CN107941471A - A kind of detection method of free form surface - Google Patents
A kind of detection method of free form surface Download PDFInfo
- Publication number
- CN107941471A CN107941471A CN201711148520.7A CN201711148520A CN107941471A CN 107941471 A CN107941471 A CN 107941471A CN 201711148520 A CN201711148520 A CN 201711148520A CN 107941471 A CN107941471 A CN 107941471A
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- Prior art keywords
- curve
- freeform optics
- center
- test structure
- freeform
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
Abstract
The present invention provides a kind of detection method of free form surface, including：One test structure is provided；Test structure has freeform optics surface；Obtain the center of freeform optics surface；A plurality of curve is marked in freeform optics surface, using center as coordinate origin, establishes three-dimensional system of coordinate, obtains the curvilinear coordinate data of a plurality of curve；According to curvilinear coordinate data, simulation curved surface is fitted；Simulation curved surface and theoretical optics free form surface are compared, obtain the face shape error value of freeform optics surface.The present invention realizes effective measurement to freeform optics surface, improves accuracy of detection.
Description
Technical field
The present invention relates to technical field of semiconductors, and in particular to a kind of detection method of freeform optics surface.
Background technology
Traditional optical system generally use coaxial system, such as sphere or aspherical mirror.But with optical device
Application range constantly extends, and traditional optical system can not meet optical device high-performance, the requirement of miniaturization.Therefore,
Non co axial reflecting system is come into being.There is freeform optics surface plane and sphere etc. can not substitute in Off-axial optical system
Function, therefore, using freeform optics surface shape come according to be actually needed design so that freeform optics surface imaging, shine
The application in the fields such as bright, measurement is increasingly favored be subject to people.
Freeform optics surface is often referred to optical surface that can not be with sphere or asphericity coefficient to represent, refers mainly to non-rotating
The curved surface of symmetry axis or curved surface that can only be with parameter vector to represent.Freeform optics surface is widely used in reprographic printing equipment
In, in color CRT, the field such as the aircraft window of aircraft, therefore, the design and fabrication technology of freeform optics surface is increasingly becoming research heat
Point.
However, the detection difficulty of existing freeform optics surface is very big, machining accuracy is not high, and cost is big in particular how
To realize that the high-accuracy measurement of freeform optics surface becomes the main difficult technical for improving freeform optics surface and designing.
The content of the invention
In order to overcome problem above, the present invention is intended to provide a kind of detection method of freeform optics surface, so as to improve light
Learn the accuracy of detection of free form surface.
In order to achieve the above object, the present invention provides a kind of detection method of freeform optics surface, including：
Step 01：One test structure is provided；Test structure has freeform optics surface；
Step 02：Obtain the center of freeform optics surface；
Step 03：A plurality of curve is marked in freeform optics surface, using the center as coordinate origin, establishes three
Dimension coordinate system, obtains the curvilinear coordinate data of a plurality of curve；
Step 04：According to the curvilinear coordinate data, simulation curved surface is fitted；
Step 05：Simulation curved surface and theoretical optics free form surface are compared, the face shape for obtaining freeform optics surface is missed
Difference.
Preferably, the step 02 specifically includes：
Step 021：The center of the exterior contour of test structure is set according to the exterior contour size of test structure；
Step 022：A normal of the freeform optics surface at the center of the exterior contour through the test structure is found out, should
The center of normal and the intersection point of freeform optics surface as freeform optics surface.
Preferably, setting the center of the exterior contour size of test structure includes：Measure the exterior contour ruler of test structure
It is very little, the geometric center of test structure exterior contour is gone out according to exterior contour Size calculation.
Preferably, when test structure is obtained using turning mode, then using the center of the turning of test structure as test structure
The center of exterior contour.
Preferably, in the step 03, specifically include：Mark the curve of a plurality of X-direction in X direction, also, along Y-direction
Mark the curve of a plurality of Y-direction；The curve of X-direction and the curve intersection of Y-direction.
Preferably, in the step 03, wherein the curve of an X-direction streaks the center；A wherein Y-direction
Curve streak the curve intersection of the center and an X-direction.
Preferably, the curve of a plurality of X-direction is marked in X direction, then, obtains the curvilinear coordinate data of the curve of X-direction；
Thickness of the curve in Z-direction of X-direction is obtained again, by the curvilinear coordinate number of the curve of the thickness compensation of the Z-direction to X-direction
In, the curvilinear coordinate data of the curve of revised X-direction are obtained.
Preferably, the step 05 specifically includes：The coordinate origin and three-dimensional system of coordinate for the freeform optics surface that theorizes,
So that the coordinate origin of theoretical optics free form surface and the coordinate origin of the freeform optics surface are corresponding on Z directions, from
And theoretical optics free form surface is parallel to each other with freeform optics surface；Then, the coordinate of theoretical optics free form surface is obtained
Data and the coordinate data for obtaining simulation curved surface, then by identical X values and the Z values and optics of the theoretical optics free form surface of Y value
The Z values of free form surface are subtracted each other, so as to obtain the error amount each put in freeform optics surface, are each put in freeform optics surface
X values, Y value and corresponding error amount form the face shape error value of freeform optics surface.
Preferably, in the step 03, the coordinate origin is obtained using three coordinate measuring machine, establishes three-dimensional coordinate
System, and obtain the curvilinear coordinate data.
A kind of detection method of freeform optics surface of the present invention is big for the detection difficulty of existing freeform optics surface
And precision it is low the problem of, the center by obtaining freeform optics surface is used as coordinate origin and establishes three-dimensional system of coordinate, and
By marking a plurality of curve in freeform optics surface, so as to obtain curvilinear coordinate data, and simulation curved surface is fitted accordingly, then
According to the comparison of simulation curved surface and theoretical optics free form surface, the face shape error value of freeform optics surface is obtained, it is achieved thereby that
Effective monitoring to freeform optics surface, improves the accuracy of detection of freeform optics surface.
Brief description of the drawings
Fig. 1 be the present invention a preferred embodiment freeform optics surface detection method flow diagram Fig. 2~
10 be each preparation process schematic diagram of the detection method of the freeform optics surface of the preferred embodiment of the present invention
Embodiment
To make present disclosure more clear understandable, below in conjunction with Figure of description, present disclosure is made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, the general replacement known to those skilled in the art
Cover within the scope of the present invention.
The present invention is described in further detail below in conjunction with attached drawing 1~10 and specific embodiment.It should be noted that attached drawing
Using very simplified form, using non-accurate ratio, and only to it is convenient, clearly reach aid illustration the present embodiment
Purpose.
Referring to Fig. 1, a kind of detection method of freeform optics surface of the present embodiment, including：
Step 01：Referring to Fig. 2, provide a test structure；Test structure has freeform optics surface；
Specifically, test structure can be any workpiece, for example, various speculums, concave-convex lens etc..
Step 02：Obtain the center of freeform optics surface；
Specifically, in the present embodiment, obtaining the detailed process of the center of freeform optics surface can include：
Step 021：The center of the exterior contour of test structure is set according to the exterior contour size of test structure；This
In, setting the center of the exterior contour size of test structure includes：The exterior contour size of test structure is measured, according to outer wheels
Wide Size calculation goes out the geometric center of test structure exterior contour.In addition, when test structure is obtained using turning mode, then to survey
The center for trying the turning of structure is the center of test structure exterior contour.
Alternatively, first, referring to Fig. 3, obtaining the exterior contour dimension data of test structure using infrared detecting set, so
Afterwards, referring to Fig. 4, fitting the first simulation polygon of test structure exterior contour, then, the first simulation polygon is found out
Geometric center；Then, referring to Fig. 5, the first simulation polygon is carried out multiple rotary, each rotation angle is identical, every time rotation
It can move the first simulation polygon after turning and make its vertex more be fitted on exterior contour, and find out every time postrotational the
The geometric center of one simulation polygon, until the first simulation polygon sets back；Then, it is all the first obtained simulations are more
The geometric center of side shape sequentially connects, and obtains the second simulation polygon, then finds out the geometric center conduct of the second simulation polygon
The center of test structure exterior contour.It should be noted that when looking for geometric center using this method, show in above-mentioned Fig. 5 and Fig. 6
The exterior contour of rule is gone out, regular exterior contour is such as circular, ellipse, regular polygon symmetric figure, after multiple rotary
Multiple geometric centers of the first obtained simulation polygon are more smart so as to the utilization above method substantially in same position
Accurately determine geometric center；For irregular exterior contour, as shown in Fig. 6, dotted line frame represents that rotating first simulation is polygon
Shape, solid outline represent exterior contour, it can be seen that the multiple geometric centers obtained after dotted outline rotation are bullet, this
In show four rotation dotted outlines, obtain four bullets and represent four geometric centers, this four bullets are sequentially connected
Connect to obtain a quadrangle, then be easy to obtain the center of exterior contour using quadrangle, as shown in black five-pointed star in Fig. 6.
Step 022：Referring to Fig. 7, find out one of the freeform optics surface at the center of the exterior contour of structure after tested
Center of the intersection point of normal, the normal and freeform optics surface as freeform optics surface.Here, it is necessary to illustrate,
When there are a plurality of normal pass through exterior contour center when, choose freeform optics surface on formed relative to exterior contour it is flat
Normal where the position of the height maximum in face, that is to say normal where the position of Z values maximum.
Step 03：Referring to Fig. 8, a plurality of curve is marked in freeform optics surface, using center as coordinate origin,
Three-dimensional system of coordinate is established, obtains the curvilinear coordinate data of a plurality of curve；
Specifically, in the present embodiment, can be rule using contourgraph in freeform optics surface, curvilinear coordinate data
Acquisition can be in the following way：The curve of a plurality of X-direction is marked in X direction, also, marks a plurality of Y-direction along Y-direction
Curve；The curve of X-direction and the curve intersection of Y-direction.In order to further improve accuracy of detection, it can be set in the present embodiment
In the curve of an X-direction streak the center, wherein the curve of a Y-direction streaks the center and described one
The curve intersection of bar X-direction.In the present embodiment, the coordinate origin can be obtained using three coordinate measuring machine, is established three-dimensional
Coordinate system, and obtain curvilinear coordinate data.
Step 04：Referring to Fig. 9, according to curvilinear coordinate data, simulation curved surface is fitted；
Specifically, in the present embodiment, it can be, but not limited to be fitted using MATLAB softwares, the side of fitting simulation curved surface
Method can include：
Step 041：The curve of a plurality of X-direction is marked in X direction；
Step 042：Obtain the curvilinear coordinate data of the curve of X-direction；
Step 043：Thickness of the curve in Z-direction of X-direction is obtained, by the song of the thickness compensation of the Z-direction to X-direction
In the curvilinear coordinate data of line, the curvilinear coordinate data of the curve of revised X-direction are obtained.
Step 05：Referring to Fig. 10, simulation curved surface and theoretical optics free form surface are compared, it is freely bent to obtain optics
The face shape error value in face.
Specifically, the coordinate origin and three-dimensional system of coordinate of the freeform optics surface that theorizes so that theoretical optics is freely bent
The coordinate origin in face is corresponding in z-direction with the coordinate origin of freeform optics surface, so that theoretical optics free form surface
It is parallel to each other with freeform optics surface, as shown in Figure 10；Then, coordinate data and the acquisition of theoretical optics free form surface are obtained
Simulate the coordinate data of curved surface, then by identical X values and the Z values of the theoretical optics free form surface of Y value and the Z values of freeform optics surface
Subtract each other, so as to obtain the error amount each put in freeform optics surface, the X values each put in freeform optics surface, Y value and corresponding
Error amount form freeform optics surface face shape error value.
Although the present invention is disclosed as above with preferred embodiment, the right embodiment illustrate only for the purposes of explanation and
, the present invention is not limited to, if those skilled in the art can make without departing from the spirit and scope of the present invention
Dry changes and retouches, and the protection domain that the present invention is advocated should be subject to described in claims.
Claims (9)
- A kind of 1. detection method of freeform optics surface, it is characterised in that including：Step 01：One test structure is provided；Test structure has freeform optics surface；Step 02：Obtain the center of freeform optics surface；Step 03：A plurality of curve is marked in freeform optics surface, using the center as coordinate origin, establishes three-dimensional sit Mark system, obtains the curvilinear coordinate data of a plurality of curve；Step 04：According to the curvilinear coordinate data, simulation curved surface is fitted；Step 05：Simulation curved surface and theoretical optics free form surface are compared, obtain the face shape error value of freeform optics surface.
- 2. the detection method of freeform optics surface according to claim 1, it is characterised in that the step 02 is specifically wrapped Include：Step 021：The center of the exterior contour of test structure is set according to the exterior contour size of test structure；Step 022：Find out a normal of the freeform optics surface at the center of the exterior contour through the test structure, the normal With the center of the intersection point of freeform optics surface as freeform optics surface.
- 3. the detection method of freeform optics surface according to claim 2, it is characterised in that set the outside of test structure The center of overall size includes：The exterior contour size of test structure is measured, test structure is gone out according to exterior contour Size calculation The geometric center of exterior contour.
- 4. the detection method of freeform optics surface according to claim 2, it is characterised in that when test structure uses turning Mode obtains, then the center using the center of the turning of test structure as test structure exterior contour.
- 5. the detection method of freeform optics surface according to claim 1, it is characterised in that in the step 03, specifically Including：The curve of a plurality of X-direction is marked in X direction, also, the curve of a plurality of Y-direction is marked along Y-direction；The curve of X-direction with The curve intersection of Y-direction.
- 6. the detection method of freeform optics surface according to claim 5, it is characterised in that in the step 03, wherein The curve of one X-direction streaks the center；The curve of wherein one Y-direction streaks the center and described one The curve intersection of X-direction.
- 7. the detection method of freeform optics surface according to claim 5, it is characterised in that mark a plurality of X side in X direction To curve, then, obtain the curvilinear coordinate data of the curve of X-direction；Thickness of the curve in Z-direction of X-direction is obtained again, will The thickness compensation of the Z-direction obtains the curve of the curve of revised X-direction into the curvilinear coordinate data of the curve of X-direction Coordinate data.
- 8. the detection method of freeform optics surface according to claim 1, it is characterised in that the step 05 is specifically wrapped Include：The coordinate origin and three-dimensional system of coordinate for the freeform optics surface that theorizes so that the coordinate origin of theoretical optics free form surface It is corresponding in z-direction with the coordinate origin of the freeform optics surface, so that theoretical optics free form surface and optics are certainly It is parallel to each other by curved surface；Then, obtain the coordinate data of theoretical optics free form surface and obtain the coordinate data of simulation curved surface, Identical X values and the Z values of the theoretical optics free form surface of Y value and the Z values of freeform optics surface are subtracted each other again, so as to obtain optics certainly By the error amount each put on curved surface, X values, Y value and the corresponding error amount each put in freeform optics surface form optics certainly By the face shape error value of curved surface.
- 9. the detection method of freeform optics surface according to claim 1, it is characterised in that in the step 03, use Three coordinate measuring machine obtains the coordinate origin, establishes three-dimensional system of coordinate, and obtain the curvilinear coordinate data.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109916299A (en) * | 2019-03-11 | 2019-06-21 | 东莞市凯融光学科技有限公司 | A kind of method of contact type measurement free form surface infrastructure product bias |
| CN110253151A (en) * | 2019-05-30 | 2019-09-20 | 兰州空间技术物理研究所 | A method of improving antenna reflector surface FSS laser ablation machining accuracy |
| CN111351965A (en) * | 2020-03-02 | 2020-06-30 | 信联智翊科技(苏州)有限公司 | Extended multi-order free-form surface detection method |
| CN112378367A (en) * | 2020-11-05 | 2021-02-19 | 天津大学 | Method for measuring surface shape and position of multi-free-form surface reflector distributed in inner cavity |
| CN112414676A (en) * | 2020-11-05 | 2021-02-26 | 天津大学 | Evaluation and calculation method for measurement data of multiple free-form surface reflectors |
| CN113758458A (en) * | 2021-08-31 | 2021-12-07 | 南京茂莱光学科技股份有限公司 | Surface shape measuring method of toric mirror |
| CN114076573A (en) * | 2021-11-10 | 2022-02-22 | 中国科学院长春光学精密机械与物理研究所 | Equivalent element, preparation method of equivalent element and detection precision checking method |
| CN114383531A (en) * | 2021-12-24 | 2022-04-22 | 上海交通大学 | Method and system for detecting three-dimensional profile of spherical optical lens |
| CN114460900A (en) * | 2021-12-24 | 2022-05-10 | 泉州华中科技大学智能制造研究院 | Method and device for processing special-shaped curved glass profile |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109916299A (en) * | 2019-03-11 | 2019-06-21 | 东莞市凯融光学科技有限公司 | A kind of method of contact type measurement free form surface infrastructure product bias |
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| CN112414676A (en) * | 2020-11-05 | 2021-02-26 | 天津大学 | Evaluation and calculation method for measurement data of multiple free-form surface reflectors |
| CN112378367A (en) * | 2020-11-05 | 2021-02-19 | 天津大学 | Method for measuring surface shape and position of multi-free-form surface reflector distributed in inner cavity |
| CN112414676B (en) * | 2020-11-05 | 2022-02-11 | 天津大学 | Evaluation and calculation method for measurement data of multiple free-form surface reflectors |
| CN113758458A (en) * | 2021-08-31 | 2021-12-07 | 南京茂莱光学科技股份有限公司 | Surface shape measuring method of toric mirror |
| CN114076573A (en) * | 2021-11-10 | 2022-02-22 | 中国科学院长春光学精密机械与物理研究所 | Equivalent element, preparation method of equivalent element and detection precision checking method |
| CN114076573B (en) * | 2021-11-10 | 2022-10-28 | 中国科学院长春光学精密机械与物理研究所 | Equivalent element, preparation method of equivalent element and detection precision checking method |
| CN114383531A (en) * | 2021-12-24 | 2022-04-22 | 上海交通大学 | Method and system for detecting three-dimensional profile of spherical optical lens |
| CN114460900A (en) * | 2021-12-24 | 2022-05-10 | 泉州华中科技大学智能制造研究院 | Method and device for processing special-shaped curved glass profile |
| CN114383531B (en) * | 2021-12-24 | 2023-02-17 | 上海交通大学 | Method and system for detecting three-dimensional profile of spherical optical lens |
| WO2023115886A1 (en) * | 2021-12-24 | 2023-06-29 | 泉州华中科技大学智能制造研究院 | Method and device for processing special-shaped curved glass contour |
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