CN101105502A - Triaxial heat convection acceleration sensor - Google Patents
Triaxial heat convection acceleration sensor Download PDFInfo
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- CN101105502A CN101105502A CNA2007100625563A CN200710062556A CN101105502A CN 101105502 A CN101105502 A CN 101105502A CN A2007100625563 A CNA2007100625563 A CN A2007100625563A CN 200710062556 A CN200710062556 A CN 200710062556A CN 101105502 A CN101105502 A CN 101105502A
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- temperature sensor
- closed cavity
- well heater
- acceleration
- thermal convection
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Abstract
The invention discloses a triaxial heat convection accelerated speed sensor which belongs to the micromechanical sensor field; the triaxial heat convection accelerated speed sensor comprises a closed cavity equipped with a sensing element in the internal part, a heater and a temperature sensor; the heater and the temperature sensors in the three axial directions are equipped in the closed cavity; the sensing element is a gas limited in the closed cavity; the heater is positioned in the center of the closed cavity; three temperature sensors with the same characteristic value are symmetrically provided in the X axial direction, the Y axial direction and the Z axial direction; a single gas is used as the sensing element which can sense the accelerated speeds in the three axial directions. The accelerated speed sensor in the invention can be used in a plurality of occasions to sense the accelerated speed in any direction in a space; the invention has the advantages of simple, convenience, small volume, low cost, and big reliability.
Description
Technical field
The present invention relates to a kind of acceleration transducer, especially relate to a kind of three thermal convection acceleration transducers that are applied to the micromechanics sensory field.
Background technology
Acceleration transducer can be measured physical quantitys such as acceleration, speed, displacement and degree of tilt, is a kind of application inertial sensor very widely.But the acceleration transducer that the traditional mechanical job operation is made is big because of volume, quality is big, cost is high, and the application scenario is very limited.In recent years, utilizing the miniature acceleration sensor of micromachining technology development is a kind of typical MEMS (Micro Electro MechanicalSystem is abbreviated as MEMS) device, it has overcome the shortcoming of traditional acceleration transducer, the design of the system of giving brings great convenience, has become the focus of micromechanics research field.Micro-acceleration sensor has that volume is little, highly sensitive, low cost and other advantages, is widely used in numerous areas such as micro-satellite, control automatically, navigation, GPS, mobile phone, automobile safety system and virtual game machine.Acceleration transducer axially can be divided into single-axis acceleration sensors, double-axel acceleration sensor and 3-axis acceleration sensor according to detecting, the difficulty of its axial many more realizations is big more, therefore, the difficulty of processing of three acceleration transducer is far longer than single-axis acceleration sensors.At present the implementation method of 3-axis acceleration sensor adopts the mode of single shaft combination mostly, the perhaps mode that makes up of single shaft and a twin shaft, and these methods relatively easily realize, but this method can produce alignment error and centroid position error.Employing MEMS technology can produce the acceleration transducer of different operating mode, for example: and pressure resistance type, tunnel current formula and condenser type etc., but the device majority of these types all exists suspended mass, impacts so can not tolerate big acceleration.
The gas sensitization acceleration transducer is made of the temperature sensor of closed cavity, well heater and a pair of symmetry.Well heater and temperature sensor are suspended in the cavity, and heater heats reduces gas temperature rising, the density around it.Under the effect of acceleration of gravity, the gas generation convection current in the cavity.Be positioned at like this a pair of temperature sensor on the well heater equidistance with regard to energy measurement to the temperature difference on well heater both sides.Device package prevents the influence to device of outer gas stream and temperature in the heat insulation shell of sealing.The sensitive direction of acceleration transducer is the direction of the parallel axes that forms with paired temperature sensor.When sensitive direction did not have acceleration, uniform convection current only took place in heated gas in the cavity under the effect of acceleration of gravity, and the temperature on the location of equal of the horizontal both sides of well heater equates that the output of two temperature sensors equates; When sensitive direction had acceleration, the gas convection current under the synergy of acceleration of gravity and external acceleration in the cavity temperature difference occurred on the location of equal of the horizontal both sides of well heater, and the output of two temperature sensors just produces difference.If two temperature sensors adopt thermistor, can constitute resistance bridge with two external reference resistances.Wai Jie acceleration signal just can be converted into the output voltage signal of electric bridge like this.Present disclosed gas sensitization acceleration transducer generally have only single shaft with two kinds of twin shaft, three thermal convection acceleration transducers of single sensitive element also do not have disclosed technology.
Summary of the invention
It is three thermal convection acceleration transducers one, that adopt single sensitive element that the technical issues that need to address of the present invention provide a kind of structure.
For solving the problems of the technologies described above, the technical solution adopted in the present invention is:
The present invention adopts gas as sensitive element, and gas is closed in the space that is limited to a closed cavity, and as unique sensitive element, X, Y, Z direction in the cavity of sealing are respectively arranged with temperature sensor, at the center of closed cavity well heater are set.The equidistant symmetry of temperature sensor be distributed in three of X, Y, Z axially on, in the identical and complete symmetry of characteristic value of three of X, Y, the Z temperature sensor on axially.Gas in the shared cavity of temperature sensor that X, Y, Z are three.Being respectively arranged with lead-in wire on well heater and the temperature sensor links to each other with the outside.
The present invention utilizes the MEMS technology that closed cavity, well heater and temperature sensor are processed.The structure of three thermal convection acceleration transducers of the present invention is specifically formed by three layers, three axially on, the well heater both sides respectively have a pair of or two pairs of identical temperature sensors of characteristic value are symmetrically distributed in the well heater both sides.The 2nd layer is a twin shaft thermal convection acceleration transducer, promptly is respectively arranged with two groups of temperature sensors on the 2nd layer plane, and one group of temperature sensor of left and right directions is a directions X, and one group of temperature sensor of fore-and-aft direction is the Y direction; The temperature sensor of the 1st layer and the 3rd layer is formed one group of temperature sensor on the Z-direction, the both sides up and down that are distributed in well heater of their equidistant symmetries.
The concrete structure of well heater of the present invention is: well heater be shaped as centrosymmetric figure.This centrosymmetric well heater can be the shaped as frame of hollow, also can be solid figure.
Further improvement in the technical proposal is: being shaped as of well heater is square, circular or centrosymmetric polygonal wherein a kind of.The lead-in wire of well heater is drawn in square four angles or circular diametric(al) or centrosymmetric polygonal axis direction symmetry.
Temperature sensor of the present invention can be for thermistor, thermopair, thermoelectric pile equitemperature sensor wherein a kind of.
When if temperature sensor of the present invention is thermistor, the detection resistance that two pairs of resistance values equate is set respectively on X, Y, Z axle, they constitute the electric bridge testing circuit respectively in X, Y, Z-direction.
Because the technical progress of having adopted technique scheme, the present invention to obtain is:
The present invention adopts gas to replace the movable mass piece as sensitive element, has improved shock-resistant ability greatly; And adopt the structure of X, Y, three axial three-dimensional temperature sensors of Z, realized the purpose that detects as single sensitive element, to three axial acceleration with the gas of thermal convection.Acceleration transducer of the present invention is bonded together by three-decker, form the structure of an one, replaced array mode, three thermal convection acceleration transducers of single sensitive element need not make up the function that just can realize detecting three axial acceleration, so can well overcome technical disadvantages in the past, alignment error and centroid position error be can eliminate, the manufacturing of using a plurality of sensitive elements to bring, the trouble of installation avoided.Acceleration transducer of the present invention can be applied in many occasions, when using the present invention to carry out acceleration detection, acceleration that can the aware space any direction, simple and convenient, volume is little, cost is low, reliability is high, anti-HI high impact.
Temperature sensor of the present invention can use numerous species types such as thermistor, thermopair, thermoelectric pile, is widely used.If as temperature sensor, two pairs of thermistors can be set at one on axially with thermistor, these four thermistors constitute full-bridge circuit structures, have further improved the sensitivity and the linearity that detect on each direction.
The shaped design of well heater of the present invention is centrosymmetric figure, the lead-in wire of well heater symmetry on square four angles or circular diametric(al) or centrosymmetric polygonal axis is drawn, can make the well heater heating evenly, can guarantee each temperature sensor and well heater the distance symmetry, equate, can reduce temperature sensor on all directions to the detection error of temperature, improve the precision of acceleration transducer.
Description of drawings
Fig. 1 is the diagrammatic cross-section of a kind of structure of three thermal convection acceleration transducers;
Fig. 2 is the synoptic diagram of a kind of structure of the ground floor of three thermal convection acceleration transducers and the 3rd layer;
Fig. 3 is a kind of structural representation of the second layer of three thermal convection acceleration transducers.
Wherein: 1, silicon substrate, 2, the thermistor of Z axle, 3, heating resistor, 4, the thermistor of X-axis, 5, lead-in wire, 6, the thermistor of Y-axis, 7, closed cavity.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further details:
Embodiment 1
As Fig. 1, Fig. 2, shown in Figure 3.Three thermal convection acceleration transducers of the present invention comprise that inside is provided with the closed cavity 7 of sensitive element, well heater 3, temperature sensor, and sensitive element is the gas that is limited in the closed cavity 7, and well heater and temperature sensor all are enclosed in the closed cavity 7.The basal body structure of three thermal convection acceleration transducers of the present invention is made up of silicon substrate 1, and acceleration transducer constitutes by three layers, and they are made the back respectively and are bonded together by bonding techniques.The 1st layer and the 3rd layer of thermistor 2 that is respectively two pairs of Z axles; The 2nd layer front and back are thermistors 6 of two pairs of Y-axis, about be the thermistor 4 of two pairs of X-axis.Well heater is heating resistor 3, and it is positioned at the 2nd layer center, also is the center of closed cavity 7; At three of X, Y, the Z temperature sensor on axially is equidistant being arranged symmetrically in around the well heater, and their resistance value symmetry fully.
Embodiment 2
The difference of present embodiment and embodiment 1 is: be respectively a pair of thermoelectric pile at X, Y, the axial temperature sensor of Z, this thermoelectric pile links to each other with the temperature sensing circuit in the external world by lead-in wire.
Embodiment 3
The difference of present embodiment and embodiment 1 is: heating resistor is for circular, and the lead-in wire of heating resistor is arranged on the circular diametric(al).
Claims (5)
1. three thermal convection acceleration transducers, comprise inside be provided with gas as the closed cavity of sensitive element, be arranged on the leaded well heater that is in communication with the outside, temperature sensor in the closed cavity, it is characterized in that: well heater is positioned at the closed cavity center, and three of the X in closed cavity, Y, Z are respectively arranged with characteristic temperature sensor identical, equidistant symmetric arrangement on axially.
2. three thermal convection acceleration transducers according to claim 1, it is characterized in that described temperature sensor divides three layers of setting, the 1st layer and the 3rd layer of temperature sensor that is respectively on the Z-direction, the 2nd layer front and back are temperature sensors of Y direction, about be the temperature sensor of X-direction.
3. three thermal convection acceleration transducers according to claim 1 is characterized in that described well heater is centrosymmetric figure.
4. three thermal convection acceleration transducers according to claim 3 is characterized in that square, circular or symmetrical polygonal wherein a kind of of being shaped as of described well heater.
5. three thermal convection acceleration transducers according to claim 1 and 2 is characterized in that described temperature sensor is the wherein a kind of of thermistor, thermopair, thermoelectric pile.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710062556A CN100585409C (en) | 2007-08-13 | 2007-08-13 | Triaxial heat convection acceleration sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710062556A CN100585409C (en) | 2007-08-13 | 2007-08-13 | Triaxial heat convection acceleration sensor |
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| CN101105502A true CN101105502A (en) | 2008-01-16 |
| CN100585409C CN100585409C (en) | 2010-01-27 |
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| CN200710062556A Active CN100585409C (en) | 2007-08-13 | 2007-08-13 | Triaxial heat convection acceleration sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175891A (en) * | 2011-01-05 | 2011-09-07 | 江苏大学 | Method for manufacturing three-axis thermal convection acceleration sensor chip |
| CN102621094A (en) * | 2012-03-07 | 2012-08-01 | 北京大学 | Thermal flow pattern tester and measuring method thereof |
| CN109164274A (en) * | 2018-10-30 | 2019-01-08 | 北京信息科技大学 | A kind of thermally expansive fluid two dimensional accelerometer and its processing method |
| CN109239401A (en) * | 2018-10-30 | 2019-01-18 | 朴然 | A kind of thermally expansive fluid three axis accelerometer and its processing method |
| CN110244081A (en) * | 2019-07-15 | 2019-09-17 | 北京信息科技大学 | A kind of expansion stream triaxial accelerometer and its processing method |
| CN111060715A (en) * | 2019-12-24 | 2020-04-24 | 中国航空工业集团公司北京长城航空测控技术研究所 | Acceleration sensor based on thermopile |
-
2007
- 2007-08-13 CN CN200710062556A patent/CN100585409C/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175891A (en) * | 2011-01-05 | 2011-09-07 | 江苏大学 | Method for manufacturing three-axis thermal convection acceleration sensor chip |
| CN102175891B (en) * | 2011-01-05 | 2012-11-07 | 江苏大学 | Method for manufacturing three-axis thermal convection acceleration sensor chip |
| CN102621094A (en) * | 2012-03-07 | 2012-08-01 | 北京大学 | Thermal flow pattern tester and measuring method thereof |
| CN102621094B (en) * | 2012-03-07 | 2013-11-27 | 北京大学 | Thermal flow pattern tester and measuring method thereof |
| CN109164274A (en) * | 2018-10-30 | 2019-01-08 | 北京信息科技大学 | A kind of thermally expansive fluid two dimensional accelerometer and its processing method |
| CN109239401A (en) * | 2018-10-30 | 2019-01-18 | 朴然 | A kind of thermally expansive fluid three axis accelerometer and its processing method |
| CN110244081A (en) * | 2019-07-15 | 2019-09-17 | 北京信息科技大学 | A kind of expansion stream triaxial accelerometer and its processing method |
| CN111060715A (en) * | 2019-12-24 | 2020-04-24 | 中国航空工业集团公司北京长城航空测控技术研究所 | Acceleration sensor based on thermopile |
| CN111060715B (en) * | 2019-12-24 | 2022-02-08 | 中国航空工业集团公司北京长城航空测控技术研究所 | Acceleration sensor based on thermopile |
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| Publication number | Publication date |
|---|---|
| CN100585409C (en) | 2010-01-27 |
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Assignee: Shijiazhuang Development Zone microelectronics technology development application Corp. Assignor: Inst No.13, Chinese Electronic Science and Technology Group Co Contract record no.: 2010130000121 Denomination of invention: Triaxial heat convection acceleration sensor Granted publication date: 20100127 License type: Exclusive License Open date: 20080116 Record date: 20101228 |