CN110284116A - 一种基于真空的光学镜片镀膜装置 - Google Patents
一种基于真空的光学镜片镀膜装置 Download PDFInfo
- Publication number
- CN110284116A CN110284116A CN201910735731.3A CN201910735731A CN110284116A CN 110284116 A CN110284116 A CN 110284116A CN 201910735731 A CN201910735731 A CN 201910735731A CN 110284116 A CN110284116 A CN 110284116A
- Authority
- CN
- China
- Prior art keywords
- permanent magnet
- turntable
- coating
- optical lens
- fixedly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optical Couplings Of Light Guides (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910735731.3A CN110284116B (zh) | 2019-08-09 | 2019-08-09 | 一种基于真空的光学镜片镀膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910735731.3A CN110284116B (zh) | 2019-08-09 | 2019-08-09 | 一种基于真空的光学镜片镀膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110284116A true CN110284116A (zh) | 2019-09-27 |
CN110284116B CN110284116B (zh) | 2020-04-07 |
Family
ID=68024960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201910735731.3A Active CN110284116B (zh) | 2019-08-09 | 2019-08-09 | 一种基于真空的光学镜片镀膜装置 |
Country Status (1)
Country | Link |
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CN (1) | CN110284116B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0673541A (ja) * | 1992-08-26 | 1994-03-15 | Kubota Corp | 蒸着装置用基板ホルダー |
CN204727944U (zh) * | 2015-03-05 | 2015-10-28 | 中国建筑材料科学研究总院 | 卡具和真空镀膜机 |
CN105296951A (zh) * | 2015-10-20 | 2016-02-03 | 中国科学院长春光学精密机械与物理研究所 | 可调节式光学镀膜夹具 |
CN209178466U (zh) * | 2018-10-19 | 2019-07-30 | 信阳市图展光电有限公司 | 一种光学镜片镀膜机 |
-
2019
- 2019-08-09 CN CN201910735731.3A patent/CN110284116B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0673541A (ja) * | 1992-08-26 | 1994-03-15 | Kubota Corp | 蒸着装置用基板ホルダー |
CN204727944U (zh) * | 2015-03-05 | 2015-10-28 | 中国建筑材料科学研究总院 | 卡具和真空镀膜机 |
CN105296951A (zh) * | 2015-10-20 | 2016-02-03 | 中国科学院长春光学精密机械与物理研究所 | 可调节式光学镀膜夹具 |
CN209178466U (zh) * | 2018-10-19 | 2019-07-30 | 信阳市图展光电有限公司 | 一种光学镜片镀膜机 |
Also Published As
Publication number | Publication date |
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CN110284116B (zh) | 2020-04-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200311 Address after: 528437 building C, Zhengda Industrial Park, No. 24, Jiangling West Road, Torch Development Zone, Zhongshan City, Guangdong Province Applicant after: ZHONGSHAN GR OPTICS CO.,LTD. Address before: 311199 Nanyuan Street and Hehe Fortune Center, Yuhang District, Hangzhou City, Zhejiang Province 2310 Applicant before: Yan Chufan |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A Vacuum Based Optical Lens Coating Device Effective date of registration: 20230531 Granted publication date: 20200407 Pledgee: Zhongshan branch of Dongguan Bank Co.,Ltd. Pledgor: ZHONGSHAN GR OPTICS CO.,LTD. Registration number: Y2023980042397 |