphorus of different-thickness correctly identified.
Embodiment two:
The embodiment of the invention also provides a kind of identification device of black phosphorus crystal orientation, the identification device of the black phosphorus crystal orientation is mainly used
In the recognition methods for executing black phosphorus crystal orientation provided by above content of the embodiment of the present invention, below to provided in an embodiment of the present invention
The identification device of black phosphorus crystal orientation does specific introduction.
Fig. 9 is a kind of schematic diagram of the identification device of black phosphorus crystal orientation according to an embodiment of the present invention, as shown in figure 9, this is black
The identification device of phosphorus crystal orientation specifically includes that acquisition module 10, data extraction module 20 and fitting module 30, in which:
Acquisition module, under Raman system orthogonal polarization modes, the incident light of acquisition different polarization angle to treat knowledge
Other black phosphorus is irradiated the Raman diffused light spectrum information at generated target signature peak；
Data extraction module, the Raman diffused light for target signature peak corresponding to the incident light to different polarization angle
Spectrum information carries out data extraction, obtains target data pair, wherein target data is to for incident light polarization angle and target signature peak
Light intensity constitute data pair；
Fitting module, for by target Raman scattering effectiveness formula to target data to being fitted, and according to fitting
As a result the crystal orientation of black phosphorus to be identified is determined, wherein target Raman scattering effectiveness formula is mesh under Raman system orthogonal polarization modes
The Raman scattering effectiveness formula of characteristic peak is marked, the crystal orientation of black phosphorus to be identified is the armchair direction of black phosphorus to be identified.
It in embodiments of the present invention, is to acquire the incident light of different polarization angle under Raman system orthogonal polarization modes
The Raman diffused light spectrum information at generated target signature peak is irradiated to black phosphorus to be identified；Then, to different polarization angle
Incident light corresponding to target signature peak Raman diffused light spectrum information carry out data extraction, obtain target data pair；Finally,
By the Raman scattering effectiveness formula at target signature peak to target data to being fitted, and determine according to fitting result to be identified
The crystal orientation of black phosphorus.The crystal orientation accuracy for the black phosphorus to be identified that the recognition methods of black phosphorus crystal orientation of the invention finally identifies is good,
When identifying to the black phosphorus to be identified of different-thickness, finally obtained black phosphorus crystal orientation alleviates existing black phosphorus than more consistent
The technical problem of the recognition methods accuracy difference of crystal orientation.
The technical effect of the identification device of black phosphorus crystal orientation provided by the embodiment of the present invention, realization principle and generation is with before
The embodiment of the method stated in embodiment one is identical, and to briefly describe, Installation practice part does not refer to place, can refer to aforementioned side
Corresponding contents in method embodiment.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description
It with the specific work process of device, can refer to corresponding processes in the foregoing method embodiment, details are not described herein.
In addition, in the description of the embodiment of the present invention unless specifically defined or limited otherwise, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
It, can be with if the function is realized in the form of SFU software functional unit and when sold or used as an independent product
It is stored in a computer readable storage medium.Based on this understanding, technical solution of the present invention is substantially in other words
The part of the part that contributes to existing technology or the technical solution can be embodied in the form of software products, the meter
Calculation machine software product is stored in a storage medium, including some instructions are used so that a computer equipment (can be a
People's computer, server or network equipment etc.) it performs all or part of the steps of the method described in the various embodiments of the present invention.
And storage medium above-mentioned includes: that USB flash disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), arbitrary access are deposited
The various media that can store program code such as reservoir (RAM, Random Access Memory), magnetic or disk.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
Finally, it should be noted that embodiment described above, only a specific embodiment of the invention, to illustrate the present invention
Technical solution, rather than its limitations, scope of protection of the present invention is not limited thereto, although with reference to the foregoing embodiments to this hair
It is bright to be described in detail, those skilled in the art should understand that: anyone skilled in the art
In the technical scope disclosed by the present invention, it can still modify to technical solution documented by previous embodiment or can be light
It is readily conceivable that variation or equivalent replacement of some of the technical features；And these modifications, variation or replacement, do not make
The essence of corresponding technical solution is detached from the spirit and scope of technical solution of the embodiment of the present invention, should all cover in protection of the invention
Within the scope of.Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (6)
1. a kind of recognition methods of black phosphorus crystal orientation characterized by comprising
Under Raman system orthogonal polarization modes, the incident light of acquisition different polarization angle, which is irradiated black phosphorus to be identified, to be produced
The Raman diffused light spectrum information at raw target signature peak；
The Raman diffused light spectrum information at target signature peak corresponding to the incident light to the different polarization angle carries out data and mentions
It takes, obtains target data pair, wherein the target data constitutes the light intensity for incident light polarization angle and target signature peak
Data pair；
By target Raman scattering effectiveness formula to the target data to being fitted, and according to fitting result determine it is described to
Identify the crystal orientation of black phosphorus, wherein the target Raman scattering effectiveness formula is described under the Raman system orthogonal polarization modes
The Raman scattering effectiveness formula at target signature peak, the crystal orientation of the black phosphorus to be identified are the armchair side of the black phosphorus to be identified
To.
2. the method according to claim 1, wherein the target signature peak includes AgCharacteristic peak, the AgFeature
Peak includes at least one of: Ag 1Characteristic peak, Ag 2Characteristic peak.
3. according to the method described in claim 2, it is characterized in that, when the target signature peak is the Ag 1When characteristic peak, institute
Target data is stated to for first object data pair, wherein the first object data are to for the incident light polarization angle and institute
State Ag 1Data pair between the light intensity of characteristic peak；
By target Raman scattering effectiveness formula to the target data to being fitted, and according to fitting result determine it is described to
Identify the crystal orientation of black phosphorus, comprising:
The target Raman scattering effectiveness formula such as formula (1)
Wherein,Indicate the Ag 1The light intensity of characteristic peak, a1、c1Indicate the A of the black phosphorus to be identifiedg 1The Raman tensor of characteristic peak
Element, φ1Indicate a1With the c1Between phase difference,Indicate the incident light polarization angle, θ1It is quasi- for the first crystal orientation
Conjunction value；
By formula (1) to the first object data to being fitted, the first crystal orientation match value is obtained；
Work as a1<c1When, the first crystal orientation match value is the crystal orientation of the black phosphorus to be identified；
Work as a1>c1When, the orthogonal direction of the first crystal orientation match value is the crystal orientation of the black phosphorus to be identified.
4. according to the method described in claim 3, it is characterized in that, when the target signature peak is the Ag 2When characteristic peak, institute
Target data is stated to for the second target data pair, wherein second target data is to for the incident light polarization angle and institute
State Ag 2Data pair between the light intensity of characteristic peak；
By target Raman scattering effectiveness formula to the target data to being fitted, and according to fitting result determine it is described to
Identify the crystal orientation of black phosphorus, comprising:
The target Raman scattering effectiveness formula such as formula (2)
Wherein,Indicate the Ag 2The light intensity of characteristic peak, a2、c2Indicate the A of the black phosphorus to be identifiedg 2The Raman tensor of characteristic peak
Element, φ2Indicate a2With the c2Between phase difference,Indicate the incident light polarization angle, θ2It is quasi- for the second crystal orientation
Conjunction value；
By formula (2) to second target data to being fitted, the second crystal orientation match value is obtained；
Work as a2<c2When, the second crystal orientation match value is the crystal orientation of the black phosphorus to be identified；
Work as a2>c2When, the orthogonal direction of the second crystal orientation match value is the crystal orientation of the black phosphorus to be identified.
5. according to the method described in claim 4, it is characterized in that, when the target signature peak is the Ag 1Characteristic peak and described
Ag 2When characteristic peak, the target data to the respectively described first object data to second target data pair；
By target Raman scattering effectiveness formula to the target data to being fitted, and according to fitting result determine it is described to
Identify the crystal orientation of black phosphorus, comprising:
The target Raman scattering effectiveness formula is formula (1) and formula (2)
Wherein,Respectively indicate the Ag 1The light intensity of characteristic peak, Ag 2The light intensity of characteristic peak, a1、c1Indicate described wait know
The A of other black phosphorusg 1The Raman tensor element of characteristic peak, φ1Indicate a1With the c1Between phase difference, a2、c2Described in expression
The A of black phosphorus to be identifiedg 2The Raman tensor element of characteristic peak, φ2Indicate a2With the c2Between phase difference,Indicate institute
State incident light polarization angle, θ1、θ2Respectively the first crystal orientation match value, the second crystal orientation match value；
By formula (1) to the first object data to being fitted, the first crystal orientation match value is obtained, and pass through formula (2)
To second target data to being fitted, the second crystal orientation match value is obtained；
Work as a1<c1And a2<c2When, the average value of the first crystal orientation match value and the second crystal orientation match value is described to be identified
The crystal orientation of black phosphorus；
Work as a1>c1And a2>c2When, the orthogonal direction of the average value of the first crystal orientation match value and the second crystal orientation match value is
The crystal orientation of the black phosphorus to be identified.
6. a kind of identification device of black phosphorus crystal orientation characterized by comprising
Acquisition module, under Raman system orthogonal polarization modes, acquiring the incident light of different polarization angle to be identified black
Phosphorus is irradiated the Raman diffused light spectrum information at generated target signature peak；
Data extraction module, the Raman diffused light for target signature peak corresponding to the incident light to the different polarization angle
Spectrum information carry out data extraction, obtain target data pair, wherein the target data to for incident light polarization angle and target spy
Levy the data pair that the light intensity at peak is constituted；
Fitting module, for by target Raman scattering effectiveness formula to the target data to being fitted, and according to fitting
As a result the crystal orientation of the black phosphorus to be identified is determined, wherein the target Raman scattering effectiveness formula is that the Raman system is vertical
The Raman scattering effectiveness formula at the target signature peak under polarization mode, the crystal orientation of the black phosphorus to be identified are described to be identified black
The armchair direction of phosphorus.
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