CN110262091B - Laser beam transverse inclination displacement electro-optical modulator and inclination displacement generation measuring device - Google Patents
Laser beam transverse inclination displacement electro-optical modulator and inclination displacement generation measuring device Download PDFInfo
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- CN110262091B CN110262091B CN201910417897.0A CN201910417897A CN110262091B CN 110262091 B CN110262091 B CN 110262091B CN 201910417897 A CN201910417897 A CN 201910417897A CN 110262091 B CN110262091 B CN 110262091B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0311—Structural association of optical elements, e.g. lenses, polarizers, phase plates, with the crystal
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Abstract
The invention discloses a laser beam transverse inclination displacement electro-optic modulator and an inclination displacement generation measuring device. And (4) converting the inclination angle modulation into displacement modulation through a lens Fourier transform system. And the two wedge angle crystals are combined to realize the simultaneous modulation of the inclination angle and the displacement. In addition, another phase compensation crystal is added to eliminate redundant phase modulation, resulting in high purity tilt and displacement modulation. The invention has the following advantages: (1) the preparation purity is high. Conventional tilt (displacement) modulators typically produce unwanted displacement (tilt) modulation. (2) The modulation frequency bandwidth. The frequency band of the traditional modulator is narrow, for example, the frequency band of piezoelectric ceramics is up to several hundred kHz, while the bandwidth of the invention can be from 0Hz to several tens GHz based on the electro-optical effect of the crystal.
Description
Technical Field
The invention relates to a modulation device in the field of laser precision measurement and quantum measurement, in particular to a laser beam transverse inclination angle and displacement electro-optic modulator and a laser beam transverse inclination angle and displacement generation and measurement device.
Background
Electro-optical modulators are modulation devices of paramount importance and common in the optical field, such as phase and amplitude modulators and the like. In optical precision measurement, there is generally a high demand for the modulation purity of the modulator. For the measurement of the transverse inclination angle and the displacement of the laser, the measurement precision reaches the nano radian and the angstrom, namely 10-10Rice, which has a high demand on the purity of the modulator.
The most common modulation method at present is piezoelectric ceramic 2002, Treps et al surpass the standard quantum limit of displacement measurement by using non-classical multimode compressed light, 2003, n, Treps et al manufacture a quantum laser pointer, the minimum measurable quantity of which is improved from 2.3 Å to 1.6 Å, 2006, v, Delaubert et al propose a balanced homodyne detection method of TEM10 mode, compared with beam splitting detection, to improve displacement measurement efficiency, 2008, k, Wagner et al experimentally generate spatial entanglement, to confirm the existence of quantum entanglement of macroscopic position and momentum, 2014, shanxi sun constant et al improve the displacement measurement accuracy by using a high-order mode.
Disclosure of Invention
The invention aims to provide a laser beam transverse inclination angle and displacement modulator which is high in purity, high in bandwidth and convenient to adjust.
The invention designs a laser beam transverse inclination angle and displacement electro-optic modulator, which comprises a first wedge-shaped electro-optic modulation crystal, a second wedge-shaped electro-optic modulation crystal, a conversion lens arranged between the first wedge-shaped electro-optic modulation crystal and the second wedge-shaped electro-optic modulation crystal, a phase compensation crystal arranged on the other side of the first wedge-shaped electro-optic modulation crystal relative to the conversion lens, a first signal source, a second signal source and a third signal source; setting a basic mode laser beam, wherein the light beam sequentially passes through a phase compensation crystal, a first wedge-shaped electro-optic modulation crystal, a conversion lens and a second wedge-shaped electro-optic modulation crystal; the distances between the transformation lens and the first wedge-shaped electro-optic modulation crystal and between the transformation lens and the second wedge-shaped electro-optic modulation crystal are set as the focal length of the transformation lens, so that a Fourier transformation system is formed; the first signal source, the second signal source and the third signal source are used for generating sinusoidal signals and realizing frequency synchronization, and the sinusoidal signals are respectively loaded to the first wedge-shaped electro-optic modulation crystal, the second wedge-shaped electro-optic modulation crystal and the phase compensation crystal so as to adjust the signal phase; the side surfaces of the first wedge-shaped electro-optic modulation crystal and the second wedge-shaped electro-optic modulation crystal are plated with metal films, one side of each of the first wedge-shaped electro-optic modulation crystal and the second wedge-shaped electro-optic modulation crystal is bonded to the PCB board paved with the circuit by using conductive adhesive, and the other side of each of the first wedge-shaped electro-optic modulation crystal and the second wedge-shaped electro.
The invention designs a laser beam transverse inclination angle and displacement generating and measuring device, which comprises the laser beam transverse inclination angle and displacement electro-optic modulator, a laser, a mode converter, a balanced homodyne detector, an oscilloscope and a local optical phase monitoring system, wherein the laser beam transverse inclination angle and displacement electro-optic modulator is used for generating a laser beam; the laser outputs a basic mode laser beam which is divided into two parts, one part of the basic mode laser beam enters a laser beam transverse inclination angle and displacement modulator, and the other part of the basic mode laser beam is converted into Hermitian Gaussian mode HG10 serving as local light through a mode converter; probe light and local light formed by modulating a basic mode laser beam by a laser beam transverse inclination angle and a displacement electro-optic modulator enter a balanced homodyne detector, and differential current of the probe light and the local light enters an oscilloscope after demodulation; one arm of the balanced homodyne detector enters the local optical phase monitoring system through a beam splitter of 99/1.
The local optical phase monitoring system comprises a 4F imaging device and an oscilloscope; the 4F imaging device comprises a first lens, a second lens and a beam splitting detector; and the differential current signals of the two parts of the beam splitting detector are input into an oscilloscope, and meanwhile, the displacement inclination angle signal of the balanced homodyne detector is also input into the oscilloscope.
Compared with the reported displacement and inclination angle modulator, the inclination angle and displacement modulator designed by the invention has the advantages of high modulation purity, wide modulation frequency band, miniaturization and encapsulation, low manufacturing cost and the like.
1. The wedge-shaped electro-optic modulation crystal is adopted as the modulation unit, the change of the electro-optic refractive index of the crystal is utilized to generate inclination angle modulation at the crystal, and because the crystal of the light-transmitting part is thin, redundant displacement modulation is not easy to generate, and the purity of the modulator is higher compared with that of the traditional piezoelectric ceramic modulator.
2. Because the modulation frequency band of the electro-optical crystal is wide, from 0Hz to dozens of GHz, the wide-band inclination angle and displacement modulation can be realized.
3. The modulator designed by the invention is composed of units with very small size, the size of a single crystal is within 1 cubic centimeter, the size can be controlled within the range of 2-5 millimeters through the direction, the occupied space is small, the miniaturized packaging can be realized, and the application prospect is better.
4. The modulator designed by the invention adopts an electro-optic crystal with relatively mature technology, has low manufacturing cost and can be produced in batches.
In a word, the inclination angle and displacement modulator designed by the invention has the advantages of high modulation purity, wide frequency band, easy integration, low manufacturing cost and the like, and has important application value.
Drawings
FIG. 1 is a schematic diagram of a tilt and displacement modulator of the present invention
FIG. 2 is a test light path diagram of the tilt and displacement modulator of the present invention
FIG. 3 is a schematic diagram of phase monitoring of the tilt and displacement modulator of the present invention
FIG. 4 is a diagram of the effect of phase compensation
FIG. 5 is a graph of tilt angle measurements
FIG. 6 is a graph of displacement measurement results
Detailed Description
The invention is further described below with reference to the accompanying drawings:
as shown in fig. 1, the present invention provides a laser beam lateral tilt and displacement electro-optical modulator 2, which includes a first wedge-shaped electro-optical modulation crystal 5, a second wedge-shaped electro-optical modulation crystal 7, a transforming lens 6 disposed between the first wedge-shaped electro-optical modulation crystal 5 and the second wedge-shaped electro-optical modulation crystal 7, a phase compensation crystal 8 disposed on the other side of the first wedge-shaped electro-optical modulation crystal 5 relative to the transforming lens 6, and a first signal source 9, a second signal source 10, and a third signal source 11; setting a basic mode laser beam 17, wherein the light beam sequentially passes through a phase compensation crystal 8, a first wedge-shaped electro-optic modulation crystal 5, a conversion lens 6 and a second wedge-shaped electro-optic modulation crystal 7; the distances between the transformation lens 6 and the first wedge-shaped electro-optic modulation crystal 5 and between the transformation lens and the second wedge-shaped electro-optic modulation crystal 7 are set as the focal length of the lens, so that a Fourier transformation system is formed; the first signal source 9, the second signal source 10 and the third signal source 11 are used for generating sinusoidal signals and realizing frequency synchronization, and are respectively loaded to the first wedge-shaped electro-optical modulation crystal 5, the second wedge-shaped electro-optical modulation crystal 7 and the phase compensation crystal 8 so as to adjust the signal phase; the side surfaces of the first wedge-shaped electro-optic modulation crystal 5 and the second wedge-shaped electro-optic modulation crystal 7 are plated with metal films, one side of each of the first wedge-shaped electro-optic modulation crystal and the second wedge-shaped electro-optic modulation crystal is bonded to the PCB board paved with the circuit by using conductive adhesive, and the other side of each of the first wedge-shaped electro-optic modulation crystal and the second wedge-shaped electro.
A wedge angle smaller than 10 degrees is arranged between the two surfaces of the first wedge-shaped electro-optic modulation crystal 5 and the second wedge-shaped electro-optic modulation crystal 7 in the light passing direction, so that the passing laser beam is approximately considered to have no astigmatism, namely the wedge-shaped electro-optic modulation crystal does not reduce the beam quality, and the side surface of the wedge-shaped electro-optic modulation crystal is plated with a metal film for loading voltage; the phase compensation crystal 8 is made of the same material as the first wedge-shaped electro-optic modulation crystal 5 and the second wedge-shaped electro-optic modulation crystal 7, but the two surfaces in the light passing direction are parallel, and the side surfaces are plated with metal films for loading voltage.
Fig. 1 is a schematic diagram of the present invention, a fundamental mode laser beam 17 as a probe laser passes through a first wedge-shaped electro-optical modulation crystal 5, a sinusoidal voltage signal generated by a first signal source 9 is loaded on the first wedge-shaped electro-optical modulation crystal 5, so that the fundamental mode laser beam 17 is driven by the voltage of the sinusoidal signal to generate a beam tilt angle modulation, and then the fundamental mode laser beam 17 passes through a fourier transform lens 6, the primary tilt angle modulation is converted into a displacement modulation at a fourier transform plane, i.e., a second wedge-shaped electro-optical modulation crystal 7, and simultaneously, a sinusoidal signal generated by a second signal source 10 is loaded on the second wedge-shaped electro-optical modulation crystal 7, so that the tilt angle modulation is generated at the second wedge-shaped electro-optical modulation crystal 7. Thus, the first wedge-shaped electro-optical modulation crystal 5 and the second wedge-shaped electro-optical modulation crystal 7 can simultaneously generate displacement and tilt angle modulation at the same position, namely, the second wedge-shaped electro-optical modulation crystal 7. Meanwhile, the first wedge-shaped electro-optical modulation crystal 5 and the second wedge-shaped electro-optical modulation crystal 7 must generate redundant phase modulation, the phase modulation is compensated by the phase compensation crystal 8, and the phase compensation crystal 8 is loaded with a sinusoidal signal generated by a third signal source 11. The frequency of the signal sources 9, 10 and 11 is the same, and the phase of the third signal source 11 is adjusted to just compensate the phase modulation generated by the first wedge-shaped electro-optical modulation crystal 5 and the second wedge-shaped electro-optical modulation crystal 7.
Sinusoidal signals are loaded on the first wedge-shaped electro-optic modulation crystal 5, the second wedge-shaped electro-optic modulation crystal 7 and the phase compensation crystal 8 respectively, the three sinusoidal signals are synchronized to achieve the same frequency, and phase compensation is achieved through phase locking to achieve zero phase modulation; the inclination angle modulation generated by the first wedge-shaped electro-optic modulation crystal 5 generates displacement modulation at the second wedge-shaped electro-optic modulation crystal 7 through Fourier lens transformation, meanwhile, the second wedge-shaped electro-optic modulation crystal 7 generates inclination angle modulation, and finally, the displacement and inclination angle modulation are realized at the second wedge-shaped electro-optic modulation crystal 7.
As shown in fig. 2, the present invention designs a laser beam lateral tilt angle and displacement generating and measuring device, which comprises the laser beam lateral tilt angle and displacement electro-optical modulator 2 according to the above technical solution, further comprising a laser 1, a mode converter 12, a balanced homodyne detector 3, an oscilloscope 13, and a local optical phase monitoring system 22; the laser 1 outputs a basic mode laser beam and is divided into two parts, one part of the laser beam 17 enters the laser beam transverse inclination angle and displacement modulator 2 as probe light, and the other part of the laser beam 18 is converted into Hermitian Gauss mode HG10 as local light 19 through the mode converter 12; probe light 20 and local light 19 formed by modulating a part of laser beams 17 by a laser beam transverse inclination angle and displacement electro-optic modulator 2 enter a balanced homodyne detector 3, and differential current of the probe light and the local light enters an oscilloscope 13 after demodulation; one arm of the balanced homodyne detector 3 passes through the 99/1 beam splitter 21 into the local optical phase monitoring system 22.
The local optical phase monitoring system 22 comprises a 4F imaging device 4 and an oscilloscope 13; the 4F imaging device 4 comprises lenses 14 and 15 and a beam splitting detector 16; the differential current signal of the two parts of the beam splitting detector 16 is input to the oscilloscope 13, and the displacement tilt angle signal of the balanced homodyne detector 3 is also input to the oscilloscope 13.
Fig. 2 is a test light path of the tilt and displacement modulator of the present invention. The laser 1 outputs a fundamental mode gaussian beam, a part of the split fundamental mode laser beam 17 is used as probe light for detection, and the other part of the fundamental mode laser beam 18 is converted into TEM10 mode laser as local light 19 for detection through the mode conversion cavity 12. The fundamental mode laser beam 17 passes through the inclination angle and displacement electro-optical modulator 2 and then becomes probe light 20 carrying inclination angle and displacement modulation, and the probe light 20 and the local light 19 enter the balanced homodyne detector 3 simultaneously. To monitor the relative phase of the local light 19 and the probe light 20, a local light monitoring system 22 is employed, which includes a 4F imaging device 4 and an oscilloscope 13, and the voltage applied to the phase compensation crystal 8 is first calibrated using a fundamental mode beam before the tilt displacement measurement is taken. And adjusting the mode conversion cavity 12 to output TEM10 mode laser as local light 19, then turning on the first signal source 9 and the second signal source 10, adding modulation voltage to only the first wedge-shaped electro-optical modulation crystal 5 and the second wedge-shaped electro-optical modulation crystal 7, and observing the amplitude of the phase modulation, wherein the balanced homodyne measurement result is the phase modulation generated on the first wedge-shaped electro-optical modulation crystal 5 and the second wedge-shaped electro-optical modulation crystal 7. Then, the first signal source 9 and the second signal source 10 are closed, the third signal source 11 is opened, namely, modulation voltage is only added to the phase compensation crystal 8, the phase measurement result of balanced homodyne is observed, and the amplitude of the modulation signal is adjusted, so that the phase modulation amplitude is equal to the phase modulation amplitude generated by the first wedge-shaped electro-optic modulation crystal 5 and the second wedge-shaped electro-optic modulation crystal 7. Then, the signal sources 9, 10 and 11 are turned on, and the phase of the third signal source 11 is adjusted so that the phase measurement result of the balanced homodyne is 0, and the total phase modulation generated by the three modulation crystals is 0, thereby realizing the phase compensation. Then, the measurement of the tilt angle and the displacement is started, and the mode conversion chamber 12 is adjusted to output the TEM10 mode laser, and the balanced homodyne measurement result is the tilt angle and the displacement.
Fig. 3 shows a 4F imaging apparatus 4, which includes a first lens 14, a second lens 15, and a beam splitting detector 16. Wherein the focal lengths of the first lens 14 and the second lens 15 are equal. The distance between the first lens 14 and the second wedge-shaped electro-optic modulation crystal 7 is a focal length, the second lens 15 is a double focal length from the first lens 14, and the distance between the beam splitting detector 16 and the second lens 15 is a lens focal length. The plane of the beam splitting detector 16 is the image plane of the second wedge-shaped electro-optic modulation crystal 7, so that the interference pattern of the local light 19 and the probe light 20 at the second wedge-shaped electro-optic modulation crystal 7 is imaged on the beam splitting detector 16, so that the relative phase of the local light 19 and the probe light 20 represented by the interference pattern can be monitored.
Fig. 4 shows the phase compensation result. Wherein, the horizontal axis is the time of the scanning phase, and the vertical axis is the noise power. The light line is the result without phase compensation, and the dark line is the result after phase compensation. The phase noise is effectively compensated by comparing the light color line and the dark color line.
Fig. 5 shows the tilt angle measurement results. The lower side line is the change of the inclination angle signal collected on the frequency spectrograph along with the phase scanning time of the local light 19, and the data of the inclination angle signal is transmitted to the oscilloscope 13 for real-time monitoring. The upper side line is the local light 19 phase monitoring signal collected by the 4F imaging device 4. It can be seen that the tilt signal occurs at pi/2 phase, consistent with theoretical expectations, and also that a pure tilt modulation signal has been measured.
Fig. 6 is a displacement measurement result. The lower side line is the variation of displacement signals collected on the frequency spectrograph along with the phase scanning time of the local light 19, and the data of the displacement signals are transmitted to the oscilloscope 13 for real-time monitoring. The upper side line is the local light 19 phase monitoring signal collected by the 4F imaging device 4. It can be seen that the displacement signal appears at a phase of 0, which is consistent with theoretical expectations, and also indicates that a pure displacement modulated signal was measured.
Claims (3)
1. A laser beam transverse inclination angle and displacement electro-optical modulator (2) is characterized by comprising a first wedge-shaped electro-optical modulation crystal (5), a second wedge-shaped electro-optical modulation crystal (7), a conversion lens (6) arranged between the first wedge-shaped electro-optical modulation crystal (5) and the second wedge-shaped electro-optical modulation crystal (7), a phase compensation crystal (8) arranged on the other side of the first wedge-shaped electro-optical modulation crystal (5) relative to the conversion lens (6), a first signal source (9), a second signal source (10) and a third signal source (11); setting a basic mode laser beam (17), wherein the light beam sequentially passes through a phase compensation crystal (8), a first wedge-shaped electro-optic modulation crystal (5), a conversion lens (6) and a second wedge-shaped electro-optic modulation crystal (7); the distances between the transformation lens (6) and the first wedge-shaped electro-optic modulation crystal (5) and between the transformation lens and the second wedge-shaped electro-optic modulation crystal (7) are set as the focal length of the lens, so that a Fourier transformation system is formed; the first signal source (9), the second signal source (10) and the third signal source (11) are used for generating sinusoidal signals and realizing frequency synchronization, and the sinusoidal signals are loaded to the first wedge-shaped electro-optic modulation crystal (5), the second wedge-shaped electro-optic modulation crystal (7) and the phase compensation crystal (8) respectively to adjust the signal phase; a wedge angle smaller than 10 degrees is arranged between two surfaces of the first wedge-shaped electro-optic modulation crystal (5) and the second wedge-shaped electro-optic modulation crystal (7) in the light passing direction, so that astigmatism does not occur to a passing laser beam, namely the wedge-shaped electro-optic modulation crystal does not reduce the beam quality; the side surfaces of the first wedge-shaped electro-optic modulation crystal (5) and the second wedge-shaped electro-optic modulation crystal (7) are plated with metal films, one side of each wedge-shaped electro-optic modulation crystal is bonded on the PCB paved with the circuit by using conductive adhesive, and the other side of each wedge-shaped electro-optic modulation crystal is connected with the circuit of the PCB by using the conductive adhesive.
2. A laser beam lateral tilt and displacement generating and measuring device comprising the laser beam lateral tilt and displacement electro-optical modulator (2) according to claim 1, characterized by further comprising a laser (1), a mode converter (12), a balanced homodyne detector (3), an oscilloscope (13) and a local optical phase monitoring system (22); the laser (1) outputs a basic mode laser beam and is divided into two parts, one part of the basic mode laser beam (17) enters a laser beam transverse inclination angle and displacement modulator (2), and the other part of the basic mode laser beam (18) is converted into an Hermitian Gaussian mode HG10 serving as local light (19) through a mode converter (12); probe light (20) and local light (19) formed by modulating a basic mode laser beam (17) by a laser beam transverse inclination angle and displacement electro-optic modulator (2) enter a balanced homodyne detector (3), and differential current of the probe light and the local light enters an oscilloscope (13) through demodulation; one arm of the balanced homodyne detector (3) passes through the 99/1 beam splitter (21) into the local optical phase monitoring system (22).
3. Laser beam lateral tilt and displacement generating and measuring device according to claim 2, characterized in that said local optical phase monitoring system (22) comprises a 4F imaging device (4) and an oscilloscope (13); the 4F imaging device (4) comprises a first lens (14), a second lens (15) and a beam splitting detector (16); the difference current signals of the two parts of the beam splitting detector (16) are input into an oscilloscope (13), and simultaneously, the displacement inclination angle signal of the balanced homodyne detector (3) is also input into the oscilloscope (13).
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1244960B (en) * | 1964-03-06 | 1967-07-20 | Ibm Deutschland | Lighting control arrangement |
| US5497387A (en) * | 1993-12-28 | 1996-03-05 | Fuji Photo Film Co., Ltd. | Solid-state laser using wedge-shaped optical member, and method for manufacturing the same |
| CN102240848A (en) * | 2011-06-15 | 2011-11-16 | 中科中涵激光设备（福建）股份有限公司 | Method for adjusting laser beam to generate dynamic transverse displacement |
| CN103940341A (en) * | 2013-01-23 | 2014-07-23 | 苏州舜新仪器有限公司 | Displacement and inclination angle integrated test instrument |
-
2019
- 2019-05-20 CN CN201910417897.0A patent/CN110262091B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1244960B (en) * | 1964-03-06 | 1967-07-20 | Ibm Deutschland | Lighting control arrangement |
| US5497387A (en) * | 1993-12-28 | 1996-03-05 | Fuji Photo Film Co., Ltd. | Solid-state laser using wedge-shaped optical member, and method for manufacturing the same |
| CN102240848A (en) * | 2011-06-15 | 2011-11-16 | 中科中涵激光设备（福建）股份有限公司 | Method for adjusting laser beam to generate dynamic transverse displacement |
| CN103940341A (en) * | 2013-01-23 | 2014-07-23 | 苏州舜新仪器有限公司 | Displacement and inclination angle integrated test instrument |
Non-Patent Citations (3)
| Title |
|---|
| Surpassing the standard quantum limit for optical imaging using non-classical multimode light;N.Treps等;《PHYSICAL REVIEW LETTERS》;20020503;第88卷(第20期);全文 * |
| TEM10 homodyne detection as an optimal small displacement and tilt measurements scheme;V.Delaubert等;《PHYSICAL REVIWE A》;20061120;第74卷(第5期);全文 * |
| 基于压缩光的量子精密测量;孙恒信等;《物理学报》;20151116;第64卷(第23期);全文 * |
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