CN110246734A - The scanning electron microscope refrigeration system and method for opposed compressor driving - Google Patents
The scanning electron microscope refrigeration system and method for opposed compressor driving Download PDFInfo
- Publication number
- CN110246734A CN110246734A CN201910411581.0A CN201910411581A CN110246734A CN 110246734 A CN110246734 A CN 110246734A CN 201910411581 A CN201910411581 A CN 201910411581A CN 110246734 A CN110246734 A CN 110246734A
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- Prior art keywords
- opposed compressor
- vacuum cavity
- electron microscope
- sample stage
- scanning electron
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005057 refrigeration Methods 0.000 title claims abstract description 77
- 238000000034 method Methods 0.000 title abstract description 8
- 238000001816 cooling Methods 0.000 claims abstract description 28
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 19
- 238000013016 damping Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 abstract description 3
- 239000000523 sample Substances 0.000 description 56
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013068 control sample Substances 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
- F25B9/145—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle pulse-tube cycle
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention relates to electron microscope sample desk cooling technology fields, provide the scanning electron microscope refrigeration system and method for a kind of opposed compressor driving.Refrigeration system provided by the invention includes the first vacuum cavity, the second vacuum cavity, opposed compressor, refrigeration machine and sample stage, refrigeration machine is located in the first vacuum cavity, sample stage is located in the second vacuum cavity, opposed compressor is located at outside the first vacuum cavity and is flexibly connected with refrigeration machine, and the cold head of refrigeration machine is connected with sample stage.The scanning electron microscope refrigeration system of opposed compressor driving provided by the invention, opposed compressor drives refrigeration machine cooling, the cooling capacity that refrigeration machine generates is transferred to sample stage to reduce the temperature of sample stage, to meet the temperature requirement of different sample measurement environment, applicability is high；Opposed compressor and refrigeration machine are located at the first vacuum cavity outwardly and inwardly, are separated from each other setting, are flexibly connected between the two, reduce the vibration of sample stage.
Description
Technical field
It is driven the present invention relates to electron microscope sample desk cooling technology field more particularly to a kind of opposed compressor
Scanning electron microscope refrigeration system and method.
Background technique
Currently, scanning electron microscope can only test the sample temperature under room temperature environment, narrow application range is unable to test pair
Temperature environment has the sample of particular/special requirement, and to solve this problem, now common way is using liquefied ammonia as cold source, further
As scanning electron microscope cold head, the specific type of cooling is that liquid nitrogen is introduced to directly cooling sample inside scanning electron microscope
Sample platform.There is Railway Projects for such type of cooling: first is that cooling temperature section is narrow, using liquid nitrogen, temperature can only be attached in 77K
Closely, cooling temperature range is limited；Second is that temperature-controlled precision is not high, temperature control is difficult to reach high-precision by way of controlling liquid nitrogen flow
Temperature control, typical temperature fluctuation is up to 1-2K, even higher；Third is that liquid nitrogen is introduced inside scanning electron microscope, unavoidably
Introducing vibration, the observation of microscopic appearance under high magnification will be significantly affected.Four, common temperature controlling mode is using electric heating skill
Art, refrigeration machine or cold source usually require to be constantly in working condition, and by being electrically heated to corresponding temperature, there is apparent cold
Measure waste problem.
Summary of the invention
(1) technical problems to be solved
An object of the present invention is to provide a kind of scanning electron microscope refrigeration system of opposed compressor driving, uses
To solve, existing scanning electron microscope refrigeration system cooling temperature range is limited and sample stage is easy vibration leads to measurement essence
Spend low problem.
The second object of the present invention is to provide a kind of scanning electron microscope system driven using above-mentioned opposed compressor
System carries out cooling method.
(2) summary of the invention
One of in order to solve the above-mentioned technical problem, the present invention provides a kind of scanning electron microscopy of opposed compressor driving
Mirror refrigeration system, including the first vacuum cavity and the second vacuum cavity, further include opposed compressor, refrigeration machine and sample stage,
The refrigeration machine is located in first vacuum cavity, and the sample stage is located in second vacuum cavity, the opposed type
Compressor is located at outside the first vacuum cavity and is flexibly connected with the refrigeration machine, the cold head of the refrigeration machine and the sample stage phase
Even.
Wherein, the opposed compressor is mounted on the first pedestal, is equipped with the first vibration damping below first pedestal
Unit.
Wherein, the refrigeration machine and second vacuum cavity are installed on the second pedestal, installation below second pedestal
Second damper unit.
Wherein, the hot end of the refrigeration machine and the second pedestal Hard link.
Wherein, the refrigeration machine is pulse tube refrigerating machine.
Wherein, it is connected between the cold end of the refrigeration machine and the sample stage by flexible duct.
Wherein, first vacuum cavity is connected with second vacuum cavity.
Wherein, the vacuum degree of first vacuum cavity and second vacuum cavity is respectively 0Pa~105Pa。
Wherein, the opposed compressor includes first piston and second piston, and the first piston and described second live
Plug moves toward one another.
In order to solve the above-mentioned technical problem two, the present invention provides a kind of scanning driven using above-mentioned opposed compressor
Electron microscope refrigeration system carries out cooling method, comprising:
After the vacuum degree of first vacuum cavity and the second vacuum cavity reaches requirement, start opposed compressor, refrigeration machine
Released cold quantity is sample stage cooling, after the temperature of the sample stage is reduced to preset temperature, reduces the opposed compressor
Input electric work；When the temperature of the sample stage is higher than preset temperature, increase the input electric work of the opposed compressor.
(3) beneficial effect
The scanning electron microscope refrigeration system of opposed compressor driving provided by the invention, opposed compressor drive
Refrigeration machine cooling, the cooling capacity that refrigeration machine generates are transferred to sample stage to reduce the temperature of sample stage, survey to meet different samples
The temperature requirement for measuring environment, cooling compared to existing liquefied ammonia, the temperature range that may be implemented is more wide in range, and applicability is high；It is right
It sets formula compressor and refrigeration machine is located at the first vacuum cavity outwardly and inwardly, be separated from each other setting, it is flexible between the two
Connection improves the accuracy of sample observation to reduce opposed compressor and refrigeration machine passes to the vibration of sample stage.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural representation of the scanning electron microscope refrigeration system of opposed compressor of embodiment of the present invention driving
Figure；
In figure: 10, the first vacuum cavity；11, flexible duct；20, the second vacuum cavity；30, opposed compressor；31,
First piston；32, second piston；40, refrigeration machine；41, flexible delivery pipe；50, sample stage；51, electron gun；60, the first base
Seat；70, the first damper unit；80, the second pedestal；90, the second damper unit.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The scanning electron microscope refrigeration system of opposed compressor driving provided in an embodiment of the present invention, as shown in Figure 1,
It includes the first vacuum cavity 10, the second vacuum cavity 20, opposed compressor 30, refrigeration machine 40 and sample stage 50.Wherein, right
It sets formula compressor 30 and is located at the first vacuum cavity 10 and be and be flexibly connected with refrigeration machine 40 by flexible duct 11,40, refrigeration machine
In in the first vacuum cavity 10, sample stage 50 is located in the second vacuum cavity 20, and the cold head of refrigeration machine 40 is connected with sample stage 50.
In use, opposed compressor 30 drives refrigeration machine 40 to freeze, the cooling capacity that refrigeration machine 40 generates is transferred to sample stage
50 to reduce the temperature of sample stage 50, and the temperature of sample stage 50 can be greatly lowered in the embodiment of the present invention, to meet not
With the temperature requirement of sample measurement environment, cooling compared to existing liquefied ammonia, the temperature range that may be implemented is more wide in range, is applicable in
Property it is high.In the embodiment of the present invention, opposed compressor 30 and refrigeration machine 40 are located at the outside of the first vacuum cavity 10 and interior
Portion, i.e. the two are separated from each other setting, flexible connection are realized by flexible duct 11 between the two, to reduce opposed compressor
30 and refrigeration machine 40 pass to the vibration of sample stage 50, improve the accuracy of sample observation.
In addition, sample stage 50 in observing samples microscopic appearance to maintain stationary temperature, then opposed compressor
30 need continuously to work, and the cooling capacity that wherein the output electric work size of opposed compressor 30 and refrigeration machine 40 export exists
Corresponding relationship.Specifically, when the output electric work of opposed compressor 30 is larger, refrigeration machine 40 exports more cooling capacity, sample stage
50 coolings are fast, and temperature change is larger；When the output electric work of opposed compressor 30 is smaller, refrigeration machine 40 exports less cooling capacity,
50 temperature change of sample stage is unobvious.Since opposed compressor 30 is constantly in working condition, vibration is unfavorable for scanning electricity
The microscopical observing samples of son.
Specifically, which further includes control device, and sample stage 50 is equipped with temperature sensor, temperature sensor with
The connection of control device signal.The output electricity for the temperature value control opposed compressor 30 that control device is acquired according to temperature sensor
Function.When the temperature value of temperature sensor acquisition is in preset temperature range, it is defeated that control device controls 30 reduction of opposed type compression
Electric work out；With the progress of observation work, the temperature of sample stage 50 is gradually risen in the second vacuum cavity 20, works as temperature sensor
When the temperature value of acquisition is not in preset temperature range, control device controls opposed type compression 30 and increases output electric work, drives system
Cold 40 exports more cooling capacity, reduces the temperature of sample stage 50, quickly to ensure that the temperature of sample stage 50 is remained substantially in setting
Within the temperature range of.It is equipped with electron gun 51 in addition, being located above sample stage 50, which protrudes into the second vacuum cavity 20
Portion, for the sample on observing samples platform 50.
Wherein, refrigeration machine 40 selects pulse tube refrigerator machine, as cold source, the cold head without motion portion of pulse tube refrigerator machine
Part, itself is without friction, further decreases the vibration that external devices pass to sample stage 50.Further, sample stage 50 and refrigeration
It is flexibly connected between machine 40 by flexible delivery pipe 41, reduces opposed compressor 30 and pulse tube refrigerator machine passes to sample
The vibration of sample platform 50.
In embodiments of the present invention, opposed compressor 30 is fixedly mounted on the first pedestal 60, under the first pedestal 60
The first damper unit 70 of side's installation.Vibration is eliminated by the first damper unit 70 of 60 lower section of the first pedestal, it is avoided to influence sample
Product observation.Refrigeration machine 40 and the second vacuum cavity 20 are installed in the second pedestal 80, install the second vibration damping below the second pedestal 80
Unit 90.Specifically, the hot end of refrigeration machine 40 and the second pedestal 80 are bolted to realize Hard link, thus by scanning
Existing second damper unit 90 of electron microscope and the second pedestal 80 are 40 vibration damping of refrigeration machine, avoid refrigeration machine 40 from introducing new
Vibration source influences the stability of sample stage 50, while reducing the quantity of damper unit and pedestal, reduces cost.
In addition, in order to reduce the quantity of vacuum pump, the first vacuum cavity 10 is connected with the second vacuum cavity 20.Thus it sweeps
Retouching the included vacuum pump of electron microscope can also be in the first vacuum chamber while vacuumizing to the second vacuum cavity 20
Vacuum environment is built in body 10.Specifically, the first vacuum cavity 10 is identical as the vacuum degree in the second vacuum cavity 20, exists
0Pa~105Between Pa, i.e. between 0Pa and normal pressure, such refrigeration machine 40 and scanning electron microscope are in the true of same vacuum degree
In Altitude.
Wherein, opposed compressor 30 is Linearkompressor comprising first piston 31 and second piston 32, first piston
31 and second piston 32 move toward one another, can reduce vibration caused by piston motion.Control device passes through control first piston 31
With the motion amplitude of second piston 32 and then the temperature of control sample stage 50, temperature is higher, first piston 31 and second piston 32
Motion amplitude it is smaller, the electric work accordingly consumed is fewer.
The scanning electron microscope refrigeration system that opposed compressor drives in the embodiment of the present invention, good damping result can
With the microscopic appearance of observing samples at different temperatures.In addition to this, above-mentioned refrigeration system is used the present invention also provides a kind of
The method freezed.
It first vacuumizes, when the vacuum degree of the first vacuum cavity 10 and the second vacuum cavity 20 meets scanning electron microscope
(vacuum degree is between 0Pa to 10 after vacuum level requirements5Between Pa), start opposed compressor 30, it is soft with opposed compressor 30
Property connection refrigeration machine 40 to sample stage 50 provide cooling capacity cool down.After the temperature of sample stage 50 is reduced to preset temperature,
Reduce the input electric work of opposed compressor 30, reduces the motion amplitude of first piston 31 and second piston 32, sample stage 50
Temperature is begun to ramp up；After the temperature of sample stage 50, which is higher than oak society, to be consolidated, increase the input electric work of opposed compressor 30, improves
The motion amplitude of first piston 31 and second piston 32, the temperature of sample stage 50 start to reduce.By adjusting opposed type pressure repeatedly
The input electric work of contracting machine 30 accurately controls the temperature of sample stage 50.Wherein, the control process of opposed compressor 30 is by control
Device is carried out automatically controlling according to the temperature data that temperature sensor acquires.
It is specifically described below with the specific control process when 50 temperature of sample stage is set as 4K.
When the second vacuum cavity 20 where first vacuum cavity 10 at 40 place of refrigeration machine and scanning electron microscope
After vacuum degree is met the requirements, start opposed compressor 30, first piston 31 and second piston 32 start to move toward one another, refrigeration machine
40 cold junction temperature starts to reduce, at this point, the cooling capacity of 40 cold end of refrigeration machine is passed to sample stage 50 by flexible delivery pipe 41.When
50 temperature of sample stage is reduced to after set temperature 4K, is gradually reduced the input electric work of opposed compressor 30, first piston 31
Reduce with the motion amplitude of second piston 32, the temperature of sample stage 50 is begun to ramp up at this time；When the temperature of sample stage 50 is higher than 4K
After, it is gradually increased the input electric work of opposed compressor 30, the motion amplitude of first piston 31 and second piston 32 increases, this
When sample stage 50 temperature start to reduce；Therefore, it can accurately be controlled by adjusting the input electric work of opposed compressor 30 repeatedly
The temperature of sample preparation sample platform 50.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member
It is physically separated with being or may not be, component shown as a unit may or may not be physics list
Member, it can it is in one place, or may be distributed over multiple network units.It can be selected according to the actual needs
In some or all of the modules achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying creativeness
Labour in the case where, it can understand and implement.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of scanning electron microscope refrigeration system of opposed compressor driving, including the first vacuum cavity and the second vacuum
Cavity, which is characterized in that further include opposed compressor, refrigeration machine and sample stage, the refrigeration machine is located at first vacuum
In cavity, the sample stage is located in second vacuum cavity, and the opposed compressor is located at outside the first vacuum cavity simultaneously
It is flexibly connected with the refrigeration machine, the cold head of the refrigeration machine is connected with the sample stage.
2. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 1, which is characterized in that
The opposed compressor is mounted on the first pedestal, is equipped with the first damper unit below first pedestal.
3. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 1 or 2, feature exist
In the refrigeration machine and second vacuum cavity are installed on the second pedestal, install the second vibration damping list below second pedestal
Member.
4. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 3, which is characterized in that
The hot end of the refrigeration machine and the second pedestal Hard link.
5. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 1, which is characterized in that
The refrigeration machine is pulse tube refrigerating machine.
6. the scanning electron microscope refrigeration system of opposed compressor driving, feature exist according to claim 1 or 5
In, between the cold end of the refrigeration machine and the sample stage pass through flexible duct connect.
7. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 1, which is characterized in that
First vacuum cavity is connected with second vacuum cavity.
8. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 7, which is characterized in that
The vacuum degree of first vacuum cavity and second vacuum cavity is respectively 0Pa~105Pa。
9. the scanning electron microscope refrigeration system of opposed compressor driving according to claim 1, which is characterized in that
The opposed compressor includes first piston and second piston, and the first piston is moved toward one another with the second piston.
The system 10. a kind of scanning electron microscope using the described in any item opposed compressor drivings of claim 1 to 9 is freezed
System carries out cooling method characterized by comprising
After the vacuum degree of first vacuum cavity and the second vacuum cavity reaches requirement, start opposed compressor, refrigeration machine release
Cooling capacity is sample stage cooling, after the temperature of the sample stage is reduced to preset temperature, reduces the defeated of the opposed compressor
Enter electric work；When the temperature of the sample stage is higher than preset temperature, increase the input electric work of the opposed compressor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910411581.0A CN110246734A (en) | 2019-05-17 | 2019-05-17 | The scanning electron microscope refrigeration system and method for opposed compressor driving |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910411581.0A CN110246734A (en) | 2019-05-17 | 2019-05-17 | The scanning electron microscope refrigeration system and method for opposed compressor driving |
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| Publication Number | Publication Date |
|---|---|
| CN110246734A true CN110246734A (en) | 2019-09-17 |
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|---|---|---|---|
| CN201910411581.0A Pending CN110246734A (en) | 2019-05-17 | 2019-05-17 | The scanning electron microscope refrigeration system and method for opposed compressor driving |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001304705A (en) * | 2000-04-17 | 2001-10-31 | Daikin Ind Ltd | Cryogenic cooling system |
| JP2007003397A (en) * | 2005-06-24 | 2007-01-11 | Fuji Electric Holdings Co Ltd | Sample analyzer |
| CN209804582U (en) * | 2019-05-17 | 2019-12-17 | 中国科学院理化技术研究所 | Opposed compressor driven scanning electron microscope refrigeration system |
-
2019
- 2019-05-17 CN CN201910411581.0A patent/CN110246734A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001304705A (en) * | 2000-04-17 | 2001-10-31 | Daikin Ind Ltd | Cryogenic cooling system |
| JP2007003397A (en) * | 2005-06-24 | 2007-01-11 | Fuji Electric Holdings Co Ltd | Sample analyzer |
| CN209804582U (en) * | 2019-05-17 | 2019-12-17 | 中国科学院理化技术研究所 | Opposed compressor driven scanning electron microscope refrigeration system |
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