CN109239401A - A kind of thermally expansive fluid three axis accelerometer and its processing method - Google Patents
A kind of thermally expansive fluid three axis accelerometer and its processing method Download PDFInfo
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- CN109239401A CN109239401A CN201811275835.2A CN201811275835A CN109239401A CN 109239401 A CN109239401 A CN 109239401A CN 201811275835 A CN201811275835 A CN 201811275835A CN 109239401 A CN109239401 A CN 109239401A
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- 239000012530 fluid Substances 0.000 title claims abstract description 41
- 238000003672 processing method Methods 0.000 title claims abstract description 6
- 230000001133 acceleration Effects 0.000 claims abstract description 60
- 238000001514 detection method Methods 0.000 claims abstract description 37
- 239000012212 insulator Substances 0.000 claims abstract description 32
- 239000000565 sealant Substances 0.000 claims abstract description 30
- 239000000725 suspension Substances 0.000 claims description 17
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- 230000035939 shock Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000035807 sensation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/122—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by metal resistance strain gauges, e.g. wire resistance strain gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Pressure Sensors (AREA)
Abstract
The present invention relates to inertial survey technique fields, more particularly, to a kind of thermally expansive fluid three axis accelerometer and its processing method.The thermally expansive fluid three axis accelerometer uses the detection layers of square structure nesting, square structure nesting includes outer square structure and interior square structure, the metallic resistance bridge thermosensitive wire that insulator binding post is provided on outer square structure and is suspended on insulator binding post；Metallic resistance bridge heater strip, the metallic resistance bridge thermosensitive wire for being provided with insulator binding post on interior square structure and being suspended on insulator binding post respectively, upper sealant and lower sealant form airtight cavity, and cooperate corresponding detection and processing signal circuit, it can be achieved to detect while 3-axis acceleration, it is achieved that the multi-degree of freedom measurement of thermally expansive fluid acceleration meter.In addition, the accelerometer has structure simple, and production and easy to assembly, at low cost, low in energy consumption, strong shock resistance, the feature of service life length.
Description
Technical field
The present invention relates to inertial survey technique field, more particularly, to a kind of thermally expansive fluid three axis accelerometer and its
Processing method.
Background technique
Between the past few decades, using cantilever support beam and solid masses block as the micro-mechanical accelerometer of sensing element,
Fracture or damage easily occur under extraneous high speed impact, structure is easy fatigue；Moreover, in order to improve the spirit of this accelerometer
Sensitivity, it is necessary to which sensing element is placed in vacuum environment and is reduced Measuring Air Damping Coefficient Using；This manufacture craft higher cost and multiple
It is miscellaneous.In comparison, using fluid as sensing element, the device being made can realize that structure is simple, strong shock resistance, longevity
The long and at low cost feature of life, has excellent performance.Before, the accelerometer being made using thermal convection principle, due to
The flow velocity of thermal convection gas is slower, and relies on gravity acceleration g, causes its sensitivity lower and influence vulnerable to external environment.
The influence of two above factor causes the sensitivity of thermal convection accelerometer that can not improve, and limits answering for hot-fluid accelerometer
With.Therefore, those skilled in the art be dedicated to researching and developing it is a kind of can overcome influence of the both the above factor to accelerometer, improve
The performance of accelerometer.
The information disclosed in the background technology section is intended only to deepen understanding of the general background technology to the present invention, and
It is not construed as recognizing or implying in any form that the information constitutes the prior art known to those skilled in the art.
Summary of the invention
The purpose of the present invention is to provide a kind of thermally expansive fluid three axis accelerometer and its processing methods, can be real simultaneously
The measurement of existing 3-axis acceleration, structure is simple, the service life is long, strong shock resistance, at low cost, while can resist the dry of external environment
Disturb and improve the sensitivity of fluid acceleration meter.
To achieve the goals above, the invention adopts the following technical scheme:
In a first aspect, the present invention provides a kind of thermally expansive fluid three axis accelerometer comprising: upper sealant, under it is close
Sealing and intermediate detection layer；There are two 45 ° of difference of square structure nesting, the square structure is embedding for the intermediate detection layer setting
Set includes outer square structure and interior square structure, is provided with insulator binding post on the outer square structure and is suspended in insulation
Metallic resistance bridge thermosensitive wire on sub- binding post；Insulator binding post is provided on the interior square structure and is suspended in respectively
Metallic resistance bridge heater strip, metallic resistance bridge thermosensitive wire on insulator binding post；The upper sealant and lower sealant difference
It is provided with inside groove, the upper sealant and lower sealant constitute the sensitive cavity of accelerometer, by the gas of inside cavity and outside
Boundary is isolated to form a closed working environment.
As a kind of further technical solution, the four edges central symmetry of the outer square structure suspends four metal electricity
Hinder bridge thermosensitive wire, and each metallic resistance bridge thermosensitive wire and corresponding edge keeping parallelism.
As a kind of further technical solution, the four edges central symmetry of the interior square structure suspends four metal electricity
Hinder bridge heater strip, and each metallic resistance bridge heater strip and corresponding edge keeping parallelism；Distinguish in the upper side and lower side of interior square structure
Two metallic resistance bridge thermosensitive wires are suspended, position is parallel with interior square structure a pair of linea angulata.
As a kind of further technical solution, the adjacent both sides direction difference of the outer rectangular structure vertical is defined
For X-direction, Y-direction, the short transverse of sensitive cavity is Z-direction；
The metallic resistance bridge thermosensitive wire includes the metallic resistance bridge thermosensitive wire for detecting X-axis acceleration, detection Y-axis acceleration
Metallic resistance bridge thermosensitive wire, detect Z axis acceleration metallic resistance bridge thermosensitive wire；Detect the metallic resistance bridge of X-axis acceleration
Thermosensitive wire is two, is symmetrically suspended on outer square structure X axis both sides；Detect the metallic resistance bridge thermosensitive wire of Y-axis acceleration
It is two, is symmetrically suspended on outer square structure Y-axis both sides；The metallic resistance bridge thermosensitive wire for detecting Z axis acceleration is two,
Symmetrically be suspended in interior square structure diagonal line two sides Z axis to；
The suspension height of four metallic resistance bridge heater strips is consistent, is z1；Detect the metallic resistance bridge heat of X-axis acceleration
Quick silk, the suspension height for the metallic resistance bridge thermosensitive wire for detecting Y-axis acceleration are consistent, are z2, meet: z1=z2；Detect Z axis
The suspension height of the metallic resistance bridge thermosensitive wire of acceleration is respectively z3、z4, meet: | z3|=| z4|。
As a kind of further technical solution, the metallic resistance bridge thermosensitive wire loads constant voltage.
As a kind of further technical solution, the square-wave voltage of the metallic resistance bridge heater strip loading cycle, side
One duty cycle of wave voltage includes conduction time and power-off time.
As a kind of further technical solution, each metallic resistance bridge heater strip is electric by the Pt metal of equal length
Resistance line is made.
As a kind of further technical solution, each metallic resistance bridge thermosensitive wire is electric by the Pt metal of equal length
Resistance line is made.
As a kind of further technical solution, the specification of each insulator binding post is identical.
In conclusion when work, four metallic resistance bridge heater strips heating on interior square structure, surrounding gas by
Thermal expansion, forms the expansion stream moved along X, Y, Z-direction, which meets quality, momentum and ability and keep
It is permanent.Two metallic resistance bridge heater strips of square structure are formed respectively along the positive and negative heat to Y-axis forward motion of X-axis in suspending
Expansion stream, suspend in square structure other two metallic resistances bridge heater strip formed respectively along X-axis it is positive and negative to Y-axis negative sense
The expansion stream of movement, suspend in square structure four metallic resistance bridge heater strips formed it is positive and negative to moving along Z axis respectively
Expansion stream.
The center on outer four side of square structure, suspension have the metallic resistance bridge thermosensitive wire of detection X-axis acceleration, detection Y-axis to add
The metallic resistance bridge thermosensitive wire of speed；The diagonal line two of interior square structure surveys the metallic resistance bridge that suspension has detection Z axis acceleration
Thermosensitive wire；Share the variation of temperature field surrounding caused by eight metallic resistance bridge thermosensitive wire detection input accelerations.Specifically,
When the acceleration of extraneous input X-direction, due to the effect of inertia force, thermal expansive fluid causes the change in inside cavity temperature field
Change, according to thermal resistance effect, change in resistance occurs between a pair of of metallic resistance thermosensitive wire in input acceleration direction, by corresponding
Detection circuit and signal processing circuit, it can be achieved that input X-axis acceleration value measurement.
When the acceleration of extraneous input Y direction, due to the effect of inertia force, thermal expansive fluid causes inside cavity temperature
Between a pair of of metallic resistance thermosensitive wire in input acceleration direction change in resistance occurs for the variation of degree field according to thermal resistance effect,
By corresponding detection circuit and signal processing circuit, it can be achieved that the measurement of input Y-axis acceleration value.
When the acceleration of extraneous input Z-direction, due to the effect of inertia force, thermal expansive fluid causes inside cavity temperature
Between a pair of of metallic resistance thermosensitive wire in input acceleration direction change in resistance occurs for the variation of degree field according to thermal resistance effect,
By corresponding detection circuit and signal processing circuit, it can be achieved that the measurement of input Z axis acceleration value.
Second aspect, the processing side for the thermally expansive fluid three axis accelerometer that the present invention also provides a kind of according to
Method comprising:
S1: the intermediate detection layer of inside and outside rectangular nesting is produced and generated on aluminium, and in square structure corresponding position drill straight
Diameter and height hole identical with insulator sizes, for installing insulator binding post；
S2: installing gold-plated insulator binding post on 20 holes, to suspend metallic resistance bridge heater strip and metallic resistance bridge
Thermosensitive wire；
S3: for suspend detection X, Y-axis acceleration metallic resistance bridge thermosensitive wire insulator binding post lead be used for
The lead of suspension metallic resistance bridge heater strip insulator binding post cuts out identical length, makes the gold for detecting X, Y-axis acceleration
Belong to resistance bridge thermosensitive wire and metallic resistance bridge heater strip is in the same plane；
S4: the lead of the metallic resistance bridge thermosensitive wire insulator binding post of suspension detection Z axis acceleration goes out different length,
The metallic resistance bridge thermosensitive wire for detecting Z axis acceleration is set to be in the symmetric position of X-Y plane.
By adopting the above technical scheme, the invention has the following beneficial effects:
Thermally expansive fluid three axis accelerometer proposed by the present invention suspends metal electricity using the detection layers of rectangular nesting
Bridge heater strip and metallic resistance bridge thermosensitive wire are hindered, upper sealant and lower sealant form airtight cavity, and cooperate corresponding detection
With processing signal circuit, it can be achieved that 3-axis acceleration while is detected.It is achieved that thermally expansive fluid acceleration meter is more
Freedom degree measurement.In addition, the accelerometer has structure simple, production and easy to assembly, at low cost, low in energy consumption, shock resistance energy
Power is strong, the feature of service life length.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is sealant schematic three dimensional views on thermally expansive fluid three axis accelerometer in embodiment；
Fig. 2 is thermally expansive fluid three axis accelerometer detection layers schematic three dimensional views in embodiment；
Fig. 3 is the top view of thermally expansive fluid three axis accelerometer detection layers in embodiment；
Fig. 4 is the left view of thermally expansive fluid three axis accelerometer detection layers in embodiment；
Fig. 5 is the schematic three dimensional views of sealant under thermally expansive fluid three axis accelerometer in embodiment；
Fig. 6 is the top view of sealant under thermally expansive fluid three axis accelerometer in embodiment；
Fig. 7 is the main sectional view of sealant under thermally expansive fluid three axis accelerometer in embodiment；
Fig. 8 is insulator binding post floor map in embodiment.
In figure, 1: upper sealant；2: intermediate detection layer；3: outer square structure；4: interior square structure；5: lower sealant；6,
7,8,9: metallic resistance bridge heater strip；10,11,12,13,14,15: metallic resistance bridge thermosensitive wire；16,17 be inside groove.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning in the present invention.
Below in conjunction with attached drawing, detailed description of the preferred embodiments.It should be understood that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
Embodiment one
Referring to figs. 1 to shown in Fig. 8, thermally expansive fluid three axis accelerometer includes upper sealant 1, centre in the present embodiment
Detection layers 2, lower sealant 5.Wherein, there are rectangular nested (outer square structure 3 and interior square structure 4) and position on intermediate detection layer 2
Add in the metallic resistance bridge thermosensitive wire 10,11,12,13 on outer square structure 3 and the metallic resistance bridge on interior square structure 4
Heated filament 6,7,8,9 and metallic resistance bridge thermosensitive wire 12,13.It is inside groove 16 inside upper sealant 1, is inside groove inside lower sealant 5
17.The intracorporal gas of closed chamber is isolated from the outside by upper sealant 1 and lower sealant 5, forms the working environment of a sealing.
As shown in Figure 2, Figure 3, Figure 4, there are rectangular nestings, including outer square structure 3 and interior square structure for intermediate detection layer 2
4.Suspension has thermosensitive wire of four metallic resistance bridges as accelerometer on outer square structure 3, and suspension has four on interior square structure 4
Thermosensitive wire of the root metallic resistance bridge as the heater strip of accelerometer and two metallic resistance bridges as accelerometer.
Wherein, heater strip forms the orientation hot-fluid along X-axis, Y-axis and Z axis for heating cavity internal gas.
Specifically: in airtight cavity, 6,7,8, the 9 loading cycle square-wave voltage of metallic resistance bridge heater strip of suspension
And generate heat, surrounding gas medium expanded by heating forms the expansion stream of movement, which meets matter
Amount, momentum and ability conservation.It is believed that metallic resistance bridge heater strip 6 and 7 formed respectively along X-axis it is positive and along Y-axis it is positive and negative
To expansion stream, metallic resistance bridge heater strip 8 and 9 formed respectively along X-axis negative sense and along Y-axis it is positive and negative to expansion stream, gold
Belong to resistance bridge heater strip 6,7,8,9 formed respectively along Z axis it is positive and negative to expansion stream.
Wherein, thermosensitive wire is used to detect the variation of inside cavity temperature caused by extraneous acceleration inputs.
Specifically: metallic resistance bridge thermosensitive wire 10,11 detects X-axis acceleration, when the acceleration of extraneous input X-direction
When, due to the effect of inertia force, thermal expansive fluid causes inside cavity X-Y plane temperature field to shift, metallic resistance bridge heat
Temperature difference is generated between quick silk 10,11, according to thermal resistance effect, generation resistance value is poor between metallic resistance bridge thermosensitive wire 10,11, passes through
Corresponding detection circuit and signal processing circuit, can extrapolate the acceleration value of input X-axis；Metallic resistance bridge thermosensitive wire 12,13
Y-axis acceleration is detected, when the acceleration of extraneous input Y direction, due to the effect of inertia force, thermal expansive fluid causes cavity
Internal X-Y plane temperature field shifts, and generates temperature difference between metallic resistance bridge thermosensitive wire 12,13, according to thermal resistance effect, gold
It is poor that resistance value is generated between category resistance bridge thermosensitive wire 12,13, by corresponding detection circuit and signal processing circuit, can be extrapolated defeated
Enter the acceleration value of Y-axis；Metallic resistance bridge thermosensitive wire 14,15 detects Z axis acceleration, when the acceleration of extraneous input Z-direction
When, due to the effect of inertia force, thermal expansive fluid causes inside cavity to shift along Z-direction temperature field, is imitated according to thermal resistance
It answers, generation resistance value is poor before metallic resistance bridge thermosensitive wire 14,15, by corresponding detection circuit and signal processing circuit, can push away
Calculate the acceleration value of input Z axis.
Preferably, the length of the four metallic resistance bridge heater strips 6,7,8,9 suspended on internal square structure is identical, is all
It is made of material and identical Pt of cross-sectional area；Four of X-direction and Y direction are suspended and detected in external square structure
The length of metallic resistance bridge thermosensitive wire 10,11,12,13 is identical, is all made of material and identical Pt of cross-sectional area.It is internal
It is suspended on square structure and the length for detecting two rectangular metallic resistance bridge thermosensitive wire 14-15 of Z axis is different, length difference is less than
4%, all it is made of material and identical Pt of cross section street.
Preferably, four 6,7,8, the 9 loading cycle square waves of metallic resistance bridge heater strip suspended on internal square structure
One duty cycle of voltage, square-wave voltage includes conduction time and power-off time；The six roots of sensation suspended on the square structure of inside and outside
Metallic resistance bridge thermosensitive wire 10-15 loads constant voltage.
Thermally expansive fluid three axis accelerometer proposed by the present invention, using the intermediate detection layer 2 of rectangular nesting, suspension gold
Belong to resistance bridge heater strip 6,7,8,9 and metallic resistance bridge thermosensitive wire 10-15, upper sealant 1 forms closed chamber with lower sealant 5
Body, and cooperate corresponding detection and processing signal circuit, it can be achieved that 3-axis acceleration while is detected.Upper sealant 1 is close under
The inside groove 16 of sealing 5, the total height that 17 height are airtight cavity.Cavity total height more cavity length in the embodiment
10%, it can effectively inhibit the free convection of inside cavity gas.
Embodiment two
The present embodiment also provides a kind of processing side of thermally expansive fluid three axis accelerometer according to embodiment one
Method comprising:
S1: the intermediate detection layer of inside and outside rectangular nesting is produced and generated on aluminium, and in square structure corresponding position drill straight
Diameter and height hole identical with insulator sizes, for installing insulator binding post；
S2: installing gold-plated insulator binding post on 20 holes, to suspend metallic resistance bridge heater strip and metallic resistance bridge
Thermosensitive wire；
S3: for suspend detection X, Y-axis acceleration metallic resistance bridge thermosensitive wire insulator binding post lead be used for
The lead of suspension metallic resistance bridge heater strip insulator binding post cuts out identical length, makes the gold for detecting X, Y-axis acceleration
Belong to resistance bridge thermosensitive wire and metallic resistance bridge heater strip is in the same plane；
S4: the lead of the metallic resistance bridge thermosensitive wire insulator binding post of suspension detection Z axis acceleration goes out different length,
The metallic resistance bridge thermosensitive wire for detecting Z axis acceleration is set to be in the symmetric position of X-Y plane.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of thermally expansive fluid three axis accelerometer characterized by comprising upper sealant, lower sealant and intermediate inspection
Survey layer；
There are two 45 ° of difference of square structure nesting, the square structure nesting includes outer rectangular for the intermediate detection layer setting
Structure and interior square structure are provided with insulator binding post on the outer square structure and are suspended on insulator binding post
Metallic resistance bridge thermosensitive wire；Insulator binding post is provided on the interior square structure and is suspended in insulator binding post respectively
On metallic resistance bridge heater strip, metallic resistance bridge thermosensitive wire；
The upper sealant and lower sealant are respectively arranged with inside groove, and the upper sealant and lower sealant constitute accelerometer
The gas of inside cavity is isolated from the outside to form a closed working environment by sensitive cavity.
2. thermally expansive fluid three axis accelerometer according to claim 1, which is characterized in that the outer square structure
Four edges central symmetry suspends four metallic resistance bridge thermosensitive wires, and each metallic resistance bridge thermosensitive wire and corresponding edge keeping parallelism.
3. thermally expansive fluid three axis accelerometer according to claim 2, which is characterized in that the interior square structure
Four edges central symmetry suspends four metallic resistance bridge heater strips, and each metallic resistance bridge heater strip and corresponding edge keeping parallelism；
Two metallic resistance bridge thermosensitive wires, position and interior square structure a pair of linea angulata are suspended respectively in the upper side and lower side of interior square structure
In parallel.
4. thermally expansive fluid three axis accelerometer according to claim 3, which is characterized in that define the outer rectangular knot
The vertical adjacent both sides direction of structure is respectively X-direction, Y-direction, and the short transverse of sensitive cavity is Z-direction；
The metallic resistance bridge thermosensitive wire includes the metallic resistance bridge thermosensitive wire for detecting X-axis acceleration, the gold for detecting Y-axis acceleration
The metallic resistance bridge thermosensitive wire for belonging to resistance bridge thermosensitive wire, detecting Z axis acceleration；Detect the metallic resistance bridge temperature-sensitive of X-axis acceleration
Silk is two, is symmetrically suspended on outer square structure X axis both sides；The metallic resistance bridge thermosensitive wire for detecting Y-axis acceleration is two
Root is symmetrically suspended on outer square structure Y-axis both sides；The metallic resistance bridge thermosensitive wire for detecting Z axis acceleration is two, symmetrically
Be suspended in interior square structure diagonal line two sides Z axis to；
The suspension height of four metallic resistance bridge heater strips is consistent, is z1；The metallic resistance bridge thermosensitive wire of detection X-axis acceleration,
The suspension height for detecting the metallic resistance bridge thermosensitive wire of Y-axis acceleration is consistent, is z2, meet: z1=z2；Detect Z axis acceleration
The suspension height of metallic resistance bridge thermosensitive wire be respectively z3、z4, meet: | z3|=| z4|。
5. thermally expansive fluid three axis accelerometer according to claim 4, which is characterized in that the metallic resistance bridge heat
Quick silk loads constant voltage.
6. thermally expansive fluid three axis accelerometer according to claim 4, which is characterized in that the metallic resistance bridge adds
One duty cycle of the square-wave voltage of heated filament loading cycle, square-wave voltage includes conduction time and power-off time.
7. thermally expansive fluid three axis accelerometer according to claim 4, which is characterized in that each metallic resistance
Bridge heater strip is made of the Pt metallic resistance line of equal length.
8. thermally expansive fluid three axis accelerometer according to claim 4, which is characterized in that each metallic resistance
Bridge thermosensitive wire is made of the Pt metallic resistance line of equal length.
9. thermally expansive fluid three axis accelerometer according to claim 4, which is characterized in that each insulator
The specification of binding post is identical.
10. a kind of processing method of thermally expansive fluid three axis accelerometer according to claim 1 to 9,
It is characterized in that, comprising:
S1: producing and generating the intermediate detection layer of inside and outside rectangular nesting on aluminium, and square structure corresponding position drill straight diameter with
Height hole identical with insulator sizes, for installing insulator binding post；
S2: installing gold-plated insulator binding post on 20 holes, to suspend metallic resistance bridge heater strip and metallic resistance bridge temperature-sensitive
Silk；
S3: for suspend detection X, Y-axis acceleration metallic resistance bridge thermosensitive wire insulator binding post lead be used for suspend
The lead of metallic resistance bridge heater strip insulator binding post cuts out identical length, makes the metal electricity for detecting X, Y-axis acceleration
It hinders bridge thermosensitive wire and metallic resistance bridge heater strip is in the same plane；
S4: the lead of the metallic resistance bridge thermosensitive wire insulator binding post of suspension detection Z axis acceleration goes out different length, makes to examine
The metallic resistance bridge thermosensitive wire for surveying Z axis acceleration is in the symmetric position of X-Y plane.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110244081A (en) * | 2019-07-15 | 2019-09-17 | 北京信息科技大学 | A kind of expansion stream triaxial accelerometer and its processing method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07260818A (en) * | 1994-03-24 | 1995-10-13 | Honda Motor Co Ltd | Gas rate sensor with built-in acceleration sensor |
| US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
| US20070101813A1 (en) * | 2005-11-10 | 2007-05-10 | Memsic, Inc. | Single chip tri-axis accelerometer |
| CN101105502A (en) * | 2007-08-13 | 2008-01-16 | 中国电子科技集团公司第十三研究所 | Triaxial heat convection acceleration sensor |
| US20080087082A1 (en) * | 2004-08-06 | 2008-04-17 | Hankuk Sensys Co., Ltd. | Method and Device for Measuring Acceleration and/or Inclination by Using Thermal Convention of a Fluid |
| JP2013088246A (en) * | 2011-10-17 | 2013-05-13 | Tokyo Metropolitan Industrial Technology Research Institute | Heat acceleration sensor |
| JP2013096936A (en) * | 2011-11-04 | 2013-05-20 | Ritsumeikan | Heat sensing type acceleration sensor |
| CN208921731U (en) * | 2018-10-30 | 2019-05-31 | 朴然 | A kind of thermally expansive fluid three axis accelerometer |
-
2018
- 2018-10-30 CN CN201811275835.2A patent/CN109239401B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07260818A (en) * | 1994-03-24 | 1995-10-13 | Honda Motor Co Ltd | Gas rate sensor with built-in acceleration sensor |
| US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
| US20080087082A1 (en) * | 2004-08-06 | 2008-04-17 | Hankuk Sensys Co., Ltd. | Method and Device for Measuring Acceleration and/or Inclination by Using Thermal Convention of a Fluid |
| US20070101813A1 (en) * | 2005-11-10 | 2007-05-10 | Memsic, Inc. | Single chip tri-axis accelerometer |
| CN101105502A (en) * | 2007-08-13 | 2008-01-16 | 中国电子科技集团公司第十三研究所 | Triaxial heat convection acceleration sensor |
| JP2013088246A (en) * | 2011-10-17 | 2013-05-13 | Tokyo Metropolitan Industrial Technology Research Institute | Heat acceleration sensor |
| JP2013096936A (en) * | 2011-11-04 | 2013-05-20 | Ritsumeikan | Heat sensing type acceleration sensor |
| CN208921731U (en) * | 2018-10-30 | 2019-05-31 | 朴然 | A kind of thermally expansive fluid three axis accelerometer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110244081A (en) * | 2019-07-15 | 2019-09-17 | 北京信息科技大学 | A kind of expansion stream triaxial accelerometer and its processing method |
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