CN110320160A - A kind of the reflection opposite sex differential optical measuring device and method of time-sharing multiplex - Google Patents

A kind of the reflection opposite sex differential optical measuring device and method of time-sharing multiplex Download PDF

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Publication number
CN110320160A
CN110320160A CN201910647239.0A CN201910647239A CN110320160A CN 110320160 A CN110320160 A CN 110320160A CN 201910647239 A CN201910647239 A CN 201910647239A CN 110320160 A CN110320160 A CN 110320160A
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optical
light
measuring device
sharing multiplex
time
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CN110320160B (en
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张雷
王译那
姜明顺
张法业
隋青美
贾磊
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Shandong University
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Shandong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts

Abstract

The present disclosure proposes the reflection opposite sex differential optical measuring devices and method of a kind of time-sharing multiplex, comprising: polarizer and optical chopper;The reflected beams of sample are separated into two beam linearly polarized photons by the polarizer;The optical chopper stops the light beam in the linearly polarized photon, and selects the propagation of another beam linearly polarized photon, passes it in optical path, and the time-sharing multiplex to reflected light measurement is realized by signal acquisition of the different periods to different light paths.It is disclosure strong antijamming capability, reliable performance, easy to use;The use of polarizer, optical chopper and y-type optical fiber reduces the introducing of error so that the reflection difference information of sample can be obtained by being not required to rotation sample or optical element, and system rejection to disturbance ability is strong, reliable performance, more convenient to use.

Description

A kind of the reflection opposite sex differential optical measuring device and method of time-sharing multiplex
Technical field
This disclosure relates to optical characterisation field and measuring instrument technical field, more particularly to a kind of reflection of time-sharing multiplex Anisotropic differential optical measuring device and method.
Background technique
Reflecting anisotropic differential optical measuring technique has high sensitivity to sample surfaces anisotropy, has non-connect The advantages that touching, be lossless.It is realized by caused polarization state variation after measurement incident light after tested sample surfaces reflection to sample The analysis of surface anisotropy perceives physics, the chemical feature of sample surfaces.
Currently, the modulator approach according to reflection difference signal is different, reflection difference optical measuring device can be divided into light intensity Modulation type and Spatial transmission type.
About the reflection difference optical measuring device based on intensity modulation type, it is currently based on the reflection difference of intensity modulation type Optical measuring device is mainly by monochromator, linear polarization (such as magnesium fluoride prism), rotary device, light beam bulkhead and photoelectricity Multiplier tube composition, specific structure are as shown in Figure 1.Its working principle is that: light source emergent light is irradiated to through monochromator, linear polarization On sample, sample is fixed on rotate sample with angular velocity omega on the motor shaft of angular velocity omega rotation, then by photoelectricity times The light intensity variation for increasing pipe detection reflected light, is modulated at reflection difference signal on the signal of 2 ω frequencies.
Problems and disadvantages existing for reflection difference optical measuring device based on intensity modulation type are main are as follows: exist in optical path Rotating element.In an experiment, need to rotate sample to obtain reflection difference signal, or sample rotation is substituted by rotatable polarizer Turn.Make in this way its on-line checking etc. application in, implement relatively difficult or even cannot achieve, and be readily incorporated error and Noise, it is steady in a long-term to keep Comparision difficult.
Reflection difference optical measuring device based on Spatial transmission type: the reflection difference optical measurement based on Spatial transmission type Device is used as modulation device using light ball modulator (Photoelastic Modulator, PEM), and mainly composition has: light source, The polarizer, light ball modulator, analyzer, monochromator and detector, specific structure are as shown in Figure 2.Working principle are as follows: light beam from Light source projects, and through the polarizer, observation window, is irradiated to sample surfaces to approach vertical direction, reflected light passes through observation window, photoelastic tune Device (separation signal and low-frequency noise enhance interference free performance), analyzer and monochromator processed, are irradiated on detector, by it Electric signal is converted optical signals into, signal processing system is transferred to, finally calculates reflection difference spectrum on computers.
Problems and disadvantages existing for reflection difference optical measuring device based on Spatial transmission type are main are as follows: and structure is complicated, Bad adaptability, it is more sensitive to instrument error.The study found that vacuum chamber observation window is because answering inside even if PEM passes through accurate calibration Birefringent characteristic, the non-fully linear polarization defect of the polarizer and the setting angle error of the polarizer that power generates can all influence The measurement of signal.
In conclusion reflect at present anisotropic differential optical measuring device there are the shortcomings that and its reason include the following:
Rotation sample or optical element are readily incorporated error.For intensity modulation type reflection difference optical measuring device, need Reflection difference signal is obtained by rotation sample or rotating optical element, either rotation sample or rotary device, very It is easy to bring mechanical oscillation, to introduce error and noise, and then influences the accuracy of measurement, and the work that maintains a long-term stability It is relatively difficult.
Structure is complicated, bad adaptability.For Spatial transmission type reflection difference optical measuring device, the polarization defect of device, Setting angle error of the polarizer etc. can all influence the measurement of signal.
Summary of the invention
The purpose of this specification embodiment is to provide a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex, this The open different periods that can be realized are not required to rotation sample and optical element, reduce to the signal acquisition of different direction of vibration optical paths The function of time-sharing multiplex is realized in the introducing of error.
This specification embodiment provides a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex, passes through following skill Art scheme is realized:
Include:
Polarizer and optical chopper;
The reflected beams of sample are separated into two beam linearly polarized photons by the polarizer;
The optical chopper stops the light beam in the linearly polarized photon, and selects another beam linearly polarized photon It propagates, passes it in optical path, the timesharing to reflected light measurement is realized by signal acquisition of the different periods to different light paths Multiplexing.
Further technical solution, the measuring device further include light source, incident optical, off-axis parabolic mirror and sample Sample platform;
The light source provides unpolarized broad-spectrum beam;
The incident optical conducts the light beam of the light source output;
The off-axis parabolic mirror carries out processing to the light that the incident optical exports and exports parallel incident beam, It is incident on the sample surfaces being located on sample stage.
Further technical solution, the measuring device further include: the first concave surface converging lenses, first the second concave surface of collimating mirror Converging lenses, the second collimating mirror, the output optical fiber and spectrometer;
By optical chopper selection, wherein a branch of linearly polarized photon continues to propagate, recessed through the first concave surface converging lenses or second Converging lenses convergence in face enters the first collimating mirror or the second collimating mirror, is transmitted to spectrometer by the output optical fiber and carries out signal acquisition.
Further technical solution, the optical chopper include: optical baffle, for stopping the polarizer output Light beam in linearly polarized photon;
And controller, it is connect with the optical baffle and passes through regulation it blocks angle, realize the screening to certain road light beam Gear realizes the selection to another way light beam.
Further technical solution, the polarizer select Glan-Thomson in Rochon prism or polarization beam splitting device Prism.
Further technical solution, the output optical fiber select y-type optical fiber.
The performance parameter of further technical solution, first concave surface converging lenses and the second concave surface converging lenses is consistent.
Further technical solution, first concave surface converging lenses are ultraviolet with the second concave surface converging lenses selection focal length 25mm's Enhance aluminium film concave mirror.
Further technical solution, the off-axis parabolic mirror select the ultraviolet enhancing aluminium of reflection focal length 50.8mm to apply 90 ° of off axis paraboloidal mirrors of layer.
This specification embodiment provides a kind of reflection opposite sex differential optical measurement method of time-sharing multiplex, passes through following skill Art scheme is realized:
Include:
The light provided light source is handled to generate parallel incident beam to sample surfaces;
The reflected beams of sample are separated into two beam linearly polarized photons;
The light beam in the two beams linearly polarized photon is selected to continue to travel in optical path;
The light beam of selection output is subjected to signal acquisition.
Compared with prior art, the beneficial effect of the disclosure is:
The on-mechanical of disclosure time-sharing multiplex rotatably measures, and measuring speed is fast;Between polarizer and concave surface converging lenses Place optical chopper.Optical chopper is made of optical baffle and controller, and computer connects and regulate and control controller, and according to Experiment needs the angle of blocking of optical baffle, control optical baffle block a branch of linearly polarized photon for being generated by polarizer Lai So that another beam linearly polarized photon is entered y-type optical fiber, pass to spectrometer, to realize different periods to not Tongfang same sample To the signal acquisition of polarised light, achieve the effect that time-sharing multiplex, improves measuring speed.
It is disclosure strong antijamming capability, reliable performance, easy to use;Polarizer, optical chopper and y-type optical fiber make With reducing the introducing of error, system so that the reflection difference information of sample can be obtained by being not required to rotation sample or optical element Strong antijamming capability, reliable performance, it is more convenient to use.
Disclosure structure is simple, easily builds, adaptable;The reflected light of sample can isolate two through polarizer simultaneously Beam linearly polarized photon carries out signal acquisition by y-type optical fiber, and the structure without changing device can be obtained the letter of two beam polarised lights Breath, so that apparatus structure is simple, easily builds, and can replace component according to use environment, it is adaptable.
Detailed description of the invention
The Figure of description for constituting a part of this disclosure is used to provide further understanding of the disclosure, and the disclosure is shown Meaning property embodiment and its explanation do not constitute the improper restriction to the disclosure for explaining the disclosure.
Fig. 1 is the system construction drawing of the reflection difference optical measuring device based on intensity modulation type;
Fig. 2 is the system construction drawing of the reflection difference optical measuring device based on Spatial transmission type;
Fig. 3 is a kind of schematic diagram of the anisotropic differential optical measuring device of reflection of time-sharing multiplex of embodiment of the present disclosure;
In figure, 1. light sources;2. incident optical;3. off-axis parabolic mirror;4. sample stage;5. polarizer;6. optics is kept off Plate;7. controller;8. the first concave surface converging lenses;9. 10. second concave surface converging lenses of the first collimating mirror;11. the second collimating mirror;12. The output optical fiber;13. spectrometer.
Specific embodiment
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the disclosure.Unless another It indicates, all technical and scientific terms used herein has usual with disclosure person of an ordinary skill in the technical field The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root According to the illustrative embodiments of the disclosure.As used herein, unless the context clearly indicates otherwise, otherwise singular Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
Examples of implementation one
This embodiment disclose a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex, for revolving in the prior art Sample transfer product or optical element are readily incorporated error.The disclosure is rotatably measured using on-mechanical, selects to hide by optical chopper A branch of linearly polarized photon is kept off to make another light beam enter y-type optical fiber, to realize different periods to different direction of vibration optical paths Signal acquisition is not required to rotation sample and optical element, reduces the introducing of error, realize the function of time-sharing multiplex.
For structure is complicated in the prior art, bad adaptability.The reflected light of sample is separable through polarizer in the disclosure Two beam linearly polarized photon out, the acquisition of signal is carried out by y-type optical fiber, and the structure without changing device can acquire two-way light beam Information, so that apparatus structure is simple, easily builds, and can replace component according to use environment, it is adaptable.
In a particular embodiment, referring to shown in attached drawing 3, a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex, Include:
Light source module provides unpolarized broad-spectrum beam;Incident light processing module, the light provided light source are handled To generate parallel incident beam;Sample stage, for carrying sample;Anisotropic processing module is reflected, for by the reflected light of sample Beam is separated into two beam linearly polarized photons;Time-sharing multiplex module selects the light beam in the two beams linearly polarized photon to continue to propagate Into optical path;The light beam for reflecting anisotropic processing module output is carried out signal acquisition by signal acquisition module.
In specific embodiment, light source module is white light source, provides unpolarized broad-spectrum beam.
In specific embodiment, incident light processing module includes: incident optical, for conducting the light of the light source output Beam;And off-axis parabolic mirror, the incident beam that processing output is parallel to each other is carried out to the light of incident optical output.
It in the examples of implementation, is parallel to each other between the incident beam after processing output, that is, the light warp of incident optical output Crossing the incident beam exported after off-axis parabolic mirror processing is directional light.
In specific embodiment, reflecting anisotropic processing module is polarizer, for the reflected beams of sample to be separated into two Beam linearly polarized photon (e light and o light).
In specific embodiment, polarizer is Rochon prism, for reflected light to be separated into about 10 ° of two beam linear polarizations Light.
In specific embodiment, time-sharing multiplex module is optical chopper, for stopping one in the linearly polarized photon Light beams, and the propagation of another beam linearly polarized photon is selected, it passes it in optical path, realizes different periods to different light paths Signal acquisition realizes the effect of time-sharing multiplex.
In specific embodiment, optical chopper includes: optical baffle, a branch of in the linearly polarized photon for stopping Light;And controller, it is fixed together with the optical baffle adhesion and passes through computer regulating it blocks angle, realize to certain Road light beam blocks, that is, realizes the selection to another way light beam.
In the examples of implementation, controller controls the rotation angle of itself, further band by the order of reception computer The dynamic optical baffle being sticked together with it carries out angle rotation, realizes the control to optical baffle.Controller passes through data line It is connect with computer.Computer sends the order of rotation angle to controller.Controller receives the order of computer, controls optics Baffle carries out spinning movement.Here controller can be steering engine.
When angle is blocked in regulation, computer sends rotation order to controller, size, rotation side including rotating angle To etc., after controller receives order, itself rotation angle, direction are controlled, while driving the optics being sticked together with it Baffle is rotated.Optical baffle reaches the wherein paths of light beam all the way of linearly polarized photon after being rotated Position, and stop the propagation of (cutting) this road light beam, the road Shi Zhe light beam do not continue to propagate down into signal acquisition module, and line Property polarised light the light beam that is not blocked of another way can continue to propagate down into signal acquisition module, carry out signal acquisition.With Upper step realizes device to the wherein signal acquisition of light beam all the way of linearly polarized photon.
In specific embodiment, signal acquisition module includes: concave surface converging lenses, for converging simultaneously the linearly polarized photon Reflection;Collimating mirror, for collecting the light of the concave surface converging lenses convergence;The output optical fiber, for conducting the collimating mirror collection Light;And spectrometer, it is connected with the output optical fiber, for measuring the spectral information of emergent light.
In specific embodiment, the output optical fiber is y-type optical fiber.
A kind of reflection opposite sex differential optical measuring device of time-sharing multiplex, spectral measurement model in disclosure specific embodiment It encloses for 200-900nm.
Here, light source 1 is the white light source of wide spectrum, can select xenon lamp.Incident optical 2 can select core diameter 600 μm of multimode fibre.Off-axis parabolic mirror 3 can select 90 ° of the ultraviolet enhancing aluminized coating of reflection focal length 50.8mm Off axis paraboloidal mirror.Polarizer 5 can select Rochon prism.Optical baffle 6 can select black non transparent barn door.Controller 7 can select steering engine.First concave surface converging lenses 8 and the second concave surface converging lenses 10 can select the ultraviolet enhancing aluminium film of focal length 25mm Concave mirror.First collimating mirror 9 and the second collimating mirror 11 can select apochromatic lens.The output optical fiber 12 can select Y Type optical fiber.Spectrometer 13 can select highly sensitive portable spectrometer.
The reflection opposite sex differential optical measuring device of a kind of time-sharing multiplex of the disclosure, by light source module, incident light processing Module, sample stage reflect anisotropic processing module, time-sharing multiplex module and signal acquisition module composition, have time-sharing multiplex, structure The advantages that simple, can be realized the anisotropic optical measurement of reflection to sample.Key point therein has:
Rochon prism is in the application reflected in anisotropic processing module.Rochon prism is to realize to reflect light polarization modulation to sample Key, realize the acquisition for reflecting sample anisotropic differential signal.
Application of the optical chopper in time-sharing multiplex module.Optical chopper can be realized in different periods to same The signal acquisition of the different direction of vibration polarised lights of product is the core for realizing time-sharing multiplex function.
Application of the y-type optical fiber in signal acquisition module.Y-type optical fiber uses so that device no replacement is required structure Obtain the information of two-way linearly polarized photon, the anti-interference ability enhancing of system.
Light source module, reflects anisotropic processing module, time-sharing multiplex module and signal acquisition module at incident light processing module Whole design structure.
In an examples of implementation, Rochon prism: the polarization beam splitting devices such as Glan-Thomson prism are can be used in Rochon prism Substitution, the device a branch of non-polarized light can be divided into two beams are separated, direction of vibration is different linear polarized beam after It resumes and broadcasts;
Concave surface converging lenses: can select focal length 25mm or 50mm ultraviolet enhancing concave mirror or other have purple Light beam can be converged the hot spot for diameter within 5mm and be transmitted to standard by the optical device of outer enhancing convergence effect, the device In straight mirror.It should be noted that the performance parameter of the first concave surface converging lenses 8 and the second concave surface converging lenses 10 is consistent.
A kind of reflection opposite sex differential optical measuring device of time-sharing multiplex of the disclosure is suitable for material science, experiment object The sample surfaces in the fields such as Neo-Confucianism reflect anisotropic analysis.
Examples of implementation two
This specification embodiment provides a kind of reflection opposite sex differential optical measurement method of time-sharing multiplex, passes through following skill Art scheme is realized:
Include:
The light provided light source is handled to generate parallel incident beam to sample surfaces;
The reflected beams of sample are separated into two beam linearly polarized photons;
The light beam in the two beams linearly polarized photon is selected to continue to travel in optical path;
The light beam of selection output is subjected to signal acquisition.
Measurement method in the examples of implementation can be realized based on the measuring system in examples of implementation one, when based on above-mentioned survey When amount system is realized:
A kind of reflection opposite sex differential optical measurement method of time-sharing multiplex in disclosure specific embodiment are as follows: light source 1 is sent out White light out is conducted by incident optical 2 and is projected from one end, after being adjusted to collimated light beam by off-axis parabolic mirror 3, Sample surfaces are incident on, sample is placed on sample stage 4, and the unpolarized the reflected beams obtained after sample reflects pass through polarizer 5 are divided into two beam linearly polarized photons, select wherein a branch of linear light beam by optical chopper (optical baffle 6 and controller 7) Continue to propagate, enters the first collimating mirror 9 or the second collimating mirror through the first concave surface converging lenses 8 or the convergence of the second concave surface converging lenses 10 11, spectrometer 13 is transmitted to by the output optical fiber 12 and carries out signal acquisition.
It is understood that in the description of this specification, reference term " embodiment ", " another embodiment ", " other The description of embodiment " or " first embodiment~N embodiment " etc. means specific spy described in conjunction with this embodiment or example Sign, structure, material or feature are included at least one embodiment or example of the invention.In the present specification, to above-mentioned The schematic representation of term may not refer to the same embodiment or example.Moreover, the specific features of description, structure, material Person's feature can be combined in any suitable manner in any one or more of the embodiments or examples.
The foregoing is merely preferred embodiment of the present disclosure, are not limited to the disclosure, for the skill of this field For art personnel, the disclosure can have various modifications and variations.It is all within the spirit and principle of the disclosure, it is made any to repair Change, equivalent replacement, improvement etc., should be included within the protection scope of the disclosure.

Claims (10)

1. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex, characterized in that include:
Polarizer and optical chopper;
The reflected beams of sample are separated into two beam linearly polarized photons by the polarizer;
The optical chopper stops the light beam in the linearly polarized photon, and selects the biography of another beam linearly polarized photon It broadcasts, passes it in optical path, realize that the timesharing to reflected light measurement is multiple by signal acquisition of the different periods to different light paths With.
2. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as described in claim 1, characterized in that the survey Measuring device further includes light source, incident optical, off-axis parabolic mirror and sample stage;
The light source provides unpolarized broad-spectrum beam;
The incident optical conducts the light beam of the light source output;
The off-axis parabolic mirror carries out processing to the light that the incident optical exports and exports parallel incident beam, incident To the sample surfaces being located on sample stage.
3. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as described in claim 1, characterized in that the survey Measure device further include: the first concave surface converging lenses, first the second concave surface of collimating mirror converging lenses, the second collimating mirror, the output optical fiber and light Spectrometer;
By optical chopper selection, wherein a branch of linearly polarized photon continues to propagate, and converges through the first concave surface converging lenses or the second concave surface Poly- mirror convergence enters the first collimating mirror or the second collimating mirror, is transmitted to spectrometer by the output optical fiber and carries out signal acquisition.
4. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as described in claim 1, characterized in that the light Learning chopper includes: optical baffle, the light beam in linearly polarized photon for stopping the polarizer output;
And controller, it is connect with the optical baffle and passes through regulation it blocks angle, certain road light beam is blocked in realization, i.e., Realize the selection to another way light beam.
5. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as described in claim 1, characterized in that described inclined The Glan-Thomson prism that the device that shakes is selected in Rochon prism or polarization beam splitting device.
6. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as claimed in claim 3, characterized in that it is described go out Penetrate fiber selection y-type optical fiber.
7. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as claimed in claim 3, characterized in that described the The performance parameter of one concave surface converging lenses and the second concave surface converging lenses is consistent.
8. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as described in claim 3 or 7, characterized in that institute It states the first concave surface converging lenses and the second concave surface converging lenses selects the ultraviolet enhancing aluminium film concave mirror of focal length 25mm.
9. a kind of reflection opposite sex differential optical measuring device of time-sharing multiplex as claimed in claim 2, characterized in that it is described from Axis parabolic mirror selects 90 ° of off axis paraboloidal mirrors of the ultraviolet enhancing aluminized coating of reflection focal length 50.8mm.
10. a kind of reflection opposite sex differential optical measurement method of time-sharing multiplex, characterized in that include:
The light provided light source is handled to generate parallel incident beam to sample surfaces;
The reflected beams of sample are separated into two beam linearly polarized photons;
The light beam in the two beams linearly polarized photon is selected to continue to travel in optical path;
The light beam of selection output is subjected to signal acquisition.
CN201910647239.0A 2019-07-17 2019-07-17 Time-sharing multiplexing reflection anisotropy differential optical measurement device and method Active CN110320160B (en)

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