CN110253151A - A method of improving antenna reflector surface FSS laser ablation machining accuracy - Google Patents
A method of improving antenna reflector surface FSS laser ablation machining accuracy Download PDFInfo
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- CN110253151A CN110253151A CN201910464006.7A CN201910464006A CN110253151A CN 110253151 A CN110253151 A CN 110253151A CN 201910464006 A CN201910464006 A CN 201910464006A CN 110253151 A CN110253151 A CN 110253151A
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- antenna
- type face
- laser ablation
- face data
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
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Abstract
The present invention relates to a kind of methods for improving antenna reflector surface FSS laser ablation machining accuracy, belong to antenna reflector FSS processing technique field.The method of the invention, which has been put forward for the first time, corrects laser ablation design mode face data using antenna reflector actual measurement type face data, it type face data will be surveyed is converted into and be compared and analyzed under design mode face data the same coordinate system, according to error correction laser ablation design mode face data, to improve subsequent antenna surface FSS laser ablation machining accuracy, 15 μm are superior to using the antenna reflector surface FSS oscillator dimension of picture precision and relative positional accuracy of this method manufacture.
Description
Technical field
The present invention relates to a kind of sides for improving antenna reflector surface FSS (frequency-selective surfaces) laser ablation machining accuracy
Method belongs to antenna reflector FSS processing technique field.
Background technique
Frequency-selective surfaces (Frequency Selective Surface, FSS), which refer to, is distributed week in electrically-conducting metal surface
The gap of phase property or on medium arrangement period metal patch, achieve the purpose that frequency select, i.e., a kind of spatial filter.
Three-dimension curved surface laser etching techniques are most a kind of frequency-selective surfaces of advantage and potentiality in current antenna reflector FSS manufacture
Manufacturing method.
Satellite antenna shell generallys use that quality is smaller, and specific strength is higher, the property such as chemical stability, antifatigue, shock resistance
It can good composite material.Currently, heat pressing process one-pass molding is mostly used greatly for the processing of composite material antenna housing, although plus
Tool and mould precision with higher, but surface contour error caused by the rebound during composite material hot-pressed formation still cannot be complete
It avoids；In addition, the determination of antenna target point, multiple material surface of shell metallization etc. may all make actual antennas type face and Antenna Design
Type face generates certain error, and the generation of above-mentioned error necessarily causes the practical type face of antenna and design mode face that cannot kiss completely
It closes.On the other hand, due to being to complete metallic film figure on the basis of the design mode face data of antenna during laser ablation
The normal direction of shape etches, i.e., by three target points of reflector (determine a face) practical work piece is positioned at etching apparatus machine at 3 points
Under device coordinate system, the point to be processed on design mode surface model surface under coordinate system of machine is then moved to by control laser Machining head
Perform etching processing.If in the actual processing process, the design mode face of antenna cannot accurately be matched with practical type face, generation
Error may make laser ablation, and there are overfocus or deficient Jiao Xianxiang when processing, and further result in multiple material surface metal film etching and do not do
Net defect generates, and influences the dimensional accuracy and position precision of metal thin-film pattern etching, to finally influence the electricity of antenna
Gas performance.
Summary of the invention
Cause what laser ablation precision reduced to ask for the practical type face of antenna reflector and error existing for design mode face
Topic, the present invention provide a kind of method for improving antenna reflector surface FSS laser ablation machining accuracy, and this method is will to survey type
Face data is converted into be compared and analyzed under design mode face data the same coordinate system, is designed according to error correction laser ablation
Type face data, to improve post laser lithography precision.
The purpose of the present invention is what is be achieved through the following technical solutions.
A method of antenna reflector surface FSS laser ablation machining accuracy being improved, described method includes following steps:
Step 1. carries out actual measurement to antenna-reflected type face to be processed using three-dimension curved surface non-cpntact measurement equipment；
Step 2. converts software by coordinate system and converts the actual measurement type face data of antenna reflector to and design mode face number
According under the same coordinate system, and two groups of type face datas are compared and analyzed；
Step 3. such as fruit type face data error is within the scope of laser ablation processes allowable error, using design mode face data
Carry out antenna reflector surface laser lithography；If fruit type face data error processes allowable error range beyond laser ablation,
Antenna reflector surface to be processed during making laser ablation is first modified to design mode face data according to actual measurement type face data
In laser processing focal depth range, then antenna emitter surface laser etching is carried out using revised design mode face data and is added
Work.
It in step 1, is tested antenna-reflected type face that specific step is as follows: first passing through antenna reflector skirt phase
Mutually symmetrical datum hole determines the coordinate of antenna-reflected type face central point and is set to rectangular coordinate system origin, resets
The interval steps of adjacent measurement points capture Z-direction changing value caused by the interval steps less than TTL coaxial laser system
Range (guarantees to be able to achieve automatic focusing when point-to-point measurement in operation program measurement process)；Then, it is connect using three-dimension curved surface is non-
The measurement point function of touching measurement module in measuring device is walked along a bus of antenna reflector according to interval since central point
It is long to carry out manual point-to-point measurement, until whole bus is measured；It will be converted by the rectangular coordinate system of coordinate origin of central point
To utilize the copy function of programming module in three-dimension curved surface non-cpntact measurement equipment using central point as the polar coordinate system of coordinate origin
Around coordinate origin along the circumferential direction at interval of the operating procedure for measuring bus in step c of no more than 5 ° duplications of angle, rotation
Completion of circling is replicated and is saved；The measurement point function of measurement module in three-dimension curved surface non-cpntact measurement equipment of reruning is realized
To each of the reflector type face automatic point-to-point measurement of bus, (quantity of measured point is selected benchmark in programming process on every bus
Measured points in bus), final output is using reflector center point as each test point in the rectangular coordinate system of coordinate origin
X, Y, Z coordinate value；In addition, the measurement point functional measurement antenna using measurement module in three-dimension curved surface non-cpntact measurement equipment emits
The rectangular co-ordinate data of target point on type face.
Wherein, a plurality of bus tested on antenna-reflected type face can also be measured in accordance with the following steps: first
The coordinate of antenna-reflected type face central point is determined by the symmetrical datum hole in antenna reflector skirt and is set to
Rectangular coordinate system origin, the interval steps for resetting adjacent measurement points keep Z-direction changing value caused by the interval steps small
In TTL coaxial laser system catching range；Then, a bus since central point along antenna reflector is every interval steps
Measure it is primary, after whole bus is measured, according still further on the test method test antenna-reflected type face of the bus its
The data of his bus finally obtain each test point in rectangular coordinate system wherein the interval angles of adjacent two buses are not more than 5 °
X, Y, Z coordinate value.
In step 2, gained antenna-reflected type face data will be measured using target point test data and will be converted to and design mode
Under face data the same coordinate system, the deviation of actual measurement type face data and design mode face data is compared by interpolation method, essence is pair
Than the Z value difference Δ Z that X, Y coordinates in two groups of data are worth identical point.
In step 3, laser ablation processes allowable error maximum value Δ ZMAXIt can determine that the specific method is as follows by test:
Sample test plate (panel) surface is accompanied to carry out FSS oscillator figure laser etching using same laser etch process parameters with furnace in antenna reflector,
And defocus lithography is carried out at a distance from etching test plate (panel) surface by constantly changing laser ablation processing head, it then observes successively
The oscillator pattern etching processing effect of etching, to obtain under the premise of ensuring to etch oscillator pattern integrity in process
Z value tolerance maximum value, i.e. Δ ZMAX。
If Δ Z≤Δ Z in step 2MAX, then complete using the laser ablation machined parameters set according to design mode face data
It is processed at the laser ablation of antenna reflector；If Δ Z > Δ ZMAX, then need to be modified design mode face data, according still further to design
The laser ablation machined parameters of type face data setting complete the laser ablation processing of antenna reflector.Specific modification method is as follows:
By adjusting Z axis height of the design mode face data under laser ablation machine Cutter coordinate system, make to be added during laser ablation
Work antenna reflector surface is in laser processing focal depth range (preferably focal position), minimizes antenna reflector reality
The laser ablation error that type face data deviation introduces, thus due to gold caused by owing coke or overfocus during avoiding laser ablation
Belong to the defects of film etching is not clean, further increases FSS oscillator dimension of picture precision and position precision after etching.
The utility model has the advantages that
(1) it is generally applicable to irregular figure the present invention provides one kind and answers material antenna reflector surface FSS laser ablation add
The new method of work, laser ablation caused by can solve because of the practical type face data of antenna reflector and design mode face data error
The problem of machining accuracy reduces；
(2) the invention proposes a kind of software programming function using non-contact three-dimensional curved surface graphical measurement analytical equipment with
And point-to-point measurement function, carry out the new method of regular antenna reflector profile measurement, it may be assumed that by by reflector in measurement process
Central point is that the three-dimensional cartesian coordinate system of coordinate origin is converted into using reflector center point as the polar coordinate system of coordinate origin, is passed through
The manual measurement of one benchmark bus of reflector surface and programming come complete all buses to be measured in entire reflector type face from
Dynamic point-to-point measurement, more manual point-to-point measurement method further improve testing efficiency；
(3) the method for the invention has been put forward for the first time using antenna reflector actual measurement type face data amendment laser ablation with setting
Meter type face data, to further increase antenna surface FSS laser ablation machining accuracy, at home and abroad periodical is had not been reported；
(4) using the antenna reflector surface FSS oscillator dimension of picture precision of the method for the invention manufacture and opposite position
It sets precision and is superior to 15 μm.
Specific embodiment
The present invention is further elaborated With reference to embodiment, wherein the method is equal unless otherwise instructed
For conventional method, the raw material can be gotten from open business unless otherwise instructed.
Embodiment 1
Using the method for arc ion plating on antenna reflector (projection bore Φ 400mm, eccentricity about 1.45) surface
The aluminium film of about 1.5 μm of a layer thickness of preparation, using coordinate measuring machine CNC670 (2 three μm of uniaxial measuring accuracy) to day
Line reflection device shell carries out non-cpntact measurement and obtains practical type face data；Wherein, the test specific steps of practical type face data are such as
Under:
First pass through the seat that eight symmetrical datum holes of antenna reflector skirt determine antenna-reflected type face central point
It marks and is set to rectangular coordinate system origin；Since TTL coaxial laser system catching range is 500 μm, then adjacent survey is set
The interval steps of amount point are 3mm~4mm (guaranteeing to be able to achieve automatic focusing when point-to-point measurement in operation program measurement process)；So
Afterwards, using the measurement point function of measurement module in coordinate measuring machine CNC670 since central point along the one of antenna reflector
It is primary that bus at interval of 3mm~4mm carries out manual measurement, until whole bus (being denoted as benchmark bus) is measured；It will be with
Central point is that the rectangular coordinate system of coordinate origin is converted to polar coordinate system using central point as coordinate origin, utilizes three-dimensional coordinates measurement
The copy function of programming module around coordinate origin, along the circumferential direction at interval of 5 ° of angle, (get over by interval angles in system CNC670
Small, measured bus bar number is more) duplication one-shot measurement benchmark bus operating procedure, rotate a circle completion replicate and save；
It reruns the measurement point function of measurement module in coordinate measuring machine CNC670, realizes automatic to each of reflector type face bus
Point-to-point measurement (quantity of measured point is points measured by selected benchmark bus in programming process on every bus), it is final defeated
Out using reflector center point as the X, Y, Z coordinate value (DAT formatted file) of each test point in the rectangular coordinate system of coordinate origin；Separately
Outside, target point on the measurement point functional measurement antenna emitter type face of measurement module in coordinate measuring machine CNC670 is utilized
Rectangular co-ordinate data (DAT formatted file)；
According to the test data of target point, the gained practical type face data of antenna will be measured using CAD software and is converted into and carves
Under erosion design mode face data the same coordinate system, then, compared in actual measurement type face data and design mode face data by interpolation method
The Z value deviation about 0.4mm of X, Y coordinates value identical point is greater than laser ablation and processes allowable error maximum value 0.3mm, then needs to repair
Positive antenna etching design mode face data；
Before lithography, first antenna reflector is fixed on three-dimension curved surface laser etching system processing platform, chooses three
A target point positions antenna reflector as anchor point, due to laser ablation design mode face data and practical type at this time
There are certain deviations for face data, can be (sharp its essence is adjusting by the way that the Z value in positioning target point data is carried out appropriate adjustment
The Z value of design mode face data in photoengraving coordinate system of machine makes itself and practical type face data in laser ablation machine coordinate system
Z value match as far as possible) so that antenna reflector surface to be processed in etching process is in laser processing focal position, amendment is completed
Afterwards, laser ablation processing is carried out using the laser ablation related process parameters set according to original design type face data.
The antenna reflector surface FSS oscillator figure for completing laser ablation processing is taken a sample test and (takes a sample test 40 groups), as a result
Show that etching oscillator dimension of picture precision and relative positional accuracy is superior to 15 μm.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (6)
1. a kind of method for improving antenna reflector surface FSS laser ablation machining accuracy, it is characterised in that: the method includes
Following steps:
Step 1. carries out actual measurement to antenna-reflected type face to be processed using three-dimension curved surface non-cpntact measurement equipment；
Step 2. is converted the actual measurement type face data of antenna reflector to by coordinate system conversion software same with design mode face data
Under one coordinate system, and two groups of type face datas are compared and analyzed；
Step 3. such as fruit type face data error is carried out within the scope of laser ablation processes allowable error using design mode face data
Antenna reflector surface laser lithography；As fruit type face data error processes allowable error range, first root beyond laser ablation
Factually survey type face data, which is modified design mode face data, makes antenna reflector surface to be processed be in laser processing depth of focus model
In enclosing, then using revised design mode face data progress antenna emitter surface laser lithography.
2. the method according to claim 1 for improving antenna reflector surface FSS laser ablation machining accuracy, feature exist
In: in step 1, tested antenna-reflected type face that specific step is as follows,
A) by the symmetrical datum hole in antenna reflector skirt determine antenna-reflected type face central point coordinate and by its
It is set as rectangular coordinate system origin；
B) interval steps for setting adjacent measurement points make Z-direction changing value caused by the interval steps be less than TTL and coaxially swash
Photosystem catching range；
C) using the measurement point function of measurement module in three-dimension curved surface non-cpntact measurement equipment since central point along antenna-reflected
One bus of device measures once every interval steps, until whole bus is measured；
D) polar coordinate system using central point as coordinate origin will be converted to by the rectangular coordinate system of coordinate origin of central point, utilized
In three-dimension curved surface non-cpntact measurement equipment the copy function of programming module around coordinate origin along the circumferential direction at interval of angle not
The operating procedure that bus is measured in a step c is replicated greater than 5 °, the completion that rotates a circle is replicated and saved；
E) the measurement point function of running measurement module in three-dimension curved surface non-cpntact measurement equipment is realized to each item in reflector type face mother
The automatic point-to-point measurement of line, X, Y, Z coordinate value of each test point of final output in rectangular coordinate system；
F) it recycles in three-dimension curved surface non-cpntact measurement equipment on the measurement point functional measurement antenna emitter type face of measurement module
The rectangular co-ordinate data of target point.
3. the method according to claim 1 for improving antenna reflector surface FSS laser ablation machining accuracy, feature exist
In: in step 1, tested antenna-reflected type face that specific step is as follows,
First pass through the symmetrical datum hole in antenna reflector skirt determine antenna-reflected type face central point coordinate and by its
It is set as rectangular coordinate system origin, the interval steps for resetting adjacent measurement points become Z-direction caused by the interval steps
Change value is less than TTL coaxial laser system catching range；Then, the survey of measurement module in three-dimension curved surface non-cpntact measurement equipment is utilized
Amount point function measures once along antenna reflector bus every interval steps since central point, and whole bus is surveyed
After the completion of amount, according still further to the data of other buses on the test method test antenna-reflected type face of the bus, wherein adjacent two
The interval angles of bus are not more than 5o, finally obtain X, Y, Z coordinate value of each test point in rectangular coordinate system；In addition, measurement
The rectangular co-ordinate data of target point on antenna emitter type face.
4. the method according to claim 1 for improving antenna reflector surface FSS laser ablation machining accuracy, feature exist
In: in step 2, gained antenna-reflected type face data will be measured using coordinate system conversion software using target point test data and turned
Be changed to under design mode face data the same coordinate system, then by interpolation method compare X in actual measurement type face data and design mode face data,
The Z value difference Δ Z of the identical point of Y-coordinate value.
5. the method according to claim 1 or 4 for improving antenna reflector surface FSS laser ablation machining accuracy, special
Sign is: in step 3, determining that laser ablation processes allowable error maximum value Δ ZMAXSpecific step is as follows,
It accompanies sample test plate (panel) surface to carry out FSS oscillator figure laser using same laser etch process parameters with furnace in antenna reflector to carve
Erosion, and defocus lithography is carried out at a distance from etching test plate (panel) surface by constantly changing laser ablation processing head, then observe
The oscillator pattern etching processing effect being sequentially etched, to obtain processed under the premise of ensuring to etch oscillator pattern integrity
Z value tolerance maximum value in journey, i.e. Δ ZMAX。
6. the method according to claim 1 for improving antenna reflector surface FSS laser ablation machining accuracy, feature exist
In: in step 3, to being related to, the concrete operations that type face data is modified are as follows,
Z axis height of the adjusted design type face data under laser ablation machine Cutter coordinate system makes to be added during laser ablation
Work antenna reflector surface is in laser processing focal depth range.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112736477A (en) * | 2020-12-14 | 2021-04-30 | 兰州空间技术物理研究所 | Method for accurately positioning whole double-sided metal film graph of antenna reflector |
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