CN110244081A - A kind of expansion stream triaxial accelerometer and its processing method - Google Patents
A kind of expansion stream triaxial accelerometer and its processing method Download PDFInfo
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- CN110244081A CN110244081A CN201910635444.5A CN201910635444A CN110244081A CN 110244081 A CN110244081 A CN 110244081A CN 201910635444 A CN201910635444 A CN 201910635444A CN 110244081 A CN110244081 A CN 110244081A
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- 238000003672 processing method Methods 0.000 title description 4
- 230000001133 acceleration Effects 0.000 claims abstract description 83
- 239000012212 insulator Substances 0.000 claims abstract description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 25
- 239000010703 silicon Substances 0.000 claims abstract description 25
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000035945 sensitivity Effects 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 19
- 238000005516 engineering process Methods 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 4
- 238000003032 molecular docking Methods 0.000 claims description 3
- 239000000565 sealant Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 abstract description 7
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000035939 shock Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0897—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by thermal pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
The invention discloses a kind of expansion stream triaxial accelerometers, comprising: top cover and pedestal；It is provided with and outward extends flange on the bottom surface of top cover, cylindrical upper chamber is provided in flange, the insulator of four arrangements that are square is provided in upper chamber, two thermosensitive wires for sensitive Z-direction acceleration are provided on four insulators；The top surface of the pedestal is provided with groove compatible with the flange, is provided with cylindrical lower chambers in the groove, the bottom chamber be provided with two-by-two with respect to and parallel four pairs of insulators, be provided with a thermosensitive wire on each pair of insulator；Thermosensitive wire for sensitive X-direction and Y direction acceleration is provided centrally with heat source silicon wafer, and the heat source silicon wafer is fixed at the bottom chamber by insulator.The measurement of 3-axis acceleration may be implemented in the present invention.Its structure is simple, the service life is long, strong shock resistance, at low cost, while can resist the interference of external environment and improve the sensitivity of fluid acceleration meter.
Description
Technical field
The present invention relates to inertial survey technique fields, more particularly, to a kind of expansion stream triaxial accelerometer and its processing side
Method.
Background technique
Between the past few decades, using cantilever support beam and solid masses block as the micro-mechanical accelerometer of sensing element,
Fracture or damage easily occur under extraneous high speed impact, structure is easy fatigue；Moreover, in order to improve the spirit of this accelerometer
Sensitivity, it is necessary to which sensing element is placed in vacuum environment and is reduced Measuring Air Damping Coefficient Using；This manufacture craft higher cost and multiple
It is miscellaneous.In comparison, using fluid as sensing element, the device being made can realize that structure is simple, strong shock resistance, longevity
The long and at low cost feature of life, has excellent performance.Before, the accelerometer being made using thermal convection principle, due to
The flow velocity of thermal convection gas is slower, and relies on gravity acceleration g, causes its sensitivity lower and influence vulnerable to external environment.
The influence of two above factor causes the sensitivity of thermal convection accelerometer that can not improve, and limits answering for hot-fluid accelerometer
With.Therefore, those skilled in the art be dedicated to researching and developing it is a kind of can overcome influence of the both the above factor to accelerometer, improve
The performance of accelerometer.
Utilize the basic principle of the accelerometer of thermally expansive fluid are as follows: in airtight cavity, hanging heat source applies week
Phase property square-wave voltage and generate heat, surrounding gas medium expanded by heating forms the expansion stream of movement, the expansion stream movement
Process meets quality, momentum and the conservation of energy.When external world's input is along the acceleration in X, Y, Z axis direction, since inertia force acts on,
The thermal expansive fluid of movement will cause the variation in inside cavity temperature field, according to thermal resistance effect, along the one of input acceleration direction
Change in resistance occurs between metallic resistance thermosensitive wire, by corresponding detection circuit and signal processing circuit, it can be achieved that input
The measurement of acceleration value.
The information disclosed in the background technology section is intended only to deepen the understanding to the general background technology of the application, and
It is not construed as recognizing or implying in any form that the information constitutes the prior art known to those skilled in the art.
Summary of the invention
The purpose of the present invention is to provide a kind of expansion stream triaxial accelerometer and its processing methods, to solve the prior art
Present in technical problem.
To achieve the goals above, the invention adopts the following technical scheme:
The present invention provides a kind of expansion stream triaxial accelerometer characterized by comprising top cover and pedestal；Wherein,
It is provided with and outward extends flange on the bottom surface of the top cover, cylindrical upper chamber, institute are provided in the flange
The insulator for being provided with four arrangements that are square in upper chamber is stated, two are provided on four insulators for sensitive Z axis
The thermosensitive wire of directional acceleration, two thermosensitive wires are arranged in parallel；
The top surface of the pedestal is provided with groove compatible with the flange, is provided with cylindrical cavity of resorption in the groove
Room, the bottom chamber be provided with two-by-two with respect to and parallel four pairs of insulators, be provided with a thermosensitive wire on each pair of insulator,
Two pairs of parallel thermosensitive wires are respectively used to the acceleration of sensitive X-direction and Y direction；
Thermosensitive wire for sensitive X-direction and Y direction acceleration is provided centrally with heat source silicon wafer, the heat source silicon wafer
The bottom chamber is fixed at by insulator；
Top cover is sealed after being connected with pedestal by sealant, and after the two docking, upper chamber and lower chambers are constituted
Sensitive chamber, and the thermosensitive wire of sensitive Z-direction acceleration with the thermosensitive wire of sensitivity X-direction and Y direction acceleration same
In one plane.
As a kind of further technical solution, the thermosensitive wire of sensitive Z-direction acceleration is reciprocating bending grid
Shape structure, and be process by MEMS technology.
As a kind of further technical solution, the thermosensitive wire of sensitive X-direction acceleration and sensitive Y direction acceleration
It is made of the Pt wire of equal length.
As a kind of further technical solution, the thermosensitive wire of sensitive X-direction acceleration and sensitive Y direction acceleration
It is mutually perpendicular to be distributed in the periphery of heat source silicon wafer, and is equal with the distance between heat source.
As a kind of further technical solution, the thermosensitive wire of sensitive X-direction acceleration and sensitive Y direction acceleration
By being welded to connect on the binding post of insulator, the thermosensitive wire of sensitive Z-direction acceleration and the heat source silicon wafer pass through
Conductive adhesive is on insulator binding post.
A method of processing expansion stream triaxial accelerometer, described method includes following steps:
Step 1: using MEMS technology, processes the thermosensitive wire of heat source silicon wafer and sensitive Z axis acceleration respectively；
Step 2: in the corresponding position drill straight diameter of top cover and pedestal hole identical with insulator sizes, insulator is installed
In corresponding hole；
Step 3: by welding procedure, by the temperature-sensitive wire bond of sensitive X-direction acceleration and sensitive Y direction acceleration
It connects on insulator binding post；The thermosensitive wire and heat source silicon wafer of sensitive Z axis acceleration are connect with conductive adhesive in insulator respectively
On terminal；
Step 4: the top cover made and pedestal are docked, and form expansion stream three axis accelerometer.
By adopting the above technical scheme, the invention has the following beneficial effects:
The measurement of 3-axis acceleration may be implemented in the present invention, and its structure is simple, the service life is long, strong shock resistance, cost
It is low, while the interference of external environment can be resisted and improve the sensitivity of fluid acceleration meter.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic perspective view of top cover provided in an embodiment of the present invention；
Fig. 2 is the schematic perspective view of pedestal provided in an embodiment of the present invention；
Fig. 3 is the top view of top cover provided in an embodiment of the present invention；
Fig. 4 is the top view of pedestal provided in an embodiment of the present invention；
Fig. 5 is that the thermosensitive wire of sensitive Z-direction acceleration provided in an embodiment of the present invention and the connection structure of insulator are shown
It is intended to.
Icon: 1- top cover；2- pedestal；3- flange；4- upper chamber；5- insulator；6- thermosensitive wire；7- groove；8- lower chambers；
9- insulator；10- thermosensitive wire；11- heat source silicon wafer.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning in the present invention.
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
The present embodiment provides a kind of expansion stream triaxial accelerometer and its processing methods.
In conjunction with shown in Fig. 1 to Fig. 4, which includes: top cover 1 and pedestal 2；Wherein,
It is provided on the bottom surface of the top cover 1 and outward extends flange 3, be provided with cylindrical upper chamber in the flange 3
4, it is provided with the insulator 5 of four arrangements that are square in the upper chamber 4, is provided with two on four insulators 5 and is used for
The thermosensitive wire 6 of sensitive Z-direction acceleration, two thermosensitive wires are arranged in parallel；
The top surface of the pedestal 2 is provided with groove 7 compatible with the flange, is provided with cylinder in the groove 7
Lower chambers 8, be provided in the lower chambers 8 two-by-two with respect to and parallel four pairs of insulators 9, be provided with one on each pair of insulator 9
Root thermosensitive wire 10, two pairs of parallel thermosensitive wires are respectively used to the acceleration of sensitive X-direction and Y direction；
Thermosensitive wire for sensitive X-direction and Y direction acceleration is provided centrally with heat source silicon wafer 11, the heat source silicon
Piece 11 is fixed in the lower chambers 8 by insulator；
Top cover 1 is sealed after being connected with pedestal 2 by sealant, after the two docking, upper chamber 4 and lower chambers 8
Constitute closed sensitive chamber, and the thermosensitive wire of sensitive Z-direction acceleration and sensitive X-direction and Y direction acceleration
Thermosensitive wire is in the same plane.
The expansion stream triaxial accelerometer working principle of the application is as follows:
In the effect of no extraneous acceleration, meeting Z axis positive direction flowing that when gases are heated, they expand, temperature field is symmetrically divided
Be distributed in sensitive cavity body, according to thermal resistance effect, the intracorporal temperature field of closed chamber cause thermosensitive wire resistance variation be it is identical, two
The wheatstone bridge circuits that the thermosensitive wire 6 that root is used for sensitive Z-direction acceleration is connected still keep balance, corresponding output
Voltage is zero.
When the external world inputs acceleration identical with Z axis positive direction, due to the effect of inertia force, what expansion stream moved upwards
Speed will reduce, and it is defeated that the time for the thermosensitive wire that air-flow reaches detection Z axis acceleration in sensitive cavity body at this time is greater than no acceleration
Fashionable air-flow reaches the time of the thermosensitive wire of detection Z axis acceleration, will be the Hui Si that thermosensitive wire is connected during this
Energization bridge circuit will not balance, and corresponding output voltage is no longer zero.Thereby realize acceleration identical with Z axis positive direction
The measurement of degree.
When the external world inputs acceleration identical with Z axis negative direction, due to the effect of inertia force, what expansion stream moved upwards
Speed will increase, and it is defeated that the time for the thermosensitive wire that air-flow reaches detection Z axis acceleration in sensitive cavity body at this time is less than no acceleration
Fashionable air-flow reaches the time of the thermosensitive wire of detection Z axis acceleration, will be the Hui Si that thermosensitive wire is connected during this
Energization bridge circuit will not balance, and corresponding output voltage is no longer zero.Thereby realize acceleration identical with Z axis negative direction
The measurement of degree.
Four thermosensitive wires 10 are located at the position up and down of heat source silicon wafer 11 in Fig. 2.To the heated filament of heat source silicon wafer 11
Apply periodic square-wave signal, surrounding air meeting expanded by heating forms periodically expansion stream.External world's input X-axis
Directional acceleration, due to the effect of inertia force, temperature field at left and right sides of heat source silicon wafer will not be symmetrical, by thermal resistance effect
The variation of the resistance value of caused detection two thermosensitive wires of X-direction is difference, and the thermosensitive wire of sensitive X-direction acceleration is connected
Wheatstone bridge circuits will not balance, corresponding output voltage is no longer zero, is thereby realized to X-direction acceleration
Measurement.External world's input Y direction acceleration, due to the effect of inertia force, two sides temperature field will not be right up and down for heat source silicon wafer
Claim distribution, the variation that the resistance value of two thermosensitive wires of Y direction is detected as caused by thermal resistance effect is difference, and sensitive Y direction adds
The wheatstone bridge circuits that the thermosensitive wire of speed is connected will not balance, and corresponding output voltage is no longer zero, thus real
The measurement to Y direction acceleration is showed.
When work, heat source is under the heating of square-wave signal, and when gases are heated, they expand around meeting heat source, forms periodical underground heat
Expansion stream.
In the effect of no extraneous acceleration, when gases are heated, they expand to flow up, and temperature field is symmetrically distributed in
In sensitive cavity body, according to thermal resistance effect, temperature field causes the variation of thermosensitive wire resistance to be Hui Si identical, that thermosensitive wire is connected
Energization bridge circuit still keeps balance, and corresponding output voltage is zero.
In this embodiment, as a kind of further technical solution, the thermosensitive wire of sensitive Z-direction acceleration is
Reciprocating bending bar structure, and be process by MEMS technology.By the way that the thermosensitive wire of sensitive Z-direction acceleration is arranged
For reciprocating bending bar structure, it is capable of increasing the contact area of hot-fluid and thermosensitive wire, to improve sensitivity.
In this embodiment, as a kind of further technical solution, sensitive X-direction acceleration and sensitive Y direction
The thermosensitive wire of acceleration is made of the Pt wire of equal length.
In this embodiment, as a kind of further technical solution, sensitive X-direction acceleration and sensitive Y direction
The thermosensitive wire of acceleration is mutually perpendicular to be distributed in the periphery of heat source silicon wafer, and is equal with the distance between heat source.
In this embodiment, as a kind of further technical solution, sensitive X-direction acceleration and sensitive Y direction
The thermosensitive wire of acceleration is by being welded to connect the thermosensitive wire of sensitive Z-direction acceleration and institute on the binding post of insulator
It states heat source silicon wafer and passes through conductive adhesive on insulator binding post.
The present embodiment additionally provides a kind of method for processing expansion stream triaxial accelerometer, and the method includes walking as follows
It is rapid:
Step 1: using MEMS technology, processes the thermosensitive wire of heat source silicon wafer and sensitive Z axis acceleration respectively；
Step 2: in the corresponding position drill straight diameter of top cover and pedestal hole identical with insulator sizes, insulator is installed
In corresponding hole；
Step 3: by welding procedure, by the temperature-sensitive wire bond of sensitive X-direction acceleration and sensitive Y direction acceleration
It connects on insulator binding post；The thermosensitive wire and heat source silicon wafer of sensitive Z axis acceleration are connect with conductive adhesive in insulator respectively
On terminal；
Step 4: the top cover made and pedestal are docked, and form expansion stream three axis accelerometer.
To sum up, by adopting the above technical scheme, the present embodiment has the following beneficial effects:
Expansion stream three axis accelerometer proposed by the present invention, using two structures of top cover and pedestal, top cover installs sensitivity Z
The thermosensitive wire of axle acceleration, the thermosensitive wire of installation heat source and sensitivity X, Y-axis acceleration on pedestal, thermosensitive wire and corresponding favour stone
Electric bridge is connected, to detect output signal.In addition, the accelerometer has structure simple, production and easy to assembly, at low cost, function
Consume low, strong shock resistance, the feature of service life length.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (6)
1. a kind of expansion stream triaxial accelerometer characterized by comprising top cover and pedestal；Wherein,
Be provided with and outward extend flange on the bottom surface of the top cover, be provided with cylindrical upper chamber in the flange, it is described on
It is provided with the insulator of four arrangements that are square in chamber, two are provided on four insulators for sensitive Z-direction
The thermosensitive wire of acceleration, two thermosensitive wires are arranged in parallel；
The top surface of the pedestal is provided with groove compatible with the flange, is provided with cylindrical lower chambers in the groove,
The bottom chamber be provided with two-by-two with respect to and parallel four pairs of insulators, be provided with a thermosensitive wire on each pair of insulator, two
The acceleration of sensitive X-direction and Y direction is respectively used to parallel thermosensitive wire；
Thermosensitive wire for sensitive X-direction and Y direction acceleration is provided centrally with heat source silicon wafer, and the heat source silicon wafer passes through
Insulator is fixed at the bottom chamber；
Top cover is sealed after being connected with pedestal by sealant, and after the two docking, upper chamber and lower chambers constitute sensitivity
Chamber, and the thermosensitive wire of the thermosensitive wire of sensitive Z-direction acceleration and sensitive X-direction and Y direction acceleration is same flat
On face.
2. expansion stream triaxial accelerometer according to claim 1, which is characterized in that the institute of sensitive Z-direction acceleration
Stating thermosensitive wire is reciprocating bending bar structure, and is process by MEMS technology.
3. expansion stream triaxial accelerometer according to claim 1, which is characterized in that sensitive X-direction acceleration and quick
The thermosensitive wire of sense Y direction acceleration is made of the Pt wire of equal length.
4. expansion stream triaxial accelerometer according to claim 1, which is characterized in that sensitive X-direction acceleration and quick
The thermosensitive wire of sense Y direction acceleration is mutually perpendicular to be distributed in the periphery of heat source silicon wafer, and is equal with the distance between heat source
's.
5. expansion stream triaxial accelerometer according to claim 1, which is characterized in that sensitive X-direction acceleration and quick
The thermosensitive wire of Y direction acceleration is felt by being welded to connect the temperature-sensitive of sensitive Z-direction acceleration on the binding post of insulator
Silk and the heat source silicon wafer pass through conductive adhesive on insulator binding post.
6. a kind of method of any expansion stream triaxial accelerometer of processing claim 1-5, which is characterized in that the side
Method includes the following steps:
Step 1: using MEMS technology, processes the thermosensitive wire of heat source silicon wafer and sensitive Z axis acceleration respectively；
Step 2: in the corresponding position drill straight diameter of top cover and pedestal hole identical with insulator sizes, insulator is mounted on phase
In the hole answered；
Step 3: by welding procedure, the thermosensitive wire of sensitive X-direction acceleration and sensitive Y direction acceleration is welded on
On insulator binding post；The thermosensitive wire and heat source silicon wafer of sensitive Z axis acceleration use conductive adhesive in insulator binding post respectively
On；
Step 4: the top cover made and pedestal are docked, and form expansion stream three axis accelerometer.
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| CN201910635444.5A CN110244081A (en) | 2019-07-15 | 2019-07-15 | A kind of expansion stream triaxial accelerometer and its processing method |
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| CN201910635444.5A CN110244081A (en) | 2019-07-15 | 2019-07-15 | A kind of expansion stream triaxial accelerometer and its processing method |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105502A (en) * | 2007-08-13 | 2008-01-16 | 中国电子科技集团公司第十三研究所 | Triaxial heat convection acceleration sensor |
| CN101430341A (en) * | 2008-12-08 | 2009-05-13 | 美新半导体（无锡）有限公司 | Wafer level three axis thermal convection acceleration sensor |
| JP2013096936A (en) * | 2011-11-04 | 2013-05-20 | Ritsumeikan | Heat sensing type acceleration sensor |
| WO2018088881A1 (en) * | 2016-11-14 | 2018-05-17 | 한국생산기술연구원 | Heat convection-type acceleration sensor and method for manufacturing same |
| CN109239401A (en) * | 2018-10-30 | 2019-01-18 | 朴然 | A kind of thermally expansive fluid three axis accelerometer and its processing method |
| CN210155164U (en) * | 2019-07-15 | 2020-03-17 | 北京信息科技大学 | Thermal expansion flow three-axis accelerometer |
-
2019
- 2019-07-15 CN CN201910635444.5A patent/CN110244081A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101105502A (en) * | 2007-08-13 | 2008-01-16 | 中国电子科技集团公司第十三研究所 | Triaxial heat convection acceleration sensor |
| CN101430341A (en) * | 2008-12-08 | 2009-05-13 | 美新半导体（无锡）有限公司 | Wafer level three axis thermal convection acceleration sensor |
| JP2013096936A (en) * | 2011-11-04 | 2013-05-20 | Ritsumeikan | Heat sensing type acceleration sensor |
| WO2018088881A1 (en) * | 2016-11-14 | 2018-05-17 | 한국생산기술연구원 | Heat convection-type acceleration sensor and method for manufacturing same |
| CN109239401A (en) * | 2018-10-30 | 2019-01-18 | 朴然 | A kind of thermally expansive fluid three axis accelerometer and its processing method |
| CN210155164U (en) * | 2019-07-15 | 2020-03-17 | 北京信息科技大学 | Thermal expansion flow three-axis accelerometer |
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