CN110319955B - Piezoelectric thin film detection device and piezoelectric thin film sensor - Google Patents
Piezoelectric thin film detection device and piezoelectric thin film sensor Download PDFInfo
- Publication number
- CN110319955B CN110319955B CN201810271729.0A CN201810271729A CN110319955B CN 110319955 B CN110319955 B CN 110319955B CN 201810271729 A CN201810271729 A CN 201810271729A CN 110319955 B CN110319955 B CN 110319955B
- Authority
- CN
- China
- Prior art keywords
- piezoelectric
- thin film
- piezoelectric thin
- film sensor
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 65
- 238000001514 detection method Methods 0.000 title claims abstract description 31
- 239000010408 film Substances 0.000 claims abstract description 142
- 238000010079 rubber tapping Methods 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 10
- 239000007787 solid Substances 0.000 description 4
- 238000007689 inspection Methods 0.000 description 2
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
Abstract
The invention discloses a piezoelectric film detection device and a piezoelectric film sensor. The piezoelectric thin film sensing device includes a piezoelectric thin film sensor adapted to be attached to a touch panel for sensing a tap event applied to the touch panel. The piezoelectric film sensor includes a plurality of piezoelectric films and defines an interior region; the piezoelectric film detection device further comprises a position judgment device, wherein the position judgment device is suitable for judging whether the occurrence position of the knocking event is in the inner area of the piezoelectric film sensor or not according to the detection signals output by the piezoelectric films.
Description
Technical Field
The present invention relates to a piezoelectric thin film sensor and a piezoelectric thin film detection apparatus including the same.
Background
In the prior art, piezoelectric films can be used to sense whether a tap is made by hand on a solid surface (e.g., a touch panel). When a hand strikes a solid plane, mechanical waves are generated, after the mechanical waves are transmitted on the solid surface, the piezoelectric film attached to the solid surface generates charges due to pressure, and whether a striking event occurs to the hand can be sensed by measuring the charges of the piezoelectric film. But only whether a knocking event occurs or not can be detected through the piezoelectric film, and the specific position of the knocking event cannot be detected.
Disclosure of Invention
An object of the present invention is to solve at least one of the above problems and disadvantages in the prior art.
According to an aspect of the present invention, there is provided a piezoelectric thin film sensing device including: a piezoelectric film sensor adapted to be attached to a touch panel for detecting a tap event applied to the touch panel, the piezoelectric film sensor including a plurality of piezoelectric films and defining an interior region; the piezoelectric film detection device further comprises a position judgment device, wherein the position judgment device is suitable for judging whether the occurrence position of the knocking event is in the inner area of the piezoelectric film sensor or not according to the detection signals output by the piezoelectric films.
According to an exemplary embodiment of the present invention, the piezoelectric thin film detection apparatus further includes a signal processing device for processing detection signals output by the plurality of piezoelectric thin films; the position judgment device is suitable for judging whether the occurrence position of the knocking event is in the inner area of the piezoelectric film sensor or not according to the processed detection signal.
According to another exemplary embodiment of the present invention, the position determination device is adapted to calculate a time difference between any two piezoelectric films detecting the knocking event according to the detection signal; the position determination device is adapted to determine whether the occurrence position of the knocking event is in the inner region of the piezoelectric thin film sensor according to the calculated time difference.
According to another exemplary embodiment of the present invention, when the absolute value of any one of the calculated time differences is not greater than the first threshold value Z1, the position determination means determines that the occurrence position of the knocking event is in the inner area of the piezoelectric thin-film sensor but not in the outer area of the piezoelectric thin-film sensor.
According to another exemplary embodiment of the present invention, when an absolute value of one of the calculated time differences is greater than a second threshold value Z2 that is greater than the first threshold value Z1, the position determination device determines that the occurrence position of the tap event is not in the inner area of the piezoelectric thin film sensor but in the outer area of the piezoelectric thin film sensor.
According to another exemplary embodiment of the present invention, the piezoelectric thin film sensor includes: an annular first piezoelectric film, the inner region being a circular inner region defined by the first piezoelectric film; and a circular second piezoelectric film centrally disposed in an interior region of the first piezoelectric film.
According to another exemplary embodiment of the present invention, the first threshold value Z1 is calculated according to the following formula (1):
Z1＝R12/V (1)，
wherein the content of the first and second substances,
r12 is the radius of the inner circle of the annular first piezoelectric film,
v is the propagation speed of the mechanical wave generated on the touch panel by the tapping event in the touch panel.
According to another exemplary embodiment of the present invention, the second threshold value Z2 satisfies the following relation:
Z1<Z2<(R11-R2)/V (2)，
wherein the content of the first and second substances,
r11 is the radius of the outer circle of the annular first piezoelectric thin film,
r2 is the radius of the circular second piezoelectric film.
According to another exemplary embodiment of the present invention, the piezoelectric thin film sensor includes: the piezoelectric film structure comprises four rectangular piezoelectric films, wherein the four rectangular piezoelectric films surround a square frame, and the inner area is a square inner area defined by the four rectangular piezoelectric films.
According to another exemplary embodiment of the present invention, the first threshold value Z1 is calculated according to the following formula:
Z1＝L2/V (3)，
wherein the content of the first and second substances,
l2 is the distance between the inner side edges of the two opposing piezoelectric films;
v is the propagation speed of the mechanical wave generated on the touch panel by the tapping event in the touch panel.
According to another exemplary embodiment of the present invention, the second threshold value Z2 satisfies the following relation (4):
Z1<Z2<(L1+L2)/2V (4)，
wherein the content of the first and second substances,
l1 is the distance between the outer sides of two opposing piezoelectric films.
In accordance with another aspect of the present invention, a piezoelectric film sensor is provided, adapted to be attached to a touch panel for detecting a tap event applied to the touch panel, the piezoelectric film sensor including a plurality of piezoelectric films and defining an interior region.
According to another exemplary embodiment of the present invention, the piezoelectric thin film sensor includes: an annular first piezoelectric film, the inner region being a circular inner region defined by the first piezoelectric film; and a circular second piezoelectric film centrally disposed in an interior region of the first piezoelectric film.
According to another exemplary embodiment of the present invention, the piezoelectric thin film sensor includes: the piezoelectric film structure comprises four rectangular piezoelectric films, wherein the four rectangular piezoelectric films surround a square frame, and the inner area is a square inner area defined by the four rectangular piezoelectric films.
In the foregoing various exemplary embodiments of the present invention, the piezoelectric film sensor includes a plurality of piezoelectric films and defines an internal area, and whether the occurrence location of the knocking event is in the internal area of the piezoelectric film sensor can be identified according to the detection signals output from the plurality of piezoelectric films, so that the occurrence location of the knocking event can be identified.
Other objects and advantages of the present invention will become apparent from the following description of the invention which refers to the accompanying drawings, and may assist in a comprehensive understanding of the invention.
Drawings
FIG. 1 shows a schematic view of a piezoelectric thin film sensor according to a first embodiment of the invention;
FIG. 2 shows a schematic diagram of a tapping event occurring in the outer region of the piezoelectric film sensor shown in FIG. 1;
FIG. 3 shows a schematic diagram of a tapping event occurring in the interior region of the piezoelectric film sensor shown in FIG. 1;
FIG. 4 shows a schematic view of a piezoelectric thin film sensor according to a second embodiment of the invention;
FIG. 5 shows a schematic diagram of a tapping event occurring in the outer region of one side of the piezoelectric film sensor shown in FIG. 4;
FIG. 6 shows a schematic diagram of a tapping event occurring in the outer region on the other side of the piezoelectric film sensor shown in FIG. 4;
FIG. 7 shows a schematic diagram of a tapping event occurring in the interior region of the piezoelectric film sensor shown in FIG. 4.
Detailed Description
The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings. In the specification, the same or similar reference numerals denote the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention and should not be construed as limiting the invention.
Furthermore, in the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and devices are shown in schematic form in order to simplify the drawing.
According to one general concept of the present invention, there is provided a piezoelectric thin film sensing device, including: a piezoelectric film sensor adapted to be attached to a touch panel for detecting a tap event applied to the touch panel, the piezoelectric film sensor including a plurality of piezoelectric films and defining an interior region; the piezoelectric film detection device further comprises a position judgment device, wherein the position judgment device is suitable for judging whether the occurrence position of the knocking event is in the inner area of the piezoelectric film sensor or not according to the detection signals output by the piezoelectric films.
According to another general concept of the present invention, there is provided a piezoelectric thin film sensor adapted to be attached to a touch panel for detecting a tap event applied to the touch panel, the piezoelectric thin film sensor including a plurality of piezoelectric thin films and defining an inner area.
First embodiment
FIG. 1 shows a schematic view of a piezoelectric thin film sensor according to a first embodiment of the invention; FIG. 2 shows a schematic diagram of a tapping event occurring in the outer region of the piezoelectric film sensor shown in FIG. 1; FIG. 3 shows a schematic diagram of a tapping event occurring in the interior region of the piezoelectric film sensor shown in FIG. 1.
As shown in fig. 1-3, in the illustrated embodiment, the piezoelectric film sensor is adapted to be attached to a touch panel 10 for detecting a tap event applied to the touch panel 10.
In one embodiment of the present invention, a piezoelectric film sensing device is disclosed that includes the illustrated piezoelectric film sensor for sensing the location of a percussive event.
As shown in fig. 1-3, in the illustrated embodiment, the piezoelectric film sensor includes a plurality of piezoelectric films C1, C2 and defines an interior region. The aforementioned piezoelectric thin film detection device further includes position determination means (not shown) adapted to determine whether or not the position of occurrence of the knocking event is in the inner region of the piezoelectric thin film sensor based on the detection signals output from the plurality of piezoelectric thin films C1, C2.
As shown in fig. 1 to 3, in the illustrated embodiment, the piezoelectric thin film sensor includes: a ring-shaped first piezoelectric film C1 and a circular second piezoelectric film C2. The inner area of the piezoelectric film sensor is a circular inner area defined by the first piezoelectric film C1. The circular second piezoelectric film C2 is centrally disposed in the inner region of the first piezoelectric film C1.
Although not shown, in an embodiment of the present invention, the piezoelectric film sensing device further includes a signal processing device for processing the sensing signals output from the plurality of piezoelectric films C1 and C2. The position judgment means is adapted to judge whether the occurrence position of the knocking event is in the inner region of the piezoelectric thin film sensor based on the processed detection signal.
As shown in fig. 3, when a tap event occurs in the inner region of the piezoelectric film sensor shown in fig. 1, the time at which the first piezoelectric film C1 detects the tap event is T1, and the time at which the second piezoelectric film C2 detects the tap event is T2. Then, the time difference between the detection of the tap event by the first and second piezoelectric films C1, C2 is T2 to T1. From fig. 1 and 3, it can be deduced that the absolute value | T2-T1| of T2-T1 is not greater than a first threshold value Z1, which first threshold value Z1 can be calculated according to the following equation (1):
Z1＝R12/V (1)，
wherein the content of the first and second substances,
r12 is the radius of the inner circle of the annular first piezoelectric thin film C1,
v is the propagation speed of the mechanical wave in the touch panel 10 generated on the touch panel 10 by the tap event.
As shown in fig. 1 and 3, in the illustrated embodiment, when the absolute value | T2-T1| of the calculated time difference is not greater than the first threshold value Z1, the position determination device may determine that the occurrence position of the knocking event is in the inner area of the piezoelectric thin film sensor but not in the outer area of the piezoelectric thin film sensor.
As shown in fig. 2, when a tap event occurs in the outer region of the piezoelectric film sensor shown in fig. 1, the time at which the first piezoelectric film C1 detects the tap event is T1, and the time at which the second piezoelectric film C2 detects the tap event is T2. Then, the time difference between the detection of the tap event by the first and second piezoelectric films C1, C2 is T2 to T1. From fig. 1 and 2, it can be deduced that the absolute value | T2-T1| of T2-T1 is greater than the second threshold value Z2, which is greater than the first threshold value Z1, and the second threshold value Z2 should satisfy the following relation (2):
Z1<Z2<(R11-R2)/V (2)，
wherein the content of the first and second substances,
r11 is the radius of the outer circle of the annular first piezoelectric thin film C1,
r2 is the radius of the circular second piezoelectric film C2.
As shown in fig. 1 and 2, in the illustrated embodiment, when the absolute value | T2-T1| of the calculated time difference is greater than the second threshold value Z2, which is greater than the first threshold value Z1, the position determination means may determine that the occurrence position of the knocking event is not in the inner area of the piezoelectric film sensor but in the outer area of the piezoelectric film sensor.
In one embodiment of the present invention, the signal processing device may be configured to amplify and shape the detection signals output from the plurality of piezoelectric thin films C1 and C2.
In one embodiment of the present invention, the position determining device may be a microprocessor or a computer, which can identify the occurrence position of the knocking event through an internal algorithm.
Second embodiment
FIG. 4 shows a schematic view of a piezoelectric thin film sensor according to a second embodiment of the invention; FIG. 5 shows a schematic diagram of a tapping event occurring in the outer region of one side of the piezoelectric film sensor shown in FIG. 4; FIG. 6 shows a schematic diagram of a tapping event occurring in the outer region on the other side of the piezoelectric film sensor shown in FIG. 4; FIG. 7 shows a schematic diagram of a tapping event occurring in the interior region of the piezoelectric film sensor shown in FIG. 4.
As shown in fig. 4-7, in the illustrated embodiment, the piezoelectric film sensor is adapted to be attached to the touch panel 10 for detecting a tap event applied to the touch panel 10.
In one embodiment of the present invention, a piezoelectric film sensing device is disclosed that includes the illustrated piezoelectric film sensor for sensing the location of a percussive event.
As shown in fig. 4 to 7, in the illustrated embodiment, the piezoelectric film sensor includes a plurality of piezoelectric films F1, F2, F3, F4 and defines an inner region. The aforementioned piezoelectric thin film sensing device further includes position determination means (not shown) adapted to determine whether the occurrence position of the knocking event is in the inner region of the piezoelectric thin film sensor based on the detection signals output from the plurality of piezoelectric thin films F1, F2, F3, F4.
As shown in fig. 4 to 7, in the illustrated embodiment, the piezoelectric film sensor includes four rectangular piezoelectric films F1, F2, F3, F4. Four rectangular piezoelectric films F1, F2, F3 and F4 enclose a square frame. The inner region of the piezoelectric film sensor is a square inner region defined by four rectangular piezoelectric films F1, F2, F3, F4.
Although not shown, in an embodiment of the present invention, the aforementioned piezoelectric thin film inspection apparatus further includes a signal processing device for processing the inspection signals output from the plurality of piezoelectric thin films F1, F2, F3, and F4. The position judgment means is adapted to judge whether the occurrence position of the knocking event is in the inner region of the piezoelectric thin film sensor based on the processed detection signal.
As shown in fig. 7, when a tap event occurs in the inner region of the piezoelectric film sensor shown in fig. 4, the time at which the first piezoelectric film F1 detects the tap event is T1, the time at which the second piezoelectric film F2 detects the tap event is T2, the time at which the third piezoelectric film F3 detects the tap event is T3, and the time at which the fourth piezoelectric film F4 detects the tap event is T4. Then, the time difference between the detection of the knocking event by the two piezoelectric films can be represented as T2-T1, T3-T1, T4-T1, T3-T2, T4-T2, T4-T3. According to fig. 4 and 7, it can be deduced that the absolute value of any one of the time differences T2-T1, T3-T1, T4-T1, T3-T2, T4-T2, T4-T3 is not greater than a first threshold Z1, which first threshold Z1 can be calculated according to the following formula (3):
Z1＝L2/V (3)，
wherein the content of the first and second substances,
l2 is two piezoelectric films F1, F3 facing each other; distance between the inner edges of F2, F4;
v is the propagation speed of the mechanical wave in the touch panel 10 generated on the touch panel 10 by the tap event.
As shown in fig. 4 and 7, in the illustrated embodiment, when the absolute value of any one of the calculated time differences is not greater than the first threshold value Z1, the position determination means may determine that the occurrence position of the knocking event is in the inner area of the piezoelectric thin film sensor, but not in the outer area of the piezoelectric thin film sensor.
In the embodiment shown in fig. 7, the absolute value | T3-T1| of the time difference T3-T1 is the largest, and the position determination means can determine that the occurrence position of the knocking event is in the inner area of the piezoelectric film sensor but not in the outer area of the piezoelectric film sensor as long as | T3-T1| is not greater than the first threshold value Z1.
As shown in fig. 5 and 6, when a tap event occurs in the outer region of the piezoelectric film sensor shown in fig. 4, the time at which the first piezoelectric film F1 detects the tap event is T1, the time at which the second piezoelectric film F2 detects the tap event is T2, the time at which the third piezoelectric film F3 detects the tap event is T3, and the time at which the fourth piezoelectric film F4 detects the tap event is T4. Then, the time difference between the detection of the knocking event by the two piezoelectric films can be represented as T2-T1, T3-T1, T4-T1, T3-T2, T4-T2, T4-T3. From fig. 4, 5 and 6, it can be deduced that the absolute value of any one of the time differences T2-T1, T3-T1, T4-T1, T3-T2, T4-T2 and T4-T3 is necessarily greater than the second threshold Z2 greater than the first threshold Z1, and the second threshold Z2 should satisfy the following relation (4):
Z1<Z2<(L1+L2)/2V (4)，
wherein the content of the first and second substances,
l1 is two piezoelectric films F1, F3 facing each other; distance between the outer sides of F2, F4.
As shown in fig. 4, 5, and 6, in the illustrated embodiment, when the absolute value of any one of the calculated time differences is greater than a second threshold value Z2 that is greater than the first threshold value Z1, the position determination device may determine that the occurrence position of the tap event is not in the inner area of the piezoelectric film sensor but in the outer area of the piezoelectric film sensor.
In the embodiment shown in fig. 5, the absolute value | T3-T1| of the time difference T3-T1 is the largest, and as long as | T3-T1| is greater than the second threshold value Z2, the position determination means can determine that the occurrence position of the knocking event is not in the inner area of the piezoelectric film sensor but in the outer area of the piezoelectric film sensor.
In the embodiment shown in fig. 6, the absolute value | T4-T2| of the time difference T4-T2 is the largest, and as long as | T4-T2| is greater than the second threshold value Z2, the position determination means can determine that the occurrence position of the knocking event is not in the inner area of the piezoelectric film sensor but in the outer area of the piezoelectric film sensor.
In one embodiment of the present invention, the signal processing device may be configured to amplify and shape the detection signals output from the plurality of piezoelectric thin films C1 and C2.
In one embodiment of the present invention, the position determining device may be a microprocessor or a computer, which can identify the occurrence position of the knocking event through an internal algorithm.
It will be appreciated by those skilled in the art that the embodiments described above are exemplary and can be modified by those skilled in the art, and that the structures described in the various embodiments can be freely combined without conflict in structure or principle.
Although the present invention has been described in connection with the accompanying drawings, the embodiments disclosed in the drawings are intended to be illustrative of preferred embodiments of the present invention and should not be construed as limiting the invention.
Although a few embodiments of the present general inventive concept have been shown and described, it will be appreciated by those skilled in the art that changes may be made in these embodiments without departing from the principles and spirit of the general inventive concept, the scope of which is defined in the appended claims and their equivalents.
It should be noted that the word "comprising" does not exclude other elements or steps, and the words "a" or "an" do not exclude a plurality. Furthermore, any reference signs in the claims shall not be construed as limiting the scope of the invention.
Claims (10)
1. A piezoelectric thin film sensing device comprising:
a piezoelectric thin film sensor adapted to be attached to a touch panel (10) for detecting a tap event applied to the touch panel (10),
the method is characterized in that:
the piezoelectric film sensor includes a plurality of piezoelectric films (C1, C2) and defines an interior region, the interior region being enclosed by the piezoelectric films, and the piezoelectric films defining boundaries of the interior region;
the piezoelectric film sensing device further includes a position determination device adapted to calculate a time difference when any two piezoelectric films (C1, C2) sense the knocking event from the sensing signals outputted from the plurality of piezoelectric films (C1, C2), and determine whether the occurrence position of the knocking event is in the internal region of the piezoelectric film sensor from the calculated time difference.
2. The piezoelectric thin film sensing device according to claim 1, wherein:
the piezoelectric film detection device further comprises a signal processing device for processing detection signals output by the plurality of piezoelectric films (C1, C2);
the position judgment device is suitable for judging whether the occurrence position of the knocking event is in the inner area of the piezoelectric film sensor or not according to the processed detection signal.
3. The piezoelectric thin film sensing device according to claim 1, wherein:
when the absolute value of any one of the calculated time differences is not greater than the first threshold value Z1, the position determination means determines that the occurrence position of the knocking event is in the inner area of the piezoelectric thin-film sensor but not in the outer area of the piezoelectric thin-film sensor.
4. The piezoelectric thin film detection apparatus according to claim 3, wherein:
when the absolute value of any one of the calculated time differences is greater than a second threshold value Z2 that is greater than the first threshold value Z1, the position determination means determines that the occurrence position of the tap event is not in the inner region of the piezoelectric thin-film sensor but in the outer region of the piezoelectric thin-film sensor.
5. The piezoelectric thin film sensing device according to claim 4, wherein the piezoelectric thin film sensor includes:
an annular first piezoelectric film (C1), the inner region being a circular inner region defined by the first piezoelectric film (C1); and
a circular second piezoelectric film (C2) centrally disposed in an interior region of the first piezoelectric film (C1).
6. The piezoelectric thin film sensing device according to claim 5, wherein the first threshold value Z1 is calculated according to the following formula (1):
Z1＝R12/V (1)，
wherein the content of the first and second substances,
r12 is the radius of the inner circle of the annular first piezoelectric film (C1),
v is the propagation speed of the mechanical wave generated on the touch panel (10) by the tapping event in the touch panel (10).
7. The piezoelectric thin film detection device according to claim 6, wherein the second threshold value Z2 satisfies the following relation:
Z1＜Z2＜(R11-R2)/V (2)，
wherein the content of the first and second substances,
r11 is the radius of the outer circle of the annular first piezoelectric film (C1),
r2 is the radius of the circular second piezoelectric film (C2).
8. The piezoelectric thin film sensing device according to claim 4, wherein the piezoelectric thin film sensor includes:
the piezoelectric film structure comprises four rectangular piezoelectric films (F1, F2, F3 and F4), the four rectangular piezoelectric films (F1, F2, F3 and F4) surround a square frame, and the inner area is a square inner area defined by the four rectangular piezoelectric films (F1, F2, F3 and F4).
9. The piezoelectric thin film sensing device as claimed in claim 8, wherein the first threshold value Z1 is calculated according to the following formula:
Z1＝L2/V (3)，
wherein the content of the first and second substances,
l2 is the distance between the inner sides of two opposite piezoelectric films (F1, F3; F2, F4);
v is the propagation speed of the mechanical wave generated on the touch panel (10) by the tapping event in the touch panel (10).
10. The piezoelectric thin film sensing device according to claim 9, wherein the second threshold value Z2 satisfies the following relation (4):
Z1＜Z2＜(L1+L2)/2V (4)，
wherein the content of the first and second substances,
l1 is the distance between the outer sides of two opposing piezoelectric films (F1, F3; F2, F4).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810271729.0A CN110319955B (en) | 2018-03-29 | 2018-03-29 | Piezoelectric thin film detection device and piezoelectric thin film sensor |
| PCT/EP2019/057809 WO2019185767A1 (en) | 2018-03-29 | 2019-03-27 | Piezoelectric film detector and piezoelectric film sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810271729.0A CN110319955B (en) | 2018-03-29 | 2018-03-29 | Piezoelectric thin film detection device and piezoelectric thin film sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110319955A CN110319955A (en) | 2019-10-11 |
| CN110319955B true CN110319955B (en) | 2021-06-18 |
Family
ID=65951595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810271729.0A Active CN110319955B (en) | 2018-03-29 | 2018-03-29 | Piezoelectric thin film detection device and piezoelectric thin film sensor |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110319955B (en) |
| WO (1) | WO2019185767A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111103998A (en) * | 2018-10-26 | 2020-05-05 | 泰科电子(上海)有限公司 | Touch control detection device |
| CN113311488A (en) * | 2020-02-26 | 2021-08-27 | 泰科电子(上海)有限公司 | Device for detecting and device for handling objects |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1256809A (en) * | 1998-01-16 | 2000-06-14 | 三菱电机株式会社 | Thin-film pietoelectric element |
| CN1480900A (en) * | 2003-03-31 | 2004-03-10 | 深圳市先导电子有限公司 | Transmit and receive unit for handwriting input |
| CN101655771A (en) * | 2009-09-07 | 2010-02-24 | 上海合合信息科技发展有限公司 | Method and system for inputting multi-contact characters |
| CN101916153A (en) * | 2010-08-04 | 2010-12-15 | 中兴通讯股份有限公司 | Method, device and terminal for positioning touch point of touch screen |
| CN101965549A (en) * | 2008-03-12 | 2011-02-02 | 艾勒博科技股份有限公司 | Touch sensor device and pointing coordinate determination method thereof |
| CN101995996A (en) * | 2010-11-30 | 2011-03-30 | 汉王科技股份有限公司 | Touch screen and method for positioning mechanical waves thereof |
| CN104636013A (en) * | 2013-11-11 | 2015-05-20 | Nlt科技股份有限公司 | Piezoelectric sheet, touch panel, and input-output device |
| CN105892767A (en) * | 2014-12-24 | 2016-08-24 | 南京优触电子科技有限公司 | Ultrasonic wave based interactive facility realization method |
| TW201715215A (en) * | 2015-09-09 | 2017-05-01 | 東芝股份有限公司 | Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel |
| CN106775051A (en) * | 2016-11-15 | 2017-05-31 | 深圳天珑无线科技有限公司 | A kind of pressure sensitivity contact panel and pressure sensitivity contactor control device |
| CN108169037A (en) * | 2017-12-15 | 2018-06-15 | 南京航空航天大学 | Continuous heterogeneous large area Impact monitoring network and shock zone localization method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003266663A1 (en) * | 2002-10-01 | 2004-04-23 | National Institute Of Advanced Industrial Science And Technology | Piezoelectric sensor and input device comprising same |
| ITTO20050569A1 (en) * | 2005-08-09 | 2007-02-10 | St Microelectronics Srl | DEVICE AND METHOD OF DETERMINING THE CONTACT POSITION AND CONTACT SENSITIVE ELECTRONIC DEVICE |
| JP5918522B2 (en) * | 2011-12-12 | 2016-05-18 | 太陽誘電株式会社 | Filters and duplexers |
| WO2018056193A1 (en) * | 2016-09-23 | 2018-03-29 | 株式会社村田製作所 | Piezoelectric device and display device |
-
2018
- 2018-03-29 CN CN201810271729.0A patent/CN110319955B/en active Active
-
2019
- 2019-03-27 WO PCT/EP2019/057809 patent/WO2019185767A1/en active Application Filing
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1256809A (en) * | 1998-01-16 | 2000-06-14 | 三菱电机株式会社 | Thin-film pietoelectric element |
| CN1480900A (en) * | 2003-03-31 | 2004-03-10 | 深圳市先导电子有限公司 | Transmit and receive unit for handwriting input |
| CN101965549A (en) * | 2008-03-12 | 2011-02-02 | 艾勒博科技股份有限公司 | Touch sensor device and pointing coordinate determination method thereof |
| CN101655771A (en) * | 2009-09-07 | 2010-02-24 | 上海合合信息科技发展有限公司 | Method and system for inputting multi-contact characters |
| CN101916153A (en) * | 2010-08-04 | 2010-12-15 | 中兴通讯股份有限公司 | Method, device and terminal for positioning touch point of touch screen |
| CN101995996A (en) * | 2010-11-30 | 2011-03-30 | 汉王科技股份有限公司 | Touch screen and method for positioning mechanical waves thereof |
| CN104636013A (en) * | 2013-11-11 | 2015-05-20 | Nlt科技股份有限公司 | Piezoelectric sheet, touch panel, and input-output device |
| CN105892767A (en) * | 2014-12-24 | 2016-08-24 | 南京优触电子科技有限公司 | Ultrasonic wave based interactive facility realization method |
| TW201715215A (en) * | 2015-09-09 | 2017-05-01 | 東芝股份有限公司 | Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel |
| CN106775051A (en) * | 2016-11-15 | 2017-05-31 | 深圳天珑无线科技有限公司 | A kind of pressure sensitivity contact panel and pressure sensitivity contactor control device |
| CN108169037A (en) * | 2017-12-15 | 2018-06-15 | 南京航空航天大学 | Continuous heterogeneous large area Impact monitoring network and shock zone localization method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110319955A (en) | 2019-10-11 |
| WO2019185767A1 (en) | 2019-10-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2019018861A3 (en) | Defective ultrasonic transducer detection in an ultrasonic sensor | |
| JP6587874B2 (en) | Detection system, signal processing apparatus, and detection method | |
| CN110319955B (en) | Piezoelectric thin film detection device and piezoelectric thin film sensor | |
| US10724996B2 (en) | Position location system, position location method, and non-transitory computer readable storage medium | |
| CN105954358B (en) | A kind of small defect location detection method of supersonic guide-wave that TR is combined with Duffing systems | |
| KR101956160B1 (en) | Leak detecting apparatus | |
| JP6652054B2 (en) | Position determining device, leak detection system, position determining method, and computer-readable recording medium | |
| JP6806816B2 (en) | Distance difference-Piping leak detectors and methods using frequency analysis | |
| WO2015141129A1 (en) | Speed-of-sound calculation device, speed-of-sound calculation method, and speed-of-sound calculation program | |
| CN103775830B (en) | A kind of high-temperature steam Leak Detection and Location System and method | |
| WO2015082702A3 (en) | Downhole sonar | |
| JP6519477B2 (en) | Leakage position calculation device, leakage position calculation method, computer readable recording medium, vibration calculation device, and arithmetic device | |
| CN108966667B (en) | Position calibration system, position calibration method, and computer-readable recording medium | |
| JP6802113B2 (en) | Ultrasonography method | |
| KR102035266B1 (en) | Small leak detection apparatus of the pipings using time-spatial of the measured acouistic signal and small leak detection method using the same | |
| KR20200040553A (en) | Defect diagnostics apparatus and method using acoustic emission sensor | |
| GB2506838A (en) | A method of identifying leaks in a fluid carrying conduit using a pig | |
| JP6458164B2 (en) | Apparatus and method for measuring deposit thickness using ultrasonic waves | |
| JP4499617B2 (en) | Lightning position limiting system and method | |
| WO2016013201A1 (en) | Determination device, determination method, and computer-readable recording medium | |
| JP6349861B2 (en) | Leak detection device, leak detection system, leak detection method and program | |
| US11448565B2 (en) | Measurement time determination device, measurement time determination method, and computer-readable recording medium | |
| JP6218061B2 (en) | Object detection device | |
| CN211853551U (en) | Pipeline safety system based on leakage monitoring | |
| JP2006337329A (en) | Thunder position estimating system and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |