CN110227983A - Aspheric surface optical element polishing device - Google Patents
Aspheric surface optical element polishing device Download PDFInfo
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- CN110227983A CN110227983A CN201910522269.9A CN201910522269A CN110227983A CN 110227983 A CN110227983 A CN 110227983A CN 201910522269 A CN201910522269 A CN 201910522269A CN 110227983 A CN110227983 A CN 110227983A
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- carrier
- aspherics
- burnishing device
- carrier fluid
- workpieces processing
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- 238000005498 polishing Methods 0.000 title claims abstract description 58
- 230000003287 optical effect Effects 0.000 title abstract description 15
- 239000012530 fluid Substances 0.000 claims abstract description 84
- 238000012545 processing Methods 0.000 claims abstract description 70
- 230000005684 electric field Effects 0.000 claims description 53
- 238000009413 insulation Methods 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 1
- 230000009471 action Effects 0.000 abstract description 8
- 239000007788 liquid Substances 0.000 abstract description 5
- 239000006061 abrasive grain Substances 0.000 description 30
- 230000000694 effects Effects 0.000 description 21
- 230000006872 improvement Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007935 neutral effect Effects 0.000 description 6
- 238000004720 dielectrophoresis Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
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- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
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- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses an aspheric optical component polishing device, and belongs to the field of optical component processing. The polishing device for the aspheric optical component comprises a carrier liquid, wherein magnetorheological fluid is carried on the carrier liquid; a magnet that generates a magnetic field; the magnetic field acts on the magnetorheological fluid to form an annular polishing tool. The aspheric surface optical component polishing device is based on the magneto-rheological principle, forms a polishing workpiece on the carrier liquid carrier by utilizing the action of the magnetic field, and can carry out polishing treatment more efficiently.
Description
Technical field
The present invention relates to optical component manufacture fields, more particularly, to aspherics component burnishing device.
Background technique
With the rapid development of today's society, people's lives level is continuously improved, smart phone, pilotless automobile,
The fields such as military infrared equipment, medical endoscope and security protection video monitoring are in the ascendant, and optical component is as these fields
Core devices, more vast market prospect will be had in future.
Traditional optical component uses spherical optics component, after light is imaged by spherical mirror, light focusing point
Diverging, image blur, it will certain error is caused to the accuracy of image information.In recent years, people gradually start using aspheric
Face optical component substitutes traditional spherical optics component, and aspherics component can eliminate luminous energy in optical system
Loss, improves the image information collecting ability and relative aperture ratio of optical system, mitigates the weight of equipment, be widely used in X
Ray optics system, function photoelectric device and the hard-core technologies such as information and microelectronics field, light is after through aspherical mirror
Focus point is concentrated, and imaging effect is substantially better than spherical optics component, and therefore, aspherics component is with its excellent performance
It is gradually replacing spherical optics component.
In the processing and manufacturing of aspherics component, it is to determine aspheric that the ultraprecise as rear end process, which repairs throwing processing,
Face optical component in precision and quality whether key link up to standard.But there are no can efficiently locate currently on the market
Manage the burnishing device of aspherics component.
Summary of the invention
In order to solve the deficiencies in the prior art, the embodiment of the present invention provides a kind of efficient process aspherics component table
The aspherics component burnishing device in face.
The embodiment of the present invention solves the technical solution that above-mentioned technical problem is taken are as follows: provides a kind of aspherics member device
Part burnishing device, including carrier fluid carrier carry magnetorheological fluid on the carrier fluid carrier；Magnet, the magnet generate magnetic field；Institute
It states magnetic field to act on the magnetorheological fluid, forms annular polishing tool.
As a further improvement of the above technical scheme, the magnet is annular magnet.
As a further improvement of the above technical scheme, the annular magnet can rotate, the rotation of the annular magnet
The axis of center line and the annular magnet has preset offset distance.
As a further improvement of the above technical scheme, the ratio for remembering the internal diameter of the offset distance and the annular magnet is r,
Wherein, 0 < r≤1/2.
As a further improvement of the above technical scheme, the annular magnet is connected with the first rotating device, and described first
Rotating device includes that first motor and the load-bearing part with the output axis connection of the first motor, the annular magnet are fixedly arranged on
On the load-bearing part, the axis setting of the output shaft of the axis of the annular magnet and the first motor is described preset inclined
Away from.
It as a further improvement of the above technical scheme, further include moving parts, the moving parts can load needs
The workpieces processing of polishing, and the workpieces processing is driven to move on the annular polishing tool.
As a further improvement of the above technical scheme, the moving parts is six axis robot.
As a further improvement of the above technical scheme, electric field is equipped between the moving parts and the carrier fluid carrier,
The electric field strength of the moving parts side is greater than the electric field strength of carrier fluid carrier side；Alternatively, the workpieces processing with
Electric field is equipped between the carrier fluid carrier, the electric field strength of the workpieces processing side is greater than the electric field of carrier fluid carrier side
Intensity.
As a further improvement of the above technical scheme, electric field is equipped between the workpieces processing and the carrier fluid carrier,
The cross-sectional area of the workpieces processing is less than the cross-sectional area of the carrier fluid carrier.
As a further improvement of the above technical scheme, the workpieces processing and moving parts insulation connect.
As a further improvement of the above technical scheme, the moving parts includes work piece holder, the work piece holder with
Electric field is equipped between the carrier fluid carrier, and the cross-sectional area of the work piece holder is greater than the cross-sectional area of the carrier fluid carrier.
As a further improvement of the above technical scheme, the work piece holder insulation set is on the moving parts.
As a further improvement of the above technical scheme, be arranged power supply, the two poles of the earth of the power supply respectively with the processing work
Part and carrier fluid carrier connection.
As a further improvement of the above technical scheme, the power supply is AC power source, and the AC power source adds with described
It is equipped with brush between work workpiece, is connected between the brush and the workpieces processing by shock-absorbing spring.
As a further improvement of the above technical scheme, be arranged power supply, the two poles of the earth of the power supply respectively with the workpiece clamp
Tool and carrier fluid carrier connection.
As a further improvement of the above technical scheme, the power supply is AC power source, the AC power source and the work
It is equipped with brush between part fixture, is connected between the brush and the work piece holder by shock-absorbing spring.
As a further improvement of the above technical scheme, the carrier fluid carrier is connected with the second rotating device, and described second
Rotating device includes the second motor and the carrier main shaft with the output axis connection of second motor, and the carrier fluid carrier is fixed
In on the carrier main shaft.
As a further improvement of the above technical scheme, insulation is equipped between the carrier main shaft and the carrier fluid carrier
Layer.
As a further improvement of the above technical scheme, the output shaft make-up of second motor is fixed is equipped with the first synchronization
Wheel, the carrier main shaft make-up is fixed to be equipped with the second synchronizing wheel, and first synchronizing wheel and second synchronizing wheel rotate synchronously.
Beneficial effects of the present invention:
Aspherics component burnishing device of the invention is made magnetorheological on carrier fluid carrier using the effect in magnetic field
Liquid forms annular polishing tool, is carried out at polishing using the relative motion of annular polishing tool and workpieces processing to workpieces processing
Reason, compared to traditional burnishing device, aspherics component burnishing device of the invention utilizes the ring of magnetorheological principle formation
Shape polishing tool can be high with the arbitrary surface goodness of fit, and annular polishing tool has self-sharpening, processing certainty height, convergence efficiency
Stablize, edge effect is controllable, sub-surface destruction layer is small, processing applicability is wide and the optical mirror plane of the big radius-thickness ratio of processing is not present
Print-through, polishing efficiency are higher.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the structural schematic diagram of aspherics component burnishing device one embodiment of the invention；
Fig. 2 is the partial enlargement diagram in Fig. 1 at A；
Fig. 3 is the distribution schematic diagram of the abrasive grain in magnetorheological fluid under magnetic fields；
The structural schematic diagram for the annular polishing tool that Fig. 4 is formed when being r=0；
The structural schematic diagram for the annular polishing tool that Fig. 5 is formed when being r=1/2；
Polish results schematic diagram when Fig. 6 is r=0；
Polish results schematic diagram when Fig. 7 is r=1/2；
Fig. 8 is the stress diagram of neutral particle under electric field action；
Fig. 9 shows the distribution schematic diagram of the abrasive grain in magnetorheological fluid under the collective effect of magnetic field and electric field.
Specific embodiment
It is carried out below with reference to technical effect of the embodiment and attached drawing to design of the invention, specific structure and generation clear
Chu, complete description, to be completely understood by the purpose of the present invention, scheme and effect.It should be noted that the case where not conflicting
Under, the features in the embodiments and the embodiments of the present application can be combined with each other.
It should be noted that unless otherwise specified, when a certain feature referred to as " fixation ", " connection " are in another feature,
It can directly fix, be connected to another feature, and can also fix, be connected to another feature indirectly.In addition, this
The descriptions such as up, down, left, right, before and after used in invention are only relative to the mutual of each component part of the invention in attached drawing
For positional relationship.
In addition, unless otherwise defined, the technology of all technical and scientific terms used herein and the art
The normally understood meaning of personnel is identical.Term used in the description is intended merely to description specific embodiment herein, without
It is to limit the present invention.Term " and or " used herein includes the arbitrary of one or more relevant listed items
Combination.
Referring to Fig.1, the embodiment of the present invention provides a kind of aspherics component burnishing device, including carrier fluid carrier 1, magnetic
Body 2 carries magnetorheological fluid on carrier fluid carrier 1, and magnet 2 can generate magnetic field, the magnetic fields generated on magnetorheological fluid,
So that magnetorheological fluid is formed polishing workpiece 3, Aspheric optics are processed by shot blasting by polishing workpiece 3.
Referring to Fig. 3, the schematic illustration that magnetorheological fluid forms polishing workpiece under magnetic fields is shown.Magnetorheological fluid exists
It is a kind of liquid of flowing when not applying magnetic field, and after applying magnetic field, magnetorheological fluid becomes under the action of magnetic field gradient
Flexible bistrique with certain degree of hardness, this flexible bistrique realize the removal to material in the form sheared, and flexible bistrique can
With the magnetorheological fluid of arbitrary surface goodness of fit height, circulation bistrique being had, self-sharpening, processing certainty is high, convergence efficiency is steady
It is fixed, edge effect is controllable, sub-surface destroys that layer is small, flexibility (adaptability) of operation is wide and the optical mirror plane of the big radius-thickness ratio of processing there is no multiple
The advantages of printing effect, therefore, can efficiently realize the polishing to aspherics component.Such as Fig. 3, include in magnetorheological fluid
Many magnetosensitive particles 400 and abrasive grain 410, under the influence of a magnetic field, magnetosensitive particle 400 will polymerize along the magnetic line of force
And then magnetic chain is generated, and abrasive grain 410 is gathered in top and the surrounding of magnetic chain due to the effect of magnetic buoyancy, in polishing, abrasive grain
410 contact under the force action of magnetic buoyancy and gravity with workpiece, carry out micro-cutting in workpiece surface.
In a kind of preferred embodiment, such as Fig. 1, magnet 2 is annular magnet, due to the particularity of annular magnet structure,
The magnetic fields that it is generated produce annular polishing tool 3 on magnetorheological fluid, and annular polishing tool 3 is handling aspherical light
In the polishing for learning device, more efficiently, conveniently.
Further, setting magnet 2 can rotate, and set between the rotary centerline of magnet 2 and the axis of magnet 2 itself
Set preset offset distance.Magnet 2 can generate space rotating magnetic field when rotating around rotary centerline, and magnetic field line can also be done partially therewith
Heart rotary motion, and then magnetic chain will constantly stir abrasive grain on carrier fluid carrier 1, play the role of updating Abrasive Grain, subtract
Few passivated abrasive grain participates in the probability of micro-cutting, and then can be always maintained at higher processing efficiency.
The embodiment of the present invention is investigated influence of the setting to polishing of the offset distance of magnet, wherein with outer diameter 30mm, internal diameter
For the permanent magnet of 9mm.The offset distance of note magnet 2 is r divided by the ratio of the internal diameter of magnet 2 itself, then, implements in the present invention
In example, ranging preferably from for r is less than or equal to 1/2 greater than 0.
The structural schematic diagram of the annular polishing tool formed when r=0 is shown referring to Fig. 4 and Fig. 5, Fig. 4, Fig. 5 shows r
The structural schematic diagram of the annular polishing tool formed when=1/2.As r=0, such as Fig. 4, magnetic linkage in the annular polishing tool of formation
Clustering phenomena is extremely serious, and as r=1/2, the annular polishing tool of such as Fig. 5, formation are then visibly homogeneous, this is because eccentric
Rotation generates and is eccentrically rotated magnetic field, so that caused by magnetic line of force stirring polishing fluid.With continued reference to Fig. 6 and Fig. 7, Fig. 6 shows r=0
When polishing effect figure, Fig. 7 shows polishing effect figure when r=1/2, and as r=0, the annular polishing tool of formation is to adding
When work workpiece surface is polished, almost without polishing effect, and as r=1/2, surface roughness can be reduced to from 50nm
The effect of 10nm or so, polishing are fairly obvious.As it can be seen that when r is selected as greater than 0 and is less than or equal to 1/2, due to the bias of magnet
Rotation can generate eccentric rotating excitation field and form more uniform annular polishing work so that the abrasive grain in magnetorheological fluid stirs
Tool, to reach better polishing effect.However, when r is continued growing, although magnet is still doing eccentric rotary, mistake
Big eccentricity can make magnet far from rotation center, and the magnetic field that magnet is formed also starts to cause magnet to produce far from rotation center
Raw magnetic field can only magnetorheological fluid region effect to part, the part of magnetorheological fluid central area is obvious by the effect in magnetic field
Reduce, also reduces the shape and surface uniformity of the polishing tool of generation instead, polishing effect also accordingly declines therewith.
In an embodiment of the invention, by the first rotating device realize magnet eccentric rotary, such as Fig. 1, first turn
Dynamic device includes first motor 20 and load-bearing part 21, and load-bearing part 21 is fixedly installed on the output shaft of first motor 20,
When one motor 20 works, load-bearing part 21 is rotated synchronously with the rotation of the output shaft of first motor 20, and magnet 2, which is fixedly installed on, to be held
In holder 21, and the axial location of magnet 2 and the center of rotation of load-bearing part 21 are set with above-mentioned preset offset distance, are holding
When holder 21 rotates, magnet 2 can generate eccentric rotation.
In order to guarantee that annular polishing tool carries out abundant polishing treatment to the surface of Aspheric optics, the present invention is implemented
The aspherics component burnishing device of example further includes moving parts 5, and moving parts 5 can load the processing work for needing to polish
Part 6, and be able to drive workpieces processing 6 and moved on annular polishing tool 3, make to send out between workpieces processing 6 and annular polishing tool 3
Raw relative motion, and then 6 surface of workpieces processing is processed by shot blasting.
Moving parts 5 can select two axis robots, three axle robert, four axis robots etc. or other similar have
Mobile and rotating function component, in the present embodiment, moving parts 5 is preferably six axis robot, in the band of six axis robot
Under dynamic, workpieces processing 6 may be implemented movement on the direction of top to bottom, left and right, front and rear and pitching, yaw, turn on roll direction
Dynamic, six axis robot controls the space motion path of workpieces processing using 6DOF mechanical arm, has high space certainly
By spending, as long as by the way that concave-convex aspheric can be polished for the corresponding workpieces processing termination electrode shape of different workpieces processing configuration designs
Therefore face workpiece, complex free curved surface or other 3D structures have extremely wide applicability.
Above scheme is based on magnetorheological principle makes the abrasive grain in magnetorheological fluid body form annular throwing under the influence of a magnetic field
Optical tool polishes workpieces processing by annular polishing tool, in another embodiment of the invention, by introducing electricity
, using the dielectrophoresis effect of abrasive grain in magnetorheological fluid, abrasive grain is made to generate directed movement, compared to simple magnetic fields,
Under the compound action in electric field and magnetic field, abrasive grain can be bonded workpieces processing table under the collective effect of magnetic buoyancy, gravity and electric field force
Face increases the contact area and surge pressure of abrasive grain Yu workpieces processing surface, while increasing and connecing with workpieces processing surface again
The abrasive grain quantity of touching, so that polishing efficiency, the generation for mitigating intermediate frequency error greatly improved.
Wherein, in one embodiment, referring to Fig.1, electric field is set between workpieces processing 6 and carrier fluid carrier 1, and is arranged
The electric field strength of 6 side of workpieces processing is greater than the electric field strength of 1 side of carrier fluid carrier, under the action of electric field, in magnetorheological fluid
More abrasive grains be distributed to top, more abrasive grains are contained in the annular polishing tool 3 of formation.
Conventional abrasive particulate material includes silica, silicon carbide, cerium oxide, aluminium oxide, diamond etc., these materials are
Stable electroneutral substance, using the dielectrophoresis phenomenon of neutral particle, we can be controlled the distributing position of abrasive grain.Such as
Electric field heterogeneous is arranged in Fig. 8 in abrasive grain region, and as can be known from Fig. 8, the electric field strength in left side is less than the electric field on right side
Intensity, neutral particle (abrasive grain) can polarize in higher inhomogeneous field, produce at the internal both ends of neutral particle (abrasive grain)
The xenogenesis charge of raw equivalent, so that electric dipole is formed, since high-intensitive electric field is heterogeneous, so neutral particle (is ground
Grain) both ends electric field strength it is variant, result in electric field force suffered by neutral particle (abrasive grain) resultant force be not zero, generate orientation
Movement, and moved to a bigger direction of electric field strength, this phenomenon is referred to as dielectrophoresis phenomenon.
It such as Fig. 9, shows under the collective effect of magnetic field and electric field, the position branch schematic diagram of abrasive grain, incorporated by reference to Fig. 3,
In Fig. 3, only under the influence of a magnetic field, abrasive grain 410 is mainly gathered in top and the surrounding of magnetic chain, and in Fig. 9, Ke Yifa
It is existing, top (close to the side of workpieces processing) aggregation of the significantly magnetropism chain of abrasive grain 410, in this way, the annular polishing work formed
Tool will contain more abrasive grains, can more efficiently polish to workpieces processing.
In the present embodiment, due to being provided with electric field, and 6 side of workpieces processing between workpieces processing 6 and carrier fluid carrier 1
Electric field strength be greater than 1 side of carrier fluid carrier electric field strength, therefore, abrasive grain will to 6 side of workpieces processing generate orientation move
Dynamic, the polishing workpiece of formation contains more abrasive grains, and the efficiency polished to workpieces processing 6 obtains improving significantly.
The prior art has many methods to realize that the electric field strength of workpieces processing 6 is greater than the electric-field strength of 1 side of carrier fluid carrier
Degree such as changes the quantity of electric charge of two sides.In a preferred embodiment, it is carried by the way that the cross-sectional area of workpieces processing 6 is arranged less than carrier fluid
The cross-sectional area of body 1, under total charge dosage unanimous circumstances, the cross-sectional area of 6 side of workpieces processing is smaller, in workpieces processing 6
The density of the electric field line of side is bigger, and electric field strength is bigger, and therefore, abrasive grain generates displacement to 6 side of workpieces processing.
In order to avoid the electrification of workpieces processing 6 generates interference, workpieces processing 6 and moving parts 5 using exhausted to moving parts 5
Edge connection.
The specific plan of establishment of electric field is that power supply 7 is arranged, and the positive and negative polarities of power supply 7 are carried with workpieces processing 6 and carrier fluid respectively
Body 1 connects.Wherein, power supply 7 can be AC power source or DC power supply, under the action of two kinds of power supplys, due to the cross of workpieces processing 6
Sectional area is less than the cross-sectional area of carrier fluid carrier 1, and the electric field strength that can generate 6 side of workpieces processing is greater than 1 side of carrier fluid carrier
Electric field strength.
In a preferred embodiment, power supply 7 is AC power source, and brush 70 is arranged between power supply 7 and workpieces processing 6, wherein
Brush 70 is installed on the bracket 50 of moving parts 5, in order to avoid the normal work with electrical interference moving parts 5 of brush 70,
Bracket 50 is made for insulating materials, further, is connected between brush 70 and workpieces processing 6 by shock-absorbing spring 71, to avoid
Workpieces processing 6 is influenced by the work of brush 70.
In another embodiment, electric field, and 5 side of moving parts are set between moving parts 5 and carrier fluid carrier 1
Electric field strength be greater than the electric field strength of 1 side of carrier fluid carrier, principle please refers to above.
Wherein, moving parts 5 includes the work piece holder 51 for clamping workpieces processing 6, is carried in work piece holder 51 and carrier fluid
The electric field strength that electric field is arranged between body 1, and 51 side of work piece holder is arranged is greater than the electric field strength of 1 side of carrier fluid carrier.
Preferably, the cross-sectional area that work piece holder 51 is arranged is less than the cross-sectional area of carrier fluid carrier 1, in this way, in identical electricity
In the case where lotus amount, the electric field strength of 51 side of work piece holder is greater than the electric field strength of 1 side of carrier fluid carrier, so that abrasive grain is to adding
6 side displacement of work workpiece.
The specific plan of establishment of electric field is, is arranged power supply 7, the positive and negative polarities of power supply 7 respectively with work piece holder 51 and carrier fluid
Carrier 1 connects.Wherein, power supply 7 can be AC power source or DC power supply, under the action of two kinds of power supplys, due to work piece holder 51
Cross-sectional area be less than carrier fluid carrier 1 cross-sectional area, can generate 51 side of work piece holder electric field strength be greater than carrier fluid carrier 1
The electric field strength of side.
In a preferred embodiment, power supply 7 is AC power source, and brush 70 is arranged between power supply 7 and work piece holder 51,
In, brush 70 is installed on the bracket 50 of moving parts 5, in order to avoid the normal work with electrical interference moving parts 5 of brush 70
To make, bracket 50 is made for insulating materials, further, connected between brush 70 and work piece holder 51 by shock-absorbing spring 71, with
The influence for avoiding workpieces processing 6 from being worked by brush 70.
Preferably, work piece holder 51 includes electro-mechanical part and insulation division, wherein electro-mechanical part clamps workpieces processing 6, and and power supply
7 connections, insulation division are connect with the main body of moving parts 5, will receive the influence of power supply 7 to guarantee moving parts 5 not.
In polishing, if annular polishing tool 3 rotates, it will the significant polishing increased to 6 surface of workpieces processing is imitated
Rate.For this purpose, carrier fluid support plate 1 is connected with the second rotating device, carrier fluid support plate 1 is driven to rotate by the second rotating device, and then make
It obtains the annular polishing tool 3 formed on carrier fluid support plate 1 and generates rotation.
Second rotating device includes the second motor 10, carrier main shaft 11, the output shaft of carrier main shaft 11 and the second motor 10
Connection, under the movement of the second motor 10, carrier main shaft 11 will be rotated with it, and carrier fluid carrier 1 is fixedly arranged on carrier main shaft 11, with
Rotate synchronously carrier fluid carrier 1 with the rotation of carrier main shaft 11, so that annular polishing tool 3 generates rotation.
In order to avoid the charging property of carrier fluid carrier 1 has an impact the work of the second rotating device, such as Fig. 2, in carrier master
Insulating layer 100 is provided between axis 11 and carrier fluid carrier 1.
Such as Fig. 1, in order to reduce the volume of aspherics component burnishing device, first motor 20 is adopted with the second motor 10
With being arranged side by side, for this purpose, what is fastened on the second motor 20 is provided with the first synchronizing wheel 12, what is fastened on carrier main shaft 11 is provided with
Second synchronizing wheel 13, the first synchronizing wheel 12 and the second synchronizing wheel 13, which rotate synchronously, to be connected, and the two can be engaged using gear, is synchronous
The various ways such as band connection realize the synchronous rotation connection of the two, in this way, in the rotation of the second motor 10, the first 12 turns of synchronizing wheel
It is dynamic, the rotation of the second synchronizing wheel 13 is driven, so that carrier main shaft 11 rotates with it, the carrier fluid being fixed on carrier main shaft 11 is carried
Body 1 also generates rotation.
Above scheme is based on magnetorheological and dielectrophoresis effect in detail, can more efficiently carry out to workpieces processing surface
Polishing treatment, can be while improvement workpieces processing surface roughness reaches mirror surface, and guarantee does not leave on workpieces processing surface
Small ripple (intermediate frequency error).
It is to be illustrated to what preferable implementation of the invention carried out, but the invention is not limited to the implementation above
Example, those skilled in the art can also make various equivalent variations on the premise of without prejudice to spirit of the invention or replace
It changes, these equivalent deformations or replacement are all included in the scope defined by the claims of the present application.
Claims (19)
1. a kind of aspherics component burnishing device, which is characterized in that including
Carrier fluid carrier carries magnetorheological fluid on the carrier fluid carrier；
Magnet, the magnet generate magnetic field；
The magnetic field acts on the magnetorheological fluid, forms annular polishing tool.
2. aspherics component burnishing device according to claim 1, which is characterized in that the magnet is annular magnetic
Iron.
3. aspherics component burnishing device according to claim 2, which is characterized in that the annular magnet can
The axis of rotation, the rotary centerline of the annular magnet and the annular magnet has preset offset distance.
4. aspherics component burnishing device according to claim 3, which is characterized in that remember the offset distance with it is described
The ratio of the internal diameter of annular magnet is r, wherein 0 < r≤1/2.
5. aspherics component burnishing device according to claim 3, which is characterized in that the annular magnet connection
There is the first rotating device, first rotating device includes first motor and holds with the output axis connection of the first motor
Holder, the annular magnet are fixedly arranged on the load-bearing part, the output shaft of the axis of the annular magnet and the first motor
Axis the preset offset distance is set.
6. aspherics component burnishing device according to any one of claim 1 to 5, which is characterized in that also wrap
Moving parts is included, the moving parts can load the workpieces processing for needing to polish, and drive the workpieces processing in the ring
It is moved on shape polishing tool.
7. aspherics component burnishing device according to claim 6, which is characterized in that the moving parts is six
Axis robot.
8. aspherics component burnishing device according to claim 6, which is characterized in that
Electric field is equipped between the moving parts and the carrier fluid carrier, the electric field strength of the moving parts side is greater than described
The electric field strength of carrier fluid carrier side；
Alternatively,
Electric field is equipped between the workpieces processing and the carrier fluid carrier, the electric field strength of the workpieces processing side is greater than described
The electric field strength of carrier fluid carrier side.
9. aspherics component burnishing device according to claim 8, which is characterized in that the workpieces processing and institute
It states and is equipped with electric field between carrier fluid carrier, the cross-sectional area of the workpieces processing is less than the cross-sectional area of the carrier fluid carrier.
10. aspherics component burnishing device according to claim 9, which is characterized in that the workpieces processing with
The moving parts insulation connection.
11. aspherics component burnishing device according to claim 8, which is characterized in that the moving parts packet
Work piece holder is included, electric field is equipped between the work piece holder and the carrier fluid carrier, and the cross-sectional area of the work piece holder is big
In the cross-sectional area of the carrier fluid carrier.
12. aspherics component burnishing device according to claim 11, which is characterized in that the work piece holder is exhausted
Edge is set on the moving parts.
13. aspherics component burnishing device according to claim 9 or 10, which is characterized in that setting power supply, institute
The two poles of the earth for stating power supply are connect with the workpieces processing and the carrier fluid carrier respectively.
14. aspherics component burnishing device according to claim 13, which is characterized in that the power supply is exchange
Power supply is equipped with brush between the AC power source and the workpieces processing, by subtracting between the brush and the workpieces processing
The spring that shakes connects.
15. aspherics component burnishing device according to claim 11 or 12, which is characterized in that setting power supply,
The two poles of the earth of the power supply are connect with the work piece holder and the carrier fluid carrier respectively.
16. aspherics component burnishing device according to claim 15, which is characterized in that the power supply is exchange
Power supply is equipped with brush between the AC power source and the work piece holder, by subtracting between the brush and the work piece holder
The spring that shakes connects.
17. aspherics component burnishing device according to claim 6, which is characterized in that the carrier fluid carrier connects
It is connected to the second rotating device, second rotating device includes the second motor and the output axis connection with second motor
Carrier main shaft, the carrier fluid carrier are fixedly arranged on the carrier main shaft.
18. aspherics component burnishing device according to claim 17, which is characterized in that the carrier main shaft with
Insulating layer is equipped between the carrier fluid carrier.
19. aspherics component burnishing device according to claim 17, which is characterized in that second motor
Output shaft make-up is fixed to be equipped with the first synchronizing wheel, and the carrier main shaft make-up is fixed to be equipped with the second synchronizing wheel, and described first is synchronous
Wheel is rotated synchronously with second synchronizing wheel.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910522269.9A CN110227983A (en) | 2019-06-17 | 2019-06-17 | Aspheric surface optical element polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910522269.9A CN110227983A (en) | 2019-06-17 | 2019-06-17 | Aspheric surface optical element polishing device |
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| CN110227983A true CN110227983A (en) | 2019-09-13 |
Family
ID=67860029
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910522269.9A Pending CN110227983A (en) | 2019-06-17 | 2019-06-17 | Aspheric surface optical element polishing device |
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| US5157871A (en) * | 1991-03-11 | 1992-10-27 | Matsushita Electric Industrial Co., Ltd. | Spindle assembly for use in a lens polisher |
| WO1997048521A1 (en) * | 1996-06-17 | 1997-12-24 | Taylor Hobson Limited | Electromechanical actuator |
| CN1872495A (en) * | 2006-06-30 | 2006-12-06 | 西安工业大学 | Magnetic rheologic flexible, fine grinding, polishing equipment and method |
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Application publication date: 20190913 Assignee: Shenzhen Meifei Precision Co.,Ltd. Assignor: Southern University of Science and Technology Contract record no.: X2021980002166 Denomination of invention: Polishing device for aspheric optical components License type: Exclusive License Record date: 20210326 |