CN110278513A - Waterproof ventilated membrane and its manufacturing method and Microspeaker - Google Patents
Waterproof ventilated membrane and its manufacturing method and Microspeaker Download PDFInfo
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- CN110278513A CN110278513A CN201910433783.5A CN201910433783A CN110278513A CN 110278513 A CN110278513 A CN 110278513A CN 201910433783 A CN201910433783 A CN 201910433783A CN 110278513 A CN110278513 A CN 110278513A
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- 239000012528 membrane Substances 0.000 title claims abstract description 50
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 claims description 22
- 238000012545 processing Methods 0.000 claims description 14
- 238000004080 punching Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 6
- 238000010146 3D printing Methods 0.000 claims description 4
- 238000003486 chemical etching Methods 0.000 claims description 4
- 238000005553 drilling Methods 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 4
- 238000000992 sputter etching Methods 0.000 claims description 4
- 238000009760 electrical discharge machining Methods 0.000 claims description 3
- 239000011344 liquid material Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 2
- -1 nonmetallic Substances 0.000 claims description 2
- 239000005416 organic matter Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010892 electric spark Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/02—Details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/06—Loudspeakers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Manufacturing & Machinery (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Abstract
The present invention provides a kind of waterproof ventilated membrane, its manufacturing method and the Microspeaker with the waterproof ventilated membrane.The waterproof ventilated membrane includes: diaphragm, with first surface and the second surface opposite with the first surface；The first surface in multiple first layer holes, first layer hole from the diaphragm extends into the diaphragm；The second surface in multiple second layer holes, second layer hole from the diaphragm extends into the diaphragm；Each second layer hole is opposite at least one first layer hole, and the first layer hole of second layer hole corresponding thereto mutually passes to the through-hole to be formed through the diaphragm.In this way, the waterproof ventilated membrane in the present invention can not only guarantee logical acoustic mass of ventilating, there can also be enough film thicknesses, so as to guarantee waterproof and breathable film strength, so as to improve its anti-water depth.
Description
[technical field]
The invention belongs to Microspeaker field, it is more particularly to a kind of waterproof ventilated membrane and its manufacturing method, and tool
There is the Microspeaker of the waterproof ventilated membrane.
[background technique]
Existing smart phone, many equipment such as tablet computer and the wrist-watch that can be conversed have waterproof requirement.In order to reach
Better waterproof effect, best bet are exactly made into equipment totally-enclosed.As wireless charging and the extensive of wireless headset are answered
With, smart phone, the hole in the equipment such as tablet computer and the wrist-watch that can be conversed is fewer and fewer, and the hole left is only left for acoustic pressure
The microphone aperture of input and the speaker hole exported for acoustic pressure.This is because in order to allow sound preferably to transmit, sound transmission
Path cannot completely enclose.And how to guarantee that the path of endless totally enclosed sound transmission can waterproof be exactly effectively one
A problem to be solved.
Current technology is to do water-protected enclosure using waterproof ventilated membrane.The waterproof ventilated membrane now generally used is all organic material
Material, on film there are many micron level aperture, sound can smoothly by these aperture water due to tension without
Method is by these apertures, to realize the water-proof function on acoustic transmission path.But due to technique, on film
Hole accomplish sufficiently small, this tunic must be made thin.Organic material itself is also relatively soft, is very easy to damage, installation process
Middle touched by hand will damage, and also need to design special protection in practical application.Secondly as film strength is insufficient, energy
The hydraulic pressure enough born, that is, the depth of waterproof have the upper limit.
Current technology is that one layer of waterproof ventilated membrane is attached to piece of metal on piece, there is macropore, the gold between hole on sheet metal
Belong to the anti-pressure ability that structure reinforces organic film as reinforcing rib.But the anti-pressure ability of organic film itself is limited, even if there is metal
Structural strengthening is also difficult to meet the higher and higher waterproof requirement that more and more new products propose now.
Therefore, it is necessary to propose a kind of improved technical solution to overcome the above problem.
[summary of the invention]
The purpose of the present invention is to provide a kind of waterproof ventilated membrane and its manufacturing methods, and with the waterproof ventilated membrane
Microspeaker, the present invention in waterproof ventilated membrane can guarantee logical acoustic mass of ventilating, it is possible to have enough film thicknesses, from
And it can guarantee waterproof and breathable film strength.
According to an aspect of the present invention, the present invention provides a kind of waterproof ventilated membrane comprising: diaphragm has first
Surface and the second surface opposite with the first surface；Multiple first layer holes, the first layer hole is from the first of the diaphragm
Surface extends into the diaphragm；The second surface in multiple second layer holes, second layer hole from the diaphragm extends into
In the diaphragm；Each second layer hole is opposite at least one first layer hole, and the first layer hole phase of second layer hole corresponding thereto
Pass to the through-hole to be formed through the diaphragm.
According to another aspect of the present invention, the present invention provides a kind of manufacturing method of waterproof ventilated membrane comprising: it provides
Diaphragm, the diaphragm have first surface and the second surface opposite with the first surface；From the first surface of the diaphragm
It is punched into the diaphragm, multiple first layer holes is formed with the first surface side in the diaphragm；From the second table of the diaphragm
Towards punching in the diaphragm, multiple second layer holes are formed with the second surface side in the diaphragm, wherein each second layer hole
It is opposite at least one first layer hole, and the first layer hole of second layer hole corresponding thereto mutually passes to be formed through the logical of the diaphragm
Hole.
According to another aspect of the present invention, the present invention provides a kind of Microspeaker comprising shell is located at the shell
Intracorporal motor sub-assembly, and the vibration plate being connected on the inner sidewall of the shell.The vibration plate and it is provided in the present invention on
Waterproof ventilated membrane is stated to be integrated on a film.
Compared with prior art, the through-hole through diaphragm is made in the present invention by the way of two-sided punching.In this way, of the invention
In waterproof ventilated membrane can not only guarantee logical acoustic mass of ventilating, can also have enough film thicknesses, so as to guarantee to prevent
Water is breathed freely film strength, so as to improve its anti-water depth.
[Detailed description of the invention]
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill of field, without any creative labor, it can also be obtained according to these attached drawings other
Attached drawing.Wherein:
Fig. 1 is the part longitudinal profile schematic diagram after diaphragm is directly punched；
Fig. 2 is longitudinal profile schematic diagram of the diaphragm after the punching of anisotropy rot etching technique；
Fig. 3 is the flow chart of the manufacturing method of the waterproof ventilated membrane of the present invention in one embodiment；
Fig. 4 is in one embodiment using the part of waterproof ventilated membrane made from present invention manufacturing method shown in Fig. 3
Longitudinal profile schematic diagram；
Fig. 5 is in another embodiment using the portion of waterproof ventilated membrane made from present invention manufacturing method shown in Fig. 3
Divide longitudinal profile schematic diagram；
Fig. 6 is to use two-sided dislocation of different shapes made from the manufacturing method of present invention waterproof ventilated membrane shown in Fig. 3
The top view in hole；
Fig. 7 illustrates a kind of increasing material shrinkage cavity technique；
Fig. 8 is the schematic diagram that liquid material shrinkage cavity technique is blown in pressurization.
[specific embodiment]
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real
Applying mode, the present invention is described in further detail.
" one embodiment " or " embodiment " referred to herein, which refers to, may be included at least one implementation of the invention
A particular feature, structure, or characteristic." in one embodiment " that different places occur in the present specification not refers both to same
A embodiment, nor the individual or selective embodiment mutually exclusive with other embodiments.Unless stated otherwise, herein
In connection, be connected, connect expression be electrically connected word indicate directly or indirectly to be electrical connected.
The shape in " hole " of middle finger of the present invention can be various cross sectional shapes, for example round, rectangular, rectangle etc., aperture are
The maximum width or minimum widith in the section of finger-hole, and it is not necessarily the diameter of round hole, for example the section in hole is square, that
The aperture in the hole can be the length for criticizing rectangular catercorner length or a line, and one word of diameter in the diameter in hole is not yet
Mean the section in hole must be it is round, diameter at this time is a generalized concept, can with the maximum width in the section of finger-hole or
Minimum widith, such as the diameter of slot can refer to the diagonal line of slot or the length of short side.
In waterproof ventilated membrane, the effective via area of unit area is referred to: each through-hole is straight on film (or diaphragm)
Diameter may change, and area is the effective via area in hole at the minimum diameter of each through-hole, on the film of unit area, Suo Youtong
The summation of the effective via area in the hole in hole is the effective via area of unit area (hereinafter referred to as effective area).Obviously, it to mention
On the one hand the high effective via area of unit area is that varying aperture as far as possible that hole is done is small, is on the one hand the close of hole to be improved
Degree.
The one of the waterproof ventilated membrane is big, and manufacture difficult point is exactly, on the one hand in order to improve the fire resistance characteristic of film, hole on film
Diametric requirements are small as far as possible, and on the other hand in order to guarantee film strength, film needs certain thickness.The depth of through-hole in this way on film
Spending can be relatively high with the ratio (referred to as aspect ratio) of diameter, so that the difficulty in processing can be brought.It can be wanted according to application
It asks to select manufacturing process.
A kind of method is directly to punch (or single side punching) on ready diaphragm 110, many micron-sized to be formed
Through-hole 120, as shown in Figure 1, its part longitudinal profile schematic diagram after directly being punched for diaphragm.The technique of punching has mechanical add
Work, electrical discharge machining, laser processing, 3D are (3Dimensions, three-dimensional) printing, chemical etching, ion etching, photoetching etc..Make
It is machined into and is punched with the mode of electric spark, in 10 microns, aperture is bigger for minimum-value aperture, and the hydraulic pressure that film can be born is not
It is too high, punched if aspect ratio is relatively high it is difficult, and be machined it is relatively high to the requirement of mechanical strength of film, hole can not
That does is too close.Laser processing punching, due to the limitation of spot size, the minimum-value aperture that can generally do is also 10 microns, deep
Diameter compare higher words punch it is difficult, it is relatively good with ultrafast laser (nanosecond, picosecond, femtosecond laser) processing effect, but big
The processing cost of the hole of amount one by one is relatively high.Due to being increasing material manufacturing, the problem of high aspect ratio, is easier to solve for 3D printing,
But the precision minimum of existing 3D printing, also at 10 microns, this means that the deep hole that make 10 microns or less apertures is relatively more tired
It is difficult.Using chemical etching method, make what the hole of small-bore was possible to, but the size in hole and the depth of through-hole have relationship,
Isotropic etch is difficult to make the through-hole of high aspect ratio, and varying aperture is also bigger.If anisotropic etch, current material
In almost without the nearly right angle of corrosion corner connection material, it means that through-hole can only be the taper for having certain angle, and can only meet has
The not high application of area requirements is imitated, as shown in Fig. 2, it illustrates for longitudinal profile of the diaphragm after the punching of anisotropy rot etching technique
Figure, wherein the cone angle of the through-hole 220 formed on diaphragm 210 is fixed.The size in the hole of ion etching and direct photoetching can control
It is relatively good, but process also more difficult if aspect ratio is relatively high, and processing cost is relatively high, if direct photoetching
Photoresist after photoetching itself is used as structural material performance not to be able to satisfy the demand of relatively high requirement, generally to combine subsequent reverse mould
Technique.
It is directly punched to overcome the shortcomings of above-mentioned on diaphragm, the present invention provides a kind of improved waterproof ventilated membranes
Manufacturing method.As shown in figure 3, the flow chart of the manufacturing method of its waterproof ventilated membrane for the present invention in one embodiment；Such as Fig. 4
It is shown, in one embodiment, the part using waterproof ventilated membrane made from present invention manufacturing method shown in Fig. 3 is longitudinal
Diagrammatic cross-section；As shown in figure 5, it is in another embodiment, to prevent using made from present invention manufacturing method shown in Fig. 3
The part longitudinal profile schematic diagram of water ventilated membrane.
The manufacturing method of waterproof ventilated membrane shown in Fig. 3 is specifically introduced below in conjunction with Fig. 4 and Fig. 5.
Step 310, diaphragm 410,510 is provided, the diaphragm 410,510 has first surface 412,512 and with described the
The opposite second surface 414,514 in one surface 412,512.
Step 320, it is punched from the first surface 412,512 of the diaphragm 410,510 into the diaphragm 410,510, with
Multiple first layer holes 422,522 are extended to form in the first surface 412 of the diaphragm 410,510,512 sides.Wherein, described first
The first surface 412,512 of layer hole 422,522 from the diaphragm 410,510 extends into the diaphragm 410,510.
Step 330, it is punched from the second surface 414,514 of the diaphragm 410,510 into the diaphragm 410,510, with
Multiple second layer holes 424,524 are formed in the second surface 414 of the diaphragm 410,510,514 sides.Wherein, the second layer hole
424, it 524 is extended into the diaphragm 410,510 from the second surface 414,514 of the diaphragm 410,510.
Wherein, each second layer hole 424,524 is opposite at least one first layer hole 422,522, and second layer hole 424,
524 first layer holes 422 corresponding thereto, 522 phases pass to the through-hole 420,520 to be formed through the diaphragm 410,510.
In the embodiment shown in fig. 4, a second layer hole 424 and a first layer hole 422 are opposite, second layer hole 424
First layer hole 422 corresponding thereto shifts to install, and the dislocation of first layer hole 422 of second layer hole 424 corresponding thereto communicates,
In, the area of section of the interface portion in second layer hole 424 and opposite first layer hole 422 is less than second layer hole 424 and first layer
The area of section in hole 422.Since the through-hole 420 through diaphragm 410 being made by the way of two-sided punching, it can overcome
The high bring processing difficulties of hole aspect ratio, and the method for dislocation can be used also to reduce the minimum aperture of through-hole 420 when punching
Diameter (or effective aperture).The aperture in first layer hole and second layer hole usually can be less than or equal to 50 microns, preferably can be small
In being equal to 20 microns, while the aspect ratio in first layer hole and second layer hole can be between 1-15, it is preferred that can 3-15 it
Between, such as 8 or 10, to improve the water-proof function of film.
In the embodiment shown in fig. 5, a second layer hole 524 and three first layer holes 522 are opposite, wherein first layer
The small effective aperture to guarantee through-hole 520 that hole 522 is beaten is small；Second layer hole 524 is beaten big, is communicated with three first layer holes 522,
It can be beaten in same aspect ratio lower opening deeper, guarantee that film can do thicker, intensity is more preferable.In other embodiments, one
Can be opposite with 2,4 or more first layer holes 522 and communicate in second layer hole 524.In a preferred embodiment, of the invention
In diaphragm 410,510 be monofilm.
In one embodiment, the punching in the first layer hole 422,522 and second layer hole 424,524 is formed in the present invention
Technique can be machining, electrical discharge machining, laser processing, 3D printing, chemical etching, ion etching and/or photoetching.Another
In one embodiment, the material of diaphragm 410,510 in the present invention can be metal, nonmetallic, organic matter or by multi-layer
It is combined.
It should be understood that the shape in the first layer hole 422,522 and second layer hole 424,524 punched in the present invention
It can be circle, be also possible to the other shapes such as rectangular；When two-sided punching, the first layer hole 422,522 and second layer hole
424, it 524 can be same shape, be also possible to different shape；Using same shape or first layer hole 422 of different shapes,
522 and second layer hole 424,524 misplace, designed in effective aperture；Dislocation punching when, the one side of diaphragm hole (for example,
The second layer hole of second surface) can misplace communicates with the hole of an another side (for example, first layer hole of first surface), and it can also
It is communicated with dislocation with the hole of multiple another sides, is more convenient processing.
It please refers to shown in Fig. 6, for using not similar shape made from the manufacturing method of present invention waterproof ventilated membrane shown in Fig. 3
The top view of the two-sided dislocation hole (or through-hole) of shape.As shown in Fig. 6 (a), in the upper surface of diaphragm, (it is properly termed as the first table
Face) side forms round upper layer hole (it is properly termed as first layer hole), in lower surface (it is properly termed as second surface) side of diaphragm
Round lower layer's hole (it is properly termed as second layer hole) is formed, round upper layer hole and round lower layer hole dislocation communicate.Such as Fig. 6 (b) institute
Show, diaphragm upper surface side formed square upper layer hole, diaphragm lower face side formed square lower layer hole, square upper layer hole and
The dislocation of square lower layer hole communicates.As shown in Fig. 6 (c), square upper layer hole is formed in the upper surface side of diaphragm, in the lower surface of diaphragm
Side forms round lower layer hole, and square upper layer hole and round lower layer hole dislocation communicate.As shown in Fig. 6 (d), in the upper surface side of diaphragm
4 square upper layer holes are formed, form a corresponding round lower layer hole in the lower face side of diaphragm, 4 square upper layer holes are with 1
The dislocation of a circle lower layer hole communicates.
In conclusion the through-hole through diaphragm is made using two-sided drilling method by the present invention, to overcome hole aspect ratio high band
The processing difficulties come；And design first layer hole is communicated with the dislocation of corresponding second layer hole, to reduce the effective aperture of through-hole, with system
Obtain micron-sized through-hole.In this way, present invention waterproof ventilated membrane as made from two-sided drilling method, the effective through-hole of unit area
The relatively high logical acoustic mass of guarantee ventilation of area, film thickness guarantees film strength enough, to improve anti-water depth.Furthermore this hair
Bright also to design film thickness according to different application scenarios, the indexs such as pore size and depth select suitable processing method.
Further, in one embodiment, the waterproof ventilated membrane in the present invention further includes being formed with macropore (or open-work)
Support frame (not shown), the diaphragm 410,510 for being formed with the first layer hole 422,522 and second layer hole 424,524 attaches
In on support frame as described above, the structure between macropore reinforces the anti-pressure ability of diaphragm 410,510 as reinforcing rib.Wherein, the support
Frame is sheet metal or high-intensitive high molecular material.If the compression strength of the waterproof ventilated membrane in the present invention is sufficiently high, waterproofness
It more preferably, and can can directly be used if film-strength is high, the support for not needing or reducing metallic support (or support frame) is wanted
It asks, installation operation is also more convenient.
Further, novel waterproof air previous film made from as the present invention using two-sided drilling method is than traditional waterproof
Ventilated membrane is more solid, durable, is hardly damaged, and can bear higher hydraulic pressure, and therefore, the waterproof ventilated membrane in the present invention can be used for wheat
In gram wind and loudspeaker.Since loudspeaker sounding vibration plate is exactly a block film, such loudspeaker sounding vibration plate and waterproof ventilated membrane can
To be integrated on a film, device cost is reduced.In one embodiment, Microspeaker includes shell, is located at the shell
Waterproof and breathable in interior motor sub-assembly, and the vibration plate being connected on the inner sidewall of the shell, the vibration plate and the present invention
Film is integrated on a film.
After forming through-hole on diaphragm, shrinkage cavity processing can also be carried out using shrinkage cavity technique further to reduce effective hole
Diameter, to make up processing technology limitation, pore size is more difficult to do small defect.
Fig. 7 illustrates a kind of increasing material shrinkage cavity technique, for example is electroplated, electroforming, chemical deposition, the modes such as vapor deposition, can
With in the slow accumulated substance 730 in the surface of diaphragm 710, and have the tendency that closing through-hole 720, passes through the speed of control substance accumulation
It can achieve the purpose for reducing the size in hole on the surface of the film with the time of accumulation.
Fig. 8 is that liquid material shrinkage cavity process schematic representation is blown in pressurization.Such as Fig. 8, spraying, coating rotation on the surface of diaphragm 810
Turn liquid or semi liquid state substrate 830, liquid tension has the tendency that closing through-hole 820.The one side of diaphragm 810 it is with air pressure capable of being increased or its
He pressurizes at fluid, will blow this layer of liquid substrate 830 open, and suitable control pressure can also obtain reducing hole after solidifying liquid substrate
Size effect.
It should be pointed out that any change that one skilled in the art does a specific embodiment of the invention
All without departing from the range of claims of the present invention.Correspondingly, the scope of the claims of the invention is also not merely limited to
In previous embodiment.
Claims (13)
1. a kind of waterproof ventilated membrane, characterized in that it comprises:
Diaphragm, with first surface and the second surface opposite with the first surface；
The first surface in multiple first layer holes, first layer hole from the diaphragm extends into the diaphragm；
The second surface in multiple second layer holes, second layer hole from the diaphragm extends into the diaphragm；
Each second layer hole is opposite at least one first layer hole, and the first layer hole of second layer hole corresponding thereto mutually passes to be formed
Through the through-hole of the diaphragm.
2. waterproof ventilated membrane according to claim 1, which is characterized in that
The first layer hole of the second layer hole corresponding thereto, which shifts to install and misplaces, to be communicated,
The effective aperture of the through-hole of the diaphragm is micron order.
3. waterproof ventilated membrane according to claim 1, which is characterized in that
The shape in the first layer hole of the shape in the second layer hole corresponding thereto is identical or different；
The shape in the first layer hole is round or rectangular；
The shape in the second layer hole is circle or rectangular,
The aperture in first layer hole and second layer hole, which is respectively less than, is equal to 50 microns,
The aspect ratio in first layer hole and second layer hole is between 1-15.
4. waterproof ventilated membrane according to claim 1, which is characterized in that
One second layer hole is opposite with multiple first layer holes；Or
One second layer hole is opposite with a first layer hole, and the first layer hole of second layer hole corresponding thereto shifts to install, the second layer
The area of section of the interface portion in hole and opposite first layer hole is less than the area of section in second layer hole and first layer hole.
5. waterproof ventilated membrane according to claim 1, which is characterized in that
The material of the diaphragm is combined for metal, nonmetallic, organic matter or by multi-layer,
First layer hole is that punching is formed on the first surface of the diaphragm, and second layer hole is the second surface in the diaphragm
What upper punching was formed.
6. waterproof ventilated membrane according to claim 1, which is characterized in that it further includes the support frame for being formed with open-work, shape
At having the membrane attaching in the first layer hole and second layer hole on support frame as described above.
7. a kind of manufacturing method of waterproof ventilated membrane, characterized in that it comprises:
Diaphragm is provided, the diaphragm has first surface and the second surface opposite with the first surface；
It is punched from the first surface of the diaphragm into the diaphragm, forms multiple first with the first surface side in the diaphragm
Layer hole；
It is punched from the second surface of the diaphragm into the diaphragm, forms multiple second with the second surface side in the diaphragm
Layer hole,
Wherein, each second layer hole is opposite at least one first layer hole, and the first layer hole of second layer hole corresponding thereto communicates
To form the through-hole for running through the diaphragm.
8. the manufacturing method of waterproof ventilated membrane according to claim 7, which is characterized in that
The first layer hole of the second layer hole corresponding thereto, which shifts to install and misplaces, to be communicated,
The effective aperture of the through-hole of the diaphragm is micron order.
9. the manufacturing method of waterproof ventilated membrane according to claim 7, which is characterized in that
The shape in the first layer hole of the shape in the second layer hole corresponding thereto is identical or different；
The shape in the first layer hole is round or rectangular；
The shape in the second layer hole is round or rectangular.
10. the manufacturing method of waterproof ventilated membrane according to claim 7, which is characterized in that
One second layer hole is opposite with multiple first layer holes；Or
One second layer hole is opposite with a first layer hole, and the first layer hole of second layer hole corresponding thereto shifts to install, the second layer
The area of section of the interface portion in hole and opposite first layer hole is less than the area of section in second layer hole and first layer hole.
11. the manufacturing method of waterproof ventilated membrane according to claim 7, which is characterized in that its further include:
Liquid material technique is blown to diaphragm progress shrinkage cavity processing using increasing material technique or pressurizeing.
12. the manufacturing method of waterproof ventilated membrane according to claim 7, which is characterized in that
Form the drilling technology in the first layer hole and the second layer are as follows: machining, electrical discharge machining, laser processing, 3D printing,
Chemical etching, ion etching and/or photoetching.
13. a kind of Microspeaker comprising shell is located at the intracorporal motor sub-assembly of the shell, and is connected to the shell
Inner sidewall on vibration plate, which is characterized in that
The vibration plate and the waterproof ventilated membrane as described in claim 1-6 is any are integrated on a film.
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| CN201910433783.5A CN110278513A (en) | 2019-05-23 | 2019-05-23 | Waterproof ventilated membrane and its manufacturing method and Microspeaker |
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