CN110243572B - Device and method for testing refractive index of optical waveguide group - Google Patents
Device and method for testing refractive index of optical waveguide group Download PDFInfo
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- CN110243572B CN110243572B CN201910575950.XA CN201910575950A CN110243572B CN 110243572 B CN110243572 B CN 110243572B CN 201910575950 A CN201910575950 A CN 201910575950A CN 110243572 B CN110243572 B CN 110243572B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G01M11/0228—Testing optical properties by measuring refractive power
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
- G01M11/335—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face using two or more input wavelengths
Abstract
The application provides a device and a method for testing refractive index of an optical waveguide group, wherein the device comprises: the micro-ring test assembly comprises a plurality of micro-ring test assemblies, each micro-ring test assembly comprises a straight waveguide and a rounded rectangular waveguide, the rounded rectangular waveguide is parallel to the straight waveguide and close to one side of the straight waveguide to form a directional coupler with the straight waveguide, the rounded rectangular waveguide is perpendicular to at least one side of the straight waveguide to be tested, the lengths of the waveguides to be tested of the micro-ring test assemblies are different, and other parts of the micro-ring test assemblies are the same except the lengths of the waveguides to be tested. The invention has the advantages of high testing precision, wide testing range and the like.
Description
Technical Field
The invention relates to the technical field of optical waveguide Group refractive index (Ng) testing, in particular to an optical waveguide Group refractive index testing device and method.
Background
In recent years, in order to meet the increasing demands of people on communication and data transmission in a great amount, the optical communication technology is rapidly developed; among them, the performance of silicon optical devices is increasingly refined, and silicon-based photonic integrated chips have gained great attention due to their low cost, high transmission speed and high integration, and have become one of the trends of the next-generation information revolution. As the most basic structure in silicon-based photonic integrated chips, the performance of optical waveguides plays a crucial role. The design principle of many devices is currently based on the group refractive index of optical waveguides (Strip waveguide; ridge waveguide), such as: Flat-DC, MZ interferometers, ring modulators and Bragg grating filters. Therefore, the accurate measurement of the group refractive index of the optical waveguide is significant to the design of related devices.
At present, the method for testing the group refractive index of the optical waveguide mainly utilizes the interference effect of an MZ interferometer and a micro-ring to extract relevant parameters from an output spectrum of the MZ interferometer and calculate the group refractive index of the optical waveguide or the device. However, both of them have problems such as large measurement error or narrow measurement range, and the error of finding the resonant wavelength λ and Free Spectral Range (FSR) from the spectrum is large, so the error of the measured group refractive index is large. And for other optical waveguides (such as Rib waveguide) or other devices besides the simplest stripe optical waveguide, the conventional test method has the problem that the test error is large or the group refractive index Ng test is difficult.
Disclosure of Invention
Compared with the traditional test scheme of the group refractive index Ng, the device and the method for testing the refractive index of the optical waveguide group have the advantages of high test precision and wide test range.
In order to achieve the purpose of the invention, the technical scheme adopted by the invention is as follows:
in a first aspect, the present invention provides an apparatus for testing refractive index of an optical waveguide group, comprising:
the micro-ring test assembly comprises a plurality of micro-ring test assemblies, each micro-ring test assembly comprises a straight waveguide and a rounded rectangular waveguide, the rounded rectangular waveguide is parallel to the straight waveguide and close to one side of the straight waveguide to form a directional coupler with the straight waveguide, the rounded rectangular waveguide is perpendicular to at least one side of the straight waveguide to be tested, the lengths of the waveguides to be tested of the micro-ring test assemblies are different, and other parts of the micro-ring test assemblies are the same except the lengths of the waveguides to be tested.
Preferably, the rounded rectangular waveguide is provided with the same to-be-tested waveguide perpendicular to two sides of the straight waveguide.
Preferably, the waveguide to be measured is a straight waveguide or a non-straight waveguide.
Preferably, the waveguide to be tested is connected to the rounded rectangular waveguide through a tapered waveguide.
In a second aspect, the present invention provides a method for testing refractive index of an optical waveguide group, which is applied to the apparatus for testing refractive index of an optical waveguide group, and includes:
respectively acquiring emergent spectra of a plurality of micro-ring test assemblies;
obtaining the relation between the resonance wavelength of each emergent spectrum and the corresponding free spectrum range;
and determining the length difference of the waveguides to be tested in the micro-ring test assemblies, and determining the group refractive index of the waveguides to be tested according to the relation between the free spectral range and the group refractive index of the waveguides.
Preferably, the respectively acquiring the emission spectra of the plurality of micro-ring test assemblies comprises:
light beams are emitted from a straight waveguide incident port of the micro-ring test assembly;
the light beam enters the rounded rectangular waveguide of the micro-ring test assembly through the directional coupler;
after circularly coupling the round-angle rectangular waveguide, emitting light beams from a straight waveguide exit port of the micro-ring test assembly;
and detecting the spectrums of the straight waveguide exit ports of the micro-ring test assemblies.
Preferably, obtaining the relationship between the resonance wavelength of each of the emergent spectra and the corresponding free spectral range comprises:
and respectively fitting according to the emergent spectra of the micro-ring test assemblies to obtain the relation between the resonance wavelength of each emergent spectrum and the corresponding free spectral range.
Preferably, determining the length difference of the waveguides to be tested in the plurality of micro-ring test assemblies comprises:
obtaining the total length of the waveguide to be tested in each micro-ring test assembly;
the total length of the waveguides to be tested of any two micro-ring test assemblies is differentiated to obtain the length difference of the waveguides to be tested in the two micro-ring test assemblies;
and traversing the micro-ring test assemblies to obtain the length difference of the waveguides to be tested in the two micro-ring test assemblies.
Preferably, determining the group refractive index of the waveguide to be measured according to the relationship between the free spectral range and the group refractive index of the waveguide comprises:
calculating the group refractive index of the waveguide to be measured by using the following formula:
wherein N isg(lambda) is the group refractive index of the waveguide to be measured;
dL is the length difference between the waveguide to be tested in the ith micro-ring test assembly and the waveguide to be tested in the jth micro-ring test assembly;
FSRi(λ) is the free spectral range, FSR, corresponding to the resonance wavelength λ measured by the ith micro-ring test assemblyjAnd (lambda) is the free spectral range corresponding to the resonance wavelength lambda measured by the jth micro-ring testing component.
Compared with the prior art, the invention has the following beneficial effects:
the method overcomes the defects of the traditional group refractive index Ng test scheme, and has the advantages of high test precision, wide test range and the like compared with the traditional group refractive index Ng test scheme.
The test structure of the present invention is a plurality of micro-ring test assemblies. The micro-ring test assembly mainly comprises a round-corner rectangular waveguide and a straight waveguide, wherein one side of the straight waveguide and one side of the round-corner rectangular waveguide form a Directional Coupler (DC). In addition, the coupling structure of the micro-ring test assembly is kept the same, and meanwhile, the length of the waveguide to be tested in the rounded rectangular waveguide is only adjusted, so that a length difference dL exists. And finally, testing to obtain the spectrum of the micro-ring testing assembly, fitting the spectrum of the micro-ring testing assembly to obtain FSRs corresponding to different resonance wavelengths lambda, and calculating the group refractive index Ng of the measured optical waveguide by combining the length difference of the micro-rings. This can reduce test errors in two ways:
1. compared with an MZ interferometer, the micro-ring test assembly has better interference effect; the FSRs corresponding to different wavelengths are obtained by utilizing the dense spectral fitting of the FSRs, and the FSRs are more accurate than direct reading;
2. the micro-ring test assembly can effectively avoid the influence of bent waveguides and other structures (such as Taper waveguides) in the micro-ring, thereby improving the test precision. Meanwhile, the test structure of a single micro-ring test assembly requires that optical waveguides in the structure are equal everywhere, so that the test flexibility is greatly improved.
Drawings
FIG. 1 is a schematic diagram of an apparatus for testing refractive index of an optical waveguide group according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method for testing refractive index of an optical waveguide group according to an embodiment of the present invention;
FIG. 3 is a flowchart of acquiring emission spectra of a plurality of micro-ring test assemblies according to an embodiment of the present invention;
FIG. 4 is a graph showing the comparison between the test value and the simulated value of the refractive index Ng of the optical waveguide group measured in example 1 of the present invention;
fig. 5 is a comparison graph of the test value and the simulated value of the refractive index Ng of the optical waveguide group measured in example 2 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the following description of the embodiments of the present invention with reference to the accompanying drawings is provided, and it should be noted that, in the case of conflict, features in the embodiments and the embodiments in the present application may be arbitrarily combined with each other.
As shown in fig. 1, an embodiment of the present invention provides an apparatus for testing refractive index of an optical waveguide group, including: the micro-ring test assembly comprises a plurality of micro-ring test assemblies, each micro-ring test assembly comprises a straight waveguide and a rounded rectangular waveguide, the rounded rectangular waveguide is parallel to the straight waveguide and close to one side of the straight waveguide to form a directional coupler with the straight waveguide, the rounded rectangular waveguide is perpendicular to at least one side of the straight waveguide to be tested, the lengths of the waveguides to be tested of the micro-ring test assemblies are different, and other parts of the micro-ring test assemblies are the same except the lengths of the waveguides to be tested.
As shown in fig. 1, the embodiment of the present invention illustrates the composition of an optical waveguide group refractive index testing apparatus by taking two micro-ring testing components as an example, and includes a first micro-ring testing component 1 and a second micro-ring testing component 2, where the first micro-ring testing component 1 includes a first straight waveguide and a first rounded rectangular waveguide; the second micro-ring test assembly 2 comprises a second straight waveguide and a second rounded rectangular waveguide; the first waveguide to be tested 3 is connected into the first round-angle rectangular waveguide, the second waveguide to be tested 4 is connected into the second round-angle rectangular waveguide, light beams are respectively emitted from a straight waveguide incident port 5 of the first micro-ring testing component 1 and a straight waveguide incident port 7 of the second micro-ring testing component 2 and emitted from a straight waveguide emergent port 6 of the first micro-ring testing component 1 and a straight waveguide emergent port 8 of the second micro-ring testing component 2, and a directional coupler is formed on one adjacent side of the straight waveguide and the round-angle rectangular waveguide.
The first waveguide to be tested 3 can be connected to two sides of the first rounded rectangular waveguide or one side of the first rounded rectangular waveguide, and the second waveguide to be tested 4 can be connected to two sides of the second rounded rectangular waveguide or one side of the second rounded rectangular waveguide.
In the embodiment of the invention, the two sides of the rounded rectangular waveguide, which are perpendicular to the straight waveguide, are provided with the same waveguide to be tested.
In the embodiment of the invention, the same waveguide guide finger to be detected has the same material, structure, length and group refractive index.
As shown in fig. 1, in the embodiment of the present invention, two micro-ring test assemblies are taken as an example, the first waveguides to be tested 3 are respectively and symmetrically disposed on two sides of the first rounded rectangular waveguide, which are perpendicular to the first straight waveguide, and the first waveguides to be tested 3 on two sides of the first rounded rectangular waveguide are made of the same material and have the same group refractive index, and the first waveguides to be tested 3 on two sides of the first rounded rectangular waveguide may be waveguides to be tested with the same length or waveguides to be tested with different lengths. Similarly, the second waveguides 4 to be tested are respectively symmetrically arranged on two sides of the second rounded rectangular waveguide perpendicular to the second straight waveguide, the second waveguides 4 to be tested on two sides of the second rounded rectangular waveguide are made of the same material and have the same group refractive index, and the second waveguides 4 to be tested on two sides of the second rounded rectangular waveguide can be waveguides to be tested with the same length and can also be waveguides to be tested with different lengths.
In the embodiment of the invention, the waveguide to be tested is a straight waveguide or a non-straight waveguide. And the waveguide to be tested is connected into the rounded rectangular waveguide through the tapered waveguide.
As shown in fig. 2, an embodiment of the present invention further provides a method for testing a refractive index of an optical waveguide group, which is applied to the apparatus for testing a refractive index of an optical waveguide group, and includes:
s101, respectively obtaining the emergent spectrums of a plurality of micro-ring test assemblies;
s102, obtaining the relation between the resonance wavelength of each emergent spectrum and the corresponding free spectrum range;
s103, determining the length difference of the waveguides to be tested in the micro-ring test assemblies, and determining the group refractive index of the waveguides to be tested according to the relation between the free spectral range and the group refractive index of the waveguides.
As shown in fig. 3, in the embodiment of the present invention, the step S101 of respectively obtaining the emission spectra of the plurality of micro-ring test assemblies includes:
s1011, light beams are emitted from a straight waveguide incident port of the micro-ring test assembly;
s1012, enabling the light beams to enter the rounded rectangular waveguide of the micro-ring test assembly through the directional coupler;
s1013, after the circular coupling of the rounded rectangular waveguide, the light beam is emitted from a straight waveguide exit port of the micro-ring test assembly;
and S1014, detecting the spectrums of the straight waveguide exit ports of the micro-ring test assemblies.
In the embodiment of the present invention, the obtaining of the relationship between the resonance wavelength of each of the emergent spectra and the corresponding free spectral range in step S102 includes:
and respectively fitting according to the emergent spectra of the micro-ring test assemblies to obtain the relation between the resonance wavelength of each emergent spectrum and the corresponding free spectral range.
In the embodiment of the present invention, the determining, in step S103, the length difference of the waveguides to be tested in the multiple micro-ring test assemblies includes:
obtaining the total length of the waveguide to be tested in each micro-ring test assembly;
the total length of the waveguides to be tested of any two micro-ring test assemblies is differentiated to obtain the length difference of the waveguides to be tested in the two micro-ring test assemblies;
and traversing the micro-ring test assemblies to obtain the length difference of the waveguides to be tested in the two micro-ring test assemblies.
In the embodiment of the present invention, determining the group refractive index of the waveguide to be measured according to the relationship between the free spectral range and the group refractive index of the waveguide includes:
calculating the group refractive index of the waveguide to be measured by using the following formula:
wherein N isg(lambda) is the group refractive index of the waveguide to be measured;
dL is the length difference between the waveguide to be tested in the ith micro-ring test assembly and the waveguide to be tested in the jth micro-ring test assembly;
FSRi(λ) is the free spectral range, FSR, corresponding to the resonance wavelength λ measured by the ith micro-ring test assemblyjAnd (lambda) is the free spectral range corresponding to the resonance wavelength lambda measured by the jth micro-ring testing component.
In the embodiment of the invention, dL ═ Li-LjL hereiIs the total length, L, of the waveguide to be tested in the ith micro-ring test assemblyjAnd when the waveguide to be tested is distributed on two sides of the rounded rectangular waveguide in the micro-ring testing component, adding the lengths of the two waveguides to be tested to obtain the total length.
As shown in fig. 1, in the embodiment of the present invention, two micro-ring test assemblies are taken as an example, a first micro-ring test assembly 1 and a second micro-ring test assembly 2 respectively access a first waveguide to be tested 3 and a second waveguide to be tested 4 which are different in length, the first micro-ring test assembly 1 and the second micro-ring test assembly 2 except for the first waveguide to be tested 3 (assuming that the total length thereof is L1, if the first waveguide to be tested 3 is disposed on one side of a first rounded rectangle, the length thereof is L1, if the first waveguide to be tested 3 is disposed on both sides of the first rounded rectangle, the lengths thereof are L11 and L12, respectively, the sum thereof is L1 ═ L11+ L12, if the lengths of the first waveguide to be tested 3 disposed on both sides of the first rounded rectangle are identical, the length of each first waveguide to be tested 3 is L1/2, the total length thereof is L1), and the second waveguide to be tested 4 (assuming that the total length thereof is L2, if the second waveguide to be tested 4 is disposed on one side of a second rounded rectangle, the length of the second waveguide to be tested is L2, if the second waveguide to be tested 4 is arranged on two sides of the second rounded rectangle, the lengths are L21 and L22 respectively, the total length of the second waveguide to be tested is L2 ═ L21+ L22, if the lengths of the second waveguide to be tested 4 arranged on two sides of the second rounded rectangle are consistent, the length of each second waveguide to be tested 4 is L2/2, and the total length of the second waveguide to be tested is L2), and other parts are the same. Light beams enter the first micro-ring testing component 1 and the second micro-ring testing component 2 from the straight waveguide incident port 5 of the first micro-ring testing component 1 and the straight waveguide incident port 7 of the second micro-ring testing component 2 respectively to interfere, then are emitted from the straight waveguide emergent port 6 of the first micro-ring testing component 1 and the straight waveguide emergent port 8 of the second micro-ring testing component 2, spectra are output, finally, the relation between the resonance wavelength lambda and the FSR is obtained by respectively fitting according to the emergent spectra of the first micro-ring testing component 1 and the second micro-ring testing component 2, and the group refractive index Ng of the waveguide to be tested is obtained by calculation according to the length difference between the first waveguide to be tested 3 and the second waveguide to be tested 4.
The working principle of the embodiment of the invention is as follows:
for the microring test assembly, the relationship between the FSR and the group refractive index Ng of the waveguide is shown in formula (1):
where L is the total length of the microring test assembly (the optical waveguides in the microring test assembly are the same everywhere). For the first micro-ring test assembly 1 and the second micro-ring test assembly 2, there are:
wherein N isgotherIs the waveguide equivalent group refractive index L except the first waveguide 3 to be tested and the second waveguide 4 to be tested in the micro-ring test assemblyotherThe waveguide length of the micro-ring test assembly is except for the first waveguide to be tested 3 and the second waveguide to be tested 4. L1 and L2 are the total lengths of the first waveguide to be tested 3 and the second waveguide to be tested 4 at two rounded rectangular waveguides respectively.
From the above formula, the group refractive index Ng of the optical waveguide to be measured is:
wherein dL is L1-L2, FSR1(λ) is FSR corresponding to the resonance wavelength λ measured by the first micro-ring test assembly 1, FSR2(λ) is the FSR corresponding to the resonance wavelength λ measured by the second micro-ring test assembly 2. And obtaining the relation between the resonance wavelength lambda and the FSR of the first micro-ring testing assembly 1 and the second micro-ring testing assembly 2 through the measured spectrum fitting. And calculating the group refractive index Ng of the waveguide to be measured by the formula.
When the number of the micro-ring testing assemblies is more than two, the group refractive index Ng of the waveguide to be tested is obtained by performing the calculation on any two micro-ring testing assemblies as a group, and the group refractive index Ng of the waveguide to be tested obtained by calculating the multiple groups of micro-ring testing assemblies is averaged to be used as the final group refractive index Ng of the waveguide to be tested.
According to the embodiment of the invention, the group refractive index Ng of the micro-ring testing assemblies with different lengths is adopted, the relation between the resonance wavelength lambda and the FSR is extracted from the tested spectrum through data fitting, and the group refractive index Ng of the waveguide to be tested is calculated.
Example 1
As shown in fig. 1, light beams are respectively emitted from a straight waveguide incident port 5 of a first micro-ring testing component 1 and a straight waveguide incident port 7 of a second micro-ring testing component 2, coupled into the micro-ring testing component by a directional coupler, and coupled for multiple times by a plurality of cycles, and then emitted from a straight waveguide exit port 6 of the first micro-ring testing component 1 and the second micro-ring testing component2, a straight waveguide exit port 8; respectively obtaining test spectra of two micro-ring test components, and obtaining resonance wavelength lambda from the spectra1FSR corresponding thereto1(lambda) relation and resonance wavelength lambda2FSR corresponding thereto2(λ) relationship: FSR ^ lambda. And finally, calculating the group refractive indexes Ng of the first waveguide to be tested 3 and the second waveguide to be tested 4.
In this embodiment, a fully etched strip silicon waveguide is used, which has a width of 500nm and a height of 220 nm; the upper and lower cladding layers are silica layers. The transmission coefficient t12 of the through end of the directional coupler is 0.2, and the coupling gap of the directional coupler is 20 nm. The curved waveguide adopts 1/4 round curved waveguide, the length of the waveguide to be tested 3 is L1 ═ 600um, and the length of the waveguide to be tested 4 is L2 ═ 300 um.
Fig. 4 is a comparison between the test value and the simulation value of the refractive index Ng of the optical waveguide group measured in the present invention. The result shows that the group refractive index Ng of the optical waveguide can be accurately measured by the method, and the test error is only 0.01.
Example 2
As shown in fig. 1, light beams are respectively incident from a straight waveguide incident port 5 of a first micro-ring testing component 1 and a straight waveguide incident port 7 of a second micro-ring testing component 2, are coupled into the micro-ring testing component through a directional coupler, and are emitted from a straight waveguide exit port 6 of the first micro-ring testing component 1 and a straight waveguide exit port 8 of the second micro-ring testing component 2 after being coupled for multiple cycles; respectively obtaining test spectra of two micro-ring test components, and obtaining resonance wavelength lambda from the spectra1FSR corresponding thereto1(lambda) relation and resonance wavelength lambda2FSR corresponding thereto2(λ) relationship: FSR ^ lambda. And finally, calculating the group refractive indexes Ng of the first waveguide to be tested 3 and the second waveguide to be tested 4.
In the embodiment, a shallow etched ridge silicon waveguide is adopted, the ridge width is 500nm, and the ridge height is 70 nm; the Slab is 2.5um wide and 170nm high. The upper and lower cladding layers are silica layers. Transmission coefficient t of through end of directional coupler1 2The coupling pitch gap of the directional coupler is 20nm, 0.2. The curved waveguide adopts 1/4 round curved waveguide, and the length of the waveguide 3 to be measured isL1 is 600um, and the length of the waveguide 4 to be measured is L2 is 150 um.
Fig. 5 is a comparison of a test value and a simulated value of group refractive index Ng of optical waveguides according to the present invention. The result shows that the group refractive index Ng of the optical waveguide can be accurately measured by the method, and the test error is only 0.01.
Although the embodiments of the present invention have been described above, the contents thereof are merely embodiments adopted to facilitate understanding of the technical aspects of the present invention, and are not intended to limit the present invention. It will be apparent to persons skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (9)
1. An optical waveguide group refractive index testing apparatus, comprising: the micro-ring test assembly comprises a plurality of micro-ring test assemblies, each micro-ring test assembly comprises a straight waveguide and a rounded rectangular waveguide, the rounded rectangular waveguide is parallel to the straight waveguide and close to one side of the straight waveguide to form a directional coupler with the straight waveguide, the rounded rectangular waveguide is perpendicular to at least one side of the straight waveguide to be tested, the lengths of the waveguides to be tested of the micro-ring test assemblies are different, and other parts of the micro-ring test assemblies are the same except the lengths of the waveguides to be tested.
2. The apparatus of claim 1, wherein the rounded rectangular waveguide is provided with the same waveguide to be tested perpendicular to two sides of the straight waveguide.
3. The apparatus of claim 2, wherein the waveguide under test is a straight waveguide or a non-straight waveguide.
4. The apparatus of claim 1, wherein the waveguide under test is accessed into the rounded rectangular waveguide by a tapered waveguide.
5. An optical waveguide group refractive index test method applied to the optical waveguide group refractive index test apparatus according to any one of claims 1 to 4, comprising:
respectively acquiring emergent spectra of a plurality of micro-ring test assemblies;
obtaining the relation between the resonance wavelength of each emergent spectrum and the corresponding free spectrum range;
and determining the length difference of the waveguides to be tested in the micro-ring test assemblies, and determining the group refractive index of the waveguides to be tested according to the relation between the free spectral range and the group refractive index of the waveguides.
6. The method of claim 5, wherein separately acquiring the emission spectra of the plurality of micro-ring test assemblies comprises:
light beams are emitted from a straight waveguide incident port of the micro-ring test assembly;
the light beam enters the rounded rectangular waveguide of the micro-ring test assembly through the directional coupler;
after circularly coupling the round-angle rectangular waveguide, emitting light beams from a straight waveguide exit port of the micro-ring test assembly;
and detecting the spectrums of the straight waveguide exit ports of the micro-ring test assemblies.
7. The method of claim 5, wherein obtaining the relationship between the resonant wavelength of each of the exit spectra and its corresponding free spectral range comprises:
and respectively fitting according to the emergent spectra of the micro-ring test assemblies to obtain the relation between the resonance wavelength of each emergent spectrum and the corresponding free spectral range.
8. The method of claim 5, wherein determining the difference in length of the waveguides under test in the plurality of microring test assemblies comprises:
obtaining the total length of the waveguide to be tested in each micro-ring test assembly;
the total length of the waveguides to be tested of any two micro-ring test assemblies is differentiated to obtain the length difference of the waveguides to be tested in the two micro-ring test assemblies;
and traversing the micro-ring test assemblies to obtain the length difference of the waveguides to be tested in the two micro-ring test assemblies.
9. The method of claim 8, wherein determining the group index of refraction for the waveguide under test from the relationship of the free spectral range and the group index of refraction for the waveguide comprises:
calculating the group refractive index of the waveguide to be measured by using the following formula:
wherein N isg(lambda) is the group refractive index of the waveguide to be measured;
dL is the length difference between the waveguide to be tested in the ith micro-ring test assembly and the waveguide to be tested in the jth micro-ring test assembly;
FSRi(λ) is the free spectral range, FSR, corresponding to the resonance wavelength λ measured by the ith micro-ring test assemblyjAnd (lambda) is the free spectral range corresponding to the resonance wavelength lambda measured by the jth micro-ring testing component.
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